CN106932382A - A kind of method that laser cleaning effect judges - Google Patents
A kind of method that laser cleaning effect judges Download PDFInfo
- Publication number
- CN106932382A CN106932382A CN201710259215.9A CN201710259215A CN106932382A CN 106932382 A CN106932382 A CN 106932382A CN 201710259215 A CN201710259215 A CN 201710259215A CN 106932382 A CN106932382 A CN 106932382A
- Authority
- CN
- China
- Prior art keywords
- laser
- signal
- time
- cleaning effect
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
Abstract
The present invention relates to a kind of method judged laser cleaning effect by time resolved spectroscopy.Including step：Selection Detection wavelength；Laser irradiates thing surface to be cleaned, obtains plasma spectral line；Obtain selected given wavelength time resolved spectroscopy signal；Time-varying characteristics according to acquired signal judge cleaning performance.The present invention is judged cleaning performance by time resolved spectroscopy, it is a kind of new determination methods, Gao Zhongying laser cleaning effect can be carried out in real time, fast and accurately judge, for closed-loop control provides basis, substantially reduce the damage risk of metal substrate, high-efficiency washing purpose is reached, the features such as with efficiency high, low cost.
Description
Technical field
The invention belongs to laser cleaning field, and in particular to a kind of method that laser cleaning effect judges.
Background technology
In recent decades, during laser technology has penetrated into many high-tech areas, laser cleaning is used as a kind of new clear
Mode is washed, starts the traditional cleaning technique of substitution.The chemical solvent that traditional chemical cleaning method is used is volatile, to operation
The health of personnel causes harm and easily causes environmental pollution.Meanwhile, chemical reagent reaction is slow, generally requires to heat, clearly
Wash less efficient, chemicals residual can cause different degrees of corrosion to substrate.Conventional physical removal rule is caused not to substrate
With the damage of degree, inconvenient finishing operations and less efficient.Laser cleaning technique is irradiated using the laser beam of high power density
In sample surfaces, make sample surfaces material to be cleaned peeling-off or the effect such as ablation departs from body surface.The cleaning method
For contactless, it is possible to achieve remote-controlled operation and efficiently, selectively clean pollutant, and not wounded substrate.Laser is clear
The pollutant that can clean various substrate surfaces is washed, environmental pollution is small, reach cleanliness factor very high, low cost, its advantage is
What Conventional cleaning methods can not compare.
During laser cleaning, to avoid the damage of substrate, it is necessary to by laser energy density be chosen at cleaning threshold with
Between substrate damage threshold value, and use appropriate action time（For continuous wave laser）Or umber of pulse（For pulse laser）.
When laser energy density is too high or action time is long（For pulse laser for effect number of pulses is excessive）When, substrate will be caused
Damage.To realize lossless cleaning, a kind of technology that on-line checking can be carried out to laser cleaning effect is needed badly, can effectively to swashing
Light cleaning state (in cleaning, clean to finish and damaged with substrate) is judged, the laser cleaning for supporting closed-loop feedback to control
Realization.Conventional laser cleaning detection method is full spectrum determining method and image analytical method at present.Full spectrum determining method passes through
The plasma luminescence spectrum of spectrometer measurement laser cleaning process, when the corresponding optic spectrum line of base metals reach some strength and
The intensity decreases of the corresponding optic spectrum line of matter-element to be cleaned element to a certain extent when, be judged to that cleaning is completed.However, being limited to light
The characteristic and price of spectrometer, the method have detection rates low, the shortcoming of high cost.Image analytical method is gathered by camera treats clear
The image on the surface at place is washed, by graphical analysis and identification, the judgement to cleaning performance is realized.It is limited to the frame per second and valency of camera
Lattice, it is low to there is detection speed rate in the method, and algorithm is complicated, the shortcoming of high cost.Above two method is all difficult to Gao Zhongying
The on-line monitoring of laser cleaning under laser.
In order to solve the above problems, the present invention proposes one kind and judges laser using spectral signature peak time resoluting signal
The method of cleaning performance, the method has detection rates fast compared to the determination methods of full spectrum and image, and low cost can be realized
The advantage of on-line checking.
The content of the invention
It is an object of the invention to provide a kind of method that laser cleaning effect judges, the method is special by detecting thing to be cleaned
The time resolution signal of element plasma spectrum is levied, cleaning performance is judged according to signal time-varying characteristics.The decision method is compared
In full spectrum and the method based on image recognition is greatly improved judging cleaning performance speed, on-line checking is capable of achieving.
The present invention relates to a kind of method that laser cleaning effect judges, judged by spectral signature peak time resoluting signal
Cleaning performance, this feature is comprised the following steps：
S101 selects Detection wavelength；
S102 laser irradiates thing surface to be cleaned, obtains plasma optical emission spectroscopy line；
S103 obtains selected given wavelength time resolved spectroscopy signal in S101；
The time-varying characteristics of S104 signals according to acquired in judge cleaning performance.
A kind of above-mentioned laser cleaning effect determining method, it is characterised in that Detection wavelength be element contained by surface to be cleaned it
One corresponding plasma spectral line.
The method that a kind of above-mentioned laser cleaning effect judges, it is characterised in that the luminescence of plasma is that laser action is clear
Wash object generation.
Above-mentioned a kind of laser cleaning effect determining method, it is characterised in that the laser is pulse laser, and pulsewidth is shorter than
It is delicate, can be exported by solid state laser, gas laser, optical fiber laser, semiconductor laser etc..
The method that a kind of above-mentioned laser cleaning effect judges, it is characterised in that the time resolved spectroscopy signal is to be selected
Luminous intensity changes with time signal at wavelength.
The method that a kind of above-mentioned laser cleaning effect judges, it is characterised in that the time varying characteristic of the signal is the longevity of signal
Intensity of signal etc. changes over time related characteristic to signal after life, certain time-delay.
The method that a kind of above-mentioned laser cleaning effect judges, it is characterised in that the judgement of the cleaning performance is according to being adopted
The time-varying characteristics for collecting signal are carried out, i.e., the signal lost of life is extremely consistent with inverse bremstrahlen or is more than the plan bremstrahlen longevity in time delay
Signal intensity is less than setting value after life, then judge to clean up, and no person judges that cleaning is not completed.
Due to the implementation of above technical scheme, the present invention has the following advantages that compared with prior art：
The present invention is judged cleaning performance by time resolved spectroscopy, is a kind of new determination methods, can be to Gao Zhongying
Laser cleaning effect carries out in real time, fast and accurately judge, for closed-loop control provides basis, substantially reducing the damage of metal substrate
Cold danger, reaches high-efficiency washing purpose, additionally, the features such as also having efficiency high, low cost.
Brief description of the drawings
Fig. 1 is the method flow diagram that a kind of laser cleaning effect of the present invention judges；
Fig. 2 is the square law device figure that a kind of laser cleaning effect of the present invention judges；
In figure：1- lasers, 2- speculums, 3- lens, 4- samples, 5- fibre-optical probes, 6- spectrum separate sections, 7- photodetections
Device, 8- high-speed signal acquisitions and processing module；
Fig. 3（a）~（d）For paint laser action in plasma spectrometry at 375nm（Correspondence titanium elements）Time response it is bent
Sample is in 1 pulse of laser action, 5 pulses, 10 pulses, the time obtained during 15 pulses in line, respectively embodiment
Characteristic curve；
Design sketch after Fig. 4 paint cleanings, wherein（a）It is 10 pulses,（b）It is 15 pulses.
Specific embodiment
The present invention is a kind of laser cleaning effect determination methods based on time resolved spectroscopy, and the method is visited by detector
Characteristic element time resolution signal in plasma spectrum is surveyed, cleaning performance is judged according to signal time-varying characteristics.
It is of the present invention to judge that cleaning performance has a two ways according to time-varying characteristics, one kind be according to the signal life-span whether
Foreshorten to it is consistent with inverse bremstrahlen judged, i.e. whether the signal life-span consistent with setting value, if the signal life-span is more than setting
Definite value then illustrates not clean up, if the signal life-span is less than or equal to setting value, illustrates to clean up；Another kind is according to letter
Number after time delay is more than the inverse bremstrahlen life-span, signal intensity whether be less than the intensity of a certain time delay point of setting value, i.e. signal
It is no consistent with setting value, illustrate not clean up if signal intensity is more than setting value, if signal intensity is less than or equal to setting
Value, then explanation is cleaned up.In order to obtain good signal to noise ratio, the setting value could be arranged to detector during unglazed signal input
More than 2 times of noise signal.
Fig. 2 is the square law device figure that a kind of laser cleaning effect of the present invention judges, cleaning laser 1 used sends sharp
Light beam focuses on the surface of cleaning materials 4 by speculum 2 and lens 3, produces plasma, and luminescence of plasma is by fibre-optical probe
5 are transferred into spectrum separate section 6, and the light of previously selected characteristic element corresponding wavelength will be arrived by the spectrum separate section
Up to detector surface 7；Detector converts optical signals to electric signal, is sampled and is analyzed by high-Speed Data-Acquisition Module 8
Treatment.If the signal lost of life is extremely consistent with inverse bremstrahlen or signal intensity is less than after time delay is more than the inverse bremstrahlen life-span
Setting value, then judge to clean up, and no person judges that cleaning is not completed.Wherein, spectrum separate section 6 can be monochromator, also may be used
Think the narrow band pass filter of correspondence characteristic wavelength to be measured.
Embodiment 1
It is the Nd of the tune Q of 1064nm that laser 1 uses wavelength in the present embodiment:YAG pulsed solid stale lasers, pulsewidth is 7ns, frequency
1 ~ 100Hz of rate is adjustable, and energy range is 0 ~ 100mJ, is focused it on white paint sample by lens, it is produced laser
Plasma；Speculum 2 is used to 45 ° of plating deielectric-coating lens being all-trans of 1064nm wavelength；Lens 3 use focal length
The lens of 200mm；The Al substrates that the base plate of sample 4 is used, it is the white auto spray painting of Bao Cili companies production to paint, and paint is uniform
Substrate surface is sprayed on, thickness is about 150 μm；The fibre diameter of fibre-optical probe 5 is 400 μm；Spectrum separate section 6 is used
The grating spectrograph of Princeton Instruments companies model Acton SP2750；Photodetector 7 is used
THORLABS companies model APD430A2 (/M) detector, investigative range is 200-1000nm, with a width of 400MHz；High speed number
The high speed acquisition instrument of Beijing Kun Chi companies models ADQ412 is used according to acquisition processing module 8.
Specifically, laser transmitting light beam passes through lens focus on target cleaning sample surface, laser-induced breakdown is formed
Plasma spectrometry.The continuous bias light that initial stage can cause against a piece of wood serving as a brake to halt a carriage cause electron radiation, the characteristic spectrum of atom is easy to be submerged in
In continuous bias light.Due to background light intensity decays quickly, the characteristic spectrum radiation intensity decay of atom is relatively slow, with
The ratio between the passage of time, atomic features spectral signal and background are gradually stepped up.Metallic substrates laser pulse effect under grade from
Daughter is luminous also to intend bremstrahlen, high with intensity, duration short characteristic.Then can be right according to signal time-varying characteristics
Its source is made a distinction, and cleaning performance is judged；The titanium elements in paint are selected in the present embodiment as characteristic element, choosing
Determine characteristic peaks of the element at 375nm.
Plasma spectrometry is further transferred into spectrum separate section with fibre-optical probe, characteristic element titanium is isolated and is existed
Spectral line at 375nm, is sent to detector surface, and detector converts optical signals to electric signal, by high-speed data acquisition mould
Block is analyzed treatment to signal；The signal time-varying figure of collection is as shown in figure 3, wherein（a）The signal detected during for 1 pulse,
（b）The signal detected during for 5 pulses（c）The signal detected during for 10 pulses（d）The signal detected during for 15 pulses.
It can be seen that time varying signal from（a）Arrive（d）Gradually changing, it can be seen that during 10 pulses, substantially
It is continuous background signal, background signal is readily apparent that during 15 pulses.Time-varying characteristics according to signal curve are it is recognised that work as
During laser action painted surface, signal starts change, and with the increase of umber of pulse, paint starts gradually to be cleaned, this
When signal also begin to it is gradual developed to continuous background signal, until signal develops into continuous bias light completely, in this process
Middle paint is completely removed clean.
Further the cleaning performance figure to 10 pulses and 15 pulses after laser cleaning is contrasted, as shown in Figure 4；
As can be seen that when laser pulse is 10 pulses, paint is cleaned up completely, and in 15 pulses, substrate is
It is damaged；The signal intensity in the signal life-span of the time response curve after 10 impulse actions and a certain time delay point is set to initially
Value, judges laser cleaning effect in two ways；One kind is in inverse bremstrahlen（The present embodiment is against the bremstrahlen time
About 500ns）After the continuous bias light for producing disappears, judged with the signal life-span, if the signal life-span is more than setting（500ns）
Value then illustrates not clean up, if the signal life-span is less than or equal to setting value, illustrates to clean up；Another kind is according to a certain
Time delay point（The present embodiment is taken at 1 μ s）Signal intensity is judged, if signal intensity is more than setting value（6.15mv）Then explanation does not have
Clean up, if signal intensity is less than or equal to setting value, illustrate to clean up.Such that it is able to according to time resolved spectroscopy come
Accurately and rapidly judge cleaning performance, the judgement for laser cleaning effect is significant.
Cleaning performance can be carried out by this method of laser-induced breakdown time resolved spectroscopy in sum quickly,
Accurately judge.
Claims (7)
1. a kind of method that laser cleaning effect judges, it is characterised in that imitated to cleaning using spectral signature peak time resoluting signal
Fruit is judged, is comprised the following steps：
S101 selects Detection wavelength；
S102 laser irradiates thing surface to be cleaned, obtains plasma optical emission spectroscopy line；
S103 obtains selected given wavelength time resolution signal in S101；
The time-varying characteristics of S104 signals according to acquired in judge cleaning performance.
2. a kind of laser cleaning effect determining method according to claim 1, it is characterised in that Detection wavelength is table to be cleaned
The corresponding plasma spectral line of one of element contained by face.
3. a kind of laser cleaning effect determining method according to claim 1, it is characterised in that the luminescence of plasma is
Laser action cleaning object is produced.
4. a kind of laser cleaning effect determining method according to claim 1, it is characterised in that the laser is pulse laser,
And pulsewidth is shorter than microsecond, can be exported by solid state laser, gas laser, optical fiber laser, semiconductor laser etc..
5. a kind of laser cleaning effect determining method according to claim 1, it is characterised in that the time resolution signal is
Selected given wavelength luminous intensity changes with time signal.
6. a kind of laser cleaning effect determining method according to claim 1, it is characterised in that the time varying characteristic of the signal
For intensity of signal etc. changes over time related characteristic to signal after life-span, the certain time-delay of signal.
7. the method that a kind of laser cleaning effect according to claim 1-6 judges, it is characterised in that the cleaning performance
Judgement is carried out according to signal collected time-varying characteristics, i.e., the signal lost of life is extremely consistent with inverse bremstrahlen or big in time delay
Signal intensity is less than setting value after the bremstrahlen life-span is intended, then judge to clean up, and no person judges that cleaning is not completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710259215.9A CN106932382B (en) | 2017-04-20 | 2017-04-20 | Method for judging laser cleaning effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710259215.9A CN106932382B (en) | 2017-04-20 | 2017-04-20 | Method for judging laser cleaning effect |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106932382A true CN106932382A (en) | 2017-07-07 |
| CN106932382B CN106932382B (en) | 2020-10-09 |
Family
ID=59437827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710259215.9A Active CN106932382B (en) | 2017-04-20 | 2017-04-20 | Method for judging laser cleaning effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106932382B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108544090A (en) * | 2018-04-19 | 2018-09-18 | 广州德擎光学科技有限公司 | A kind of laser processing state recognition methods under spectrum ionic state |
| CN109365410A (en) * | 2018-10-17 | 2019-02-22 | 北京航天控制仪器研究所 | A kind of processing head device that realizing efficient laser cleaning and cleaning method |
| CN110653223A (en) * | 2019-09-26 | 2020-01-07 | 厦门理工学院 | Laser cleaning monitoring device and monitoring method thereof and laser cleaning machine |
| CN113102387A (en) * | 2021-03-26 | 2021-07-13 | 国网上海市电力公司 | Laser decontamination method for electric power product |
| CN113305106A (en) * | 2021-06-03 | 2021-08-27 | 四川大学 | Method for cleaning micro-nano particle pollutants by laser and application |
| CN113533304A (en) * | 2021-07-06 | 2021-10-22 | 长江大学 | Method and device for judging laser descaling effect |
| CN114345840A (en) * | 2021-12-29 | 2022-04-15 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Online optimization method for energy density in process of cleaning high-temperature oxide layer on surface of stainless steel by pulse laser |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4750822A (en) * | 1986-03-28 | 1988-06-14 | Therma-Wave, Inc. | Method and apparatus for optically detecting surface states in materials |
| JP2001071164A (en) * | 1999-09-07 | 2001-03-21 | Mitsubishi Heavy Ind Ltd | Method for monitoring of part to be worked and device therefor |
| JP2002159926A (en) * | 2000-11-27 | 2002-06-04 | Japan Steel Works Ltd:The | Device and method for detecting cleaned state of substrate surface during laser cleaning |
| US20030020904A1 (en) * | 2001-07-27 | 2003-01-30 | Sachio Uto | Apparatus and method for inspecting pattern |
| JP2009210264A (en) * | 2008-02-29 | 2009-09-17 | Mitsubishi Heavy Ind Ltd | Gas monitoring system of treatment facility |
| CN102735658A (en) * | 2012-07-17 | 2012-10-17 | 中国科学技术大学 | Time resolution laser-induced breakdown spectroscopy measuring method |
| CN104730040A (en) * | 2013-12-18 | 2015-06-24 | 王宏 | Portable laser induced spectrum detection system |
| CN105717135A (en) * | 2015-11-11 | 2016-06-29 | 南开大学 | Hyperspectral imaging-based method for monitoring laser cleaning process |
| CN106033057A (en) * | 2015-03-10 | 2016-10-19 | 中国科学院微电子研究所 | Silicon chip surface granular pollutant component nondestructive rapid online detection method and system |
-
2017
- 2017-04-20 CN CN201710259215.9A patent/CN106932382B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4750822A (en) * | 1986-03-28 | 1988-06-14 | Therma-Wave, Inc. | Method and apparatus for optically detecting surface states in materials |
| JP2001071164A (en) * | 1999-09-07 | 2001-03-21 | Mitsubishi Heavy Ind Ltd | Method for monitoring of part to be worked and device therefor |
| JP2002159926A (en) * | 2000-11-27 | 2002-06-04 | Japan Steel Works Ltd:The | Device and method for detecting cleaned state of substrate surface during laser cleaning |
| US20030020904A1 (en) * | 2001-07-27 | 2003-01-30 | Sachio Uto | Apparatus and method for inspecting pattern |
| JP2009210264A (en) * | 2008-02-29 | 2009-09-17 | Mitsubishi Heavy Ind Ltd | Gas monitoring system of treatment facility |
| CN102735658A (en) * | 2012-07-17 | 2012-10-17 | 中国科学技术大学 | Time resolution laser-induced breakdown spectroscopy measuring method |
| CN104730040A (en) * | 2013-12-18 | 2015-06-24 | 王宏 | Portable laser induced spectrum detection system |
| CN106033057A (en) * | 2015-03-10 | 2016-10-19 | 中国科学院微电子研究所 | Silicon chip surface granular pollutant component nondestructive rapid online detection method and system |
| CN105717135A (en) * | 2015-11-11 | 2016-06-29 | 南开大学 | Hyperspectral imaging-based method for monitoring laser cleaning process |
Non-Patent Citations (3)
| Title |
|---|
| R.T. WAINNER 等: "Analysis of environmental lead contamination:comparison of LIBS field and laboratory instruments", 《SPECTROCHIMICA ACTA PART B》 * |
| 佟艳群 等: "基于等离子体光强信号的激光除锈实时监测系统", 《中国激光》 * |
| 施曙东 等: "从激光清洗专利看激光清洗技术的发展", 《清洗世界》 * |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108544090A (en) * | 2018-04-19 | 2018-09-18 | 广州德擎光学科技有限公司 | A kind of laser processing state recognition methods under spectrum ionic state |
| CN108544090B (en) * | 2018-04-19 | 2020-06-16 | 广州德擎光学科技有限公司 | Laser processing state identification method under spectral ion state |
| CN109365410A (en) * | 2018-10-17 | 2019-02-22 | 北京航天控制仪器研究所 | A kind of processing head device that realizing efficient laser cleaning and cleaning method |
| CN110653223A (en) * | 2019-09-26 | 2020-01-07 | 厦门理工学院 | Laser cleaning monitoring device and monitoring method thereof and laser cleaning machine |
| CN110653223B (en) * | 2019-09-26 | 2021-10-29 | 厦门理工学院 | Laser cleaning monitoring device and monitoring method thereof and laser cleaning machine |
| CN113102387A (en) * | 2021-03-26 | 2021-07-13 | 国网上海市电力公司 | Laser decontamination method for electric power product |
| CN113305106A (en) * | 2021-06-03 | 2021-08-27 | 四川大学 | Method for cleaning micro-nano particle pollutants by laser and application |
| CN113305106B (en) * | 2021-06-03 | 2022-08-02 | 四川大学 | Method for cleaning micro-nano particle pollutants by laser and application |
| CN113533304A (en) * | 2021-07-06 | 2021-10-22 | 长江大学 | Method and device for judging laser descaling effect |
| CN114345840A (en) * | 2021-12-29 | 2022-04-15 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Online optimization method for energy density in process of cleaning high-temperature oxide layer on surface of stainless steel by pulse laser |
| CN114345840B (en) * | 2021-12-29 | 2022-12-27 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Online optimization method for energy density in process of cleaning high-temperature oxide layer on surface of stainless steel by pulse laser |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106932382B (en) | 2020-10-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106932382A (en) | A kind of method that laser cleaning effect judges | |
| CN101620183B (en) | Photoelectric double-pulse laser induced breakdown spectrograph and spectral analysis method | |
| JP6616432B2 (en) | Method of detecting steel sample components using multi-pulse laser induced plasma spectrum analyzer | |
| CN103529000A (en) | Single-light-source dual-wavelength LIBS (laser-induced breakdown spectroscopy) measurement device and method | |
| CN104374763A (en) | Adjustable reheating double pulse laser-induced breakdown spectroscopy device | |
| CN101196471A (en) | Soil heavy metal pollution quantification detecting system and detecting method | |
| CN112730383B (en) | Optical fiber array LIBS detection system for online detection | |
| CN108318459A (en) | Pulsed Laser induces the measuring device and measuring method of photoluminescence spectrum | |
| CN104374759A (en) | Atomic fluorescence spectrum device based on laser ablation plume | |
| CN204214783U (en) | One is adjustable heats double-pulse laser induced breakdown spectral device again | |
| JP2009288068A (en) | Analyzing method and analyzer | |
| CN109520974B (en) | Online detection system and detection method for heavy metals in drainage pipeline sludge | |
| CN108303410B (en) | Trace element and isotope automatic detection system thereof | |
| CN104062270A (en) | Laser induction element analysis device | |
| CN106338499A (en) | Element laser detection and analysis instrument and mineral element analysis method | |
| CN104515754B (en) | Laser plasma spectrometry device | |
| CN203606283U (en) | Single light source double-wavelength laser-induced breakdown spectroscopy measuring device | |
| CN204008463U (en) | A kind of device of measuring chromium constituent content in capsule for medicine | |
| CN106990051A (en) | Metal material sheet electron information lossless detection means and detection method | |
| CN105044051B (en) | A kind of multi-parameter portable water quality detection system based on LIBS | |
| Diego-Vallejo et al. | Laser-induced plasma investigations during material processing | |
| CN108333161B (en) | Pulse laser multiple round trip utilization device based on optical fiber and fluorescence signal detection method | |
| CN204214781U (en) | A kind of atomic fluorescence spectrophotometry device based on laser ablation plume | |
| CN108072635A (en) | A kind of method of ingredient in analytical equipment real-time online measuring Improving Glass Manufacturing Processes using Laser induced plasma spectroscopy | |
| CN110000162A (en) | The method of Investigation of Laser Delacquer-ing effect is determined using vibration signal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |