CN106443065B - 高精度波长形加速度传感器及其制备方法 - Google Patents
高精度波长形加速度传感器及其制备方法 Download PDFInfo
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- CN106443065B CN106443065B CN201610513007.2A CN201610513007A CN106443065B CN 106443065 B CN106443065 B CN 106443065B CN 201610513007 A CN201610513007 A CN 201610513007A CN 106443065 B CN106443065 B CN 106443065B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108279320B (zh) * | 2018-02-09 | 2020-12-04 | 中北大学 | 一种基于Fano共振纳米光波导加速度计制备方法 |
CN109506766A (zh) * | 2018-12-21 | 2019-03-22 | 宁波中车时代传感技术有限公司 | 一种基于闪耀光栅和光纤光栅的光纤温振并联一体传感器 |
CN109506765A (zh) * | 2018-12-21 | 2019-03-22 | 宁波中车时代传感技术有限公司 | 一种基于闪耀光栅和光纤光栅的光纤温振串联一体传感器 |
CN115728512B (zh) * | 2021-08-25 | 2024-02-27 | 上海拜安传感技术有限公司 | 光纤加速度传感器及光纤加速度传感器的形成方法 |
CN115728511B (zh) * | 2021-08-25 | 2024-06-25 | 上海拜安传感技术有限公司 | 敏感结构及敏感结构的形成方法 |
CN114963994B (zh) * | 2022-04-14 | 2023-05-02 | 西安交通大学 | 一种用于纳米精度位移测量的系统和光栅传感方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11142427A (ja) * | 1997-11-05 | 1999-05-28 | Kyowa Electron Instr Co Ltd | 加速度計およびその製造方法 |
CN2651754Y (zh) * | 2003-11-12 | 2004-10-27 | 中国科学院半导体研究所 | 光纤光栅式加速度计 |
CN1987486A (zh) * | 2006-12-26 | 2007-06-27 | 清华大学 | 集成光栅干涉微机械加速度传感器及其制作方法 |
CN101788570A (zh) * | 2010-01-26 | 2010-07-28 | 浙江大学 | 三明治式光学微机械加速度传感器 |
CN102175274A (zh) * | 2011-01-28 | 2011-09-07 | 陕西科技大学 | 基于分布式fbg传感器的多物理量测量传感信号识别方法及装置 |
CN103901610A (zh) * | 2014-03-26 | 2014-07-02 | 重庆大学 | 百叶窗式mems大转角可调闪耀光栅光调制器及其阵列 |
CN104614550A (zh) * | 2015-01-27 | 2015-05-13 | 浙江大学 | 脉冲微机械加速度传感器及其测量加速度的方法 |
Family Cites Families (1)
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US7245789B2 (en) * | 2002-10-07 | 2007-07-17 | Vascular Imaging Corporation | Systems and methods for minimally-invasive optical-acoustic imaging |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11142427A (ja) * | 1997-11-05 | 1999-05-28 | Kyowa Electron Instr Co Ltd | 加速度計およびその製造方法 |
CN2651754Y (zh) * | 2003-11-12 | 2004-10-27 | 中国科学院半导体研究所 | 光纤光栅式加速度计 |
CN1987486A (zh) * | 2006-12-26 | 2007-06-27 | 清华大学 | 集成光栅干涉微机械加速度传感器及其制作方法 |
CN101788570A (zh) * | 2010-01-26 | 2010-07-28 | 浙江大学 | 三明治式光学微机械加速度传感器 |
CN102175274A (zh) * | 2011-01-28 | 2011-09-07 | 陕西科技大学 | 基于分布式fbg传感器的多物理量测量传感信号识别方法及装置 |
CN103901610A (zh) * | 2014-03-26 | 2014-07-02 | 重庆大学 | 百叶窗式mems大转角可调闪耀光栅光调制器及其阵列 |
CN104614550A (zh) * | 2015-01-27 | 2015-05-13 | 浙江大学 | 脉冲微机械加速度传感器及其测量加速度的方法 |
Non-Patent Citations (1)
Title |
---|
用闪耀光栅解调的光纤光栅测量振动系统;郭晓金 等;《传感器技术》;20040920;第23卷(第9期);第18-20页 * |
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Effective date of registration: 20210428 Address after: 201210 4th floor, building 4, No.150 Cailun Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Patentee after: SHANGHAI B&A SENSOR Co.,Ltd. Address before: 200050 No. 865, Changning Road, Changning District, Shanghai, Changning District Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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Application publication date: 20170222 Assignee: Shanghai Bian Semiconductor Co.,Ltd. Assignor: SHANGHAI B&A SENSOR CO.,LTD. Contract record no.: X2022310000102 Denomination of invention: High-precision wavelength-shaped acceleration sensor and preparation method thereof Granted publication date: 20190301 License type: Common License Record date: 20220831 |