CN106486598A - Flexible display panel, flexible display device and preparation method thereof - Google Patents
Flexible display panel, flexible display device and preparation method thereof Download PDFInfo
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- CN106486598A CN106486598A CN201611250212.0A CN201611250212A CN106486598A CN 106486598 A CN106486598 A CN 106486598A CN 201611250212 A CN201611250212 A CN 201611250212A CN 106486598 A CN106486598 A CN 106486598A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 221
- 238000012545 processing Methods 0.000 claims description 22
- 238000005520 cutting process Methods 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 28
- 239000012535 impurity Substances 0.000 abstract description 8
- 238000006748 scratching Methods 0.000 abstract description 2
- 230000002393 scratching effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 26
- 239000010410 layer Substances 0.000 description 21
- 239000010408 film Substances 0.000 description 13
- 230000001771 impaired effect Effects 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The application discloses flexible display device, flexible display panel and preparation method thereof, wherein, flexible display panel includes: the flexible substrate is provided with at least one sacrificial notch positioned on the edge, the sacrificial notch is a notch formed after the sacrificial area is cut, and the sacrificial area is used for providing a clamping part in the preparation process of the flexible display panel; a display device located on the surface of the flexible substrate except for the sacrificial gap. The flexible display device avoids the situation that due to scratching or impurity attachment to the sacrificial region or the carrier substrate in the clamping process, viscosity still exists between the flexible substrate and the carrier substrate of the sacrificial region when the flexible substrate is separated from the carrier substrate, and therefore the display device of the sacrificial region is torn by the flexible substrate of the sacrificial region and damaged, the purpose of reducing the probability that the display device of the flexible display panel is damaged in the peeling process of the flexible substrate and the carrier substrate is achieved, and the preparation yield of the flexible display panel is improved.
Description
Technical field
The application is related to display technology field, more particularly, it relates to a kind of flexible substrate, display device, Flexible Displays
Panel and preparation method thereof.
Background technology
With the continuous development of Display Technique, the application of display floater is more and more extensive, and user is for the work(of display floater
Can be also more and more diversified with the requirement of outward appearance.In order to meet this demand of user, the flexible display panels of deformable bending
Arise at the historic moment.
In the preparation process of flexible display panels, it usually needs flexible substrate is attached on carrier substrate, with to soft
Property display floater the preparation of display device provide and smoothly prepare platform, that improves described display device prepares yield, simultaneously
Reduce the preparation difficulty of described display device.Described display device preparation after the completion of, need by described flexible substrate with described
Carrier substrate carries out strip operation, is generally made described in prior art using laser lift-off (Laser Lift Off, LLO)
Flexible substrate is separated with described carrier substrate, and idiographic flow includes：Pass through described carrier substrate using laser or ultraviolet
Irradiate the attachment position of flexible substrate and described carrier substrate, make between described carrier substrate and described flexible substrate tack relatively
The low and stripping that is convenient for described carrier substrate and described flexible substrate.
But due to inevitably needing contact carrier substrate in the preparation process of described display device, make contact site
Divide and be possible to attachment impurity occurs or situation about scratching occur although meeting is to described carrier before carrying out laser lift-off
Substrate be carried out process, but cleaning process cannot remove scuffing and the clamping process after cleaning treatment in still have attached
The possibility of impurity, the region that these scratched or adhered to impurity can reduce the transmission energy of laser or ultraviolet, so that this
The exposure energy that the corresponding described flexible substrate in region receives a bit is less than threshold limit value, in turn results in when described carrier substrate and institute
State flexible substrate carry out separate when described flexible substrate is caused to tear and make described flexible display panels display device impaired
Problem.
Content of the invention
For solving above-mentioned technical problem, the invention provides a kind of flexible display apparatus, flexible display panels and its preparation
Method, to realize reducing due to carrying out in stripping process, flexible substrate being caused to tear in carrier substrate and described flexible substrate
Make the impaired probability of the display device of described flexible display panels, thus lifting the mesh of the production yield of described flexible display panels
's.
For realizing above-mentioned technical purpose, embodiments provide following technical scheme：
A kind of flexible display panels, including：
Flexible substrate, described flexible substrate has the sacrifice breach that at least one is located at edge；Positioned at described flexible substrate
Described sacrifice breach is removed with the display device of exterior domain in surface.
Optionally, described sacrifice breach is polygon or circle.
Optionally, the described quantity sacrificing breach is more than or equal to 3.
Optionally, the described quantity sacrificing breach is 3, sacrifices breach and be located at described flexible substrate bottom described in two of which
2 corner regions on side, another described sacrifice breach is located at the top margin middle section of described flexible substrate.
Optionally, the described quantity sacrificing breach is 4, and 4 described breach of sacrificing are located at described flexible substrate respectively
4 corner regions.
Optionally, each described area sacrificing breach is more than or equal to 0.5mm2.
A kind of flexible display apparatus, including at least one flexible display panels as described in any of the above-described.
A kind of preparation method of flexible display panels, including：There is provided carrier substrate, described carrier substrate surface is attached with soft
Property substrate, described flexible substrate deviates from described carrier substrate side and has multiple sacrifice region；Described carrier substrate deviates from described
Flexible substrate one side surface has the multiple and described flexible substrate one-to-one clamping zone of multiple sacrifice region, each described
Clamping zone is relative with corresponding described sacrifice region, and described clamping zone and described sacrifice region are used for providing and can clamp
Position；Form at least one display device in region in addition to described sacrifice region for the described flexible substrate surface；To described soft
Property substrate is cut and lift-off processing, obtains at least one described flexible display panels；Described described flexible substrate is carried out
Cutting and lift-off processing include：Cutting process is carried out to described flexible substrate, obtains at least one unstripped flexible display panels,
Each described unstripped flexible display panels include multiple described sacrifice region, and respectively to described unstripped flexible display panels
Flexible substrate carries out strip operation, so that the flexible substrate of described unstripped flexible display panels is separated with described carrier substrate；
Or, lift-off processing is carried out to described flexible substrate, so that the flexible substrate of at least one flexible display panels described and described load
Structure base board separates, and carries out cutting process to the flexible substrate after lift-off processing, obtains at least one described flexible display panels.
Optionally, described described flexible substrate is cut and lift-off processing, obtain at least one flexible display panels
Also include before：Described sacrifice region is cut, makes to be formed at the sacrifice region of described flexible substrate and sacrifice breach.
Optionally, described described sacrifice region is carried out cutting include：The sacrifice region of described flexible substrate is cut
Cut；Or, the sacrifice region to described flexible substrate and described carrier substrate are cut with the correspondence position of described sacrifice region.
Optionally, described described flexible substrate is cut and lift-off processing before also include：In described sacrifice region
Deviate from described carrier substrate one side surface and form anti-skidding film layer.
Optionally, described anti-skidding film layer has silicon dioxide layer or silicon nitride layer or the light-sensitive material of texture structure for surface
Layer.
From technique scheme as can be seen that embodiments providing a kind of flexible display apparatus, Flexible Displays face
Plate and preparation method thereof, wherein, the flexible substrate of described flexible display panels has at least one sacrifice breach positioned at edge,
Described breach of sacrificing is to the breach being formed after sacrifice region cutting, and described sacrifice region is used in described flexible display panels
In preparation process provide can retaining part, and due to described display device be distributed in described flexible substrate surface remove described sacrifice
Region beyond breach, it is to avoid due to relative to described sacrifice region or described sacrifice region carrier base in clamping process
Plate causes to scratch or adheres to impurity, and the described sacrifice region when separating with described carrier substrate to described flexible substrate leading to
Still suffer from viscosity and described carrier substrate between, and the display device of described sacrifice region is gone out by the situation torn and damage
Existing, it is achieved thereby that the display device reducing described flexible display panels was peeled off in described flexible substrate and described carrier substrate
The purpose of impaired probability in journey, improve described flexible display panels prepares yield.
Brief description
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
Have technology description in required use accompanying drawing be briefly described it should be apparent that, drawings in the following description be only this
Inventive embodiment, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
The accompanying drawing providing obtains other accompanying drawings.
A kind of overlooking the structure diagram of flexible display panels for an embodiment offer of the application for the Fig. 1；
Fig. 2 is the cross section structure schematic diagram carrying out section along flexible display panels shown in Fig. 1 along AA ' line；
A kind of overlooking the structure diagram of flexible substrate for an embodiment offer of the application for the Fig. 3；
A kind of overlooking the structure diagram of flexible substrate for another embodiment offer of the application for the Fig. 4；
A kind of overlooking the structure diagram of flexible substrate for another embodiment offer of the application for the Fig. 5；
A kind of overlooking the structure diagram of flexible substrate for the further embodiment offer of the application for the Fig. 6；
A kind of overlooking the structure diagram of flexible substrate for a preferred embodiment offer of the application for the Fig. 7；
A kind of overlooking the structure diagram of flexible substrate for another preferred embodiment offer of the application for the Fig. 8；
A kind of cross section structure schematic diagram of flexible display panels for another embodiment offer of the application for the Fig. 9；
Figure 10 is embodiment a kind of pixel driver film layer, display function layer and the peripheral driver electricity that provide of the application
The overlooking the structure diagram on road；
A kind of schematic flow sheet of the preparation method of flexible display panels for an embodiment offer of the application for the Figure 11；
A kind of flow process of the preparation method of flexible display panels for another embodiment offer of the application for the Figure 12 is illustrated
Figure；
Figure 13-Figure 22 is a kind of carrier substrate preparation flow schematic diagram of an embodiment offer of the application；
A kind of flow process of the preparation method of flexible display panels for another embodiment offer of the application for the Figure 23 is illustrated
Figure；
A kind of overlooking the structure diagram of flexible display panels for another embodiment offer of the application for the Figure 24；
A kind of overlooking the structure diagram of flexible display panels for another embodiment offer of the application for the Figure 25；
A kind of overlooking the structure diagram of flexible display panels for the further embodiment offer of the application for the Figure 26；
A kind of flow process of the preparation method of flexible display panels for the further embodiment offer of the application for the Figure 27 is illustrated
Figure；
A kind of flow process of the preparation method of flexible display panels for a preferred embodiment offer of the application for the Figure 28 is shown
It is intended to.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation description is it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work
Embodiment, broadly falls into the scope of protection of the invention.
The embodiment of the present application provides a kind of flexible display panels, and with reference to Fig. 1 and Fig. 2, Fig. 1 is described flexible display panels
Overlooking the structure diagram, Fig. 2 is that shown in Fig. 1, flexible display panels carry out the cross section structure schematic diagram of section, institute along AA ' line
State flexible display panels to include：
Flexible substrate 100, described flexible substrate 100 has the sacrifice breach 101 that at least one is located at edge, described sacrifice
Breach 101 is to the breach being formed after sacrifice region cutting, and described sacrifice region is used for the preparation in described flexible display panels
During provide can retaining part；
Remove described sacrifice breach 101 positioned at described flexible substrate 100 surface with the display device 200 of exterior domain.
It should be noted that described display device 200 refers to the display work(in order to realize described flexible display panels
Can and arrange device architecture, including but not limited to multiple thin film transistor (TFT)s, cabling, anode, display function material and negative electrode.
Described flexible substrate 100 is preferably polyimides.But the application is to the concrete material of described flexible substrate 100 not
Limit, specifically depending on practical situation.
Also, it should be noted in the preparation process of described flexible display panels, normally, described flexible substrate 100
Need by being coated on carrier substrate surface, provide a stable platform with the preparation to described display device 200, lift institute
State the yield of preparing of display device 200, reduce the preparation difficulty of described display device 200；Preparation in described display device 200
During, described sacrifice region and carrier substrate deviate from described flexible substrate 100 side, and relative with described sacrifice region
Clamping zone be used for offer can retaining part, and remove because described display device 200 is distributed in described flexible substrate 100 surface
The described region sacrificed beyond breach 101, it is to avoid due in clamping process to described sacrifice region or described clamping zone
Cause to scratch or adhere to impurity, and the described sacrificial region when separating with described carrier substrate to described flexible substrate 100 leading to
Still suffer from viscosity between domain and described carrier substrate, and so that the display device 200 of described sacrifice region is torn and damage
Situation occurs, it is achieved thereby that reducing the display device 200 of described flexible display panels in described flexible substrate 100 and described load
Impaired probability in structure base board stripping process, improve described flexible display panels prepares yield.
With reference to Fig. 3 and Fig. 4, a kind of vertical view of flexible display panels for an embodiment offer of the application for Fig. 3 and Fig. 4
Structural representation, in figure 3, described flexible display panels only include one and are located at the described sacrificial of described flexible substrate frontside edge
Domestic animal breach 101, in the diagram, described flexible display panels include two described sacrifices being located at described flexible substrate frontside edge and lack
Mouth 101.The sacrifice quantity of breach 101 that the application has to the flexible substrate 100 of described flexible display panels and position are simultaneously
Do not limit, specifically depending on practical situation.
On the basis of above-described embodiment, in an embodiment of the application, with reference to Fig. 5 and Fig. 6, Fig. 5 and Fig. 6 is institute
State the overlooking the structure diagram of flexible substrate 100, described sacrifice breach 101 is polygon or circle.
Described breach 101 of sacrificing shown in Figure 5 is circular situation；Described sacrifice breach is shown in accompanying drawing 6
101 is polygonal situation, and in addition described polygon can be rectangle or regular pentagon or regular hexagon.The application other
In embodiment, described sacrifice breach 101 can also be oval.The application is to the described concrete setting shape sacrificing breach 101
Do not limit, specifically depending on practical situation.
On the basis of above-described embodiment, in another embodiment of the application, the quantity of described sacrifice breach 101 is big
In or be equal to 3.
It should be noted that because described sacrifice breach 101 is to be formed by after the cutting of described sacrifice region, therefore described
The quantity sacrificing breach 101 corresponds to the quantity of described sacrifice region.Generally, when can retaining part more than two
When, you can the described carrier substrate of relatively stable clamping carries out response operation.Therefore described sacrifice breach 101 quantity be more than or
Equal to 3, certainly, the quantity of described sacrifice breach 101 is more, provides in the preparation process of described display device 200
Can the selection of retaining part will be more.Specifically, in an embodiment of the application, the described number sacrificing breach 101
Measure as 3, then corresponding, described sacrifice region and just deviate from described flexible substrate 100 1 side surface in described carrier substrate
The relative clamping zone of this 3 described sacrifice region can be present in.In another embodiment of the application, described sacrifice region
Quantity can also be 45 or 6 or 10.The application does not limit to the described particular number sacrificing breach 101,
Specifically depending on practical situation.
On the basis of above-described embodiment, in a preferred embodiment of the application, with reference to Fig. 7, Fig. 7 is described flexibility
The overlooking the structure diagram of substrate 100, the quantity of described sacrifice breach 101 is 3, sacrifices breach 101 described in two of which
In 2 corner regions on described flexible substrate 100 base, another described breach 101 of sacrificing is located at described flexible substrate 100
Top margin middle section.
In the present embodiment, two described sacrifice breach 101 are arranged at 2 corners on described flexible substrate 100 base
The reason region is：Generally described flexible substrate 100 base near zone is the binding area of described flexible display panels
Domain, the cabling setting comparatively dense of its middle section, the middle section on base is difficult to find and is not provided with described display device 200
Region, but the setting of the cabling of two corner regions on described flexible substrate 100 base is relatively sparse, be easy to find be not provided with described
The region of display device 200 is in order to arrange described sacrifice breach 101 or described sacrifice region.
Also, it should be noted described corner regions refer to the base summit of described flexible substrate 100, and side
Boundary is located at the region near this summit, such as the label A10 region shown in Fig. 7, but described sacrifice breach 101 or described sacrifice
The setting in region can cover the summit of the described flexible substrate 100 that described corner regions include it is also possible to not cover described angle
The summit of the described flexible substrate 100 that domain includes of settling in an area.The application does not limit to this, specifically depending on practical situation.
On the basis of above-described embodiment, in another preferred embodiment of the application, with reference to Fig. 8, Fig. 8 is described soft
Property substrate 100 overlooking the structure diagram, the quantity of described sacrifice breach 101 is 4, and 4 described are sacrificed breach 101 respectively
4 corner regions positioned at described flexible substrate 100.
It should be noted that 4 described sacrifice breach 101 or described sacrifice region are arranged at described flexible substrate 100
4 corner regions set-up mode can provide in the preparation process of described flexible display panels be relatively easy to find can
Retaining part.
On the basis of above-described embodiment, in another embodiment of the application, the area of each described sacrifice breach is big
In or be equal to 0.5mm2.
It should be noted that the described area sacrificing breach corresponds to the area of described sacrifice region.
Inventor's research finds, when the area of described sacrifice region is more than or equal to 0.5mm2When, you can providing can be steady
Clamp hold can retaining part, but in order to as far as possible, away from described display device, the area of described sacrifice region cannot again simultaneously
Excessive, in a preferred embodiment of the application, the area of described sacrifice region is 1mm2, in the other embodiment of the application
In, the area of described sacrifice region can also be 0.5mm2Or 0.8mm2Or 1.2mm2, the area to described sacrifice region for the application
Concrete value do not limit, concrete depending on practical situation.
Also, it should be noted the area of each described sacrifice region can identical it is also possible to different.
Below the concrete structure of described display device is illustrated, with reference to Fig. 9, Fig. 9 is described flexible display panels edge
BB ' line carries out the cross section structure schematic diagram of section, and described flexible display panels include：
Pixel driver film layer 210 and peripheral drive circuit (not shown in Fig. 9) positioned at described flexible substrate 100 surface；
Deviate from the display function layer 220 of described flexible substrate one side surface positioned at described pixel driver film layer 210；
Positioned at described flexible substrate 100 surface, by described pixel driver film layer 210, peripheral drive circuit and described display
The encapsulating structure 230 that functional layer 220 is packaged together.
The sacrifice breach of described flexible substrate not shown in Fig. 9.
Specifically, with reference to Figure 10, Figure 10 is the structure of described pixel driver film layer, display function layer and peripheral drive circuit
Schematic diagram, including：
Image element circuit, data drive circuit 213 and first grid drive circuit 214 and second grid drive circuit 215,
Wherein, image element circuit passes through a plurality of data lines 211 from described data drive circuit 213 receiving data signal, and by a plurality of
Gate line 212 receives scanning signal from described first grid drive circuit 214 and second grid drive circuit 215.Described pixel
Circuit includes the organic light emissive pixels 216 of multiple intersections being placed in described data wire 211 and gate line 212, described organic
Light emitting pixel 216 lights according to described data signal and scanning signal.
Accordingly, the embodiment of the present application additionally provides a kind of flexible display apparatus, including at least one as any of the above-described reality
Apply the flexible display panels described in example.
Accordingly, the embodiment of the present application additionally provides a kind of preparation method of flexible display panels, with reference to Figure 11 and Figure 12,
Figure 11 and Figure 12 is the schematic flow sheet of the preparation method of flexible display panels, including：
S101：There is provided carrier substrate, described carrier substrate surface is attached with flexible substrate, described flexible substrate deviates from described
Carrier substrate side has multiple sacrifice region；Described carrier substrate deviates from described flexible substrate one side surface and has multiple and institute
State the one-to-one clamping zone of multiple sacrifice region of flexible substrate, each described clamping zone and corresponding described sacrifice
Relatively, described clamping zone and described sacrifice region can retaining parts for offer in region；With reference to Figure 13, Figure 14 and Figure 15, figure
13rd, Figure 14 and Figure 15 is the overlooking the structure diagram of described carrier substrate, and described carrier substrate 300 surface attachment has flexible substrate
100, described flexible substrate 100 has multiple sacrifice region 102, and described carrier substrate 300 can be glass substrate, can also be
Quartz base plate, the application does not limit to this, specifically depending on practical situation.Flexible substrate described in Figure 13,14 and 15
It is used for forming display device in the dotted line limit region on 100 surfaces, and cut along dotted line in subsequent technique, and to flexible liner
Bottom forms at least one described flexible display panels described with described carrier substrate after peeling off.Described display device refer to for
The device architecture realized the display function of described flexible display panels and arrange, including but not limited to multiple thin film transistor (TFT)s,
Cabling, pixel electrode, display function material and public electrode.
S102：Form at least one display device in region in addition to described sacrifice region for the described flexible substrate surface；
With reference to Figure 16, Figure 17 and Figure 18, Figure 16, Figure 17 and Figure 18 are carrier substrate after step S102 and the bowing of structure thereon
Depending on schematic diagram, described display device 200 is formed at region in addition to described sacrifice region 102 for the described flexible substrate 100.
Described flexible substrate is cut and lift-off processing, is obtained multiple described flexible display panels；
Described described flexible substrate is cut and lift-off processing includes：
S1031：Cutting process is carried out to described flexible substrate, obtains at least one unstripped flexible display panels, each institute
State unstripped flexible display panels and include multiple described sacrifice region, and the flexibility to described unstripped flexible display panels respectively
Substrate carries out strip operation, so that the flexible substrate of described unstripped flexible display panels is separated with described carrier substrate；Reference
Figure 19, Figure 19 are the structural representation of unstripped flexible display panels after step S1031 for the structure shown in Figure 17, described
Unstripped flexible display panels include flexible substrate 100 and be located at described flexible substrate 100 surface remove described sacrifice region 102 with
The display device 200 of exterior domain, the described flexible display panels obtaining through step S1031 all include multiple sacrifice region 102.
Need description, the described flexible display panels obtaining through step S1031 all include multiple sacrifice region 102, that is, right
Structure shown in Figure 17 carries out the acquisition of step S1031；A sacrifice region can also all be included, the structure shown in Figure 16 is entered
Row step S1031 obtains；Can also include there are two sacrifice region or there is no sacrifice region, the structure shown in Figure 18 be entered
Row step S1031 obtains.Through step S1031 obtain described flexible display panels how many there is sacrifice region, sacrificial region
The quantity in domain is how much needs are depending on arranging how many display device 200, being opened how many sacrifice on substrate greatly on a substrate greatly
Depending on the position of sacrifice region on region and greatly a substrate, the embodiment of the present invention is not construed as limiting to this.
Or
S1032：Lift-off processing is carried out to described flexible substrate, so that the flexible liner of at least one flexible display panels described
Bottom is separated with described carrier substrate, and carries out cutting process to the flexible substrate after lift-off processing, obtains at least one described soft
Property display floater.With reference to Figure 20, Figure 20 is the structure of the flexible display panels that the structure shown in Figure 16 obtains through step S1032
Schematic diagram, described flexible display panels include flexible substrate 100 and are located at described flexible substrate 100 surface except described sacrifice region
102 with the display device 200 of exterior domain, and the flexible substrate 100 of the described flexible display panels obtaining through step S1032 may
Only include a described sacrifice region 102 (with reference to Figure 20) it is also possible to not include described sacrifice region 102 (reference Figure 21, Figure 21
The structural representation of the flexible display panels that the structure shown in Figure 18 obtains through step S1032) it is also possible to include two institutes
(with reference to Figure 22, Figure 22 is the flexible display panels that the structure shown in Figure 18 obtains through step S1032 to state sacrifice region 102
Structural representation).Need description, the described flexible display panels obtaining through step S1032 all include multiple sacrifices
Region 102, carries out the acquisition of step S1032 to the structure shown in Figure 17；A sacrifice region can also all be included, that is, to Figure 16
Shown structure carries out the acquisition of step S1032；Can also include there are two sacrifice region or there is no sacrifice region, that is, to Figure 18
Shown structure carries out the acquisition of step S1032.Through step S1032 obtain described flexible display panels how many there is sacrifice
How much region, quantity of sacrifice region are for needing depending on arranging how many display device 200 on a substrate greatly, big opening has on substrate
Depending on the position of sacrifice region on how many sacrifice region and greatly a substrate, the embodiment of the present invention is not construed as limiting to this.
It should be noted that in the preparation process of described display device, described sacrifice region 102 and carrier substrate
300 deviate from described flexible substrate 100 side, and the clamping zone relative with described sacrifice region 102 can clamping part for offer
Position, and because described display device 200 is distributed in area in addition to described sacrifice region 102 for described flexible substrate 101 surface
Domain, it is to avoid due to causing to described sacrifice region 102 or described clamping zone to scratch in clamping process or adhering to impurity, and
The described sacrifice region 100 when separating with described carrier substrate 300 to described flexible substrate 100 leading to and described carrier substrate
Between still suffer from viscosity, and the display device 200 of described sacrifice region 100 is occurred by the situation torn and damage, thus
Achieve and reduce the display device 200 of described flexible display panels and peel off with described carrier substrate 300 in described flexible substrate 100
During impaired probability purpose, improve described flexible display panels prepares yield.
Also, it should be noted the technique that described flexible substrate 100 is carried out with lift-off processing typically adopts laser lift-off work
Skill.
On the basis of above-described embodiment, in an embodiment of the application, with reference to Figure 23, Figure 23 is described flexible aobvious
Show the schematic flow sheet of the preparation method of panel, described described flexible substrate is cut and lift-off processing, obtain at least one
Also include before individual flexible display panels：
S1023：Described sacrifice region is cut, makes to be formed at the sacrifice region of described flexible substrate and sacrifice breach.
It should be noted that it is right before described flexible substrate being peeled off with described carrier substrate using laser lift-off
Described sacrifice region is cut, and makes the purpose forming sacrifice breach at the sacrifice region of described flexible substrate be to avoid described
Lead to because described sacrifice region still suffers from viscosity with described carrier substrate in flexible substrate and the stripping process of described carrier substrate
The situation that described sacrifice region neighboring area is damaged is caused to occur when tearing, it is entirely avoided in described flexible substrate and described load
In the stripping process of structure base board, display device is caused situation about damaging to occur, greatly improve the system of described flexible display panels
Standby yield.
Also, it should be noted when described described flexible substrate is cut and lift-off processing be step S1031 when, institute
State the step for described sacrifice region is cut to carry out with carrying out cutting process to described flexible substrate simultaneously；Also may be used
To first carry out step S1031, more described sacrifice region is cut；First described sacrifice region can also be cut, then
Execution step S1031.
When described described flexible substrate is cut and lift-off processing be step S1032 when, described to described sacrificial region
Before the step for domain is cut is preferably placed at step S1032, if this is because peeled off to described flexible substrate
Described sacrifice region is carried out after process with cutting again and forms described sacrifice breach, just lose and described sacrifice region is cut
The purpose cut：I.e. due to the more difficult stripping of sacrifice region in stripping process, easily draw and the region beyond sacrifice region is caused damage
Wound.
With reference to Figure 24-26, Figure 24-26 is the overlooking the structure diagram of the flexible display panels of preparation in the present embodiment.Figure
Show the plan structure including 4 described flexible display panels sacrificing breach 101 in 24, show in Figure 25 including 1
The plan structure of the described flexible display panels sacrificing breach 101；Show in Figure 26 including 2 described sacrifice breach 101
The plan structure of flexible display panels.The sacrifice breach 101 that the application includes to the flexible substrate 100 of described flexible display panels
Quantity do not limit, concrete depending on actual fabrication technique.
On the basis of above-described embodiment, in another embodiment of the application, with reference to Figure 27 and Figure 28, Figure 27 and Tu
28 is the schematic flow sheet of the preparation method of described flexible display panels, described described sacrifice region is cut, make described
Form sacrifice breach at the sacrifice region of flexible substrate to include：
S10231：The sacrifice region of described flexible substrate is cut, makes shape at the sacrifice region of described flexible substrate
Become to sacrifice breach；
Or
S10232：Sacrifice region to described flexible substrate and the correspondence position of described carrier substrate and described sacrifice region
Cut, make to be formed at the sacrifice region of described flexible substrate and sacrifice breach.
Propose two kinds of modes that described sacrifice region is cut in the present embodiment, the application adopts to cutting
Concrete mode does not limit, specifically depending on practical situation.
On the basis of above-described embodiment, in an embodiment of the application, described described flexible substrate is cut
Cut and lift-off processing before also include：
Deviate from described carrier substrate one side surface in described sacrifice region and form anti-skidding film layer.
In the present embodiment, the anti-skidding film layer on described sacrifice region surface is used for lifting the coarse of described sacrifice region surface
Degree, to realize preferably being engaged between instrument in clamping process.
Described anti-skidding film layer can be formed using certain procedure during described display device processing procedure, for example, forming institute
When stating the thin film transistor (TFT) in display device, the inorganic material of each Rotating fields that form thin film transistor (TFT) or organic material can be utilized
Form described anti-skidding film layer on described sacrifice region surface.
Specifically, described anti-skidding film layer can be silicon dioxide layer or the silicon nitride layer that surface has texture structure, also may be used
To be the photosensitive material layer that surface has texture structure.The application does not limit to the concrete formation material of described anti-skidding film layer
Fixed, specifically depending on practical situation.
In sum, the embodiment of the present application provides a kind of flexible display apparatus, flexible display panels and preparation method thereof,
Wherein, the flexible substrate of described flexible display panels has the sacrifice breach that at least one is located at edge, and described sacrifice breach is
To the breach being formed after sacrifice region cutting, described sacrifice region is used for providing in the preparation process of described flexible display panels
Can retaining part, and due to described display device be distributed in described flexible substrate surface except described sacrifice breach in addition to area
Domain, it is to avoid cause to scratch due to carrier substrate relative to described sacrifice region or described sacrifice region in clamping process or
Attachment impurity, and the described sacrifice region when separating with described carrier substrate to described flexible substrate leading to and described carrier base
Still suffer from viscosity between plate, and the display device of described sacrifice region is occurred by the situation torn and damage, thus real
The display device having showed the described flexible display panels of reduction is impaired in described flexible substrate with described carrier substrate stripping process
Probability purpose, improve described flexible display panels prepares yield.
In this specification, each embodiment is described by the way of going forward one by one, and what each embodiment stressed is and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses the present invention.
Multiple modifications to these embodiments will be apparent from for those skilled in the art, as defined herein
General Principle can be realized without departing from the spirit or scope of the present invention in other embodiments.Therefore, the present invention
It is not intended to be limited to the embodiments shown herein, and be to fit to and principles disclosed herein and features of novelty phase one
The scope the widest causing.
Claims (12)
1. a kind of flexible display panels are it is characterised in that include：
Flexible substrate, described flexible substrate has the sacrifice breach that at least one is located at edge；
Remove described sacrifice breach positioned at described flexible substrate surface with the display device of exterior domain.
2. flexible display panels according to claim 1 are it is characterised in that described sacrifice breach is polygon or circle.
3. flexible display panels according to claim 1 are it is characterised in that the quantity of described sacrifice breach is more than or equal to
3.
4. flexible display panels according to claim 3 are it is characterised in that the quantity of described sacrifice breach is 3, wherein
Two described sacrifice breach are located at 2 corner regions on described flexible substrate base, and another described sacrifice breach is located at described
The top margin middle section of flexible substrate.
5. flexible display panels according to claim 3 are it is characterised in that the quantity of described sacrifice breach is 4, and 4
Individual described sacrifice breach is located at 4 corner regions of described flexible substrate respectively.
6. the flexible display panels according to any one of claim 1-5 it is characterised in that each described sacrifice breach area
More than or equal to 0.5mm2.
7. a kind of flexible display apparatus show it is characterised in that including at least one flexibility as described in any one of claim 1-6
Show panel.
8. a kind of preparation method of flexible display panels is it is characterised in that include：
There is provided carrier substrate, described carrier substrate surface is attached with flexible substrate, and described flexible substrate deviates from described carrier substrate
Side has multiple sacrifice region；Described carrier substrate deviates from described flexible substrate one side surface and has multiple and described flexible liner
The one-to-one clamping zone of multiple sacrifice region at bottom, each described clamping zone and corresponding described sacrifice region phase
Right, described clamping zone and described sacrifice region can retaining parts for offer；
Form at least one display device in region in addition to described sacrifice region for the described flexible substrate surface；
Described flexible substrate is cut and lift-off processing, is obtained at least one described flexible display panels；
Described described flexible substrate is cut and lift-off processing includes：
Cutting process is carried out to described flexible substrate, obtains at least one unstripped flexible display panels, each described unstripped soft
Property display floater includes multiple described sacrifice region, and respectively the flexible substrate of described unstripped flexible display panels is shelled
From operation, so that the flexible substrate of described unstripped flexible display panels is separated with described carrier substrate；
Or
Lift-off processing is carried out to described flexible substrate, so that the flexible substrate of at least one flexible display panels described and described load
Structure base board separates, and carries out cutting process to the flexible substrate after lift-off processing, obtains at least one described flexible display panels.
9. flexible display panels according to claim 8 preparation method it is characterised in that described to described flexible substrate
Cut and lift-off processing, also included before obtaining at least one flexible display panels：
Described sacrifice region is cut, makes to be formed at the sacrifice region of described flexible substrate and sacrifice breach.
10. flexible display panels according to claim 9 preparation method it is characterised in that described to described sacrificial region
Domain carries out cutting and includes：
The sacrifice region of described flexible substrate is cut；Or
Sacrifice region to described flexible substrate and described carrier substrate are cut with the correspondence position of described sacrifice region.
The preparation method of 11. flexible display panels according to claim 9 it is characterised in that described to described flexible liner
Bottom cut and lift-off processing before also include：
Deviate from described carrier substrate one side surface in described sacrifice region and form anti-skidding film layer.
The preparation method of 12. flexible display panels according to claim 11 is it is characterised in that described anti-skidding film layer is table
The silicon dioxide layer of the textured structure of mask or silicon nitride layer or photosensitive material layer.
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| WO2019010607A1 (en) * | 2017-07-10 | 2019-01-17 | 深圳市柔宇科技有限公司 | Peeling method and peeling device for flexible substrate |
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