CN106569310A - MEMS-based optical image stabilization - Google Patents
MEMS-based optical image stabilization Download PDFInfo
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- CN106569310A CN106569310A CN201610905935.3A CN201610905935A CN106569310A CN 106569310 A CN106569310 A CN 106569310A CN 201610905935 A CN201610905935 A CN 201610905935A CN 106569310 A CN106569310 A CN 106569310A
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- electrostatic actuator
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- electrostatic
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
- G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B5/02—Lateral adjustment of lens
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
- H04N23/681—Motion detection
- H04N23/6812—Motion detection based on additional sensors, e.g. acceleration sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
- H04N23/682—Vibration or motion blur correction
- H04N23/685—Vibration or motion blur correction performed by mechanical compensation
- H04N23/687—Vibration or motion blur correction performed by mechanical compensation by shifting the lens or sensor position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B2205/0007—Movement of one or more optical elements for control of motion blur
- G03B2205/0015—Movement of one or more optical elements for control of motion blur by displacing one or more optical elements normal to the optical axis
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B2205/0053—Driving means for the movement of one or more optical element
Abstract
In one example, a camera (800) is provided. The camera (800) includes: a plurality of MEMS electrostatic comb actuators (1-3), each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module (805) operable to command the plurality of actuators (1-3) to actuate the at least one lens responsive to motion of the camera.
Description
The application is the applying date for September in 2012 28 days, Application No. 201280047680.1, entitled " is based on
The divisional application of the application for a patent for invention of the optical image stabilization of MEMS ".
Technical field
The disclosure relates generally to Optical devices, more particularly to the image stabilization based on MEMS (MEMS)
System.
Background technology
The fast development for possessing the cell phone cameras of such as zoom, automatic focusing and high-resolution feature has been threatened
Make user-friendly camera out-of-date.But, as this miniature camera has transplanted higher and higher million picture element density and zoom function,
The picture quality of generation is affected by hand tremor.In fact, even if human user is hardy attempted, still hand-held photograph
Machine is also physically impossible, this is because staff has peak value in 7 to the natural vibration between 11Hz.Photographing unit
This about 10Hz tremble will according to the angular field of view of time of exposure and each image pixel to picture quality produce
Increasing impact.The increase of the picture element density of cell phone cameras can introduce produce due to camera-shake more and more
It is image blurring.
Therefore, the motion sensor based on MEMS for digital camera is had been developed that, to solve due to staff
The image quality decrease trembleed and cause.For example, can be used to sense the motion of photographing unit based on the gyroscope of MEMS.In response to sense
The motion for measuring, image stabilization system attempts mobile lens or imageing sensor, final by transporting to minimize or eliminate
It is dynamic cause it is image blurring.However, produced actuating is to use what traditional actuator was performed.
Therefore, this area is needed based on the image stabilization system of MEMS.
The content of the invention
According to the first aspect of the disclosure, there is provided a kind of photographing unit, it includes：Multiple electrostatic actuators；And optics
Image stabilization (OIS) algoritic module, it is operable to respond to the motion in photographing unit, orders described in multiple actuator activations extremely
Few lens.
According to the second aspect of the disclosure, there is provided a kind of image stability method, including：The motion of sensing photographing unit；Base
In the motion for sensing, it is determined that the desired lens actuation for stablizing camera lens；The desired lens actuation is turned
It is changed to desired tangential actuating；And according to the desired tangential actuating, tangentially activated at least using multiple tangential actuators
One lens.
According to the third aspect of the disclosure, a kind of actuator devices, including：Platform, it is elastically supported with planar
Motion；Three or more actuators, each actuator is all connected to the periphery of described, and can be used to activating
When the power that will act in the plane be tangentially applied to described；And external frame, its surround and support described and
Actuator.
By considering the following detailed description to some exemplary embodiments, particularly when combine accompanying drawing carry out it is above-mentioned
Consider, can be better understood from the disclosure novel actuator devices and using the actuator devices certain methods it is upper
State and some other feature and advantage, wherein, in one or more accompanying drawing for illustrating, similar reference number is used to represent
Similar element.
Description of the drawings
Fig. 1 is the plane graph using the tangential exemplary image stabilizing device for activating；
Fig. 2A -2F are to be shown with the exemplary image stabilizing device of Fig. 1 to realize optical element in the plane flat
Move the vectogram with rotary motion；
Fig. 3 is the perspective view of the actuator in the device of Fig. 1；
Fig. 4 A are the partial plan layouts of the cross one another finger piece of the comb part in the actuator for Fig. 3, and it shows
The finger piece gone out before actuator is launched to carry out operation application；
Fig. 4 B are the partial plan layouts of the cross one another finger piece of the comb part in the actuator for Fig. 3, and it shows
The finger piece gone out after actuator is launched；
Fig. 4 C are after comb part has been biased to operating position, for the comb part in the actuator of Fig. 3
The partial plan layout of cross one another finger piece；
Fig. 5 is the plane graph of the actuator breech lock of Fig. 3, and it illustrates that the actuator breech lock engages with actuator rod is each
The stage of kind；
Fig. 6 A-6C are the plane rotation of erecting bed in the device for illustrate Fig. 1 between " stagnation " state and " work " state
The dynamic vectogram of transhipment；
Fig. 6 D are the plane graphs of the erecting bed for staying cool；
Fig. 6 E are in running order erecting bed plane graphs；
The close-up illustration of the arm of the erecting bed of Fig. 6 D that Fig. 6 F are locked out；
Fig. 6 G are the close-up illustrations of the arm of the erecting bed of Fig. 6 E not locked；
Fig. 7 is the block diagram of the image stabilization system for using tangential actuator；
Fig. 8 is the block diagram of the embodiment of the system of Fig. 7, wherein, optical image stabilization is realized in driver IC
Algorithm；
Fig. 9 shows the more details of the driver IC of Fig. 8；
Figure 10 is the flow chart that the image stabilization performed by the system of Fig. 8 and 9 is processed；
Figure 11 is the block diagram of the embodiment of the system of Fig. 7, wherein, realize optical imagery in image processor integrated circuit
Stable algorithm；
Figure 12 shows the more details of the driver of Figure 11 and image processor integrated circuit；And
Figure 13 is the flow chart that the image stabilization performed by the system of Figure 11 and 12 is processed.
Specific embodiment
Effective image stabilization system is provided using the electrostatic lens actuation based on MEMS.In one embodiment,
Only three actuators can be placed in around the optical element of such as lens, to realize that image is steady by using tangential actuating
It is fixed.Turning now to accompanying drawing, image stabilizing device 100 includes the centre bore 105 limited by circular mounting platform 110, and it is used to accommodate
The such as optical element of lens or lens group (not shown).It is denoted as 3 actuatings of actuator 1, actuator 2 and actuator 3
Device is symmetrically disposed in around hole 105.Each actuator is activated in the way of tangential actuating to platform 110.In other words, often
The direction vector that the linear displacement 120 that individual actuator is introduced is limited is tangent with the circle for surrounding hole center 118.For example, linear displacement
120 is tangent with the circle that erecting bed 110 is limited.
The tangential actuating of generation is better understood with reference to the cartesian coordinate system limited by the center 118 in hole 105.Platform
110 and actuator 1,2 and 3 be located in the plane limited by x and y directions.Z-direction is vertically projected from the center 118 of plane.
As it is used herein, it is positive that the tangential displacement as indicated by direction 115 is considered as each actuator.With regard to this side
For face, each actuator thus allows for positively and negatively displacement.As shown in Figure 2 A, if each actuator 1,2 and 3
Identical displacement is introduced, wherein, what actuator 1 and 2 was introduced is negative sense displacement tangentially, and the introducing of actuator 3 is that edge is cut
To positive-displacement, then the tangential actuating of the platform 110 for producing forward direction in the x-direction.Contrary, as shown in Figure 2 C, if activated
Device 1 and 2 is all positive and actuator 3 is equal negative sense, the then tangential actuating of the platform 110 for producing negative sense in the x-direction.It is optional
Ground, as shown in Figure 2 B, if actuator 3 does not introduce displacement, actuator 1 negatively activates given amount, and actuator 2 is positive
Ground activates identical amount, then the final actuating of platform 110 forward direction in the y-direction.Contrary, if actuator 3 does not introduce displacement, and
The positively and negatively displacement of switching as shown in Figure 2 D of actuator 1 and 2, the then final actuating of platform 110 negative sense in the y-direction.With this
The mode of kind, it is tangential to activate the x and y displacement that produce any desired size for platform 110 in the moving range of actuator.
It is tangential to activate the rotation that introduce platform 110 around z-axis.For example, in Fig. 2 E, if each actuator 1,2 and 3
The negative sense displacement of formed objects is introduced, then the final actuating of platform 110 is to turn clockwise (negative θ).Contrary, if in Fig. 2 E
Actuator all as shown in Figure 2 F reverse, so all of tangential actuating is all positive, then the final actuating of platform 110 is
Around z-axis rotate counterclockwise (positive θ).By this way, what platform 110 both can be desirably translates in x and y plane, it is also possible in θ
Rotate in direction.
Each tangential displacement for introducing in actuator 1 to 3 can be represented in local coordinate system.For example, will can activate
Tangential displacement of the device 3 in x directions is appointed as in L3Displacement on direction, the direction that it has with the direction 115 of Fig. 1 represents is identical
Positive rule.Similar, the tangential displacement of actuator 1 and 2 can respectively by local linear coordinate L1And L2Represent.Depending on from
To the radial distance R of the effective tangential point of each actuator, actuator 1 is in dimension L at center 1181In displacement, actuator
2 in L2In displacement and actuator 3 in L3In displacement can be directed to platform 110 x and y-dimension translation and platform 110 with θ
The rotation at angle.In this respect, coordinate transform can show as follows：
L3=R sin θ+X
Coordinate transform above assumes that the neutral position of lens is located at origin, but, if neutral position deviation from origin,
Correspondingly it can be modified.Using these coordinate transforms, detect due to photographing unit shake or other expect not
To physical perturbation and translation of the caused platform 110 on x, y plane or rotation tangential can be activated solving by corresponding.
Any suitable actuator (for example, pectination or gap enclosed actuator) is used equally to construct actuator 1,2 and 3.Inclined pectination
Actuator possesses good mobility, for example, +/- 50 microns, can be such as Application No. 12/946,670 (hereinafter referred to as ' 670
Application), realize as discussed in the commonly assigned U.S. Patent application that the applying date is on November 15th, 2010 it is described partially
Comb actuator, is by way of reference merged into the content of the U.S. Patent application herein.In this embodiment, each
Actuator has standing part 121 and moveable part 122.In the image stabilizing device 100 of Fig. 1, standing part 121 with it is outer
Framework 125 is engaged, and including the comb support part 112 of multiple fixations radially extended to moveable part 122.Similar,
Moveable part 122 includes multiple comb support parts 113 radially extended to standing part 121.Comb support part 112 and 113
Alternate to support multiple comb parts 114.For the sake of clarity, comb part 114 is not shown in Fig. 1, but in figure
Illustrate in the close-up illustration of 4A to 4C.
As seen in further detail in figure 3, each actuator 1 to 3 is driven by corresponding bending part 106
Dynamic platform 110.In order to allow from relative actuator to move, each bending part 106 can be relatively flexible in radial direction, and
Tangential direction (corresponding to the linear displacement 120 of Fig. 1) relative stiffness.For example, bending part 106 may include have and tangential direction
The V-type folded bent portions of the longitudinal axiss of alignment.Such V-type sweep allows radially bending, and for displacement 120
Relative stiffness.In this manner it is achieved that " the virtual kinetic measurement " for platform 110 is arranged, it can be in resting state essence
The true ground centre of location 118, can be rotated to realize desired x-y plane translation during image stabilization and with θ angles.
Using MEMS technology and actuator 1 to 3 can be realized to realize using the linear expansion described in such as ' 670 applications
Biasing deployed condition comb part 114 manufacture.As seen in the close-up illustration in Fig. 4 A, can mutually hand over completely
Manufacture in the state of fork constitutes the cross one another finger piece of each comb part 114.In other words, the finger of comb part 114
Shape thing is initially set to so that associated fixation and removable comb support part 112 and 113 separates in about comb part 114
The length of finger piece.Therefore, the applied voltage difference of whole comb part 114 in Fig. 4 A in undeployed configuration will not be produced
Platform 110 relative to the linear motion in any plane of framework 125, so as to any phase of the lens being connected thereto will not be produced
X, the Y or θ motion answered.In order to leave actuating space, separation that each comb part 114 should be as shown in Figure 4 B is simultaneously opened up
Open.
As shown in Figure 4 B, in one embodiment, may be accomplished by the expansion：By according to arrow 400
Comb support part 113 is moved (so as to the moveable part 122 of mobile Fig. 1) to expanded position for direction, the expanded position and phase
The comb support part 112 of the fixation of association is coplanar, be parallel to each other and separated with the distance selected, and subsequently by moveable part
122 are fixed on expanded position, to carry out substantially coplanar, straight line motion relative to fixed component 121.As shown in Figure 4 C, when
When so launching, apply and remove the movable part that suitable voltage difference will cause to flexibly support to whole comb part 114
122 are divided to do substantially straight line and coplanar shifting with the direction toward and away from standing part 121 as shown in double-head arrow 405
It is dynamic, so as to cause the element for being coupled to platform 110 to do corresponding X, Y and/or θ Z motions.
Have for moveable part 122 to be deployed into into expanded position and the various of expanded position are locked or are fixed on
Different method and apparatus.For example, as shown in figure 3, a kind of method of deploying be related to it is coplanar, off-centered on framework 125
Breech lock 300 and fulcrum 304.Breech lock 300 is connected to framework 125 by breech lock bending part 306.Coplanar deployment rod 308 passes through
Launch bending part 310 and be connected to moveable part 122.Deployment rod 308 has the CAM table for being configured to be engaged with breech lock 300
Face 312.In addition, bar 308 has the recess engaged with fulcrum 304, so that bar can rotate relative to fulcrum 304.
In exemplary expansion, as shown in figure 3, acceleration pulse is applied to according to the direction of arrow 314 removable
Part 122, and make the remains stationary of framework 125.The pulse causes deployment rod 308 to rotate towards breech lock 300 around fulcrum 304.Such as
As can be seen from Figure 5, deployment rod 308 causes cam face 312 to engage with breech lock 300 around the rotation of fulcrum 304.Most
Just, bar 308 is located at not deployed position 501, but begins to rotate to centre position 502, so that the biased latch of cam face 312
300 and stretch out breech lock bending part 306.For the sake of clarity, it is shown that launching the most section view of bending part 310
Figure.The continuous rotation of bar 308 causes breech lock bending part 306 that breech lock 300 is withdrawn into downwards into deployment rod 308 and lock is fixed on
Positioning puts 503.In order to produce rotate bar 308 and mobile moveable part 122 acceleration pulse, can by little probe or
Other MEMS devices are inserted in draw ring 315 (Fig. 3) and correspondingly activate.In an alternate embodiment of the invention, it is possible to use such as Shen
Please be on November 15th, 2010 day, the capillary tube described in the commonly assigned U.S. Patent application of Application No. 12/946,657
Act on launching moveable part 122, be by way of reference merged into the content of the U.S. Patent application herein.It is similar
, the optional structures and methods launched and lock are described in ' 670 applications.
Expansion and locking can cause as shown in Figure 4 B relative of comb part 114 to fully open.In the position, pars pectinata
Part 114 only can effectively shrink rather than extend.In this respect, shrinking and extending all is to realize relevant as above actuating
Required for the positively and negatively motion of device 1,2 and 3.Therefore, the default conditions during image stabilization can relate to realize as schemed
Medium interlaced and voltage to a certain degree that be applied to whole comb part 114 shown in 4C.By this way, pectination is worked as
When voltage is less than the acquiescence running voltage of Fig. 4 C, comb part 114 will extend.Contrary, when pectination voltage is relative to acquiescence
When increasing for running voltage, comb part 114 will shrink.In this way it is possible to apply positive by actuator 1,2 and 3
Activate with negative sense, as indicated by arrow 405.
Before default voltage is applied to whole comb part 114, actuator can be at " start movement ", " shutdown " or
" stagnation " state.In dead states, image stabilization does not work, but center 118 is unaffected.As discussed according to Fig. 2 F
, the suitable displacement of each in actuator 1,2 and 3 produces rotating forward with θ angles, but will not produce in x-y
The translation of plane.So as to be enough to make from the expansion shown in Fig. 4 b but inactive shape in this displacement of each comb part 114
State is transformed into the acquiescence working condition shown in Fig. 4 C.Fig. 6 A show that actuator 1,2 and 3 is rotated to be transformed into work from dead states
Dynamic optical image stabilization state.As shown in Figure 6B, after comb part 114 to be biased to their running voltage,
Alternatively the running voltage of each in actuator 1,2 and 3 is carried out it is controllable increase or reduce will cause such as with
On platform 110 according to Fig. 2A -2F determination motion (thus also correspondingly moving at center 118).In order to save energy consumption, when
When not being imaged, actuator 1,2 and 3 can turn again to their inactive state as shown in Figure 6 C.
With reference to Fig. 6 D to 6E, actuator 1,2 and 3 may be better understood from their dead states to motion optical image
Stable expansion.The state of actuator device power cutoff can be advantageously employed, receive to act on platform with protection equipment
Impulsive force and the impact of plane concave change effect and the bending between equipment nonmobile phase.Therefore, in certain embodiments, one
Or multiple lock arms 308 may be connected to the periphery of platform 110, wherein, each in one or more of lock arms 308
All there is locking member 428 placed on it, and corresponding multiple complementary locking members 430 can for example be connected to external frame
Frame 125, and when platform 110 is arranged on stagnation or power cutoff state with being rotated, the complementary locking member 430 is set
It is set to one corresponding with lock arm 308 complementary locking member 428 to engage.Fig. 6 F are locked out part 430 with complementary lock
Determine the view that part 428 is engaged, and Fig. 6 G show the state that these parts launch.In Fig. 6 G, dotted outline 432 is described
Lock arm 308 in running order during activated apparatus carry out image stabilization operation and the week of locking member 428 end
The range of movement on side, and show during the work, between arm 308, locking member 428 and complementary locking member 430 not
Interference can be produced.
Fig. 7 shows and activate to control the block diagram of the control system 700 of image stabilization using tangential.In image stabilization side
Face, the intended motion of difference photographing unit and unintentionally shake are common.For example, user may be intentional in 90 degree of movement
In the range of mobile cameras shooting different objects.This intentional motion should not be detected, otherwise image stabilization system will
It is rotated by 90 ° can lens to compensate this intentional motion, it is also undesirable task that this is impossible to complete.A kind of area
The method that other photographing unit is unintentionally shaken is the tracking loop of the intended motion using prediction photographing unit.In one embodiment,
Control system 700 includes tracking filter, for example, based on previously measured camera motion the card of current lens position is predicted
Thalmann filter 705.
Kalman filter 705 needs to carry out camera motion some measurements to predict which is the intentional fortune of photographing unit
It is dynamic, rather than shake unintentionally.Therefore, some ginsengs on the inertial sensor measurement photographing unit such as based on the gyroscope 710 of MEMS
The speed of examination point, the hole center 118 that reference point is for example discussed before.To can such as pass through pitching and the deflection that gyroscope 710 is carried out
Speed of the center 118 that measurement is obtained on x, y plane is respectively labeled as xgAnd yg.Can be by analyzing what camera images were obtained
Estimation is supplementing this inertia measurement.Therefore, camera images processor 720 can also be to center 118 in x, y
Speed in plane is estimated that speed of the center 118 on x, y plane is respectively labeled as xcAnd yc.Kalman filter from
Gyroscope 710 and camera processor 720 receive velocity estimation and they are filtered, with correspondingly to lens centre 118
Speed on x, y plane is predicted.Prediction that can be by Kalman filter to reference position speed is respectively labeled as x0With
y0.Velocity estimation is filtered to remove gyroscopic drift by high pass filter 725, to the speed in integrator 730
Estimation is integrated, and is multiplied by suitable zoom factor to obtain location estimation by the velocity estimation in amplifier 735
Value 740.In this respect, estimated value 740 represents the lens centre of the prediction of Kalman filter 705 in the case where there is no shake
118 desired location.Difference between estimated value 740 and the lens position of reality is considered into shake, and should be by figure
As stabilizing control system 700 is compensated.It should be appreciated that the embodiment of control system 700 is capable of achieving not include this prediction
Tracking loop.For example, the inertia measurement that gyroscope 710 is carried out can be only high-pass filtering, to provide to expected photograph
The rough estimate of motor speed.This velocity estimation can be carried out integrating to obtain position estimation value 740 as above.
In order to obtain actual lens position (or equivalence, the position of some reference points (for example, center 118)), often
Individual actuator is all associated with position sensor.For example, actuator 1 can be with the L of discussion before sensing1The position sensing of displacement
Device 741 is associated.In this respect, position sensor 741 can sense the electric capacity of whole comb part 114 with to L1Displacement is carried out
Estimate.Optionally, it is possible to use other kinds of sensor, for example, Hall element.It is similar, actuator 2 and 3 with it is corresponding
Position sensor 742 and 743 be associated.So as to position sensor 742 senses L2Displacement, and the sensing L of sensor 7433Displacement.
Subsequently the displacement that these are sensed is digitized in corresponding analog-digital converter 745 and processes and be sent to coordinate converter
750.By the formula discussed before backstepping, θ=0 is made, will can tangentially activate L1To L3Be converted to sensing the feedback of position xs、ys.Subsequently make
The difference between the position and the position of Kalman filter prediction of sensing is determined with adder 755.Can subsequently in controller 760
The output of adder 755 is filtered with compensator 765, to obtain the x and y coordinates of final lens, wherein, should be right
Lens are activated to compensate the shake of photographing unit.
X and y coordinates are converted to tangential coordinates L by transducer 770 according to equation as above (making θ=0)1、L2And L3。
The output of transducer 770 is so as to representing the desired actuating of actuator 1 to 3.Kalman filter prediction and final desired
The generation of actuating is carried out with relatively low data rate, this is because needing to carry out substantial amounts of computing.But, by actuator 1
It is driven into 3 and expects that the actual actuation of degrees of actuation can adopt of a relatively high data rate.Therefore, the demarcation line in Fig. 7
The numeric area of control system 700 is divided into relatively high and relatively low data rate by 771 expressions.Similar, cut-off rule 772
Control system 700 is divided into numeric area and simulated domain by expression.
Desired degrees of actuation and actuator 1 can be determined using corresponding adder, between 2 and 3 actual actuation
Difference.Corresponding controller 780 subsequently correspondingly determines suitable control signal for its actuator.Digital-to-analogue can subsequently be used
The digital controlled signal of generation is converted to analog control signal by transducer (DAC) 790.As known in the art, static comb
Shape actuator usually requires that a liter high-voltage level, for example, the liter high-voltage level obtained by charge pump.Accordingly, in response to
The analog control signal produced in DAC790, is driven by corresponding drive circuit 790 to each in actuator 1 to 3
It is dynamic.By this way, control system 700 can use the gyroscope 710 that camera motion is sensed in cartesian coordinate system, with
Advantageously only obtain image stabilization using three tangential MEMS actuators.
Can be realized by multiple optional embodiments using the image of system 700.In this respect, can be by from Kalman's filter
Ripple device 705 to the digital unit of transducer 770 and 750 and the aggregated label of signal path are OIS algoritic modules.Can be various
The OIS algoritic modules are realized in integrated circuit structure.As shown in figure 8, one embodiment of photographing unit 800 includes being driven positioned at MEMS
OIS algoritic modules 805 in dynamic device integrated circuit (IC) 810.Photographing unit 800 includes being used for image stabilization as above
MEMS tangential actuators and the actuator for focusing on (AF) and scaling purpose automatically.These MEMS actuators are intensively shown
For MEMS modules 815.Driver IC 810 is using from the AF orders 820 of AF drivers 830 and from optical image stabilization
(OIS) the tangential actuation commands 825 of the plane of driver 835 are driven to MEMS modules 815.MEMS modules 815 include position
Sensor, for example, with reference to the position sensor that Fig. 7 is discussed, such driver IC 810 can be with receiving plane tangential actuator position
Put 840.
Such as I2Driver IC 810 is connected to other camera components by the bus of C buses 845.It will be appreciated, however, that
Other bus protocols can be used.In photographing unit 800, gyroscope 710, imager 720, image processor 850 and microprocessor
Unit (MCU) 855 is all connected to I2C buses 845.Due to I2C agreements are MS master-slave agreements, so the module in driver IC 810
805 position provides relatively low delay, and it will be further described herein.Fig. 9 shows the final control of photographing unit 800
Loop processed.Bus master can be the ISP or MCU represented by primary module 900.OIS algoritic modules 805 are simplified versions
This, this is because have ignored tracking filter, high pass filter is filtered by the pitching that exports to gyroscope 710 and yaw rate
Ripple is estimating the intended motion of photographing unit.Therefore the data flow in MS master-slave bus is typically since equipment to main equipment or certainly
Main equipment so the speed of rotation of gyroscope 710 is first delivered to primary module 90, and is subsequently transported to the data flow from equipment
Driver IC 810.In this respect, the control gyroscope 710 of primary module 900 and driver IC 810.For the sake of clarity, only exist
The passage of single merging is shown in OIS algoritic modules 805.Therefore, transducer 920 represents the transducer 770 and 750 in Fig. 7.
Changed using neutral position 925 pair actual and desired lens position of the transducer 920 relative to lens.
Figure 10 shows the data flow produced in bus 845.Image stabilization necessarily consumes some electric currents, it is therefore desirable that
Only image stabilization process is just being carried out when user just shoots digital photograph.At that time, in initial step 1000, using primary module
900 used as I2C bus masters, OIS data flows start.At that time, as shown in step 1005, gyroscope 710 can start control
The motion of camera carries out inertia measurement, and OIS drivers 835 can order MEMS actuator 815 be transformed into from dead states
Active state.In step 1010, primary module 900 subsequently reads the gyro data of 6 bytes, so that can be in step 1015
Write data into driver IC.In step 1020, OIS algoritic modules 805 can be it is later determined that the actuating of suitable size be solving
The certainly problem of camera-shake.If user as determined by step 1025 has been completed shooting digital photos,
Step 1030 terminates the flow process.Otherwise, repeat step 1010 to 1025.The call duration time of one circulation (step 1010 to 1020)
Depending on bus clock cycle and data width.If bus 845 can accommodate 3 bytes in the clock cycle of each 10 μ s,
Then algorithm operation time of the circulation time for needed for 10 μ s*2*6*8+ steps 1020, when it is equivalent to 0.96ms+ algorithm computings
Between.
Figure 11 shows optional control structure, wherein, OIS algoritic modules 805 are located in ISP 850.It is similar with Fig. 9,
The AF drivers 830 in the control driver IC 810 of automatic focus module 940 in ISP 850.Driver IC 810, gyroscope
710th, imager 720, ISP 850 and MCU 855 use I2C buses 845 are communicated.Figure 12 shows the control ring of generation
Road.OIS algoritic modules 805 are also simplified version, this is because having omited tracking filter, high pass filter 910 is by top
The pitching of the output of spiral shell instrument 710 and yaw rate are filtered to estimate the intended motion of photographing unit.ISP 850 controls gyroscope 710
With driver IC 810.For the sake of clarity, illustrate only the passage of the single merging of OIS algoritic modules 805.
Figure 13 shows the data flow produced in bus 845 according to the embodiment of Figure 11 and 12.In response to live image
Screening-mode is called, in initial step 1300, by the use of ISP850 as I2C bus masters, OIS data flows start.It is optional
Ground, MCU 855 can be used as main equipment.As shown in 1305 the step of carrying out or subsequently carrying out simultaneously with step 1300, top
Spiral shell instrument 710 can start the motion to photographing unit carries out inertia measurement, and OIS drivers 835 can order MEMS actuator
815 are transformed into active state from dead states.In step 1310, primary module 900 subsequently reads the gyro data of 6 bytes.
In addition, in step 1315, ISP 855 reads the current lens position of 6 bytes from transducer 920.In step 1320, OIS
Algoritic module 805 can be it is later determined that the actuating of suitable size be solving the problems, such as camera-shake.Then, in step 1325,
The drive command of 6 bytes can be written to corresponding driver IC by ISP 855.If as determined by step 1330
User has been completed shooting digital photos, then terminate the flow process in step 1335.Otherwise, repeat step 1310 to 1325.One
The call duration time of individual circulation (step 1310 to 1325) depends on bus clock cycle and data width.If bus 845 can
3 bytes, then algorithm computing of the circulation time for needed for 10 μ s*3*6*8+ steps 1320 are accommodated in the clock cycle of each 10 μ s
Time, it is equivalent to 1.44ms+ algorithm operation times.Therefore, in principal and subordinate's bus protocol system, as previously described calculate OIS
Method module 805 is located in IC drivers 810 faster.Conversely, OIS algoritic modules 805 are placed in ISP 850 then need it is extra
Data moving step.
As would be appreciated by the skilled artisan and according to application-specific, in the spirit without departing substantially from the disclosure and
In the case of scope, can make numerous modifications, replace with the using method of actuator devices of this disclosure, material, equipment, configuration
Change and change, based on this, the scope of the present disclosure should not be limited by specific embodiments described and illustrated herein, and this is
Because they are only some examples enumerated, the scope of the present invention should be with claims included below and its functional equivalent
Body is completely the same.
Claims (28)
1. a kind of camera, including：
At least one optical element；
Multiple electrostatic actuators, are configured to move the optical element to carry out image stabilization；And
Framework, the framework supports the optical element and the plurality of electrostatic actuator；And wherein
Each electrostatic actuator in the electrostatic actuator includes standing part and moveable part, the moveable part quilt
It is configured to move to expanded position, locks and from the expanded position with relative to the fixation in the expanded position
Part is substantially coplanar, linear motion mode is moved so that tangential force is applied on the optical element described to cause
Optical element is moved.
2. camera according to claim 1, further includes：
At least one motion sensor, is configured to detect the motion of the camera；And wherein
The plurality of electrostatic actuator is configured to the motion of the camera for being at least partially based on detected and movement is described
Optical element.
3. camera according to claim 2, wherein：
At least one motion sensor includes gyroscope, and the gyroscope is configured to measure the pitching of the camera and partially
Boat；And wherein
The plurality of electrostatic actuator is configured to be at least partially based on the pitching of the camera and driftage and movement is described
Optical element.
4. camera according to claim 2, further includes：
Camera image processor, is configured to analyze camera image and generate estimation based on the camera image；And
And
The plurality of electrostatic actuator is configured to be at least partially based on the estimation and the mobile optical element.
5. camera according to claim 2, further includes to be passed corresponding to multiple positions of the plurality of electrostatic actuator
Sensor, each position sensor in the position sensor is configured to measure the tangential displacement of corresponding electrostatic actuator.
6. camera according to claim 2, further includes optical image stabilization (OIS) circuit, and it is configured to respond to
The plurality of electrostatic actuator is optionally activated in the motion of the detected camera.
7. camera according to claim 1, further includes breech lock, and it is configured to be maintained at the moveable part
In the expanded position.
8. camera according to claim 7, wherein the moveable part is configured to respond to acceleration pulse being answered
Use the moveable part and engage the breech lock.
9. camera according to claim 1, wherein the plurality of electrostatic actuator is configured to move institute in phase
State the moveable part of each electrostatic actuator in multiple electrostatic actuators optionally to rotate the optical element.
10. camera according to claim 1, wherein：
Each electrostatic actuator in the electrostatic actuator includes electrostatic comb actuator, and the electrostatic comb actuator has
Multiple comb support parts with cross one another finger piece, some comb support parts in the comb support part are arranged on
On the standing part, and other comb support parts are arranged on the moveable part；
The comb support part on the moveable part is configured to relative to the comb on the standing part
Shape support member is moved；And
When the moveable part is in expanded position described in 1, the cross one another finger piece has medium mutual friendship
It is wrong.
11. cameras according to claim 1, further include：
Platform, is configured to receive the optical element；
At least three electrostatic actuators in the electrostatic actuator are uniformly spaced apart around described.
12. cameras according to claim 1, further include：
Bool, by each electrostatic actuator in the electrostatic actuator optical element is coupled to；And
The bool is relative to the optical element in radial directions than in the linear direction tangent with the optical element
On it is more flexible.
13. cameras according to claim 12, wherein the bool be centered around it is tangent with the optical element described in
The longitudinal axis alignd on linear direction are folded.
14. cameras according to claim 1, wherein the camera is integrated in cell phone.
A kind of 15. actuator systems, including：
Multiple electrostatic actuators, are configured to mobile at least one optical element to carry out image stabilization, the electrostatic actuator
In each electrostatic actuator be configured to respond to the motion of the electrostatic actuator and tangentially activate described at least one
Optical element；And
Framework, the framework supports the plurality of electrostatic actuator around the installation site of the optical element；And wherein
Each electrostatic actuator in the electrostatic actuator includes standing part and moveable part, the moveable part quilt
It is configured to move to expanded position, stops and from the expanded position with relative to the fixation in the expanded position
Part is substantially coplanar, linear motion mode is moved, to cause at least one optical element to move.
16. actuators according to claim 15, further include breech lock, and it is configured to lock the moveable part
In being scheduled on the expanded position.
17. actuators according to claim 16, further include：
Coplanar deployment rod, is configured around the fulcrum in the movable part office and pivots；And wherein
When the moveable part moves to the expanded position, the coplanar deployment rod pivots to engage the breech lock.
18. actuators according to claim 17, wherein the coplanar deployment rod includes cam face, it is configured as
The breech lock is engaged when the moveable part is in the expanded position.
19. actuators according to claim 17, wherein the breech lock includes coplanar and off-centered breech lock, it is matched somebody with somebody
It is set to the cam face for receiving the coplanar deployment rod.
20. actuators according to claim 19, wherein described coplanar and off-centered breech lock includes breech lock bool,
It is configured to described coplanar and off-centered towards the latched position biasing being locked in the coplanar deployment rod in position
Breech lock.
21. actuators according to claim 15, wherein each electrostatic actuator in the electrostatic actuator is operable
To cause the optical element to move based on the motion of the electronic equipment including the actuator system for detecting.
22. actuators according to claim 15, further include the multiple positions corresponding to the plurality of electrostatic actuator
Sensor is put, each position sensor in the position sensor is configured to measure the tangential position of corresponding electrostatic actuator
Move.
23. actuators according to claim 22, wherein：
Each electrostatic actuator in the electrostatic actuator includes multiple comb support parts, and the plurality of comb support part has
It is configured to optionally to be moved to together and separate cross one another finger piece；And
Each position sensor in the position sensor is configured to the electrostatic associated in the electrostatic actuator
At least one comb support part of actuator and measure electric capacity.
A kind of 24. systems, including：
Optical element；
Platform, described keeps the optical element in the space of bending；And
At least three tangential actuators, are symmetrically arranged in outside framework around described, and each tangential actuator is operable
It is in platform described in the direction top offset with the contact of a curve limited by the hole of the bending；And wherein
Each tangential actuator includes moveable part, and the moveable part is configured to relative to the outside framework from stop
Position moves to expanded position, is maintained at the expanded position and selectively moved from the expanded position so that tangential
Power is applied on the platform, and tangential actuator is inoperable described in the stop position.
25. systems according to claim 24, further include breech lock, and it is configured to lock the moveable part
In the expanded position.
26. systems according to claim 24, further include each tangential actuator in the tangential actuator
It is coupled at least one bool of described.
27. systems according to claim 26, wherein each bool be V-arrangement and with the contact of a curve
Direction on align longitudinal axis.
28. systems according to claim 24, further include：
At least one motion sensor, is configured to detect the motion of the system；And wherein
Each tangential actuator in the tangential actuator is operable to the detected motion of the system and moves
It is dynamic described.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/247,895 | 2011-09-28 | ||
| US13/247,906 US8855476B2 (en) | 2011-09-28 | 2011-09-28 | MEMS-based optical image stabilization |
| US13/247,906 | 2011-09-28 | ||
| US13/247,895 US9019390B2 (en) | 2011-09-28 | 2011-09-28 | Optical image stabilization using tangentially actuated MEMS devices |
| CN201280047680.1A CN103842875B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
| PCT/US2012/058082 WO2013049688A2 (en) | 2011-09-28 | 2012-09-28 | Mems-based optical image stabilization |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280047680.1A Division CN103842875B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106569310A true CN106569310A (en) | 2017-04-19 |
| CN106569310B CN106569310B (en) | 2019-11-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280047680.1A Active CN103842875B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
| CN201610905935.3A Active CN106569310B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280047680.1A Active CN103842875B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
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| Country | Link |
|---|---|
| CN (2) | CN103842875B (en) |
| TW (1) | TWI584001B (en) |
| WO (1) | WO2013049688A2 (en) |
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| WO2022141485A1 (en) * | 2020-12-31 | 2022-07-07 | 欧菲光集团股份有限公司 | Optical anti-shake driver, camera module, and electronic device |
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Also Published As
| Publication number | Publication date |
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| CN106569310B (en) | 2019-11-22 |
| WO2013049688A2 (en) | 2013-04-04 |
| CN103842875A (en) | 2014-06-04 |
| WO2013049688A3 (en) | 2013-06-27 |
| TW201319628A (en) | 2013-05-16 |
| TWI584001B (en) | 2017-05-21 |
| CN103842875B (en) | 2016-11-09 |
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