CN106670970A - 一种用于cmp设备的抛光垫活化器施压机构及其运行方法 - Google Patents
一种用于cmp设备的抛光垫活化器施压机构及其运行方法 Download PDFInfo
- Publication number
- CN106670970A CN106670970A CN201611207197.1A CN201611207197A CN106670970A CN 106670970 A CN106670970 A CN 106670970A CN 201611207197 A CN201611207197 A CN 201611207197A CN 106670970 A CN106670970 A CN 106670970A
- Authority
- CN
- China
- Prior art keywords
- polishing pad
- bearing
- rotary shaft
- piston shaft
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 52
- 239000012190 activator Substances 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims description 19
- 230000007246 mechanism Effects 0.000 title abstract description 3
- 238000007789 sealing Methods 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 125000006850 spacer group Chemical group 0.000 claims abstract description 5
- 210000003746 feather Anatomy 0.000 claims description 14
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 9
- 230000033001 locomotion Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 5
- 230000002452 interceptive effect Effects 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 4
- 230000005484 gravity Effects 0.000 claims description 3
- 229910001651 emery Inorganic materials 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 238000009987 spinning Methods 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000002045 lasting effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000013028 medium composition Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000009774 resonance method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611207197.1A CN106670970B (zh) | 2016-12-23 | 2016-12-23 | 一种用于cmp设备的抛光垫活化器施压机构及其运行方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611207197.1A CN106670970B (zh) | 2016-12-23 | 2016-12-23 | 一种用于cmp设备的抛光垫活化器施压机构及其运行方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106670970A true CN106670970A (zh) | 2017-05-17 |
CN106670970B CN106670970B (zh) | 2019-01-01 |
Family
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Family Applications (1)
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CN201611207197.1A Active CN106670970B (zh) | 2016-12-23 | 2016-12-23 | 一种用于cmp设备的抛光垫活化器施压机构及其运行方法 |
Country Status (1)
Country | Link |
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CN (1) | CN106670970B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109500712A (zh) * | 2018-12-14 | 2019-03-22 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 抛光装置及半导体晶圆平坦化设备 |
CN110977650A (zh) * | 2020-01-08 | 2020-04-10 | 洛阳聚享新科智能科技有限公司 | 一种立式双端面研磨机摇臂装置及控制方法 |
CN114193326A (zh) * | 2021-12-22 | 2022-03-18 | 莱玛特·沃尔特斯(沈阳)精密机械有限公司 | 一种抛光机的抛光盘修整装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1514760A (zh) * | 2001-03-30 | 2004-07-21 | ��ķ�о�����˾ | 可调节力作用空气台板与主轴系统及其使用方法 |
JP2006269906A (ja) * | 2005-03-25 | 2006-10-05 | Renesas Technology Corp | ドレッサの品質管理方法、cmp用ドレッサの製造方法、cmp用ドレッサ、cmp装置、半導体装置の製造方法、および半導体装置 |
EP1860689A1 (en) * | 2005-03-14 | 2007-11-28 | Shin-Etsu Handotai Company Limited | Polishing head for semiconductor wafer, polishing apparatus and polishing method |
CN101218067A (zh) * | 2005-07-09 | 2008-07-09 | Tbw工业有限公司 | 用于cmp垫修整的增强式末端执行臂装置 |
CN101367200A (zh) * | 2007-08-14 | 2009-02-18 | 中芯国际集成电路制造(上海)有限公司 | 一种抛光垫修整头 |
CN101623849A (zh) * | 2009-07-31 | 2010-01-13 | 清华大学 | 一种用于对抛光垫进行修整的修整装置 |
US20100311309A1 (en) * | 2009-06-04 | 2010-12-09 | Hiroyuki Shinozaki | Dressing apparatus, dressing method, and polishing apparatus |
CN103506956A (zh) * | 2013-09-26 | 2014-01-15 | 中国电子科技集团公司第四十五研究所 | 一种用于晶圆化学机械平坦化设备中的抛光垫修整器 |
-
2016
- 2016-12-23 CN CN201611207197.1A patent/CN106670970B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1514760A (zh) * | 2001-03-30 | 2004-07-21 | ��ķ�о�����˾ | 可调节力作用空气台板与主轴系统及其使用方法 |
EP1860689A1 (en) * | 2005-03-14 | 2007-11-28 | Shin-Etsu Handotai Company Limited | Polishing head for semiconductor wafer, polishing apparatus and polishing method |
JP2006269906A (ja) * | 2005-03-25 | 2006-10-05 | Renesas Technology Corp | ドレッサの品質管理方法、cmp用ドレッサの製造方法、cmp用ドレッサ、cmp装置、半導体装置の製造方法、および半導体装置 |
CN101218067A (zh) * | 2005-07-09 | 2008-07-09 | Tbw工业有限公司 | 用于cmp垫修整的增强式末端执行臂装置 |
CN101367200A (zh) * | 2007-08-14 | 2009-02-18 | 中芯国际集成电路制造(上海)有限公司 | 一种抛光垫修整头 |
US20100311309A1 (en) * | 2009-06-04 | 2010-12-09 | Hiroyuki Shinozaki | Dressing apparatus, dressing method, and polishing apparatus |
CN101623849A (zh) * | 2009-07-31 | 2010-01-13 | 清华大学 | 一种用于对抛光垫进行修整的修整装置 |
CN103506956A (zh) * | 2013-09-26 | 2014-01-15 | 中国电子科技集团公司第四十五研究所 | 一种用于晶圆化学机械平坦化设备中的抛光垫修整器 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109500712A (zh) * | 2018-12-14 | 2019-03-22 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 抛光装置及半导体晶圆平坦化设备 |
CN110977650A (zh) * | 2020-01-08 | 2020-04-10 | 洛阳聚享新科智能科技有限公司 | 一种立式双端面研磨机摇臂装置及控制方法 |
CN114193326A (zh) * | 2021-12-22 | 2022-03-18 | 莱玛特·沃尔特斯(沈阳)精密机械有限公司 | 一种抛光机的抛光盘修整装置 |
Also Published As
Publication number | Publication date |
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CN106670970B (zh) | 2019-01-01 |
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TR01 | Transfer of patent right |
Effective date of registration: 20200812 Address after: 101, 2 / F, building 2, No. 1, third Taihe street, Beijing Economic and Technological Development Zone, Daxing District, Beijing 100176 Patentee after: Beijing ShuoKe precision electronic equipment Co.,Ltd. Address before: 100176, No. 1, Tai Street, Beijing economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING SEMICONDUCTOR EQUIPMENT INSTITUTE (THE 45TH Research Institute OF CETC) |
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Address after: 100176 101, floor 2, building 2, No. 1, Taihe Third Street, economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi Precision Technology Co.,Ltd. Address before: 100176 Room 101, floor 2, building 2, No. 1, Taihe 3rd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: Beijing ShuoKe precision electronic equipment Co.,Ltd. |
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CP03 | Change of name, title or address |