CN106814551B - A kind of substrate delivery/reception device and handover method - Google Patents

A kind of substrate delivery/reception device and handover method Download PDF

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Publication number
CN106814551B
CN106814551B CN201510859991.3A CN201510859991A CN106814551B CN 106814551 B CN106814551 B CN 106814551B CN 201510859991 A CN201510859991 A CN 201510859991A CN 106814551 B CN106814551 B CN 106814551B
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drive shaft
workbench
substrate
vertical drive
lifting
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CN106814551A (en
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阮冬
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor

Abstract

The present invention relates to a kind of substrate delivery/reception device and handover methods, the device includes air floating table and workbench, air floating table includes: fixed air flotation cell and lifting air flotation cell, and fixed air flotation cell includes first base, first level to drive shaft, fixed air bearing block, vacuum chuck and sucker lifting cylinder;Lifting air flotation cell is set between fixed air flotation cell and workbench, including lifting air floating block and the first vertical drive shaft;Workbench includes: second base, the second horizontal direction drive shaft, the second vertical drive shaft, workbench and buffer.The present invention increases the mechanical damping stroke of workbench by increasing lifting air flotation cell;When working table movement is out of control, uncontrolled motion is prevented using buffer, there are still certain distances for the fixed air bearing block of workbench distance, avoid collision accident;Utilize the lifting of the second vertical drive shaft control workbench, it is ensured that in substrate transmit process, move always from high air bearing towards low air bearing surface, improve safety.

Description

A kind of substrate delivery/reception device and handover method
Technical field
The present invention relates to litho machine apparatus fields more particularly to one kind to be transmitted with security and stability to glass substrate Substrate delivery/reception device and handover method.
Background technique
With TFT (thin film transistor, full name in English: Thin Film Transistor) FPD industry Size constantly increases, and the size of glass substrate is also gradually increased, after glass substrate size increases to a certain range, with routine Method is difficult to realize precise and stable and quick board transport and handover.In order to guarantee that substrate was capable of safety and stability is transmitted to exposure On light workbench, air bearing design, the pitch requirements due to the demand for security of air bearing handover, between two adjacent air bearing surfaces are introduced It is the smaller the better, generally it is less than 10mm, and if the workbench of big quality is out of control with fast state, the distance of 10mm can not be set Count the buffer gear of safety.
Therefore, how to provide a kind of safe and stable substrate delivery/reception device and handover method be those skilled in the art urgently A technical problem to be solved.
Summary of the invention
The present invention provides a kind of substrate delivery/reception device and handover method, to solve the above technical problems.
In order to solve the above technical problems, the present invention provides a kind of substrate delivery/reception device, including air floating table and workbench:
The air floating table includes fixing air flotation cell and lifting air flotation cell,
The fixed air flotation cell include first base, first level to drive shaft, fixed air bearing block, vacuum chuck and Sucker lifting cylinder, the first level are both secured in the first base to drive shaft and fixed air bearing block, the sucker Lifting cylinder is installed on the first level in drive shaft, and drives edge in the horizontal plane from the first level to drive shaft Linear motion, the vacuum chuck are fixed on the sucker lifting cylinder, and vertically by sucker lifting cylinder driving Movement;
The lifting air flotation cell is set between the fixed air flotation cell and the workbench comprising lifting air bearing Block and the first vertical drive shaft, the lifting air floating block are fixed in the described first vertical drive shaft, and vertical by described first Drive shaft drives edge catenary motion;
The workbench includes second base, the second horizontal direction drive shaft, the second vertical drive shaft, workbench and delays Device is rushed, the second horizontal direction drive shaft is fixed in the second base, and the second vertical drive shaft is installed on described In two horizontal direction drive shafts, and moved along a straight line in the horizontal plane by the second horizontal direction drive shaft driving;The work is flat Platform is installed in the described second vertical drive shaft, and by the described second vertical drive shaft drives edge catenary motion;The buffer It is fixed in the described second vertical drive shaft, and is located at below the workbench.
Preferably, when the first vertical drive shaft is shunk, position and the buffer of the lifting air floating block Position is corresponding, and the upper surface of the lifting air floating block is lower than the lower surface of the workbench.
Preferably, when the first vertical drive shaft jacks up, the upper surface of the lifting air floating block and the fixed gas The upper surface of floating block is concordant.
Preferably, when the first vertical drive shaft jacks up, between the lifting air floating block and the fixed air bearing block Distance be less than 10mm.
Preferably, the upper surface of the workbench is higher than the fixed air bearing block when the workbench rises Upper surface;When the workbench is fallen, the upper surface of the workbench is lower than the upper surface of the fixed air bearing block.
Preferably, the second vertical drive shaft controls institute when substrate is transmitted from the air floating table to the workbench State workbench rise;When substrate is transmitted from the workbench to the air floating table, the second vertical drive shaft controls institute Workbench is stated to fall.
Preferably, the quantity of the lifting air flotation cell is three, three lifting air flotation cells are along the biography perpendicular to substrate Direction is sent to be distributed between the fixed air bearing block and the workbench.
The present invention also provides a kind of substrate delivery/reception method, it is applied in substrate delivery/reception device as described above, including such as Lower step:
S1: initialization, the sucker lifting cylinder, the first vertical drive shaft and the second vertical drive shaft are in contraction State, the second horizontal direction drive shaft drive workbench to move to fishplate bar position;
S2: substrate is placed on the fixed air bearing block;
S3: the substrate is suspended on the fixed air bearing block, and the sucker lifting cylinder rises, and by the vacuum Substrate described in sucker suction;
S4: the first level drives the close workbench of vacuum chuck to drive shaft;The first vertical drive Moving axis drives the lifting air floating block to rise, until the substrate is sent on the workbench;
S5: the second vertical drive shaft driving workbench rises, and the first level is described true to drive shaft driving Suction disk is far from the workbench, until the substrate is sent on the fixed air bearing block.
Preferably, the second vertical drive shaft drives the workbench lifting, make the substrate along its direction of transfer It transmits from high to low.
Preferably, the second horizontal direction drive shaft drives workbench to move to before fishplate bar position, described first hangs down It is in contraction state always to drive shaft.
Preferably, the second horizontal direction drive shaft is out of control, it is described when the workbench being driven to hit the air floating table Buffer is contacted with the lifting air floating block, makes the workbench stop motion.
The invention also discloses a kind of substrate delivery/reception devices, including the first air floating table, workbench and the second air floating table:
First air floating table includes
Air flotation cell is used for air bearing supporting substrate, and the substrate is driven to move in the horizontal direction,
Substrate adsorption unit for adsorbing the substrate, and drives the substrate to be movable in a vertical direction;
The work stage is arranged in first air floating table side, including
Support unit is used to support the fixed substrate, and the substrate edge is driven both horizontally and vertically to move,
Buffer cell is arranged in the work stage, and for limiting the movement row of the support unit in the horizontal direction Journey;
Second air floating table is arranged between first air floating table and the work stage, and edge is both horizontally and vertically transported It is dynamic, it is used for the substrate described in Auxiliary support during substrate delivery/reception.
Preferably, the substrate adsorption unit includes vacuum chuck and sucker lifting cylinder, the substrate is placed in described Above vacuum chuck, the vacuum chuck is fixed on the sucker lifting cylinder, and by the sucker lifting cylinder drives edge Movement in vertical direction.
Preferably, the air flotation cell includes first base, fixed air bearing block and first level to drive shaft, described the One horizontal direction drive shaft and fixed air bearing block are both secured in the first base, and the fixed air bearing block supports the substrate, The sucker lifting cylinder is installed on the first level in drive shaft, and is driven from the first level to drive shaft in water It square moves along a straight line upwards.
Preferably, the support unit includes second base, the second horizontal direction drive shaft, the second vertical drive shaft and work Make platform, the second horizontal direction drive shaft is fixed in the second base, and the second vertical drive shaft is installed on described In second horizontal direction drive shaft, and moved along a straight line in the horizontal direction by the second horizontal direction drive shaft driving;The work Make stage+module in the described second vertical drive shaft, and is movable in a vertical direction by the described second vertical drive shaft driving.
Preferably, the buffer cell is fixed in the described second vertical drive shaft, and it is located at below the workbench.
Preferably, second air floating table includes lifting air floating block and the first vertical drive shaft, the lifting air floating block is solid It is movable in a vertical direction due in the described first vertical drive shaft, and by the described first vertical drive shaft driving.
Compared with prior art, a kind of substrate delivery/reception device and handover method provided by the invention have the advantages that
1. the present invention is increased by increasing lifting air flotation cell between the fixed air flotation cell and the workbench The mechanical damping stroke of workbench, to improve the safety of substrate air bearing handover;
2. when working table movement is out of control, lifting air floating block is in low level, when workbench prevents uncontrolled motion by buffer When, there are still certain distances for the fixed air bearing block of workbench distance, will not crash;
3. utilizing the lifting of the second vertical drive shaft control workbench, it is ensured that in substrate transmit process (including upper plate and Lower plate), substrate is moved from high air bearing towards low air bearing surface always, further increases the safety of substrate transmission.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of substrate delivery/reception device in the embodiment of the invention;
Fig. 2 is the top view of substrate delivery/reception device shown in Fig. 1;
Fig. 3 is that the second horizontal direction drive shaft runaway condition in the embodiment of the invention in substrate delivery/reception device shows It is intended to;
Fig. 4 is the work flow diagram of substrate delivery/reception method in the embodiment of the invention;
Fig. 5 a~5e is the corresponding substrate delivery/reception device of each step of substrate delivery/reception method in the embodiment of the invention State diagram.
In figure: 100- air floating table;
111- first base, 112- first level are inhaled to drive shaft, the fixed air bearing block of 113-, 114- vacuum chuck, 115- Disk lifting cylinder;
121- lifting air floating block, the vertical drive shaft of 122- first;
200- workbench;
211- second base, the second horizontal direction of 212- drive shaft, the vertical drive shaft of 213- second, 214a- workbench, 214b- associate member, 215- buffer;
300- substrate.
Specific embodiment
In order to more state the technical solution of foregoing invention in detail, being exemplified below specific embodiment proves that technology is imitated Fruit;It is emphasized that these embodiments are not limited to limit the scope of the invention for illustrating the present invention.
A kind of substrate delivery/reception device provided by the invention, as depicted in figs. 1 and 2, including air floating table 100 and workbench 200,
The air floating table 100 include: fixed air flotation cell and lifting air flotation cell,
The fixed air flotation cell includes first base 111, first level to drive shaft 112, fixed air bearing block 113, true Suction disk 114 and sucker lifting cylinder 115, the first level are both secured to institute to drive shaft 112 and fixed air bearing block 113 It states in first base 111, the sucker lifting cylinder 115 is installed on the first level in drive shaft 112, and by described The driving of one horizontal direction drive shaft 112 moves along a straight line in the horizontal plane, and the vacuum chuck 114 is fixed on the sucker lifting air On cylinder 115, and by the 115 drives edge catenary motion of sucker lifting cylinder;
The lifting air flotation cell is set between the fixed air flotation cell and the workbench 200 comprising lifting Air bearing block 121 and the first vertical drive shaft 122, the lifting air floating block 121 are fixed in the described first vertical drive shaft 122, And by the described first vertical 122 drives edge catenary motion of drive shaft;
Specifically, the fixed air bearing block 113 and lifting air floating block 121 can produce air film after being passed through compressed air, The substrate 300 is suspended.
The workbench 200 include: second base 211, the second horizontal direction drive shaft 212, the second vertical drive shaft 213, Workbench 214a and buffer 215, the second horizontal direction drive shaft 212 is fixed in the second base 211, described Second vertical drive shaft 213 is installed in the second horizontal direction drive shaft 212, and by the second horizontal direction drive shaft 212 Driving moves along a straight line in the horizontal plane;The workbench 214a is installed in the described second vertical drive shaft 213, and by institute State the second vertical 213 drives edge catenary motion of drive shaft;The buffer 215 is fixed in the described second vertical drive shaft 213, And be located at below the workbench 214a, preferably, being equipped with an associate member 214b below the workbench 214a, the two is Integral structure forms recessed area in lower section after the two combination, to arrange the buffer 215.
The present invention is increased by increasing lifting air flotation cell between the fixed air flotation cell and the workbench 200 The mechanical damping stroke of workbench 200, to improve the safety of substrate 300 air bearing handover.
Preferably, asking emphasis with reference to Fig. 5 a and Fig. 3, when the described first vertical drive shaft 122 is shunk, the lifting air bearing The position of block 121 is corresponding with the position of the buffer 215, and the upper surface of the lifting air floating block 121 is lower than the work The lower surface of platform 214a drives the workbench 214a to hit the gas if the second horizontal direction drive shaft 212 is out of control When floating platform 100, the buffer 215 is contacted with the lifting air floating block 121, makes the workbench 214a stop motion, really Protecting lifting air floating block 121 at this time will not bump against with workbench 214a.
Preferably, asking emphasis with reference to Fig. 5 b and Fig. 1, when the described first vertical drive shaft 122 jacks up, the lifting air bearing The upper surface of block 121 is concordant with the upper surface of the fixed air bearing block 133, it is ensured that substrate 300 transmits steadily;Preferably, working as institute When stating the first vertical drive shaft 122 jack-up, the distance between the lifting air floating block 121 and the fixed air bearing block 113 are less than 10mm, to ensure the safety transmitted.
Preferably, asking emphasis with reference to Fig. 5 d, when the workbench 214a rises, the upper table of the workbench 214a Face is higher than the upper surface of the fixed air bearing block 113;Please emphasis refer to Fig. 5 c, it is described when the workbench 214a is fallen The upper surface of workbench 214a is lower than the upper surface of the fixed air bearing block 113;When substrate 300 from the air floating table 100 to When the workbench 200 transmits, the second vertical drive shaft 213 controls the workbench 214a and rises;When substrate 300 from When the workbench 200 is transmitted to the air floating table 100, the second vertical drive shaft 213 controls the workbench 214a It falls, to ensure in 300 transmit process of substrate, is moved always from high air bearing towards low air bearing surface, further increase safety.
Preferably, asking emphasis with reference to Fig. 2, the quantity of the lifting air flotation cell is three, three lifting air flotation cell edges It is distributed between the fixed air bearing block 113 and the workbench 214a perpendicular to the direction of transfer of substrate 300, further really Substrate 300 is protected steadily to transmit.
Please emphasis refer to Fig. 4 and Fig. 5 a~5e, the present invention also provides a kind of substrate delivery/reception method, be applied to institute as above In the substrate delivery/reception device stated, include the following steps:
S1: initialization, the sucker lifting cylinder 115, the first vertical drive shaft 122 and the second vertical drive shaft 213 It is in contraction state, the second horizontal direction drive shaft 212 drives workbench 214a to move to fishplate bar position;
S2: substrate 300 is placed on the fixed air bearing block 113;
S3: the substrate 300 is suspended on the fixed air bearing block 113, and the sucker lifting cylinder 115 rises, and The substrate 300 is adsorbed by the vacuum chuck 114;
S4: the first level drives the vacuum chuck 114 close to the workbench 200 to drive shaft 112;Described One vertical drive shaft 122 drives the lifting air floating block 121 to rise, until the substrate 300 is sent to the workbench On 214a;
S5: the second vertical drive shaft 213 drives workbench 214a to rise, and the first level is to drive shaft 112 Drive the vacuum chuck 114 far from the workbench 200, until the substrate 300 is sent to the fixed air bearing block 113 On.
Preferably, asking emphasis with reference to Fig. 5 c and 5d, the second vertical drive shaft 213 drives the workbench 214a liter Drop, transmits the substrate 300 from high to low along its direction of transfer, improves transmission safety.
Preferably, asking emphasis with reference to Fig. 5 a, the second horizontal direction drive shaft 212 drives workbench 214a to move to and connects Before Board position, the first vertical drive shaft 122 is in contraction state always, it is ensured that workbench 214a will not be with lifting air Floating block 121 bumps against.
Preferably, asking emphasis with reference to Fig. 3, the second horizontal direction drive shaft 212 is out of control, drives the workbench 214a When hitting the air floating table 100, the buffer 215 is contacted with the lifting air floating block 121, stops the workbench 214a It only moves, at this point, avoiding colliding there are still a certain distance between workbench 214a and the fixed air bearing block 113 Accident.
In conclusion a kind of substrate delivery/reception device provided by the invention and handover method, which includes 100 He of air floating table Workbench 200, the air floating table 100 include: fixed air flotation cell and lifting air flotation cell, and the fixed air flotation cell includes the One pedestal 111, first level are to drive shaft 112, fixed air bearing block 113, vacuum chuck 114 and sucker lifting cylinder 115, institute It states first level to be both secured in the first base 111 to drive shaft 112 and fixed air bearing block 113, the sucker lifting air Cylinder 115 is installed on the first level in drive shaft 112, and is driven from the first level to drive shaft 112 in horizontal plane On move along a straight line, the vacuum chuck 114 is fixed on the sucker lifting cylinder 115, and by the sucker lifting cylinder 115 drives edge catenary motions;The lifting air flotation cell is set between the fixed air flotation cell and the workbench 200, It includes lifting air floating block 121 and the first vertical drive shaft 122, and the lifting air floating block 121 is fixed on the described first vertical drive On moving axis 122, and by the described first vertical 122 drives edge catenary motion of drive shaft;The workbench 200 includes: second base 211, the second horizontal direction drive shaft 212, the second vertical drive shaft 213, workbench 214a and buffer 215, described second Horizontal direction drive shaft 212 is fixed in the second base 211, and the second vertical drive shaft 213 is installed on second water It puts down in drive shaft 212, and is moved along a straight line in the horizontal plane by the second horizontal direction drive shaft 212 driving;The work Platform 214a is installed in the described second vertical drive shaft 213, and is vertically transported by the described second vertical driving of drive shaft 213 It is dynamic;The buffer 215 is fixed in the described second vertical drive shaft 213, and is located at below the workbench 214a.This hair It is bright to go up and down air flotation cell by increasing, increase the mechanical damping stroke of workbench 200;It, can benefit when 200 uncontrolled movements of workbench Uncontrolled motion is prevented with buffer 215, there are still certain distances apart from fixed air bearing block 113 for workbench 200, avoid collision thing Therefore;The lifting of workbench 214a is controlled using the second vertical drive shaft 213, it is ensured that in 300 transmit process of substrate, always from height Air bearing is moved towards low air bearing surface, improves safety.
Obviously, those skilled in the art can carry out various modification and variations without departing from spirit of the invention to invention And range.If in this way, these modifications and changes of the present invention belong to the claims in the present invention and its equivalent technologies range it Interior, then the invention is also intended to include including these modification and variations.

Claims (10)

1. a kind of substrate delivery/reception device, which is characterized in that including air floating table and workbench:
The air floating table includes fixing air flotation cell and lifting air flotation cell,
The fixed air flotation cell includes first base, first level to drive shaft, fixed air bearing block, vacuum chuck and sucker Lifting cylinder, the first level are both secured in the first base to drive shaft and fixed air bearing block, the sucker lifting Cylinder is installed on the first level in drive shaft, and is driven from the first level to drive shaft in the horizontal plane along straight line Movement, the vacuum chuck are fixed on the sucker lifting cylinder, and by the sucker lifting cylinder drives edge catenary motion;
The lifting air flotation cell is set between the fixed air flotation cell and the workbench comprising lifting air floating block and First vertical drive shaft, the lifting air floating block are fixed in the described first vertical drive shaft, and by the described first vertical driving Axis drives edge catenary motion;
The workbench includes second base, the second horizontal direction drive shaft, the second vertical drive shaft, workbench and buffering Device, the second horizontal direction drive shaft are fixed in the second base, and the second vertical drive shaft is installed on described second In horizontal direction drive shaft, and moved along a straight line in the horizontal plane by the second horizontal direction drive shaft driving;The workbench It is installed in the described second vertical drive shaft, and by the described second vertical drive shaft drives edge catenary motion;The buffer is solid Due in the described second vertical drive shaft, and it is located at below the workbench;
When the workbench rises, the upper surface of the workbench is higher than the upper surface of the fixed air bearing block;Work as institute When stating workbench and falling, the upper surface of the workbench is lower than the upper surface of the fixed air bearing block.
2. a kind of substrate delivery/reception device as described in claim 1, which is characterized in that when the described first vertical drive shaft is shunk When, the position of the lifting air floating block is corresponding with the position of the buffer, and the upper surface of the lifting air floating block is lower than institute State the lower surface of workbench.
3. a kind of substrate delivery/reception device as described in claim 1, which is characterized in that when the described first vertical drive shaft jacks up When, the upper surface of the lifting air floating block is concordant with the upper surface of the fixed air bearing block.
4. a kind of substrate delivery/reception device as described in claim 1, which is characterized in that when the described first vertical drive shaft jacks up When, the distance between the lifting air floating block and the fixed air bearing block are less than 10mm.
5. a kind of substrate delivery/reception device as described in claim 1, which is characterized in that when substrate is from the air floating table to the work When making platform transmission, the second vertical drive shaft controls the workbench and rises;When substrate is from the workbench to the gas When floating platform transmits, the second vertical drive shaft controls the workbench and falls.
6. a kind of substrate delivery/reception device as described in claim 1, which is characterized in that the quantity of the lifting air flotation cell is three It is a, three lifting air flotation cells along the direction of transfer perpendicular to substrate be distributed in the fixed air bearing block and the workbench it Between.
7. a kind of substrate delivery/reception method is applied in substrate delivery/reception device as described in claim 1, which is characterized in that including Following steps:
S1: initialization, the sucker lifting cylinder, the first vertical drive shaft and the second vertical drive shaft are in contraction-like State, the second horizontal direction drive shaft drive workbench to move to fishplate bar position;
S2: substrate is placed on the fixed air bearing block;
S3: the substrate is suspended on the fixed air bearing block, and the sucker lifting cylinder rises, and by the vacuum chuck Adsorb the substrate;
S4: the first level drives the close workbench of vacuum chuck to drive shaft;The first vertical drive shaft The lifting air floating block is driven to rise, until the substrate is sent on the workbench;
S5: the second vertical drive shaft driving workbench rises, and the first level drives the vacuum to inhale to drive shaft Disk is far from the workbench, until the substrate is sent on the fixed air bearing block.
8. a kind of substrate delivery/reception method as claimed in claim 7, which is characterized in that described in the second vertical drive shaft driving Workbench lifting transmits the substrate from high to low along its direction of transfer.
9. a kind of substrate delivery/reception method as claimed in claim 7, which is characterized in that the second horizontal direction drive shaft band is started building Before moving to fishplate bar position as platform, the first vertical drive shaft is in contraction state always.
10. a kind of substrate delivery/reception method as claimed in claim 9, which is characterized in that the second horizontal direction drive shaft is out of control, When the workbench being driven to hit the air floating table, the buffer is contacted with the lifting air floating block, keeps the work flat Platform stop motion.
CN201510859991.3A 2015-11-30 2015-11-30 A kind of substrate delivery/reception device and handover method Active CN106814551B (en)

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109634061B (en) * 2017-10-09 2020-11-27 上海微电子装备(集团)股份有限公司 Substrate transfer device, substrate transfer method and lithographic apparatus
CN111352305A (en) * 2018-12-20 2020-06-30 上海微电子装备(集团)股份有限公司 Substrate handover device and substrate handover method

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CN103592824A (en) * 2013-11-29 2014-02-19 中国科学院光电技术研究所 Two-degree-of-freedom high-precision large-stroke air-bearing workpiece platform
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Publication number Priority date Publication date Assignee Title
CN1993803A (en) * 2004-11-25 2007-07-04 株式会社尼康 Mobile body system, exposure apparatus, and method of producing device
CN101303532A (en) * 2008-06-10 2008-11-12 上海微电子装备有限公司 Six-freedom degree precision positioning platform capable of switching station
CN102483578A (en) * 2009-08-20 2012-05-30 株式会社尼康 Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
CN103097957A (en) * 2010-09-07 2013-05-08 株式会社尼康 Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
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