CN106863994A - A kind of preparation method of electric charge self- recoverage electret film - Google Patents

A kind of preparation method of electric charge self- recoverage electret film Download PDF

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Publication number
CN106863994A
CN106863994A CN201510915591.XA CN201510915591A CN106863994A CN 106863994 A CN106863994 A CN 106863994A CN 201510915591 A CN201510915591 A CN 201510915591A CN 106863994 A CN106863994 A CN 106863994A
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film
electric charge
preparation
electret
composite
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CN106863994B (en
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周军
钟俊文
钟其泽
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/14Printing or colouring
    • B32B38/145Printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/06Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/16Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/0008Electrical discharge treatment, e.g. corona, plasma treatment; wave energy or particle radiation

Abstract

The invention discloses a kind of preparation method of electric charge self- recoverage electret film, including S1:The recess patterns of rule are imprinted out on the first film or the second film using thermal marking method;The first film refers to the macromolecule membrane that negative electrical charge is kept after corona polarizing, and the second film refers to the macromolecule membrane that positive charge is kept after corona polarizing;S2:After carrying out polarization process to the first film or the second film using corona polarizing method so that electric charge on the first film or the second film band, and the first film and second film are attached together;S3:Hot pressing thawing treatment is carried out to the first film being attached together and the second film using hot pressing film build method, it is the composite electret film that the first film lower floor is the second film and middle hole structure to form upper strata;S4:After polarization process being carried out using negative high voltage corona polarizing method to composite electret film so that composite electret film keeps electric charge;When by external interference, its electric charge for keeping can disappear the electric charge that composite electret film is kept, and after external interference disappears, composite electret film can adsorb the electric charge in the external world again.

Description

A kind of preparation method of electric charge self- recoverage electret film
Technical field
The invention belongs to power generating component manufacture association area, more particularly, to a kind of electric charge from extensive The preparation method of multiple electret film.
Background technology
Electret refer to can standby storage space electric charge and dipole electric charge dielectric substance, its can by with In manufacture electrostatic capacitance generator, therefore electret is in energy collection field particularly data-collection field With quite varied and important application.An important indicator for weighing electret properties is that its is long-term The ability of electric charge is kept, excellent electret just has the ability for keeping a large amount of electric charges steadily in the long term. Classical modern electret have polytetrafluoroethylene (PTFE) (PTFE), FEP fluorinated ethylene propylene copolymer (FEP), Polyethylene (PE) and polypropylene (PP) etc..
But, above-mentioned these electrets are mostly space charge electret, its electric charge for being kept The overwhelming majority is located at electret film surface.By external interference, when such as touching water, kept Electric charge will quickly lose and can not recover automatically.Therefore, this area exists and develops new, The demand of the strong electret of external interference resistance.
The content of the invention
For the defect of prior art, the invention provides a kind of system of electric charge self- recoverage electret film Preparation Method, it is intended that be prepared using hot pressing film forming and corona polarizing technique, and to film forming The critical processes such as material, membrance casting condition and polarization condition are controlled, can prepare good mechanical property, The retainable quantity of electric charge is big, strong antijamming capability and possess the electret film of self- recoverage charge capability, Aim to solve the problem that traditional electret problem that electric charge is easy to run off under high humidity environment.
The invention provides a kind of preparation method of electric charge self- recoverage electret film, comprise the steps:
S1:The depression figure of rule is imprinted out on the first film or the second film using thermal marking method Case;The first film refers to the macromolecule membrane that negative electrical charge is kept after corona polarizing, described second Film refers to the macromolecule membrane that positive charge is kept after corona polarizing;The technique of the thermal marking method Parameter includes:Hot pressing temperature is 80 DEG C to 300 DEG C, and pressure is 1000N to 30000N;The depression The length, width and height of pattern are between 50 to 5000 μm;
S2:The first film or second film are carried out at polarization using corona polarizing method After reason so that electric charge on the first film or the second film band, and by the first film It is attached together with second film;Polarizing voltage is -5kV to -15kV in the corona polarizing method Or 5kV to 15kV;
S3:Using hot pressing film build method to the first film and second film that are attached together Hot pressing thawing treatment is carried out, upper strata is formed for the first film lower floor is the second film and middle hole knot The composite electret film of structure;
S4:After polarization process being carried out using negative high voltage corona polarizing method to the composite electret film, So that the composite electret film keeps electric charge;The electric charge that the composite electret film is kept exists During by external interference, its electric charge for keeping can be disappeared, and after external interference disappears, described being combined is stayed Polar body film can adsorb the electric charge in the external world again.
Further, the material of the first film is ethylene-vinyl acetate copolymer, nylon, vinegar Vinyl acetate copolymer, in polyethylene terephthalate, polyethylene, polypropylene, polyimides One kind or its combination;The material of second film be ethylene-vinyl acetate copolymer, nylon, Vinyl acetate co-polymer, polyethylene terephthalate, polyethylene, polypropylene, polyimides In one kind or its combination.
Further, the thickness of the first film is 10 μm to 100 μm;Second film Thickness be 10 μm to 100 μm.
Further, in step S3, the length, width and height of described hole are between 50 to 5000 μm.
Further, in step S3, in the hot pressing film build method hot pressing temperature be 80 DEG C extremely 300℃;Pressure is 10N to 1000N.
Further, in step S4, composite electret film at the middle and upper levels described first thin during polarization Film is just to polarization pin.
Further, in step S4, the polarization electricity employed in the negative high voltage corona polarizing method Pressure is relevant with the size of composite electret film Hole, and the more big voltage then used of bore hole size is higher.
Further, the polarizing voltage is -5kV to -15kV.
Further, the thickness of the composite electret film is 20 μm to 200 μm.
It is thin present invention also offers a kind of electric charge self- recoverage electret based on above-mentioned preparation method acquisition Film.
In general, by the contemplated above technical scheme of the present invention compared with prior art, mainly Possesses following technological merit:
(1) present invention provide electret film preparation method have be easy to manipulation, it is with low cost and suitable The features such as high-volume large-scale production.Because processing temperature and pressure selection are suitable, prepared is compound Electret film good mechanical property, it is not easy to come off or ftracture.
(2) due to being internally formed electric dipole in film rule hole after corona polarizing, therefore press The retainable quantity of electric charge of composite electret film institute prepared according to the method that the present invention is provided is big, in the external world After interference disappears, the electric charge that it loses can recover again automatically, possess traditional electret film material institute The antijamming capability not possessed.
(3) all it is that there is flexible macromolecule membrane due to preparation principle, therefore is provided according to the present invention The composite electret film for preparing of method there is flexible bendable, can be used for preparing flexible Electrostatic induction electricity generator.Because composite electret film keeps in which can have steady in a long-term and anti-external interference A large amount of electric charges, thus it is big using flexible generator output prepared by such electret film, and with more Broad application field.
Brief description of the drawings
Fig. 1 is the schematic cross-section according to composite electret film of the invention, this kind of composite electret Recess patterns are stamped on topmost thin film in film;
In Fig. 2, a is the digital photograph according to composite electret film of the invention;B is according to this hair The cross-sectional scans electron microscope of bright composite electret film;
Fig. 3 is by inside and outside distribution of charges after high voltage polarization according to composite electret film of the invention Figure;
A is according to the surface potential-time decay diagram of composite electret film of the invention in Fig. 4;b It is to be replied and global attenuation figure according to the surface potential-water process number of times of composite electret film of the invention Show;
In all of the figs, identical reference be used for represent identical element or structure, wherein:1 It is the first film, 2 is the second film, and 3 is recess patterns, and 4 is electric dipole.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with accompanying drawing And embodiment, the present invention will be described in further detail.It should be appreciated that described herein specific Embodiment is only used to explain the present invention, is not intended to limit the present invention.
The invention belongs to power generating component manufacture association area, it is related to a kind of with by after external interference Charge loss, and interference possesses the new electret film preparation side of electric charge auto restore facility after disappearing Method, obtained electret film preparation method is simple, good mechanical property, the retainable quantity of electric charge are big, The strong advantage of external interference resistance so that the flexible generator tool prepared using this kind of electret film There is broader application field.
The invention provides a kind of preparation method of charge-restoring electret film;Using hot pressing film forming and Corona polarizing technique is prepared, and filmogen is selected, the key such as membrance casting condition and polarization condition Technique is studied and designed, mutually should be able to processing machinery performance is good, the retainable quantity of electric charge big, Strong antijamming capability, the new excellent electret film material for possessing self- recoverage charge capability, while tool It is standby to be easy to manipulation, with low cost and the features such as be suitable to high-volume large-scale production so as to utilize this kind of electret Flexible generator prepared by body thin film has broader application field.
To achieve the above object, it is proposed, according to the invention, a kind of preparation of charge-restoring electret film is provided Method, the electret film can be used for preparing flexible generator, be applied to data-collection field.Tool Body ground, it is using hot pressing film-forming process that two kinds of macromolecular materials are compressed together, form middle regular The structure of the composite electret film of hole.
Preparation method the method for charge-restoring electret film provided in an embodiment of the present invention, specific bag Include the following steps:
A () chooses two kinds of high molecular film materials, one of which easily keeps negative electricity after corona polarizing Lotus, is named as the first film 1;Another kind easily keeps positive charge after corona polarizing, is named as second Film 2.The first film 1 is selected from following material:Ethylene-vinyl acetate copolymer, nylon, vinyl acetate Ester copolymer, the one kind in polyethylene terephthalate, polyethylene, polypropylene, polyimides Or its combination;Second film 2 is selected from following material:Ethylene-vinyl acetate copolymer, nylon, vinegar Vinyl acetate copolymer, in polyethylene terephthalate, polyethylene, polypropylene, polyimides One kind or its combination.
B () imprints out the recessed of rule using hot press printing technology on the film 2 of the first film 1 or second Pattern is fallen into, during hot padding, the hot pressing temperature for using is 80 DEG C to 300 DEG C, because institute in step (a) The melting range of the macromolecular material stated is all within this range;The pressure for using for 1000N to 30000N, Recess patterns can be effectively formed under this pressure limit can prevent polymeric membrane damaged again;The rule of formation Then between 50 to 5000 μm, the recess patterns of this size contribute to the length, width and height of recess patterns Electric dipole is formed during follow-up corona polarizing.
C () causes that the film 2 of the first film 1 or second takes electric charge using corona polarizing method, from And enable that two pieces of films are entirely attached together.Polarizing voltage scope be -5kV to -15kV or Person is 5kV to 15kV, and in the range of this polarizing voltage, 1 or second film of the first film 2 can be fully Ground adsorption charge, so as to form strong Electrostatic Absorption.
(d) using hot pressing film technique by the film 2 of the first film 1 and second being attached together tightly Ground hot pressing is melted in together, forms upper strata for there is hole the centre that the lower floor of the first film 1 is the second film 2 The composite electret film of hole structure, hole length, width and height are between 50 to 5000 μm.During hot pressing, The hot pressing temperature for using is 80 DEG C to 300 DEG C, and specifically chosen hot pressing temperature should be located at the first film 1 And second film 2 melting range between so that in hot pressing, the film 2 of the first film 1 or second Can soften and there is adhesion and another film then physical property is relatively constant;The pressure for using is 10N To 1000N, in this pressure limit, both enabled that the film 2 of the first film 1 and second fully binded The recess patterns of original formation will not be destroyed again.This kind of hot pressing film build method preparation method possesses just In manipulation, with low cost and the features such as be suitable to high-volume large-scale production, obtained film adhesion is firm, Good mechanical property, it is not easy to break.
E () causes that the composite electret film for preparing keeps electric charge using negative high voltage corona polarizing method, During polarization composite electret film at the middle and upper levels the first film 1 just to polarization pin.Polarizing voltage scope is -5kV To -15kV, specific polarizing voltage used is relevant with the size of composite electret film Hole, hole The more big voltage then used of size is higher.The composite electret film institute prepared using the above method The electric charge of holding for example touches water when by external interference, and its electric charge for keeping can disappear, when After external interference disappears, the electric charge in the external world can be adsorbed again by composite electret film after the regular hour (it is that the second film of ethylene-vinyl acetate copolymer 2 is obtained by polypropylene particularly for the first film 1 Sample, its recovery time half an hour to 3 it is small left and right) it is kept certain electricity again Lotus, can typically return back to the 90% of original value, and can undergo multiple external interference.
In embodiments of the present invention, the thickness of the first film 1 is 10 μm to 100 μm in step (a); The thickness of the second film 2 be 10 μm to 100 μm, the film in this kind of thickness range be easily worked and With good flexibility.The thickness of composite electret film obtained in step (c) be 20 μm extremely 200μm。
In embodiments of the present invention, the characteristics of prepared composite electret film has flexible bendable, Because used principle is all flexible macromolecule membrane, can be used to prepare flexible electrostatic sensing generating Machine.
In general, by the contemplated above technical scheme of the present invention compared with prior art, mainly Possesses following technological merit:
(1) present invention provide electret film preparation method have be easy to manipulation, it is with low cost and suitable The features such as high-volume large-scale production.Because processing temperature and pressure selection are suitable, prepared is compound Electret film good mechanical property, it is not easy to come off or ftracture.
(2) due to being internally formed electric dipole in film rule hole after corona polarizing, therefore press The retainable quantity of electric charge of composite electret film institute prepared according to the method that the present invention is provided is big, in the external world After interference disappears, the electric charge that it loses can recover again automatically, possess traditional electret film material institute The antijamming capability not possessed.
(3) all it is that there is flexible macromolecule membrane due to preparation principle, therefore is provided according to the present invention The composite electret film for preparing of method there is flexible bendable, can be used for preparing flexible Electrostatic induction electricity generator.Because composite electret film keeps in which can have steady in a long-term and anti-external interference A large amount of electric charges, thus it is big using flexible generator output prepared by such electret film, and with more Broad application field.
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with accompanying drawing And embodiment, the present invention will be described in further detail.It should be appreciated that described herein specific Embodiment is only used to explain the present invention, is not intended to limit the present invention.
Fig. 1 is according to a kind of schematic cross-section of electric charge self- recoverage electret film of the invention.Such as Fig. 1 Shown, the electret laminated film is made up of last time the first film 1 and the second film of lower floor 2, and first Has well-regulated pore space structure between the film 2 of film 1 and second.
Fig. 2 a are the digital photographs according to composite electret film of the invention, and Fig. 2 b are according to this hair The cross-sectional scans electron microscope of bright composite electret film.Fig. 2 a and Fig. 2 b clearly show that first The film 2 of film 1 and second is bound tightly together, and forms the composite electret of intermediate rule hole The structure of film.
In embodiments of the present invention, the first film 1 is selected from following material:Ethylene-vinyl acetate copolymer, Nylon, vinyl acetate co-polymer, it is polyethylene terephthalate, polyethylene, polypropylene, poly- One kind or its combination in acid imide;Second film 2 is selected from following material:Ethylene-vinyl acetate is total to Polymers, nylon, vinyl acetate co-polymer, polyethylene terephthalate, polyethylene, poly- third One kind or its combination in alkene, polyimides.
In embodiments of the present invention, using hot press printing technology on the film 2 of the first film 1 or second The recess patterns of rule are imprinted out, during hot padding, the hot pressing temperature for using is 100 DEG C to 200 DEG C;Adopt Pressure is 1000N to 30000N;The length, width and height of the regular recess patterns of formation 50 to Between 5000 μm.
In embodiments of the present invention, using hot pressing film technique by the He of the first film 1 being attached together Second film 2 tightly melt together by hot pressing, forms upper strata for the lower floor of the first film 1 is second thin The composite electret film of the middle hole structure of film 2.During hot pressing, the hot pressing temperature for using is 80 DEG C To 300 DEG C;The pressure for using is for 10N to 1000N.This kind of hot pressing film build method preparation method has Possess and be easy to manipulation, with low cost and the features such as be suitable to high-volume large-scale production, obtained film glues It is attached firm, good mechanical property.
In embodiments of the present invention, the thickness of the first film 1 is 10 μm to 100 μm in step (a); The thickness of the second film 2 is 10 μm to 100 μm.The thickness of obtained composite electret film is 20 μm to 200 μm
Fig. 3 is by inside and outside distribution of charges after high voltage polarization according to composite electret film of the invention Figure.It can be seen that after by high voltage polarization, in the regular hole between the film 2 of the first film 1 and second Air is ionized, and forms dipole, and dipole goes out negative electrical charge in the surface induction of the first film 1, the The surface induction of two film 2 goes out positive charge.
In embodiments of the present invention, the composite electret film for preparing is caused using negative high voltage polarization method Keep electric charge, during polarization composite electret film at the middle and upper levels the first film 1 just to polarization pin.Polarization electricity Pressure scope is -5kV to -15kV.
Fig. 4 a are, according to the surface potential-time decay diagram of composite electret film of the invention, to scheme 4b is to reply to be declined with overall according to the surface potential-water process number of times of composite electret film of the invention Subtract diagram.Fig. 4 a and Fig. 4 b prove that obtained composite electret film can for a long time keep larger The residual charge of amount, while the electric charge that composite electret film is kept is when by external interference, example Water is such as touched, its electric charge for keeping can disappear, after external interference disappears, by the regular hour Composite electret film can adsorb the electric charge in the external world again afterwards, it is kept certain electric charge again, And multiple external interference can be undergone.
In sum, by the contemplated above technical scheme of the present invention compared with prior art, mainly Possesses following technological merit:First, the electret film preparation method that the present invention is provided has to be easy to It is manipulation, with low cost and the features such as be suitable to high-volume large-scale production.Prepared composite electret film Good mechanical property, it is not easy to come off or ftracture;Secondly, prepared by the method for being provided according to the present invention The retainable quantity of electric charge of composite electret film institute is big, after external interference disappearance, its electric charge for losing Automatically can again recover, possess the antijamming capability not available for traditional electret film material;Finally, Composite electret film prepared by the method provided according to the present invention has the advantages that flexible bendable, can For preparing flexible electrostatic influence generator.Because composite electret film can have steady in a long-term and anti- External interference ground keeps a large amount of electric charge institutes, and the flexible generator prepared using such electret film is exported Greatly, and with broader application field.
As it will be easily appreciated by one skilled in the art that presently preferred embodiments of the present invention is the foregoing is only, It is not intended to limit the invention, all any modifications made within the spirit and principles in the present invention, etc. With replacement and improvement etc., should be included within the scope of the present invention.

Claims (10)

1. a kind of preparation method of electric charge self- recoverage electret film, it is characterised in that including following steps Suddenly:
S1:Using thermal marking method rule are imprinted out on the first film (1) or the second film (2) Recess patterns then;
The first film (1) refers to the macromolecule membrane that negative electrical charge is kept after corona polarizing, described Second film (2) refers to the macromolecule membrane that positive charge is kept after corona polarizing;
The technological parameter of the thermal marking method includes:Hot pressing temperature is 80 DEG C to 300 DEG C, and pressure is 1000N to 30000N;The length, width and height of the recess patterns are between 50 to 5000 μm;
S2:Using corona polarizing method to the first film (1) or second film (2) After carrying out polarization process so that the first film (1) or second film (2) take electricity Lotus, and the first film (1) and second film (2) are attached together;
Polarizing voltage is -5kV to -15kV or 5kV to 15kV in the corona polarizing method;
S3:Using hot pressing film build method to the first film (1) being attached together and described second Film (2) carries out hot pressing thawing treatment, forms upper strata for the first film (1) lower floor is the second film (2) and middle hole structure composite electret film;
S4:After polarization process being carried out using negative high voltage corona polarizing method to the composite electret film, So that the composite electret film keeps electric charge;The electric charge that the composite electret film is kept exists During by external interference, its electric charge for keeping can be disappeared, and after external interference disappears, described being combined is stayed Polar body film can adsorb the electric charge in the external world again.
2. preparation method as claimed in claim 1, it is characterised in that the first film (1) Material be ethylene-vinyl acetate copolymer, nylon, vinyl acetate co-polymer, poly terephthalic acid One kind or its combination in glycol ester, polyethylene, polypropylene, polyimides;
The material of second film (2) is ethylene-vinyl acetate copolymer, nylon, vinylacetate Copolymer, one kind in polyethylene terephthalate, polyethylene, polypropylene, polyimides or Person it combines.
3. preparation method as claimed in claim 1 or 2, it is characterised in that the first film (1) Thickness be 10 μm to 100 μm;The thickness of second film (2) is 10 μm to 100 μm.
4. preparation method as claimed in claim 1, it is characterised in that in step S3, the hole The length, width and height in hole are between 50 to 5000 μm.
5. preparation method as claimed in claim 1, it is characterised in that in step S3, the heat Hot pressing temperature is 80 DEG C to 300 DEG C in being pressed into film method;Pressure is 10N to 1000N.
6. preparation method as claimed in claim 1, it is characterised in that in step S4, during polarization The composite electret film the first film (1) at the middle and upper levels is just to polarization pin.
7. preparation method as claimed in claim 1, it is characterised in that in step S4, it is described negative Polarizing voltage employed in high-voltage corona polarization method has with the size of composite electret film Hole Close, the more big voltage then used of bore hole size is higher.
8. preparation method as claimed in claim 6, it is characterised in that the polarizing voltage is -5kV To -15kV.
9. preparation method as claimed in claim 1, it is characterised in that the composite electret film Thickness be 20 μm to 200 μm.
10. the electric charge self- recoverage electret that a kind of preparation method based on described in claim 1 is obtained is thin Film.
CN201510915591.XA 2015-12-10 2015-12-10 A kind of preparation method of charge self- recoverage electret film Active CN106863994B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111682099A (en) * 2020-06-01 2020-09-18 华中科技大学 Flexible polymer piezoelectric film and preparation method thereof

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CN102569641A (en) * 2012-01-10 2012-07-11 同济大学 Method for producing piezoelectric electret functional films with piezoelectric coefficient d31
CN103682083A (en) * 2012-08-31 2014-03-26 纳米新能源(唐山)有限责任公司 Piezoelectric electret film and preparation method thereof
CN103700761A (en) * 2013-11-27 2014-04-02 深圳市豪恩声学股份有限公司 Piezoelectret structure and preparation method thereof

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Publication number Priority date Publication date Assignee Title
CN102317066A (en) * 2008-12-13 2012-01-11 拜尔材料科学股份公司 Ferroelectric electret two-and more-layer composite material and method for producing the same
CN102350850A (en) * 2011-08-10 2012-02-15 上海大宫新材料有限公司 Continuous production technology of polytetrafluoroethylene membrane with electromechanical energy transition function
CN102569641A (en) * 2012-01-10 2012-07-11 同济大学 Method for producing piezoelectric electret functional films with piezoelectric coefficient d31
CN103682083A (en) * 2012-08-31 2014-03-26 纳米新能源(唐山)有限责任公司 Piezoelectric electret film and preparation method thereof
CN103700761A (en) * 2013-11-27 2014-04-02 深圳市豪恩声学股份有限公司 Piezoelectret structure and preparation method thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111682099A (en) * 2020-06-01 2020-09-18 华中科技大学 Flexible polymer piezoelectric film and preparation method thereof

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