CN106647175A - Moving body measurement and initialization apparatus - Google Patents
Moving body measurement and initialization apparatus Download PDFInfo
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- CN106647175A CN106647175A CN201510731086.XA CN201510731086A CN106647175A CN 106647175 A CN106647175 A CN 106647175A CN 201510731086 A CN201510731086 A CN 201510731086A CN 106647175 A CN106647175 A CN 106647175A
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Abstract
The invention discloses a moving body measurement and initialization apparatus used for measuring displacement of a moving body in an X direction, a Y direction and an R<z> direction and performing initialization resetting on the moving body; the moving body measurement and initialization apparatus comprises three two-dimensional measurement mechanisms, decoupling mechanisms arranged on the two-dimensional measurement mechanisms, and four initialization resetting mechanisms, wherein two the two-dimensional measurement mechanisms are positioned in the X direction of the moving body while the last the two-dimensional measurement mechanism are positioned in the Y direction of the moving body; each two-dimensional measurement mechanism comprises two mutually-perpendicular moving pairs and a rotary pair connected with the moving body; each decoupling mechanism is connected with the rotary pair and one of the moving pairs; and two initialization resetting mechanisms are positioned in the X direction of the moving body while the other two initialization resetting mechanisms are positioned in the Y direction of the moving body. By virtue of the moving body measurement and initialization apparatus, decoupling of the moving body in R<x>, R<y> and Z directions as well as the initialization resetting of the moving body can be realized, so that the measurement accuracy and the stability and the working efficiency of the measurement apparatus can be effectively improved.
Description
Technical field
Present invention relates particularly to a kind of measurement of movable body and apparatus for initializing.
Background technology
With the development of photoetching machine technique, the precision, speed, acceleration and reliability to workpiece table system will
Seek more and more higher.Work stage improves exposure quality to realize the hi-Fix of exposure desk, needs measurement
System provides the vibration interference of accurate measurement result and the outer bound pair exposure desk of isolation, but due to workpiece director
Stroke motion speed, acceleration are higher, bigger to the reaction force of under(-)chassis, excessive reaction force
Measuring system can be fed back to, certainty of measurement is affected.Therefore existing work stage technology is all by installing balance
Quality module to reduce or eliminate work stage Long travel motion process in impact to measuring system.
As shown in figure 1, for a kind of existing structural representation of air-flotation type workpiece table system, including being fixedly installed
Under(-)chassis 101, the balance mass module 102 being connected with under(-)chassis 101, located at balance mass module
Y-direction air-float guide rail 103 on 102, and the exposure desk 104 on Y-direction air-float guide rail 103.Wherein
Balance mass module 102 realizes X, Y and Rz three-degree-of-freedom motion in plane under the support of floating cushion, exposes
Light table 104 is moved realizing Long travel by the Y-direction air-float guide rail 103 and the X of itself to linear electric motors.
According to the conservation of momentum, balance mass module 102 can absorb the reaction force of exposure desk 104 to reduce exposure desk
Impact of 104 motions to measuring system, while having isolated extraneous vibration to exposure desk 104 by arranging floating cushion
Interference.
But balance mass module 102 needs to realize by a set of servo and measurement apparatus initially at work
X, Y and Rz motion and control under change pattern, stand-alone mode and follow the mode.Existing planar is surveyed
Accurate measurement is realized using interferometer measurement in amount technology, but the method needs to design light path, complex structure,
It is relatively costly；Although and existing two-dimensional grating chi mensuration simple structure, installation accuracy has high demands,
Debugging difficulty is big, cannot ensure for the certainty of measurement of larger-size balance mass module.
For the problems referred to above, a kind of measurement of in-plane motion device and method is occurred in that therewith, utilize in the technology
Three groups of one-dimensional relative optical grating ruler measurement components completing X, Y and Rz measurement, install and adjust by the method low cost
Examination is easy, the deficiency that but still there is following three aspect：First, roller straight line fortune in groove in the measurement assembly
When dynamic, wheel outer ring produces larger force of sliding friction because compressing, and accelerates the abrasion of wheel outer ring, causes wheel
Gap is produced with groove, so as to substantially reduce certainty of measurement；2nd, cannot realize to balance mass module in plane
The decoupling of Rx, Ry and the deviation of Z-direction for being caused due to component assembly error during interior motion；3rd, due to flat
Weighing apparatus quality module in mechanical limit position small electromotor cannot out movement, cause the balance mass module can not
Initialization is realized, the operating efficiency of measurement apparatus is reduced.
The content of the invention
The present invention is in order to overcome the above not enough, there is provided a kind of movable body Rx, Ry and Z-direction of can realizing
Decoupling, can realize movable body initial reset again, and effectively improve the measurement and just of the movable body of certainty of measurement
Beginning makeup is put.
In order to solve above-mentioned technical problem, the technical scheme is that：A kind of measurement of movable body and initial
Makeup is put, and is initialized in the displacement in X, Y and Rz direction and to movable body for measuring movable body
Reset, including three groups of two-dimensional measurement mechanisms, the decoupling mechanism in two-dimensional measurement mechanism per group described, with
And four groups of initial reset mechanisms, wherein two-dimensional measurement mechanism described in two groups is located in the X-direction of the movable body,
Another set two-dimensional measurement mechanism is located in the Y-direction of the movable body, per group of two-dimensional measurement mechanism bag
Include the two orthogonal moving sets and a rotation pair being connected with the movable body；The decoupling mechanism
It is connected with the secondary and one of moving sets of the rotation；Initial reset mechanism described in two groups is located at the X of movable body
On direction, in addition initial reset mechanism described in two groups is located in the Y-direction of movable body.
Further, per group of two-dimensional measurement mechanism is including installation base plate, on the installation base plate
Two group of first moving sets, on the installation base plate and two ends connect respectively the company of first moving sets
The Rz of fishplate bar, the second moving sets above the connecting plate and movable body connection rotate it is secondary, with
And the displacement measurement component being connected with the first moving sets, it is connected with the movable body in the middle part of the connecting plate, institute
State the second moving sets and the Rz rotates pair and is connected with the decoupling mechanism.
Further, per group of first moving sets include the first guide rail and connect with first slide
The first slide block for connecing.
Further, institute's displacement measurement component includes that the grating ruler reading head on the installation base plate is installed
Grating ruler reading head that plate is fixedly connected with the grating ruler reading head installing plate and side and one of which the
The first slide block in one moving sets is fixedly connected, the grating scale that opposite side is slidably connected with the grating ruler reading head.
Further, per group of second moving sets include the second guide rail and connect with second slide
The second slide block for connecing.
Further, the decoupling mechanism includes at least one piece flexible decoupling piece, the thickness of the flexible decoupling piece
Degree is less than 0.1mm, and two ends are connected respectively with second slide block.
Further, the flexible decoupling piece is provided with one piece, and two ends are corresponding with the position of the second slide block respectively,
And top is provided with pressing plate, the pressing plate top is provided with nut, the pressing plate, flexible decoupling piece and the second slide block
It is equipped with the screw being adapted with the nut.
Further, the Rz rotates pair and includes the bearing assembly mounting bracket being connected with the movable body, sets
Bearing assembly in the bearing assembly mounting bracket, the bearing assembly passes through with the flexible decoupling piece
Connecting rod connects.
Further, the flexible decoupling piece is provided with two pieces, and its middle part is provided with U-shaped opening, and two pieces described soft
Property decoupling piece U-shaped opening along X to being oppositely arranged, be provided with per flexible decoupling piece or so two ends top described in block
Nut, the flexible decoupling piece and the second slide block are equipped with the screw being adapted with the nut.
Further, the Rz rotates pair and includes the bearing assembly mounting bracket being connected with the movable body, sets
Bearing assembly in the bearing assembly mounting bracket, the bearing assembly lower end is through the flexible decoupling
The U-shaped opening of piece is connected with connecting plate, and the bearing assembly outer ring is brought into close contact with the U-shaped opening.
Magnet installing plate that further, per group of initial reset mechanism includes being connected with the movable body,
The adjustable magnetic that rectangular magnet group and the magnet installing plate on the magnet installing plate is oppositely arranged
Iron installing rack, the magnet mounting seat above adjustable magnet installing rack and in magnet mounting seat
Rectangular magnet, the rectangular magnet group is identical with the polarity of the rectangular magnet opposite side.
Further, per group of initial reset mechanism include the coil group being connected with the movable body and
Adjustable magnet installing rack that the proximity switch and the coil group of coil group connection is oppositely arranged, set
Magnet mounting seat and the rectangular magnet in magnet mounting seat above adjustable magnet installing rack.
Further, the magnet installing plate is provided with the groove being adapted with the rectangular magnet group, described
Rectangular magnet is mounted in the groove；The magnet mounting seat is provided with what is be adapted with the rectangular magnet
Second groove, the rectangular magnet is in second groove.
Further, the adjustable magnet installing rack is provided with some waist-shaped holes, is provided with the waist-shaped hole
Locating dowel.
The measurement of the movable body that the present invention is provided and apparatus for initializing, by arranging three groups of two-dimensional measurement mechanisms,
And decoupling mechanism is set in per group of two-dimensional measurement mechanism, not only can accurate measurement movable body X to
With the displacement of Y-direction, and because component assembly error is drawn when effectively can realize that movable body is planar moved
The decoupling of Rx, Ry and the deviation of Z-direction for rising, improves the precision of measurement and the stability of device；Simultaneously
Along movable body X to be respectively provided with initial reset mechanism with Y-direction with realize movable body in mechanical position limitation just
Beginningization resets, and improves the operating efficiency of measurement apparatus.
Description of the drawings
Fig. 1 is a kind of structural representation of existing air-flotation type workpiece table system；
Fig. 2 is the structural representation of the measurement of movable body of the present invention and apparatus for initializing embodiment 1；
Fig. 3 is that the structure of the measurement of movable body of the present invention and the two-dimensional measurement mechanism of apparatus for initializing embodiment 1 is shown
It is intended to；
Fig. 4 is the profile of the measurement of movable body of the present invention and the two-dimensional measurement mechanism of apparatus for initializing embodiment 1；
Fig. 5 is that the structure of the measurement of movable body of the present invention and the initial reset mechanism of apparatus for initializing embodiment 1 is shown
It is intended to；
Fig. 6 is the top view of the measurement of movable body of the present invention and the initial reset mechanism of apparatus for initializing embodiment 1；
Fig. 7 is the motion model of the measurement of movable body of the present invention and the movable body of apparatus for initializing embodiment 1 in Y-direction
Enclose schematic diagram.
Fig. 8 is that the structure of the measurement of movable body of the present invention and the two-dimensional measurement mechanism of apparatus for initializing embodiment 2 is shown
It is intended to；
Fig. 9 is the structural representation of the measurement of movable body of the present invention and the decoupling mechanism of apparatus for initializing embodiment 2；
Figure 10 is the vertical view of the measurement of movable body of the present invention and the initial reset mechanism of apparatus for initializing embodiment 2
Figure.
Shown in Fig. 1：101st, under(-)chassis；102nd, balance mass module；103rd, Y-direction air-float guide rail；
104th, exposure desk；
Shown in Fig. 2-10：1st, movable body；2nd, two-dimensional measurement mechanism；21st, installation base plate；22nd, first
Moving sets；221st, the first guide rail；222nd, the first slide block；23rd, the second moving sets；231st, the first guide rail；
232nd, the first slide block；24th, Rz rotates secondary；241st, bearing assembly mounting bracket；242nd, bearing assembly；243、
Connecting rod；25th, displacement measurement component；251st, grating ruler reading head installing plate；252nd, grating ruler reading head；253、
Grating scale；26th, connecting plate；3rd, decoupling mechanism；31st, flexible decoupling piece；32nd, pressing plate；33rd, nut；
4th, initial reset mechanism；41st, magnet installing plate；42nd, rectangular magnet group；43rd, adjustable magnet installing rack；
431st, waist-shaped hole；44th, magnet mounting seat；45th, rectangular magnet；46th, the first groove；47th, the second groove；
48th, coil group；49th, proximity switch；5th, installation frame；6th, small electromotor.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in detail.
Embodiment 1
As shown in Fig. 2 the invention provides a kind of measurement of movable body and apparatus for initializing, transport for measuring
Kinetoplast 1 carries out initial reset in the displacement in X, Y and Rz direction and to movable body 1, the movable body 1
It is located on installation frame 5, the installation frame 5 is maintained static, movable body 1 is mounted opposite framework 5 along X, Y
And the motion of Rz directions.Three small electromotors 6 being connected with movable body 1 are additionally provided with installation frame 5, wherein
Two control the moving along tri- directions of X, Y and Rz of movable body 1 along X to distribution, respectively.The device bag
Include three groups of two-dimensional measurement mechanisms 2, the decoupling mechanism 3, Yi Jisi in two-dimensional measurement mechanism 2 per group described
Group initial reset mechanism 4, wherein two-dimensional measurement mechanism 2 described in two groups is located at the X-direction of the movable body 1
On, for measuring the displacement in the X direction of movable body 1, another set two-dimensional measurement mechanism 2 is located at institute
State in the Y-direction of movable body 1, for measuring the displacement in the Y direction of movable body 1, per group described two
Dimension measuring mechanism 2 includes two groups of orthogonal moving sets being connected with the movable body 1 and one group of rotation
Pair, realize two-dimensional measurement mechanism 2 with movable body 1 moving along X, Y and Rz direction；The decoupling machine
Structure 3 rotates secondary and one of which moving sets and is connected with described, for movable body 1 in Rx, Ry and Z-direction
On decoupling；Initial reset mechanism 4 described in two groups is located in the X-direction of movable body 1, for realizing motion
The initial reset during mechanical position limitation in the Y direction of body 1, in addition 4, initial reset mechanism described in two groups
In the Y-direction of movable body 1, for realizing the initialization during mechanical position limitation in the X direction of movable body 1
Reset.
As shown in figure 3, per group of two-dimensional measurement mechanism 2 is including installation base plate 21, located at the installation
Two group of first moving sets 22 on substrate 21, on the installation base plate 21 and two ends connect respectively described
The connecting plate 26, two of the first moving sets 22 be mounted on the second moving sets 23 of the top of the connecting plate 26 and
The Rz of the connection of the movable body 1 rotates secondary 24 and the displacement measurement component being connected with the first moving sets 22
25, the middle part of the connecting plate 26 is connected with movable body 1, and second moving sets 23 and Rz rotate secondary 24
It is connected with decoupling mechanism 3.Specifically, connecting plate 26 can be moved with movable body 1 along X or Y-direction,
The first moving sets 22 and the second moving sets 23 are driven to move together simultaneously, displacement measurement component 25 is used to measure
The displacement of the first moving sets 22.
Continue referring to Fig. 3, per group of first moving sets 22 include the first guide rail 221 and with described the
The first slide block 222 that one guide rail 221 is slidably connected.Specifically, two groups of X sides for being located at the movable body 1
, along X to setting, now connecting plate 26 is with movable body 1 for first guide rail 221 of two-dimensional measurement mechanism 2 upwards
Move in X direction, at the same drive the first slide block 222 together with respect to the first guide rail 221 along X to moving；One
First guide rail 221 of two-dimensional measurement mechanism 2 of the group in the Y-direction of movable body 1 is arranged along Y-direction, this
When connecting plate 26 move along Y-direction with movable body 1, while drive the first slide block 222 lead with respect to first together
Rail 221 is moved along Y-direction, and the length of the first guide rail 221 is more than the motion row in the Y direction of movable body 1
Journey.
Continue referring to Fig. 3, institute displacement measurement component 25 includes the grating on the installation base plate 21
Grating ruler reading head 252 that ruler reading head installing plate 251 is fixedly connected with the grating ruler reading head installing plate 251,
And side is fixedly connected with the first slide block 222 in the first moving sets of one of which 22, opposite side with it is described
The grating scale 253 that grating ruler reading head 252 is slidably connected.Specifically, for the X positioned at the movable body 1
In two-dimensional measurement mechanism 2 on direction, grating scale 253 and the first moving sets 22 in the Y negative directions
First slide block 222 is fixedly connected, when grating scale 253 with relative first guide rail 221 of the first slide block 222 along X
When motion, the X of movable body 1 is read from grating ruler reading head 252 to displacement；For positioned at movable body
Two-dimensional measurement mechanism 2 in 1 Y-direction, grating scale 253 and the first moving sets in X negative directions
The first slide block 222 in 22 is fixedly connected, when grating scale 253 and relative first guide rail 221 of the first slide block 222
When moving along Y-direction, the Y-direction displacement of movable body 1 is read from grating ruler reading head 252.Because edge is moved
Liang Zu two-dimensional measurements mechanism 2, when movable body 1 rotates along Rz directions, two groups are set in the X-direction of body 1
The X that two-dimensional measurement mechanism 2 obtains is different to displacement, according to two X to the difference of displacement and with
The tangent relation equation of Y-direction displacement obtains the angle that movable body 1 rotates in Rz directions, and then obtains movable body
1 tri- directions of X, Y and Rz displacement.
Continue referring to Fig. 3, per group of second moving sets 23 include the second guide rail 231 and with described the
The second slide block 232 that two guide rails 231 are slidably connected.Specifically, the second moving sets 23 pass through decoupling mechanism 3
Secondary 24 are rotated with Rz to be connected with movable body 1, two groups of two dimension surveys being located in the X-direction of the movable body 1
Second guide rail 231 of measuring mechanism 2 is arranged along Y-direction, and now the second slide block 232 is with movable body 1 relative second
Guide rail 231 is moved along Y-direction；One group of two-dimensional measurement mechanism 2 being located in the Y-direction of the movable body 1
, along X to setting, now the second slide block 232 is with the relative edge of second guide rail 231 of movable body 1 for second guide rail 231
X is to motion；And second guide rail 231 length be more than the movement travel in the X direction of movable body 1.
Preferably, the decoupling mechanism 3 includes at least one piece flexible decoupling piece 31, the flexible decoupling piece 31
Thickness be less than 0.1mm, be preferably 0.05mm～0.1mm in the present embodiment, and two ends are respectively with described the
Two slide blocks 222 connect, and specifically, flexibility decoupling piece 31 material is 0Cr18Ni9 type stainless steels, due to length
Degree is very big with the ratio of thickness, Rx, Ry for being caused due to component assembly error when movable body 1 and Z-direction
During deviation, the deformation of the generation of piece 31 is decoupled so as to reach the purpose that Rx, Ry and Z-direction are decoupled by flexibility.
As shown in figure 4, the flexible decoupling piece 31 is provided with one piece, two ends respectively with the position of the second slide block 232
Put corresponding, and top is provided with pressing plate 32, the top of the pressing plate 32 is provided with nut 33, the pressing plate 32,
The flexibility decoupling slide block 232 of piece 31 and second is equipped with the screw being adapted with the nut 33 and (does not mark in figure
Go out).Specifically, pressing plate 32 decouples pieces 31 located at the two ends of the second slide block 232 by 33 pairs of flexibilities of nut
It is fixed with the second slide block 232.
Preferably, the Rz rotates the secondary 24 bearing assembly mounting brackets for including being connected with the movable body 1
241st, the bearing assembly 242 in bearing assembly mounting bracket 241, the bearing assembly 242 with it is described
Flexibility decoupling piece 31 is connected by connecting rod 243.Specifically, bearing assembly 242 and flexible decoupling piece 31
Middle part be equipped with the through hole being adapted with connecting rod 243, by bearing assembly 242 together with movable body 1
Rz azimuthal rotational motions are carried out, while it is different by connecting plate 26 first slide block 222 at two ends to occur
Displacement, to calculate the Rz rotation amounts of movable body 1.
As shown in figure 5, per group of initial reset mechanism 4 includes the magnet being connected with the movable body 1
Installing plate 41, the rectangular magnet group 42 on the magnet installing plate 41 and the magnet installing plate 41
Adjustable magnet installing rack 43, the magnet mounting seat above adjustable magnet installing rack 43 being oppositely arranged
44 and the rectangular magnet 45 in magnet mounting seat 44, the rectangular magnet group 42 and rectangular magnet
The polarity of 45 opposite sides is identical.Preferably, magnet installing plate 41 is provided with and the rectangular magnet group 42
The first groove 46 being adapted, the rectangular magnet group 42 is located in first groove 46；The magnet
Mounting seat 44 is provided with the second groove 47 being adapted with the rectangular magnet 45, and the rectangular magnet 45 sets
In second groove 47.Specifically, adjustable magnet installing rack 43 is located on installation frame 5, and two
The relative position of person is adjustable, and rectangular magnet group 42 includes some rectangular magnets, rectangular magnet in the present embodiment
Quantity is 3, and rectangular magnet group 42 is bonded in the first of the magnet installing plate 41 by epoxide-resin glue
46 in groove；The rectangular magnet 45 is bonded in the second groove of magnet mounting seat 44 by epoxide-resin glue
In 47；When rectangular magnet group 42 with movable body 1 move to X to or during Y-direction mechanical position limitation, rectangular magnet
Group 42 is mutually close with the position of rectangular magnet 45, due to rectangular magnet group 42 and rectangular magnet 45 relative
The polarity of side is identical, therefore both produce repulsion, promotes movable body 1 to separate with mechanical position limitation, realizes zero-bit
Initial reset, substantially increases the operating efficiency of device.
As shown in fig. 6, adjustable magnet installing rack 43 is provided with some waist-shaped holes 431, the waist-shaped hole 431
Locating dowel is inside provided with, the internal diameter of the waist-shaped hole 431 matches with the locating dowel external diameter.Specifically, it is fixed
Position post is fixed on installation frame 5, by the relative position for adjusting locating dowel and waist-shaped hole 431, is changed
Rectangular magnet group 42 changes the size of magnetic force with spacing d2 of rectangular magnet 45.
As shown in fig. 7, setting the normal range in the Y direction of movable body 1 as (- d4, d4), mechanical position limitation
Scope is (- d3-d4, d3+d4), if the length of rectangular magnet 45 is m, the length of rectangular magnet group 42 is
D1, then should meet relation：It is initial multiple when movable body 1 is in normal range
Position mechanism 4 does not have an effect power to movable body 1, when movable body 1 normal range (NR) to mechanical position limitation scope it
Between when, initial reset mechanism 4 provides initial reset power, and closer to mechanical position limitation, the work to movable body 1
It is firmly bigger.
Embodiment 2
As shown in figure 9, as different from Example 1, the flexible decoupling piece 31 is provided with two pieces, flexibility solution
The middle part of coupling piece 31 is provided with U-shaped opening, and the U-shaped openings of two pieces of flexible decoupling pieces 31 are along X to relative
Arrange, nut 33, the flexible decoupling piece 31 are provided with per flexible decoupling piece 31 or so two ends top described in block
The screw (not marking in figure) being adapted with the nut 33 is equipped with the second slide block 232, by nut
33 pairs of flexible decoupling pieces 31 are fixed with the second slide block 232.Specifically, the flexible decoupling material of piece 31 is
0Cr18Ni9 type stainless steels, due to length it is very big with the ratio of thickness, when movable body 1 due to component assembly miss
During the deviation of poor Rx, Ry for causing and Z-direction, by the flexible deformation for decoupling the generation of piece 31 so as to reach
Rx, Ry and the purpose of Z-direction decoupling.
As shown in figure 8, the Rz rotates secondary 24 includes that the bearing assembly being connected with the movable body 1 is installed
Support 241, the bearing assembly 242 in bearing assembly mounting bracket 241, under the bearing assembly 242
The U-shaped opening 311 through the flexible decoupling piece 31 is held to be connected with connecting plate 26, outside bearing assembly 242
Circle is brought into close contact with the U-shaped opening 311, and flexibility decoupling piece 31 is by bearing assembly 242 and movable body 1
Rz azimuthal rotational motions are carried out together, while making first slide block 222 at two ends occur not by connecting plate 26
Same displacement, to calculate the Rz rotation amounts of movable body 1.
As shown in Figure 10, per group of initial reset mechanism 4 includes the coil being connected with the movable body 1
The adjustable magnet peace that group 48 and the proximity switch 49 and coil group 48 of the connection of coil group 48 are oppositely arranged
Shelve 43, the magnet mounting seat 44 located at the top of adjustable magnet installing rack 43 and install located at magnet
Rectangular magnet 45 on seat 44.Preferably, the magnet mounting seat 44 is provided with and the rectangular magnet 45
The second groove 47 being adapted, the rectangular magnet 45 is in second groove 47.Specifically, may be used
On installation frame 5, both relative positions are adjustable, and coil group 48 includes for mode magnet installing rack 43
Some coils, in the present embodiment, the quantity of coil is 3, and the magnetic field produced after coil group 48 is powered
Polarity it is identical with the polarity of the opposite side of rectangular magnet 45, coil group 48 is bonded in by epoxide-resin glue
46 in first groove of the magnet installing plate 41；The rectangular magnet 45 is bonded in by epoxide-resin glue
In second groove of magnet mounting seat 44；When coil group 48 with movable body 1 move to X to or Y-direction machinery
When spacing, proximity switch 49 detects signal, makes coil group 48 be powered and produces magnetic field, with rectangular magnet
45 interact produces repulsion, promotes movable body 1 to complete initial reset.
Preferably, adjustable magnet installing rack 43 is provided with some waist-shaped holes 431, in the waist-shaped hole 431
Locating dowel is provided with, the external diameter of locating dowel is adapted with the minimum diameter of waist-shaped hole 431, both relative positions
It is adjustable.Specifically, locating dowel is fixed on installation frame 5, by adjusting locating dowel and waist-shaped hole 431
Relative position, change rectangular magnet group 42 with the spacing of rectangular magnet 45 to change the size of magnetic force.Adopt
Taking this kind of design, to compare impact of the embodiment 1 to the normal work of movable body 1 less, and magnetic force is adjustable
Scope is bigger.
In sum, the measurement of the movable body that the present invention is provided and apparatus for initializing, it is two-dimentional by arranging three groups
Measuring mechanism 2, and decoupling mechanism 3 is set in per group of two-dimensional measurement mechanism 2, not only can accurately survey
Movable body 1 is measured in X to the displacement with Y-direction, and when can effectively realize that movable body 1 is planar moved
The decoupling of Rx, Ry and the deviation of Z-direction for being caused due to component assembly error, improve measurement precision and
The stability of device；Simultaneously the X along movable body 1 is respectively provided with initial reset mechanism 4 to realize to Y-direction
Initial reset of the movable body 1 in mechanical position limitation, improves the operating efficiency of measurement apparatus.
Although being illustrated to embodiments of the present invention in specification, these embodiments are intended only as
Prompting, should not limit protection scope of the present invention.Various provinces are carried out without departing from the spirit and scope of the present invention
Slightly, displacement and change should be included in protection scope of the present invention.
Claims (14)
1. a kind of measurement of movable body and apparatus for initializing, for measuring movable body in X, Y and Rz direction
Displacement and initial reset is carried out to movable body, it is characterised in that including three groups of two-dimensional measurement mechanisms,
Decoupling mechanism and four groups of initial reset mechanisms in two-dimensional measurement mechanism per group described, wherein two groups
The two-dimensional measurement mechanism is located in the X-direction of the movable body, and another set two-dimensional measurement mechanism is located at institute
State in the Y-direction of movable body, per group of two-dimensional measurement mechanism includes two phases being connected with the movable body
Mutually vertical moving sets and a rotation are secondary；The decoupling mechanism rotates secondary and one of mobile with described
Pair connection；Initial reset mechanism described in two groups is located in the X-direction of movable body, initially multiple described in two groups in addition
Position mechanism is located in the Y-direction of movable body.
2. the measurement of movable body according to claim 1 and apparatus for initializing, it is characterised in that per group
The two-dimensional measurement mechanism include installation base plate, two group of first moving sets on the installation base plate,
On the installation base plate and two ends connect the connecting plate of first moving sets respectively, located at the connection
The Rz of the second moving sets and the movable body connection above plate is rotated secondary and is connected with the first moving sets
Displacement measurement component, connecting plate middle part is connected with the movable body, second moving sets and described
Rz rotates pair and is connected with the decoupling mechanism.
3. the measurement of movable body according to claim 2 and apparatus for initializing, it is characterised in that per group
First moving sets include the first guide rail and the first slide block being connected with first slide.
4. the measurement of movable body according to claim 3 and apparatus for initializing, it is characterised in that described
Displacement measurement component includes that grating ruler reading head installing plate and the grating scale on the installation base plate are read
Grating ruler reading head and the first slide block of side and the moving sets of one of which first that head installing plate is fixedly connected
It is fixedly connected, the grating scale that opposite side is slidably connected with the grating ruler reading head.
5. the measurement of movable body according to claim 3 and apparatus for initializing, it is characterised in that per group
Second moving sets include the second guide rail and the second slide block being connected with second slide.
6. the measurement of movable body according to claim 5 and apparatus for initializing, it is characterised in that described
Decoupling mechanism includes at least one piece flexible decoupling piece, and the thickness of the flexible decoupling piece is less than 0.1mm, and two
End is connected respectively with second slide block.
7. the measurement of movable body according to claim 6 and apparatus for initializing, it is characterised in that described
Flexibility decoupling piece is provided with one piece, and two ends are corresponding with the position of the second slide block respectively, and top is provided with pressing plate,
Pressing plate top is provided with nut, the pressing plate, the flexible decoupling piece and the second slide block be equipped with it is described
The screw that nut is adapted.
8. the measurement of movable body according to claim 7 and apparatus for initializing, it is characterised in that described
Rz rotates pair to be included the bearing assembly mounting bracket being connected with the movable body, installs located at the bearing assembly
Bearing assembly on support, the bearing assembly is connected with the flexible decoupling piece by connecting rod.
9. the measurement of movable body according to claim 6 and apparatus for initializing, it is characterised in that described
Flexibility decoupling piece is provided with two pieces, and its middle part is provided with U-shaped opening, and two pieces of flexibilities decouple the described U-shaped of piece
Opening, to being oppositely arranged, per flexible decoupling piece or so two ends top described in block nut, the flexibility is provided with along X
Decoupling piece and the second slide block are equipped with the screw being adapted with the nut.
10. the measurement of movable body according to claim 9 and apparatus for initializing, it is characterised in that institute
State Rz to rotate the secondary bearing assembly mounting bracket for including being connected with the movable body, pacify located at the bearing assembly
Bearing assembly on dress support, U-shaped opening and company of the bearing assembly lower end through the flexible decoupling piece
Fishplate bar connects, and the bearing assembly outer ring is brought into close contact with the U-shaped opening.
The measurement of 11. movable bodies according to claim 1 and apparatus for initializing, it is characterised in that
Per group of initial reset mechanism includes the magnet installing plate being connected with the movable body, located at the magnet
Adjustable magnet installing rack that rectangular magnet group and the magnet installing plate on installing plate is oppositely arranged, set
Magnet mounting seat and the rectangular magnet in magnet mounting seat above adjustable magnet installing rack,
The rectangular magnet group is identical with the polarity of the rectangular magnet opposite side.
The measurement of 12. movable bodies according to claim 1 and apparatus for initializing, it is characterised in that every
The group initial reset mechanism includes what the coil group being connected with the movable body and the coil group connected
Adjustable magnet installing rack that proximity switch and the coil group are oppositely arranged, install located at adjustable magnet
Magnet mounting seat above frame and the rectangular magnet in magnet mounting seat.
The measurement of 13. movable bodies according to any one of claim 11 or 12 and apparatus for initializing, its
It is characterised by, the magnet installing plate is provided with the first groove being adapted with the rectangular magnet group, described
Rectangular magnet is mounted in first groove；The magnet mounting seat is provided with mutually fits with the rectangular magnet
The second groove matched somebody with somebody, the rectangular magnet is in second groove.
The measurement of 14. movable bodies according to any one of claim 11 or 12 and apparatus for initializing, its
It is characterised by, the adjustable magnet installing rack is provided with some waist-shaped holes, and positioning is provided with the waist-shaped hole
Post.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510731086.XA CN106647175B (en) | 2015-10-30 | 2015-10-30 | A kind of measurement of movable body and apparatus for initializing |
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| CN201510731086.XA CN106647175B (en) | 2015-10-30 | 2015-10-30 | A kind of measurement of movable body and apparatus for initializing |
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| CN106647175A true CN106647175A (en) | 2017-05-10 |
| CN106647175B CN106647175B (en) | 2018-08-14 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040263108A1 (en) * | 2001-09-24 | 2004-12-30 | Lim Ser Yong | Decoupled planar positioning system |
| CN101206410A (en) * | 2007-12-17 | 2008-06-25 | 上海微电子装备有限公司 | Balance mass orientation system for workpiece platform |
| CN101702078A (en) * | 2004-07-27 | 2010-05-05 | Asml荷兰有限公司 | Lithographic apparatus and method for calibrating the same |
| CN103252761A (en) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | Long-stroke two-dimensional nano worktable system with angle compensation function |
| CN104677271A (en) * | 2013-11-29 | 2015-06-03 | 上海微电子装备有限公司 | Device and method for adjusting zero sensor |
-
2015
- 2015-10-30 CN CN201510731086.XA patent/CN106647175B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040263108A1 (en) * | 2001-09-24 | 2004-12-30 | Lim Ser Yong | Decoupled planar positioning system |
| CN101702078A (en) * | 2004-07-27 | 2010-05-05 | Asml荷兰有限公司 | Lithographic apparatus and method for calibrating the same |
| CN101206410A (en) * | 2007-12-17 | 2008-06-25 | 上海微电子装备有限公司 | Balance mass orientation system for workpiece platform |
| CN103252761A (en) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | Long-stroke two-dimensional nano worktable system with angle compensation function |
| CN104677271A (en) * | 2013-11-29 | 2015-06-03 | 上海微电子装备有限公司 | Device and method for adjusting zero sensor |
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| Publication number | Publication date |
|---|---|
| CN106647175B (en) | 2018-08-14 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Applicant after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. Applicant before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. |
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