Invention content
Based on solving the above problems, the present invention provides a kind of manufacturing methods of solar power generation component, include such as successively
Lower step:
Silicon substrate is provided, the silicon substrate has opposite first surface and second surface;
Etching is formed in multiple grooves in the silicon substrate;
Multiple first solar battery cells are formed, are placed in the multiple groove, and its top surface and first table
Face flushes;
Patterned first transparency conducting layer is formed, setting is on the first surface;
Form multiple second solar battery cells, be set on the first surface, and with the multiple first sun
Energy battery unit is staggered in the horizontal;
First transparency conducting layer is separately connected the top electrode and second solar energy of first solar battery cell
The hearth electrode of battery unit forms multiple first solar battery groups.
According to an embodiment of the invention, further comprise that be formed on the side wall and bottom wall of the multiple groove first is anti-
Material layer is penetrated, first layer of reflective material surrounds the multiple first solar battery cell.
According to an embodiment of the invention, further include the second reflecting material of deposition, then perform etching, form the second reflecting material
The bed of material is in the side of the multiple second solar battery cell and first transparency conducting layer.
According to an embodiment of the invention, further include forming first through hole, by the multiple first solar battery cell
Hearth electrode leads to the second surface.
According to an embodiment of the invention, further include forming the second through-hole and the second transparency conducting layer, the transparency conducting layer
The top electrode of the multiple second solar battery cell and second layer of reflective material are covered, and it is logical to be electrically connected described second
Hole by the top electrode of the multiple second solar battery cell to lead to the second surface.
According to an embodiment of the invention, further include depositing conductive layer on the second surface, then carry out patterning shape
At electrode pattern, it is electrically connected first and second through-hole.
According to an embodiment of the invention, first layer of reflective material is identical with second reflecting material, is respectively selected from
The insulating glass or insulating ceramics of reflective.
According to an embodiment of the invention, first transparency conducting layer and the second transparency conducting layer are selected from ITO(Tin dope three
Indium oxide), AZO (aluminium-doped zinc oxide) or IZO(Indium doping zinc oxide).
Advantages of the present invention is as follows:
(1)Using solar battery cell on the surface of a substrate with the fluctuating under surface, the sun of concavo-convex arrangement is formed
Energy battery panel, being conducive to continuous reflection enhancement of the sunlight on male and fomale(M&F), it is absorbed;
(2)Light reflecting material layer further increases light reflection, increases the capture probability of light;
(3)Preparation process method is simple, cost reduction.
Specific implementation mode
Referring to Fig. 1, solar power generation component of the invention, including:
Silicon substrate 1 has opposite first surface(Upper surface)And second surface(Lower surface);
Multiple grooves 2 are formed in the silicon substrate 1;
Multiple first solar battery cells 4, are placed in the multiple groove 2, and its top surface and the first surface
It flushes;
Multiple second solar battery cells 3, are set on the first surface, and with the multiple first solar-electricity
Pool unit 4 is staggered in the horizontal;
First transparency conducting layer 6 of separation, setting on the first surface, and are separately connected first solar-electricity
The hearth electrode of the top electrode of pool unit 4 and second solar battery cell 3 forms multiple first solar battery groups;
First layer of reflective material 5b, is formed on the side wall and bottom wall of the multiple groove 2, and surrounds the multiple first
Solar battery cell 4.
Further include the second layer of reflective material 5a, setting the multiple second solar battery cell 3 and it is described first thoroughly
The side of bright conductive layer 6.Further include first through hole 12, the hearth electrode of the multiple first solar battery cell 4 is led to
The second surface.Further include the second through-hole 8, the second transparency conducting layer 7, the transparency conducting layer 7 covers the multiple second
The top electrode of solar battery cell 3 and the second layer of reflective material 5a, and second through-hole 8 is electrically connected with will be described more
The top electrode of a second solar battery cell 3 leads to the second surface.
Further include electrode pattern, including first electrode 10 and second electrode 9, be arranged on the second surface, respectively electricity
Connect the first through hole 12 and the second through-hole 8.
Referring to Figure 10, the manufacturing method of solar power generation component of the invention in turn includes the following steps:
Referring to Fig. 2, silicon substrate 1 is provided, the silicon substrate has opposite first surface and second surface, has certain
Thickness, can be Silicon Wafer;
The multiple grooves 2 being formed in by dry or wet etch referring to Fig. 3 in the silicon substrate 1;
Referring to Fig. 4, the first layer of reflective material 5b being formed on the side wall and bottom wall of the multiple groove 2, described first
Layer of reflective material can be formed by depositional mode, and the first layer of reflective material 5b can form concave-convex table by ion bombardment
Face forms diffusing reflection layer.
Referring to Fig. 5, form multiple first solar battery cells 4, be placed in the multiple groove 2, and its top surface with
The first surface flushes, and the first layer of reflective material 5b surrounds the multiple first solar battery cell 4;
Patterned first transparency conducting layer 6 is formed, setting is on the first surface;It is formed can be whole by depositing
Then patterned mode is formed and can also be formed by way of silk-screen printing a first surface.
Referring to Fig. 6, form multiple second solar cell lists, 3, be set on the first surface, and with it is the multiple
First solar battery cell 4 is staggered in the horizontal;
First transparency conducting layer 6 is separately connected the top electrode and second sun of first solar battery cell 4
The hearth electrode of energy battery unit 3 forms multiple first solar battery groups.
Referring to Fig. 7, the second reflecting material is deposited, is then performed etching, form the second reflecting material, 5a is the multiple the
The side of two solar battery cells 3 and first transparency conducting layer 6.
Referring to Fig. 8, via 13 is formed, and fills conductive materials and forms first through hole 12, by the multiple first solar energy
Battery list, 3 hearth electrode lead to the second surface.
Via 14 is formed, and fills conductive materials and forms the second through-hole 8, then carry out transparency conducting layer deposition and carry out figure
Caseization forms the second transparency conducting layer 7, and the transparency conducting layer 7 covers the top electricity of the multiple second solar battery cell 3
Pole and the second layer of reflective material 5a, and second through-hole 8 is electrically connected with by the multiple second solar battery cell 3
Top electrode lead to the second surface.
Referring to Fig. 9, conductive layer is deposited on the second surface, is then carried out patterning and is formed electrode pattern 9,10, point
It is not electrically connected first and second through-hole 8,12.
According to an embodiment of the invention, the first layer of reflective material 5b is identical with the second reflecting material 5a, respectively
Insulating glass selected from reflective or insulating ceramics.First transparency conducting layer, 6 and second transparency conducting layer 7 is selected from ITO(Tin
Adulterate three indium oxides), AZO (aluminium-doped zinc oxide) or IZO(Indium doping zinc oxide).
Finally it should be noted that:Obviously, the above embodiment is merely an example for clearly illustrating the present invention, and simultaneously
The non-restriction to embodiment.For those of ordinary skill in the art, it can also do on the basis of the above description
Go out other various forms of variations or variation.There is no necessity and possibility to exhaust all the enbodiments.And thus drawn
The obvious changes or variations that Shen goes out are still in the protection scope of this invention.