CN106517609A - Production device for ultrapure water - Google Patents

Production device for ultrapure water Download PDF

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Publication number
CN106517609A
CN106517609A CN201611197497.6A CN201611197497A CN106517609A CN 106517609 A CN106517609 A CN 106517609A CN 201611197497 A CN201611197497 A CN 201611197497A CN 106517609 A CN106517609 A CN 106517609A
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CN
China
Prior art keywords
filter
reverse osmosis
water
filter mechanism
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201611197497.6A
Other languages
Chinese (zh)
Inventor
郭春江
伍欣
沈勇
胡明
张海涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHENGDU GANWEI TECHNOLOGY Co Ltd
Original Assignee
CHENGDU GANWEI TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHENGDU GANWEI TECHNOLOGY Co Ltd filed Critical CHENGDU GANWEI TECHNOLOGY Co Ltd
Priority to CN201611197497.6A priority Critical patent/CN106517609A/en
Publication of CN106517609A publication Critical patent/CN106517609A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00Multistage treatment of water, waste water or sewage
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/001Processes for the treatment of water whereby the filtration technique is of importance
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/28Treatment of water, waste water, or sewage by sorption
    • C02F1/283Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/441Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/46Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/469Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
    • C02F1/4693Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis
    • C02F1/4695Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis electrodeionisation
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2301/00General aspects of water treatment
    • C02F2301/08Multistage treatments, e.g. repetition of the same process step under different conditions

Abstract

The primary improvement of the invention is a production device for ultrapure water. The production device comprises a mechanism body, a security filter, a reverse osmosis device, an electric de-ionizing module and a resistivity detection device, wherein the security filter is located in the mechanism body; a preprocessing module is connected with a water inlet of the security filter; the reverse osmosis device comprises one or more reverse osmosis membrane components; water filtered by the security filter enters into the reverse osmosis device through a high pressure pump; the water inlet of the electric de-ionizing module is connected with a water outlet of the reverse osmosis device; the resistivity detection device is connected with the water outlet of the electric de-ionizing module. The production device for ultrapure water provided by the invention utilizes the preprocessing module to preprocess raw water, and then water enters into the security filter. The production device for ultrapure water provided by the invention has the advantages of few detection times, miniaturization and standard water quality.

Description

A kind of ultra-pure water process units
Technical field
The present invention relates to a kind of field of water treatment equipment, and in particular to a kind of ultra-pure water process units.
Background technology
Ultra-pure water, is water that resistivity reaches 18M Ω * cm (25 DEG C).It is used for semiconductor in being usually used in integrated circuit industry Steam in the cleaning of raw material and vessel used, the preparation of lay photoetching mask plate and silicon chip or some chemical industry preparation process Source etc..
Urea for vehicle is a requisite reagent in diesel vehicle tail gas processor, in the mixture and system of urea for vehicle During standby, it is necessary to use ultra-pure water, because containing substantial amounts of metal ion and chloride in general water, can affect at tail gas The sensitivity of the inductor probe of reason device even results in the damage of equipment.
Ultra-pure water is prepared in prior art generally all can carry out Multi-channel filtering by raw water, and in detecting the water after per pass filtration The parameters such as ion concentration, resistivity, electrical conductivity, cause that parts that device includes and mechanism are excessive, and volume is excessively huge, unfavorable In the miniaturization of product.
The content of the invention
In view of this, a kind of detection project of present invention offer is few, the ultra-pure water process units of miniaturization and water quality reaching standard.
To solve above technical problem, the technical scheme is that using a kind of ultra-pure water process units, including mechanism Body, also includes the cartridge filter inside the mechanism body, the water inlet connection pretreatment of the cartridge filter Module,
The reverse osmosis unit, including one or more reverse osmosis membrane assemblies;The water filtered from the cartridge filter The reverse osmosis unit is entered by high-pressure pump;
Electrodeionization module, water inlet connect the delivery port of the reverse osmosis unit;
Resistivity detecting device, connects the delivery port of the electrodeionization module.
Preferably, also including conductivity detector, for detecting the reverse osmosis unit delivery port electrical conductivity of water.
Preferably, the pretreatment module includes the first filter mechanism, the second filter mechanism being sequentially connected by pipeline With the 3rd filter mechanism;
The top of one or more filter mechanisms in first filter mechanism, the second filter mechanism and the 3rd filter mechanism It is provided with back purge system.
Preferably, also including raw water pump, the delivery port of the raw water pump is connected with the water inlet of first filter mechanism; It is also connected with the back purge system simultaneously.
Preferably, also including discharge of wastewater pipeline, one end and first filter mechanism, the second filter mechanism, the 3rd mistake The top connection of one or more filter mechanisms in filter structure, the other end are connected with wastewater collection tapping equipment.
Preferably, first filter mechanism is quartz filter;Second filter mechanism is active carbon filter; 3rd filter mechanism is demineralizer.
Preferably, also including salt box, connect the 3rd filter mechanism.
Preferably, the reverse osmosis unit includes the reverse osmosis membrane assembly of multiple parallel connections;The water that Jing cartridge filters are filtered Many high-pressure pumps of Jing enter the plurality of reverse osmosis membrane assembly in parallel.
Preferably, also including the first return line, described first return line one end connects the reverse osmosis unit, another The end connection pretreatment module.
Preferably, also including the second return line, described second return line one end connects the electrodeionization module, separately One end connects the pretreatment module.
The primary improvements of the present invention are a kind of ultra-pure water process units, including mechanism body is also included positioned at described Cartridge filter inside mechanism body, the water inlet connection pretreatment module of the cartridge filter, the reverse osmosis unit, Including one or more reverse osmosis membrane assemblies;The water filtered from the cartridge filter enters the counter-infiltration by high-pressure pump Device;Electrodeionization module, water inlet connect the delivery port of the reverse osmosis unit;Resistivity detecting device, connects the electricity The delivery port of deionization module.The ultrapure water production device that the present invention is provided is pre-processed to raw water using pretreatment module Afterwards, water enters cartridge filter, removes the fine particles that wherein turbidity is more than 1 degree by cartridge filter.Simultaneously using many Individual counter-infiltration and electrodeionization module (EDI) are shared, and can be removed most of organic matter and the inorganic matter in water, be enabled water to reach To ultrapure water quality standard.And as the ultra-pure water process units that the present invention is provided is preferred for the urea production equipment for minimizing In, need the equipment of more compact and small body type.So needing detection and controlling alleviation to lack as far as possible, ensured public security due to above-mentioned Filter, reverse osmosis unit, EDI modules and pretreatment module are processed to raw water according to processing sequence, can reach ultra-pure water Standard, Resistivity testing is set in ultra-pure water exit only and can just meet the detection of ultra-pure water, save cost.
Description of the drawings
The front view schematic diagram of the ultra-pure water process units that Fig. 1 one embodiment of the invention is provided;
The side view schematic diagram of the ultra-pure water process units that Fig. 2 one embodiment of the invention is provided;
The structural representation of the ultrapure water pretreatment module shown in Fig. 3 one embodiment of the invention;
Fig. 4 is the ultra-pure water process units and pretreatment module connection diagram shown in one embodiment of the invention.
Specific embodiment
In order that those skilled in the art more fully understands technical scheme, with reference to specific embodiment The present invention is described in further detail.
The invention provides a kind of ultra-pure water process units, including mechanism body, also include in the mechanism body The cartridge filter in portion, the cartridge filter water inlet connection pretreatment module, the reverse osmosis unit, including one or Multiple reverse osmosis membrane assemblies;The water filtered from the cartridge filter enters the reverse osmosis unit by high-pressure pump;Electricity goes Ion module, water inlet connect the delivery port of the reverse osmosis unit;Resistivity detecting device, connects the electrodeionization module Delivery port.
As shown in figure 1, the ultra-pure water process units includes in specific one embodiment wherein:Cartridge filter A1, high-pressure pump A2, reverse osmosis unit A3, cartridge filter water inlet A5, instrument box A6, EDI modules A 7, ultrapure water out A8, It is preferred that being provided with resistivity detecting device on the ultrapure water out.And invention preferably uses resistivity sensor as ultrapure Resistivity data is transferred to the processing unit in instrument box for the detection means of water resistance rate, the resistivity sensor, and is shown Show on the display floater of instrument box resistance instrument.
According to the present invention, in order to control state and the working time of EDI work, present invention additionally comprises electrical conductivity detection Device, for detecting the reverse osmosis unit delivery port electrical conductivity of water.Detection electrical conductivity is displayed in the conductance of the instrument box On the display floater of instrument.As shown in Fig. 2 the instrument box preferably includes conductivity gauge A61, resistance instrument A62, pressure gauge A63 and stream Gauge A64.The conventional detecting instrument being more than in ultrapure water production device.According to the present invention, the course of work of EDI, it is The ion exchange resin being filled in membrane stack can answer be divided into two parts, a part is referred to as work and reports, and its regeneration level is relatively low, Act primarily as the effect for passing to ion, another part is referred to as polishing and reports, not only play a part of to pass to ion, but also play from The effect that son is exchanged, the another boundary for planting resin is work forward position.Work report carry removing sodium ion, chlorion, calcium ion, The task of the major part ion such as magnesium ion sulfate radical, and polish resin and then carry the weak electrolytes such as removal carbonic acid, ammoniacal liquor, silicic acid Task.On the positive and negative electrode at two ends, the electrode reaction product such as chlorine, oxygen and hydrogen can be produced, these products must be by Pole water takes EDI out of.So the palingenesis of the fast transferring and resin in order to give full play to ion, EDI is low more suitable for processing Salt content who, and directly produce pure water and high purity water.
For the process standard further up to ultra-pure water, preferably pretreatment module is added in ultra-pure water production process, The pretreatment module that one embodiment of the invention is provided is as shown in figure 3, the pretreatment module includes being sequentially connected by pipeline The first filter mechanism B1, the second filter mechanism B2 and the 3rd filter mechanism B3;First filter mechanism, the second filter mechanism Back purge system B5 is provided with one or more filter mechanisms in the 3rd filter mechanism.Also include raw water pump B4, the original The delivery port of water pump is connected with the water inlet of the first filter mechanism B1;It is also connected with the back purge system simultaneously.Also include One in discharge of wastewater pipeline, one end and the first filter mechanism B1, the second filter mechanism B2, the 3rd filter mechanism B3 or The top connection of multiple filter mechanisms, the other end are connected with wastewater collection tapping equipment B7.First filter mechanism is quartz Sand filter;Second filter mechanism is active carbon filter;3rd filter mechanism is demineralizer.Also include salt box B6, connects the 3rd filter mechanism B3.As B3 is demineralizer, so in order that the demineralizer can regenerate, needing logical Cross the salt solution extracted in salt box and carry out the metal ion adsorbed in finger ring demineralizer.
In another specific embodiment of the invention, ultrapure water treating device is mainly pre- including what is connected in front and back as described in Figure 4 Processing module and ultra-pure water process units, are schematic diagram in figure, and the part ratio in figure does not have not strict restriction.Wherein Pretreatment module includes raw water pump 2, is sequentially connected in series the more medium filter 3, charcoal filter and softening filter of connection 5, cartridge filter 7 that ultrapure water treating module includes being sequentially communicated, the first high-pressure pump 9, first order reverse osmosis unit 10, second High-pressure pump 11, second level reverse osmosis unit 12, water pump 13 and EDI (continuous electric desalination) module.Described more medium filter 3, Active carbon filter 4 and softening filter 5 are using automatically controlling 18 control, described to automatically control 18 to adopt on the market Purchase, the more medium filter 3 and charcoal filter of the present invention is using the new full-automatic F71F67 type strainer valves of profit, softening filter 5 using the new full-automatic F65 type time flow softener valves of profit.More medium filter 3 and active carbon filter 4 are respectively equipped with flush pipe Road (not shown) automatically controls 18 and connects with described, under the control for automatically controlling 18 is capable of achieving coming for both forward and reverse directions Backwash and wash.The softening filter 5 is connected with salt box 6, under the control for automatically controlling 18 makes softening from 6 suction salt solution of salt box Filter 5 is regenerated.
According to embodiment, the first order reverse osmosis unit 10 of the ultrapure water treating module is two reverse osmosis membranes in parallel Component, the water into first order reverse osmosis unit 10 are divided into two while entering two reverse osmosis membrane assemblies again while anti-from two Flow out to merge in permeable membrane element and flow into second level reverse osmosis unit 12.Second level reverse osmosis unit 12 is a reverse osmosis membrane group Part.The first high-pressure pump 9, the reverse osmosis unit 12 in the second level are provided with before first order reverse osmosis membrane assembly after cartridge filter 7 Before be provided with the second high-pressure pump 11, first high-pressure pump 9 is that first order reverse osmosis unit 10 provides work necessary hydraulic pressure, described Second high-pressure pump 11 is that second level reverse osmosis unit 12 provides work necessary hydraulic pressure.Connect after the second level reverse osmosis unit 12 EDI modules 14 are connect, water pump 13 is provided with before EDI modules 14.The ultrapure water tank of current direction 15 after Jing EDI process stores standby.
According to the present embodiment, before described pretreatment module, be connected with raw water pump 2, for have running water area, running water Pretreatment module is entered by raw water pump 2 directly, for the not enough area of condition, raw water box 1 can be added before raw water pump 2 and is stored up Water.The water that Jing raw water pumps 2 are extracted out enters more medium filter 3, and flow direction is for from top to bottom, red more medium filter 3 is filtered Water stay in 3 bottom of more medium filter, then be extracted at the top of active carbon filter 4 and filtered by active carbon filter 4, after filtration again Filter through softening filter 5 in the cartridge filter 7 for flowing into ultrapure water treating module.The more medium filter 3 is used as this One embodiment of invention can adopt quartz sand and/or manganese husky, and preferred top adopts quartz sand, and bottom is husky using manganese, is used for Except the big impurity of degranulation and iron.The active carbon filter 4 be used for it is deodorant, the softening filter 5 be used for except calcium ion and Silicon ion, to reduce the destruction to reverse osmosis membrane.Water after pretreatment enters cartridge filter 7, and Jing cartridge filters 7 are filtered Water afterwards enters the first high-pressure pump 9, on sampling line 8 is sequentially provided with pressure difference switch and hand control valve towards sample tap direction, For sampling to determine the time for cleaning the pretreatment module.The first high-pressure pumps of water Jing 9 are pressed into first order counter-infiltration Device 10, is provided with pressure gauge and pressure difference switch between the first high-pressure pump 9 and first order reverse osmosis unit 10.Jing first order reverse osmosis Water after device 10 is filtered thoroughly enters the second high-pressure pump 11, along water between first order reverse osmosis unit 10 and the second high-pressure pump 11 Stream direction is sequentially provided with flowmeter, conductivity gauge, pressure gauge and pressure difference switch.It is anti-that the water that second high-pressure pump 11 is extruded enters the second level Permeability apparatus 12, is provided with flowmeter, conductivity gauge and pressure difference switch after second level reverse osmosis unit 12.Jing second level counter-infiltration dress After putting 12 process, remaining the first return lines of water Jing 16 flow back into water tank, it is also possible to any bit flowing back in pretreatment module Put.Current excess of imports pure water tank 15 Jing after the process of EDI modules 14, is provided with flow on the pipeline between EDI and ultrapure water tank 15 Meter and conductivity gauge, Jing after EDI process, remaining the second return lines of water Jing 17 flow back into raw water box 1, it is also possible to flow back into pre- place Any position in reason module.
Why first order reverse osmosis unit 10 adopts two reverse osmosis membrane assemblies in parallel, is because such as reverse osmosis above Permeable membrane because the reason such as pressure instability, breakage, blocking or fouling is destroyed, will soon cause reverse osmosis membrane below with EDI modules 14 are destroyed.Two reverse osmosis membrane assemblies in parallel are adopted in first order reverse osmosis unit 10, one is acted primarily as and is delayed Punching is acted on.If on the one hand a reverse osmosis membrane assembly is broken, the electrical conductivity below of first order reverse osmosis unit 10 can be caused to occur Change, Jing conductivity gauges are detected, it is possible thereby to rapidly fix a breakdown;If on the other hand a reverse osmosis membrane assembly is broken, also There is an energy normal work, very big impact will not be caused to rear production.It should be noted that the present invention adopts two, this area Technical staff can be extended as needed, using the reverse osmosis that two or more is in parallel such as in first order reverse osmosis membrane apparatus Permeable membrane component.
The present invention is at the system failure by the first order reverse osmosis unit 10 of two counter-infiltration membrane module compositions in parallel Reason provides a buffer time, and in handling failure, system can also be run, and thereby ensure that the stability of system.By many Increase on medium filter 3, active carbon filter 4 and softening filter 5 and automatically control 18 and realize itself clean, extend The service life of pretreatment system.By the first return line 16 is set after the second reverse osmosis unit, is set after EDI modules 14 Two return lines 17, remaining water backflow after the second reverse osmosis unit and EDI modules 14 are processed improve water utilization rate.
In one embodiment of the invention, the production procedure of the ultra-pure water process units is specially:Raw water is by original Water pump continuously enters the first filter mechanism, the second filter mechanism and the 3rd filter after milipore filter carries out first time filtration Structure, first filter mechanism, the second filter mechanism and the 3rd filter mechanism are controlled by Full-automatic flushing valve, Neng Goushi Now backwash, the purpose of backwash is, in order to wash away the filter residue remained in filter mechanism, to make filter medium in filter mechanism again It is raw.There is the salting liquid containing potassium, sodium ion in salt box in addition, for living again to the medium of the 3rd filter mechanism.Pass through Pretreated raw water enters cartridge filter, Jing after cartridge filter removing turbidity is more than 1 particle, is entered by high-pressure pump Entering reverse osmosis unit carries out osmosis filtration, and less than after preset value, water is separated detection electrical conductivity into EDI modules, Pole water, concentrated water and fresh water separate, and pole water and concentrated water enter wastewater treatment equipment by the second return line, and fresh water passes through resistivity It is up to standard after detection, obtain ultra-pure water.
The above is only the preferred embodiment of the present invention, it is noted that it is right that above-mentioned preferred embodiment is not construed as The restriction of the present invention, protection scope of the present invention should be defined by claim limited range.For the art For those of ordinary skill, without departing from the spirit and scope of the present invention, some improvements and modifications can also be made, these change Enter and retouch also to should be regarded as protection scope of the present invention.

Claims (10)

1. a kind of ultra-pure water process units, including mechanism body, it is characterised in that also include inside the mechanism body Cartridge filter, the water inlet connection pretreatment module of the cartridge filter,
Reverse osmosis unit, including one or more reverse osmosis membrane assemblies;The water filtered from the cartridge filter passes through high pressure Pump enters the reverse osmosis unit;
Electrodeionization module, water inlet connect the delivery port of the reverse osmosis unit;
Resistivity detecting device, connects the delivery port of the electrodeionization module.
2. ultra-pure water process units according to claim 1, it is characterised in that also including conductivity detector, be used for Detect the reverse osmosis unit delivery port electrical conductivity of water.
3. ultra-pure water process units according to claim 1, it is characterised in that the pretreatment module is included by pipeline The first filter mechanism, the second filter mechanism and the 3rd filter mechanism being sequentially connected;
In first filter mechanism, the second filter mechanism and the 3rd filter mechanism, the top of one or more filter mechanisms is all provided with It is equipped with back purge system.
4. ultra-pure water process units according to claim 3, it is characterised in that also including raw water pump, the raw water pump Delivery port is connected with the water inlet of first filter mechanism;It is also connected with the back purge system simultaneously.
5. ultra-pure water process units according to claim 3, it is characterised in that also including discharge of wastewater pipeline, one end with The top connection of one or more filter mechanisms in first filter mechanism, the second filter mechanism, the 3rd filter mechanism, separately One end is connected with wastewater collection tapping equipment.
6. the ultrapure water treating device according to any one in claim 3~5, it is characterised in that described first filters Mechanism is quartz filter;Second filter mechanism is active carbon filter;3rd filter mechanism is demineralizer.
7. according to claim 6 revive Sohu ultrapure water treating device, it is characterised in that also including salt box, connection the described 3rd Filter mechanism.
8. ultra-pure water process units according to claim 1, it is characterised in that the reverse osmosis unit includes multiple parallel connections Reverse osmosis membrane assembly;Many high-pressure pumps of water Jing that Jing cartridge filters are filtered enter the plurality of reverse osmosis membrane group in parallel Part.
9. ultra-pure water process units according to claim 1, it is characterised in that also including the first return line, described One return line one end connects the reverse osmosis unit, and the other end connects the pretreatment module.
10. ultrapure water treating device according to claim 1, it is characterised in that also including the second return line, described Two return line one end connect the electrodeionization module, and the other end connects the pretreatment module.
CN201611197497.6A 2016-12-21 2016-12-21 Production device for ultrapure water Pending CN106517609A (en)

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