CN106568579B - A kind of X-ray grazing incidence mirror effective area scaling method - Google Patents
A kind of X-ray grazing incidence mirror effective area scaling method Download PDFInfo
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- CN106568579B CN106568579B CN201610974648.8A CN201610974648A CN106568579B CN 106568579 B CN106568579 B CN 106568579B CN 201610974648 A CN201610974648 A CN 201610974648A CN 106568579 B CN106568579 B CN 106568579B
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- ray
- grazing incidence
- incidence mirror
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- 238000009304 pastoral farming Methods 0.000 title claims abstract description 68
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 [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 2
- 238000007796 conventional method Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
Abstract
The invention discloses a kind of X-ray grazing incidence mirror effective area scaling method, includes the following steps: to adjust the aperture of the diaphragm and its at a distance from X-ray tube, open arrow beam of light x-ray source；Measure X-ray arrow beam of light intensity；It is directed at X-ray grazing incidence mirror and arrow beam of light x-ray source；X-ray grazing incidence mirror is scanned with two-dimension translational platform；Measure the photon numbers C of reflector focal point；Calculate effective area on the axis of X-ray grazing incidence mirror；X-ray grazing incidence mirror is rotated, the 4th step to the 6th step is repeated, the outer effective area of the axis of you can get it X-ray grazing incidence mirror；The present invention limits the diameter of X-ray beam by adjustable aperture diaphragm, realizes high collimating X-ray calibration light beam, solves the problems, such as that traditional high collimating X-ray calibration light beam is difficult to obtain；By the way that two-dimension translational platform is arranged, the technical effect of arrow beam of light scanning calibration grazing incidence mirror effective area is reached, has compensated for the not high defect of conventional method stated accuracy.
Description
Technical field
The present invention relates to a kind of X-ray grazing incidence mirror effective area scaling methods, belong to X-ray optical technology neck
Domain.
Background technique
X-ray grazing incidence mirror is the core of space-based astronomical observation, Space environment monitor, deep space exploration and navigation task
The heart has the function of that increasing x-ray photon collects area, improves system signal noise ratio.X-ray grazing incidence mirror effective area is
System geometric optics collects the product of area and lens reflecting rate, reflects grazing incidence mirror to the collection energy of x-ray photon
Power.Therefore, the calibration of X-ray grazing incidence mirror effective area is test verifying X-ray grazing incidence mirror performance indicator
Key link.
The calibration of X-ray grazing incidence mirror effective area, it may be verified that the optical focus performance of grazing incidence mirror, in turn
The detectivity for assessing grazing incidence mirror, is the basis of grazing incidence mirror development and verifying.Grazing incidence mirror significant surface
After product calibration, compared with its geometric area, the reflectivity of grazing incidence mirror can get, and then obtain grazing incidence mirror piece and add
The roughness of work realizes the detection to grazing incidence mirror piece processing roughness.
Traditional X-ray grazing incidence mirror effective area scaling method is normally applied the thick light beam of parallel X-ray and directly surveys
Examination obtains.Ground installation needed for this method is huge, and environmental condition requires high；But the depth of parallelism of X-ray beam is poor, and stated accuracy is not
It is high.
Summary of the invention
Technical problem solved by the present invention is overcome the deficiencies in the prior art, the present invention provides a kind of X-ray glancing incidences
Reflecting mirror effective area scaling method is limited the diameter of X-ray beam by adjustable aperture diaphragm, realizes high collimating X-ray mark
Determine light beam, solves the problems, such as that traditional high collimating X-ray calibration light beam is difficult to obtain；By the way that two-dimension translational platform is arranged, reach
The technical effect of arrow beam of light scanning calibration grazing incidence mirror effective area, compensates for that conventional method stated accuracy is not high to be lacked
It falls into；By the way that 2-d rotating platform is arranged, the calibration of the outer effective area of grazing incidence mirror axis is realized, traditional scaling method is overcome
The problem of depth of parallelism difference.
The technical solution of the invention is as follows:
A kind of X-ray grazing incidence mirror effective area scaling method, includes the following steps:
Step 1: opening arrow beam of light x-ray source, X-ray arrow beam of light is obtained, the diameter of X-ray arrow beam of light is set as H；
Step 2: utilizing calibration light beam detector measurement X-ray arrow beam of light intensity；
Step 3: adjustment X-ray grazing incidence mirror is aligned with arrow beam of light x-ray source；
Step 4: being scanned using arrow beam of light x-ray source and two-dimension translational platform to X-ray grazing incidence mirror, scan
Speed is set as V；
Step 5: using in scanning process described in reflector focal point detector measurement, X-ray grazing incidence mirror focal point
Photon numbers C；
Step 6: calculating effective area on the axis of X-ray grazing incidence mirror；
Step 7: rotating X-ray grazing incidence mirror using 2-d rotating platform, the 4th step to the 6th step is repeated, can be obtained
The outer effective area of the axis of the X-ray grazing incidence mirror of required angle out.
In the first step, the range of H is 3~5mm.
In 4th step, the range of V is 3~5mm/s.
In 6th step, calculation method isWherein: I indicates X-ray arrow beam of light intensity.
The arrow beam of light x-ray source includes X-ray tube and adjustable aperture diaphragm；Adjustable aperture diaphragm is mounted on X-ray tube
On primary optical axis, the spacing range of adjustable aperture diaphragm and X-ray tube is 3~5m.
The photon energy range of the X-ray tube is 0.5~10keV, and beam divergence angle is set as 20 °.
The pore diameter range of the adjustable aperture diaphragm is 1~10mm.
The pitching range of deflection of the 2-d rotating platform is -5 °~5 °, and the angle precision of 2-d rotating platform is higher than 30 °.
The elevating translational range of the two-dimension translational platform is -200~200mm, and the translation precision of two-dimension translational platform is higher than
10um。
The calibration beam monitor and reflector focal point detector are all made of silicon drift SDD detector.
Compared with the prior art, the invention has the advantages that:
1, the present invention limits X-ray beam diameter using aperture diaphragm, obtains high collimating X-ray calibration arrow beam of light, realizes that X is penetrated
The calibration of line grazing incidence mirror effective area solves the problems, such as that conventional method broad x-ray calibration light beam is difficult to obtain.
2, the present invention using two-dimension translational stage translation X-ray demarcate arrow beam of light, realize X-ray arrow beam of light scanning calibration plunder into
Penetrate reflecting mirror.Compared to conventional method, the collimation that the present invention demarcates light beam is more preferable, and stated accuracy is higher.
3, the present invention is practical, and being realized simultaneously using 2-d rotating platform is had on X-ray grazing incidence mirror axis and outside axis
Imitate the calibration of area, scaling method efficiently and accurately.
4, step of the present invention is simplified, mode is various, easy to implement, is not related to the complex technologies such as image procossing, is had wide
Wealthy application prospect.
5, rationally, those skilled in the art's step according to the invention carries out for logic smoothness of the present invention, clear thinking, design
Experiment, can Fast Calibration go out the effective area of X-ray grazing incidence mirror.
6, test process of the invention is safe and reliable, and the scope of application is wider, alleviates the operating burden of staff.
Detailed description of the invention
Fig. 1 is flow chart of the invention
Fig. 2 is schematic diagram of the present invention
Wherein: 1X ray grazing incidence mirror；2 arrow beam of light x-ray sources；3 2-d rotating platforms；4 two-dimension translational platforms；5 calibration
Beam monitor；6 reflector focal point detectors；7X ray tube；8 adjustable aperture diaphragms；
Specific embodiment
The invention will be further described with specific embodiment for explanation with reference to the accompanying drawing:
As shown in Fig. 1~2, a kind of X-ray grazing incidence mirror effective area scaling method, including X-ray glancing incidence are anti-
Penetrate mirror 1, arrow beam of light x-ray source 2,2-d rotating platform 3, two-dimension translational platform 4, calibration beam monitor 5 and reflector focal point detection
Device 6；X-ray grazing incidence mirror 1 is mounted on 2-d rotating platform 3, for adjust X-ray grazing incidence mirror 1 pitching and
Twin shaft posture is deflected, arrow beam of light x-ray source 2 is mounted on two-dimension translational platform 4, flat for realizing the lifting of arrow beam of light x-ray source 2
Twin shaft movement is moved, and then completes the scanning to grazing incidence mirror 1, calibration beam monitor 5 is mounted on arrow beam of light x-ray source 2
Between X-ray grazing incidence mirror 1, for measuring X-ray arrow beam of light intensity, reflector focal point detector 6 is mounted on X-ray
The focal point of grazing incidence mirror 1, for measuring the photon numbers C of 1 focal point of X-ray grazing incidence mirror.
X-ray grazing incidence mirror effective area scaling method includes the following steps:
Step 1: the aperture of adjustment adjustable aperture diaphragm 8 and the relative distance of adjustable aperture diaphragm 8 and X-ray tube 7,
Arrow beam of light x-ray source 2 is opened, X-ray arrow beam of light is obtained, the diameter of X-ray arrow beam of light is set as H；
Step 2: measuring X-ray arrow beam of light intensity using calibration beam monitor 5；
Step 3: adjustment X-ray grazing incidence mirror 1 is aligned with arrow beam of light x-ray source 2；
Step 4: being scanned using arrow beam of light x-ray source 2 and two-dimension translational platform 4 to X-ray grazing incidence mirror 1, sweep
It retouches speed and is set as V；
Step 5: being measured in the scanning process using reflector focal point detector 6, the photon numbers at reflector focal point
C；
Step 6: calculating effective area on the axis of X-ray grazing incidence mirror 1；
Step 7: rotating X-ray grazing incidence mirror 1 using 2-d rotating platform 3, the 4th step to the 6th step is repeated
Obtain the outer effective area of the axis of the X-ray grazing incidence mirror 1 of required angle.
Preferably, 1 diameter of X-ray grazing incidence mirror to be calibrated is 100mm, and visual field is ± 15 '.
X-ray tube 7 emit photon energy 0.5-10keV, 20 ° of beam divergence angle.
The aperture of adjustable aperture diaphragm 8 is set as 3 × 3mm.Adjustable aperture diaphragm 8 and 7 spacing of X-ray tube are 3m.
It demarcates beam monitor 5 and reflector focal point detector 6 is silicon drift SDD detector, energy response range 0.5-
10keV, maximum count rate 106ph/s。
It is 100ph/s that calibration beam monitor 5, which measures obtained X-ray arrow beam of light intensity,.
4 elevating translational range ± 200mm of two-dimension translational platform, translation precision are better than 10um.Scanning speed is set as 3mm/s,
Progressively scan grazing incidence mirror.
It is 10000ph that reflector focal point detector 6, which measures the photon numbers C at reflector focal point,.
According to effective area calculation formula, grazing incidence mirror effective area is
3 pitching of 2-d rotating platform deflects adjusting range ± 5 °, and angle precision is better than 30 ".
The content being not described in detail in description of the invention is known to the skilled person technology.
Claims (9)
1. a kind of X-ray grazing incidence mirror effective area scaling method, characterized by the following steps:
Step 1: opening arrow beam of light x-ray source (2), X-ray arrow beam of light is obtained, the diameter of X-ray arrow beam of light is set as H；
Step 2: measuring X-ray arrow beam of light intensity using calibration beam monitor (5)；
Step 3: adjustment X-ray grazing incidence mirror (1) is aligned with arrow beam of light x-ray source (2)；
Step 4: X-ray grazing incidence mirror (1) is scanned using arrow beam of light x-ray source (2) and two-dimension translational platform (4),
Scanning speed is set as V；
Step 5: being measured in the scanning process using reflector focal point detector (6), X-ray grazing incidence mirror (1) focus
The photon numbers C at place；
Step 6: calculating effective area on the axis of X-ray grazing incidence mirror (1)；
Step 7: rotating X-ray grazing incidence mirror (1) using 2-d rotating platform (3), the 4th step to the 6th step is repeated
Obtain the outer effective area of the axis of the X-ray grazing incidence mirror (1) of required angle；
In 6th step, calculation method isWherein: I indicates X-ray arrow beam of light intensity.
2. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute
It states in the first step, the range of H is 3~5mm.
3. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute
It states in the 4th step, the range of V is 3~5mm/s.
4. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute
Stating arrow beam of light x-ray source (2) includes X-ray tube (7) and adjustable aperture diaphragm (8)；Adjustable aperture diaphragm (8) is mounted on X-ray
It manages on (7) primary optical axis, the spacing range of adjustable aperture diaphragm (8) and X-ray tube (7) is 3~5m.
5. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 4, it is characterised in that: institute
The photon energy range for stating X-ray tube (7) is 0.5~10keV, and beam divergence angle is set as 20 °.
6. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 4, it is characterised in that: institute
The pore diameter range for stating adjustable aperture diaphragm (8) is 1~10mm.
7. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute
The pitching range of deflection for stating 2-d rotating platform (3) is -5 °~5 °, and the angle precision of 2-d rotating platform (3) is higher than 30 °.
8. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute
The elevating translational range for stating two-dimension translational platform (4) is -200~200mm, and the translation precision of two-dimension translational platform (4) is higher than 10um.
9. a kind of X-ray grazing incidence mirror effective area scaling method according to claim 1, it is characterised in that: institute
It states calibration beam monitor (5) and reflector focal point detector (6) is all made of silicon drift SDD detector.
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| DE10320165A1 (en) * | 2003-05-05 | 2004-12-02 | Vision & Control Gmbh | Device for inspecting components, in particular boreholes |
| JP4366254B2 (en) * | 2004-06-24 | 2009-11-18 | 株式会社リコー | Scanning optical system inspection apparatus and method |
| CN102636508A (en) * | 2012-03-20 | 2012-08-15 | 中国科学院上海应用物理研究所 | Sample platform used for grazing incidence XAFS method |
| CN103175857B (en) * | 2013-03-14 | 2015-06-03 | 中国科学院高能物理研究所 | Device specially used for grazing incidence XAFS (X-ray Absorption Fine Structure) experiment and regulating method of device |
| CN104865050B (en) * | 2015-05-13 | 2017-05-31 | 北京控制工程研究所 | Grazing incidence optics system focusing performance analysis method based on X-ray optical simulation |
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