CN106583757A - Processing device and processing method for high-accuracy ultra-thin metal foils - Google Patents

Processing device and processing method for high-accuracy ultra-thin metal foils Download PDF

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CN106583757A
CN106583757A CN 201611084403 CN201611084403A CN106583757A CN 106583757 A CN106583757 A CN 106583757A CN 201611084403 CN201611084403 CN 201611084403 CN 201611084403 A CN201611084403 A CN 201611084403A CN 106583757 A CN106583757 A CN 106583757A
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metal foil
clamping
body
processing
hole
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CN 201611084403
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Chinese (zh)
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铁贵鹏
戴帆
戴一帆
彭小强
关朝亮
范占斌
刘俊峰
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中国人民解放军国防科学技术大学
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B1/00Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B5/00Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/12Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for securing to a spindle in general
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00Work clamping
    • B23Q2703/02Work clamping means
    • B23Q2703/04Work clamping means using fluid means or a vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00Work clamping
    • B23Q2703/02Work clamping means
    • B23Q2703/10Devices for clamping workpieces of a particular form or made from a particular material

Abstract

The invention discloses a processing device and processing method for high-accuracy ultra-thin metal foils. The device comprises a lathe equipped with a main shaft and a turning tool. A vacuum chuck used for adsorption and clamping of to-be-processed metal foils is arranged on the main shaft and comprises a chuck body which is arranged on the main shaft and a porous adsorption pad body which is arranged in the center region of the chuck body. The chuck body is provided with a central air pore used for absorbing to-be-processed regions of the metal foils to the porous adsorption pad body in the axis. Multiple side air pores used for absorbing edges of the metal foils are uniformly arranged in the side part of the central air pore of the chuck body in the same direction. The method comprises following steps: S1: clamping; S2: processing of a datum plane; S3: overturning and clamping; S4: thining and processing; S5: dismantling. The processing device and processing method for high-accuracy ultra-thin metal foils have following advantages: the device is convenient to dismantle and install and capable of stably clamping; and therefore, production efficiency is raised and uniformly of submicron-level thicknesses of the metal foils is ensured.

Description

高精度超薄金属箔片的加工装置及加工方法 Precision machining apparatus ultrathin metal foil and processing method

技术领域 FIELD

[0001] 本发明主要涉及有色金属材料的超精密加工领域,尤其涉及一种高精度超薄金属箔片的加工装置及加工方法。 [0001] The present invention generally relates to ultra-precision machining of non-ferrous materials, and particularly to a processing apparatus and processing method of high precision ultra-thin metal foil.

背景技术 Background technique

[0002] 在惯性约束聚变试验中,由靶丸表面不均匀性引起的瑞利-泰勒流体力学不稳定性是导致点火失败的一个重要原因。 [0002] In the inertial confinement fusion experiments, the uneven surface of the capsule caused by Rayleigh - Taylor Hydrodynamic Instability is a major cause of misfire. 精密化分解实验是研究这种流体力学不稳定性现象的重要手段,通过制作表面带有调制图形的试验靶,模拟真实靶丸的表面不均匀性。 Decomposition precision of this research is an important means of hydrodynamic instabilities, the modulation pattern with the test target by making the surface, surface unevenness simulation of the real capsule. 实验靶虽然只需要Imm左右截面尺寸,但是厚度一般为几微米至几十微米,并要求有90%以上的厚度均匀性,制作难度很大。 Although the experimental target only about Imm sectional dimension, but the thickness is several microns to several tens of micrometers, and more than 90% of the required thickness uniformity, production is very difficult.

[0003]目前,试验革E主要有两种制作方法:复制法和直接加工法。 [0003] Currently, E test leather There are two main production methods: Copy and direct machining methods. 复制法需要先制备基板,再将基板的调制图形转移到靶丸薄膜上。 Preparing a substrate transfer method needs to prepare a pattern transferred onto the substrate and then the capsule film. 直接加工法一般使用单点金刚石切削技术,将铜、铝等材料直接减薄至微米量级厚度,再在表面上雕刻调制图形。 Direct working method generally used single point diamond turning technique, copper, aluminum and other materials directly to the thinned thickness of the order of microns, then the modulation pattern engraved on the surface. 相比于复制法,直接加工法无需经过基板的复制过程,得到的调制图形精度更高,且接近材料理论密度,具有独特的优越性。 Compared to the transfer method, direct method of processing the substrate without passing through the replication process, the accuracy is higher modulation pattern, and close to the theoretical density material, has unique advantages. 但是,单点金刚石切削技术加工试验靶的主要难度在于材料的减薄和厚度均匀性的保证。 However, the main technical difficulty single point diamond cutting processing test target is to ensure uniformity of the thickness and material thinning. 几十微米以下厚度的铝、铜等金属薄膜很容易变形甚至破裂,其装夹难度很大。 Several tens of microns or less of aluminum, copper and other metal film thickness is easily deformed or even break, which clamping great difficulty. 目前所使用的方法是利用粘胶的手段,将金属材料与基底固结,相当于增加了材料的厚度,再减薄至目标厚度后用溶胶剂脱胶。 The method currently used is the use of means of adhesive, the metal substrate material consolidated, representing an increase of thickness of the material, and then thinned to a target thickness after degumming peptizer. 这种方法脱胶较为困难,生产率低下,且涂胶层的厚度均匀性很难保证,导致减薄后薄片的厚度均匀性难以满足使用要求。 This degumming method is difficult, low productivity and thickness uniformity of the coating layer is difficult to ensure the thickness uniformity after thinning lead sheet is difficult to meet the requirements.

发明内容 SUMMARY

[0004] 本发明要解决的技术问题是克服现有技术的不足,提供一种拆装方便、装夹稳定、可提高生产效率、能保证金属箔片亚微米量级厚度均匀性的高精度超薄金属箔片的加工装置及加工方法。 [0004] The present invention is to solve the technical problem to overcome the deficiencies of the prior art, to provide a convenient disassembly, stable clamping can improve production efficiency, to ensure the uniformity of the metal foil precision submicron thickness over processing apparatus and method for processing a thin metal foil.

[0005] 为解决上述技术问题,本发明采用以下技术方案: [0005] To solve the above problems, the present invention employs the following technical solution:

一种高精度超薄金属箔片的加工装置,包括车床,所述车床上装设有主轴和车削刀具,所述主轴上装设有用于吸附装夹待加工金属箔片的真空吸盘,所述真空吸盘包括吸盘本体和多孔质吸附垫体,所述吸盘本体装设在主轴上,所述多孔质吸附垫体装设在吸盘本体的中心区域,吸盘本体在其轴线开设有用于将金属箔片的待加工区域吸附在多孔质吸附垫体上的中心气孔,所述吸盘本体在中心气孔侧部的同向方向均匀开设有多个用于吸附金属箔片边沿的侧部气孔。 A high-precision machining apparatus ultrathin metal foil, comprising a lathe, the lathe turning tool and the spindle is provided with tops, tops of the spindle is provided for the adsorption of the metal foil to be worked clamping vacuum chuck, the vacuum chuck comprising a suction cup body and a porous adsorbing mat body, said chuck body mounted on a spindle, the porous body suction pad mounted in a central region of the chuck body, the chuck body to be opened for the metal foil in its axis machining area adsorbed on the porous body suction pad center hole, the suction cup body in the same direction as the side portion of the center hole uniformly defines a plurality of suction-side portion of the hole edge of the metal foil.

[0006]作为上述技术方案的进一步改进: [0006] As the foregoing technical solution further improvement:

所述吸盘本体于吸附面开设有一圈与侧部气孔连通的环形气槽。 Said suction cup body defines a circle on the adsorption surface side hole communicating with the annular groove gas.

[0007] 所述吸盘本体于安装面开设有与中心气孔和侧部气孔连通的导气槽。 [0007] The chuck body defines a hole communicating with the center hole and the side portion of the air guide grooves on the mounting surface.

[0008] 所述导气槽包括环形导气槽和直线导气槽,所述环形导气槽与侧部气孔连通,所述直线导气槽与直线导气槽以及中心气孔连通。 [0008] The air guide groove includes an annular groove and a linear gas guide air guide groove, said annular groove gas guide hole communicating with the side portions, and said straight air guide groove and a center hole gas guide groove linearly communicated.

[0009] 所述吸盘本体于靠近外边沿处沿周向方向开设有多个沉头孔,所述吸盘本体通过螺栓穿过沉头孔与主轴紧固连接。 [0009] The chuck body in a direction close to the outer edge of the spigot defines a plurality of circumferentially, said suction cup body through a bolt fastening spigot and the spindle.

[0010] 所述多孔质吸附垫体与吸盘本体胶接。 [0010] the porous body and the suction cup body suction pads glued.

[0011] —种基于上述的高精度超薄金属箔片的加工装置的加工方法,包括以下步骤: [0011] - processing method for processing seed based on the above-described apparatus with high precision ultra-thin metal foil, comprising the steps of:

S1:装夹:将待加工的金属箔片装夹在真空吸盘上,使金属箔片的边沿被侧部气孔吸附,使金属箔片的待加工区域被多孔质吸附垫体吸附; S1: Clamping: to be machined is clamped in the metal foil on a vacuum chuck, so that the edge of the metal foil of the side hole is adsorbed, so that the metal foil areas to be processed is a porous adsorbent adsorbing pad;

S2:基准面加工:启动车床使车削刀具对金属箔片的待加工区域进行车削加工,直至切平; S2: the reference surface working: Start lathe turning tool to be machined so that the metal foil region is turning, until the cut flat;

S3:翻面装夹:去除真空,对金属箔片进行拆卸,将已加工的基准面按照SI的步骤装夹; S4:减薄加工:启动车床使车削刀具对金属箔片的待加工区域进行车削加工直至目标厚度; S3: turn clamping surface: removal in vacuo, the metal foil sheet is detached, the machined reference plane in SI clamping step; S4: ironing: Start lathe turning tool so that the processing region of the metal foil to be carried out turning until the target thickness;

S5:拆卸:去除真空,对金属箔片进行拆卸。 S5: Removal: removed in vacuo disassembly of the metal foil.

[0012]作为上述技术方案的进一步改进: [0012] As the foregoing technical solution further improvement:

在步骤S4中,将车削刀具倾斜切入金属箔片内部,然后向金属箔片轴线方向正常走刀,依此随金属箔片减薄过程不断进行,使切削区域呈阶梯状缩小,直至达到目标厚度。 In step S4, the turning tool cuts the inclined inner metal foil, and then passes in the axial direction of normal metal foils, metal foil and so with the thinning process continues, the cutting zone stepwise reduced, until the target thickness .

[0013] 在步骤S4中,车削刀具进刀时与金属箔片轴线之间的角度在45°与90°之间。 [0013] In step S4, the turning tool when the metal foil between the feed axis and an angle between 45 ° and 90 °.

[0014]与现有技术相比,本发明的优点在于: [0014] Compared with the prior art, advantages of the present invention:

本发明的高精度超薄金属箔片的加工装置,真空吸盘采用分块结构,其包括吸盘本体和多孔质吸附垫体。 Precision machining apparatus of the ultra-thin metal foil of the present invention, a vacuum chuck using the block structure comprising a chuck body and a porous adsorbing mat body. 吸盘本体利用侧部气孔对金属箔片提供有效的吸附装夹,以避免切削力和离心力等的作用导致金属箔片位移或者脱落;而多孔质吸附垫体能对金属箔片的减薄区域提供有效支撑和一定的吸附,使得金属箔片在减薄过程中始终被多孔质材料束缚,避免减薄到一定程度后破损;通过这种分块吸附装夹结构大大提高了金属箔片装夹的稳定性,并且,拆装过程非常方便,不需要进行脱胶处理,一方面提高了生产效率,另一面实现了金属箔片亚微米量级厚度均匀性的加工。 Using a suction cup body portion-side suction hole to provide effective clamping of the metal foil, in order to avoid cutting force and centrifugal force causes the displacement of a metal foil or off; porous while providing physical adsorption pad effective area of ​​reduced thickness of the metal foil certain adsorption and support, so that the metal foil is always bound by a porous material in the thinning process, the thinned avoid the damage to some extent; this adsorption clamping block structure greatly improves the stability of the metal foil clamping resistance, and, the disassembly process is very easy, no degumming process, on the one hand to improve production efficiency, the other surface achieving uniform processing of the metal foil submicron thickness. 本发明的加工方法,基于上述高精度超薄金属箔片的加工装置进行,因此具备上述高精度超薄金属箔片的加工装置相应的技术效果。 Process of this invention, the above-described precision machining apparatus based on the ultra-thin metal foil is thus provided with corresponding technical effects of the above-described precision machining apparatus of the ultra-thin metal foil.

附图说明 BRIEF DESCRIPTION

[0015]图1是本发明高精度超薄金属箔片的加工装置的结构示意图。 [0015] FIG. 1 is a schematic view of the apparatus of the present invention, high-precision machining thin metal foil.

[0016]图2是本发明高精度超薄金属箔片的加工装置中真空吸盘的主视结构示意图。 [0016] FIG. 2 is a schematic front view of the structure of the present invention, high-precision machining apparatus ultrathin metal foil in a vacuum chuck.

[0017]图3是图2的AA剖视结构示意图。 [0017] FIG. 3 is a schematic cross-sectional view AA of the structure of Figure 2.

[0018]图4是本发明高精度超薄金属箔片的加工装置中真空吸盘的后视结构示意图。 [0018] FIG. 4 is a schematic view of the structure of the vacuum chuck apparatus of the present invention, high-precision machining thin metal foil sheet.

[0019]图5是本发明高精度超薄金属箔片的加工装置的行刀轨迹示意图。 [0019] FIG. 5 is a schematic view of high-precision machining apparatus of the present invention, the ultrathin metal foil a trajectory of a knife.

[0020]图6是本发明高精度超薄金属箔片的加工方法的流程图。 [0020] FIG. 6 is a flowchart of a method of processing a metal thin foil of the present invention with high accuracy.

[0021] 图中各标号表不: [0021] Each reference numeral in FIG table is not:

1、车床;11、主轴;12、车削刀具;2、金属箔片;3、真空吸盘;31、吸盘本体;311、中心气孔;312、侧部气孔;313、环形气槽;314、导气槽;3141、环形导气槽;3142、直线导气槽;315、沉头孔;32、多孔质吸附垫体。 1, the lathe; 11, spindle; 12, turning tools; 2, the metal foil; 3, vacuum chuck; 31, chuck body; 311, center hole; 312, the side hole; 313, annular gas tank; 314, air guide grooves; 3141, an annular air guide groove; 3142, linear air guide groove; 315, spigot; 32, suction pads porous body.

具体实施方式 detailed description

[0022]以下将结合说明书附图和具体实施例对本发明做进一步详细说明。 [0022] The following description in conjunction with the accompanying drawings and specific embodiments described in further detail of the present invention.

[0023]图1至图5示出了本发明高精度超薄金属箔片的加工装置的一种实施例,包括车床I,车床I上装设有主轴11和车削刀具12,主轴11上装设有用于吸附装夹待加工金属箔片2的真空吸盘3,真空吸盘3包括吸盘本体31和多孔质吸附垫体32,吸盘本体31装设在主轴11上,多孔质吸附垫体32装设在吸盘本体31的中心区域,吸盘本体31在其轴线开设有用于将金属箔片2的待加工区域吸附在多孔质吸附垫体32上的中心气孔311,吸盘本体31在中心气孔311侧部的同向方向均匀开设有多个用于吸附金属箔片2边沿的侧部气孔312。 [0023] Figures 1 to 5 illustrate the present invention of processing a high-precision apparatus ultrathin metal foil embodiments, including lathes I, I lathe spindle 11 and is provided with at turning tools 12, 11 mounted on the main shaft helpful adsorption clamping the metal foil to be processed 2, the vacuum chuck 3, the vacuum chuck 3 comprises a chuck body 31 and a porous adsorbing pad 32, the pad body 31 mounted on the main shaft 11, a porous adsorbing pad 32 is mounted in sucker a central region, the chuck body main body 31 of 31 in which the axis defines a metal foil areas to be processed 2 is adsorbed in 31 co-porous suction pads the center of hole 311, the chuck body on 32 311 side of the center hole of It defines a plurality of directions for uniformly adsorbing the metal foil 2 side of the rim hole portion 312. 该结构中,真空吸盘3采用分块结构,其包括吸盘本体31和多孔质吸附垫体32,吸盘本体31采用铜、铝等能够用金刚石车刀进行加工的有色金属材料,多孔质吸附垫体32采用石墨基多孔质、铜基多孔质等材料,且选择孔隙率较小为宜。 With this configuration, the vacuum chuck 3 A block structure, which comprises a suction pad 31 and the porous body 32, the chuck body 31 can be processed using non-ferrous material with a diamond tools copper, aluminum or the like, the suction pads porous body suction cup body a porous graphite substrate 32, a porous material such as copper, and less preferably selected porosity. 吸盘本体31利用侧部气孔312对金属箔片2提供有效的吸附装夹,以避免切削力和离心力等的作用导致金属箔片2位移或者脱落;而多孔质吸附垫体32能对金属箔片2的减薄区域提供有效支撑和一定的吸附,使得金属箔片2在减薄过程中始终被多孔质材料束缚,避免减薄到一定程度后破损;通过这种分块吸附装夹结构大大提高了金属箔片2装夹的稳定性,并且,拆装过程非常方便,不需要进行脱胶处理,一方面提高了生产效率,另一面实现了金属箔片2亚微米量级厚度均匀性的加工。 Using a suction cup body 31 side hole 312 provides effective adsorption of clamping the metal foil 2, in order to avoid cutting force and centrifugal force causes the displacement of the metal foil 2, or off; the porous pad 32 can be adsorbed on the metal foil member effective support and provide certain adsorption thinned region 2, the metal foil 2 is always bound by a porous material in the thinning process, the thinned avoid the damage to some extent; this adsorption clamping block structure greatly increased 2 the stability of clamping the metal foil, and the process is very easy disassembly, no degumming process, on the one hand improves the productivity, the uniformity of the other side to achieve processing of the metal foil 2 of submicron thickness.

[0024] 本实施例中,吸盘本体31于吸附面开设有一圈与侧部气孔312连通的环形气槽313。 [0024] In this embodiment, the chuck body 31 in the gas adsorption surface defines an annular groove in a circle hole 312 communicating with the side portion 313. 该环形气槽313设置在吸盘本体31的吸附面并覆盖侧部气孔312,使得金属箔片2被吸附时受力均匀,而且受力面积增大,进一步提高了金属箔片2的装夹强度和稳定性。 The annular groove 313 provided on the air suction face of the chuck body portion 31 and cover the side hole 312 so that the metal foil 2 is adsorbed uniform force, and the force receiving area is increased, further improving the clamping strength of the metal foil 2 and stability.

[0025] 本实施例中,吸盘本体31于安装面开设有与中心气孔311和侧部气孔312连通的导气槽314。 [0025] In this embodiment, the chuck body 31 to the mounting surface of the gas guide groove and defines a central hole 311 and the side portion 312 communicating hole 314. 该导气槽314同时与中心气孔311和侧部气孔312连通,使得真空设备不需设置独立的气管分别与中心气孔311和侧部气孔312连通,一方面减少了耗材,降低了成本;另一方面,保证了抽真空和去真空的同一性,防止金属箔片2单点受力而破损。 The gas guide groove 314 while communicating with the center hole 311 and the side air holes 312, provided that the device does not need a separate vacuum pipe 311 are communicated with the central hole and a side hole 312, while reducing the consumables, to reduce the cost; another in order to ensure the evacuation to vacuum and identity to prevent the metal foil 2 is forced to break a single point.

[0026] 本实施例中,导气槽314包括环形导气槽3141和直线导气槽3142,环形导气槽3141与侧部气孔312连通,直线导气槽3142与直线导气槽3142以及中心气孔311连通。 [0026] In this embodiment, the gas guide groove 314 includes an annular gas guide groove 3141 and the linear gas guide groove 3142, communicating the annular gas guide groove 3141 side hole and 312, the linear air guide groove 3142 and the linear gas guide groove 3142 and the center communication hole 311. 该结构中,真空设备通过直线导气槽3142和环形导气槽3141即能同时对中心气孔311和侧部气孔312进行抽真空而产生吸附力,其结构简单实用。 With this configuration, the vacuum apparatus that can simultaneously centering hole 311 and the side air holes 312 for vacuum suction force generated by a linear air guide groove 3142 and the annular gas guide groove 3141, the structure is simple and practical.

[0027] 本实施例中,吸盘本体31于靠近外边沿处沿周向方向开设有多个沉头孔315,吸盘本体31通过螺栓穿过沉头孔315与主轴11紧固连接。 [0027] In this embodiment, the chuck body 31 in the circumferential direction near the outer edge of the direction defines a plurality of counterbored holes 315, the chuck body 3111 through spigot fastened to the spindle 315 by bolts. 安装时,利用螺栓穿过沉头孔315将吸盘本体31安装在主轴11上,保证了拆装的方便性。 When installed, with bolts 315 passing through the spigot body suction cup 31 mounted on the spindle 11, to ensure the ease of disassembly.

[0028] 本实施例中,多孔质吸附垫体32与吸盘本体31胶接。 [0028] In this embodiment, the porous body 32 and the suction pads 31 chuck body glued. 该结构中,多孔质吸附垫体32与吸盘本体31脱胶容易,利于多孔质吸附垫体32安装、拆卸和更换。 With this configuration, the porous body 32 and the suction pads 31 chuck body unglued easily facilitate the porous adsorption pad 32 is assembled, removal and replacement.

[0029]图1至图6示出了本发明基于上述的高精度超薄金属箔片的加工装置的加工方法的一种实施例,包括以下步骤: [0029] Figures 1 to 6 illustrate an embodiment of the present invention is based on a working method of the above-described precision machining apparatus of the ultra-thin metal foil, comprising the steps of:

S1:装夹:将待加工的金属箔片2装夹在真空吸盘3上,使金属箔片2的边沿被侧部气孔312吸附,使金属箔片2的待加工区域被多孔质吸附垫体32吸附; S1: Clamping: to be machined is clamped in the metal foil 2 on the vacuum chuck 3, the metal foil side of the rim portion 2 is suction hole 312, so that the metal foil be processed region 2 is the porous body suction pads 32 adsorption;

S2:基准面加工:启动车床I使车削刀具12对金属箔片2的待加工区域进行车削加工,直至切平; S2: the reference surface working: I make the turning tool starts turning areas to be processed 12 pairs of the metal foil 2 is turning, until the cut flat;

S3:翻面装夹:去除真空,对金属箔片2进行拆卸,将已加工的基准面按照SI的步骤装夹; S4:减薄加工:启动车床I使车削刀具12对金属箔片2的待加工区域进行车削加工直至目标厚度; S3: turn clamping surface: removal in vacuo, the metal foil 2 is detached, the machined reference plane in SI clamping step; S4: ironing: Start I lathe cutter 12 so that the turning of the metal foil 2 turning area to be processed until the target thickness;

S5:拆卸:去除真空,对金属箔片2进行拆卸。 S5: Removal: removed in vacuo, the metal foil 2 to be disassembled.

[0030] 采用该方法,利用侧部气孔312对金属箔片2提供有效的吸附装夹,以避免切削力和离心力等的作用导致金属箔片2位移或者脱落;而多孔质吸附垫体32能对金属箔片2的减薄区域提供有效支撑和一定的吸附,使得金属箔片2在减薄过程中始终被多孔质材料束缚,避免减薄到一定程度后破损;大大提高了金属箔片2装夹的稳定性,并且,拆装过程非常方便,不需要进行脱胶处理,一方面提高了生产效率,另一面实现了金属箔片2亚微米量级厚度均匀性的加工。 [0030] With this method, by using the side hole 312 provides effective adsorption of clamping the metal foil 2, in order to avoid cutting force and centrifugal force causes the displacement of the metal foil 2, or off; and a porous adsorbing pad 32 can provide effective support and a certain region of the metal thin adsorption foil 2, so that the metal foil 2 is always bound by a porous material in the thinning process, the thinned avoid the damage to some extent; greatly improves the metal foil 2 the clamping stability, and the disassembly process is very easy, no degumming process, on the one hand improves the productivity, the uniformity of the other side to achieve processing of the metal foil 2 of submicron thickness.

[0031] 本实施例中,在步骤S4中,将车削刀具12倾斜切入金属箔片2内部,然后向金属箔片2轴线方向正常走刀,依此随金属箔片2减薄过程不断进行,使切削区域呈阶梯状缩小,直至达到目标厚度。 [0031] In the present embodiment, at step S4, the turning tool 12 cuts the inclined inner metal foil 2 then passes to a second axis normal direction of the metal foil, the metal foil 2 so with thinning process continues, the cutting region of reduced stepwise, until the target thickness. 该特定的进刀轨迹,图5中的①、②、③表示行刀轨迹,从金属箔片2的内部倾斜进刀,并采用阶梯型进刀轨迹,避免了切入点过大的材料去除量而可能带来的薄片破损的风险,形成的阶梯状刚好与侧部气孔312位置对应,保证了金属箔片2加工过程中始终能承受侧部气孔312较大的吸附力。 This particular infeed track, in FIG. 5 ①, ②, ③ indicates the trajectory of a knife, is inclined from the inside of the metal foil 2 of the feed, and the use of ladder-type feed track, an entry point to avoid an excessive amount of material is removed the possible risks of breakage of the sheet, forming a stepped hole exactly corresponds to the position of the side portion 312, to ensure that the processing of the metal foil 2 can withstand 312 always greater suction force side hole.

[0032] 本实施例中,在步骤S4中,车削刀具12进刀时与金属箔片2轴线之间的角度在45°与90°之间。 [0032] In the present embodiment, in the step S4, the angle between the axis between the two metal foil when the turning tool 12 in infeed 45 ° and 90 °. 本实施例中,车削刀具12进刀时与金属箔片2轴线之间的角度设置为50°,其操作方便。 Embodiment, when the turning tool 12 is set to 50 ° infeed angle between the axis of the metal foil 2 of the present embodiment, which is easy to operate.

[0033]虽然本发明已以较佳实施例揭示如上,然而并非用以限定本发明。 [0033] Although the invention has been described by the preferred embodiments, but the present invention is not limited thereto. 任何熟悉本领域的技术人员,在不脱离本发明技术方案范围的情况下,都可利用上述揭示的技术内容对本发明技术方案做出许多可能的变动和修饰,或修改为等同变化的等效实施例。 Any skilled in the art, without departing from the scope of the technical solutions of the present invention, using the disclosed techniques can be made of many possible variations content and modifications, or modifications of the aspect of the invention is equivalent variations equivalent embodiments example. 因此,凡是未脱离本发明技术方案的内容,依据本发明技术实质对以上实施例所做的任何简单修改、等同变化及修饰,均应落在本发明技术方案保护的范围内。 Thus, all without departing from the technical solutions of the present invention, any simple modification based on the technical spirit of the present invention made of the above Example, equivalent variations and modifications shall fall within the scope of protection of the present invention.

Claims (9)

  1. 1.一种高精度超薄金属箔片的加工装置,包括车床(I),所述车床(I)上装设有主轴(II)和车削刀具(12),其特征在于:所述主轴(II)上装设有用于吸附装夹待加工金属箔片(2)的真空吸盘(3),所述真空吸盘(3)包括吸盘本体(31)和多孔质吸附垫体(32),所述吸盘本体(31)装设在主轴(11)上,所述多孔质吸附垫体(32)装设在吸盘本体(31)的中心区域,吸盘本体(31)在其轴线开设有用于将金属箔片(2)的待加工区域吸附在多孔质吸附垫体(32)上的中心气孔(311),所述吸盘本体(31)在中心气孔(311)侧部的同向方向均匀开设有多个用于吸附金属箔片(2)边沿的侧部气孔(312)。 A precision machining apparatus ultrathin metal foil, comprising a lathe (I), the lathe (I) is provided with at spindle (II) and a turning tool (12), characterized in that: said spindle (II ) is provided with at vacuum chuck (3) to be processed for adsorbing clamping the metal foil (2) of the vacuum chuck (3) comprises a suction cup body (31) and a porous adsorbing pad (32), said suction cup body (31) mounted on the main shaft (11), the porous adsorbent pad (32) mounted in a central region of the chuck body (31), the suction cup body (31) is defined for the metal foil in its axis ( 2) to be processed in the region of the porous adsorbent adsorbing mat body (the center hole (311) on 32), said suction cup body (31) in the central hole (311) in the direction of the side portion with a plurality of uniformly defines a adsorption of metal foil (2) the edge portion of the side hole (312).
  2. 2.根据权利要求1所述的高精度超薄金属箔片的加工装置,其特征在于:所述吸盘本体(31)于吸附面开设有一圈与侧部气孔(312)连通的环形气槽(313)。 The precision machining apparatus of the ultrathin metal foil according to claim 1, wherein: said suction cup body (31) defines a circle with the side hole (312) in communication with the annular groove gas adsorption surface ( 313).
  3. 3.根据权利要求2所述的高精度超薄金属箔片的加工装置,其特征在于:所述吸盘本体(31)于安装面开设有与中心气孔(311)和侧部气孔(312)连通的导气槽(314)。 The precision machining apparatus of the ultra-thin metal foil as claimed in claim 2, wherein: said suction cup body (31) defines a central hole in communication with the (311) and a side hole (312) to the mounting surface the air guide groove (314).
  4. 4.根据权利要求3所述的高精度超薄金属箔片的加工装置,其特征在于:所述导气槽(314)包括环形导气槽(3141)和直线导气槽(3142),所述环形导气槽(3141)与侧部气孔(312)连通,所述直线导气槽(3142)与直线导气槽(3142)以及中心气孔(311)连通。 4. The precision machining apparatus of the ultrathin metal foil according to claim 3, wherein: said air guide grooves (314) comprising an annular air guide groove (3141) and a linear gas guide groove (3142), the said annular air guide groove (3141) and the side portion hole (312) communicating the linear air guide groove (3142) and the linear gas guide grooves (3142) and a central hole (311) in communication.
  5. 5.根据权利要求1至4中任一项所述的高精度超薄金属箔片的加工装置,其特征在于:所述吸盘本体(31)于靠近外边沿处沿周向方向开设有多个沉头孔(315),所述吸盘本体(31)通过螺栓穿过沉头孔(315)与主轴(II)紧固连接。 The precision machining apparatus 1 through the ultrathin metal foil according to any one of claim 4, wherein: said suction cup body (31) defines a plurality of directions in the circumferential direction near the outer edge of the spigot (315), said suction cup body (31) by a fastening bolt passing through the spigot (315) with the spindle (II).
  6. 6.根据权利要求1至4中任一项所述的高精度超薄金属箔片的加工装置,其特征在于:所述多孔质吸附垫体(32)与吸盘本体(31)胶接。 The processing apparatus according to any one of the high precision thin metal foil as claimed in claim 1 to 4, wherein: the porous adsorbent pad (32) and the suction cup body (31) glued.
  7. 7.—种基于权利要求1至6中任一项所述的高精度超薄金属箔片的加工装置的加工方法,其特征在于:包括以下步骤: S1:装夹:将待加工的金属箔片(2)装夹在真空吸盘(3)上,使金属箔片(2)的边沿被侧部气孔(312)吸附,使金属箔片(2)的待加工区域被多孔质吸附垫体(32)吸附; S2:基准面加工:启动车床(I)使车削刀具(12)对金属箔片(2)的待加工区域进行车削加工,直至切平; S3:翻面装夹:去除真空,对金属箔片(2)进行拆卸,将已加工的基准面按照SI的步骤装夹; S4:减薄加工:启动车床(I)使车削刀具(12)对金属箔片(2)的待加工区域进行车削加工直至目标厚度; S5:拆卸:去除真空,对金属箔片(2)进行拆卸。 7.- The method of processing seed based processing apparatus 1 to a precision thin metal foil according to any of claim 6, characterized in that: comprising the steps of: Sl: Clamping: metal foil to be processed sheet (2) clamping the vacuum chuck (3), the metal foil (2) is a rim (312) portion side suction hole, so that the metal foil (2) to be processed region is adsorbed porous mat body ( 32) adsorption; S2: machining datum: start lathe (I) that the turning tool (12) of the metal foil (2) to be processed turning region, until the flat cut; S3: inverting clamping: removed in vacuo reference surface of the metal foil (2) for disassembly, which has been processed according to steps SI clamping; S4: ironing: start lathe (I) that the turning tool (12) to be processed on the metal foil (2) turning area until the target thickness; S5: removal: removed in vacuo, the metal foil (2) is detached.
  8. 8.根据权利要求7所述的高精度超薄金属箔片的加工方法,其特征在于:在步骤S4中,将车削刀具(12)倾斜切入金属箔片(2)内部,然后向金属箔片(2)轴线方向正常走刀,依此随金属箔片(2)减薄过程不断进行,使切削区域呈阶梯状缩小,直至达到目标厚度。 8. A precision machining method of the ultra-thin metal foil according to claim 7, wherein: in step S4, the turning tool (12) obliquely cutting the metal foil (2) inside, and then the metal foil (2) normally passes the axial direction, and so with the metal foil (2) thinning process continues, the cutting zone stepwise reduced, until the target thickness.
  9. 9.根据权利要求8所述的高精度超薄金属箔片的加工方法,其特征在于:在步骤S4中,车削刀具(12)进刀时与金属箔片(2)轴线之间的角度在45°与90°之间。 9. The processing method of claim 8 precision ultra-thin metal foil as claimed in claim, wherein: in the step S4, the turning tool (12) and the metal foil (2) at an angle between the axis of the feed between 45 ° and 90 °.
CN 201611084403 2016-11-30 2016-11-30 Processing device and processing method for high-accuracy ultra-thin metal foils CN106583757A (en)

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