CN106447633B - The denoising method of Microfocus X-ray radioscopic image towards integrated antenna package detection - Google Patents

The denoising method of Microfocus X-ray radioscopic image towards integrated antenna package detection Download PDF

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CN106447633B
CN106447633B CN201610852508.3A CN201610852508A CN106447633B CN 106447633 B CN106447633 B CN 106447633B CN 201610852508 A CN201610852508 A CN 201610852508A CN 106447633 B CN106447633 B CN 106447633B
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CN106447633A (en
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高红霞
吴梓灵
万燕英
马鸽
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South China University of Technology SCUT
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00Image enhancement or restoration
    • G06T5/70Denoising; Smoothing
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00Image enhancement or restoration
    • G06T5/20Image enhancement or restoration using local operators
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10116X-ray image
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20172Image enhancement details
    • G06T2207/20192Edge enhancement; Edge preservation

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Abstract

The step of denoising method of Microfocus X-ray radioscopic image disclosed by the invention towards integrated antenna package detection includes following sequence: the Gauss of input picture is pre-processed;Microfocus X-ray x-ray observation image is divided into flat region and detail areas using difference curvature chart;Utilize division result and difference curvature estimation regularizing operator and regularization parameter;Objective function is constructed, iteratively faster solution is carried out to objective function using based on approximate Variable Step Algorithm.Denoising method of the invention is solved using based on approximate variable step iteratively faster derivation algorithm, and algorithm speed is fast, meets actual industrial requirement.

Description

The denoising method of Microfocus X-ray radioscopic image towards integrated antenna package detection
Technical field
The present invention relates to image denoising fields, in particular to the Microfocus X-ray radioscopic image towards integrated antenna package detection Denoising method.
Background technique
The focus of Microfocus X-ray X-ray machine only has 5-10 μm, is able to achieve the detection to small fine structure, is usually used in integrated circuit Piece test and defects detection in encapsulation.Since the test object in integrated antenna package is usually from a variety of dissimilar metals And combinations thereof body, different metal is different to the absorbing state of X-ray, so that Microfocus X-ray radioscopic image being capable of non-destructive testing circuit Internal structure, but also because the absorbing state of each metalloid is closer to, so as to show contrast low for Microfocus X-ray radioscopic image Feature, simultaneously because the influence of noise, fine faint structure is difficult to accurately detect.
The imaging process of Microfocus X-ray X-ray machine includes reaching receiver board and subsequent electromagnetism turn after X-ray is emitted by radiographic source It changes, the processes such as signal transmission, wherein accounting for the noise type mainly influenced is Gaussian noise and poisson noise.Due to X-ray tube Microfocus X-ray characteristic, the x-ray flux that x-ray source is generated in the unit time is less, causes the photon count levels of imaging low, often It will form poisson noise;Meanwhile the thermoelectron of imaging device fluctuates and electromagnetic induction effect would generally introduce Gaussian noise;Two kinds Noise is mixed in Microfocus X-ray radioscopic image, brings bigger difficulty for integrated antenna package detection;And existing doctor The imaging characteristics and Microfocus X-ray radioscopic image difference of radioscopic image etc. are learned, the radiation in the former imaging device is logical Often in hundred micron levels.And the radiation of Microfocus X-ray X-ray machine only has 5-10 μm.The Microfocus X-ray characteristic of Microfocus X-ray X-ray machine makes The interaction situation of its noise is more complicated compared with existing common radioscopic image noise model;Meanwhile for towards collection For Microfocus X-ray radioscopic image at circuit detection, need accurately to examine the part and defect of integrated circuit due to subsequent It surveys, therefore to the more demanding of the details reservation of image while effective denoising, and its image has faint details more, comparison Spend low, the low feature of signal-to-noise ratio increases the difficulty of denoising.
Existing research largely only focuses on single Gaussian noise or poisson noise, for what is detected towards integrated antenna package It for Microfocus X-ray radioscopic image and is not suitable for, image shows the low feature of signal-to-noise ratio, and the actual conditions of noise are than single Gaussian noise or single poisson noise are much more complex;On regularization method, existing most of research concern regularizing operator or The single adaptation scheme of regularization parameter designs, and cannot combine well the two, both need to take a significant amount of time specific It on parameter determines, and cannot be guaranteed noise remove and the balance that details retains, actual industrial integrated circuit can not be met well To the requirement of denoising in package detection.
Summary of the invention
The purpose of the present invention is to overcome the shortcomings of the existing technology and deficiency, provides towards the micro- of integrated antenna package detection The denoising method of focal spot x-ray image.
The purpose of the present invention is realized by the following technical solution:
The step of denoising method of Microfocus X-ray radioscopic image towards integrated antenna package detection includes following sequence:
(1) Gauss of input picture is pre-processed;
(2) the difference curvature chart Img_dc for calculating image Img_ft after pre-processing, is penetrated Microfocus X-ray X using difference curvature chart Line observed image Img_ob points are flat region and detail areas;
(3) division result and difference curvature estimation regularizing operator and regularization parameter are utilized:
A, using difference curvature value, with the form calculus regularizing operator of class inverse proportion function;
Wherein, (x, y) is image rectangular co-ordinate, and x, y are positive integer, and p (x, y) indicates regularization LpP in operator Norm parameter, Img_dc indicate difference curvature chart (i.e. Img_dc (x, y) indicates the difference curvature value on image coordinate (x, y)), The full figure intermediate value of med_dc expression difference curvature chart Img_dc;
B, using difference curvature value, with the form calculus regularization parameter of barrier function, be conducive to keep faint edge;
Wherein, Lamda indicates that regularization parameter, Lamda_d indicate that the regularization parameter of detail areas, Lamda_s indicate flat The regularization parameter in smooth area, mean_bdc indicate difference curvature mean value, and max () expression is maximized;
(4) objective function is constructed, iteratively faster solution is carried out to objective function using based on approximate Variable Step Algorithm.
The step (2) specifically: after the difference curvature chart for calculating pretreatment image, solve difference song using Da-Jin algorithm The binarization threshold of rate figure divides the image into foreground zone and background area using the binarization threshold;The difference for counting background area is bent The summation of difference curvature value of background area and the sum of corresponding pixel points are divided by by the summation of rate value and the sum of corresponding pixel points Obtain the mean value of background area difference curvature;Subregion is carried out to image with the mean value combination difference curvature chart of background area difference curvature: For a pixel, if its corresponding difference curvature is greater than the mean value of background area difference curvature, which is edge The point in area;If it is less than the mean value of background area difference curvature, then the pixel is the point of flat region.
The step (4) specifically:
Firstly, noise model is converted based on second order Taylors approximation, obtain the conversion of objective function:
Wherein, I*Indicate the optimal solution of objective function, I is the solution of objective function to be asked, and α is two in second order Taylors approximation Secondary item parameter,For gradient operator, | | | |pIndicate p norm, I_s is intermediate projection result;
Solve intermediate projection result
Wherein, Y is hypothesis known variables when carrying out second order Taylors approximation, and second order Taylors approximation is unfolded at Y;Fid() Indicate the data fidelity term based on Gauss-Poisson mixed noise in objective function;()kIndicate k-th of component;Herein, second order is safe The quadratic term parameter alpha in approximation is strangled to be considered to decline step parameter;Wherein, step-lengthIt can be adaptive with iterations going on It calculates, i.e. variable step, accelerates iteration speed;
Then intermediate variable is updated
Wherein, IiIndicate the solution of objective function in i-th iteration, Ii-1Indicate the solution of objective function in (i-1)-th iteration, ti Indicate the step-size factor in i-th iteration, ti+1Indicate the step-size factor updated in i-th iteration;
Between in the updating when variable, step-lengthMiddle tiAnd ti+1Can adaptive calculating with iterations going on, that is, become Step-length accelerates iteration speed;
By the approximation and two variable steps updates to objective function, realize that the iteratively faster of algorithm solves.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1, the present invention is solved using based on approximate variable step iteratively faster derivation algorithm, and algorithm speed is fast, is met practical Industrial requirements.
2, The present invention gives the calculation methods of more preferably adaptive operator and parameter, and for faint edge holding into It has gone design, denoising result is enabled to be effectively retained faint marginal information.
3, novelty of the invention essentially consists in image border operator different from the prior art, specific regularizing operator and The calculation method of parameter is different;And in regularization method, the calculation method of regularizing operator and parameter is exactly to influence algorithm speed And the key of effect, the setting of image border operator, regularizing operator and parameter calculation through the invention and iteration are calculated Method (explanation: because subsequent application of explicit difference method is a kind of iterative algorithm), can effectively improve algorithm speed.Different from explicit difference Method, application of explicit difference method solve, and algorithm speed is slow.
Detailed description of the invention
Fig. 1 is the process of the denoising method of the Microfocus X-ray radioscopic image of the present invention towards integrated antenna package detection Figure.
Specific embodiment
Present invention will now be described in further detail with reference to the embodiments and the accompanying drawings, but embodiments of the present invention are unlimited In this.
Such as Fig. 1, the denoising method of the Microfocus X-ray radioscopic image towards integrated antenna package detection includes following sequence Step:
(1) Gauss of input picture is pre-processed;
(2) the difference curvature chart Img_dc for calculating image Img_ft after pre-processing, is penetrated Microfocus X-ray X using difference curvature chart Line observed image Img_ob points are flat region and detail areas;
Specifically: after the difference curvature chart for calculating pretreatment image, the two-value of the difference curvature chart is solved using Da-Jin algorithm Change threshold value, divides the image into foreground zone and background area using the binarization threshold;Count the summation of the difference curvature value of background area And the sum of corresponding pixel points, it is divided by the summation of difference curvature value of background area and the sum of corresponding pixel points to obtain background area The mean value of difference curvature;Subregion is carried out to image with the mean value combination difference curvature chart of background area difference curvature: for a picture Vegetarian refreshments, if its corresponding difference curvature is greater than the mean value of background area difference curvature, which is the point of marginal zone;If Less than the mean value of background area difference curvature, then the pixel is the point of flat region.
(3) division result and difference curvature estimation regularizing operator and regularization parameter are utilized:
A, using difference curvature value, with the form calculus regularizing operator of class inverse proportion function;
Wherein, (x, y) is image rectangular co-ordinate, and x, y are positive integer, and p (x, y) indicates regularization LpP in operator Norm parameter, Img_dc indicate difference curvature chart (i.e. Img_dc (x, y) indicates the difference curvature value on image coordinate (x, y)), The full figure intermediate value of med_dc expression difference curvature chart Img_dc;
B, using difference curvature value, with the form calculus regularization parameter of barrier function, be conducive to keep faint edge;
Wherein, Lamda indicates that regularization parameter, Lamda_d indicate that the regularization parameter of detail areas, Lamda_s indicate flat The regularization parameter in smooth area, mean_bdc indicate difference curvature mean value, and max () expression is maximized;
(4) objective function is constructed, iteratively faster solution is carried out to objective function using based on approximate Variable Step Algorithm;
Specifically:
Firstly, noise model is converted based on second order Taylors approximation, obtain the conversion of objective function:
Wherein, I*Indicate the optimal solution of objective function, I is the solution of objective function to be asked, and α is two in second order Taylors approximation Secondary item parameter,For gradient operator, | | | |pIndicate p norm, I_s is intermediate projection result;
Solve intermediate projection result
Wherein, Y is hypothesis known variables when carrying out second order Taylors approximation, and second order Taylors approximation is unfolded at Y;Fid() Indicate the data fidelity term based on Gauss-Poisson mixed noise in objective function;()kIndicate k-th of component;Herein, second order is safe The quadratic term parameter alpha in approximation is strangled to be considered to decline step parameter;Wherein, step-lengthIt can be adaptive with iterations going on It calculates, i.e. variable step, accelerates iteration speed;
Then intermediate variable is updated
Wherein, IiIndicate the solution of objective function in i-th iteration, Ii-1Indicate the solution of objective function in (i-1)-th iteration, ti Indicate the step-size factor in i-th iteration, ti+1Indicate the step-size factor updated in i-th iteration;
Between in the updating when variable, step-lengthMiddle tiAnd ti+1Can adaptive calculating with iterations going on, that is, become Step-length accelerates iteration speed;
By the approximation and two variable steps updates to objective function, realize that the iteratively faster of algorithm solves.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention, It should be equivalent substitute mode, be included within the scope of the present invention.

Claims (2)

1. the denoising method of the Microfocus X-ray radioscopic image towards integrated antenna package detection, which is characterized in that include following sequence The step of:
(1) Gauss of input picture is pre-processed;
(2) the difference curvature chart Img_dc for calculating image Img_ft after pre-processing, is seen Microfocus X-ray X-ray using difference curvature chart Altimetric image Img_ob points are flat region and detail areas;
(3) division result and difference curvature estimation regularizing operator and regularization parameter are utilized:
A, using difference curvature value, with the form calculus regularizing operator of class inverse proportion function;
Wherein, (x, y) is image rectangular co-ordinate, and x, y are positive integer, and p (x, y) indicates regularization LpP norm ginseng in operator Number, Img_dc indicate that difference curvature chart, med_dc indicate the full figure intermediate value of difference curvature chart Img_dc;
B, using difference curvature value, with the form calculus regularization parameter of barrier function;
Wherein, Lamda indicates that regularization parameter, Lamda_d indicate that the regularization parameter of detail areas, Lamda_s indicate flat region Regularization parameter, mean_bdc indicate difference curvature mean value, max () expression be maximized;
(4) objective function is constructed, iteratively faster solution is carried out to objective function using based on approximate Variable Step Algorithm:
Firstly, noise model is converted based on second order Taylors approximation, obtain the conversion of objective function:
Wherein, I*Indicate the optimal solution of objective function, I is the solution of objective function to be asked, and α is the quadratic term in second order Taylors approximation Parameter,For gradient operator, | | | |pIndicate p norm, I_s is intermediate projection result;
Solve intermediate projection result
Wherein, Y is hypothesis known variables when carrying out second order Taylors approximation, and second order Taylors approximation is unfolded at Y;Fid () is indicated Based on the data fidelity term of Gauss-Poisson mixed noise in objective function;()kIndicate k-th of component;Herein, second order Taylor is close Quadratic term parameter alpha like in is considered to decline step parameter;Wherein, step-lengthIt being capable of adaptive meter with iterations going on It calculates, i.e. variable step;
Then intermediate variable is updated
Wherein, IiIndicate the solution of objective function in i-th iteration, Ii-1Indicate the solution of objective function in (i-1)-th iteration, tiIt indicates Step-size factor in i-th iteration, ti+1Indicate the step-size factor updated in i-th iteration;
Between in the updating when variable, step-lengthMiddle tiAnd ti+1It being capable of adaptive calculating with iterations going on, i.e. variable step;
By the approximation and two variable steps updates to objective function, realize that the iteratively faster of algorithm solves.
2. the denoising method of the Microfocus X-ray radioscopic image according to claim 1 towards integrated antenna package detection, feature It is, the step (2) specifically: after the difference curvature chart for calculating pretreatment image, solve the difference curvature using Da-Jin algorithm Pretreatment image is divided into foreground zone and background area using the binarization threshold by the binarization threshold of figure;Count the difference of background area Divide the summation of curvature value and the sum of corresponding pixel points, by the sum of the summation of the difference curvature value of background area and corresponding pixel points It is divided by obtain the mean value of background area difference curvature;Image is divided with the mean value combination difference curvature chart of background area difference curvature Area: for a pixel, if its corresponding difference curvature is greater than the mean value of background area difference curvature, which is side The point in edge area;If it is less than the mean value of background area difference curvature, then the pixel is the point of flat region.
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