CN106181675A - A kind of magnetic fluid machining tool and processing method being applicable to promote calcium fluoride concave cone mirror roughness - Google Patents
A kind of magnetic fluid machining tool and processing method being applicable to promote calcium fluoride concave cone mirror roughness Download PDFInfo
- Publication number
- CN106181675A CN106181675A CN201610530355.0A CN201610530355A CN106181675A CN 106181675 A CN106181675 A CN 106181675A CN 201610530355 A CN201610530355 A CN 201610530355A CN 106181675 A CN106181675 A CN 106181675A
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- Prior art keywords
- concave cone
- calcium fluoride
- magnetic fluid
- rod
- cone mirror
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
- B24B13/012—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane
Abstract
The invention discloses a kind of magnetic fluid machining tool and processing method being applicable to promote calcium fluoride concave cone mirror roughness.This instrument mainly includes right angled flange, motor diverter, straight line rod, Ru-Fe-Mn bar magnet, guide post, baseline rod, shaping rod.This invention has taken into full account material behavior and the concave cone face polymorphic structure characteristic of calcium fluoride crystal, use magnetic fluid straight line magnetic bar that calcium fluoride concave cone is carried out Even Grinding based on magnetic fluid process technology, eliminate sub-surface breakdown layer and the medium-high frequency in calcium fluoride concave cone face, promote the surface roughness in concave cone face.The present invention has stronger controlling to face shape, the cone angle in calcium fluoride concave cone face, the roughness in concave cone face had stronger enhancing, breaching domestic existing technique and cannot process the technical bottleneck of calcium fluoride concave cone abnormal curved surface, the development carrying out litho machine projection exposure optical system for China provides technical guarantee.
Description
Technical field
The present invention relates to the precision machined technical field of nano-precision, is applicable to calcium fluoride concave cone mirror particularly to one efficient
The magnetic fluid tool design of processing and method.
Background technology
The development of great scale integrated circuit has become the foundation stone of electronics and information industry, and litho machine is as the master of integrated circuit
Want etching apparatus, experienced by exposure wavelength from the near ultraviolet of 436nm, 365nm, 246nm enter into 193nm deep ultraviolet and
13.2nm extreme ultraviolet.The litho machine development of high-density integrated integrated circuit is significant to national defense safety, scientific and technological progress, directly
Connect and have influence on the strategic position that China is following.
Lithography illuminating system is the core component of litho machine projection exposure optical system, and its function mainly carries for mask plane
For Uniform Illumination, control exposure dose and realize off-axis illumination pattern.The ordinary optical imaging system depth of field in the light optics decorum
The physical cause of finiteness is due to diffraction of light, along with the difference of out of focus position (i.e. beam propagation position), diffraction pattern
Size drastically changes, and the Beams that directional light incidence axial cone mirror produces has center spot and keeps within the specific limits not
The characteristic become.When spherical wave illumination axial cone mirror, produced diffraction pattern is slowly varying in certain scope.Shine for improving
The beam shaping efficiency of bright system, need to use diffraction element and the combination of axial cone mirror, by regulating the coherence factor of axial cone mirror, to carry
The zoom capabilities of high beam shaping unit.The diffracted beam that axial cone mirror produces in image distance is approximately zero Bessel function,
Only changing the phase place of system in non-diffracting imaging, its center spot radius is basically unchanged, and is the important device of salt free ligands optical imagery
Part, its advantage in lamp optical system mainly has:
(1), during traditional optical imaging, point spread function changes quickly with out of focus, causes the biggest difficulty to image restoration.
And the center spot size and shape of the Beams that axicon lens produces keeps constant within the specific limits；
(2) the conventional relative aperture that reduces of applied optics system is to increase the depth of field, but can reduce the spatial resolution of system, makes
Image detail obscures.The characteristic that axial cone mirror is burnt owing to having line, is applied in optical imaging system to increase system
Depth of focus；
(3) axial cone mirror mirror group can be along with the change of spacing between axial cone mirror unit, the ring illumination inner and outer ring width of generation
Also changing, the flex point (tip of circular cone) at the center of axial cone mirror element can serve the effect of segmentation light beam.
Therefore, axial cone mirror has very important status, the high accuracy of axial cone mirror in whole lithography illuminating system imaging
Processing is to ensure that whole illuminator has high resolution, high energy transmission, the important prerequisite of the high imaging system depth of field.
CaF2Crystalline material can also have difference to compensate merit from ultraviolet wavelength (125nm) to infrared wavelength (12 μm) simultaneously
Can, there is water white transparency, the optical advantage such as absorptance is low, antibody Monoclonal threshold value height, high, the phenomenon free of birefringence of permeability.CaF2
Axial cone mirror is one of requisite Primary Component of deep ultraviolet (DUV), extreme ultraviolet (EUV) lithography illuminating system.
Through experiment for many years and research, the had been completed CaF of Chinese Academy of Sciences's photoelectricity2The Technology of convex cone processing is touched
Rope, it is achieved that CaF2The Ultra-smooth machining of convex cone.And the surface figure accuracy and roughness for concave cone promotes, technology method has
There is higher challenge, be mainly reflected in:
(1) concave cone mirror bus is inconsistent in course of processing linear velocity, and central area linear velocity is almost nil, existing technique skill
During art processing concave cone mirror, it is uncontrollable that layer is destroyed in bus linearity and central area；
(2) concave cone curved surface is polymorphic structure, and curvature mirror change is inconsistent, and concave cone center is flex point, it is impossible to enter whole face
Row uniform smooth；
(3) concave cone central area relative aperture is relatively deep, and machining locus is limited, and meanwhile, existing processing bistrique cannot be applied
In concave cone minute surface processing.
Based on above-mentioned consideration, meet concave cone mirror processing most basic method is the noncontact the strictest to processing required distance
Formula flexible fluid bombardment technology, such as jet process technology or ion beam fabrication technology.As the existing etching system concave cone degree of depth is
20-40mm, uses the processing distance bombardment mode more than 40mm can meet processing conditions.
It is that the polishing fluid by being mixed with abrasive material is high with Zeeko scientific research institution of Britain for the jet process technology that representative develops
Pressure is bombarded in workpiece minute surface, and processing distance is 1mm-80mm.Bombardment a fluid stream bore is 0.1mm-2mm.This small-bore polishing speckle can
The 2mm-5mm spatial frequency errors of minute surface is carried out effective correction of the flank shape, but the grinding granulation uniformity of injection, concentration is difficult to control to,
Existing technological means can only meet the processing of roughness Rq2nm-4nm, and therefore, this technical method cannot realize photo-etching machine illumination system
The Ultra-smooth machining requirement of system axial cone mirror.
Germany IOM scientific research institution be representative development ion beam fabrication technology be by vacuum ionization ar atmo carry out ion
Bombardment workpiece minute surface, processing distance can reach as 5mm-50mm, and bombardment beam spot can reach 5mm-100mm.IOM technical staff uses
Sacrifice layer process technology achieves optical element roughness and promotes.But, ion beam processing beam spot is for focusing on light beam, for concave cone
Abnormal curved surface, easily causes diffraction and the pollution of central area minute surface of central area, it is impossible to realize the standard of face, central area shape
Really remove and roughness promotes.
Although flexible fluid bombardment technology can apply to the processing of concave cone mirror, but its technical matters can not solve to promote
CaF2The technical barrier of crystal roughness.And be by flexible magnetic fluid with the magnetorheological process technology of U.S.'s QED development of company
In externally-applied magnetic field, formation flexible polishing mould is to realize the shear removal of specular material, bombards technology relative to flexible fluid, soft
Property magnetic fluid is the Ultra-smooth machining that the polished die of carrier can realize optical mirror plane.The nano particle size that at present prepared by QED is magnetorheological
Liquid can realize CaF2The material roughness Ultra-smooth machining less than 0.3nm.But this technological deficiency is bistrique and workpiece minute surface distance
Less than 1.2mm.Chinese Academy of Sciences's photoelectric technology institute uses the Magnetorheologicai polishing liquid of independent development and glossing to complete CaF2
The Ultra-smooth machining of concave cone mirror, and for concave cone mirror, existing magneto-rheological grinding head but cannot penetrate with concave cone minute surface.
Architectural characteristic according to concave cone abnormal curved surface and the CaF of early stage2The processing experience of concave cone mirror, the present invention is referred from soft
The Ultra-smooth machining ability of property magnetic fluid has carried out magnetic fluid tool design and process research, CaF2Concave cone roughness is passed through
Processing in nearly 70 hours, surface roughness is promoted to 0.5nm from 25nm, and surface figure accuracy is promoted to from 1.3 microns from PV (peak-to-valley value)
0.4 micron, frustoconical bevel angle error is 5 rads.It is demonstrated experimentally that the magnetic fluid magnetic bar of the present invention and process can realize fluorination
The surface figure accuracy of calcium concave cone promotes and Ultra-smooth machining.The grinding of lithography machine illumination system axial cone mirror at great scale integrated circuit
System has important value.
Summary of the invention
The technical problem to be solved is to overcome the processing of existing technical matters cannot be applied to CaF2Concave cone mirror
The technological deficiency of processing, it is provided that one can be applicable to CaF2Concave cone mirror high efficiency, high accuracy improve the technical matters of roughness, from
And it is the high accuracy development offer technical guarantee of lithographic objective illuminator.This invention has taken into full account calcium fluoride crystal material
The characteristics such as material behavior and concave cone face polymorphic structure, use straight line magnetic bar to enter calcium fluoride concave cone based on magnetic fluid process technology
Row Even Grinding, eliminates sub-surface breakdown layer and the surface medium-high frequency in calcium fluoride concave cone face, promotes the surface roughness in concave cone face.
The present invention has stronger controlling to face shape, the cone angle in calcium fluoride concave cone face, has the surface roughness in calcium fluoride concave cone face
There is stronger enhancing, breach domestic existing technique and cannot process the technical bottleneck of concave cone abnormal curved surface, carry out light for China
Quarter, the development of machine projection exposure optical system provided technical guarantee.
For solving the problems referred to above, the present invention realizes by the following technical solutions:
A kind of magnetic fluid machining tool being applicable to promote calcium fluoride concave cone mirror roughness: magnetic fluid machining tool includes directly
Angle flange dish, motor diverter, straight line rod, Ru-Fe-Mn bar magnet, guide post, baseline rod and shaping rod；Wherein,
Described right angled flange upper end is fixed on lathe milling axle pedestal, and meanwhile, motor diverter is fixed on right angle
Ring flange bottom, motor diverter rotating shaft is connected with lathe milling axle, will the vertical duction composition level of lathe milling axle turn
To；
Described straight line rod is external diameter 12mm, the straight tube of internal diameter 8mm, and material is austenitic stainless steel material, and it is installed on electricity
Machine diverter endoporus；
The permeability magnetic material of described magnetic fluid instrument is Ru-Fe-Mn bar magnet, and magnetic field intensity is 1.25-1.28 tesla, magnetic pole
For the two ends of bar magnet, Ru-Fe-Mn bar magnet is embedded in straight line rod, and combination constitutes straight line magnetic bar；
Described guide post surface has concave slide groove, and is installed on motor diverter side by bolt；
Described baseline rod is fixed on guide post concave slide groove, can regulate shaping rod and straight line rod by moving reference bar
Distance；
Described shaping rod is mounted on baseline rod centre bore, and is fixed from side by bolt.
Wherein, described shaping rod is tungsten carbide material, for moulding to magnetic flow liquid.
The present invention also provides for a kind of magnetic fluid processing method being applicable to promote calcium fluoride concave cone mirror roughness, utilizes above-mentioned
Be applicable to promote calcium fluoride concave cone mirror roughness magnetic fluid machining tool, described a whole set of magnetic fluid machining tool need install
Yu Yitai possesses and carries out on the Digit Control Machine Tool of X, Z, A, C universal driving shaft, and X-axis is that trunnion axis, Z axis are vertical axis, rotate around X-axis
Be A axle, about the z axis rotate be C axle, calcium fluoride concave cone mirror to be processed is installed on turntable C axle, calcium fluoride concave cone mirror to be processed
(10) axis overlaps with C axle, needs turntable to be carried out A axle inclination, really according to coning angle before calcium fluoride concave cone mirror processing to be processed
Protect concave cone bus and the straight line rod horizontal parallel of calcium fluoride concave cone mirror to be processed；
Wherein, described calcium fluoride concave cone mirror working process parameter is: C axle autobiography speed is 5-10RPM, straight line rod rotating speed
For 4000-6000RPM, X-axis feed speed is 800-1000mm/min, and Z axis feed speed is 30-50mm/min, magnetic flow liquid
Thickness is 3mm, and the crush-cutting degree of depth is 1mm, and magnetic flow liquid replacing construction is 30min-50min.
Compared with prior art, advantages of the present invention is:
1, the present invention is based on material behavior and the concave cone face polymorphic structure characteristic of calcium fluoride crystal, flexible according to magnetic fluid
Polishing technology can realize the technical advantage of calcium fluoride Ultra-smooth machining, and the one carried out is applicable to calcium fluoride concave cone roughness and promotes
Magnetic fluid machining tool；
2, the involved concave cone simple in construction of the present invention, Technology is stable, and working ability is strong, it is adaptable to arbitrarily angled
Concave cone structure；
3, magnetic fluid instrument and the method for the present invention solves the domestic state of the art that cannot process CaF2 concave cone, for China
The development of lithographic objective illuminator provides technical guarantee.
Accompanying drawing explanation
Fig. 1 is for being applied to CaF2The magnetic fluid machining tool schematic diagram of concave cone mirror processing；
Fig. 2 is right angle flange and motor diverter connection diagram；
Fig. 3 is the straight line magnetic bar schematic diagram that Ru-Fe-Mn bar magnet is constituted in straight line magnetic bar；
Bar and the connected mode schematic diagram of guide post on the basis of Fig. 4；
Fig. 5 is magnetic fluid tool processes CaF2The process schematic of mirror；
Fig. 6 is magnetic fluid tool processes CaF2The roughness evolution of experimental piece.
Detailed description of the invention
Below in conjunction with accompanying drawing and detailed description of the invention, the present invention will be further explained:
As it is shown in figure 1, the magnetic fluid instrument of the calcium fluoride concave cone mirror roughness of the present invention specifically include that right angled flange 1,
Motor diverter 2, straight line rod 3, Ru-Fe-Mn bar magnet 4, guide post 5, baseline rod 6, shaping rod 7；
As in figure 2 it is shown, described right angled flange 1 upper end is fixed on lathe milling axle pedestal 8, meanwhile, motor break-in
Device 2 is fixed on right angled flange 1 bottom, and motor diverter rotating shaft is connected with lathe milling axle 9, will lathe milling axle 9 hang down
Straight steering component is horizontally diverted；
As it is shown on figure 3, described straight line rod 3 be external diameter 12mm, the straight tube of internal diameter 8mm, material is austenitic stainless steel material,
It is installed on motor diverter 2 endoporus；
As it is shown on figure 3, the permeability magnetic material of described magnetic fluid instrument is Ru-Fe-Mn bar magnet 4, magnetic field intensity is 1.25-1.28
Tesla.Magnetic pole is the two ends of bar magnet, and Ru-Fe-Mn bar magnet 4 is embedded in straight line rod 3, and combination constitutes straight line magnetic bar；
Described guide post 4 surface has concave slide groove, and is installed on motor diverter 2 side by bolt；
As shown in Figure 4, described baseline rod 6 is fixed on guide post concave slide groove, can up-down adjustment shaping rod 7 and straight line rod 3
Distance；
As shown in Figure 4, described shaping rod 7 is mounted on baseline rod 6 centre bore, and is fixed from side by bolt,
Shaping rod 7 is tungsten carbide material, is mainly used in carrying out moulding to magnetic flow liquid；
As it is shown in figure 5, described a whole set of work magnetic fluid instrument need to be installed on a numerical control machine possessing X, Z, A, C universal driving shaft
Carrying out on Chuan, calcium fluoride concave cone mirror 10 is installed on turntable C axle, needs will turn according to coning angle before the processing of calcium fluoride concave cone mirror
Platform carries out A axle inclination, it is ensured that concave cone bus and straight line rod horizontal parallel；
Described calcium fluoride concave cone mirror working process parameter is: C axle autobiography speed is 5-10RPM, and straight line rod rotating speed is
4000-6000RPM, X-axis feed speed is 800-1000mm/min, and Z axis feed speed is 30-50mm/min, and magnetic flow liquid is thick
Degree is 3mm, and the crush-cutting degree of depth is 1mm, and magnetic flow liquid replacing construction is 30min-50min.By above-mentioned technology method, to one
BlockCone angle is that the concave cone CaF2 material of 140 degree carries out roughness lifting, by 6 cycles, and the processing of totally 70 hours,
Roughness Rq is promoted to 0.5nm, surface figure accuracy PV (peak-to-valley value) by 25nm and is promoted to 0.4 micron from 1.3 microns, and frustoconical bevel angle is by mistake
Difference is 5 rads, as shown in Figure 6.
What the present invention did not elaborated partly belongs to techniques well known.
Claims (4)
1. the magnetic fluid machining tool being applicable to promote calcium fluoride concave cone mirror roughness, it is characterised in that: magnetic fluid is processed
Instrument includes right angled flange (1), motor diverter (2), straight line rod (3), Ru-Fe-Mn bar magnet (4), guide post (5), baseline rod
And shaping rod (7) (6)；Wherein:
Right angled flange (1) upper end is fixed on lathe milling axle pedestal (8), and meanwhile, motor diverter (2) is fixed on rectangularity
Blue dish (1) bottom, motor diverter (2) rotating shaft is connected with lathe milling axle (9), will the vertical duction of lathe milling axle (9)
Composition is horizontally diverted；
Straight line rod (3) is external diameter 12mm, the straight tube of internal diameter 8mm, and material is austenitic stainless steel material, and it is installed on motor diverter
(2) endoporus；
The magnetic conductive material of magnetic fluid instrument is Ru-Fe-Mn bar magnet (4), and magnetic field intensity is 1.25-1.28 tesla, and magnetic pole is magnetic
The two ends of rod, Ru-Fe-Mn bar magnet (4) is embedded in straight line rod (3), and combination constitutes straight line magnetic bar；
Guide post (5) surface has concave slide groove, and is installed on motor diverter (2) side by bolt；
Baseline rod (6) is fixed on guide post (5) concave slide groove, can regulate shaping rod (7) and straight line rod by moving reference bar (6)
(3) distance；
Shaping rod (7) is mounted on baseline rod (6) centre bore, and is fixed from side by bolt.
A kind of magnetic fluid machining tool being applicable to promote calcium fluoride concave cone mirror roughness the most according to claim 1, its
It is characterised by: shaping rod (7) is tungsten carbide material, for magnetic flow liquid is carried out moulding.
3. it is applicable to promote a magnetic fluid processing method for calcium fluoride concave cone mirror roughness, utilizes fitting described in claim 1
For promoting the magnetic fluid machining tool of calcium fluoride concave cone mirror roughness, it is characterised in that: a whole set of magnetic fluid machining tool needs peace
Being loaded on a Digit Control Machine Tool possessing X, Z, A, C universal driving shaft and carry out, X-axis is that trunnion axis, Z axis are vertical axis, revolve around X-axis
Turn be A axle, about the z axis rotate be C axle, calcium fluoride concave cone mirror (10) to be processed is installed on C axle turntable, calcium fluoride to be processed
Concave cone mirror (10) axis overlaps with C axle, needs, according to coning angle, turntable is carried out A axle and incline before calcium fluoride concave cone mirror processing to be processed
Tiltedly, it is ensured that the concave cone bus of calcium fluoride concave cone mirror (10) to be processed and straight line rod (3) horizontal parallel.
A kind of magnetic fluid processing method being applicable to promote calcium fluoride concave cone mirror roughness the most according to claim 3, its
It is characterised by: calcium fluoride concave cone mirror (10) working process parameter is: C axle autobiography speed is 5-10RPM, and straight line rod rotating speed is
4000-6000RPM, X-axis feed speed is 800-1000mm/min, and Z axis feed speed is 30-50mm/min, and magnetic flow liquid is thick
Degree is 3mm, and the crush-cutting degree of depth is 1mm, and magnetic flow liquid replacing construction is 30min-50min.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610530355.0A CN106181675B (en) | 2016-07-07 | 2016-07-07 | A kind of magnetic fluid machining tool and processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness |
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|---|---|---|---|
| CN201610530355.0A CN106181675B (en) | 2016-07-07 | 2016-07-07 | A kind of magnetic fluid machining tool and processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness |
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| CN106181675A true CN106181675A (en) | 2016-12-07 |
| CN106181675B CN106181675B (en) | 2018-04-03 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114603430A (en) * | 2022-05-10 | 2022-06-10 | 中国科学院光电技术研究所 | Method and tool for inhibiting surface band-breaking errors of deep axicon optical element |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114603430A (en) * | 2022-05-10 | 2022-06-10 | 中国科学院光电技术研究所 | Method and tool for inhibiting surface band-breaking errors of deep axicon optical element |
| CN114603430B (en) * | 2022-05-10 | 2022-08-19 | 中国科学院光电技术研究所 | Method for inhibiting surface band-breaking errors of deep axicon optical element |
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