CN106622824B - 一种等离子体聚合涂层装置 - Google Patents
一种等离子体聚合涂层装置 Download PDFInfo
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- CN106622824B CN106622824B CN201611076904.8A CN201611076904A CN106622824B CN 106622824 B CN106622824 B CN 106622824B CN 201611076904 A CN201611076904 A CN 201611076904A CN 106622824 B CN106622824 B CN 106622824B
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- vacuum chamber
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- 238000000576 coating method Methods 0.000 title claims abstract description 47
- 239000011248 coating agent Substances 0.000 title claims abstract description 46
- 239000000463 material Substances 0.000 claims abstract description 40
- 229910052751 metal Inorganic materials 0.000 claims abstract description 37
- 239000002184 metal Substances 0.000 claims abstract description 37
- 239000000178 monomer Substances 0.000 claims description 43
- 239000007789 gas Substances 0.000 claims description 41
- 239000012159 carrier gas Substances 0.000 claims description 23
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 239000010935 stainless steel Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 230000037048 polymerization activity Effects 0.000 claims description 6
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 4
- 239000010962 carbon steel Substances 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 2
- 230000002708 enhancing effect Effects 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims description 2
- 150000007530 organic bases Chemical class 0.000 claims description 2
- 230000004913 activation Effects 0.000 claims 1
- 230000009257 reactivity Effects 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract 1
- 241000894007 species Species 0.000 description 8
- 238000009413 insulation Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
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- 150000002500 ions Chemical class 0.000 description 2
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- 238000007259 addition reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
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- H01J37/32—Gas-filled discharge tubes
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- H01J37/32449—Gas control, e.g. control of the gas flow
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- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Polymerisation Methods In General (AREA)
- Plasma Technology (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (10)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
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CN201611076904.8A CN106622824B (zh) | 2016-11-30 | 2016-11-30 | 一种等离子体聚合涂层装置 |
BR112019005796-0A BR112019005796B1 (pt) | 2016-11-30 | 2017-04-25 | Dispositivo de revestimento por polimerização de plasma |
EP17876726.5A EP3539676B1 (en) | 2016-11-30 | 2017-04-25 | Plasma polymerization coating device |
JP2019527143A JP6990704B2 (ja) | 2016-11-30 | 2017-04-25 | プラズマ重合コーティング装置 |
KR1020197014395A KR102175721B1 (ko) | 2016-11-30 | 2017-04-25 | 플라즈마 중합 코팅 장치 |
PCT/CN2017/081773 WO2018098980A1 (zh) | 2016-11-30 | 2017-04-25 | 一种等离子体聚合涂层装置 |
US15/890,476 US10424465B2 (en) | 2016-11-30 | 2018-02-07 | Plasma polymerization coating apparatus |
US16/195,537 US11339477B2 (en) | 2016-11-30 | 2018-11-19 | Plasma polymerization coating apparatus and process |
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CN107177835B (zh) * | 2017-05-21 | 2018-06-19 | 江苏菲沃泰纳米科技有限公司 | 一种循环大占空比脉冲放电制备多功能性纳米防护涂层的方法 |
US11742186B2 (en) | 2017-05-21 | 2023-08-29 | Jiangsu Favored Nanotechnology Co., LTD | Multi-functional protective coating |
CN106958012A (zh) * | 2017-05-21 | 2017-07-18 | 无锡荣坚五金工具有限公司 | 一种基材运动式等离子体放电制备纳米涂层的设备及方法 |
CN110408912A (zh) * | 2019-09-11 | 2019-11-05 | 光驰科技(上海)有限公司 | 一种多片式旋转等离子体增强原子层沉积成膜装置 |
CN110684963B (zh) * | 2019-10-21 | 2022-05-20 | 江苏菲沃泰纳米科技股份有限公司 | 用于镀膜设备的气流导散装置及其应用 |
US20210193441A1 (en) * | 2019-12-18 | 2021-06-24 | Jiangsu Favored Nanotechnology Co., Ltd. | Coating Apparatus and Coating Method |
US11898248B2 (en) * | 2019-12-18 | 2024-02-13 | Jiangsu Favored Nanotechnology Co., Ltd. | Coating apparatus and coating method |
KR102231371B1 (ko) * | 2020-01-29 | 2021-03-25 | 주식회사 피에스엠 | 콜드 플라즈마 발생장치 및 이를 포함하는 다중 콜드 플라즈마 어레이 장치 |
CN112490101A (zh) * | 2020-12-15 | 2021-03-12 | 深圳市普拉斯玛自动化设备有限公司 | 一种用于等离子清洗机或蚀刻机的真空清洗结构及清洗工艺 |
CN114836735B (zh) * | 2021-02-01 | 2024-01-19 | 江苏菲沃泰纳米科技股份有限公司 | 基于icp的等离子体镀膜装置及其方法 |
CN117904607A (zh) * | 2022-10-12 | 2024-04-19 | 江苏菲沃泰纳米科技股份有限公司 | 一种有机硅纳米疏水膜层及其制备方法 |
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EP3539676B1 (en) | 2021-07-14 |
US10424465B2 (en) | 2019-09-24 |
KR20190067885A (ko) | 2019-06-17 |
US20180174803A1 (en) | 2018-06-21 |
BR112019005796B1 (pt) | 2023-01-10 |
JP2019537668A (ja) | 2019-12-26 |
BR112019005796A2 (pt) | 2019-07-02 |
EP3539676A1 (en) | 2019-09-18 |
KR102175721B1 (ko) | 2020-11-06 |
CN106622824A (zh) | 2017-05-10 |
JP6990704B2 (ja) | 2022-01-12 |
BR112019005796A8 (pt) | 2022-11-22 |
WO2018098980A1 (zh) | 2018-06-07 |
EP3539676A4 (en) | 2020-06-24 |
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