CN106788233B - 一种光伏光热一体化组件及其制备方法 - Google Patents
一种光伏光热一体化组件及其制备方法 Download PDFInfo
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- CN106788233B CN106788233B CN201510818686.XA CN201510818686A CN106788233B CN 106788233 B CN106788233 B CN 106788233B CN 201510818686 A CN201510818686 A CN 201510818686A CN 106788233 B CN106788233 B CN 106788233B
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- 238000002360 preparation methods Methods 0.000 title claims abstract description 10
- 238000007747 plating Methods 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 239000010410 layers Substances 0.000 claims abstract 30
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 28
- 239000007789 gases Substances 0.000 claims description 19
- 238000003475 lamination Methods 0.000 claims description 11
- 239000005341 toughened glasses Substances 0.000 claims description 9
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 8
- 239000000463 materials Substances 0.000 claims description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc monoxide Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 8
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000000354 decomposition reactions Methods 0.000 claims description 5
- 239000000758 substrates Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='138' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='165.6' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<path d='M 178.898,138 L 178.891,137.828 L 178.869,137.657 L 178.832,137.489 L 178.781,137.325 L 178.716,137.166 L 178.637,137.012 L 178.546,136.867 L 178.443,136.729 L 178.328,136.601 L 178.202,136.483 L 178.067,136.377 L 177.923,136.282 L 177.771,136.201 L 177.614,136.132 L 177.45,136.078 L 177.283,136.037 L 177.113,136.012 L 176.941,136 L 176.769,136.004 L 176.598,136.023 L 176.429,136.056 L 176.264,136.103 L 176.103,136.165 L 175.948,136.24 L 175.801,136.328 L 175.661,136.429 L 175.53,136.541 L 175.41,136.664 L 175.301,136.797 L 175.203,136.939 L 175.118,137.088 L 175.046,137.245 L 174.988,137.407 L 174.944,137.573 L 174.915,137.743 L 174.9,137.914 L 174.9,138.086 L 174.915,138.257 L 174.944,138.427 L 174.988,138.593 L 175.046,138.755 L 175.118,138.912 L 175.203,139.061 L 175.301,139.203 L 175.41,139.336 L 175.53,139.459 L 175.661,139.571 L 175.801,139.672 L 175.948,139.76 L 176.103,139.835 L 176.264,139.897 L 176.429,139.944 L 176.598,139.977 L 176.769,139.996 L 176.941,140 L 177.113,139.988 L 177.283,139.963 L 177.45,139.922 L 177.614,139.868 L 177.771,139.799 L 177.923,139.718 L 178.067,139.623 L 178.202,139.517 L 178.328,139.399 L 178.443,139.271 L 178.546,139.133 L 178.637,138.988 L 178.716,138.834 L 178.781,138.675 L 178.832,138.511 L 178.869,138.343 L 178.891,138.172 L 178.898,138 L 176.898,138 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,162 L 178.891,161.828 L 178.869,161.657 L 178.832,161.489 L 178.781,161.325 L 178.716,161.166 L 178.637,161.012 L 178.546,160.867 L 178.443,160.729 L 178.328,160.601 L 178.202,160.483 L 178.067,160.377 L 177.923,160.282 L 177.771,160.201 L 177.614,160.132 L 177.45,160.078 L 177.283,160.037 L 177.113,160.012 L 176.941,160 L 176.769,160.004 L 176.598,160.023 L 176.429,160.056 L 176.264,160.103 L 176.103,160.165 L 175.948,160.24 L 175.801,160.328 L 175.661,160.429 L 175.53,160.541 L 175.41,160.664 L 175.301,160.797 L 175.203,160.939 L 175.118,161.088 L 175.046,161.245 L 174.988,161.407 L 174.944,161.573 L 174.915,161.743 L 174.9,161.914 L 174.9,162.086 L 174.915,162.257 L 174.944,162.427 L 174.988,162.593 L 175.046,162.755 L 175.118,162.912 L 175.203,163.061 L 175.301,163.203 L 175.41,163.336 L 175.53,163.459 L 175.661,163.571 L 175.801,163.672 L 175.948,163.76 L 176.103,163.835 L 176.264,163.897 L 176.429,163.944 L 176.598,163.977 L 176.769,163.996 L 176.941,164 L 177.113,163.988 L 177.283,163.963 L 177.45,163.922 L 177.614,163.868 L 177.771,163.799 L 177.923,163.718 L 178.067,163.623 L 178.202,163.517 L 178.328,163.399 L 178.443,163.271 L 178.546,163.133 L 178.637,162.988 L 178.716,162.834 L 178.781,162.675 L 178.832,162.511 L 178.869,162.343 L 178.891,162.172 L 178.898,162 L 176.898,162 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,146 L 178.891,145.828 L 178.869,145.657 L 178.832,145.489 L 178.781,145.325 L 178.716,145.166 L 178.637,145.012 L 178.546,144.867 L 178.443,144.729 L 178.328,144.601 L 178.202,144.483 L 178.067,144.377 L 177.923,144.282 L 177.771,144.201 L 177.614,144.132 L 177.45,144.078 L 177.283,144.037 L 177.113,144.012 L 176.941,144 L 176.769,144.004 L 176.598,144.023 L 176.429,144.056 L 176.264,144.103 L 176.103,144.165 L 175.948,144.24 L 175.801,144.328 L 175.661,144.429 L 175.53,144.541 L 175.41,144.664 L 175.301,144.797 L 175.203,144.939 L 175.118,145.088 L 175.046,145.245 L 174.988,145.407 L 174.944,145.573 L 174.915,145.743 L 174.9,145.914 L 174.9,146.086 L 174.915,146.257 L 174.944,146.427 L 174.988,146.593 L 175.046,146.755 L 175.118,146.912 L 175.203,147.061 L 175.301,147.203 L 175.41,147.336 L 175.53,147.459 L 175.661,147.571 L 175.801,147.672 L 175.948,147.76 L 176.103,147.835 L 176.264,147.897 L 176.429,147.944 L 176.598,147.977 L 176.769,147.996 L 176.941,148 L 177.113,147.988 L 177.283,147.963 L 177.45,147.922 L 177.614,147.868 L 177.771,147.799 L 177.923,147.718 L 178.067,147.623 L 178.202,147.517 L 178.328,147.399 L 178.443,147.271 L 178.546,147.133 L 178.637,146.988 L 178.716,146.834 L 178.781,146.675 L 178.832,146.511 L 178.869,146.343 L 178.891,146.172 L 178.898,146 L 176.898,146 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,154 L 178.891,153.828 L 178.869,153.657 L 178.832,153.489 L 178.781,153.325 L 178.716,153.166 L 178.637,153.012 L 178.546,152.867 L 178.443,152.729 L 178.328,152.601 L 178.202,152.483 L 178.067,152.377 L 177.923,152.282 L 177.771,152.201 L 177.614,152.132 L 177.45,152.078 L 177.283,152.037 L 177.113,152.012 L 176.941,152 L 176.769,152.004 L 176.598,152.023 L 176.429,152.056 L 176.264,152.103 L 176.103,152.165 L 175.948,152.24 L 175.801,152.328 L 175.661,152.429 L 175.53,152.541 L 175.41,152.664 L 175.301,152.797 L 175.203,152.939 L 175.118,153.088 L 175.046,153.245 L 174.988,153.407 L 174.944,153.573 L 174.915,153.743 L 174.9,153.914 L 174.9,154.086 L 174.915,154.257 L 174.944,154.427 L 174.988,154.593 L 175.046,154.755 L 175.118,154.912 L 175.203,155.061 L 175.301,155.203 L 175.41,155.336 L 175.53,155.459 L 175.661,155.571 L 175.801,155.672 L 175.948,155.76 L 176.103,155.835 L 176.264,155.897 L 176.429,155.944 L 176.598,155.977 L 176.769,155.996 L 176.941,156 L 177.113,155.988 L 177.283,155.963 L 177.45,155.922 L 177.614,155.868 L 177.771,155.799 L 177.923,155.718 L 178.067,155.623 L 178.202,155.517 L 178.328,155.399 L 178.443,155.271 L 178.546,155.133 L 178.637,154.988 L 178.716,154.834 L 178.781,154.675 L 178.832,154.511 L 178.869,154.343 L 178.891,154.172 L 178.898,154 L 176.898,154 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='35.0455' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='51.0409' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<path d='M 60.3067,35.0455 L 60.3024,34.9458 L 60.2896,34.8469 L 60.2683,34.7495 L 60.2387,34.6542 L 60.201,34.5619 L 60.1555,34.4731 L 60.1026,34.3886 L 60.0426,34.3089 L 59.976,34.2347 L 59.9032,34.1665 L 59.8248,34.1048 L 59.7415,34.0501 L 59.6537,34.0027 L 59.5622,33.9631 L 59.4676,33.9314 L 59.3707,33.908 L 59.2721,33.8931 L 59.1725,33.8866 L 59.0728,33.8888 L 58.9737,33.8995 L 58.8758,33.9187 L 58.7799,33.9462 L 58.6868,33.9819 L 58.5971,34.0254 L 58.5114,34.0765 L 58.4305,34.1348 L 58.3549,34.1998 L 58.2851,34.2711 L 58.2217,34.3481 L 58.1652,34.4303 L 58.116,34.517 L 58.0744,34.6077 L 58.0407,34.7015 L 58.0152,34.798 L 57.9982,34.8962 L 57.9896,34.9956 L 57.9896,35.0953 L 57.9982,35.1947 L 58.0152,35.2929 L 58.0407,35.3894 L 58.0744,35.4833 L 58.116,35.5739 L 58.1652,35.6606 L 58.2217,35.7428 L 58.2851,35.8198 L 58.3549,35.8911 L 58.4305,35.9561 L 58.5114,36.0144 L 58.5971,36.0655 L 58.6868,36.109 L 58.7799,36.1447 L 58.8758,36.1722 L 58.9737,36.1914 L 59.0728,36.2021 L 59.1725,36.2043 L 59.2721,36.1978 L 59.3707,36.1829 L 59.4676,36.1595 L 59.5622,36.1279 L 59.6537,36.0882 L 59.7415,36.0408 L 59.8248,35.9861 L 59.9032,35.9244 L 59.976,35.8562 L 60.0426,35.782 L 60.1026,35.7023 L 60.1555,35.6178 L 60.201,35.529 L 60.2387,35.4367 L 60.2683,35.3414 L 60.2896,35.244 L 60.3024,35.1451 L 60.3067,35.0455 L 59.1476,35.0455 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,48.9545 L 60.3024,48.8549 L 60.2896,48.756 L 60.2683,48.6586 L 60.2387,48.5633 L 60.201,48.471 L 60.1555,48.3822 L 60.1026,48.2977 L 60.0426,48.218 L 59.976,48.1438 L 59.9032,48.0756 L 59.8248,48.0139 L 59.7415,47.9592 L 59.6537,47.9118 L 59.5622,47.8721 L 59.4676,47.8405 L 59.3707,47.8171 L 59.2721,47.8022 L 59.1725,47.7957 L 59.0728,47.7979 L 58.9737,47.8086 L 58.8758,47.8278 L 58.7799,47.8553 L 58.6868,47.891 L 58.5971,47.9345 L 58.5114,47.9856 L 58.4305,48.0439 L 58.3549,48.1089 L 58.2851,48.1802 L 58.2217,48.2572 L 58.1652,48.3394 L 58.116,48.4261 L 58.0744,48.5167 L 58.0407,48.6106 L 58.0152,48.7071 L 57.9982,48.8053 L 57.9896,48.9047 L 57.9896,49.0044 L 57.9982,49.1038 L 58.0152,49.202 L 58.0407,49.2985 L 58.0744,49.3923 L 58.116,49.483 L 58.1652,49.5697 L 58.2217,49.6519 L 58.2851,49.7289 L 58.3549,49.8002 L 58.4305,49.8652 L 58.5114,49.9235 L 58.5971,49.9746 L 58.6868,50.0181 L 58.7799,50.0538 L 58.8758,50.0813 L 58.9737,50.1005 L 59.0728,50.1112 L 59.1725,50.1134 L 59.2721,50.1069 L 59.3707,50.092 L 59.4676,50.0686 L 59.5622,50.0369 L 59.6537,49.9973 L 59.7415,49.9499 L 59.8248,49.8952 L 59.9032,49.8335 L 59.976,49.7653 L 60.0426,49.6911 L 60.1026,49.6114 L 60.1555,49.5269 L 60.201,49.4381 L 60.2387,49.3458 L 60.2683,49.2505 L 60.2896,49.1531 L 60.3024,49.0542 L 60.3067,48.9545 L 59.1476,48.9545 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,39.6818 L 60.3024,39.5822 L 60.2896,39.4833 L 60.2683,39.3858 L 60.2387,39.2906 L 60.201,39.1983 L 60.1555,39.1095 L 60.1026,39.025 L 60.0426,38.9453 L 59.976,38.8711 L 59.9032,38.8029 L 59.8248,38.7412 L 59.7415,38.6864 L 59.6537,38.6391 L 59.5622,38.5994 L 59.4676,38.5678 L 59.3707,38.5444 L 59.2721,38.5294 L 59.1725,38.523 L 59.0728,38.5251 L 58.9737,38.5359 L 58.8758,38.555 L 58.7799,38.5826 L 58.6868,38.6183 L 58.5971,38.6618 L 58.5114,38.7129 L 58.4305,38.7712 L 58.3549,38.8362 L 58.2851,38.9075 L 58.2217,38.9845 L 58.1652,39.0667 L 58.116,39.1534 L 58.0744,39.244 L 58.0407,39.3379 L 58.0152,39.4343 L 57.9982,39.5326 L 57.9896,39.632 L 57.9896,39.7317 L 57.9982,39.831 L 58.0152,39.9293 L 58.0407,40.0257 L 58.0744,40.1196 L 58.116,40.2103 L 58.1652,40.297 L 58.2217,40.3792 L 58.2851,40.4562 L 58.3549,40.5274 L 58.4305,40.5925 L 58.5114,40.6507 L 58.5971,40.7018 L 58.6868,40.7454 L 58.7799,40.7811 L 58.8758,40.8086 L 58.9737,40.8278 L 59.0728,40.8385 L 59.1725,40.8406 L 59.2721,40.8342 L 59.3707,40.8192 L 59.4676,40.7959 L 59.5622,40.7642 L 59.6537,40.7246 L 59.7415,40.6772 L 59.8248,40.6225 L 59.9032,40.5608 L 59.976,40.4926 L 60.0426,40.4183 L 60.1026,40.3387 L 60.1555,40.2541 L 60.201,40.1654 L 60.2387,40.073 L 60.2683,39.9778 L 60.2896,39.8804 L 60.3024,39.7815 L 60.3067,39.6818 L 59.1476,39.6818 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,44.3182 L 60.3024,44.2185 L 60.2896,44.1196 L 60.2683,44.0222 L 60.2387,43.927 L 60.201,43.8346 L 60.1555,43.7459 L 60.1026,43.6613 L 60.0426,43.5817 L 59.976,43.5074 L 59.9032,43.4392 L 59.8248,43.3775 L 59.7415,43.3228 L 59.6537,43.2754 L 59.5622,43.2358 L 59.4676,43.2041 L 59.3707,43.1808 L 59.2721,43.1658 L 59.1725,43.1594 L 59.0728,43.1615 L 58.9737,43.1722 L 58.8758,43.1914 L 58.7799,43.2189 L 58.6868,43.2546 L 58.5971,43.2982 L 58.5114,43.3493 L 58.4305,43.4075 L 58.3549,43.4726 L 58.2851,43.5438 L 58.2217,43.6208 L 58.1652,43.703 L 58.116,43.7897 L 58.0744,43.8804 L 58.0407,43.9743 L 58.0152,44.0707 L 57.9982,44.169 L 57.9896,44.2683 L 57.9896,44.368 L 57.9982,44.4674 L 58.0152,44.5657 L 58.0407,44.6621 L 58.0744,44.756 L 58.116,44.8466 L 58.1652,44.9333 L 58.2217,45.0155 L 58.2851,45.0925 L 58.3549,45.1638 L 58.4305,45.2288 L 58.5114,45.2871 L 58.5971,45.3382 L 58.6868,45.3817 L 58.7799,45.4174 L 58.8758,45.445 L 58.9737,45.4641 L 59.0728,45.4749 L 59.1725,45.477 L 59.2721,45.4706 L 59.3707,45.4556 L 59.4676,45.4322 L 59.5622,45.4006 L 59.6537,45.3609 L 59.7415,45.3136 L 59.8248,45.2588 L 59.9032,45.1971 L 59.976,45.1289 L 60.0426,45.0547 L 60.1026,44.975 L 60.1555,44.8905 L 60.201,44.8017 L 60.2387,44.7094 L 60.2683,44.6142 L 60.2896,44.5167 L 60.3024,44.4178 L 60.3067,44.3182 L 59.1476,44.3182 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000012212 insulators Substances 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- AHKZTVQIVOEVFO-UHFFFAOYSA-N oxide(2-) Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [O-2] AHKZTVQIVOEVFO-UHFFFAOYSA-N 0.000 claims 11
- 229910001885 silicon dioxide Inorganic materials 0.000 claims 2
- 239000011787 zinc oxide Substances 0.000 claims 2
- 229910001614 zinc oxide Inorganic materials 0.000 claims 2
- 239000002918 waste heat Substances 0.000 abstract description 5
- 238000000034 methods Methods 0.000 abstract description 3
- 238000010248 power generation Methods 0.000 abstract description 3
- 239000000126 substances Substances 0.000 abstract description 3
- 238000010521 absorption reactions Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 21
- BLRPTPMANUNPDV-UHFFFAOYSA-N silane Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 12
- 230000005684 electric field Effects 0.000 description 10
- 229910000077 silane Inorganic materials 0.000 description 9
- 238000009413 insulation Methods 0.000 description 7
- 238000000576 coating method Methods 0.000 description 5
- 229910000090 borane Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- UORVGPXVDQYIDP-UHFFFAOYSA-N trihydridoboron Substances data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 4
- 238000011049 filling Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N phosphine Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 3
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='138' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >A</text>
<text x='165.6' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >l</text>
<path d='M 178.898,150 L 178.891,149.828 L 178.869,149.657 L 178.832,149.489 L 178.781,149.325 L 178.716,149.166 L 178.637,149.012 L 178.546,148.867 L 178.443,148.729 L 178.328,148.601 L 178.202,148.483 L 178.067,148.377 L 177.923,148.282 L 177.771,148.201 L 177.614,148.132 L 177.45,148.078 L 177.283,148.037 L 177.113,148.012 L 176.941,148 L 176.769,148.004 L 176.598,148.023 L 176.429,148.056 L 176.264,148.103 L 176.103,148.165 L 175.948,148.24 L 175.801,148.328 L 175.661,148.429 L 175.53,148.541 L 175.41,148.664 L 175.301,148.797 L 175.203,148.939 L 175.118,149.088 L 175.046,149.245 L 174.988,149.407 L 174.944,149.573 L 174.915,149.743 L 174.9,149.914 L 174.9,150.086 L 174.915,150.257 L 174.944,150.427 L 174.988,150.593 L 175.046,150.755 L 175.118,150.912 L 175.203,151.061 L 175.301,151.203 L 175.41,151.336 L 175.53,151.459 L 175.661,151.571 L 175.801,151.672 L 175.948,151.76 L 176.103,151.835 L 176.264,151.897 L 176.429,151.944 L 176.598,151.977 L 176.769,151.996 L 176.941,152 L 177.113,151.988 L 177.283,151.963 L 177.45,151.922 L 177.614,151.868 L 177.771,151.799 L 177.923,151.718 L 178.067,151.623 L 178.202,151.517 L 178.328,151.399 L 178.443,151.271 L 178.546,151.133 L 178.637,150.988 L 178.716,150.834 L 178.781,150.675 L 178.832,150.511 L 178.869,150.343 L 178.891,150.172 L 178.898,150 L 176.898,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,168.455 L 178.891,168.283 L 178.869,168.112 L 178.832,167.944 L 178.781,167.779 L 178.716,167.62 L 178.637,167.467 L 178.546,167.321 L 178.443,167.184 L 178.328,167.056 L 178.202,166.938 L 178.067,166.831 L 177.923,166.737 L 177.771,166.655 L 177.614,166.587 L 177.45,166.532 L 177.283,166.492 L 177.113,166.466 L 176.941,166.455 L 176.769,166.459 L 176.598,166.477 L 176.429,166.51 L 176.264,166.558 L 176.103,166.619 L 175.948,166.695 L 175.801,166.783 L 175.661,166.883 L 175.53,166.995 L 175.41,167.118 L 175.301,167.251 L 175.203,167.393 L 175.118,167.543 L 175.046,167.699 L 174.988,167.861 L 174.944,168.028 L 174.915,168.197 L 174.9,168.369 L 174.9,168.541 L 174.915,168.712 L 174.944,168.882 L 174.988,169.048 L 175.046,169.21 L 175.118,169.366 L 175.203,169.516 L 175.301,169.658 L 175.41,169.791 L 175.53,169.914 L 175.661,170.026 L 175.801,170.126 L 175.948,170.215 L 176.103,170.29 L 176.264,170.351 L 176.429,170.399 L 176.598,170.432 L 176.769,170.45 L 176.941,170.454 L 177.113,170.443 L 177.283,170.417 L 177.45,170.377 L 177.614,170.322 L 177.771,170.254 L 177.923,170.172 L 178.067,170.078 L 178.202,169.971 L 178.328,169.853 L 178.443,169.725 L 178.546,169.588 L 178.637,169.442 L 178.716,169.289 L 178.781,169.13 L 178.832,168.965 L 178.869,168.797 L 178.891,168.626 L 178.898,168.455 L 176.898,168.455 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,131.545 L 178.891,131.374 L 178.869,131.203 L 178.832,131.035 L 178.781,130.87 L 178.716,130.711 L 178.637,130.558 L 178.546,130.412 L 178.443,130.275 L 178.328,130.147 L 178.202,130.029 L 178.067,129.922 L 177.923,129.828 L 177.771,129.746 L 177.614,129.678 L 177.45,129.623 L 177.283,129.583 L 177.113,129.557 L 176.941,129.546 L 176.769,129.55 L 176.598,129.568 L 176.429,129.601 L 176.264,129.649 L 176.103,129.71 L 175.948,129.785 L 175.801,129.874 L 175.661,129.974 L 175.53,130.086 L 175.41,130.209 L 175.301,130.342 L 175.203,130.484 L 175.118,130.634 L 175.046,130.79 L 174.988,130.952 L 174.944,131.118 L 174.915,131.288 L 174.9,131.459 L 174.9,131.631 L 174.915,131.803 L 174.944,131.972 L 174.988,132.139 L 175.046,132.301 L 175.118,132.457 L 175.203,132.607 L 175.301,132.749 L 175.41,132.882 L 175.53,133.005 L 175.661,133.117 L 175.801,133.217 L 175.948,133.305 L 176.103,133.381 L 176.264,133.442 L 176.429,133.49 L 176.598,133.523 L 176.769,133.541 L 176.941,133.545 L 177.113,133.534 L 177.283,133.508 L 177.45,133.468 L 177.614,133.413 L 177.771,133.345 L 177.923,133.263 L 178.067,133.169 L 178.202,133.062 L 178.328,132.944 L 178.443,132.816 L 178.546,132.679 L 178.637,132.533 L 178.716,132.38 L 178.781,132.221 L 178.832,132.056 L 178.869,131.888 L 178.891,131.717 L 178.898,131.545 L 176.898,131.545 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 178.898,150 L 178.891,149.828 L 178.869,149.657 L 178.832,149.489 L 178.781,149.325 L 178.716,149.166 L 178.637,149.012 L 178.546,148.867 L 178.443,148.729 L 178.328,148.601 L 178.202,148.483 L 178.067,148.377 L 177.923,148.282 L 177.771,148.201 L 177.614,148.132 L 177.45,148.078 L 177.283,148.037 L 177.113,148.012 L 176.941,148 L 176.769,148.004 L 176.598,148.023 L 176.429,148.056 L 176.264,148.103 L 176.103,148.165 L 175.948,148.24 L 175.801,148.328 L 175.661,148.429 L 175.53,148.541 L 175.41,148.664 L 175.301,148.797 L 175.203,148.939 L 175.118,149.088 L 175.046,149.245 L 174.988,149.407 L 174.944,149.573 L 174.915,149.743 L 174.9,149.914 L 174.9,150.086 L 174.915,150.257 L 174.944,150.427 L 174.988,150.593 L 175.046,150.755 L 175.118,150.912 L 175.203,151.061 L 175.301,151.203 L 175.41,151.336 L 175.53,151.459 L 175.661,151.571 L 175.801,151.672 L 175.948,151.76 L 176.103,151.835 L 176.264,151.897 L 176.429,151.944 L 176.598,151.977 L 176.769,151.996 L 176.941,152 L 177.113,151.988 L 177.283,151.963 L 177.45,151.922 L 177.614,151.868 L 177.771,151.799 L 177.923,151.718 L 178.067,151.623 L 178.202,151.517 L 178.328,151.399 L 178.443,151.271 L 178.546,151.133 L 178.637,150.988 L 178.716,150.834 L 178.781,150.675 L 178.832,150.511 L 178.869,150.343 L 178.891,150.172 L 178.898,150 L 176.898,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='35.0455' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >A</text>
<text x='51.0409' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >l</text>
<path d='M 60.3067,42 L 60.3024,41.9004 L 60.2896,41.8015 L 60.2683,41.704 L 60.2387,41.6088 L 60.201,41.5164 L 60.1555,41.4277 L 60.1026,41.3431 L 60.0426,41.2635 L 59.976,41.1893 L 59.9032,41.1211 L 59.8248,41.0594 L 59.7415,41.0046 L 59.6537,40.9572 L 59.5622,40.9176 L 59.4676,40.886 L 59.3707,40.8626 L 59.2721,40.8476 L 59.1725,40.8412 L 59.0728,40.8433 L 58.9737,40.854 L 58.8758,40.8732 L 58.7799,40.9008 L 58.6868,40.9364 L 58.5971,40.98 L 58.5114,41.0311 L 58.4305,41.0894 L 58.3549,41.1544 L 58.2851,41.2257 L 58.2217,41.3027 L 58.1652,41.3848 L 58.116,41.4716 L 58.0744,41.5622 L 58.0407,41.6561 L 58.0152,41.7525 L 57.9982,41.8508 L 57.9896,41.9501 L 57.9896,42.0499 L 57.9982,42.1492 L 58.0152,42.2475 L 58.0407,42.3439 L 58.0744,42.4378 L 58.116,42.5284 L 58.1652,42.6152 L 58.2217,42.6973 L 58.2851,42.7743 L 58.3549,42.8456 L 58.4305,42.9106 L 58.5114,42.9689 L 58.5971,43.02 L 58.6868,43.0636 L 58.7799,43.0992 L 58.8758,43.1268 L 58.9737,43.146 L 59.0728,43.1567 L 59.1725,43.1588 L 59.2721,43.1524 L 59.3707,43.1374 L 59.4676,43.114 L 59.5622,43.0824 L 59.6537,43.0428 L 59.7415,42.9954 L 59.8248,42.9406 L 59.9032,42.8789 L 59.976,42.8107 L 60.0426,42.7365 L 60.1026,42.6569 L 60.1555,42.5723 L 60.201,42.4836 L 60.2387,42.3912 L 60.2683,42.296 L 60.2896,42.1985 L 60.3024,42.0996 L 60.3067,42 L 59.1476,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,46.6364 L 60.3024,46.5367 L 60.2896,46.4378 L 60.2683,46.3404 L 60.2387,46.2451 L 60.201,46.1528 L 60.1555,46.064 L 60.1026,45.9795 L 60.0426,45.8998 L 59.976,45.8256 L 59.9032,45.7574 L 59.8248,45.6957 L 59.7415,45.641 L 59.6537,45.5936 L 59.5622,45.554 L 59.4676,45.5223 L 59.3707,45.4989 L 59.2721,45.484 L 59.1725,45.4775 L 59.0728,45.4797 L 58.9737,45.4904 L 58.8758,45.5096 L 58.7799,45.5371 L 58.6868,45.5728 L 58.5971,45.6163 L 58.5114,45.6675 L 58.4305,45.7257 L 58.3549,45.7907 L 58.2851,45.862 L 58.2217,45.939 L 58.1652,46.0212 L 58.116,46.1079 L 58.0744,46.1986 L 58.0407,46.2924 L 58.0152,46.3889 L 57.9982,46.4871 L 57.9896,46.5865 L 57.9896,46.6862 L 57.9982,46.7856 L 58.0152,46.8839 L 58.0407,46.9803 L 58.0744,47.0742 L 58.116,47.1648 L 58.1652,47.2515 L 58.2217,47.3337 L 58.2851,47.4107 L 58.3549,47.482 L 58.4305,47.547 L 58.5114,47.6053 L 58.5971,47.6564 L 58.6868,47.6999 L 58.7799,47.7356 L 58.8758,47.7631 L 58.9737,47.7823 L 59.0728,47.793 L 59.1725,47.7952 L 59.2721,47.7888 L 59.3707,47.7738 L 59.4676,47.7504 L 59.5622,47.7188 L 59.6537,47.6791 L 59.7415,47.6317 L 59.8248,47.577 L 59.9032,47.5153 L 59.976,47.4471 L 60.0426,47.3729 L 60.1026,47.2932 L 60.1555,47.2087 L 60.201,47.1199 L 60.2387,47.0276 L 60.2683,46.9323 L 60.2896,46.8349 L 60.3024,46.736 L 60.3067,46.6364 L 59.1476,46.6364 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,37.3636 L 60.3024,37.264 L 60.2896,37.1651 L 60.2683,37.0677 L 60.2387,36.9724 L 60.201,36.8801 L 60.1555,36.7913 L 60.1026,36.7068 L 60.0426,36.6271 L 59.976,36.5529 L 59.9032,36.4847 L 59.8248,36.423 L 59.7415,36.3683 L 59.6537,36.3209 L 59.5622,36.2812 L 59.4676,36.2496 L 59.3707,36.2262 L 59.2721,36.2112 L 59.1725,36.2048 L 59.0728,36.207 L 58.9737,36.2177 L 58.8758,36.2369 L 58.7799,36.2644 L 58.6868,36.3001 L 58.5971,36.3436 L 58.5114,36.3947 L 58.4305,36.453 L 58.3549,36.518 L 58.2851,36.5893 L 58.2217,36.6663 L 58.1652,36.7485 L 58.116,36.8352 L 58.0744,36.9258 L 58.0407,37.0197 L 58.0152,37.1161 L 57.9982,37.2144 L 57.9896,37.3138 L 57.9896,37.4135 L 57.9982,37.5129 L 58.0152,37.6111 L 58.0407,37.7076 L 58.0744,37.8014 L 58.116,37.8921 L 58.1652,37.9788 L 58.2217,38.061 L 58.2851,38.138 L 58.3549,38.2093 L 58.4305,38.2743 L 58.5114,38.3325 L 58.5971,38.3837 L 58.6868,38.4272 L 58.7799,38.4629 L 58.8758,38.4904 L 58.9737,38.5096 L 59.0728,38.5203 L 59.1725,38.5225 L 59.2721,38.516 L 59.3707,38.5011 L 59.4676,38.4777 L 59.5622,38.446 L 59.6537,38.4064 L 59.7415,38.359 L 59.8248,38.3043 L 59.9032,38.2426 L 59.976,38.1744 L 60.0426,38.1002 L 60.1026,38.0205 L 60.1555,37.936 L 60.201,37.8472 L 60.2387,37.7549 L 60.2683,37.6596 L 60.2896,37.5622 L 60.3024,37.4633 L 60.3067,37.3636 L 59.1476,37.3636 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 60.3067,42 L 60.3024,41.9004 L 60.2896,41.8015 L 60.2683,41.704 L 60.2387,41.6088 L 60.201,41.5164 L 60.1555,41.4277 L 60.1026,41.3431 L 60.0426,41.2635 L 59.976,41.1893 L 59.9032,41.1211 L 59.8248,41.0594 L 59.7415,41.0046 L 59.6537,40.9572 L 59.5622,40.9176 L 59.4676,40.886 L 59.3707,40.8626 L 59.2721,40.8476 L 59.1725,40.8412 L 59.0728,40.8433 L 58.9737,40.854 L 58.8758,40.8732 L 58.7799,40.9008 L 58.6868,40.9364 L 58.5971,40.98 L 58.5114,41.0311 L 58.4305,41.0894 L 58.3549,41.1544 L 58.2851,41.2257 L 58.2217,41.3027 L 58.1652,41.3848 L 58.116,41.4716 L 58.0744,41.5622 L 58.0407,41.6561 L 58.0152,41.7525 L 57.9982,41.8508 L 57.9896,41.9501 L 57.9896,42.0499 L 57.9982,42.1492 L 58.0152,42.2475 L 58.0407,42.3439 L 58.0744,42.4378 L 58.116,42.5284 L 58.1652,42.6152 L 58.2217,42.6973 L 58.2851,42.7743 L 58.3549,42.8456 L 58.4305,42.9106 L 58.5114,42.9689 L 58.5971,43.02 L 58.6868,43.0636 L 58.7799,43.0992 L 58.8758,43.1268 L 58.9737,43.146 L 59.0728,43.1567 L 59.1725,43.1588 L 59.2721,43.1524 L 59.3707,43.1374 L 59.4676,43.114 L 59.5622,43.0824 L 59.6537,43.0428 L 59.7415,42.9954 L 59.8248,42.9406 L 59.9032,42.8789 L 59.976,42.8107 L 60.0426,42.7365 L 60.1026,42.6569 L 60.1555,42.5723 L 60.201,42.4836 L 60.2387,42.3912 L 60.2683,42.296 L 60.2896,42.1985 L 60.3024,42.0996 L 60.3067,42 L 59.1476,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910000085 borane Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- DMJZZSLVPSMWCS-UHFFFAOYSA-N diborane Chemical compound B1[H]B[H]1 DMJZZSLVPSMWCS-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 210000003296 Saliva Anatomy 0.000 description 1
- 210000003491 Skin Anatomy 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- TWXTWZIUMCFMSG-UHFFFAOYSA-N nitride(3-) Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [N-3] TWXTWZIUMCFMSG-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRA-RED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
- H02S40/00—Components or accessories in combination with PV modules, not provided for in groups H02S10/00 - H02S30/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Abstract
本发明适用于太阳能发电发热技术领域,公开了一种光伏光热一体化组件及其制备方法,所述光伏光热一体化组件包括边框、封装在所述边框一侧的盖板、镀制在所述盖板内侧的镀膜层、设置在所述镀膜层表面的导热件、焊接在所述导热件远离所述镀膜层的一侧的多个待加热部件,以及填充在所述边框、导热件和待加热部件之间的保温层。本发明通过设置盖板和镀膜层用于将吸收的太阳光转化为电能,而部分透过的太阳光转化为热量,由导热件传送给焊接在导热件下方的多个待加热部件,从而加热待加热部件中的物质,同时在边框、导热件和待加热部件之间填充保温层,进一步防止热量散失,使得太阳光的部分余热得到充分利用。
Description
技术领域
本发明属于太阳能发电发热技术领域,尤其涉及一种光伏光热一体化组件及其制备方法。
背景技术
目前,光伏发电已经为人们提供了很多的便利,但是仅仅使用光伏组件将太阳能转化为电能,会导致光伏组件在使用的过程中浪费太阳光的部分余热。因此,市场上出现了光伏光热一体化的组件,多为晶体硅太阳能光伏光热一体化组件,然而,其结构复杂,成本较高,安装不便。
发明内容
本发明的目的在于克服上述现有技术的不足,提供了一种光伏光热一体化组件,其结构简单,且充分利用了太阳光的部分余热。
本发明的技术方案是:提供一种光伏光热一体化组件,包括边框、封装在所述边框一侧的盖板、镀制在所述盖板内侧的镀膜层、设置在所述镀膜层表面的导热件、焊接在所述导热件远离所述镀膜层的一侧的多个待加热部件,以及填充在所述边框、导热件和待加热部件之间的保温层。
本发明还提供了一种光伏光热一体化组件的制备方法,包括以下步骤:
在盖板上层积镀膜层;
将待加热部件通过激光焊焊接在导热件上,将镀膜盖板与所述导热件及待加热部件封装在边框内;
在所述边框、导热件及待加热部件之间填充保温层。
实施本发明的一种光伏光热一体化组件,具有以下有益效果:通过设置盖板和镀膜层用于将吸收的太阳光转化为电能,而部分透过的太阳光转化为热量,由导热件传送给焊接在导热件下方的多个待加热部件,从而加热待加热部件中的物质,同时在边框、导热件和待加热部件之间填充保温层,进一步防止热量散失,使得太阳光的部分余热得到充分利用。
附图说明
为了更清楚地说明本发明实施例中的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。
图1是本发明实施例提供的光伏光热一体化组件的结构示意图;
图2是本发明实施例提供的镀膜层的结构示意图;
图3是本发明实施例提供的光伏光热一体化组件的制备方法流程图;
图4是图3中步骤S1的制备方法流程图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。
需要说明的是,当元件被称为“固定于”或“设置于”另一个元件,它可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为是“连接于”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。
还需要说明的是,本发明实施例中的左、右、上、下等方位用语,仅是互为相对概念或是以产品的正常使用状态为参考的,而不应该认为是具有限制性的。
如图1所示,本发明实施例提供的光伏光热一体化组件包括边框1、盖板2、镀膜层3、导热件4、待加热部件5和保温层6。其中,盖板2封装在边框1的一侧,具体地,盖板2封装在边框1具有开口的一侧。镀膜层3镀制在盖板2的内侧,即镀制在盖板2朝向边框1的一侧。导热件4设置在镀膜层3的内侧,且导热件4用于传导热量。优选地,导热件4为铝板。在导热件4远离镀膜层3的一侧焊接有多个待加热部件5,优选地,该待加热部件5是进出口水管,该待加热部件5内流通有水,且待加热部件5的具体数量根据实际需要确定。进一步优选地,该待加热部件5由导热材料制成,且通过激光焊将多个待加热部件5焊接在导热件4的一侧。在边框1、导热件4和多个待加热部件5之间填充有保温层6,该保温层6具有保温功能,主要用于防止热量散失。优选地,该保温层6由保温材料制成。
本发明实施例的光伏光热一体化组件,其通过设置盖板2和镀膜层3用于将吸收的太阳光转化为电能,而部分透过的太阳光转化为热量,由导热件4传送给焊接在导热件4下方的多个待加热部件5,从而加热待加热部件5中的物质,同时在边框1、导热件4和待加热部件5之间填充保温层6,进一步防止热量散失,使得太阳光的部分余热得到充分利用。
进一步地,如图2所示,镀膜层3包括第一透明导电氧化物层31、非晶硅层32、第二透明导电氧化物层33和绝缘层34。其中,第一透明导电氧化物层31通过磁控溅射溅射在盖板2靠近导热件4的一侧上;非晶硅层32通过射频电场产生辉光放电分解气体形成在第一透明导电氧化物层31上;第二透明导电氧化物层33通过磁控溅射溅射在非晶硅层32上;绝缘层34通过磁控溅射溅射在第二透明导电氧化物层33上。
优选地,在本发明的一个实施例中,上述第一透明导电氧化物层31为以盖板2为衬底通过磁控溅射溅射一层膜厚为500nm~1000nm的透明导电氧化物,该透明导电氧化物可选用ITO、FTO、ZnO及AZO中的一种。可以理解的是,在本发明的其它实施例中,该第一透明导电氧化物层31的厚度也可以是其它可实现的数值。
优选地,在本发明的一个实施例中,上述第二透明导电氧化物层33是以镀制有非晶硅层32的盖板2为衬底通过磁控溅射溅射的一层膜厚为500nm~1000nm的透明导电氧化物,该透明导电氧化物可选用ITO、FTO、ZnO及AZO中的一种。可以理解的是,在本发明的其它实施例中,该第二透明导电氧化物层31的厚度也可以是其它可实现的数值。
进一步地,上述绝缘层34为二氧化硅膜层,可起到绝缘的作用,该绝缘层34的膜层厚度为0~100nm。
进一步地,非晶硅层32包括依次通过射频电场产生辉光放电分解气体形成的P型非晶硅321、I型非晶硅322和N型非晶硅323。具体地,把硅烷与硼烷(SiH4+B2H6)的混合气体通入真空度保持在10Pa~1000Pa的反应室中,射频电场产生辉光放电,硅烷与硼烷的混合气体被分解,在盖板2上形成P型非晶硅321;把硅烷(SiH4)气体通入真空度保持在10Pa~1000Pa的反应室中,射频电场产生辉光放电,硅烷气体被分解,在层积有P型非晶硅321的盖板2上形成I型非晶硅322;把硅烷与磷烷(SiH4+PH3)的混合气体通入真空度保持在10Pa~1000Pa的反应室中,射频电场产生辉光放电,硅烷与磷烷的混合气体被分解,在层积有I型非晶硅322的盖板2上形成N型非晶硅323,从而实现非晶硅层32的层积。
优选地,盖板2为钢化玻璃,且该盖板2的透过率大于91.6%。
进一步地,为了将盖板2、镀膜层3、导热件4、待加热部件5和保温层6更好地封装在边框1内,在边框1的一侧形成有限位部11,盖板2远离镀膜层3的一侧抵接在限位部11上,使得本发明实施例的光伏光热一体化组件结构紧凑,方便安装。
如图3所示,本发明还提供了一种光伏光热一体化组件的制备方法,该方法具体包括以下步骤:
S1、在盖板2上层积镀膜层3;
S2、将待加热部件5通过激光焊焊接在导热件4上,将镀膜盖板2与导热件4及待加热部件5封装在边框1内;
S3、在边框1、导热件4及待加热部件5之间填充保温材料。
具体地,在上述步骤S1中,盖板2为钢化玻璃,且该盖板2的透过率大于91.6%。
具体地,在上述步骤S2中,导热件4为铝板;待加热部件5由导热材料制成,且通过激光焊将多个待加热部件5焊接在导热件4的一侧;保温层6由保温材料制成,具有保温功能。
进一步地,如图4所示,上述步骤S1中的在盖板2上层积镀膜层3具体包括以下步骤:
S11、将经过检测的盖板2投入到加热除杂腔室进行加热除杂,接着进入导电氧化物镀膜腔室并通过磁控溅射方法在盖板2上镀制一层厚度为500nm-1000nm的透明导电氧化物;
S12、以镀有导电氧化物的盖板2为衬底,依次通过射频电场产生辉光放电分解气体在其表面形成P型非晶硅321、I型非晶硅322和N型非晶硅323;
S13、在层积好非晶硅薄膜的盖板2上通过磁控溅射镀制一层透明导电氧化物及一层二氧化硅绝缘材料,即镀制第二透明导电氧化物层33和绝缘层34。
具体地,在上述步骤S11中,首先将经过检测的钢化玻璃投入到加热除杂腔室,经过加热腔以后,进入导电氧化物镀膜腔室,镀制第一透明导电氧化物层31。该第一透明导电氧化物层31优选为AZO膜层,镀膜过程中溅射靶选用2%的AZO靶,溅射气体采用Ar气,工作压力为0.3Pa~0.5Pa,溅射电源采用DC电源,该AZO膜层的膜厚为500nm~1000nm,镀制完后,进入雾化腔、冷却处理腔,待温度冷却至室温后取出镀制好第一透明导电氧化物层31的钢化玻璃。
具体地,在上述步骤S12中,通过以镀制有第一透明导电氧化物层31的钢化玻璃为衬底,在其表面形成非晶硅薄膜材料,即形成非晶硅层32。首先将硅烷与硼烷气体通入真空度为10Pa~1000Pa的反应室中,采用射频电场产生辉光放电使得通入的气体分解,在镀制有第一透明导电氧化物层31的钢化玻璃上形成P型非晶硅321。将层积好P型非晶硅321的衬底送至下一个腔室,该腔室通入硅烷气体,同样采用射频电场产生辉光放电使得通入的气体分解,在层积有P型非晶硅321的钢化玻璃上形成I型非晶硅322。将层积好I型非晶硅322的衬底送至下一个腔室,该腔室通入硅烷与硼烷气体,采用射频电场产生辉光放电使得通入的气体分解,在层积有I型非晶硅322的钢化玻璃上形成N型非晶硅323,从而实现非晶硅层32的层积。
具体地,在上述步骤S13中,第二透明导电氧化物层33可选用ITO、FTO、ZnO、AZO导电氧化物中的一种;绝缘层34可起到绝缘的作用,该绝缘层34的膜层厚度为0~100nm。
本发明实施例提供的光伏光热一体化组件的制备方法,其镀膜设备主要通过磁控溅射与射频电场产生辉光放电层积膜层,设备简单。
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换或改进等,均应包含在本发明的保护范围之内。
Claims (7)
1.一种光伏光热一体化组件,其特征在于,包括边框(1)、封装在所述边框(1)一侧的盖板(2)、镀制在所述盖板(2)内侧的镀膜层(3)、设置在所述镀膜层(3)表面的导热件(4)、焊接在所述导热件(4)远离所述镀膜层(3)的一侧的多个待加热部件(5),以及填充在所述边框(1)、导热件(4)和待加热部件(5)之间的保温层(6),所述边框(1)的一侧形成有限位部(11),所述盖板(2)远离所述镀膜层(3)的一侧抵接在所述限位部(11)上;
所述镀膜层(3)包括第一透明导电氧化物层(31)、形成在所述第一透明导电氧化物层(31)上的非晶硅层(32)、形成在所述非晶硅层(32)上的第二透明导电氧化物层(33),以及形成在所述第二透明导电氧化物层(33)上的绝缘层(34)。
2.如权利要求1所述的光伏光热一体化组件,其特征在于,所述非晶硅层(32)包括依次通过射频电场产生辉光放电分解气体形成的P型非晶硅(321)、I型非晶硅(322)和N型非晶硅(323)。
3.如权利要求1所述的光伏光热一体化组件,其特征在于,所述第一透明导电氧化物层(31)为ITO、FTO、ZnO及AZO中的一种;所述第二透明导电氧化物层(33)为ITO、FTO、ZnO及AZO中的一种。
4.如权利要求1所述的光伏光热一体化组件,其特征在于,所述第一透明导电氧化物层(31)的厚度为500nm-1000nm。
5.如权利要求1所述的光伏光热一体化组件,其特征在于,所述绝缘层(34)为二氧化硅膜层,且所述绝缘层(34)的膜层厚度为0-100nm。
6.如权利要求1所述的光伏光热一体化组件,其特征在于,所述盖板(2)为钢化玻璃,且所述盖板(2)的透过率大于91.6%。
7.一种光伏光热一体化组件的制备方法,其特征在于,包括以下步骤:
将经过检测的盖板(2)投入到加热除杂腔室进行加热除杂,接着进入导电氧化物镀膜腔室并通过磁控溅射方法在所述盖板(2)上镀制一层厚度为500nm-1000nm的透明导电氧化物;
以镀有导电氧化物的所述盖板(2)为衬底,依次通过射频电场产生辉光放电分解气体在其表面形成P型非晶硅(321)、I型非晶硅(322)和N型非晶硅(323);
在层积好非晶硅薄膜的所述盖板(2)上通过磁控溅射镀制一层透明导电氧化物及一层二氧化硅绝缘材料,以在盖板(2)上层积镀膜层(3);
将待加热部件(5)通过激光焊焊接在导热件(4)上,将镀膜盖板(2)与所述导热件(4)及待加热部件(5)封装在边框(1)内;
在所述边框(1)、导热件(4)及待加热部件(5)之间填充保温层(6)。
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