CN106289634A - A kind of metal shell for pressure sensor package combines - Google Patents
A kind of metal shell for pressure sensor package combines Download PDFInfo
- Publication number
- CN106289634A CN106289634A CN201610702782.2A CN201610702782A CN106289634A CN 106289634 A CN106289634 A CN 106289634A CN 201610702782 A CN201610702782 A CN 201610702782A CN 106289634 A CN106289634 A CN 106289634A
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- CN
- China
- Prior art keywords
- metal shell
- convoluted diaphragm
- pressure sensor
- oil
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/141—Monolithic housings, e.g. molded or one-piece housings
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of metal shell for pressure sensor package to combine, it is characterized in that: include metal shell, convoluted diaphragm, pressure ring, protecting platform, silicone oil passage, annular boss, sealing ring mounting groove, fixing groove is installed, oil-filled cavity, described metal shell top is provided with described annular boss, metal shell outer ring is provided with sealing ring mounting groove, metal shell bottom surface is provided with the fixing groove of installation, oil-filled cavity it is provided with inside metal shell, the outer ring platform base of convoluted diaphragm and the end face seam of annular boss, the outer ring platform end face of convoluted diaphragm and the bottom surface seam of pressure ring, the space that silicone oil channel connection silicone oil cavity and convoluted diaphragm are formed with protecting platform, sealing ring mounting groove is near the top of metal shell, oil-filled cavity bottom surface is unclosed.Present configuration is simple, it is possible to separated with testing medium by the chip of pressure transducer, and dependability is high, can be used for the encapsulation of various silicon piezoresistance type pressure sensor.
Description
Technical field
The invention belongs to electronic devices and components encapsulation technology field, be specifically related to a kind of metal for pressure sensor package
Housing combination.
Background technology
Along with constantly research and the progress of sensor technology, pressure transducer is increasingly used aviation such as and navigates
My god, in the field such as deep-sea detecting, automobile engine and explosion mechanics, these application work under bad environment such as strong acid and strong base ring
The features such as border, ultra-low temperature surroundings, high-pressure environment.Use gas or liquid that the pressure transducer of non-isolated encapsulation measures
Body, it is desirable to they are not have corrosion property, does not therefore result in injury, but this kind of sensor is usual assemblies such as chips
Range is less.Additionally, the pressure transducer of non-isolated encapsulation can be subject to moisture, the parameter of build-up of pressure sensor is compacted
The situation such as change occurs thus reduces the performance of measurement and pressure transducer even can be made to lose efficacy.
Summary of the invention
The technical problem to be solved is to provide a kind of for pressure sensing for above-mentioned the deficiencies in the prior art
The metal shell combination of device encapsulation, its simple in construction, it is possible to the chip of pressure transducer is separated with testing medium, use
Reliability is high.
For realizing above-mentioned technical purpose, the technical scheme that the present invention takes is:
A kind of metal shell for pressure sensor package combines, including metal shell, convoluted diaphragm, pressure ring, protection
Platform, silicone oil passage, annular boss, sealing ring mounting groove, installation fixing groove, oil-filled cavity, described metal shell top sets
Having described annular boss, described metal shell outer ring to be provided with sealing ring mounting groove, described metal shell bottom surface is provided with peace
The fixing groove of dress, is provided with oil-filled cavity, the outer ring platform base of described convoluted diaphragm and convex annular inside described metal shell
The end face seam of platform, the outer ring platform end face of described convoluted diaphragm and the bottom surface seam of pressure ring, described silicone oil channel connection
The space that silicone oil cavity and convoluted diaphragm are formed with protecting platform, described sealing ring mounting groove near the top of metal shell,
Described oil-filled cavity bottom surface is unclosed.
For optimizing technique scheme, the concrete measure taked also includes:
The material of above-mentioned metal shell, pressure ring and convoluted diaphragm all uses 304 rustless steels.
Above-mentioned metal shell is that upper diameter is little, the trapezoidal shape that lower diameter is big.
The bellows-shaped of above-mentioned convoluted diaphragm is in the most profound curve.
Metal shell assembly uses 304 rustless steels, and the corrosive power of anti-silicone oil is strong, cheap and solderability is good, metal
Casing assembly and the TO pedestal seam with pressure chip, the oil-filled cavity that composition seals, it is full of pure silicon in oil-filled cavity
Oil, the power deforming upon generation after convoluted diaphragm is by external force passes to silicone oil, and then lossless for pressure is delivered to by silicone oil
On the surface of pressure chip, the design of platform can be avoided when convoluted diaphragm pressure experienced is increased dramatically, and convoluted diaphragm can
To fall on the surface of platform, it is to avoid collide with and cause damage, it is possible to ensure high sensitivity and the accuracy of life-time service.
Present configuration is simple, it is possible to separated with testing medium by the chip of pressure transducer, and dependability is high,
Can be used for the encapsulation of various silicon piezoresistance type pressure sensor.
Accompanying drawing explanation
Fig. 1 is the topology view of the present invention.
Reference therein is: metal shell 1, pressure ring 2, convoluted diaphragm 3, sealing ring mounting groove 4, install fixing groove 5,
Platform 6, silicone oil passage 7, oil-filled cavity 8.
Detailed description of the invention
Below in conjunction with the accompanying drawings the detailed description of the invention of the present invention is further illustrated:
A kind of metal shell for pressure sensor package combines, wherein: include metal shell 1, convoluted diaphragm 2, pressure
Ring 3, protecting platform 4, silicone oil passage 5, annular boss 6, sealing ring mounting groove 7, installation fixing groove 8, oil-filled cavity 9, described
Metal shell 1 top is provided with described annular boss 6, and described metal shell 1 outer ring is provided with sealing ring mounting groove 7, described
Metal shell 1 bottom surface is provided with the fixing groove 8 of installation, and described metal shell 1 is internal is provided with oil-filled cavity 9, described convoluted diaphragm 2
The end face seam of outer ring platform base and annular boss 6, the outer ring platform end face of described convoluted diaphragm 2 and the end of pressure ring 3
Face seam, described silicone oil passage 7 connects the space of silicone oil cavity 9 and convoluted diaphragm 2 and protecting platform 4 formation, and described is close
Seal installation 7 is near the top of metal shell 1, and described oil-filled cavity 9 bottom surface is unclosed.
In embodiment, the material that the material of metal shell 1, pressure ring 2 and convoluted diaphragm 3 is equal uses 304 rustless steels.
In embodiment, metal shell 1 is that upper diameter is little, the trapezoidal shape that lower diameter is big.
In embodiment, the bellows-shaped of convoluted diaphragm 3 is in the most profound curve.
The size of metal shell, shape can be set according to practical situation, platform and silicone oil cavity size also dependent on
Situation is changed.
Below being only the preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-described embodiment,
All technical schemes belonged under thinking of the present invention belong to protection scope of the present invention.It should be pointed out that, for the art
For those of ordinary skill, some improvements and modifications without departing from the principles of the present invention, should be regarded as the protection of the present invention
Scope.
Claims (4)
1. the metal shell combination for pressure sensor package, it is characterised in that: include metal shell (1), ripple film
Sheet (2), pressure ring (3), protecting platform (4), silicone oil passage (5), annular boss (6), sealing ring mounting groove (7), the fixing groove of installation
(8), oil-filled cavity (9), described metal shell (1) top is provided with described annular boss (6), described metal shell (1)
Outer ring is provided with sealing ring mounting groove (7), and described metal shell (1) bottom surface is provided with the fixing groove (8) of installation, described metal shell
(1) the internal oil-filled cavity (9) that is provided with, the outer ring platform base of described convoluted diaphragm (2) welds with the end face of annular boss (6)
Close, the outer ring platform end face of described convoluted diaphragm (2) and the bottom surface seam of pressure ring (3), described silicone oil passage (7) connection silicon
The space that oil cavity (9) and convoluted diaphragm (2) are formed with protecting platform (4), described sealing ring mounting groove (7) is outside metal
The top of shell (1), described oil-filled cavity (9) bottom surface is unclosed.
A kind of metal shell for pressure sensor package the most according to claim 1 combines, it is characterised in that: described
The equal material of the material of metal shell (1), pressure ring (2) and convoluted diaphragm (3) use 304 rustless steels.
A kind of metal shell for pressure sensor package the most according to claim 1 combines, it is characterised in that: described
Metal shell (1) be that upper diameter is little, the trapezoidal shape that lower diameter is big.
A kind of metal shell for pressure sensor package the most according to claim 1 combines, it is characterised in that: described
The bellows-shaped of convoluted diaphragm (3) in the most profound curve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610702782.2A CN106289634A (en) | 2016-08-23 | 2016-08-23 | A kind of metal shell for pressure sensor package combines |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610702782.2A CN106289634A (en) | 2016-08-23 | 2016-08-23 | A kind of metal shell for pressure sensor package combines |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106289634A true CN106289634A (en) | 2017-01-04 |
Family
ID=57662155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610702782.2A Pending CN106289634A (en) | 2016-08-23 | 2016-08-23 | A kind of metal shell for pressure sensor package combines |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106289634A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107655621A (en) * | 2017-11-16 | 2018-02-02 | 佛山市川东磁电股份有限公司 | A kind of pressure sensor waterproof case |
| CN108387288A (en) * | 2017-02-03 | 2018-08-10 | 横河电机株式会社 | Water-level gauge, hydraulic pressure sensor device and water level measurement system |
| CN109855789A (en) * | 2019-01-10 | 2019-06-07 | 北京机械设备研究所 | It is a kind of for monitoring the sensor of underwater small aircraft surface pressing |
| CN111492217A (en) * | 2018-05-17 | 2020-08-04 | 罗斯蒙特公司 | Measuring element and measuring device comprising such a measuring element |
| CN112304474A (en) * | 2019-12-04 | 2021-02-02 | 武汉飞恩微电子有限公司 | Pressure sensor |
| US11371899B2 (en) | 2018-05-17 | 2022-06-28 | Rosemount Inc. | Measuring element with an extended permeation resistant layer |
| CN115406577A (en) * | 2022-08-26 | 2022-11-29 | 南京高华科技股份有限公司 | MEMS pressure sensor packaging structure and preparation method thereof |
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| CN2886532Y (en) * | 2005-06-16 | 2007-04-04 | 天水华天微电子有限公司 | Micro-pressure anti-corrosion pressure transducer |
| CN2938053Y (en) * | 2006-06-21 | 2007-08-22 | 宝鸡恒通电子有限公司 | Silicon pressure sensor |
| CN101226092A (en) * | 2008-01-16 | 2008-07-23 | 西安维纳信息测控有限公司 | SOI complete silicon structure silicone-oil-filling high-temperature-resistance pressure sensor |
| CN202066613U (en) * | 2011-05-30 | 2011-12-07 | 中国电子科技集团公司第四十九研究所 | Oil-filled temperature pressure combined sensor |
| US20130069181A1 (en) * | 2010-04-21 | 2013-03-21 | Denso Corporation | Encapsulation structure for silicon pressure sensor |
| CN203595580U (en) * | 2013-12-04 | 2014-05-14 | 淄博纳泰微系统传感有限公司 | Dedicated housing of diffusion silicon pressure sensor |
| CN204988611U (en) * | 2015-07-10 | 2016-01-20 | 四川奇胜科技有限公司 | High temperature resistant pressure sensor's core |
| CN205352584U (en) * | 2016-01-20 | 2016-06-29 | 浙江华西电子有限公司 | Pressure sensor of PCB encapsulation |
-
2016
- 2016-08-23 CN CN201610702782.2A patent/CN106289634A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2886532Y (en) * | 2005-06-16 | 2007-04-04 | 天水华天微电子有限公司 | Micro-pressure anti-corrosion pressure transducer |
| CN2938053Y (en) * | 2006-06-21 | 2007-08-22 | 宝鸡恒通电子有限公司 | Silicon pressure sensor |
| CN101226092A (en) * | 2008-01-16 | 2008-07-23 | 西安维纳信息测控有限公司 | SOI complete silicon structure silicone-oil-filling high-temperature-resistance pressure sensor |
| US20130069181A1 (en) * | 2010-04-21 | 2013-03-21 | Denso Corporation | Encapsulation structure for silicon pressure sensor |
| CN202066613U (en) * | 2011-05-30 | 2011-12-07 | 中国电子科技集团公司第四十九研究所 | Oil-filled temperature pressure combined sensor |
| CN203595580U (en) * | 2013-12-04 | 2014-05-14 | 淄博纳泰微系统传感有限公司 | Dedicated housing of diffusion silicon pressure sensor |
| CN204988611U (en) * | 2015-07-10 | 2016-01-20 | 四川奇胜科技有限公司 | High temperature resistant pressure sensor's core |
| CN205352584U (en) * | 2016-01-20 | 2016-06-29 | 浙江华西电子有限公司 | Pressure sensor of PCB encapsulation |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108387288A (en) * | 2017-02-03 | 2018-08-10 | 横河电机株式会社 | Water-level gauge, hydraulic pressure sensor device and water level measurement system |
| CN107655621A (en) * | 2017-11-16 | 2018-02-02 | 佛山市川东磁电股份有限公司 | A kind of pressure sensor waterproof case |
| CN111492217A (en) * | 2018-05-17 | 2020-08-04 | 罗斯蒙特公司 | Measuring element and measuring device comprising such a measuring element |
| US11371899B2 (en) | 2018-05-17 | 2022-06-28 | Rosemount Inc. | Measuring element with an extended permeation resistant layer |
| CN111492217B (en) * | 2018-05-17 | 2022-09-09 | 罗斯蒙特公司 | Measuring element and measuring device comprising such a measuring element |
| CN109855789A (en) * | 2019-01-10 | 2019-06-07 | 北京机械设备研究所 | It is a kind of for monitoring the sensor of underwater small aircraft surface pressing |
| CN112304474A (en) * | 2019-12-04 | 2021-02-02 | 武汉飞恩微电子有限公司 | Pressure sensor |
| CN115406577A (en) * | 2022-08-26 | 2022-11-29 | 南京高华科技股份有限公司 | MEMS pressure sensor packaging structure and preparation method thereof |
| CN115406577B (en) * | 2022-08-26 | 2024-05-14 | 南京高华科技股份有限公司 | MEMS pressure sensor packaging structure and preparation method thereof |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170104 |
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| RJ01 | Rejection of invention patent application after publication |