CN106222627A - A kind of metallized film vacuum coating equipment - Google Patents
A kind of metallized film vacuum coating equipment Download PDFInfo
- Publication number
- CN106222627A CN106222627A CN201610840613.5A CN201610840613A CN106222627A CN 106222627 A CN106222627 A CN 106222627A CN 201610840613 A CN201610840613 A CN 201610840613A CN 106222627 A CN106222627 A CN 106222627A
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- Prior art keywords
- film
- evaporation
- hinged
- vacuum chamber
- elevating mechanism
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- 239000011104 metalized film Substances 0.000 title claims abstract description 32
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims abstract description 232
- 238000001704 evaporation Methods 0.000 claims abstract description 123
- 230000008020 evaporation Effects 0.000 claims abstract description 122
- 239000010408 film Substances 0.000 claims abstract description 121
- 230000003028 elevating effect Effects 0.000 claims abstract description 86
- 238000004804 winding Methods 0.000 claims abstract description 41
- 239000007888 film coating Substances 0.000 claims abstract description 36
- 238000009501 film coating Methods 0.000 claims abstract description 36
- 238000000576 coating method Methods 0.000 claims abstract description 30
- 239000011248 coating agent Substances 0.000 claims abstract description 29
- 230000033228 biological regulation Effects 0.000 claims abstract description 10
- 238000009413 insulation Methods 0.000 claims description 49
- 239000010409 thin film Substances 0.000 claims description 29
- 230000033001 locomotion Effects 0.000 claims description 26
- 230000000694 effects Effects 0.000 claims description 22
- 230000005540 biological transmission Effects 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- 238000012216 screening Methods 0.000 claims description 11
- 230000006698 induction Effects 0.000 claims description 10
- 238000011144 upstream manufacturing Methods 0.000 claims description 8
- 229920001971 elastomer Polymers 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 239000006052 feed supplement Substances 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 206010044565 Tremor Diseases 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 230000009469 supplementation Effects 0.000 description 1
- 239000002937 thermal insulation foam Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The open a kind of metallized film vacuum coating equipment of the present invention, including vacuum chamber and be arranged on the intake mechanism in described vacuum chamber, film-coating mechanism, winding mechanism.Intake mechanism includes the first elevating mechanism, feeding unit；Preheating mechanism it is provided with between intake mechanism and film-coating mechanism；The open top region of the first evaporation boat is provided with the first portable plate assembly of regulation the first evaporation boat openings of sizes；The open top region of the second evaporation boat is provided with the second portable plate assembly of regulation the second evaporation boat openings of sizes；Between intake mechanism and film-coating mechanism, between film-coating mechanism and winding mechanism, it is provided with film clamping device of film；Winding mechanism includes the 5th elevating mechanism, coiler device；The telescopic end of the 5th elevating mechanism coordinates with coiler device to drive coiler device to move up and down.Automaticity that the present invention has is high, feed supplement/rewinding is convenient, in time, preheat that heat uniform, pre-is adjustable, be suitable for the processing of Multiple Type film, the adjustable advantage of coating film thickness.
Description
Technical field
The present invention relates to coater technical field, particularly relate to a kind of metallized film vacuum coating equipment.
Background technology
Metallized film directly affects the service life of capacitor as the critical piece of capacitor, the quality of its quality.
At present, metallized film mainly by vacuum coating machining preparation, including insulation film intake mechanism, film-coating mechanism and
Plate the winding film mechanism after metal level.But, the vacuum coating equipment of prior art has the following disadvantages:
(1) the metal level such as aluminum owing to plating easily aoxidizes, so whole process equipment is carried out the most under vacuum, and conduct
The intake mechanism of feeding insulation film generally uses feeding roller, and the amount of its winding insulation film is limited, when the insulation on feeding roller
At the end of thin film unwinds soon, need of roll change again or rewind thin film, such as patent application publication
201320431310.X it is a kind of soft disclosed in super-high sheet resistance metalized film vacuum coating equipment, patent application 201310324470.9
All there are the problems referred to above around vaporation-type vacuum coating equipment.Vacuum coating equipment disclosed in patent application 200910303404.7 is by carrying
Dish is loaded into thin film and coordinates connecting gear to realize the uninterrupted feeding of thin film, but is loaded into thin film with load plate and measures few after all, it is impossible to full
A large amount of production requirements of foot industry, all have much room for improvement in terms of the convenience, promptness of feed supplement.
(2) existing vacuum coating equipment is after feeding unit feeds, and if directly carrying out plated film by film-coating mechanism, insulate thin
The temperature on film surface is relatively low, plated film poor stability.Solution is that the interface improving its surface by arranging preheating device is made
With.But, preheating device is mostly fixed pattern, non-adjustable, causes preheating uneven.Prior art such as patent application
Although 201520245919.7 disclosed a kind of vacuum coating equipment provides the heater that can move along arc-shaped guide rail also
Heater adjustable angle is realized by metallic flexible hose, but, this structure is to utilize the physics of metallic flexible hose self
Character is curved, it has not been convenient to the realization being automatically adjusted；It addition, arc-shaped guide rail motion can drive heater motion to realize
Linear two-dimensional regulates, it is impossible to meeting the regulation of stereoscopic three-dimensional, it is difficult to realize the control of pre-calorific intensity, pre-thermal uniformity also needs to be carried
High.
(3) film-coating mechanism passes through evaporation boat motlten metal so that evaporation of metal, to the insulation film on evaporation drum surface, is formed
Metal level, it is achieved coating process.But, the distance between traditional film-coating mechanism its evaporation drum and evaporation boat mostly is definite value；And
And, the openings of sizes of evaporation boat is also fixing, according to the thickness t of the coat of metal on basement membrane0=w0/ (π ph2), it is known that, by adjusting
Distance between openings of sizes and evaporation drum and the evaporation boat of joint evaporation boat can control the thickness of the coat of metal.
(4) metallized film having is on the basis of aluminum film, then plates into one layer of enhancement Layer at zone line again, passes through secondary
Plated film improves pressure performance and the self-healing performance of thin film, it is therefore desirable to the plated film preparation two set evaporation boat of correspondence, wherein, with
The opening part of enhancement Layer correspondence evaporation boat needs to arrange screening arrangement, as 200810200949.0 1 kinds of aluminum of patent application thicken gold
The vacuum evaporating coating machine of genusization capacitor membrane, patent application 201310324470.9 1 kinds are soft around vaporation-type vacuum coating
Machine, thickeies effect by screening arrangement feasible region.But, the screening arrangement of existing technology mostly also is fixed, additionally shields
Cover the groove structure on device, shape immutable, cause a setting can only process the film of a kind of model, if shielding dress can be realized
Put the spacing between the most interchangeable, evaporation boat aperture area and itself and evaporation drum adjustable, then can meet the life of Multiple Type film
Produce.
(5) problem that coiler device exists is exactly the same with feeding unit, all has in terms of the convenience, promptness of rewinding
Wait to improve.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, it is provided that a kind of automaticity is high, feed supplement/rewinding is convenient, in time, in advance
Heat uniform, pre-is adjustable, be suitable for the processing of Multiple Type film for heat, coating film thickness adjustable metallized film vacuum coating equipment.
The present invention is by the techniques below means realization above-mentioned technical problem of solution: a kind of metallized film vacuum coating
Machine, including vacuum chamber and be arranged on the intake mechanism in described vacuum chamber, film-coating mechanism, winding mechanism；Described intake mechanism,
Film-coating mechanism, winding mechanism set gradually from front to back according to technological process；Described coater also includes preheating mechanism, film-clamp
Hold mechanism；
Described preheating mechanism is arranged on the inner roof wall of described vacuum chamber and between described intake mechanism, film-coating mechanism；Institute
State preheating mechanism and include jointed gear unit, heater, the first retractor device；Described jointed gear unit includes fixing bar, biography
Lever；One end that in described fixing bar, position is higher is arranged on the inner roof wall of described vacuum chamber by the second elevating mechanism, institute
The one end stating one end that in fixing bar, position is relatively low higher with position in described drive link is hinged, and in described drive link, position is relatively low
One end described heater is installed；It is solid with described that the fixing end of described first retractor device is hinged on described second elevating mechanism
On the join domain of fixed pole, the other end of described first retractor device is hinged with described drive link；
Film clamp dress it is provided with between described intake mechanism and film-coating mechanism, between described film-coating mechanism and winding mechanism
Put；Described film clamping device of film includes film clamp assembly and lower film clamp assembly；Described upper film clamp assembly position
In the top of thin film, described lower film clamp assembly is positioned at the lower section of thin film；Described upper film clamp assembly, lower film clamp group
Part move toward one another is in order to clamp thin film；
Described intake mechanism includes the first elevating mechanism, feeding unit, the first automatic conveying device；Described first elevating mechanism
Telescopic end coordinates with described feeding unit to drive described feeding unit to move up and down；Described first automatic conveying device includes
First housing, the first scroll wheel；Described first elevating mechanism is arranged on described first housing, and described first scroll wheel is arranged on
The bottom of said first shell, described first scroll wheel is driven by the second driving means；
Described film-coating mechanism includes the first evaporation coating device, including the first evaporation drum, the first evaporation boat；Described first evaporation boat
It is arranged on the lower section of described first evaporation drum；The open top region of described first evaporation boat is provided with described first evaporation of regulation
First portable plate assembly of boat openings of sizes；Described film-coating mechanism also includes the second evaporation coating device, rouse including the second evaporation,
Second evaporation boat, screening arrangement；Described second evaporation boat is arranged on the lower section of described second evaporation drum；Described second evaporation boat
Open top region is provided with the second portable plate assembly regulating described second evaporation boat openings of sizes；Described screening arrangement in order to
Limit width, region that the metal evaporated from the opening part of described second evaporation boat falls on insulation film；
Described winding mechanism includes that the 5th elevating mechanism, coiler device are identical with described first automatic conveying device structure
Two automatic conveying devices；The telescopic end of described 5th elevating mechanism coordinates with coiler device to drive described coiler device upper and lower
Motion.
Preferably: described feeding unit includes the first bracing frame, the first rotating cylinder, feeding roller；Described first slewing circle
Cylinder is rotatably assorted with described first bracing frame, and described first rotating cylinder can rotate around the central shaft of self；Some institutes
State feeding roller to be distributed on described first rotating cylinder around the central shaft of described first rotating cylinder and can be around in self
Mandrel rotates；Described coiler device includes the second bracing frame, the second rotating cylinder, take-up roll；Described second rotating cylinder and institute
State the second bracing frame to be rotatably assorted, and the second rotating cylinder can rotate around the central shaft of self；Some described take-up rolls around
The central shaft described second rotating cylinder is distributed on described second rotating cylinder, and described take-up roll can be around in self
Mandrel rotates.
Preferably: described first rotating cylinder includes the first left plectane, the first right plectane being oppositely arranged；Described first is left
Being connected by the first rotating shaft between plectane, the first right plectane, one end of described first rotating shaft is exposed in described first left plectane
The heart is rotatably assorted with one end of described first bracing frame, and the other end of described first rotating shaft exposes the center of described first right plectane
It is rotatably assorted with the other end of described first bracing frame；The end of described feeding roller is rotatably assorted with corresponding plectane；Described
Two rotating cylinders include the described second left plectane being oppositely arranged, described second right plectane；Described second left plectane, described second
Being connected by the second rotating shaft between right plectane, the center of described second left plectane and described the is exposed in one end of described second rotating shaft
One end of two bracing frames is rotatably assorted, and the other end of described second rotating shaft exposes the center and described second of described second right plectane
The other end of bracing frame is rotatably assorted；One end of described take-up roll is rotatably assorted with described second left plectane, and its other end passes through
Four-drive device is rotatably assorted with described second right plectane.
Preferably: described intake mechanism also includes first close to induction mechanism；Described first includes close to induction mechanism
One baffle plate, the first contact；One end that in described first baffle plate, position is higher is set in described first bracing frame with being rotatably assorted
On the fixed transverse rod of upper end, one end that one end that in described first baffle plate, position is relatively low is higher with position in described first contact
Connecting, one end that in described first contact, position is relatively low can be with the outermost of the insulation film in the feeding roller being in feeding state
Layer contact；The first the most described baffle plate of proximity switch is arranged on described fixed transverse rod；It is provided with second in described vacuum chamber
Proximity switch, described second proximity switch is in order to monitor described intake mechanism position in described vacuum chamber, described vacuum chamber
Outside is provided with the 3rd proximity switch at the upstream end of described vacuum chamber, and described 3rd proximity switch is in order to monitor described feeding
Enter mechanism position outside vacuum chamber；It is provided with chamber door at the upstream end of described vacuum chamber；
Winding mechanism also includes second close to induction mechanism；Described second includes second baffle, the second contact close to induction mechanism
Part；One end that in described second baffle, position is higher is set in the fixed transverse rod of described second bracing frame upper end with being rotatably assorted
On, one end higher with position in described second contact, one end that in described second baffle, position is relatively low is connected, and described second
One end that in contact, position is relatively low can contact with the outermost layer of the metallized film in the take-up roll being in reeling condition；Described
The 4th the most described second baffle of proximity switch is arranged on fixed transverse rod；The 5th it is provided with close to opening in described vacuum chamber
Closing, described 5th proximity switch, in order to monitor described winding mechanism position in described vacuum chamber, leans on outside described vacuum chamber
Being provided with the 6th proximity switch at the port of export of nearly described vacuum chamber, described 6th proximity switch is in order to monitor winding mechanism very
Empty outdoor position；The described port of export is provided with out room door.
Preferably: a described contact includes head rod, the first roller, described first roller and described insulation film
Outermost layer Structure deformation, one end relatively low with position in described first baffle plate, higher one end, described head rod position is even
Connecing, described head rod position coordinates with described first roller rolling compared with the one end at the end；Described second contact includes second
The outermost layer Structure deformation of connecting rod, the second roller, described second roller and metallized film；Described second connecting rod position is relatively
One end relatively low with position in described second baffle, high one end is connected, described second connecting rod position compared with the one end at the end with described
Second roller is rotatably assorted.
Preferably: be provided with belt conveyer in the lower section of described preheating mechanism, described belt conveyer will be from institute
State the insulation film of intake mechanism feeding to described film-coating mechanism transmission.
Preferably: described first portable plate assembly includes the first left portable plate, the first right portable plate, the first left flexible dress
Put, the first right retractor device；The one of the top of one end that in described first left portable plate, position is relatively low and described first evaporation boat
Hold hinged, position, one end free end that its position is higher；The fixing end of described first left retractor device and described first evaporation boat
Outer wall is hinged, and the telescopic end of described first left retractor device is hinged with described first left portable plate；In described first right portable plate
Relatively low one end, position is hinged with the other end at the top of described first evaporation boat, and higher one end, its position is free end, institute
The fixing end stating the first right retractor device is hinged with the outer wall of described first evaporation boat, the telescopic end of described first right retractor device
Hinged with described first right portable plate；
Described second portable plate assembly includes stretching in the second left portable plate, the second right portable plate, the second left retractor device, second right side
Device；One end that in described second left portable plate, position is relatively low is hinged with the one end at the top of described second evaporation boat, its position
Higher one end is free end；The fixing end of described second left retractor device is hinged with the outer wall of described second evaporation boat, described
The telescopic end of the second left retractor device is hinged with described second left portable plate；
One end that in described second right portable plate, position is relatively low is hinged with the other end at the top of described second evaporation boat, its position
Higher one end is free end, and the fixing end of described second right retractor device is hinged with the outer wall of described second evaporation boat, described
The telescopic end of the second right retractor device is hinged with described second right portable plate.
Preferably: the lower section of described first evaporation coating device is provided with the 3rd elevating mechanism, described 3rd elevating mechanism
In order to drive described first evaporation coating device elevating movement, the lower section of described second evaporation coating device to be provided with the 4th lifting
Mechanism, described 4th elevating mechanism is in order to drive described second evaporation coating device elevating movement.
Preferably: described screening arrangement includes link transmission shielding body, and described link transmission shielding body quantity is two
Individual, and it is symmetricly set on the both sides of described second evaporation boat；Described link transmission shielding body include fixing seat, barricade, the
Two retractor devices；One end that in described fixing seat, position is relatively low is arranged on the interior diapire of described vacuum chamber by pedestal, described
One end that in fixing seat, position is higher is hinged with one end of described barricade, and the other end of described barricade can be from described two evaporations
One end of the opening part of boat extends to the other end；The telescopic end of described second retractor device is hinged with described barricade, and it is fixed
Hold hinged with fixing seat；Being provided with groove on described barricade, the directed parallel of described groove transmits direction in insulation film.
Preferably: described upper film clamp assembly includes elevating mechanism, upper grip block, described upper elevating mechanism is fixing
End is arranged on the inner roof wall of described vacuum chamber, and the telescopic end of described upper elevating mechanism is connected with described upper grip block；Under described
Film clamp assembly includes that lower elevating mechanism, lower grip block, the fixing end of described lower elevating mechanism are arranged on described vacuum chamber
On interior diapire, the telescopic end of described lower elevating mechanism is connected with described lower grip block；The bottom of grip block, lower clamping on described
The top of plate is provided with rubber layer.
It is an advantage of the current invention that: the present invention has that automaticity is high, feed supplement/rewinding is convenient, in time, preheating uniformly,
Pre-heat is adjustable, be suitable for the processing of Multiple Type film, the adjustable advantage of coating film thickness.
Further, feeding unit is supported due to the present invention the first elevating mechanism by the first bracing frame, it is possible to realize feeding
Moving up and down of device, if the rotation precision of the first driving means declines, can pass through first elevating mechanism height to feeding unit
Degree is adjusted, thus ensures feeding roller its height, position consistency of feeding every time, it is to avoid unstable the showing of the tension force thus caused
As.
Further, first elevating mechanism of the present invention is preferably servo-cylinder or servo cylinder, by controller control.Enter
One step, owing to the bottom of the first scroll wheel is embedded in guide rail, it is ensured that the first scroll wheel does not deviates by, it is achieved movement locus is consistent
Technique effect.
Further, drive drive link to swing by the stretching motion of the first retractor device, thus drive and put about heater
Dynamic.Meanwhile, coordinate the elevating movement of the second elevating mechanism, drive heater to move up and down so that heater realizes 3 D stereo
Motion, and the motion in same level can be realized, insulation film be preheated more uniformly, and can be added by regulation
The height of hot device realizes the control of calorific intensity pre-to heater.
Further, first retractor device of the present invention, the second elevating mechanism also can be servo-cylinder or servo cylinder, logical
Cross controller and control its work, realize automatization further.
Further, by the first left retractor device, the stretching motion of the first right retractor device, drive the first left portable plate,
The free end of the first right portable plate deviates from or move toward one another, thus controls openings of sizes, reaches to regulate the technology effect of plated film amount
Really.
Further, the 3rd elevating mechanism elevating movement drives the first evaporation boat close or away from the first evaporation drum, passes through
The distance regulating the first evaporation boat and the first evaporation drum is to realize the technique effect of plated film amount regulation.
Further, drive barricade to rotate by the stretching motion of the second retractor device, when needing shielding, barricade is turned
Move to horizontal level.Now, the metal from the second evaporation boat can only be plated in the zone line of insulation film by groove, it is achieved
The technique effect that selectivity thickeies.
Further, link transmission shielding body quantity is two, and is symmetricly set on the both sides of the second evaporation boat.Different screens
Logical different width of tubesheet hole groove in shield plate.The present invention has the groove width of different groove width by offer, it is achieved thicken width
Alternative, it is simple to the processing of different model thin film.
Further, when intake mechanism removes vacuum chamber preparation roll change, by arranging film clamp assembly to insulation film
Clamp so that insulation film can only unwind out from feeding roller, will not be by plated film winding from winding mechanism
Metallized film unwinds out, prevents thin film from inversely moving.
Further, metallized film is clamped by arranging film clamp assembly so that metallized film can only be from
Take-up roll unwinds out, from intake mechanism, non-plated film insulation film will not be unwind out, prevent thin film from inversely moving.
Further, when insulation film is in transmission, upper grip block, lower folder are controlled by upper elevating mechanism, lower elevating mechanism
Hold plate spacing, insulation film is carried out the spacing of vertical direction, prevent insulation film during transmitting due to tension force inequality
The floating phenomenon produced, it is ensured that insulation film smooth transport.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is intake mechanism structural representation under the 3rd proximity switch state in the present invention.
Fig. 3 is winding mechanism structural representation under the 6th proximity switch state in the present invention.
Fig. 4 is the structural representation of feeding unit in the present invention.
Fig. 5 is the structural representation of coiler device in the present invention.
Fig. 6 be in the present invention feeding roller in working order under structural representation.
Fig. 7 be in the present invention take-up roll in working order under structural representation.
Fig. 8 be in the present invention the first proximity switch not with under the first baffle plate relative status structural representation.
Fig. 9 be in the present invention under the first proximity switch and the first baffle plate relative status structural representation.
Figure 10 be in the present invention the second proximity switch not with under second baffle relative status structural representation.
Figure 11 be in the present invention under the second proximity switch and second baffle relative status structural representation.
Figure 12 is the structural representation of automatic conveying device in the present invention.
Figure 13 is the structural representation preheating mechanism in the present invention.
Figure 14 is the structural representation of the grip block in the present invention with rubber layer.
Figure 15 is the structural representation of the first evaporation coating device in the present invention.
Figure 16 is the structural representation of the second evaporation coating device in the present invention.
Detailed description of the invention
For further describing the present invention, below in conjunction with embodiment, it is described further.
As it is shown in figure 1, the open a kind of metallized film vacuum coating equipment of the present invention, including vacuum chamber 401 and be arranged on
Intake mechanism in vacuum chamber 401, film-coating mechanism, winding mechanism.Intake mechanism, film-coating mechanism, winding mechanism are according to technique stream
Journey sets gradually from front to back.
As it is shown in figure 1, intake mechanism includes the first elevating mechanism 101, feeding unit.Stretching of first elevating mechanism 101
End coordinates to drive feeding unit to move up and down with feeding unit.
As it is shown in figure 1, vacuum chamber 401 include the chamber door 4011 of upstream end and the port of export go out room door 4012.
As it is shown in figure 1, feeding unit includes the first bracing frame, the first rotating cylinder 1022, feeding roller 1023.First rotates
Cylinder 1022 is rotatably assorted with the first bracing frame, and the first rotating cylinder 1022 can rotate around the central shaft of self.Some
Feeding roller 1023 is distributed on the first rotating cylinder 1022 and feeding roller 1023 energy around the central shaft of the first rotating cylinder 1022
Central shaft around self rotates.
As shown in Figure 4, as preferred scheme, the first rotating cylinder 1022 includes the first left plectane being oppositely arranged
10221, the first right plectane 10222.Between first left plectane the 10221, first right plectane 10222 by the first rotating shaft 10223 even
Connecing, the one end at center and the first bracing frame that the first left plectane 10221 is exposed in one end of the first rotating shaft 10223 is rotatably assorted, the
The other end at center and the first bracing frame that the other end of one rotating shaft 10223 exposes the first right plectane 10222 is rotatably assorted.Feeding
The end of roller 1023 is rotatably assorted with corresponding plectane.
Above-mentioned being respectively rotationally connected the most preferably is realized by clutch shaft bearing (being not drawn in figure).Such as the first rotating shaft 10223
End by clutch shaft bearing corresponding with the first bracing frame end connection.The second bearing is passed through with right in the end of feeding roller 1023
The plectane answered connects.
The above-mentioned end being respectively rotationally connected the preferably also first rotating shaft 10223 passes in the first bracing frame corresponding end
Through hole, the end of feeding roller 1023 is through the upper through hole of corresponding plectane, and end can rotate in corresponding through hole and realize.When
So, between the end of the first rotating shaft 10223 and the first bracing frame, the rotating manner of the end of feeding roller 1023 and corresponding plectane is also
Other existing technology can be used to realize.
As shown in Figure 4, as preferred scheme, the other end of the first rotating shaft 10223 exposes in the first right plectane 10222
The power shaft of the heart and the first driving means 1024 connects, and the fixing end of the first driving means 1024 is arranged on the another of the first bracing frame
One end.
As shown in Figure 4, as preferred scheme: intake mechanism also includes first close to induction mechanism.First close to sensing
Mechanism includes first baffle plate the 1031, first contact.One end that in first baffle plate 1031, position is higher is set in being rotatably assorted
On the fixed transverse rod 10213 of the first bracing frame upper end, one end that in the first baffle plate 1031, position is relatively low and position in the first contact
Putting higher one end to connect, one end that in the first contact, position is relatively low can exhausted with the feeding roller 1023 being in feeding state
The outermost layer contact of edge thin film 501.Relative first baffle plate 1031 of first proximity switch 1033 is arranged on fixed transverse rod 10213.
Such as Fig. 4, shown in 6, as preferred scheme: the first contact includes head rod the 10321, first roller
10322, the first roller 10322 and the outermost layer Structure deformation of insulation film 501.Head rod 10321 position higher one
Holding one end relatively low with position in the first baffle plate 1031 to be connected, head rod 10321 position (is schemed by bearing pin compared with the one end at the end
In do not mark) be rotatably assorted with the first roller 10322.
Such as Fig. 1, shown in 12, as preferred scheme: intake mechanism also includes the first automatic conveying device, and first is the most defeated
Device is sent to include first housing the 1041, first scroll wheel 1042.First elevating mechanism 101 is arranged on the first housing 1041, the
One scroll wheel 1042 is arranged on the bottom of the first housing 1041, and the first scroll wheel 1042 is driven by the second driving means 1043.
Being provided with the second proximity switch 105 in vacuum chamber 401, the second proximity switch 105 is in order to monitor intake mechanism at vacuum chamber 401
In position, at the upstream end of vacuum chamber 401, be provided with the 3rd proximity switch 106 outside vacuum chamber 401, the 3rd close to opening
Close 106 in order to monitor intake mechanism position outside vacuum chamber 401.
As shown in figure 12, as preferred scheme: vacuum chamber 401 is provided with coordinated with the first automatic conveying device
One guide rail 107.The bottom of the first scroll wheel 1042 is embedded in the first guide rail 107.
As it is shown in figure 1, first driving means 1024, second driving means 1043 of the present invention is driven by controller,
Vacuum chamber 401 is interior or outdoor arranges operating board 701, arranges this controller in operating board 701.The first driving dress of the present invention
Put the 1024, second driving means 1043 and be preferably servo motor or servomotor.
As shown in Fig. 1,2,4,12, each feeding roller 1023 being wound with insulation film 501 is placed sequentially in first turn
On dynamic cylinder 1022, insulation film 501 feeding in feeding roller 1023 nearest for distance film-coating mechanism is carried out coating film treatment, when
Insulation film in this feeding roller 1,023 501 close to unwinding complete time, the first baffle plate 1031 rotate to the first proximity switch
The position of 1033 correspondences, the first proximity switch 1033 sends signal to controller, and controller drives the second driving means 1043 turns
Dynamic, drive chamber door 4011 to open, control vacuum tank in other elements quit work, the second driving means 1043 rotates drive the
One scroll wheel 1042 moves along the first guide rail 107 to the upstream end of vacuum chamber 401, and feeding unit removes vacuum chamber 401.When
Feeding unit move near the position of the 3rd proximity switch 106 time, the 3rd proximity switch 106 sends signal to controller,
Controller controls the second driving means 1043 and stops operating, and simultaneously drives the first driving means 1024 and rotates, the first driving means
1024 rotate drive the first rotating cylinder 1022 rotates certain angle, and this angle is the angle between adjacent two feeding rollers 1023
Degree.Require supplementation with is that the angle between adjacent two feeding rollers 1023 of the present embodiment is the most identical.Now, staff by above-mentioned soon
Unwind the terminal remaining insulation film 501 in feeding roller 1023 completely to insulate in the next feeding roller 1023 needing feeding
The top of thin film 501 connects, then by the start button on operation operating board 701, drives the second driving means by controller
1043 rotate backward, and the second driving means 1043 rotates and drives the first scroll wheel 1042 along the first guide rail 107 to vacuum chamber 401
Upstream end move, when feeding unit moves to time near the position of the second proximity switch 105, the second proximity switch 105
Going out signal to controller, controller controls the second driving means 1043 and stops operating, and meanwhile, drives chamber door 4011 to close, control
In vacuum tank processed, other elements are started working.
In some embodiments, other above-mentioned elements carry out the preferential work of vacuum treated vacuum pump to vacuum chamber 401
Make, after the vacuum in vacuum chamber 401 reaches set point, the trueest by the pressure transducer being arranged in vacuum chamber 401
Empty sensor sends signal to controller, is driven other element manipulation again by controller.When the vacuum in vacuum chamber 401 not
Reaching set point, other elements quit work.
As it is shown in figure 1, further, since the present invention the first elevating mechanism 101 supports feeding dress by the first bracing frame 108
Put, it is possible to realize moving up and down of feeding unit, if the rotation precision of the first driving means 1024 declines, can be by the first lifting
The height of feeding unit is adjusted by mechanism 101, thus ensures feeding roller 1023 its height, position consistency of feeding every time,
Avoid the phenomenon of the tension force shakiness thus caused.
Further, first elevating mechanism 101 of the present invention is preferably servo-cylinder or servo cylinder, by controller control
System.Further, it is embedded in guide rail due to the bottom of the first scroll wheel 1042, it is ensured that the first scroll wheel 1042 does not deviates by, real
The technique effect that existing movement locus is consistent.
As it is shown in figure 1, be provided with preheating mechanism between intake mechanism and film-coating mechanism, preheating mechanism is in order to feeding machine
The insulation film 501 of structure feeding preheats.Preheating mechanism is preferably provided on the inner roof wall of vacuum chamber 401.
As shown in figure 13, preheating mechanism includes jointed gear unit, heater the 202, first retractor device 203.Connecting rod passes
Motivation structure includes fixing bar 2011, drive link 2012.One end that in fixing bar 2011, position is higher is arranged on the interior of vacuum chamber 401
On roof, one end higher with position in drive link 2012, one end that in fixing bar 2011, position is relatively low is hinged, drive link 2012
Relatively low one end, middle position is provided with heater 202, and the periphery of heater 202 can also arrange reflector 204.
As shown in figure 13, further, one end that in fixing bar 2011, position is higher is arranged on by the second elevating mechanism 205
On the inner roof wall of vacuum chamber 401.It is provided with connecting plate 206 between fixing bar 2011 and the second elevating mechanism 205.
The fixing end of the first retractor device 203 is hinged on connecting plate 206, the telescopic end of the first retractor device 203 and biography
Lever 2012 is hinged.
Drive drive link 2012 to swing by the stretching motion of the first retractor device 203, thus drive heater about 202
Swing.Meanwhile, coordinate the elevating movement of the second elevating mechanism 205, drive heater 202 to move up and down so that heater 202 is real
The motion of existing 3 D stereo, and the motion in same level can be realized, insulation film 501 is preheated more uniformly,
And the control of calorific intensity pre-to heater 202 can be realized by the height of regulation heater 202.
Preferably, first retractor device 203, second elevating mechanism 205 of the present invention also can be servo-cylinder or servo
Cylinder, controls its work by controller, realizes automatization further.
As it is shown in figure 1, as preferred scheme: be provided with belt conveyer 207 in the lower section of preheating mechanism, belt passes
Send device 207 by the insulation film 501 that feeds from intake mechanism to film-coating mechanism transmission.Owing to belt is transmitted as plane transmission,
Make insulation film 501 smooth conveying on belt, improve the uniformity of preheating further.
As it is shown in figure 1, film-coating mechanism includes the first evaporation coating device, including first evaporation drum the 3011, first evaporation boat
3012.First evaporation boat 3012 is arranged on the lower section of the first evaporation drum 3011.The open top region of the first evaporation boat 3012 sets
It is equipped with the first portable plate assembly controlling the first evaporation boat 3012 openings of sizes.
As shown in figure 15, as preferred scheme: the first portable plate assembly includes that the first left portable plate 30131, first is right
Portable plate 30132, first left retractor device the 30133, first right retractor device 30134.In first left portable plate 30131, position is relatively
Low one end is hinged with the one end at the top of the first evaporation boat 3012, and higher one end, its position is free end.First is left flexible
The fixing end of device 30133 and the outer wall of the first evaporation boat 3012 are hinged, the telescopic end and first of the first left retractor device 30133
Left portable plate 30131 is hinged.
One end that in first right portable plate 30132, position is relatively low is hinged with the other end at the top of the first evaporation boat 3012,
Higher one end, its position is free end, the fixing end of the first right retractor device 30134 and the outer wall hinge of the first evaporation boat 3012
Connecing, telescopic end and the first right portable plate 30132 of the first right retractor device 30134 are hinged.
By the stretching motion of first left retractor device the 30133, first right retractor device 30134, drive the first left activity
The free end of plate the 30131, first right portable plate 30132 deviates from or move toward one another, thus controls openings of sizes, reaches regulation plating
The technique effect of film amount.
As it is shown in figure 1, further: the lower section of the first evaporation coating device is provided with the 3rd elevating mechanism 3014, the 3rd liter
Descending mechanism 3014 is in order to drive the first evaporation coating device lifting.The first evaporation coating device and the 3rd elevating mechanism 3014 it
Between be provided with the second bracing frame (not marking in figure).
3rd elevating mechanism 3014 elevating movement drives the first evaporation boat 3012 close or is deposited with drum 3011 away from first,
It is to realize the technique effect of plated film amount regulation by regulating the distance of the first evaporation boat 3012 and the first evaporation drum 3011.
Preferably, the first of the present invention left retractor device the 30133, first right retractor device the 30134, the 3rd elevating mechanism
3014 also can be servo-cylinder or servo cylinder, controls its work by controller, thus realizes automatization further.
As it is shown in figure 1, film-coating mechanism also includes the second evaporation coating device, evaporate including the second evaporation drum 3021, second
Boat 3022.Second evaporation boat 3022 is arranged on the lower section of the second evaporation drum 3021.The open top region of the second evaporation boat 3022
It is provided with the second portable plate assembly controlling the second evaporation boat 3022 openings of sizes.
As shown in figure 16, the second portable plate assembly includes second left portable plate the 30231, second right portable plate 30232, second
Left retractor device, the second right retractor device.One end that in second left portable plate 30231, position is relatively low and the second evaporation boat 3022
The one end at top is hinged, and higher one end, its position is free end.The fixing end of the second left retractor device and the second evaporation boat
The outer wall of 3022 is hinged, and the telescopic end of the second left retractor device and the second left portable plate 30231 are hinged.
One end that in second right portable plate 30232, position is relatively low is hinged with the other end at the top of the second evaporation boat 3022,
Position, one end free end that its position is higher, the fixing end of the second right retractor device and the outer wall of the second evaporation boat 3022 are hinged, the
The telescopic end of two right retractor devices and the second right portable plate 30232 are hinged.
The effect of the effect of the second portable plate assembly and operation principle and the second portable plate assembly and operation principle phase
With, the present embodiment is not repeated at this.
As shown in figure 16, it is preferable that the second evaporation coating device also includes screening arrangement 3024, screening arrangement 3024 in order to
Limit the metal melting evaporated from the opening part of the second evaporation boat 3022 to fall the width on insulation film 501, region.Shielding
Device 3024 includes link transmission shielding body, including fixing seat 30241, barricade the 30242, second retractor device 30243.Gu
One end that in reservation 30241, position is relatively low is arranged on the interior diapire of vacuum chamber 401 by pedestal 30244, in fixing seat 30241
Higher one end, position is hinged with one end of barricade 30242, and the other end of barricade 30242 can be from the opening part of two evaporation boats
One end extend to the other end.The fixing end of the second retractor device 30243 is hinged with fixing seat 30241, the second retractor device
The telescopic end of 30243 is hinged with barricade 30242.Being provided with groove on barricade 30242, the directed parallel of groove is in insulation
Thin film 501 transmits direction.Preferably, groove is positioned at the zone line of barricade 30242, the most also can be at barricade 30242
Both sides.
Barricade 30242 is driven to rotate by the stretching motion of the second retractor device 30243, when needing shielding, will shielding
Plate 30242 turns to horizontal level.Now, the metal from the second evaporation boat 3022 can only be plated in insulation film by groove
The zone line of 501, it is achieved the technique effect that selectivity thickeies.
As preferred scheme: link transmission shielding body quantity is two, and it is symmetricly set on the second evaporation boat 3022
Both sides.Logical different width of tubesheet hole groove on different barricades 30242.The present invention has the groove width of different groove width by offer
Degree, it is achieved thicken the alternative of width, it is simple to the processing of different model thin film.
As it is shown in figure 1, as preferred scheme: the lower section of the second evaporation coating device is provided with the 4th elevating mechanism
3025, the 4th elevating mechanism 3025 is in order to drive the second evaporation coating device elevating movement.4th elevating mechanism 3025 is to second
The effect of evaporation coating device is identical to the effect of the first evaporation coating device with the 3rd elevating mechanism 3025.
The second left retractor device of the present invention, the second right retractor device, the second retractor device the 30243, the 4th elevating mechanism
3025 can also be servo-cylinder or servo cylinder, controls its work by controller, thus realizes automatization further.?
In some embodiment, first evaporation boat of the present invention, the second evaporation boat outer wall on thermal insulation layer can also be set.So, then first,
Second left retractor device and first, second right retractor device are arranged on the outer wall of thermal insulation layer.Thermal insulation layer can be aluminium sheet with
And it is arranged on the heat insulation foam between aluminium sheet, evaporation boat or polyurethane resin coat.
As it is shown in figure 1, between intake mechanism and film-coating mechanism, be provided with thin film between film-coating mechanism and winding mechanism
Clamping device.Film clamping device of film includes film clamp assembly and lower film clamp assembly.Upper film clamp assembly is positioned at
The top of thin film, lower film clamp assembly is positioned at the lower section of thin film.Upper film clamp assembly, lower film clamp assembly move toward one another
In order to clamp thin film.
The present embodiment is introduced for the film clamping device of film effect between intake mechanism and film-coating mechanism, film-coating mechanism
And the film clamping device of film effect between film clamping device of film effect and intake mechanism and film-coating mechanism between winding mechanism is such as
Go out a rut.
The effect of this device be coordinate intake mechanism, when intake mechanism remove vacuum chamber 401 prepare roll change time, by setting
Put film clamp assembly insulation film 501 is clamped so that insulation film 501 can only unwind out from feeding roller 1023,
From winding mechanism, the metallized film 801 of plated film winding will not be unwind out, prevent thin film from inversely moving.
And the effect of the film clamping device of film between film-coating mechanism and winding mechanism is to cooperate with winding mechanism, work as winding mechanism
Remove vacuum chamber 401 when preparing roll change, by arranging film clamp assembly, metallized film 801 is clamped so that metal
Change thin film 801 to unwind out from take-up roll, from intake mechanism, non-plated film insulation film 501 will not be unwind out, prevent
Thin film inversely moves.
As it is shown in figure 1, as preferred scheme: upper film clamp assembly includes upper elevating mechanism 4011, upper grip block
4012, the fixing end of upper elevating mechanism 4011 is arranged on the inner roof wall of vacuum chamber 401, the telescopic end of upper elevating mechanism 4011 with
Upper grip block 4012 connects.Lower film clamp assembly includes lower elevating mechanism 4013, lower grip block 4014, lower elevating mechanism 4013
Fixing end be arranged on the interior diapire of vacuum chamber 401, the telescopic end of lower elevating mechanism 4013 is connected with lower grip block 4014.
Due to upper elevating mechanism 4011, the setting of lower elevating mechanism 4013 so that film clamping device of film has again following merit
Effect: when insulation film 501 is in transmission, by upper elevating mechanism 4011, lower elevating mechanism 4013 control upper grip block 4012, under
Grip block 4014 spacing, carries out the spacing of vertical direction to insulation film 501, prevent insulation film 501 transmit during by
The floating phenomenon produced in tension force inequality, it is ensured that insulation film 501 smooth transport.
As shown in figure 14, preferably: be provided with rubber at the bottom of upper grip block 4012, the top of lower grip block 4014
Layer 4015.Flexible nature by rubber layer 4015, it is to avoid insulation film 501 contacts generation cut print with grip block.
The upper elevating mechanism 4011 of the present invention, lower elevating mechanism 4013 can be also servo-cylinder or servo cylinder, pass through
Controller controls its work, thus realizes automatization further.
Preferably: the chamber door 4011 of the present invention, go out room door 4012 for automatic seal door, can be specifically unidirectional
Door, bidirectional gate, shutter door, rolling screen door, the one of folding door, or the automatic seal door of other prior aries.Such as patent application
201220092640.6 a kind of automatic lifting seals disclosed in disclosed two way seal door, patent application 201521020622.7
Automatic lifting airtight door device, patent application 201420166265.4 disclosure disclosed in door, patent application 200820193008.4
Intelligent transport car double-sealed door.
The intake mechanism of the present invention is similar with winding mechanism structure, and winding mechanism includes the 5th elevating mechanism, coiler device.
The telescopic end of the 5th elevating mechanism coordinates with coiler device to drive coiler device to move up and down.
Coiler device includes the second bracing frame, the second rotating cylinder, take-up roll.Second rotating cylinder and the second bracing frame turn
Dynamic cooperation, and the second rotating cylinder can be around the central shaft rotation of self.Some take-up rolls are around in the second rotating cylinder
Mandrel is distributed on the second rotating cylinder, and take-up roll can rotate around the central shaft of self.
As preferred scheme, the second rotating cylinder includes the second left plectane, the second right plectane being oppositely arranged.Second is left
Being connected by the second rotating shaft between plectane, the second right plectane, the center and second of the second left plectane is exposed in one end of the second rotating shaft
One end of bracing frame is rotatably assorted, and the other end of the second rotating shaft exposes the center of the second right plectane and the other end of the second bracing frame
It is rotatably assorted.The end of take-up roll is rotatably assorted with corresponding plectane.
Above-mentioned being respectively rotationally connected the most preferably is realized by the second bearing.If the end of the second rotating shaft is by the second bearing
The end corresponding with the second bracing frame connects.The end of take-up roll is connected with corresponding plectane by the second bearing.
The above-mentioned end being respectively rotationally connected the preferably also second rotating shaft passes the through hole in the second bracing frame corresponding end,
The end of take-up roll is through the upper through hole of corresponding plectane, and end can rotate in corresponding through hole and realize.Certainly, the second rotating shaft
End and the second bracing frame between, the end of take-up roll also can use other existing technology with the rotating manner of corresponding plectane
Realize.
As preferred scheme, the other end of the second rotating shaft exposes the center of the second right plectane and the defeated of the 3rd driving means
Entering axle to connect, the fixing end of the 3rd driving means is arranged on the other end of the second bracing frame.
As shown in Figure 1,5, preferably: the power resources of thin film of the present invention transmission are in the 4th driving driving take-up roll to rotate
Device 5012 and belt conveyer 207.
5th elevating mechanism, the 3rd driving means, four-drive device 5012 also can be servo-cylinder or servo cylinder,
And by controller control.
As it is shown in figure 5, as preferred scheme: winding mechanism also includes second close to induction mechanism.Second close to sensing
Mechanism includes second baffle, the second contact.One end that in second baffle, position is higher is set in the second support with being rotatably assorted
On the fixed transverse rod of frame upper end, one end higher with position in the second contact, one end that in second baffle, position is relatively low is connected,
One end that in second contact, position is relatively low can connect with the outermost layer of the metallized film 801 in the take-up roll being in reeling condition
Touch.The 4th relative second baffle of proximity switch 5011 is arranged on fixed transverse rod.
As shown in Figure 4,5, the present invention provides a kind of first bracing frame, the structure of the second bracing frame, all includes fixed transverse rod
10213, left branching rod 10211, right pole 10212.Wherein, left branching rod 10211 includes one end of corresponding bracing frame, right pole
10212 other ends including corresponding bracing frame.Certainly, the present invention the first bracing frame, the structure of the second bracing frame are not limited only to
This kind of structure, any prior art provide bracing frame or through prior art enlightenment obtain can reach bracing frame of the present invention make
Bracing frame all should be within the scope of the present invention.
As it is shown in fig. 7, as preferred scheme: the second contact includes the second connecting rod, the second roller, the second roller with
The outermost layer Structure deformation of metallized film 801.Higher one end, second connecting rod position is relatively low with position in second baffle
One end connects, and the second connecting rod position is rotationally connected by the second bearing pin and the second roller compared with the one end at the end.
As shown in Figure 1,3, as preferred scheme: winding mechanism also includes identical with the first automatic conveying device structure
Second automatic conveying device.Being provided with the 5th proximity switch 901 in vacuum chamber 401, the 5th proximity switch 901 is in order to monitor volume
Around mechanism position in vacuum chamber 401, at the port of export of vacuum chamber 401, it is provided with the 6th outside vacuum chamber 401 close
Switch 1001, the 6th proximity switch 1001 is in order to monitor winding mechanism position outside vacuum chamber 401.
As preferred scheme: vacuum chamber 401 is provided with the second guide rail coordinated with the second automatic conveying device.
As illustrated in figs. 8-11, winding mechanism is with the difference of intake mechanism: (1) intake mechanism is to solve feed supplement problem,
Winding mechanism is to solve discharging problem, but principle is similar to.(2) the first proximity switch 1033 in intake mechanism is to work as feeding roller
Insulation film 501 in 1023 is close to when unwinding complete, and the first baffle plate 1031 rotates to the most corresponding with the first proximity switch 1033
Position；And the 4th in winding mechanism is when the metallized film 801 in take-up roll is wound to certain thickness close to opening 5011,
Second baffle rotates to the position corresponding with the 4th proximity switch 5011.
Vacuum chamber 401 many places of the present invention are provided with jockey pulley, deflector roll, it is simple to the conduction of thin film and the control of tension force,
It is additionally provided with chill roll 1301 between film-coating mechanism, winding mechanism, improves the cooling effect after plated film further.
The proximity switch of the present invention is a kind of position or displacement transducer.In some embodiments: each of the present invention
Wheel preparation prevents its limited block done relative motion on respective axle.Limited block is symmetricly set on wheel both sides and interference fit is sheathed
Periphery in respective shaft；Or it is located at respective shaft periphery and is bolted its position.Certainly, the limited block of the present invention also can
The prior art using other realizes.
As shown in figure 12, as preferred scheme: each scroll wheel includes drivewheel, some driven pulleys, and drivewheel is by right
The driving means answered drives, concrete: directly to be driven by driving means or arrange dress between driving means and drivewheel
Carry the gear-box 1044 of gear, the pinion rotation in driving means rotation driven gear case, then rotated by gear driven drivewheel,
And driven pulley is driven by drivewheel.Being provided with installing rack 1045 on housing, the fixing end of driving means is arranged on installing rack.
The type of drive of the automatic conveying device of the present invention is also not necessarily limited to the structure that this embodiment is mentioned, or the two-wheeled of prior art
Driving, four-wheel drive or other existing type of drive.
Preferably, each elevating mechanism of the present invention, retractor device, driving means, proximity switch are respectively with controller even
Connect.By above-mentioned Automated condtrol, it is achieved insulation film 501 quick, efficiently fill into, preheat, plated film, winding, save
Operating time, save the work load of workman.
Certainly, the present invention can also be realized by non-automated.Such as, use clear glass manufacture vacuum chamber 401 or
Vacuum chamber 401 is installed observation window or watch-dog is installed on vacuum chamber 401, by real in the direct observation ward of staff
Border situation, by the working condition of operating board 701 Non-follow control all parts.
These are only the preferred embodiment of the invention, not in order to limit the invention, all in the present invention
Any amendment, equivalent and the improvement etc. made within the spirit created and principle, should be included in the guarantor of the invention
Within the scope of protecting.
Claims (10)
1. a metallized film vacuum coating equipment, including vacuum chamber and be arranged on the intake mechanism in described vacuum chamber, plating
Film mechanism, winding mechanism；Described intake mechanism, film-coating mechanism, winding mechanism set gradually from front to back according to technological process；Its
It is characterised by: described coater also includes preheating mechanism, film clamp mechan-ism；
Described preheating mechanism is arranged on the inner roof wall of described vacuum chamber and between described intake mechanism, film-coating mechanism；Institute
State preheating mechanism and include jointed gear unit, heater, the first retractor device；Described jointed gear unit includes fixing bar, biography
Lever；One end that in described fixing bar, position is higher is arranged on the inner roof wall of described vacuum chamber by the second elevating mechanism, institute
The one end stating one end that in fixing bar, position is relatively low higher with position in described drive link is hinged, and in described drive link, position is relatively low
One end described heater is installed；It is solid with described that the fixing end of described first retractor device is hinged on described second elevating mechanism
On the join domain of fixed pole, the other end of described first retractor device is hinged with described drive link；
Film clamp dress it is provided with between described intake mechanism and film-coating mechanism, between described film-coating mechanism and winding mechanism
Put；Described film clamping device of film includes film clamp assembly and lower film clamp assembly；Described upper film clamp assembly position
In the top of thin film, described lower film clamp assembly is positioned at the lower section of thin film；Described upper film clamp assembly, lower film clamp group
Part move toward one another is in order to clamp thin film；
Described intake mechanism includes the first elevating mechanism, feeding unit, the first automatic conveying device；Described first elevating mechanism
Telescopic end coordinates with described feeding unit to drive described feeding unit to move up and down；Described first automatic conveying device includes
First housing, the first scroll wheel；Described first elevating mechanism is arranged on described first housing, and described first scroll wheel is arranged on
The bottom of said first shell, described first scroll wheel is driven by the second driving means；
Described film-coating mechanism includes the first evaporation coating device, including the first evaporation drum, the first evaporation boat；Described first evaporation boat
It is arranged on the lower section of described first evaporation drum；The open top region of described first evaporation boat is provided with described first evaporation of regulation
First portable plate assembly of boat openings of sizes；Described film-coating mechanism also includes the second evaporation coating device, rouse including the second evaporation,
Second evaporation boat, screening arrangement；Described second evaporation boat is arranged on the lower section of described second evaporation drum；Described second evaporation boat
Open top region is provided with the second portable plate assembly regulating described second evaporation boat openings of sizes；Described screening arrangement in order to
Limit width, region that the metal evaporated from the opening part of described second evaporation boat falls on insulation film；
Described winding mechanism includes that the 5th elevating mechanism, coiler device are identical with described first automatic conveying device structure
Two automatic conveying devices；The telescopic end of described 5th elevating mechanism coordinates with coiler device to drive described coiler device upper and lower
Motion.
A kind of metallized film vacuum coating equipment the most according to claim 1, it is characterised in that: described feeding unit includes
First bracing frame, the first rotating cylinder, feeding roller；Described first rotating cylinder is rotatably assorted with described first bracing frame, and institute
State the first rotating cylinder to rotate around the central shaft of self；Some described feeding rollers are around in described first rotating cylinder
Mandrel is distributed on described first rotating cylinder and can rotate around the central shaft of self；Described coiler device includes the second support
Frame, the second rotating cylinder, take-up roll；Described second rotating cylinder is rotatably assorted with described second bracing frame, and the second slewing circle
Cylinder can rotate around the central shaft of self；Some described take-up rolls are distributed in institute around the central shaft of described second rotating cylinder
State on the second rotating cylinder, and described take-up roll can rotate around the central shaft of self.
A kind of metallized film vacuum coating equipment the most according to claim 2, it is characterised in that: described first rotating cylinder
Including the left plectane of first be oppositely arranged, the first right plectane；By the first rotating shaft between described first left plectane, the first right plectane
Connecting, the one end at center and described first bracing frame that described first left plectane is exposed in one end of described first rotating shaft rotates joins
Closing, the other end at center and described first bracing frame that the other end of described first rotating shaft exposes described first right plectane rotates joins
Close；The end of described feeding roller is rotatably assorted with corresponding plectane；Described second rotating cylinder includes described be oppositely arranged
Two left plectanes, described second right plectane；Connected by the second rotating shaft between described second left plectane, described second right plectane, institute
The one end at center and described second bracing frame that described second left plectane is exposed in the one end stating the second rotating shaft is rotatably assorted, and described
The other end at center and described second bracing frame that the other end of two rotating shafts exposes described second right plectane is rotatably assorted；Described volume
Being rotatably assorted with described second left plectane around one end of roller, its other end is turned with described second right plectane by four-drive device
Dynamic cooperation.
A kind of metallized film vacuum coating equipment the most according to claim 3, it is characterised in that: described intake mechanism also wraps
Include first close to induction mechanism；Described first includes the first baffle plate, the first contact close to induction mechanism；In described first baffle plate
Higher one end, position is set on the fixed transverse rod of described first bracing frame upper end with being rotatably assorted, position in described first baffle plate
The one end putting relatively low one end higher with position in described first contact is connected, that in described first contact, position is relatively low
End can contact with the outermost layer of the insulation film in the feeding roller being in feeding state；The first the most described baffle plate of proximity switch sets
Put on described fixed transverse rod；Being provided with the second proximity switch in described vacuum chamber, described second proximity switch is in order to monitor
Described intake mechanism position in described vacuum chamber, is provided with outside described vacuum chamber at the upstream end of described vacuum chamber
3rd proximity switch, described 3rd proximity switch is in order to monitor described intake mechanism position outside vacuum chamber；In described vacuum
It is provided with chamber door at the upstream end of room；
Winding mechanism also includes second close to induction mechanism；Described second includes second baffle, the second contact close to induction mechanism
Part；One end that in described second baffle, position is higher is set in the fixed transverse rod of described second bracing frame upper end with being rotatably assorted
On, one end higher with position in described second contact, one end that in described second baffle, position is relatively low is connected, and described second
One end that in contact, position is relatively low can contact with the outermost layer of the metallized film in the take-up roll being in reeling condition；Described
The 4th the most described second baffle of proximity switch is arranged on fixed transverse rod；The 5th it is provided with close to opening in described vacuum chamber
Closing, described 5th proximity switch, in order to monitor described winding mechanism position in described vacuum chamber, leans on outside described vacuum chamber
Being provided with the 6th proximity switch at the port of export of nearly described vacuum chamber, described 6th proximity switch is in order to monitor winding mechanism very
Empty outdoor position；The described port of export is provided with out room door.
A kind of metallized film vacuum coating equipment the most according to claim 4, it is characterised in that: a described contact includes
The outermost layer Structure deformation of head rod, the first roller, described first roller and described insulation film, described head rod
One end relatively low with position in described first baffle plate, higher one end, position is connected, and described head rod position is compared with the one end at the end
Roll with described first roller and coordinate；Described second contact includes the second connecting rod, the second roller, described second roller and gold
The outermost layer Structure deformation of genusization thin film；Higher one end, described second connecting rod position is relatively low with position in described second baffle
One end connect, described second connecting rod position is rotatably assorted with described second roller compared with the one end at the end.
A kind of metallized film vacuum coating equipment the most according to claim 1, it is characterised in that: at described preheating mechanism
Lower section is provided with belt conveyer, described belt conveyer by the insulation film that feeds from described intake mechanism to described plating
Film mechanism transmits.
A kind of metallized film vacuum coating equipment the most according to claim 1, it is characterised in that: described first portable plate group
Part includes the first left portable plate, the first right portable plate, the first left retractor device, the first right retractor device；Described first left activity
One end that in plate, position is relatively low is hinged with the one end at the top of described first evaporation boat, position, one end free end that its position is higher；
The fixing end of described first left retractor device is hinged with the outer wall of described first evaporation boat, stretching of described first left retractor device
Hold hinged with described first left portable plate；One end that in described first right portable plate, position is relatively low and the top of described first evaporation boat
The other end in portion is hinged, and higher one end, its position is free end, the fixing end and described first of described first right retractor device
The outer wall of evaporation boat is hinged, and the telescopic end of described first right retractor device is hinged with described first right portable plate；
Described second portable plate assembly includes stretching in the second left portable plate, the second right portable plate, the second left retractor device, second right side
Device；One end that in described second left portable plate, position is relatively low is hinged with the one end at the top of described second evaporation boat, its position
Higher one end is free end；The fixing end of described second left retractor device is hinged with the outer wall of described second evaporation boat, described
The telescopic end of the second left retractor device is hinged with described second left portable plate；
One end that in described second right portable plate, position is relatively low is hinged with the other end at the top of described second evaporation boat, its position
Higher one end is free end, and the fixing end of described second right retractor device is hinged with the outer wall of described second evaporation boat, described
The telescopic end of the second right retractor device is hinged with described second right portable plate.
A kind of metallized film vacuum coating equipment the most according to claim 1, it is characterised in that: described first evaporation coating
The lower section of device is provided with the 3rd elevating mechanism, and described 3rd elevating mechanism is in order to drive described first evaporation coating device lifting
Motion, the lower section of described second evaporation coating device are provided with the 4th elevating mechanism, and described 4th elevating mechanism is in order to drive
State the second evaporation coating device elevating movement.
A kind of metallized film vacuum coating equipment the most according to claim 1, it is characterised in that: described screening arrangement includes
Link transmission shielding body, described link transmission shielding body quantity is two, and is symmetricly set on described second evaporation boat
Both sides；Described link transmission shielding body includes fixing seat, barricade, the second retractor device；In described fixing seat, position is relatively low
One end be arranged on the interior diapire of described vacuum chamber by pedestal, one end that in described fixing seat, position is higher and described shielding
One end of plate is hinged, and the other end of described barricade can extend to the other end from one end of the opening part of described two evaporation boats；Institute
The telescopic end stating the second retractor device is hinged with described barricade, and its fixing end is hinged with fixing seat；Arrange on described barricade
Groove, the directed parallel of described groove is had to transmit direction in insulation film.
A kind of metallized film vacuum coating equipment the most according to claim 1, it is characterised in that: described upper film clamp
Assembly includes that elevating mechanism, upper grip block, the fixing end of described upper elevating mechanism are arranged on the inner roof wall of described vacuum chamber,
The telescopic end of described upper elevating mechanism is connected with described upper grip block；Described lower film clamp assembly include lower elevating mechanism, under
Grip block, the fixing end of described lower elevating mechanism is arranged on the interior diapire of described vacuum chamber, stretching of described lower elevating mechanism
End is connected with described lower grip block；On described, the bottom of grip block, the top of lower grip block are provided with rubber layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840613.5A CN106222627B (en) | 2016-09-22 | 2016-09-22 | A kind of metallized film vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840613.5A CN106222627B (en) | 2016-09-22 | 2016-09-22 | A kind of metallized film vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106222627A true CN106222627A (en) | 2016-12-14 |
| CN106222627B CN106222627B (en) | 2019-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610840613.5A Expired - Fee Related CN106222627B (en) | 2016-09-22 | 2016-09-22 | A kind of metallized film vacuum coating equipment |
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| Country | Link |
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| CN (1) | CN106222627B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | A capacitor metallized film processing vacuum coating machine |
| CN116288227A (en) * | 2022-09-08 | 2023-06-23 | 安徽赛福电容股份有限公司 | Metallized film processing equipment and technology |
| CN116438129A (en) * | 2020-11-05 | 2023-07-14 | 应用材料公司 | Reel changing chamber, reel-to-reel processing system and method for continuously providing flexible substrates |
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| JP2004091890A (en) * | 2002-09-02 | 2004-03-25 | Murata Mfg Co Ltd | Sputtering system and film forming method |
| US20080316628A1 (en) * | 2007-06-25 | 2008-12-25 | Nisca Corporation | Density filter, method of forming the density filter and apparatus thereof |
| CN102994965A (en) * | 2011-09-13 | 2013-03-27 | 核工业西南物理研究院 | Magnetron sputtering reeling coater for large-area flexible substrate |
| CN104651792A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Single-sided continuous winding magnetron sputtering coating automatic production line for flexible substrate |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004091890A (en) * | 2002-09-02 | 2004-03-25 | Murata Mfg Co Ltd | Sputtering system and film forming method |
| US20080316628A1 (en) * | 2007-06-25 | 2008-12-25 | Nisca Corporation | Density filter, method of forming the density filter and apparatus thereof |
| CN102994965A (en) * | 2011-09-13 | 2013-03-27 | 核工业西南物理研究院 | Magnetron sputtering reeling coater for large-area flexible substrate |
| CN104651792A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Single-sided continuous winding magnetron sputtering coating automatic production line for flexible substrate |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116438129A (en) * | 2020-11-05 | 2023-07-14 | 应用材料公司 | Reel changing chamber, reel-to-reel processing system and method for continuously providing flexible substrates |
| US12358745B2 (en) | 2020-11-05 | 2025-07-15 | Elevated Materials Us Llc | Roll exchange chamber, roll-to-roll processing system and method of continuously providing a flexible substrate |
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | A capacitor metallized film processing vacuum coating machine |
| CN116288227A (en) * | 2022-09-08 | 2023-06-23 | 安徽赛福电容股份有限公司 | Metallized film processing equipment and technology |
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|---|---|
| CN106222627B (en) | 2019-02-01 |
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