CN106653648A - Overturning mechanism - Google Patents
Overturning mechanism Download PDFInfo
- Publication number
- CN106653648A CN106653648A CN201510730049.7A CN201510730049A CN106653648A CN 106653648 A CN106653648 A CN 106653648A CN 201510730049 A CN201510730049 A CN 201510730049A CN 106653648 A CN106653648 A CN 106653648A
- Authority
- CN
- China
- Prior art keywords
- claws
- overturning
- substrate
- jaws
- main shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Abstract
An overturning mechanism comprises an overturning main shaft (1), a shrink disc (2), a clamping cylinder (3), a linear guide rail (4), a synchronous rack-and-pinion (5) and claws (6). The overturning main shaft (1) is fixed by the shrink disc. The two claws (6) are fixed on a slide block of the linear guide rail (4) and can slide. The synchronous rack-and-pinion (5) can adjust the distance between the two claws (6) so that the two claws (6) are synchronously folded and unfolded. The overturning mechanism is characterized in that the two claws (6) clamp a workpiece, rise a certain distance and then turn over, and a moving mechanism transfers the workpiece to a station after overturning. The overturning mechanism replaces manual operations, prevents substrates from changing colors and rusting, and guarantees the quality of products.
Description
Technical field
The present invention relates to a kind of switching mechanism, mainly overturns to finished product or semi-finished product, more particularly to a kind of mechanism for being overturn to substrate or substrate in semiconductor equipment.
Background technology
At present, in the manufacture process of semiconductor, the upset of substrate is it is critical that an operation.Whether rationally the reliability of substrate reversing machine structure design, will directly influence the reprocessing of the postorder of substrate, such as the positioning precision of switching mechanism is not high, and the substrate position after overturning can be caused to have deviation, and then have influence on processing and the positioning precision of substrate；The speed of upset is slower, and some row problems such as prolongation of production cycle can be caused again.Existing more universal substrate reversing machine structure is that directly substrate is overturn, this kind of substrate reversing machine structure is overturn by substrate, substrate is manually placed on substrate support by machinery, substrate support does ascending motion under the drive of the mechanism such as cylinder or motor, stop when reaching specified location, while the substrate laid thereon is clamped by substrate chuck.Substrate support declines, and substrate chuck carries out 180 degree upset under the driving of switching mechanism, and hereafter substrate support rises reach the position specified once again.At the same time, substrate chuck falls substrate, and substrate transports part and transports substrate.Substrate reversing machine structure above has that following operation first is too many, needs the more time, extends the production cycle.Switching process will cause the secondary pollution of substrate.
The content of the invention
Not enough for more than, it is an object of the invention to provide the switching mechanism of substrate support, the clamping of substrate chuck, releases, upset are carried out in an environment, make not polluting for vacuum gas quality in switching process, the cleannes of holding substrate.
The technical scheme is that what is be accomplished by：A kind of switching mechanism, it is made up of upset main shaft, expansion sleeve, clamping cylinder, line slideway, synchromesh gear tooth bar, jaw, upset main shaft is fixed with expansion sleeve, two jaws are fixed on the slide block of line slideway and slidably, synchromesh gear tooth bar can adjust the distance of two jaws, two groups of jaws is synchronously done to open and is tightened up action；It is characterized in that：Two described jaws are by Workpiece clamping and rise and carry out after certain distance rotary movement, and workpiece is transplanted to the station after upset for travel mechanism.
The present invention, substitutes artificial operation, can effectively save the labour intensity of operator, prevents substrate discoloration from getting rusty, it is ensured that the quality of product is absolutely qualified.
Description of the drawings
Fig. 1 is the structural representation of the present invention.
Specific embodiment
Known by Fig. 1, a kind of switching mechanism, it is made up of upset main shaft 1, expansion sleeve 2, clamping cylinder 3, line slideway 4, synchromesh gear tooth bar 5, jaw 6, upset main shaft 1 is fixed with expansion sleeve, two jaws 6 are fixed on the slide block of line slideway 4 and slidably, synchromesh gear tooth bar 5 can adjust the distance of two jaws 6, make two groups of jaws 6 it is synchronous do to open tighten up action；It is characterized in that：Two described jaws 6 are by Workpiece clamping and rise and carry out after certain distance rotary movement, and travel mechanism is transplanted to workpiece after upset.
Claims (1)
1. a kind of switching mechanism, by upset main shaft（1）, expansion sleeve（2）, clamping cylinder（3）, line slideway（4）, synchromesh gear tooth bar（5）, jaw（6）Composition, overturns main shaft（1）Fixed with expansion sleeve, two jaws（6）It is fixed on line slideway（4）Slide block on and slidably, synchromesh gear tooth bar（5）Two jaws can be adjusted（6）Distance, make two groups of jaws（6）Synchronously do to open and tighten up action；It is characterized in that：Two described jaws（6）By Workpiece clamping and rise and carry out after certain distance rotary movement, workpiece is transplanted to the station after upset for travel mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510730049.7A CN106653648A (en) | 2015-11-02 | 2015-11-02 | Overturning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510730049.7A CN106653648A (en) | 2015-11-02 | 2015-11-02 | Overturning mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106653648A true CN106653648A (en) | 2017-05-10 |
Family
ID=58809699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510730049.7A Pending CN106653648A (en) | 2015-11-02 | 2015-11-02 | Overturning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106653648A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107414446A (en) * | 2017-08-17 | 2017-12-01 | 安徽合力股份有限公司 | A kind of automatic turning frock for the assembling of brake drum wheel hub assembly |
| CN112652683A (en) * | 2021-01-20 | 2021-04-13 | 上海安洁颜文化传媒有限公司 | Photovoltaic panel assembly stacking device capable of automatically detecting and correcting in transmission |
| CN113371154A (en) * | 2021-08-13 | 2021-09-10 | 南通中舟联合船务工程有限公司 | Mounting structure of ship side thruster |
-
2015
- 2015-11-02 CN CN201510730049.7A patent/CN106653648A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107414446A (en) * | 2017-08-17 | 2017-12-01 | 安徽合力股份有限公司 | A kind of automatic turning frock for the assembling of brake drum wheel hub assembly |
| CN112652683A (en) * | 2021-01-20 | 2021-04-13 | 上海安洁颜文化传媒有限公司 | Photovoltaic panel assembly stacking device capable of automatically detecting and correcting in transmission |
| CN113371154A (en) * | 2021-08-13 | 2021-09-10 | 南通中舟联合船务工程有限公司 | Mounting structure of ship side thruster |
| CN113371154B (en) * | 2021-08-13 | 2021-10-29 | 南通中舟联合船务工程有限公司 | Mounting structure of ship side thruster |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20150273588A1 (en) | Apparatus for on-line deburring wheel blank | |
| TW200730255A (en) | Machining apparatus and method used thereby | |
| CN201960402U (en) | Automatic material loading and unloading device for double-axis chamfering machine | |
| CN205290372U (en) | Full automatic processing production line of end cover | |
| CN106653648A (en) | Overturning mechanism | |
| CN104985474A (en) | Blanking manipulator | |
| CN106112610B (en) | Three axle CNC automatic loading/unloadings and multiaspect topping machanism | |
| CN203170977U (en) | Full-automatic digital controlled lathe | |
| ATE524271T1 (en) | METHOD AND DEVICE FOR Clamping a RECTANGULAR, PARALLELEPIPEDIC WORKPIECE | |
| CN102873366A (en) | Drilling machining lathe of multi-type pipes | |
| CN104441502A (en) | Single-working-platform and double-shearing-production-line type piece shearing machine and production process | |
| CN202943293U (en) | Novel tap drilling machine | |
| CN103522300A (en) | Turning-over front mechanical arm | |
| CN103567806B (en) | A kind of automatic assembly line Workpiece tilting device | |
| WO2015002621A1 (en) | A processing line which can realize processes like drilling, milling and cutting | |
| CN104924298B (en) | A kind of finger feed device and processing method | |
| CN205166549U (en) | Automobile wheel hub bearing automatic processing production line | |
| CN208408416U (en) | A kind of screw-rolling machine | |
| CN203565876U (en) | Automation line for shaft part machining | |
| CN105345483A (en) | Automatic machining production line for automobile wheel hub bearing | |
| CN104029072B (en) | Lathe synchronism mechanism in parallel | |
| CN207326517U (en) | Starter armature smart car machine | |
| CN105364622A (en) | Numerical control machine tool equipped with manipulator and workpiece assembly/disassembly method | |
| CN203764987U (en) | NdFeB automatic cutting machine tool | |
| CN104785971B (en) | A kind of robot welding workstation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170510 |
|
| WD01 | Invention patent application deemed withdrawn after publication |