CN106338840B - A kind of surface wave field enhances tunable total internal reflection optical excitation apparatus - Google Patents
A kind of surface wave field enhances tunable total internal reflection optical excitation apparatus Download PDFInfo
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- CN106338840B CN106338840B CN201610730670.8A CN201610730670A CN106338840B CN 106338840 B CN106338840 B CN 106338840B CN 201610730670 A CN201610730670 A CN 201610730670A CN 106338840 B CN106338840 B CN 106338840B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/56—Optics using evanescent waves, i.e. inhomogeneous waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
Abstract
The invention belongs to Wave Guiding Optics and field of optical measuring technologies, specially a kind of surface wave field enhances tunable total internal reflection optical excitation apparatus.The present invention includes accurate hoistable platform, inverted trapezoidal prism, collimation excitation beam, super-thin plane object carrier and optics and spectral measurement system；It keeps certain the air gap, keeping certain the air gap between sample and optics and spectral measurement system to be measured between inverted trapezoidal prism and super-thin plane object carrier；In the case where incidence angle is greater than inverted trapezoidal prism upper surface inner total reflection angle, different incidence angles is selected to excite the horizontal guided wave mode in super-thin plane object carrier, optical excitation is carried out to sample to be tested using the guided wave surface evanescent wave field that surface is formed on it, with accurate hoistable platform strict control inverted trapezoidal prism between super-thin plane object carrier at a distance from, continuously adjusting to the enhancing of the field of the evanescent wave of super-thin plane object carrier upper surface may be implemented.The present invention the fluorescence spectrum of micro-nano material, absorption spectrum and in terms of have important application.
Description
Technical field
The invention belongs to Wave Guiding Optics and field of optical measuring technologies, and in particular to a kind of surface wave field enhances tunable
Total internal reflection optical excitation apparatus.
Background technique
Total internal reflection fluorescence spectrum (total internal reflection fluorescence (TIRF)), Yi Jibiao
Face enhance Raman spectrum be two effective ways of research table/boundary material structure, they all be using surface evanescent wave to point
Son carry out shallow-layer excitation, without molecules a large amount of in measuring targets generation excitation, so as to realize selectively into
Row measurement and analysis.But the evanescent wave directly generated using high index prism surface, intensity is very weak, can only generally reach
To the intensity of incident light.For this purpose, to obtain the evanescent wave of higher-strength, only increase incident intensity.This for even with
System of the laser as light source, the increase rate of luminous intensity be also it is very limited, more still more utilize incoherent light source
Situation.
The present invention proposes that a kind of surface wave field enhances tunable total internal reflection optical excitation apparatus, it utilizes plane light wave
Surface evanescent wave caused by leading, and it is indirect using prism surface generation, and intensity can be than the intensity of incident light source itself
The 1-3 order of magnitude is improved, and this enhancing may be implemented to continuously adjust.The surface evanescent wave intensity of planar optical waveguide, mainly
It is restricted by the degree of regulation of the coupling angle (abbreviation synchro angle) of guided wave mode in planar optical waveguide.Synchro angle controls more accurate,
Obtained surface evanescent wave is stronger, but it is also higher to the imbalance susceptibility of angle.In order to overcome the problems, such as this, it is proposed that
It is realized in the case where limited incidence angle degree of regulation by the method for adjusting prism and the coupling spacing of planar optical waveguide
Surface evanescent wave field enhancing is continuously adjusted.
Advantages of the present invention is to control essence to angle come back-off with the existing displacement regulating mechanism with nano-precision
The excessive demand of degree, to can be carried out to the field strength of surface evanescent wave effective in the case where existing angle control precision
It adjusts.Meanwhile evanescent wave intensity adjustment method of the invention is not related to the change to the polarization state of incident light, therefore nothing in system
Expensive polarizer (especially centering far infrared band) need to be installed.
Summary of the invention
The purpose of the present invention is to provide the total internal reflections that one kind can effectively be adjusted the field strength of surface evanescent wave
Optical excitation device.
Directly prism surface using light total reflection principle caused by surface evanescent wave intensity usually with incident rib
The intensity of the light of mirror bottom surface is suitable, then can achieve ratio using surface evanescent wave caused by the guided wave mode in planar optical waveguide
The enhancing of the much higher light field of incident field, this enhancing can achieve several orders of magnitude.But the surface of planar optical waveguide is suddenly
The intensity of wave that dies is very sensitive to the misalignment rate of the coupling synchro angle of waveguide mode, so that it cannot being reached pair by adjusting synchro angle
The purpose that the intensity of evanescent wave is adjusted.
In the structure of the planar optical waveguide of prism-coupled, the optical guided wave that is excited for the synchro angle of a finite accuracy
Mode, evanescent wave intensity are a relatively slowly varying relationship, Ke Yitong with the coupling spacing of prism and planar optical waveguide
It crosses and changes the method for the coupling spacing and suddenly die in the case where existing angle control precision to the surface of planar optical waveguide to realize
The purpose of intensity of wave progress continuous control.
Based on the above principles, the present invention, which devises a kind of surface wave field, enhances tunable total internal reflection optical excitation dress
It sets, using the displacement regulating mechanism of nano-precision, 2 orders of magnitude can reach to the tuning amount of surface wave field enhancing.Its structure is such as
Shown in Fig. 1, specifically include: an accurate hoistable platform, an inverted trapezoidal prism, a branch of collimation excitation beam, one piece ultra-thin flat
Face object carrier and a set of optics and spectral measurement system；Wherein, inverted trapezoidal prism is fixed on above-mentioned accurate hoistable platform
On, and keep the holding of prism bottom edge horizontal；Super-thin plane object carrier, optics and spectral measurement system are followed successively by above inverted trapezoidal prism
System maintains certain the air gap between inverted trapezoidal prism and super-thin plane object carrier, super-thin plane object carrier is for putting
Sample to be measured is set, maintains certain the air gap between sample and optics and spectral measurement system to be measured；Collimated incident light
Beam is directed at inverted trapezoidal prism, for the interior incidence angle θ of the upper bottom edge of inverted trapezoidal prism (relative to prism surface normal N)
Greater than the critical angle of its experiences total internal reflection；And incidence angle θ continuously adjustable；Internal reflection light beam is received by reflection light collector
Collection.
In the present invention, it is described precision hoistable platform be used for control between inverted trapezoidal prism and super-thin plane object carrier away from
From, continuously adjusting for the field enhancing to the evanescent wave of super-thin plane object carrier upper surface may be implemented, accurate hoistable platform
Positioning accuracy can reach nanoscale, and total kilometres are no less than 500 nanometers.
In the present invention, the inverted trapezoidal prism is the glass with high index (being greater than 1.7), such as dense flint glass.
In the present invention, the collimated incident beam be collimated light beam, be a parallel collimated beam, and its for it is above-mentioned fall ladder
The interior incidence angle θ (relative to prism surface normal N) of the upper bottom edge of shape prism is greater than the critical of its experiences total internal reflection
Angle.And incidence angle θ continuously adjustable, the precision of adjusting reach second grade.
In the present invention, the super-thin plane object carrier is a plate glass, and thickness is no more than 50 microns, and collimation
Wave band where excitation beam be it is transparent, refractive index is no more than inverted trapezoidal prism.The super-thin plane object carrier is at work
Play planar optical waveguide, generates surface evanescent wave for surface on it, spatial position is relatively fixed in whole device.
In the present invention, certain the air gap is kept in the inverted trapezoidal prism and super-thin plane object carrier, that is, is fallen
Dove prism is not connected with each other with super-thin plane object carrier, there is one layer of air-gap therebetween, can pass through above-mentioned accurate lifting
Platform is adjusted.
In the present invention, certain the air gap is kept between the sample and optics and spectral measurement system to be measured, i.e.,
Keep having certain air between the light collector unit (such as microcobjective) in sample to be tested and optics and spectral measurement system
Gap, cannot use oil infiltration, which is typically no less than 1 micron.
In the present invention, the optics and spectral measurement system, photoelectric conversion mechanism and spectrum including luminous intensity measurement are surveyed
Measuring mechanism, for carrying out fluorescence spectrum, absorption spectrum and raman spectroscopy measurement and relevant data acquisition and processing.
In the present invention, in the case where incidence angle is greater than inverted trapezoidal prism upper surface inner total reflection angle, select different to enter
Firing angle is suddenly died with exciting the horizontal guided wave mode in super-thin plane object carrier using the guided wave surface that surface is formed on it
Wave field carries out optical excitation to sample to be tested, with accurate hoistable platform strict control inverted trapezoidal prism and super-thin plane object carrier
Between distance, continuously adjusting to the enhancing of the field of the evanescent wave of super-thin plane object carrier upper surface, regulated quantity may be implemented
It can reach 2 orders of magnitude, it is related with the precision of selected guided wave mode and used incident beam angle control mechanism, this
The device of invention can the fluorescence spectrum of micro-nano material, absorption spectrum and in terms of have important application.
The invention has the advantages that
1, it is to want the excessively high of angle control precision come back-off with the existing displacement regulating mechanism with nano-precision
It asks.To in the case where existing angle control precision, can the field strength to surface evanescent wave effectively adjusted；
2, for being already equipped with the instrument system of nanometer displacement control mechanism in existing measuring system, the present invention can be with
By simply installing a super-thin plane object carrier additional, so that it may realize and pass through total internal reflection institute on prism surface to original
The enhancing of the order of magnitude of the surface evanescent wave field of generation, and can be continuously adjusted with this enhancing.It therefore can be to existing
There is instrument and equipment to carry out effective efficiency upgrading；
3, evanescent wave intensity adjustment method of the invention is not related to the change to the polarization state of incident light, therefore nothing in system
Expensive polarizer, especially centering far infrared band need to be installed, polarizer and its regulating mechanism are all very expensive.Cause
This helps to reduce system cost.
Detailed description of the invention
Fig. 1 is that a kind of surface wave field enhances tunable total internal reflection optical excitation apparatus schematic diagram.
Fig. 2 is the spatial variations situation of surface evanescent field strength.Wherein, (1) left y axis (prismatic data point) is rib
The evanescent wave that mirror couple planar light guide surface generates, Y axis (linear data) is only by prism total internal reflection on the right of (2)
Incidence angle is 38.3594 ° in prism under the evanescent wave that surface generates, two situations.
The evanescent wave that Fig. 3 is prism-coupled planar optical waveguide surface evanescent wave maximum value and only prism surface generates is most
The intensity being worth greatly is than the situation of change with prism-slab guide coupling spacing.Wherein, incidence angle is 38.3594 ° in prism
(precision be decimal point after the 4th), 3 articles of curves represent incidence angle the 5th situation of change after decimal point.
Figure label: 1 is accurate hoistable platform, and 2 be collimation excitation beam, and 3 be inverted trapezoidal prism, and 5 carry for super-thin plane
Object glass, 4 the air gap between inverted trapezoidal prism and super-thin plane object carrier, 6 be reflection light collector, and 7 be survey
Sample is measured, 9 be optics and spectral measurement system, 8 the air gap between sample to be measured and optics and spectral measurement system.
Specific embodiment
The surface wave field that the present invention designs enhances tunable total internal reflection optical excitation apparatus, specifically includes: an essence
Close hoistable platform, an inverted trapezoidal prism, the collimation excitation beam of a branch of experiences total internal reflection, one piece of super-thin plane loading glass
Glass will keep certain the air gap and a set of optics and spectral measurement system between inverted trapezoidal prism and super-thin plane object carrier
System, keeps certain the air gap between sample and optics and spectral measurement system to be measured.It is greater than inverted trapezoidal prism in incidence angle
In the case where the inner total reflection angle of upper surface, different incidence angles is selected to excite the horizontal guided wave mould in super-thin plane object carrier
Formula carries out optical excitation to sample to be tested using the guided wave surface evanescent wave field that surface is formed on it.It is flat with precision lifting
Platform strict control inverted trapezoidal prism between super-thin plane object carrier at a distance from, may be implemented to table on super-thin plane object carrier
The field enhancing of the evanescent wave in face continuously adjusts, and regulated quantity generally can reach 2 orders of magnitude, with selected guided wave mode
And the precision of used incident beam angle regulating mechanism is related, the device of the invention can in the fluorescence spectrum of micro-nano material,
Absorption spectrum and raman spectroscopy measurement etc. have important application.Structural schematic diagram is as shown in Figure 1.
Structure according to figure 1 selectes a laser work wavelength such as: 632.8nm, inverted trapezoidal prism material choosing weight
Flint glass, refractive index 1.85, super-thin plane object carrier are taken as flint glass, refractive index 1.60, with a thickness of 40 microns.
The air gap between inverted trapezoidal prism and super-thin plane object carrier is initially set to 0.5 micron.
A branch of collimated light beam is being greater than facing for total internal reflection according to optical path incidence inverted trapezoidal prism shown in FIG. 1 upper bottom edge
In the case where boundary angle, by inverted trapezoidal prism, incident light can go out many guided wave moulds in super-thin plane object carrier internal excitation
Formula adjusts the incident angle of incident light, can therefrom select corresponding guided wave.If incident light of the light inside the prism on upper bottom edge
Strong is 1, by taking H mode (TE wave) as an example, incident light inside prism, inside the air gap and super-thin plane object carrier and
The field strength expression formula of the light field of surface each section can use stringent coupled-mode theory column and write out, and according to TE wave electricity
Field vector carries out quantitative calculating in the condition of continuity of boundary.Equally, it is only formed by prism surface experiences total internal reflection
Surface evanscent field, it is also possible to which corresponding theory is calculated.Correlation calculation result is as shown in Fig. 2 and Fig. 3.
Fig. 2 shows prism-coupled planar optical waveguide table when incidence angle is 38.3594 ° in prism in structure shown in Fig. 1
The Strength Space of face evanscent field changes (prismatic data, left y axis), and the only Strength Space of the evanscent field of prism surface
Situation of change (linear data, the right Y axis).As data in figure as it can be seen that the surface as caused by prism-coupled planar optical waveguide suddenly
Die field intensity (left y axis) in glass surface be it is most strong, value is 1495.63 under above-mentioned incidence angle, at this time prism and glass
The coupling spacing of glass slab guide is 0.5 micron.And in same incidence angle, only by prism surface total internal reflection when
The intensity (the right Y axis) of generated evanescent wave then only has 3.47.As it can be seen that on planar optical waveguide surface after prism-coupled
The surface evanescent wave of generation enhances at least 2 orders of magnitude when generated evanescent wave than only by prism total internal reflection when.
At this point, changing prism and glass planar waveguide in the case that the incident angle of collimated light is constant in fixed prism
Coupling spacing, thus it is possible to vary the intensity of the evanscent field on glass planar waveguide surface.Fig. 3 shows correlated results.Couple spacing
0.9 micron is changed to from 0.1 micron.It can be seen that the intensity of the evanscent field on glass planar waveguide surface with only by prism table
The intensity ratio of evanescent wave caused by face, by the 610 of peak value, varies continuously to about 4.4 from about 3.1.I.e. evanescent wave intensity increases
Amount is greater than two orders of magnitude up to 610.But, the maximum value of this increment is the control of the incidence angle with light in prism
Precision is related, when changing for the 5th of incidence angle, maximum of increments, as shown in figure 3, respectively 455.5,513.4, and
610。
Simultaneously it should also be appreciated that, it can be seen that, spacing is coupled to the adjusting of evanescent wave intensity in center two sides from Fig. 3
Change rate is also that incident angular accuracy is relevant.Left of center half, i.e. coupling spacing is from 0.5 to 0.1 micron, three curve weights
It is right very well, and right half, i.e., from 0.5 to 0.9 micron, in contrast, the registration of the curve of three precision is relatively poor.Cause
This preferably uses the Zuo Banzhi at coupling spacing variation center to the strength control of surface evanescent wave caused by slab guide, in this way,
The influence of angle control precision can be minimum.
The above results are realized in the case where the 4th after incidence angle precision controlling reaches decimal point.Current machinery
The angle control precision of formula turntable can reach about 1 second, i.e., the 4th behind decimal point, can basically meet above-mentioned to evanescent wave
The purpose of strength control.If controlled using more accurate rotating mechanism incidence angle, dependent field enhancing amount will also be into
One step increases.
Claims (7)
1. a kind of surface wave field enhances tunable total internal reflection optical excitation apparatus characterized by comprising an accurate liter
Platform, an inverted trapezoidal prism, a branch of collimation excitation beam, one block of super-thin plane object carrier and a set of optics and light drop
Spectral measurement system；Wherein, inverted trapezoidal prism is fixed on above-mentioned accurate hoistable platform, and keeps the holding of prism bottom edge horizontal；It is terraced
Super-thin plane object carrier, optics and spectral measurement system, inverted trapezoidal prism and super-thin plane loading are followed successively by above shape prism
Certain the air gap is maintained between glass, super-thin plane object carrier is for placing sample to be measured, sample and light to be measured
It learns and maintains certain the air gap between spectral measurement system；Collimated incident beam is directed at inverted trapezoidal prism, terraced for falling
The interior incidence angle θ of the upper bottom edge of shape prism is greater than the critical angle of its experiences total internal reflection；And incidence angle θ continuously adjustable；It is interior
The reflected beams are collected by reflection light collector；
The precision hoistable platform for control inverted trapezoidal prism between super-thin plane object carrier at a distance from, realize to ultra-thin flat
The field enhancing of the evanescent wave of face object carrier upper surface continuously adjusts, and the positioning accuracy of accurate hoistable platform reaches nanoscale,
Total kilometres are no less than 500 nanometers.
2. surface wave field according to claim 1 enhances tunable total internal reflection optical excitation apparatus, which is characterized in that
The inverted trapezoidal prism is the glass that refractive index is greater than 1.7.
3. surface wave field according to claim 1 enhances tunable total internal reflection optical excitation apparatus, which is characterized in that
The collimated incident beam is a parallel collimated beam, and the degree of regulation of incidence angle θ reaches second grade.
4. surface wave field according to claim 1 enhances tunable total internal reflection optical excitation apparatus, which is characterized in that
The super-thin plane object carrier is a plate glass, and thickness is no more than 50 microns, and wave band where collimation excitation beam is
Transparent, refractive index is no more than inverted trapezoidal prism.
5. surface wave field according to claim 1 enhances tunable total internal reflection optical excitation apparatus, which is characterized in that
The super-thin plane object carrier plays planar optical waveguide at work, generates surface evanescent wave for surface on it,
Spatial position is relatively fixed in whole device.
6. surface wave field according to claim 1 enhances tunable total internal reflection optical excitation apparatus, which is characterized in that
The air gap between the sample to be measured and optics and spectral measurement system is not less than 1 micron.
7. surface wave field according to claim 1 enhances tunable total internal reflection optical excitation apparatus, which is characterized in that
The optics and spectral measurement system, photoelectric conversion mechanism and spectral measurement mechanism including luminous intensity measurement are glimmering for carrying out
Light spectrum, absorption spectrum and raman spectroscopy measurement and relevant data acquisition and processing.
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| DE102017204325A1 (en) | 2017-03-15 | 2018-09-20 | Carl Zeiss Microscopy Gmbh | Arrangement, microscope and method for TIRF microscopy |
| CN107356566B (en) * | 2017-03-30 | 2019-07-30 | 浙江大学 | The positioning of wide field three-dimensional super-resolution and imaging method and device |
| US10883820B2 (en) * | 2017-11-13 | 2021-01-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus and method for metrology |
| JP7264134B2 (en) * | 2020-08-26 | 2023-04-25 | 横河電機株式会社 | Spectroscopic analyzer, optical system, and method |
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