CN106568579B - A kind of X-ray grazing incidence mirror effective area scaling method - Google Patents

A kind of X-ray grazing incidence mirror effective area scaling method Download PDF

Info

Publication number
CN106568579B
CN106568579B CN201610974648.8A CN201610974648A CN106568579B CN 106568579 B CN106568579 B CN 106568579B CN 201610974648 A CN201610974648 A CN 201610974648A CN 106568579 B CN106568579 B CN 106568579B
Authority
CN
China
Prior art keywords
ray
grazing incidence
incidence mirror
effective area
arrow
Prior art date
Application number
CN201610974648.8A
Other languages
Chinese (zh)
Other versions
CN106568579A (en
Inventor
石永强
左富昌
邓楼楼
吕政欣
Original Assignee
北京控制工程研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京控制工程研究所 filed Critical 北京控制工程研究所
Priority to CN201610974648.8A priority Critical patent/CN106568579B/en
Publication of CN106568579A publication Critical patent/CN106568579A/en
Application granted granted Critical
Publication of CN106568579B publication Critical patent/CN106568579B/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties

Abstract

The invention discloses a kind of X-ray grazing incidence mirror effective area scaling method, includes the following steps: to adjust the aperture of the diaphragm and its at a distance from X-ray tube, open arrow beam of light x-ray source;Measure X-ray arrow beam of light intensity;It is directed at X-ray grazing incidence mirror and arrow beam of light x-ray source;X-ray grazing incidence mirror is scanned with two-dimension translational platform;Measure the photon numbers C of reflector focal point;Calculate effective area on the axis of X-ray grazing incidence mirror;X-ray grazing incidence mirror is rotated, the 4th step to the 6th step is repeated, the outer effective area of the axis of you can get it X-ray grazing incidence mirror;The present invention limits the diameter of X-ray beam by adjustable aperture diaphragm, realizes high collimating X-ray calibration light beam, solves the problems, such as that traditional high collimating X-ray calibration light beam is difficult to obtain;By the way that two-dimension translational platform is arranged, the technical effect of arrow beam of light scanning calibration grazing incidence mirror effective area is reached, has compensated for the not high defect of conventional method stated accuracy.

Description

A kind of X-ray grazing incidence mirror effective area scaling method
Technical field
The present invention relates to a kind of X-ray grazing incidence mirror effective area scaling methods, belong to X-ray optical technology neck Domain.
Background technique
X-ray grazing incidence mirror is the core of space-based astronomical observation, Space environment monitor, deep space exploration and navigation task The heart has the function of that increasing x-ray photon collects area, improves system signal noise ratio.X-ray grazing incidence mirror effective area is System geometric optics collects the product of area and lens reflecting rate, reflects grazing incidence mirror to the collection energy of x-ray photon Power.Therefore, the calibration of X-ray grazing incidence mirror effective area is test verifying X-ray grazing incidence mirror performance indicator Key link.
The calibration of X-ray grazing incidence mirror effective area, it may be verified that the optical focus performance of grazing incidence mirror, in turn The detectivity for assessing grazing incidence mirror, is the basis of grazing incidence mirror development and verifying.Grazing incidence mirror significant surface After product calibration, compared with its geometric area, the reflectivity of grazing incidence mirror can get, and then obtain grazing incidence mirror piece and add The roughness of work realizes the detection to grazing incidence mirror piece processing roughness.
Traditional X-ray grazing incidence mirror effective area scaling method is normally applied the thick light beam of parallel X-ray and directly surveys Examination obtains.Ground installation needed for this method is huge, and environmental condition requires high;But the depth of parallelism of X-ray beam is poor, and stated accuracy is not It is high.
Summary of the invention
Technical problem solved by the present invention is overcome the deficiencies in the prior art, the present invention provides a kind of X-ray glancing incidences Reflecting mirror effective area scaling method is limited the diameter of X-ray beam by adjustable aperture diaphragm, realizes high collimating X-ray mark Determine light beam, solves the problems, such as that traditional high collimating X-ray calibration light beam is difficult to obtain;By the way that two-dimension translational platform is arranged, reach The technical effect of arrow beam of light scanning calibration grazing incidence mirror effective area, compensates for that conventional method stated accuracy is not high to be lacked It falls into;By the way that 2-d rotating platform is arranged, the calibration of the outer effective area of grazing incidence mirror axis is realized, traditional scaling method is overcome The problem of depth of parallelism difference.
The technical solution of the invention is as follows:
A kind of X-ray grazing incidence mirror effective area scaling method, includes the following steps:
Step 1: opening arrow beam of light x-ray source, X-ray arrow beam of light is obtained, the diameter of X-ray arrow beam of light is set as H;
Step 2: utilizing calibration light beam detector measurement X-ray arrow beam of light intensity;
Step 3: adjustment X-ray grazing incidence mirror is aligned with arrow beam of light x-ray source;
Step 4: being scanned using arrow beam of light x-ray source and two-dimension translational platform to X-ray grazing incidence mirror, scan Speed is set as V;
Step 5: using in scanning process described in reflector focal point detector measurement, X-ray grazing incidence mirror focal point Photon numbers C;
Step 6: calculating effective area on the axis of X-ray grazing incidence mirror;
Step 7: rotating X-ray grazing incidence mirror using 2-d rotating platform, the 4th step to the 6th step is repeated, can be obtained The outer effective area of the axis of the X-ray grazing incidence mirror of required angle out.
In the first step, the range of H is 3~5mm.
In 4th step, the range of V is 3~5mm/s.
In 6th step, calculation method isWherein: I indicates X-ray arrow beam of light intensity.
The arrow beam of light x-ray source includes X-ray tube and adjustable aperture diaphragm;Adjustable aperture diaphragm is mounted on X-ray tube On primary optical axis, the spacing range of adjustable aperture diaphragm and X-ray tube is 3~5m.
The photon energy range of the X-ray tube is 0.5~10keV, and beam divergence angle is set as 20 °.
The pore diameter range of the adjustable aperture diaphragm is 1~10mm.
The pitching range of deflection of the 2-d rotating platform is -5 °~5 °, and the angle precision of 2-d rotating platform is higher than 30 °.
The elevating translational range of the two-dimension translational platform is -200~200mm, and the translation precision of two-dimension translational platform is higher than 10um。
The calibration beam monitor and reflector focal point detector are all made of silicon drift SDD detector.
Compared with the prior art, the invention has the advantages that:
1, the present invention limits X-ray beam diameter using aperture diaphragm, obtains high collimating X-ray calibration arrow beam of light, realizes that X is penetrated The calibration of line grazing incidence mirror effective area solves the problems, such as that conventional method broad x-ray calibration light beam is difficult to obtain.
2, the present invention using two-dimension translational stage translation X-ray demarcate arrow beam of light, realize X-ray arrow beam of light scanning calibration plunder into Penetrate reflecting mirror.Compared to conventional method, the collimation that the present invention demarcates light beam is more preferable, and stated accuracy is higher.
3, the present invention is practical, and being realized simultaneously using 2-d rotating platform is had on X-ray grazing incidence mirror axis and outside axis Imitate the calibration of area, scaling method efficiently and accurately.
4, step of the present invention is simplified, mode is various, easy to implement, is not related to the complex technologies such as image procossing, is had wide Wealthy application prospect.
5, rationally, those skilled in the art's step according to the invention carries out for logic smoothness of the present invention, clear thinking, design Experiment, can Fast Calibration go out the effective area of X-ray grazing incidence mirror.
6, test process of the invention is safe and reliable, and the scope of application is wider, alleviates the operating burden of staff.
Detailed description of the invention
Fig. 1 is flow chart of the invention
Fig. 2 is schematic diagram of the present invention
Wherein: 1X ray grazing incidence mirror;2 arrow beam of light x-ray sources;3 2-d rotating platforms;4 two-dimension translational platforms;5 calibration Beam monitor;6 reflector focal point detectors;7X ray tube;8 adjustable aperture diaphragms;
Specific embodiment
The invention will be further described with specific embodiment for explanation with reference to the accompanying drawing:
As shown in Fig. 1~2, a kind of X-ray grazing incidence mirror effective area scaling method, including X-ray glancing incidence are anti- Penetrate mirror 1, arrow beam of light x-ray source 2,2-d rotating platform 3, two-dimension translational platform 4, calibration beam monitor 5 and reflector focal point detection Device 6;X-ray grazing incidence mirror 1 is mounted on 2-d rotating platform 3, for adjust X-ray grazing incidence mirror 1 pitching and Twin shaft posture is deflected, arrow beam of light x-ray source 2 is mounted on two-dimension translational platform 4, flat for realizing the lifting of arrow beam of light x-ray source 2 Twin shaft movement is moved, and then completes the scanning to grazing incidence mirror 1, calibration beam monitor 5 is mounted on arrow beam of light x-ray source 2 Between X-ray grazing incidence mirror 1, for measuring X-ray arrow beam of light intensity, reflector focal point detector 6 is mounted on X-ray The focal point of grazing incidence mirror 1, for measuring the photon numbers C of 1 focal point of X-ray grazing incidence mirror.
X-ray grazing incidence mirror effective area scaling method includes the following steps:
Step 1: the aperture of adjustment adjustable aperture diaphragm 8 and the relative distance of adjustable aperture diaphragm 8 and X-ray tube 7, Arrow beam of light x-ray source 2 is opened, X-ray arrow beam of light is obtained, the diameter of X-ray arrow beam of light is set as H;
Step 2: measuring X-ray arrow beam of light intensity using calibration beam monitor 5;
Step 3: adjustment X-ray grazing incidence mirror 1 is aligned with arrow beam of light x-ray source 2;
Step 4: being scanned using arrow beam of light x-ray source 2 and two-dimension translational platform 4 to X-ray grazing incidence mirror 1, sweep It retouches speed and is set as V;
Step 5: being measured in the scanning process using reflector focal point detector 6, the photon numbers at reflector focal point C;
Step 6: calculating effective area on the axis of X-ray grazing incidence mirror 1;
Step 7: rotating X-ray grazing incidence mirror 1 using 2-d rotating platform 3, the 4th step to the 6th step is repeated Obtain the outer effective area of the axis of the X-ray grazing incidence mirror 1 of required angle.
Preferably, 1 diameter of X-ray grazing incidence mirror to be calibrated is 100mm, and visual field is ± 15 '.
X-ray tube 7 emit photon energy 0.5-10keV, 20 ° of beam divergence angle.
The aperture of adjustable aperture diaphragm 8 is set as 3 × 3mm.Adjustable aperture diaphragm 8 and 7 spacing of X-ray tube are 3m.
It demarcates beam monitor 5 and reflector focal point detector 6 is silicon drift SDD detector, energy response range 0.5- 10keV, maximum count rate 106ph/s。
It is 100ph/s that calibration beam monitor 5, which measures obtained X-ray arrow beam of light intensity,.
4 elevating translational range ± 200mm of two-dimension translational platform, translation precision are better than 10um.Scanning speed is set as 3mm/s, Progressively scan grazing incidence mirror.
It is 10000ph that reflector focal point detector 6, which measures the photon numbers C at reflector focal point,.
According to effective area calculation formula, grazing incidence mirror effective area is
3 pitching of 2-d rotating platform deflects adjusting range ± 5 °, and angle precision is better than 30 ".
The content being not described in detail in description of the invention is known to the skilled person technology.

Claims (9)

1. a kind of X-ray grazing incidence mirror effective area scaling method, characterized by the following steps:
Step 1: opening arrow beam of light x-ray source (2), X-ray arrow beam of light is obtained, the diameter of X-ray arrow beam of light is set as H;
Step 2: measuring X-ray arrow beam of light intensity using calibration beam monitor (5);
Step 3: adjustment X-ray grazing incidence mirror (1) is aligned with arrow beam of light x-ray source (2);
Step 4: X-ray grazing incidence mirror (1) is scanned using arrow beam of light x-ray source (2) and two-dimension translational platform (4), Scanning speed is set as V;
Step 5: being measured in the scanning process using reflector focal point detector (6), X-ray grazing incidence mirror (1) focus The photon numbers C at place;
Step 6: calculating effective area on the axis of X-ray grazing incidence mirror (1);
Step 7: rotating X-ray grazing incidence mirror (1) using 2-d rotating platform (3), the 4th step to the 6th step is repeated Obtain the outer effective area of the axis of the X-ray grazing incidence mirror (1) of required angle;
In 6th step, calculation method isWherein: I indicates X-ray arrow beam of light intensity.
2. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute It states in the first step, the range of H is 3~5mm.
3. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute It states in the 4th step, the range of V is 3~5mm/s.
4. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute Stating arrow beam of light x-ray source (2) includes X-ray tube (7) and adjustable aperture diaphragm (8);Adjustable aperture diaphragm (8) is mounted on X-ray It manages on (7) primary optical axis, the spacing range of adjustable aperture diaphragm (8) and X-ray tube (7) is 3~5m.
5. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 4, it is characterised in that: institute The photon energy range for stating X-ray tube (7) is 0.5~10keV, and beam divergence angle is set as 20 °.
6. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 4, it is characterised in that: institute The pore diameter range for stating adjustable aperture diaphragm (8) is 1~10mm.
7. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute The pitching range of deflection for stating 2-d rotating platform (3) is -5 °~5 °, and the angle precision of 2-d rotating platform (3) is higher than 30 °.
8. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute The elevating translational range for stating two-dimension translational platform (4) is -200~200mm, and the translation precision of two-dimension translational platform (4) is higher than 10um.
9. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute It states calibration beam monitor (5) and reflector focal point detector (6) is all made of silicon drift SDD detector.
CN201610974648.8A 2016-11-04 2016-11-04 A kind of X-ray grazing incidence mirror effective area scaling method CN106568579B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610974648.8A CN106568579B (en) 2016-11-04 2016-11-04 A kind of X-ray grazing incidence mirror effective area scaling method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610974648.8A CN106568579B (en) 2016-11-04 2016-11-04 A kind of X-ray grazing incidence mirror effective area scaling method

Publications (2)

Publication Number Publication Date
CN106568579A CN106568579A (en) 2017-04-19
CN106568579B true CN106568579B (en) 2019-06-18

Family

ID=58541541

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610974648.8A CN106568579B (en) 2016-11-04 2016-11-04 A kind of X-ray grazing incidence mirror effective area scaling method

Country Status (1)

Country Link
CN (1) CN106568579B (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10320165A1 (en) * 2003-05-05 2004-12-02 Vision & Control Gmbh Device for inspecting components, in particular boreholes
JP4366254B2 (en) * 2004-06-24 2009-11-18 株式会社リコー Scanning optical system inspection apparatus and method
CN102636508A (en) * 2012-03-20 2012-08-15 中国科学院上海应用物理研究所 Sample platform used for grazing incidence XAFS method
CN103175857B (en) * 2013-03-14 2015-06-03 中国科学院高能物理研究所 Device specially used for grazing incidence XAFS (X-ray Absorption Fine Structure) experiment and regulating method of device
CN104865050B (en) * 2015-05-13 2017-05-31 北京控制工程研究所 Grazing incidence optics system focusing performance analysis method based on X-ray optical simulation

Also Published As

Publication number Publication date
CN106568579A (en) 2017-04-19

Similar Documents

Publication Publication Date Title
CN105675903B (en) A kind of rotary body angular velocity measurement system based on vortex beams
US6542242B1 (en) Mapping air contaminants using path-integrated optical remote sensing with a non-overlapping variable path length beam geometry
CN101907773B (en) High-collimation solar simulator optical system with auto-collimation aiming system
RU2639585C2 (en) Improved method of control with ultrasound
CN101718534B (en) Parallelism detector for optical axis of multi-optical system
CN105424322B (en) Self calibration plain shaft parallelism detector and detection method
CN103358018B (en) Laser beam axis calibration steps and the laser processing device that utilizes the method
CN1226590C (en) Apparatus for measuring film thickness formed on object, apparatus and method for measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object
CN103926197A (en) High spatial resolution biaxial differential confocal spectrum microscopic imaging method and apparatus
CN1304879C (en) Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method
JP2010519541A (en) Equipment for measuring defects in sheet glass
Farré et al. Optimized back-focal-plane interferometry directly measures forces of optically trapped particles
US7813470B2 (en) Three-dimensional contents determination method using transmitted x-ray
CN103278106B (en) A kind of high accuracy high-space resolution long-range profile detection system
CN101699222A (en) Star sensor calibrator and method for calibrating high-precision star sensor
CN102590150A (en) Indoor hyperspectral bidirectional reflectance distribution function (BRDF) determining system
CN100451540C (en) Device for detecting three-axle parallel of large photoelectric monitoring equipment using thermal target technology
US10054821B2 (en) Rubbing mura detection device
CN104567690B (en) A kind of laser beam field calibration method and device
CN107121095B (en) A kind of method and device of precise measurement super-large curvature radius
CN103175857B (en) Device specially used for grazing incidence XAFS (X-ray Absorption Fine Structure) experiment and regulating method of device
CN102589852B (en) Autocollimating type confocal method for measuring focal length of lens
CN106500965B (en) Lobster eye x-ray imaging optical element focusing performance test device and method based on ccd detector
CN106403843A (en) Contour scanning measurement device and method for large-aperture high-curvature optical element based on confocal microscopy
CN102566048A (en) Astigmatism-based sample axial drift compensating method and device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant