CN106197665B - Spectrum test device and its test method - Google Patents
Spectrum test device and its test method Download PDFInfo
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- CN106197665B CN106197665B CN201510213333.7A CN201510213333A CN106197665B CN 106197665 B CN106197665 B CN 106197665B CN 201510213333 A CN201510213333 A CN 201510213333A CN 106197665 B CN106197665 B CN 106197665B
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Abstract
The invention discloses a kind of spectrum test devices, including：Monochromator for being divided to spectrum to be measured includes at least and goes out optical slits for be emitted the spectrum to be measured through light splitting；With the spectrum projector for going out optical slits and being oppositely arranged, to being amplified via the spectrum to be measured through light splitting for going out optical slits outgoing；And it is adjacent to the detector of spectrum projector setting, it is used to detect enlarged spectrum to be measured.Spectrographic detection signal strength to be measured through the spectrum test device to test is high, high resolution, and space is occupied small, which does not improve resolution ratio by increasing the method for grating line number and the effective focal length of system, makes simple, at low cost.The invention also discloses the test methods using above-mentioned spectrum test device, including step：Monochromator carries out light splitting to spectrum to be measured and is emitted via optical slits is gone out；The spectrum to be measured through light splitting that spectrum projector amplification is emitted through going out optical slits；Detector detects enlarged spectrum to be measured.
Description
Technical field
The invention belongs to spectral technique fields, in particular, being related to a kind of achievable wide spectrum and high-resolution spectrum
Test device and its test method.
Background technology
Spectroscopic analysis methods all play pole as a kind of important analysis means in scientific research, production, Quality Control etc.
Big effect.And monochromator is a kind of common and important spectroscopic instruments.In conjunction with elements such as detectors, it is applicable to monochromatic light
Generation, spectrum analysis and spectrum measurement etc..It has been generally divided into prism monochromator and grating monochromator.Wherein grating
Monochromator is applied than wide.
In grating monochromator properties, resolution ratio is to show that spectral instrument separates two very close spectral lines of wavelength
Ability is particularly important one of the performance indicator of spectral instrument.Resolution ratio (R) depends on resolving power (the grating line number of grating
M), effective focal length (spectrometer focal length F) of system, setting slit width (W), system optical aberration and other parameters (R ∝
M·F/W).Therefore, at present in terms of improving monochromator resolution ratio, mainly by increasing having for grating line number and system
Imitate two methods of focal length.But increasing grating line number can not only cause spectral intensity to decline to influence the strong of detectable signal
Degree, and considerably increase the manufacture difficulty of grating；And with the increase of grating line number, the effective spectral range of effect
It is corresponding to reduce.The focal length of another increase system is mainly realized by increasing space length.
Business monochromator highest resolution is 0.0033nm in visible light part at present, but its focal length has reached 1.9m,
Larger space is occupied, and expensive.With the development of science and technology, test of certain fields for spectral resolution
It is required that be continuously increased, for example, light laser spectrum test.Business equipment has been extremely difficult to test request at present, and only leads to
It has not been direct effective method to cross increase grating line number and test focal length.
Invention content
To solve the above-mentioned problems of the prior art, the present invention provides a kind of spectrum test device, which makes
On the basis of existing grating monochromator, wide spectrum and high-resolution characteristic are had both.
In order to reach foregoing invention purpose, present invention employs the following technical solutions：
A kind of spectrum test device, including：Monochromator, includes at least out optical slits, the monochromator to spectrum to be measured into
Light splitting, the spectrum to be measured through light splitting via it is described go out optical slits be emitted；Spectrum projector, with it is described go out optical slits is opposite sets
Set, the spectrum projector to via it is described go out optical slits outgoing the spectrum to be measured through light splitting be amplified；Detector,
It is adjacent to the spectrum projector setting, the detector is for detecting enlarged spectrum to be measured.
Further, the spectrum projector is convex lens, and the optical slits that goes out of the monochromator is located at the convex lens
Between one times of focal length and two times of focal lengths.
Further, the spectrum test device further includes：Optical Spectral Reflector, be set to the spectrum projector with it is described
Between detector, the Optical Spectral Reflector is for receiving the enlarged spectrum to be measured, and by the enlarged light to be measured
Spectrum reflexes to the detector.
Further, the Optical Spectral Reflector includes a plane mirror, wherein the enlarged spectrum to be measured is via institute
It states plane mirror and reflexes to the detector.
Further, the Optical Spectral Reflector includes several plane mirrors, wherein the enlarged spectrum to be measured is via institute
It states several plane mirrors and reflexes to the detector.
Another object of the present invention, which also resides in, provides a kind of test method of above-mentioned spectrum test device, the spectrum test
Device includes monochromator, spectrum projector and detector, wherein the test method includes step：The monochromator is treated
It surveys spectrum to be divided, the spectrum to be measured through light splitting is emitted via the optical slits that goes out on the monochromator；The spectrum projector
To via it is described go out optical slits outgoing the spectrum to be measured through light splitting be amplified；Detector detects enlarged light to be measured
Spectrum.
Further, the spectrum projector is convex lens, and the optical slits that goes out of the monochromator is located at the convex lens
Between one times of focal length and two times of focal lengths.
Further, the spectrum test device further includes being set between the spectrum projector and the detector
Optical Spectral Reflector, wherein before the detector detects enlarged spectrum to be measured, the spectrum test method further includes step
Suddenly：Optical Spectral Reflector receives the enlarged spectrum to be measured, and by the enlarged spectral reflectance to be measured to the detection
Device.
Further, the Optical Spectral Reflector includes a plane mirror, wherein the enlarged spectrum to be measured is via institute
It states plane mirror and reflexes to the detector.
Further, the Optical Spectral Reflector includes several plane mirrors, wherein the enlarged spectrum to be measured is via institute
It states several plane mirrors and reflexes to the detector.
With monochromator in the prior art compared with the device that detector is connected directly, the present invention passes through in monochromator and detection
Increase spectrum projector and Optical Spectral Reflector between device, not only increase spectrographic detection signal, then improve spectral resolution,
Also reduce the space occupancy volume of spectrum test device；With pass through the increase grating line number or system of monochromator in the prior art
The method of effective focal length compared to improve resolution ratio, the preparation of this kind of spectrum test device is more simple, and cost is lower.
Description of the drawings
What is carried out in conjunction with the accompanying drawings is described below, above and other aspect, features and advantages of the embodiment of the present invention
It will become clearer, in attached drawing：
Fig. 1 is the structural schematic diagram of spectrum test device according to an embodiment of the invention；
Fig. 2 is the structural schematic diagram of Optical Spectral Reflector according to an embodiment of the invention；
Fig. 3 is the spectrum test comparative result figure of spectrum test device according to an embodiment of the invention.
Specific implementation mode
Hereinafter, with reference to the accompanying drawings to detailed description of the present invention embodiment.However, it is possible to come in many different forms real
The present invention is applied, and the present invention should not be construed as limited to the specific embodiment illustrated here.On the contrary, providing these implementations
Example is in order to explain the principle of the present invention and its practical application, to make others skilled in the art it will be appreciated that the present invention
Various embodiments and be suitable for the various modifications of specific intended application.In the accompanying drawings, for the sake of clarity, element can be exaggerated
Shape and size, and identical label will be used to indicate same or analogous element always.
Fig. 1 is the structural schematic diagram of spectrum test device according to an embodiment of the invention, and Fig. 2 is reality according to the present invention
Apply the structural schematic diagram of the Optical Spectral Reflector of example.
Referring to Figures 1 and 2, spectrum test device according to an embodiment of the invention includes the monochromator being set up in parallel successively
10, spectrum projector 20, Optical Spectral Reflector 30 and detector 40；Wherein, monochromator 10 is included at least into optical slits 11 and light extraction
Slit 12, detector 40, which includes at least, receives slit 41.Specifically, spectrum projector 20 is located at outside optical slits 12, and with go out
Optical slits 12 is oppositely arranged, to receive the spectrum to be measured being divided through monochromator 10 through going out the outgoing of optical slits 12, and through light
Amplifier 20 is amplified the spectrum to be measured through light splitting to spectrum, Optical Spectral Reflector 30 reflects enlarged spectrum to be measured
Afterwards, it is received at reception slit 41.
When stating spectrum test device in use, first, incident light is incident in monochromator 10 through entering optical slits 11 and goes forward side by side
Row light splitting, the spectrum to be measured through light splitting are converged to out at optical slits 12 and are emitted, which is that those skilled in the art are usual
It is operated using the light splitting that monochromator 10 is carried out, the detailed process is not repeated herein.
Then, spectrum projector 20 via the spectrum to be measured through light splitting for going out the outgoing of optical slits 11 to being amplified.
Third step is that Optical Spectral Reflector 30 receives enlarged spectrum to be measured, and enlarged spectral reflectance to be measured is extremely visited
Survey device 40.
Finally, detector 50 detects enlarged spectrum to be measured.
It is worth noting that in fig. 1 and 2, the line segment with arrow indicates the direction of propagation of spectrum to be measured, and dotted line
The spectrum direction of propagation to be measured of the Optical Spectral Reflector 30 indicated in frame is not actual propagation path, and spectrum to be measured at this time is practical
Propagation path is as shown in Figure 2, i.e., the spectrum to be measured for the amplification being emitted via spectrum projector 20 is inside Optical Spectral Reflector 30
It reflects, then propagates at the reception slit 41 of detector 40.
In the present embodiment, in order to achieve the above objectives, spectrum projector 20 use convex lens, meanwhile, using convex lens at
As rule, which is placed on out at outer and opposite with optical slits 12 the is gone out position of optical slits 12, and ensure optical slits
12 be located at the convex lens one times of focal length (f) and two times of focal lengths (2f) between, to through go out optical slits 12 be emitted through monochromator
10 light splitting after spectrum to be measured after the convex lens can the phase other side two times of focal lengths (2f) other than formed amplification, stand upside down
Real image, that is, show the spectrum to be measured of amplification, the spectrum to be measured of the amplification after the reflection of Optical Spectral Reflector 30, detector 40 after
And receive the spectrum to be measured of the amplification and detected, to reach under 40 identical search coverage of detector, receive slit
The 41 finer purposes of spectral signal collected, it is achieved that higher spectral resolution.
The position of the spectrum intervals convex lens to be measured of the amplification formed generally other than two times of focal lengths (2f) of convex lens compared with
Far, that is to say, that this can cause distance between detector 40 and monochromator 10 farther out, when using the device, to be wanted for space
Seek higher.In order to shorten image-forming range, Optical Spectral Reflector 30 includes at least a plane mirror, and plane mirror to amplify via spectrum
The spectrum to be measured for the amplification that device 20 is presented reflects on plane mirror, then the spectrum to be measured of amplification is transferred to and receives slit 41
Place, to substantially reduce the distance between detector 40 and monochromator 10.
It is worth noting that using plane mirror as spectrum projector 30 when, the quantity of plane mirror is not specifically limited, few
Then one, at most six to seven (are put with meeting via the spectrum to be measured of the amplification presented after spectrum projector 20
Big real image) drop down onto the purpose received at slit 41；Certainly, the placement angle of plane mirror is also not particularly limited, and can be thought
Elephant, when horizontal position larger angle is deviateed in the placement position of plane mirror, the light of the spectrum to be measured of the amplification through its reflection
Line can more dissipate, and correspondingly, the quantity of required plane mirror can be less；In general, to make via Optical Spectral Reflector
The plane mirror that effect is more preferable, as Optical Spectral Reflector 30 is presented in the spectrum to be measured of amplification after 30 reflections at reception slit 41
It puts in low-angle inclination angle (keeping smaller angle with horizontal position).
Illustrate the advantageous effect of Optical Spectral Reflector 30 using in the present embodiment as the convex lens of spectrum projector 20.
The focal length (f) of the convex lens is 15cm, after the convex lens, in the light to be measured of the amplification of the other side opposite with optical slits 12 is gone out
Generally spectral signal can be presented in the range of away from convex lens 1m~2m in spectrum, that is to say, that if not using Optical Spectral Reflector 30,
Then the distance between detector 40 and monochromator 10 are about 1.3m~2.3m；When Optical Spectral Reflector 30 includes five pieces of plane mirrors,
The spectrum to be measured of amplification can be made to be presented at convex lens 30cm~50cm, that is to say, that detector 40 and monochromator at this time
It keeps 60cm~80cm that can meet detection between 10 to require, occupies sky to significantly reduce the spectral detection device
Between.
To verify the resolution effect of the spectrum test device to test spectrum in the embodiment of the present invention, in the present embodiment
Above-mentioned spectrum test device and common spectrum test device in the prior art (monochromator 10 is connected directly with detector 40,
No spectrum projector 20 and Optical Spectral Reflector 30) laser spectrum detect and has been compared.In contrast test, use
Monochromator 10 is identical, which has 1800 ruling gratings, and its focal length is 500mm.Laser spectrum test result such as Fig. 3
Shown, in figure 3, dotted line represents the laser spectrum detected with common spectrum test device, the reality of the solid line representative present invention
Apply the laser spectrum that the spectrum test device of example detects；It can obviously be observed from Fig. 3, using in the embodiment of the present invention
The laser spectrum that detects of spectrum test device there is higher resolution ratio.
Although the present invention has shown and described with reference to specific embodiment, it should be appreciated by those skilled in the art that：
In the case where not departing from the spirit and scope of the present invention limited by claim and its equivalent, can carry out herein form and
Various change in details.
Claims (6)
1. a kind of spectrum test device, which is characterized in that including：
Monochromator includes at least out optical slits, and the monochromator is divided spectrum to be measured, the spectrum to be measured through light splitting via
It is described go out optical slits outgoing；
Spectrum projector, with it is described go out optical slits be oppositely arranged, the spectrum projector to via it is described go out optical slits outgoing
The spectrum to be measured through light splitting is amplified；The spectrum projector is convex lens, and the optical slits that goes out of the monochromator is located at
Between the one times of focal length and two times of focal lengths of the convex lens；
Detector is adjacent to the spectrum projector setting, and the detector is for detecting enlarged spectrum to be measured；
Optical Spectral Reflector is set between the spectrum projector and the detector, and the Optical Spectral Reflector is for receiving institute
State enlarged spectrum to be measured, and by the enlarged spectral reflectance to be measured to the detector.
2. spectrum test device according to claim 1, which is characterized in that the Optical Spectral Reflector includes a plane
Mirror, wherein the enlarged spectrum to be measured reflexes to the detector via the plane mirror.
3. spectrum test device according to claim 1, which is characterized in that the Optical Spectral Reflector includes several planes
Mirror, wherein the enlarged spectrum to be measured reflexes to the detector via several plane mirrors.
4. a kind of test method of spectrum test device, which is characterized in that the spectrum test device includes that monochromator, spectrum are put
Big device, Optical Spectral Reflector and detector, wherein the test method includes step：
A, the monochromator is divided spectrum to be measured, and the spectrum to be measured through light splitting goes out optical slits via on the monochromator
Outgoing；
B, the spectrum projector to via it is described go out optical slits outgoing the spectrum to be measured through light splitting be amplified；It is described
Spectrum projector is convex lens, the monochromator go out optical slits be located at the convex lens one times of focal length and two times of focal lengths it
Between；
C, the Optical Spectral Reflector receives the enlarged spectrum to be measured, and by the enlarged spectral reflectance to be measured to institute
State detector；
D, the detector detects enlarged spectrum to be measured.
5. test method according to claim 4, which is characterized in that the Optical Spectral Reflector includes a plane mirror,
In, the enlarged spectrum to be measured reflexes to the detector via the plane mirror.
6. test method according to claim 4, which is characterized in that the Optical Spectral Reflector includes several plane mirrors,
In, the enlarged spectrum to be measured reflexes to the detector via several plane mirrors.
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| CN201510213333.7A CN106197665B (en) | 2015-04-29 | 2015-04-29 | Spectrum test device and its test method |
Applications Claiming Priority (1)
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|---|---|---|---|
| CN201510213333.7A CN106197665B (en) | 2015-04-29 | 2015-04-29 | Spectrum test device and its test method |
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| CN106197665A CN106197665A (en) | 2016-12-07 |
| CN106197665B true CN106197665B (en) | 2018-11-09 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03214040A (en) * | 1990-01-18 | 1991-09-19 | Japan Spectroscopic Co | Light analyzing apparatus |
| CN101776570A (en) * | 2009-12-24 | 2010-07-14 | 江苏天瑞仪器股份有限公司 | Device for enhancing signal-to-noise ratio of emission spectrometer |
| CN202631110U (en) * | 2012-05-31 | 2012-12-26 | 上海理工大学 | Terahertz time domain double spectrum detecting system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365399C (en) * | 2003-12-11 | 2008-01-30 | 中国科学院上海技术物理研究所 | Self calibration method for remote sensing instrument optical system spectrum calibration |
| CN200986469Y (en) * | 2006-11-13 | 2007-12-05 | 中国人民解放军国防科学技术大学 | Spectrometer for multi-spectral line laser |
| WO2008082506A1 (en) * | 2006-12-19 | 2008-07-10 | J.A. Woollam Co., Inc. | Application of digital light processor in scanning spectrometer and imaging ellipsometer and the like systems |
| CN201138246Y (en) * | 2007-12-26 | 2008-10-22 | 杨文菊 | Ultraviolet energy spectrometer |
| CN101294901A (en) * | 2008-06-10 | 2008-10-29 | 浙江大学 | Method and device for measuring up-conversion time discrimination spectrum |
| CN201247201Y (en) * | 2008-07-24 | 2009-05-27 | 天津港东科技发展股份有限公司 | Laser Raman/fluorescent spectrometer |
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2015
- 2015-04-29 CN CN201510213333.7A patent/CN106197665B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03214040A (en) * | 1990-01-18 | 1991-09-19 | Japan Spectroscopic Co | Light analyzing apparatus |
| CN101776570A (en) * | 2009-12-24 | 2010-07-14 | 江苏天瑞仪器股份有限公司 | Device for enhancing signal-to-noise ratio of emission spectrometer |
| CN202631110U (en) * | 2012-05-31 | 2012-12-26 | 上海理工大学 | Terahertz time domain double spectrum detecting system |
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