CN106179155B - Plasma liquefier - Google Patents

Plasma liquefier Download PDF

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CN106179155B
CN106179155B CN201610805384.3A CN201610805384A CN106179155B CN 106179155 B CN106179155 B CN 106179155B CN 201610805384 A CN201610805384 A CN 201610805384A CN 106179155 B CN106179155 B CN 106179155B
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electrode
plasma
inner
insulating
ground
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CN106179155A (en
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张先徽
席登科
周儒森
李江伟
杨思泽
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厦门大学
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Abstract

等离子体液化装置,涉及生物质液化。 Plasma liquefier, to biomass liquefaction. 设有反应腔体、绝缘盖、电极移动槽、搅拌器、外电极、绝缘套管、内电极、交流电源、气瓶、直流电源;所述反应腔体置于搅拌器上;绝缘盖盖于反应腔体上,绝缘盖上设有电极移动槽,电极移动槽供电极左右移动,改变电极距离,可有不同的放电区域,绝缘套管设于外电极与内电极之间;内电极设有高压内电极和接地内电极,内电极用于介质阻挡放电,外电极也设有高压外电极和接地外电极,外电极用于弧光放电;绝缘套管与气瓶连接,气瓶内装惰性气体,用于内电极介质阻挡放电产生等离子体;绝缘盖中间设有供排气的出气孔;高压外电极与直流电源高压电极连接,接地外电极与直流电源接地极连接。 The reaction chamber is provided with an insulating cover, move the electrode groove, a stirrer, an outer electrode, the insulating sleeve, the inner electrode, AC power cylinder, a DC power supply; the reaction chamber was placed on a stirrer; the insulating cap in the reaction chamber, the insulating cover is provided with an electrode moving groove, the groove moving electrode move around powered electrode, electrode distance changes, may have different discharge regions, an insulating sleeve disposed between the outer electrode and the inner electrode; inner electrode is provided with the high voltage electrode and the ground electrode, an electrode for the dielectric barrier discharge, also provided with an outer electrode external high voltage electrode and outer ground electrode, an outer electrode for arc discharge; insulating sleeve is connected to the cylinder, the cylinder interior an inert gas, for the dielectric barrier discharge plasma; intermediate insulating cover is provided with a supply and exhaust vent; high-voltage DC power supply external electrode connected to the high voltage electrode, a ground electrode and an outer electrode connected to a DC power supply ground.

Description

等离子体液化装置 Plasma liquefier

技术领域 FIELD

[0001] 本发明涉及生物质液化,尤其是涉及一种等离子体液化装置。 [0001] The present invention relates to the liquefaction of biomass, particularly to a plasma liquefier.

背景技术 Background technique

[0002] 生物质能源是可再生、可替代化石能源、可转化成液态和气态燃料以及其它化工原料或产品的碳资源的能源。 [0002] Biomass is a renewable, alternative fossil energy, may be converted into liquid and gaseous fuels and other energy resources carbon chemical feedstock or product of. 生物质液化技术是最具有发展潜力的生物质能利用技术之一。 Biomass and biomass liquefaction technology is the most development potential of using one technology. 目前生物质直接液化技术有高压液化技术、快速热解液化技术、常压下液化剂液化技术等,而液化剂液化主要有苯酚液化和多元醇液化。 Currently direct liquefaction of biomass with high-pressure liquefaction technology, the rapid pyrolysis technique, liquefiers liquefaction technology under atmospheric pressure, and the liquefying agent and liquefied mainly of liquefied liquefied polyol. 与此同时,临界技术、微波技术等也被引入到生物质液化中来。 At the same time, the critical technology, microwave technology has also been introduced to the liquefaction of biomass in the past. 然而就目前的生物质液化工艺而言,主要是采取高温高压的方式,存在耗能高、成本高等缺点;而液化剂液化技术需要给反应加热,液化时间长且液化率不高。 However, in terms of current biomass liquefaction process, mainly taking the way high temperature and pressure, the presence of high energy consumption, high cost; the liquefying agent liquefaction reaction was heated to require a long time liquefied liquefied rate is not high. 等离子体由电子、离子、原子、分子、激发态活性物组成,拥有独特的化学活性和高反应性, 使得许多传统方法不易或不可能实现的化学反应变为可能。 Plasma from electrons, ions, atoms, molecules, excited active composition, has a unique chemical reactivity and high reactivity, so that many of the traditional methods difficult or impossible to achieve a chemical reaction becomes possible. 人们开始尝试将等离子体技术应用到生物质热转化技术中。 People began to try to apply plasma technology to convert raw material thermal technology. Steinberg等(Steinberg M.Conversion of fossil and biomass fuels to electric power and transportation fuels by high efficiency integrated plasma fuel cell (IPFC) energy cycle[J].Hydrogen Energy,2006,31 (3): 4〇5 — 411)利用等离子体技术将矿石燃料和生物质转化为电能、氢和液体燃料。 Steinberg et al (Steinberg M.Conversion of fossil and biomass fuels to electric power and transportation fuels by high efficiency integrated plasma fuel cell (IPFC) energy cycle [J] .Hydrogen Energy, 2006,31 (3): 4〇5 --411) the fossil fuel and biomass into electricity, hydrogen, and liquid fuel using plasma technology. Yi Weiming 等(Yi Weiming,Bai Xueyuan,Xiu Shuangning,et al•Thedevolati1ization charactertics of[J].Journal of Engineering Thermophysics,2006,27(2) :135-138. (in Chinese with English abstract))利用高温等离子体对生物质的快速热解液化进行了研究。 Yi Weiming et (Yi Weiming, Bai Xueyuan, Xiu Shuangning, et al • Thedevolati1ization charactertics of [J] .Journal of Engineering Thermophysics, 2006,27 (2):. 135-138 (in Chinese with English abstract)) using a high temperature plasma body fast pyrolysis of biomass were studied. Tang等(Tang L,Huang H.Biomass gasification using capacitively coupled RF plasma technology[J].Fuel,2〇〇5,84(16) :2055 — 2063)利用木屑为原料,采用射频电容耦合等离子体技术,实现生物质的气化。 Tang et al (Tang L, Huang H.Biomass gasification using capacitively coupled RF plasma technology [J] .Fuel, 2〇〇5,84 (16): 2055--2063) using sawdust, capacitively coupled plasma using radio frequency technology, achieve gasification of biomass. Rusen Zhou等(Zhou,R.,et al.Fast liquefaction of bamboo shoot shell with liquid-phase Microplasma assisted technology.Bioresour.Technol.2016,http://dx.doi.org/10.1016/ j • biortech • 2016 • O7 • 042)利用等离子体辅助液化剂快速液化笋壳。 Rusen Zhou et (Zhou, R., et al.Fast liquefaction of bamboo shoot shell with liquid-phase Microplasma assisted technology.Bioresour.Technol.2016, http: //dx.doi.org/10.1016/ j • biortech • 2016 • O7 • 042) assist rapid liquefaction Hock liquefiers using plasma.

发明内容 SUMMARY

[0003]本发明的目的在于针对Rusen Zhou等公开的液化放电装置存在不易放电等缺点, 提供可实现生物质快速液化,缩短液化时间,提高液化率,减少催化剂的量,得到富含酚化衍生物或羟基等活性集团液化产物的一种等离子体液化装置。 [0003] The object of the present invention is disclosed for liquefying Rusen Zhou et presence discharge device easily discharge disadvantages and to provide rapid liquefaction of biomass can be achieved, shorter liquefaction time, improve liquefaction rate, reducing the amount of catalyst, phenolic-enriched derivatization to give a plasma apparatus liquefaction or liquefied products of hydroxyl-reactive groups and the like.

[0004]本发明设有反应腔体、绝缘盖、电极移动槽、搅拌器、外电极、绝缘套管、内电极、交流电源、气瓶、直流电源;所述反应腔体置于搅拌器上;所述反应腔体装入反应的生物质、溶剂、催化剂和磁子,绝缘盖盖于反应胚体上,绝缘盖上设有电极移动槽,电极移动槽供电极左右移动,改变电极距离,可有不同的放电区域,绝缘套管设于外电极与内电极之间;内电极设有高压内电极和接地内电极,内电极用于介质阻挡放电,外电极也设有高压外电极和接地外电极,外电极用于弧光放电;绝缘套管与气瓶连接,气瓶内装惰性气体,用于内电极介质阻挡放电产生等离子体;绝缘盖中间设有供排气的出气孔;高压外电极与直流电源高压电极连接,接地外电极与直流电源接地极连接。 [0004] The present invention is provided with a reaction chamber, an insulating cover, move the electrode groove, a stirrer, an outer electrode, the insulating sleeve, the inner electrode, AC power cylinder, a DC power supply; the reaction chamber was placed on a stirrer ; biomass charged to the reaction chamber of the reaction, the solvent, the catalyst and the sub-magnetic, insulating cap on the reaction embryo, the insulating cover is provided with an electrode moving groove, the groove moving electrode move around powered electrode, electrode distance changes, may have different discharge regions, an insulating sleeve disposed between the outer electrode and the inner electrode; electrode provided within the inner high voltage electrode and a ground electrode, a dielectric barrier discharge within the electrode, the outer electrode is also provided with external high-voltage electrode and the ground an outer electrode, the outer electrode for arc discharge; insulating sleeve is connected to the cylinder, the cylinder interior gas is an inert, for the dielectric barrier discharge plasma; intermediate insulating cover is provided with a supply and exhaust vent; external high-voltage electrode DC power supply connected to the high voltage electrode, a ground electrode and an outer electrode connected to a DC power supply ground.

[0005] 所述反应腔体的内径可为2〜250cm,厚度可为1〜100圓,高度可为2〜350cm,反应腔体可采用陶瓷、刚玉、石英、聚四氟乙烯之一制作。 [0005] The inner diameter of the reaction chamber may be 2~250cm, a thickness of 1~100 may be round, it can be highly ceramics, corundum, quartz, teflon as one 2~350cm, the reaction chamber.

[0006]所述绝缘盖的厚度可为2〜60mm,直径可为5〜250cm,绝缘盖可采用陶瓷、刚玉、石英、聚四氟乙烯之一制作。 [0006] The thickness of the insulating cover may be 2~60mm, diameter of 5~250cm, the insulating cover can be ceramic, corundum, quartz, teflon one.

[0007] 所述外电极的内径可为2〜20mm,外径可为3〜40mm,长度可为5〜350cm,材质为耐高温性能良好的铜、银、钨等,外电极置于电极移动槽内在步进电机的带动下左右可移动距离为0.1〜30cm;外电极内部由绝缘套管和高压内电极组成,接地外电极内部由绝缘套管和接地内电极组成。 [0007] The inner diameter of the outer electrode may be 2~20mm, the outer diameter may be 3~40mm, length of 5~350cm, good high temperature resistance made of copper, silver, tungsten, etc., external electrodes are placed moving electrode right and left movable tank stepper motor driven distance 0.1~30cm; inner and outer electrode by an insulating sleeve consisting of the high voltage electrode, the internal ground external electrode by an insulating sleeve and an inner ground electrodes.

[0008] 所述绝缘套管的内径可为0.5〜10mm,外径可为1〜15mm,长度可为2〜250cm,可采用陶瓷、刚玉、石英、聚四氟乙烯之一制作。 [0008] The inner diameter of the bushing may be 0.5~10mm, the outer diameter may be 1~15mm, length of 2~250cm, can be ceramics, corundum, quartz, teflon one.

[0009]所述内电极的直径可为0.2〜5mm,长度可为2〜250cm,材质为耐高温性能良好的铜、银、钨等;高压内电极位于绝缘套管内,与交流电源高压电极连接,接地内电极位于绝缘套管内,与交流电源接地电极连接。 Diameter [0009] of the inner electrode may be 0.2~5mm, length of 2~250cm, good high temperature resistance made of copper, silver, tungsten and the like; an inner electrode positioned within the insulating high-voltage bushing, a high voltage electrode connected to an AC power supply , the ground electrode is positioned within the insulating sleeve, a ground electrode connected to an AC power source.

[0010] 所述交流电源可采用高频高压交流电源,电压为1000〜30000V,频率为5〜50kHz。 [0010] The AC power supply may be employed high frequency high voltage AC, voltage 1000~30000V, frequency 5~50kHz. [0011] 所述直流电源可采用脉冲直流电源,可输出脉冲电压200〜2500V,能产生稳定等离子体。 The [0011] DC power supply can be pulsed DC power supply, the output pulse voltage 200~2500V, can produce stable plasma.

[0012]当给内电极加压,并通气,两电极之间电压达到一定值后,气体被击穿产生辉光放电,生成大量等离子体,便于生物质液化反应。 After [0012] When the pressing to the inner electrode, and ventilation, the voltage between the electrodes reaches a certain value, the breakdown of a glow discharge gas, a large amount of plasma to facilitate liquefaction reaction raw materials. 当反应一定时间后,关掉内电极,给外电极加电压时,电极发热,附近产生大量气泡。 After a certain reaction time, turn off the internal electrode, when voltage is applied to the external electrodes, the electrodes heat, a large amount of bubbles near. 当电压达到一定值时,气体被击穿而放电。 When the voltage reaches a certain value, the gas is discharged breakdown. 其初电压较低时,有火花放电,可看到反应混合物中产生少量火花。 First it is low voltage, spark discharge, can be seen in the reaction mix a small amount of sparks. 电压稳定后,会产生辉光放电,电压进一步加大会产生弧光放电,电流增大,此时反应剧烈,混合物沸腾,产生黑色浓烟。 After stabilizing the voltage, a glow discharge is generated, to further increase the voltage generated arc discharge current increases, when vigorous reaction mixture was boiled to produce black smoke. 由于等离子体本生具有高活性物质,以及高能量,混合物很快被液化,最终得到黑色液化产物, 抽滤后得到固体残渣和液态油状物。 Since the plasma has a high Bunsen active material, and high energy, the mixture will soon be liquefied, liquefied black product finally obtained, to give a solid residue after the suction filtration and liquid oil.

[0013] 鉴于Rusen Zhou等公开的液化放电装置存在不易放电等缺点,本发明由内外两跟电极插在生物质(如木屑,笋壳等)、液化剂(苯酚、多元醇等)、催化剂(硫酸、氢氧化钠等)的混合液中,并在内电极中通入气体。 [0013] Given Rusen Zhou et disclosed liquefaction discharge device easily discharge and other shortcomings, the present invention is inserted from the both inside and outside with the electrodes in the biomass (e.g., sawdust, bamboo shell, etc.), liquefying agent (phenol, polyhydric alcohols, etc.), a catalyst ( a mixture of sulfuric acid, sodium hydroxide, etc.), the internal electrode and into the gas. 首先在内电极施加电压介质阻挡放电,产生等离子体。 First, a voltage is applied to the inner electrode of the dielectric barrier discharge plasma is generated. 待反应进行一定时间后关掉内电极电源,施加外电极电压,弧光放电,产生等离子体。 After the reaction for a certain time to turn off the power supply electrodes, a voltage is applied to the external electrodes, arc discharge, plasma is generated. 由于等离子体产生的电子、活性分子以及等离子体本生具有的高能量实现了生物质的快速液化,提高了液化率,减少了催化剂的量,得到了富含酚化衍生物或羟基等活性集团的液化产物。 Since the electron, and a plasma Bunsen active molecules having high energy generated plasma to achieve rapid liquefaction of biomass, increases the rate of liquefaction, the amount of catalyst is obtained, rich in phenol derivatives or hydroxyl-reactive groups liquefied product. 本发明具有安全性高、液化率高,液化时间短等效果。 The present invention has high safety, high liquefaction, shorter time to effect liquefaction. 本发明的结构简单,操作容易,易于在生物质液化领域和工业上普及。 Structure of the present invention is simple, easy to operate, easy to spread in the biomass liquefaction and industrial.

附图说明 BRIEF DESCRIPTION

[0014] 图1是本发明实施例的结构组成示意图。 [0014] FIG. 1 is a configuration example of a schematic composition of the present invention.

[0015] 图2是本发明实施例的内外电极剖面示意图。 [0015] FIG. 2 is a schematic cross-sectional inner and outer electrodes of the present embodiment of the invention.

具体实施方式 Detailed ways

[0016]参见图1和2,本发明实施例设有反应腔体1、绝缘盖2、电极移动槽3、出气孔4、高压外电极5-1、接地外电极5_2、通气绝缘套管6_1、封闭绝缘套管6-2、高压内电极7-1、接地内电极7-2、搅拌器8、交流电源9、气瓶10、直流电源11;具体实施过程如下:配好溶液,装入反应腔,打开气瓶、搅拌器,通过交流电源9给高压内电极7-1施加电压。 [0016] Referring to FIGS. 1 and 2, embodiments of the present invention is provided with a reaction chamber 1, the insulating cover 2, the mobile electrode tank 3, a hole 4, a high-pressure external electrode 5-1, grounding external electrode 5_2, 6_1 vent bushing , enclosing an insulating sleeve 6-2, 7-1 the high voltage electrode, the ground electrode 7-2, a stirrer 8, the AC power source 9, the cylinder 10, the DC power supply 11; the specific implementation process is as follows: with a good solution, was charged the reaction chamber, open the cylinder, a stirrer, 7-1 by an AC voltage is applied to the high voltage electrode 9. 电压上升过程中,混合物产生浓烟,由出气孔排出。 During the voltage rise resulting mixture smoke discharged from the vent. 反应一段时间后,关掉交流电源9。 After the reaction period of time, turn off the AC power source 9. 打开直流电压,给外电极5一1 加压,待电流稳定到0.2A后停止增加电压,此时稳定放电,产生浓烟,混合物逐渐变黑,慢慢被液化。 Open the DC voltage to the outer electrode 5 a pressing force, to be stable after 0.2A current stops increasing voltage so that the discharge stability, generation of smoke, the mixture was gradually darken slowly liquefied. 反应5min后,生物质几乎完全液化。 After the reaction 5min, the biomass is almost complete liquefaction. 逐渐将电压调小,关掉电源,液化结束。 Gradually small voltage regulation, power is turned off, the end of liquefaction.

[0017]所述反应腔体的内径为2〜250cm,厚度为1〜100mm,高度为2〜350cm,反应腔体采用陶瓷、刚玉、石英、聚四氟乙烯之一制作。 [0017] The inner diameter of the reaction chamber is 2~250cm, thickness 1~100mm, height 2~350cm, the reaction chamber is made of ceramics, corundum, quartz, teflon one.

[0018]所述绝缘盖的厚度为2〜60mm,直径为5〜25〇cm,绝缘盖采用陶瓷、刚玉、石英、聚四氟乙烯之一制作。 [0018] The thickness of the insulating cover 2~60mm, 5~25〇cm diameter of the insulating cover is made of ceramics, corundum, quartz, teflon one.

[0019] 所述外电极的内径为2〜20mm,外径为3〜40mm,长度为5〜350cm,材质为耐高温性能良好的铜、银、钨等,外电极置于电极移动槽内在步进电机的带动下左右移动距离为H 〜30cm;外电极内部由绝缘套管和高压内电极组成,接地外电极内部由绝缘套管和接地内电极组成。 [0019] The inner diameter of the outer electrode is 2~20mm, an outer diameter of 3~40mm, length 5~350cm, good high temperature resistance made of copper, silver, tungsten, etc., external electrodes are placed in the electrode tank moves a stepping motor driven by the left and right moving distance H ~30cm; inner and outer electrode by an insulating sleeve within the high-voltage electrode composed of the internal ground external electrode by an insulating sleeve and the ground electrodes.

[0020]所述绝缘套管的内径为0.5〜10mm,外径为1〜15mm,长度为2〜250cm,采用陶瓷、 刚玉、石英、聚四氟乙烯之一制作。 [0020] The inner diameter of the bushing is 0.5~10mm, an outer diameter of 1~15mm, length 2~250cm, ceramic, corundum, quartz, teflon one.

[0021]所述内电极的直径为0.2〜5mm,长度为2〜250cm,材质为耐高温性能良好的铜、 银、钨等;高压内电极位于绝缘套管内,与交流电源高压电极连接,接地内电极位于绝缘套管内,与交流电源接地电极连接。 [0021] The diameter of the inner electrode is 0.2~5mm, length 2~250cm, good high temperature resistance made of copper, silver, tungsten and the like; the high-voltage electrode is positioned within the insulating sleeve, connected to an AC power supply high voltage electrode, a ground an inner electrode positioned within the insulating sleeve, a ground electrode connected to an AC power source.

[0022]所述交流电源采用高频高压交流电源,电压为1000〜30000V,频率为5〜50kHz。 [0022] The high frequency high voltage AC power supply AC power supply voltage 1000~30000V, frequency 5~50kHz. [0023]所述直流电源采用脉冲直流电源,可输出脉冲电压200〜2500V,能产生稳定等离子体。 [0023] The DC power supply DC pulse power supply, the output pulse voltage 200~2500V, can produce stable plasma.

Claims (7)

1.等离子体液化装置,其特征在于设有反应腔体、绝缘盖、电极移动槽、搅拌器、外电极、绝缘套管、内电极、交流电源、气瓶、直流电源;所述反应腔体置于搅拌器上;所述反应腔体装入反应的生物质、溶剂、催化剂和磁子,绝缘盖盖于反应腔体上,绝缘盖上设有电极移动槽,电极移动槽供电极左右移动,改变电极距离,有不同的放电区域,绝缘套管设于外电极与内电极之间;内电极设有局压内电极和接地内电极,内电极用于介质阻挡放电,外电极也设有高压外电极和接地外电极,外电极用于弧光放电;绝缘套管与气瓶连接,气瓶内装惰性气体,用于内电极介质阻挡放电产生等离子体;绝缘盖中间设有供排气的出气孔;高压外电极与直流电源高压电极连接,接地外电极与直流电源接地极连接; 所述反应腔体的内径为2〜250cm,厚度为1〜100mm,高度为2〜350c 1. The plasma liquefier, characterized in that the reaction chamber is provided with an insulating cover, move the electrode groove, a stirrer, an outer electrode, the insulating sleeve, the inner electrode, AC power, cylinder, direct current power source; said reaction chamber placed on a stirrer; biomass charged to the reaction chamber of the reaction, the solvent, the catalyst and the sub-magnetic, insulating cap on the reaction chamber, the insulating cover is provided with an electrode moving groove, the groove moving electrode move around powered electrode , changing the electrode distance, different discharge region, an insulating sleeve disposed between the outer electrode and the inner electrode; Bureau inner electrode is provided with inner pressure and ground electrodes, a dielectric barrier discharge within the electrode, the outer electrode is also provided an insulating intermediate cover is provided for the exhaust gas; external high voltage electrode and a ground external electrode, the external electrode for arc discharge; insulating sleeve is connected to the cylinder, the cylinder interior gas is an inert, for the dielectric barrier discharge plasma porosity; high-voltage DC power supply external electrode connected to the high voltage electrode, a ground electrode and external DC power source connected to a ground electrode; inner diameter of the reaction chamber is 2~250cm, thickness 1~100mm, height 2~350c m; 所述反应腔体采用陶瓷、刚玉、石英、聚四氟乙烯之一制作。 m; the reaction chamber is made of ceramics, corundum, quartz, teflon one.
2.如权利要求1所述等离子体液化装置,其特征在于所述绝缘盖的厚度为2〜60mm,直径为5〜250cm。 2. The apparatus as claimed in claim 1 plasma liquefaction, wherein a thickness of the insulating cover 2~60mm, diameter 5~250cm.
3.如权利要求1所述等离子体液化装置,其特征在于绝缘盖采用陶瓷、刚玉、石英、聚四氟乙烯之一制作。 The plasma liquefaction apparatus 1 of claim, wherein the insulating cover is made of ceramics, corundum, quartz, teflon one.
4.如权利要求1所述等离子体液化装置,其特征在于所述外电极的内径为2〜20mm,外径为3〜40圓,长度为5〜350cm,材质为耐高温性能良好的铜、银、妈,外电极置于电极移动槽内在步进电机的带动下左右的移动距离为0.1〜3〇cm;外电极内部由绝缘套管和高压内电极组成,接地外电极内部由绝缘套管和接地内电极组成。 4. The apparatus as claimed in claim 1 liquefying plasma, wherein the inner diameter of the outer electrode is 2~20mm, an outer diameter of 3~40 circle length 5~350cm, good high temperature resistance made of copper, silver, mother external electrodes are placed in the electrode tank moving distance of the left and right movement of the stepping motor is driven 0.1~3〇cm; inside of the outer electrode by the inner high voltage electrode and the insulating sleeve composed of an insulating inner sheath ground outer electrode and an inner tube composed of the ground electrode.
5.如权利要求1所述等离子体液化装置,其特征在于所述绝缘套管的内径为〇.5〜 10mm,外径为1〜15mm,长度为2〜250cm,采用陶瓷、刚玉、石英、聚四氟乙烯之一制作。 5. The apparatus as claimed in claim 1 liquefying plasma, wherein the inner diameter of the bushing is 〇.5~ 10mm, an outer diameter of 1~15mm, length 2~250cm, ceramic, corundum, quartz, one of teflon.
6.如权利要求1所述等离子体液化装置,其特征在于所述内电极的直径为〇. 2〜5ram,长度为2〜250cm,材质为耐高温性能良好的铜、银、钨;高压内电极位于绝缘套管内,与交流电源高压电极连接,接地内电极位于绝缘套管内,与交流电源接地电极连接。 A high pressure; plasma as claimed in claim 1 liquefier, characterized in that the diameter of the inner electrode is square 2~5ram, length 2~250cm, good high temperature resistance made of copper, silver, tungsten. electrodes positioned within the insulating sleeve, connected to an AC power supply high voltage electrode, the ground electrode is positioned within the insulating sleeve, a ground electrode connected to an AC power source.
7.如权利要求1所述等离子体液化装置,其特征在于所述交流电源采用髙频高压交流电源,电压为1000〜30000V,频率为5〜50kHz。 7. The apparatus as claimed in claim 1 liquefying plasma, wherein said high-voltage AC power frequency AC power using Gao, voltage 1000~30000V, frequency 5~50kHz. S.如权利要求1所述等离子体液化装置,其特征在于所述直流电源采用脉冲直流电源, 输出脉冲电压2〇〇〜25〇〇v。 1 S. The plasma liquefaction apparatus as claimed in claim, wherein the DC power supply DC pulse power supply, the output pulse voltage 2〇〇~25〇〇v.
CN201610805384.3A 2016-09-07 2016-09-07 Plasma liquefier CN106179155B (en)

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WO2007149727A2 (en) * 2006-06-12 2007-12-27 Semequip, Inc. Method and apparatus for extracting ions from an ion source for use in ion implantation
CN104003845A (en) * 2014-06-11 2014-08-27 大连理工大学 Method for conversion of methanol
CN105174360A (en) * 2015-09-25 2015-12-23 大连理工大学 Method for adopting discharge plasma to activate persulfate
CN206027675U (en) * 2016-09-07 2017-03-22 厦门大学 Plasma liquefying plant

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007149727A2 (en) * 2006-06-12 2007-12-27 Semequip, Inc. Method and apparatus for extracting ions from an ion source for use in ion implantation
CN104003845A (en) * 2014-06-11 2014-08-27 大连理工大学 Method for conversion of methanol
CN105174360A (en) * 2015-09-25 2015-12-23 大连理工大学 Method for adopting discharge plasma to activate persulfate
CN206027675U (en) * 2016-09-07 2017-03-22 厦门大学 Plasma liquefying plant

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