CN106644182B - Air flotation force measuring device with negative pressure trough - Google Patents

Air flotation force measuring device with negative pressure trough Download PDF

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Publication number
CN106644182B
CN106644182B CN201611011250.0A CN201611011250A CN106644182B CN 106644182 B CN106644182 B CN 106644182B CN 201611011250 A CN201611011250 A CN 201611011250A CN 106644182 B CN106644182 B CN 106644182B
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CN
China
Prior art keywords
nozzle body
negative pressure
annular groove
pressure
top
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CN201611011250.0A
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Chinese (zh)
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CN106644182A (en
Inventor
黄斌
刘春柱
李程伟
周子晨
孙庆琦
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合肥工业大学
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Priority to CN201611011250.0A priority Critical patent/CN106644182B/en
Publication of CN106644182A publication Critical patent/CN106644182A/en
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Publication of CN106644182B publication Critical patent/CN106644182B/en

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Abstract

The present invention relates to the air flotation force measuring nozzles with negative pressure trough.Top nozzle body and lower nozzle body including axial corresponding fitting up and down;Gas supply throttle orifice, gas chamber, gas supply pore, oil pressure throttle orifice are respectively equipped on top nozzle body;Pressure measuring chamber and pressure tap are respectively equipped on lower nozzle body;The top surface of the top nozzle body of the gas chamber periphery is equipped with negative pressure annular groove, and the side of negative pressure annular groove is equipped with negative pressure and connects hole, and the other side is equipped with pressure gaging hole.The present invention by increase negative pressure annular groove so that the gas between mass flowing nozzle and kickboard enter decompression annular groove and be extracted, will not direct projection into atmosphere, so as to avoid the interference worked normally to adjacent nozzle.

Description

Air flotation force measuring device with negative pressure trough

Technical field

The invention belongs to gas bearing technical fields, and in particular to a kind of air flotation force measuring device.

Background technique

Gas bearing has the small direct contact of nothing, frictional resistance and approximately constant, precision height, longevity during the work time The features such as long is ordered, it is very extensive in engineer application.Air bearing nozzle because it can reduce retinoic acid syndrome be widely used in it is more Power fields of measurement is tieed up, gas, which flows through throttling set, can form stable air film, can reach very high measurement accuracy (0.2% FS).Existing air-flotation system is collectively formed by multiple air bearing nozzles, the mutual disturbance of the gas between each air bearing nozzle, shadow Measurement accuracy is rung, and the range of steady operation is smaller.

Summary of the invention

In order to effectively eliminate the mutual disturbance of gas, measurement accuracy is improved, the present invention provides a kind of with negative pressure The air flotation force measuring device of slot.

Air flotation force measuring device with negative pressure trough includes top nozzle body 10, lower nozzle body 11 and kickboard 13, top nozzle body 10 With the axial corresponding fitting of lower about 11 nozzle body;The nozzle face of top nozzle body 10 one side corresponding with kickboard 13 constitutes spray Mouth baffle-type pressure sensor.

The gas supply throttle orifice 1 that perforation is offered at the central axis of the top nozzle body 10 is connected to gas supply throttle orifice 1 10 top surface of top nozzle body offers the gas chamber 7 of groove-like;Gas supply 1 middle part side of throttle orifice is connected to the one end for supplying pore 3, supplies The other end of tracheal orifice 3 is located in the radial sidewalls of top nozzle body 10;Perforation axial direction is offered in the axial direction of top nozzle body 10 Oil pressure throttle orifice 6, one end of oil pressure throttle orifice 6 are connected to gas chamber 7, and the other end is located at the bottom surface of top nozzle body 10;

The top of the lower nozzle body 11 offers the pressure measuring chamber 4 of groove-like, and the top of pressure measuring chamber 4 is respectively communicated with gas supply The lower port of throttle orifice 1 and the lower port of oil pressure throttle orifice 6;The radial side of pressure measuring chamber 4 is connected to one end of pressure tap 5, surveys The other end in pressure hole 5 is located in lower 11 radial sidewalls of nozzle body;

The top surface of the top nozzle body 10 of 7 periphery of gas chamber is equipped with negative pressure annular groove 9, and the side of negative pressure annular groove 9 is connected to negative The one end in hole 2 is crimped, the other end that negative pressure connects hole 2 is located in the radial sidewalls of top nozzle body 10;The other side of negative pressure annular groove 9 connects Lead to one end of negative pressure gaging hole 8, the other end of negative pressure gaging hole 8 is located in the radial sidewalls of top nozzle body 10.

The technical solution further limited is as follows:

The distance between excircle and the excircle of top nozzle body 10 of the negative pressure annular groove 9 are 5mm.

The groove width of the negative pressure annular groove 9 is 6~9mm, and groove depth is 3~5mm.

The present invention is by increasing negative pressure annular groove, so that the gas between mass flowing nozzle and kickboard enters decompression annular groove and taken out Out, will not direct projection into atmosphere, so as to avoid the interference worked normally to adjacent nozzle.

It can be improved the stability of air bearing nozzle simultaneous with the air bearing nozzle of negative pressure annular groove.Gas positive pressure makes air bearing surface Float, make it have the ability for bearing pressure, negative pressure annular groove provides suction, makes it have the ability for bearing pulling force.The former makes gas Film thickness increases, and the latter reduces air-film thickness, when such a match occurs, so that it may form a stable air-film thickness, simultaneously With two-way stiffness.Pressure in negative pressure annular groove can be measured by negative pressure gaging hole 8, and the power acted in kickboard passes through for air pressure Power and the negative pressure annular groove inner gauge measured obtain.

The positive effect of the present invention is that the air flotation force measuring nozzle with negative pressure annular groove 9 can be avoided mutual between gas Disturbance, guarantees the stability of air-flotation system.Measurement error indicates the difference between measured value and tested true value, the smaller explanation of error Measure more acurrate, measurement accuracy is higher, and by repeatedly measuring, precision is calculated(δ=measured value x- is true Value x0, yFSFor the Full-span output of sensor) it is 0.16%FS, improve measurement accuracy.

Detailed description of the invention

Fig. 1 is schematic structural view of the invention.

Fig. 2 is the top view of Fig. 1.

Fig. 3 is that the present invention is used for air flotation force measuring schematic diagram.

Serial number in upper figure:1 gas supply throttle orifice, 2 negative pressure connect hole, 3 gas supply connect hole, 4 pressure measuring chambers, 5 pressure taps, the throttling of 6 oil pressure Hole, 7 gas chambers, 8 negative pressure gaging holes, 9 negative pressure annular grooves, 10 top nozzle bodies, 11 lower nozzle bodies, 12 kickboards.

Specific embodiment

With reference to the accompanying drawing, the present invention is further described by embodiment.

Embodiment 1

Referring to Fig. 1, the air flotation force measuring device with negative pressure trough includes top nozzle body 10, lower nozzle body 11 and kickboard 12;On Nozzle body 10 and lower nozzle body 11 are cylindric, top nozzle body 10 and the axial corresponding fitting of about 11 lower nozzle body;Top nozzle The nozzle face of body 10 one side corresponding with kickboard 12 constitutes nozzle baffle type pressure sensor.

The gas supply throttle orifice 1 that perforation is offered at the central axis of top nozzle body 10, the upper spray being connected to gas supply throttle orifice 1 10 top surface of mouth body offers the gas chamber 7 of groove-like;Gas supply 1 middle part side of throttle orifice is connected to the one end for supplying pore 3, air supply pipe The other end in hole 3 is located in the radial sidewalls of top nozzle body 10;The axial oil pressure of perforation is offered in the axial direction of top nozzle body 10 Throttle orifice 6, one end of oil pressure throttle orifice 6 are connected to gas chamber 7, and the other end is located at the bottom surface of top nozzle body 10.

The top of lower nozzle body 11 offers the pressure measuring chamber 4 of groove-like, and the top of pressure measuring chamber 4 is respectively communicated with gas supply throttling The lower port in hole 1 and the lower port of oil pressure throttle orifice 6;The radial side of pressure measuring chamber 4 is connected to one end of pressure tap 5, pressure tap 5 The other end be located in lower 11 radial sidewalls of nozzle body;

Referring to fig. 2, the top surface of the top nozzle body 10 of 7 periphery of gas chamber offers negative pressure annular groove 9, and the side of negative pressure annular groove 9 connects Lead to one end that negative pressure connects hole 2, the other end that negative pressure connects hole 2 is located in the radial sidewalls of top nozzle body 10;Negative pressure annular groove 9 it is another Side is connected to one end of negative pressure gaging hole 8, and the other end of negative pressure gaging hole 8 is located in the radial sidewalls of top nozzle body 10.

The diameter of the diameter of top nozzle body 10 and lower nozzle body 11 is 50mm.The groove width b of negative pressure annular groove 9 is 6mm, groove depth H is 3mm, and excircle and the distance between the excircle of top nozzle body 10 a of negative pressure annular groove 9 are 5mm.

Referring to Fig. 3, in use, the compressed gas access gas supply throttle orifice 1 of constant pressure can be floated kickboard 12;It is negative Negative pressure on pressure ring slot 9 surveys the gas pressure that mouth 8 is used to measure negative pressure trough, can be counted according to supply gas pressure and the gas pressure measured Calculate the power W acted in kickboard.In the present invention, air film stability is good between top nozzle body 10 and kickboard 12, between no gas Mutually disturbance, has many advantages, such as that the operation is stable range is big, measurement accuracy is higher.

Embodiment 2

The diameter of the diameter of top nozzle body 10 and lower nozzle body 11 is 80mm.The groove width b of negative pressure annular groove 9 is 9mm, groove depth H is 5mm, and excircle and the distance between the excircle of top nozzle body 10 a of negative pressure annular groove 9 are 5mm.The same embodiment of other structures 1。

Claims (3)

1. having the air flotation force measuring device of negative pressure annular groove, including top nozzle body(10), lower nozzle body(11)And kickboard(12), upper spray Mouth body(10)With lower nozzle body(11)Axial corresponding fitting up and down;Top nozzle body(10)Nozzle face and kickboard(12)It is corresponding One side constitute nozzle baffle type pressure sensor;
The top nozzle body(10)Central axis at offer the gas supply throttle orifice of perforation(1), with gas supply throttle orifice(1)Connection Top nozzle body(10)Top surface offers the gas chamber of groove-like(7);Supply throttle orifice(1)Middle part side is connected to gas supply pore (3)One end, supply pore(3)The other end be located at top nozzle body(10)Radial sidewalls on;Top nozzle body(10)Axial direction On offer the axial oil pressure throttle orifice of perforation(6), oil pressure throttle orifice(6)One end be connected to gas chamber(7), the other end is located at upper Nozzle body(10)Bottom surface;
The lower nozzle body(11)Top offer the pressure measuring chamber of groove-like(4), pressure measuring chamber(4)Top be respectively communicated with confession Moral discharge orifice(1)Lower port and oil pressure throttle orifice(6)Lower port;Pressure measuring chamber(4)Radial side be connected to pressure tap(5) One end, pressure tap(5)The other end be located at lower nozzle body(11)In radial sidewalls;
It is characterized in that:The gas chamber(7)The top nozzle body of periphery(10)Top surface be equipped with negative pressure annular groove(9), negative pressure annular groove(9) Side be connected to negative pressure and connect hole(2)One end, negative pressure connects hole(2)The other end be located at top nozzle body(10)Radial sidewalls On;Negative pressure annular groove(9)The other side be connected to negative pressure gaging hole(8)One end, negative pressure gaging hole(8)The other end be located at top nozzle body (10)Radial sidewalls on.
2. having the air flotation force measuring device of negative pressure annular groove according to claim 1, it is characterised in that:The negative pressure annular groove(9) Excircle and top nozzle body(10)The distance between excircle be 5mm.
3. the air flotation force measuring device according to claim 1 or claim 2 with negative pressure annular groove, it is characterised in that:The negative pressure annular groove (9)Groove width be 6~9mm, groove depth be 3~5mm.
CN201611011250.0A 2016-11-11 2016-11-11 Air flotation force measuring device with negative pressure trough CN106644182B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611011250.0A CN106644182B (en) 2016-11-11 2016-11-11 Air flotation force measuring device with negative pressure trough

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201611011250.0A CN106644182B (en) 2016-11-11 2016-11-11 Air flotation force measuring device with negative pressure trough

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CN106644182A CN106644182A (en) 2017-05-10
CN106644182B true CN106644182B (en) 2018-11-23

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Publication number Priority date Publication date Assignee Title
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CN102589801A (en) * 2012-02-24 2012-07-18 合肥工业大学 Air flotation loading test device with jet type guide keys
CN102636294A (en) * 2012-04-25 2012-08-15 合肥工业大学 Isolated coupling air-floatation force measurement nozzle
CN102636295A (en) * 2012-04-25 2012-08-15 合肥工业大学 Anti-coupling air-flotation force measuring unit
CN103398813A (en) * 2013-07-25 2013-11-20 合肥工业大学 Porous nozzle floating plate mechanism used for measuring force
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101236112A (en) * 2008-03-07 2008-08-06 合肥工业大学 Force and displacement amount air-float type measurement method
CN101249569A (en) * 2008-03-07 2008-08-27 合肥工业大学 Air-float chief axis capable of self-determination measuring chief axis applied force and measurement method thereof
CN102589801A (en) * 2012-02-24 2012-07-18 合肥工业大学 Air flotation loading test device with jet type guide keys
CN102636294A (en) * 2012-04-25 2012-08-15 合肥工业大学 Isolated coupling air-floatation force measurement nozzle
CN102636295A (en) * 2012-04-25 2012-08-15 合肥工业大学 Anti-coupling air-flotation force measuring unit
CN103398813A (en) * 2013-07-25 2013-11-20 合肥工业大学 Porous nozzle floating plate mechanism used for measuring force
CN105092142A (en) * 2015-05-15 2015-11-25 合肥工业大学 Apparatus for measuring unparallel nozzle and floating plate mechanisms

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