CN106338615B - Silicon micro mechanical binary channels recycles streaming Z axis angular-rate sensor - Google Patents
Silicon micro mechanical binary channels recycles streaming Z axis angular-rate sensor Download PDFInfo
- Publication number
- CN106338615B CN106338615B CN201510415600.9A CN201510415600A CN106338615B CN 106338615 B CN106338615 B CN 106338615B CN 201510415600 A CN201510415600 A CN 201510415600A CN 106338615 B CN106338615 B CN 106338615B
- Authority
- CN
- China
- Prior art keywords
- silicon plate
- pet
- streaming
- binary channels
- axis angular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
This application discloses a kind of silicon micro mechanical binary channels to recycle streaming Z axis angular-rate sensor, the airflow type angular velocity transducer includes binary channels circulation streaming Z axis angular speed chip, PCB circuit board, pedestal, shell, buffered silica gel piece and lead, and binary channels circulation streaming Z axis angular speed chip includes PET upper cover, upper silicon plate, lower silicon plate, PET bottom cover and piezoelectric ceramics circle oscillator；On piezoelectric ceramics circle oscillator insertion PET on lid；Fluidic networks are provided on upper silicon plate；The parallel hot line that fluidic networks are located at the sensitive room of two jet streams with two pairs is provided on lower silicon plate；PET upper cover, upper silicon plate, lower silicon plate and PET bottom cover, which are successively bonded, constitutes the angular speed chip.The hot line of the airflow type angular velocity transducer of the application is independently arranged at the sensitive interior of two different jet streams and exchanges respectively with two jet stream sensitive bodies progress heats, independently of one another, it is independent of each other, not only sensitive angular speed stability is good, but also two pairs of hot lines are connected respectively, and hot wire is big, in the case where passing to identical hot line current conditions, angular speed output voltage is big, practical than the high sensitivity of the airflow type angular velocity transducer of common one-jet sensitivity room.
Description
Technical field
The invention belongs to detect the technical field of movable body angular speed attitude parameter using coriolis force deflected jet sensitive body,
Streaming Z axis angular-rate sensor is recycled more particularly, to a kind of silicon micro mechanical binary channels.
Background technique
Currently, using Micromachined Vibrated Gyroscope as the Mini-size angular velocity sensor of representative, angular speed chip is by different structure
Vibration component constitute, be not only easily broken off or damage under slightly higher acceleration shock, and in the production process in order to reduce resistance
Buddhist nun needs Vacuum Package to make its complex process, and fatigue damage can be generated when causing to work long hours.In contrast, air-flowing type angle
Velocity sensor does not need vibration component, and structure is simple, and other angular speed such as high overload, service life be long and at low cost can be born by, which having, passes
Sensor is difficult to the advantages of matching in excellence or beauty, and application range is more extensive.The highly sensitive Piezoelectric Jet that Chinese patent 89105999.7 proposes
Angular-rate sensor, it is by the shell of Sensitive Apparatus, nozzle body, sensing element, piezoelectric pump, pump seat, disc spring, locking nut and outer
Portion's circuit system and mechanical system composition, the sensing element of this angular-rate sensor are with materials such as copper, aluminium or stainless steels
Using tradition machinery processing and fabricating, sensing element volume is big, and power is high, it is impossible to be used in miniature base attitude measurement and control neck
Domain, its hot line are manual weldings, it is difficult to ensure that the depth of parallelism and verticality of hot line, therefore cross-coupling is big, consistency is poor, very
Hardly possible batch production, it is at high cost.Silicon wafer to manufacture fluidic networks are used in the prior art, generally use MEMS technology in silicon wafer
Surface corrosion goes out airflow channel, and since the thickness of silicon wafer only has 300 μm or so, fluidic networks depth is generally not as good as silicon wafer thickness
The half of degree, therefore the scale very little of fluidic networks, gas capacity is small, and few with the heat exchange of hot line, angular-rate sensor is sensitive
Degree meeting very little, can not be practical；It realizes that piezoelectric pump drive gas flow is dynamic on silicon wafer and usually effectively becomes piezoelectric pump vibrator
Shape area is corresponding with the sectional area of airflow channel, to make the deformation direction (direction of vibration) of piezoelectric pump vibrator along silicon wafer
Transverse direction (with the sectional area direction that silicon wafer surface is vertical) is consistent with the length direction of airflow channel, therefore piezoelectric pump vibrator
Size be often below 1 × 1mm, this is difficult to realize bonding in actual process, simultaneously because piezoelectric pump vibrator is undersized, drives
Take offence body ability it is weak, air velocity is small, and angular-rate sensor sensitivity is small.
Therefore, the above problem how to be overcome to become the technical problem of those skilled in the art's urgent need to resolve.
Summary of the invention
The problem of for background technique, the purpose of the present invention is to provide a kind of silicon micro mechanical binary channels circulations
(Z axis angular-rate sensor refers to angular speed sensitive axes perpendicular to the angle speed of angular speed chip surface to streaming Z axis angular-rate sensor
Spend sensor), which drives binary channels recycle stream with a piezoelectric ceramics circle oscillator, not only structure letter
Single, the service life is long, low in energy consumption, while realizing the steering of piezoelectric ceramics circle oscillator deformation direction and fluidic networks plane, piezoelectricity pottery
The area of porcelain circle oscillator is big, and driving capability is strong, and effluxvelocity is big, the high sensitivity of airflow type angular velocity transducer；Hot line is independent
Be arranged in two different jet streams it is sensitive it is indoor carry out heats with two jet stream sensitive bodies respectively and exchange, independently of one another, mutual not shadow
It rings, not only sensitive angular speed stability is good, but also two pairs of hot lines are connected respectively, and hot wire is big, is passing to identical hot line electricity
In the case of stream, angular speed output voltage is big, and transducer sensitivity is high.
The purpose of the present invention is achieved through the following technical solutions:
A kind of silicon micro mechanical binary channels circulation streaming Z axis angular-rate sensor, the airflow type angular velocity transducer is by double
Channel cycle streaming Z axis angular speed chip, PCB circuit board, pedestal, shell, buffered silica gel piece, lead composition, the buffering
Silica gel piece, binary channels recycle streaming Z axis angular speed chip and realize that the PCB circuit board of electrical connection is successively mounted in pedestal with it
On, it buckles shell sealing, power supply and signal and is drawn through the filling lead of glass on pedestal, the binary channels recycles streaming Z axis angle
Speed chip includes PET cover board, silicon plate and PET pedestal；Wherein,
The piezoelectric ceramics circle oscillator is embedded on the PET on lid；Fluidic networks are provided on the upper silicon plate；It is described
Fluidic networks and hot line are provided on lower silicon plate；The PET upper cover, upper silicon plate, lower silicon plate and PET bottom cover, which are successively bonded, constitutes institute
State angular speed chip.
Further, the center of the PET upper cover opens up a pulsator slot, opens up a pulsator at the center of the pump slot
Hole, the edge for pumping slot is step that a height is PET upper cover thickness 1/2, and piezoelectric ceramics circle oscillator is bonded in described
On rank.
Further, the upper silicon plate opens up geomery circle identical with round pumping holes with the round pumping holes corresponding position
Cylindricality pump chamber, be separated by the pump chamber circumference half of perimeter be open to be formed two sections be inverted trapezoidal gas vent, the row
The end of stomata is two exhaust outlets；One circular ring shape exhaust chamber is set outside the exhaust outlet；During the center of circle with the exhaust chamber is
The heart, radial alternating uniformly opens up two groups of totally four slots on the circumference of circular ring shape exhaust chamber；Wherein, two rows
Stomata corresponds to two afflux grooves；Adjacent with two afflux grooves is two upper sensitive jet holes, the upper sensitive jet hole
Beginning communicated with the exhaust chamber；The end of the afflux groove and the end of the upper sensitive jet hole are by circular ring shape backflash
Connection.
Further, the afflux groove does inverted trapezoidal transition with the exhaust chamber place of communicating, corresponding with the exhaust outlet, described
The width of the end of afflux groove is greater than the width at afflux groove beginning；The width of the upper sensitive jet hole is the 4 of the afflux groove
Times, end extends to form two rectangle nozzle bores to the circular ring shape backflash, and the length of the rectangle nozzle bore is
The 1/11 of upper sensitivity jet stream hole length.
Further, opened up on the lower silicon plate corresponded to each other with two on the upper silicon plate upper jet stream sensitivity hole sites,
Two pairs of parallel hot lines are arranged on the surface of lower silicon plate in sensitive jet hole under size shape identical two, and described two pairs flat
Row hot line is used for sensitivity z directional angular velocity；The gas compartment formed after the upper silicon plate and lower silicon plate bonding is fluidic networks,
Closed fluidic networks are constituted after being bonded with the PET upper cover and the PET bottom cover；The pump chamber, pumping holes and pump slot constitute pump
Room.
Further, the fluidic networks by the pump chamber, two exhaust outlets, exhaust chamber, two afflux grooves beginning into
Sensitive jet hole composition under mouth, circular ring shape backflash, the jet hole of two nozzle bore ends, two upper sensitive jet holes and two
Two jet stream sensitivity room A, B and the jet stream sensitivity room A, B end export mixes.
Further, two pairs of sensitive z directional angular velocity parallel hot lines are separately positioned under the middle jet stream sensitive room A, B
The surface of silicon plate, and it is parallel with the axis of jet stream sensitivity room A, B, and the length of hot line is the half of jet stream sensitivity room A, B length.
Further, the driving voltage of the piezoelectric ceramics circle oscillator is by the Piezoelectric pump driving circuit in the PCB circuit board
It provides.
Further, the hot line is made of the tungsten of high-temperature coefficient, SiO2 and Si, the edge cover of the lower silicon plate
Electrode, the PET upper cover and upper silicon plate open corresponding opening to expose the electrode of lower silicon plate, convenient for realizing with PCB circuit board
Electrical connection.
Further, the PET upper cover and PET bottom cover utilize PET thin plate to use high-precision laser excision forming processing technology
Production, the upper silicon plate and lower silicon plate are made of the MEMS technology of standard.
Further, the diameter of the piezoelectric ceramics circle oscillator is slightly less than the diameter of the pump slot, convenient for being bonded in described
On rank.
The present invention has following positive technical effect:
(1) hot line is independently arranged at the sensitive interior of two different jet streams and carries out heat friendships with two jet stream sensitive bodies respectively
It changes, independently of one another, is independent of each other, not only sensitive angular speed stability is good, but also two pairs of hot lines are connected respectively, hot wire
Greatly, in the case where passing to identical hot line current conditions, angular speed output voltage is big, and transducer sensitivity is high.
(2) binary channels recycle stream being driven with a piezoelectric ceramics circle oscillator, be not only simple in structure, the service life is long, and it is low in energy consumption, together
When realize piezoelectric ceramics circle oscillator deformation direction and fluidic networks plane steering, piezoelectric ceramics circle oscillator area it is big, drive
Kinetic force is strong, and effluxvelocity is big, the high sensitivity of airflow type angular velocity transducer.
(3) photoetching technique used can guarantee the orthogonality and verticality of hot line in angular speed chip, and cross-coupling is small, one
Cause property is good.
(4) bonding of silicon plate is fluidic networks, the creep that mismatch of thermal stress does not generate, air-flowing type angular speed sensing up and down
The long-time stability of device are good.
Detailed description of the invention
Fig. 1 is the perspective view of the application；
Fig. 2 is that the binary channels of the application recycles the perspective view of streaming Z axis angular speed chip fission state；
Fig. 3 is the perspective view of the PET upper cover of the application；
Fig. 4 is the perspective view of the upper silicon plate of the application；
Fig. 5 is the perspective view of the lower silicon plate of the application；
Fig. 6 is the schematic diagram of the signal processing circuit of the application；
Fig. 7 is the schematic diagram of the Wheatstone bridge of the application；
Fig. 8 is that the silicon micro mechanical binary channels of the application recycles the sensitivity curve of streaming Z axis angular-rate sensor.
Figure label explanation: 1- binary channels recycles streaming Z axis angular speed chip；2-PCB circuit board；3- pedestal；4- shell；
5- buffered silica gel piece；6- lead；7-PET upper cover；The upper silicon plate of 8-；Silicon plate under 9-；10-PET bottom cover；11- piezoelectric ceramics justifies oscillator；
12- pumps slot；13- pumping holes；14- step；15- pump chamber；16a, 16b- gas vent；17a, 17b- exhaust outlet；18- exhaust chamber；19a,
Two afflux grooves of 19b-；The upper sensitive jet hole of 20a, 20b-；21a, 21b- nozzle bore；22- backflash；Sensitivity is penetrated under 23a, 23b-
Discharge orifice；24a and 24b, 25a are with 25b- two to parallel hot line；26 pump chambers；27a, 27b- import；28a, 28b- jet hole；A, B- is penetrated
Flow sensitive room；The outlet 29a, 29b-；30- Piezoelectric pump driving circuit；31- Wheatstone bridge；32a, 32b- Wheatstone bridge 31
Two arms.
Specific embodiment
In the following, being made a more thorough explanation with reference to attached drawing to the present invention, shown in the drawings of exemplary implementation of the invention
Example.However, the present invention can be presented as a variety of different forms, it is not construed as the exemplary implementation for being confined to describe here
Example.And these embodiments are to provide, to keep the present invention full and complete, and it will fully convey the scope of the invention to this
The those of ordinary skill in field.
The spatially relative terms such as "upper", "lower" " left side " " right side " can be used herein for ease of explanation, for saying
Relationship of the elements or features relative to another elements or features shown in bright figure.It should be understood that in addition in figure
Except the orientation shown, spatial terminology is intended to include the different direction of device in use or operation.For example, if in figure
Device is squeezed, and is stated as being located at other elements or the element of feature "lower" will be located into other elements or feature "upper".Cause
This, exemplary term "lower" may include both upper and lower orientation.Device, which can be positioned in other ways, (to be rotated by 90 ° or position
In other orientation), it can be interpreted accordingly used herein of the opposite explanation in space.
As shown in Figure 1, silicon micro mechanical binary channels circulation streaming Z axis angular-rate sensor of the present invention recycles streaming by binary channels
Z axis angular speed chip 1, PCB circuit board 2, pedestal 3, shell 4, buffered silica gel piece 5, lead 6 form, buffered silica gel piece 5, bilateral
Road circulation streaming Z axis angular speed chip 1 and the PCB circuit board 2 for realizing electrical connection with it are buckled outer successively mounted on pedestal 3
Shell 4 seals, and power supply and signal are drawn through the filling lead 6 of glass on pedestal 3.Binary channels recycles streaming Z axis angular speed chip 1 and wraps
Include PET (polyethylene terephthalate) upper cover 7, upper silicon plate 8, lower silicon plate 9, PET bottom cover 10 and piezoelectric ceramics circle oscillator 11
(as shown in Figure 2).
Binary channels circulation streaming Z axis angular speed chip 1 justifies the PET upper cover 7 of oscillator 11 by insertion piezoelectric ceramics, has fluidic network
Four layers of square plate bonding such as the upper silicon plate 8 of network, the lower silicon plate 9 for having fluidic networks and surface setting hot line and PET bottom cover 10
It forms.
As shown in figure 3, the pulsator slot 12 that diameter is plate side length 1/2 is opened at the center of PET upper cover 7, in pump slot 12
The heart opens a round pumping holes 13, and diameter is pump 12 radius of slot 1/2.It is a height is PET upper cover thickness 1/4 at the edge of pump slot 12
Step 14, by piezoelectric ceramics circle oscillator 11 bonding on this step 14.
As shown in figure 4, the same cylindrical hole of a geomery is opened in upper 7 circular hole corresponding position of silicon plate 8 and PET upper cover is
Pump chamber 15, be separated by 15 circumference of pump chamber half of perimeter be open to be formed two sections be inverted trapezoidal gas vent 16a, 16b, end
End is exhaust outlet 17a, 17b.Exhaust outlet 17a, 17b and 18 connection of a circular ring shape exhaust chamber.Centered on the center of circle of exhaust chamber 18,
Radial alternating uniformly opens two groups of totally four slots on the circumference of circular ring shape exhaust chamber 18.Wherein, two gas vents
16a, 16b correspond to two afflux grooves 19a, 19b.That adjacent with afflux groove 19a, 19b is two above sensitivity jet hole 20a, 20b,
It is communicated in its beginning and exhaust chamber 18.Inverted trapezoidal transition is done with 18 place of communicating of exhaust chamber in afflux groove 19a, 19b, with exhaust outlet pair
It answers, the width of the end of afflux groove 19a, 19b is slightly larger than its beginning.The width of upper sensitivity jet hole 20a, 20b are the 4 of afflux groove
Times or so, the end of upper sensitivity jet hole 20a, 20b extend to form rectangle nozzle bore 21a, 21b, and the length is upper sensitivities to penetrate
The 1/11 of discharge orifice 20a, 20b.The end of afflux groove 19a, 19b and the end of sensitive jet hole 17a, 17b are by circular ring shape backflash
22 connection, and alternating with each other symmetrically be distributed on backflash 22.As shown in figure 5, lower silicon plate 9 opens two with upper silicon plate 8
Sensitive jet hole 23a, 23b under a upper sensitivity position jet hole 20a, 20b mutual corresponding size shape identical two,
On the surface of lower silicon plate 9, two couples of parallel hot line 24a and 24b, 25a and 25b are set.Upper silicon plate 8 and lower silicon plate 9 are formed after being bonded
The gas compartment be fluidic networks, in addition PET upper cover 7 and PET bottom cover 10 are to constitute closed fluidic networks.Three cylinders
Pump chamber 15, pumping holes 13 and the pump slot 12 of composition constitute pump chamber 26.Fluidic networks are by justifying the mutual corresponding pump of oscillator with piezoelectric ceramics
Room 26, gas vent tail end venting mouth 17a, 17b, exhaust chamber 18, afflux groove 19a, 19b beginning import 27a, 27b, circular ring shape
Backflash 23, jet hole 28a, 28b of the end nozzle bore 22a, 22b, upper sensitivity jet hole 20a, 20b and lower sensitive jet hole
Outlet 29a, 29b of the end of jet stream sensitivity room A, B and jet stream sensitivity room A, B of 24a, 24b composition are constituted.
The parallel hot line 24a and 24b of two pairs of sensitive z directional angular velocity, 25a and 25b are separately positioned on jet stream sensitive room A, B
The surface (surface of the direction z perpendicular to lower silicon plate 9) of the lower silicon plate 9 of middle, and it is parallel with the axis of jet stream sensitivity room A, B,
The length of two couples of parallel hot line 24a and 24b, 25a and 25b are the half of sensitive room A, B length of jet stream.Piezoelectric ceramics justifies oscillator 11
Driving voltage provided by the Piezoelectric pump driving circuit 31 on pcb circuit board 2, followed under the action of alternating voltage along binary channels
1 Deformation in thickness of circulation type Z axis angular speed chip, drive gas flow are dynamic, due to the section import 28a, 28b be less than outlet 30a,
The section 30b replaces the effect of check valve using the air resistance generated between uniform pressure change condition lower inlet and outlet,
Realize gas by import 27a, 27b into, outlet 29a, 29b go out directed flow.Air-flow central plane and hot line are non-coplanar, place
Plane is at a distance of several hundred microns.Hot line 24a and 24b, 25a and 25b are made of the tungsten of high-temperature coefficient, SiO2 and Si, lower silicon
The edge cover electrode of plate 9, PET upper cover 7 and upper silicon plate 8 open corresponding mouth to expose the electrode of lower silicon plate 9, are convenient for and pcb
Circuit board 2 realizes electrical connection.There is signal processing circuit in pcb circuit board 2, as shown in Figure 6,7, mainly power supply, piezoelectric pump
Driving circuit 30 and Wheatstone bridge 31.The one of the Wheatstone bridge 31 of hot line 24a, 25a sensitivity z directional angular velocity in series
Another arm 32b of a arm 32a, hot line 24b and 25b Wheatstone bridge 31 in series.When there is turning rate input, by spraying
Mouth spray jet stream deflect, with corresponding hot line occur heat exchange, make hot line resistance value change, thus electric bridge lose it is flat
Weighing apparatus exports the voltage signal V directly proportional to angular speedZ。
The advantages of the application, is:
(1) hot line is independently arranged at the sensitive interior of two different jet streams and carries out heat friendships with two jet stream sensitive bodies respectively
It changes, independently of one another, is independent of each other, angular speed stability is good.
(2) present invention is planar layered structures, wherein silicon plate needs to use the MEMS technology of standard, Qi Tashang above and below only
Lower two layers can be completed with the processing of high-precision laser excision forming, therefore being easy to only can using only a mask
To realize angular speed chip structure, therefore simple process, consistency is good, convenient for introducing microcomputer embedded system (single-chip microcontroller), into
Trip temperature compensation and nonlinearity compensation, not only can be improved the performance of angular-rate sensor device, but also can realize batch production.
(3) piezoelectric ceramics circle oscillators drive the air-flow flowing in two channels, realize piezoelectric ceramics circle oscillator deformation
The steering in direction and fluidic networks plane, that is, realizing piezoelectric vibrator can be arranged in silicon wafer plane, rather than in silicon wafer
Side bonds piezoelectric ceramics justifies oscillator, therefore the area of piezoelectric ceramics circle oscillator can be made very big, and driving capability is strong, jet velocity
Degree is big, the high sensitivity of airflow type angular velocity transducer.
Preferably, the PET upper cover of the binary channels circulation streaming Z axis angular speed chip of the application and PET bottom cover are thin using PET
Plate uses the MEMS technology system of standard using mature high-precision laser excision forming processing technology production, upper silicon plate, lower silicon plate
Make.Its technique is as follows:
(1) a thermal oxide layer SiO2 is respectively formed up and down as insulation in the lower silicon plate 9 (substrate) that a thickness is 200 μm
Layer.
(2) silicon wafer upper surface sputters the metal layer for having high TCR (temperature coefficient) of about 0.3 μ m-thick, such as tungsten, with photoetching skill
Two jet stream sensitivity room A, the B of formation and two couples of hanging hot line 24a and 24b, 25a and 25b of art in lower silicon slice.
(3) PET upper cover 7 and PET bottom cover 10 can pass through high-precision laser excision forming on the PET with a thickness of 1.8mm
It inputs designed respective graphical to be process, the ledge surface at the PET bottom cover back side sputters one layer of metal electrode, pastes piezoelectricity pottery
Porcelain justifies oscillator 11.
(4) upper silicon plate 8 is Nian Jie with 7 plate of PET upper cover, fluidic networks are formed on upper silicon plate 8 with deep reaction ion etching.
(5) back side of the inversion of PET bottom cover 10 and lower silicon plate 9 that will have piezoelectric ceramics circle oscillator 11 is bonded.
(6) the upper silicon plate 8 containing PET upper cover 7 and lower silicon plate 9 are bonded, and lower silicon plate 9 and PET bottom cover 10 is bonded shape
At angular speed chip.
The advantages of above-mentioned processing method, is:
(1) photoetching technique that hot line uses can guarantee the orthogonality and verticality of hot line in angular speed chip, cross-coupling
It is small.
(2) the thickness build-up fluidic networks of two silicon wafers are taken full advantage of, PET upper cover and bottom cover only serve closing aerodynamic-laid web
The effect of network.Two wafer bondings reduce different materials mismatch and cause the long-term unbalance of thermal stress and release, without thermal stress
The creep that generates of mismatch, the long-time stability of airflow type angular velocity transducer are good.The angular-rate sensor of this structure both filled
Divide and the advantages of silicon wafer can make hot line is utilized, and considers cheap, the workability of PET production airflow channel simultaneously, because
The stability of this angular-rate sensor is good, at low cost, and the Mini-size angular velocity sensor of this layer structure is complete silicon structure air-flow
The 1/10 of formula angular-rate sensor cost.
(3) angular-rate sensor utilizes standard body silicon MEMS technology and mature minitype piezoelectric pump manufacturing technology, hot line
(thermistor) is parallel with jet-core region axis, and airflow channel and hot line can make on a silicon wafer, can pass multiaxis angular speed
Sensor is compatible and integrates on a single chip, suitable for mass production, at low cost, is conducive to be commercialized early.
The sensitive mechanism of hot line follows energy exchange principle, when the direction difference of input angular velocity, the direction of deflection
Difference can thus recognize the direction of angular velocity so that the influence to two hot lines is also different.
Assuming that effect of the air-flow by coriolis force, Corioli's acceleration is expressed as when having along z-axis angular speed acting sensor
In formula,ωzWithRespectively indicate the stream from corresponding nozzle to hot line 24a and 24b (hot line 25a and 25b)
Fast vector, additional angular velocity vector and Corioli's acceleration vector along z-axis.The offset delta of air flow streamzIt is to the double of formula (1)
Multiple integral
In formula, LzAnd VzJet hole is respectively indicated to the distance of hot line 24a and 24b (hot line 25a and 25b), air-flow in LzSection
Average speed.
Sensitivity relation formula:
By to the hot transport phenomenon between analysis hot line and stratiform jet stream, available airflow type angular velocity transducer spirit
The performance of sensitivity.The variation of piece hot wire and the relationship of flow velocity are as follows:
In formula, l is the length of hot line (thermistor).
Speed increment Δ V and angular velocity omegaiRelational expression:
Since the offset very little of air-flow, and hot line is arranged on the linear region of velocity flow profile, and speed increases on hot line
Measure Δ V and angular velocity omegaiCaused offset deltaωiProportional, thus it also with actual angular speed ωiIt is proportional, it obtains:
In formula, KiFor a constant, by hot line RiVelocity flow profile gradient determine；LiFor the distance from jet hole to hot line,
ViIt is air-flow from jet hole to the mean flow rate of hot line section.
If hot line electric current is I, it is the output voltage that (4) substitution formula (3) can obtain sensor
In formula, l is the length of thermistor, and λ is the thermal coefficient of gas, and α is the temperature-coefficient of electrical resistance of hot line, and I is heat
Line electrical current, RTH0The initial resistivity value of hot line, Nu are nusselt number (Nusselt Number) when not add angular speed, and V is
Air-flow flows to the initial flow rate of hot line from jet hole, and n is empirical, and between 0.2 to 0.33, Δ V is hot line overdraught speed
Increment.
The sensitivity of angular-rate sensor can be calculated according to formula (5), Fig. 8 provides present invention simulation susceptibility, Cong Tuzhong
It can be seen that sensitivity S Fz=12.0 μ V/ °/s.
The advantages of aforesaid way, is:
Two jet stream sensitivity rooms are set, hot line is connected respectively, and hot wire is big, in the case where passing to identical hot line current conditions,
Angular speed output voltage is big, than 4 times of high sensitivity of the airflow type angular velocity transducer of common one-jet sensitivity room.
Claims (9)
1. a kind of silicon micro mechanical binary channels recycles streaming Z axis angular-rate sensor, the Z axis angular-rate sensor is followed by binary channels
Circulation type Z axis angular speed chip, PCB circuit board, pedestal, shell, buffered silica gel piece, lead composition, the buffered silica gel piece,
Binary channels recycles streaming Z axis angular speed chip and realizes that the PCB circuit board of electrical connection is successively mounted on pedestal with it, buckles outer
Shell sealing, power supply and signal are drawn through the filling lead of glass on pedestal, and the binary channels recycles streaming Z axis angular speed chip packet
Include PET upper cover, upper silicon plate, lower silicon plate, PET bottom cover and piezoelectric ceramics circle oscillator；Wherein,
The piezoelectric ceramics circle oscillator is embedded on the PET on lid；Fluidic networks are provided on the upper silicon plate；The lower silicon
Fluidic networks and hot line are provided on plate；The PET upper cover, upper silicon plate, lower silicon plate and PET bottom cover, which are successively bonded, constitutes the angle
Speed chip；
The center of the PET upper cover opens up a pulsator slot, opens up a round pumping holes at the center of the pump slot, pumps the edge of slot
It is the step of PET upper cover thickness 1/4 for a height, piezoelectric ceramics circle oscillator is bonded on the step；
The upper silicon plate opens up a geomery cylindrical pump chamber identical with round pumping holes with the round pumping holes corresponding position,
Be separated by the pump chamber circumference half of perimeter be open to be formed two sections be inverted trapezoidal gas vent, the end of the gas vent is
Two exhaust outlets；One circular ring shape exhaust chamber is set outside the exhaust outlet；Centered on the center of circle of the exhaust chamber, arranged in circular ring shape
Radial alternating uniformly opens up two groups of totally four slots on the circumference of gas chamber；Wherein, two gas vents are two corresponding
Afflux groove；Adjacent with two afflux grooves is two upper sensitive jet holes, the beginning of the upper sensitive jet hole with it is described
Exhaust chamber communicates；The end of the afflux groove is connected to the end of the upper sensitive jet hole by circular ring shape backflash.
2. silicon micro mechanical binary channels according to claim 1 recycles streaming Z axis angular-rate sensor, which is characterized in that institute
It states afflux groove and does inverted trapezoidal transition with the exhaust chamber place of communicating, the width of the end of the afflux groove corresponding with the exhaust outlet
Degree is greater than the width at afflux groove beginning；The width of the upper sensitive jet hole is 4 times of the afflux groove, upper sensitivity jet hole
End extends to form two rectangle nozzle bores to the circular ring shape backflash, and the length of the rectangle nozzle bore is upper sensitivity
The 1/11 of jet stream hole length.
3. silicon micro mechanical binary channels according to claim 1 recycles streaming Z axis angular-rate sensor, which is characterized in that institute
State opened up on lower silicon plate corresponded to each other with two on the upper silicon plate upper sensitive jet stream hole sites, size shape it is identical
Two pairs of parallel hot lines are arranged on the surface of lower silicon plate in sensitive jet hole under two, and described two pairs parallel hot lines are used for the sensitivity direction z
Angular speed；The upper silicon plate and lower silicon plate bonding after formed the gas compartment be fluidic networks, be bonded with the PET upper cover and
Closed fluidic networks are constituted after the PET bottom cover；The pump chamber, pumping holes and pump slot constitute pump chamber.
4. silicon micro mechanical binary channels according to claim 3 recycles streaming Z axis angular-rate sensor, which is characterized in that institute
Fluidic networks are stated by the pump chamber, two exhaust outlets, exhaust chamber, the import at the beginning of two afflux grooves, circular ring shape backflash, two
Two jet stream sensitivity room A of sensitive jet hole composition under the jet hole of a nozzle bore end, two upper sensitive jet holes and two,
The export mixes of the end of B and the jet stream sensitivity room A, B.
5. silicon micro mechanical binary channels according to claim 4 recycles streaming Z axis angular-rate sensor, which is characterized in that quick
Sense z directional angular velocity two pairs of parallel hot lines be separately positioned on the middle jet stream sensitive room A, B lower silicon plate surface, and with penetrate
The axis for flowing sensitive room A, B is parallel, and the length of hot line is the half of jet stream sensitivity room A, B length.
6. silicon micro mechanical binary channels according to claim 1 recycles streaming Z axis angular-rate sensor, which is characterized in that institute
The driving voltage for stating piezoelectric ceramics circle oscillator is provided by the Piezoelectric pump driving circuit in the PCB circuit board.
7. silicon micro mechanical binary channels according to claim 1 recycles streaming Z axis angular-rate sensor, which is characterized in that institute
State tungsten, SiO of the hot line by high-temperature coefficient2It is constituted with Si, the edge cover electrode of the lower silicon plate, the PET upper cover
Corresponding opening is opened to expose the electrode of lower silicon plate with upper silicon plate, is electrically connected convenient for realizing with PCB circuit board.
8. silicon micro mechanical binary channels according to claim 1 recycles streaming Z axis angular-rate sensor, which is characterized in that institute
State PET upper cover and PET bottom cover and made using PET thin plate of high-precision laser excision forming processing technology, the upper silicon plate with
Lower silicon plate is made of the MEMS technology of standard.
9. silicon micro mechanical binary channels according to claim 1 recycles streaming Z axis angular-rate sensor, which is characterized in that institute
The diameter for stating piezoelectric ceramics circle oscillator is slightly less than the diameter of the pulsator slot, convenient for being bonded on the step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510415600.9A CN106338615B (en) | 2015-07-16 | 2015-07-16 | Silicon micro mechanical binary channels recycles streaming Z axis angular-rate sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510415600.9A CN106338615B (en) | 2015-07-16 | 2015-07-16 | Silicon micro mechanical binary channels recycles streaming Z axis angular-rate sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106338615A CN106338615A (en) | 2017-01-18 |
| CN106338615B true CN106338615B (en) | 2019-04-30 |
Family
ID=57826101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510415600.9A Expired - Fee Related CN106338615B (en) | 2015-07-16 | 2015-07-16 | Silicon micro mechanical binary channels recycles streaming Z axis angular-rate sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106338615B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101071066A (en) * | 2007-06-01 | 2007-11-14 | 北京沃尔康科技有限责任公司 | Gas pendulum inertia sensor |
| CN102288775A (en) * | 2011-07-05 | 2011-12-21 | 北京信息科技大学 | Airflow type angular velocity transducer |
| CN104457727A (en) * | 2013-09-12 | 2015-03-25 | 北京信息科技大学 | Micromechanical piezoelectric jet gyroscope |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07209319A (en) * | 1994-01-24 | 1995-08-11 | Honda Motor Co Ltd | Gas rate sensor |
| US8148808B2 (en) * | 2007-08-13 | 2012-04-03 | Lv Sensors, Inc. | Partitioning of electronic packages |
| JP2013079868A (en) * | 2011-10-04 | 2013-05-02 | Seiko Epson Corp | Electronic device, manufacturing method thereof, and electronic apparatus |
-
2015
- 2015-07-16 CN CN201510415600.9A patent/CN106338615B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101071066A (en) * | 2007-06-01 | 2007-11-14 | 北京沃尔康科技有限责任公司 | Gas pendulum inertia sensor |
| CN102288775A (en) * | 2011-07-05 | 2011-12-21 | 北京信息科技大学 | Airflow type angular velocity transducer |
| CN104457727A (en) * | 2013-09-12 | 2015-03-25 | 北京信息科技大学 | Micromechanical piezoelectric jet gyroscope |
Non-Patent Citations (2)
| Title |
|---|
| 二维气流式水平姿态传感器的结构和信号处理;朴林华 等;《北京信息科技大学学报》;20111231;第26卷(第6期);第17-20页 |
| 多量程压电射流角速度传感器研究;范茂彦 等;《玉溪师范学院学报》;20040831;第20卷(第8期);第24-27页 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106338615A (en) | 2017-01-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8047074B2 (en) | Humidity sensor and method of manufacturing the same | |
| US8939012B2 (en) | Thermal conductivity detector and gas chromatograph using same | |
| CN101344413A (en) | Flat diaphragm type gas flow sensor and method of producing the same | |
| CN104776951A (en) | Piezoresistive MEMS (micro-electromechanical system) pressure sensor and preparation method thereof | |
| CN105181231A (en) | Pressure sensor of packaging structure and preparation method thereof | |
| CN106052669B (en) | A kind of miniature double pump twin shaft circulating jet gyro | |
| CN106338615B (en) | Silicon micro mechanical binary channels recycles streaming Z axis angular-rate sensor | |
| CN105091876B (en) | A kind of miniature four-way circulation axle silicon jet gyro of streaming three | |
| CN201247082Y (en) | Flat diaphragm type gas flow sensor | |
| CN108254031B (en) | Differential pressure type gas micro-flow sensor and manufacturing method thereof | |
| CN106352864A (en) | Silicon micromechanical four-channel circulation flow type plane double-shaft angular velocity sensor | |
| CN106338614B (en) | Miniature single cycle air-flowing type Z axis PET angular-rate sensor | |
| CN105043372B (en) | The miniature open air-flow gyro of Three Degree Of Freedom | |
| CN105066978B (en) | A kind of miniature single cycle air-flowing type plane double shaft PET angular-rate sensors | |
| Tomonori et al. | A multi axis fluidic inertial sensor | |
| CN214621218U (en) | Full-bridge double-push-pull flow z-axis film gyroscope | |
| US6898981B1 (en) | Device for measuring pressure in two points of a fluid flow | |
| CN104949668A (en) | Miniature three-freedom-degree single-cycle PMMA airflow gyro | |
| CN109655181B (en) | A kind of sensor and preparation method thereof | |
| CN106989741B (en) | A kind of four three axis jet gyros of sensitive structure silicon micro mechanical | |
| CN111623763A (en) | Single heat source micro-mechanical Z-axis film gyroscope | |
| CN209745339U (en) | Gas mass flow sensor and sensor array | |
| CN212082388U (en) | Single heat source micro-mechanical Z-axis film gyroscope | |
| CN212082392U (en) | T-shaped micro-mechanical double-shaft film gyroscope with single heat source | |
| CN214621216U (en) | Four-bridge cross-flow type micromechanical z-axis film gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190430 Termination date: 20200716 |