CN106153124A - A kind of optical fiber temperature and pressure integrative sensor - Google Patents

A kind of optical fiber temperature and pressure integrative sensor Download PDF

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Publication number
CN106153124A
CN106153124A CN201610821034.6A CN201610821034A CN106153124A CN 106153124 A CN106153124 A CN 106153124A CN 201610821034 A CN201610821034 A CN 201610821034A CN 106153124 A CN106153124 A CN 106153124A
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cavity
optical fiber
pressure
temperature
sensor
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CN106153124B (en
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李游平
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Zhongshan Shuimu Guanghua electronic Mdt InfoTech Ltd
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Chengdu Chuanghui Keda Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

Abstract

The invention discloses a kind of optical fiber temperature and pressure integrative sensor, it is characterised in that: include light source, circulator, spectroanalysis instrument and induction module;Described light source connects circulator by optical fiber, and circulator connects induction module and spectroanalysis instrument respectively;Described induction module is cylindrical housings, and described enclosure interior includes cavity and fiber grating, and described cavity is made up of cavity A, cavity B and interlayer;Described interlayer is located between cavity A and cavity B;Described housing surface is pasted with series welding FBG1, FBG2 and FBG3 fiber grating together, and FBG1, FBG2 and FBG3 fiber grating is pasted on the size path position of corresponding cavity A and cavity B respectively.Optical fiber temperature and pressure integrative sensor of the present invention can carry out the measurement of temperature and pressure simultaneously, solves the cross sensitivity of temperature and pressure simultaneously, improves the certainty of measurement of sensor.

Description

A kind of optical fiber temperature and pressure integrative sensor
Technical field
The present invention relates to Fibre Optical Sensor field, especially a kind of optical fiber temperature and pressure integrative sensor.
Background technology
Temperature sensor and pressure transducer can be described as two kinds of sensors that sensor industry uses maximum, Er Qiewen Degree sensor and pressure transducer are often used together.Need the when of measuring pressure and temperature, to be required for that pressure is installed to pass every time Sensor and temperature sensor, inconvenient.Especially can account at the place of limited space, temperature sensor and pressure transducer With a lot of spaces;Realization about the common sensor measured of temperature and pressure becomes more and more important.
Fiber-optic grating sensor be development in recent years the most rapidly, one of the fiber optic passive device that is most widely used, with Tradition electrical sensor is compared, and fiber-optic grating sensor has simple in construction, good reliability, anticorrosive, anti-electromagnetic interference capability By force, the advantages such as large-area multimetering can be carried out;Many physical parameters can be realized, such as district while temperature, pressure, flow etc. Point measure, overcome that traditional sensors cost is high, certainty of measurement is low and the shortcoming of mutually crosstalk between multiple parameter;Fiber grating passes Sensor can be used for the common measurement of temperature and pressure, but simultaneously because fiber grating pair temperature and strain are the most sensitive, optical fiber light The change of grid centre wavelength acts on while being often decided by extraneous strain and temperature, under different stress effects and different temperatures Under photoelasticity different, the effect of strain and temperature on fiber grating is coupling, and the wavelength change detecting single optical fiber cannot Strain and temperature are distinguish between.
For the cross sensitivity problem of fiber grating, currently the majority uses the combination of two or more fiber gratings Overcoming, this method needs two demodulation light source, two spectroanalysis instruments, not only increases cost, and passes to fiber grating The actual application of sensor is made troubles, the advantage losing fiber-optic grating sensor distinctive Wavelength-encoding characteristic;Used simultaneously The measuring method of fiber grating calculate extremely complex, amount of calculation is many, needs the parameter measured a lot, and the precision measured and The precision calculated is not the most fine, it is impossible to reach the purpose of high-acruracy survey.
Summary of the invention
The goal of the invention of the present invention is: for the problem of above-mentioned existence, it is provided that one is simple and convenient can solve the problem that temperature Measure with while pressure, and the strain of temperature and pressure is distinguished in measuring at the same time, solve the light of cross sensitivity problem Fine temperature and pressure integrative sensor.
The technical solution used in the present invention is as follows:
One optical fiber temperature and pressure integrative sensor of the present invention, including light source, circulator, spectroanalysis instrument and induction module;Institute Stating light source and connect circulator by optical fiber, circulator connects induction module and spectroanalysis instrument respectively;Described induction module is circle Cylindrical shell, described enclosure interior includes cavity and fiber grating, and described cavity is made up of cavity A, cavity B and interlayer;Described Interlayer is located between cavity A and cavity B, and interlayer is provided with import and export M;Described cavity B is convex cavity, including big footpath cavity With path cavity, the cavity wall on cavity B interlayer opposite is provided with import and export N;Described housing surface is pasted with series welding one FBG1, FBG2 and FBG3 fiber grating risen, FBG1, FBG2 and FBG3 fiber grating is pasted on corresponding cavity A and sky respectively The size path position of chamber B.
Above structure, detected gas or liquid are from importing and exporting M and importing and exporting N entrance cavity, and the cavity wall of cavity is being surveyed Deform upon under the pressure and temperature effect of gas or liquid, and be delivered in fiber grating, drive FBG to produce deformation, cause The drift of wavelength, records wave length shift by spectroanalysis instrument, according to corresponding relation, just can calculate pressure and temperature.
One optical fiber temperature and pressure integrative sensor of the present invention, described spectroanalysis instrument connects computer, carries out data process.
One optical fiber temperature and pressure integrative sensor of the present invention, the chamber of big footpath cavity in the cavity wall thickness of described cavity A and cavity B Wall thickness is identical;Described alite paste is cyanoacrylate 502-1 binding agent.
Above structure, when being under pressure and during temperature, due to the transmission effect of strain, drives FBG to produce deformation, FBG2 and FBG3 is pasted onto in same material, temperature the wavelength shift caused is identical, and the inner wall thickness of cavity B is different, answering of transmission Variable is different, and the deformation quantity that FBG produces is different, and then Bragg wavelength drift amount is different, by measuring wavelength shift, permissible Try to achieve pressure;The thickness of FBG1 with FBG2 is identical, pressure the wavelength shift caused is identical, owing to FBG1 and FBG2 is pasted onto Not in same material, the deformation quantity that FBG produces is different, and then Bragg wavelength drift amount is different, by measuring wavelength shift, Can be in the hope of temperature.
One optical fiber temperature and pressure integrative sensor of the present invention, the cavity wall of described cavity A is 10MoWVNb alloy-layer, cavity B's Cavity wall is nickel based highly elastic alloy layer.
Above structure, 10MoWVNb alloy and nickel based highly elastic alloy all have the highest elastic sensitivity and temperature expansion Property, more significantly deformation can be produced under pressure and temperature effect, thus be conducive to measuring.
One optical fiber temperature and pressure integrative sensor of the present invention, the chemical composition of described nickel based highly elastic alloy includes: Be:1.9- 2.5wt%, Ti:0.4-0.6wt%, Fe:0.3wt%, Cu:0.1wt%, Al:0.1wt%, Si:0.05wt%, Mn: 0.03wt%, C:0.03wt%, S:0.01wt%, P:0.01wt%, surplus is Ni and inevitable impurity.
Above nickel based highly elastic alloy, has resisting fatigue, high temperature resistance softening, resistance to stress decay and corrosion resistance, has the highest Mechanical property and elastic performance, obvious deformation can be produced under pressure and temperature effect.
One optical fiber temperature and pressure integrative sensor of the present invention, also includes the manufacture method of optical fiber temperature and pressure integrative sensor: with 10MoWVNb alloy is that material makes spill cavity A, and its inner chamber is square cavity A, makes with nickel based highly elastic alloy for material Spill cavity B, the opening part of interlayer and spill cavity A, through being made as convex cavity B, is pasted onto by its inner chamber by binding agent Together, interlayer is opened an import and export M, pastes spill cavity B at interlayer another side by binding agent, at cavity B interlayer simultaneously Import and export N it is provided with in the cavity wall on opposite;Paste series welding at housing surface by cyanoacrylate 502-1 binding agent to exist FBG1, FBG2 and FBG3 fiber grating together, position, described FBG1, FBG2 paste section corresponding with FBG3 fiber grating is respectively sky The big path cavity of chamber A and cavity B;Cavity is fixed in the housing.
One optical fiber temperature and pressure integrative sensor of the present invention, also includes the measuring method of optical fiber temperature and pressure integrative sensor, its bag Include following step:
Step one: send broadband light from light source, enters the port of circulator;
Step 2: light from the exit ports of circulator out, enters induction module;
Step 3: after the modulation of induction module, is reflected back circulator, then penetrates from another port;
Step 4: spectroanalysis instrument receives emergent light, carries out spectrum analysis, obtains FBG1, FBG2 the most corresponding with FBG3 Peak wavelength λ1、λ2And λ3, analysis result is uploaded to computer;
Step 5: computer is according to formulaCalculate temperature, according toCalculate pressure, KP For the pressure-sensitivity of sensor, KTFor the temperature control of sensor, λ0For initial wavelength, λ1For the peak wavelength of FBG1, λ2 For the peak wavelength of FBG2, λ3Peak wavelength for FBG3.
Above method, temperature and pressure can produce deformation effect to sensor, when setting identical temperature action, pass through The measurement of the change that different pressures effect produces, obtains the relation of pressure and change, simultaneously when setting uniform pressure effect, logical Cross the measurement of the variable quantity that different temperatures effect produces, obtain the relation of temperature and change, it is possible to record pressure and temperature simultaneously The size of degree, method computing used is simple, and result is accurate, it is possible to measure temperature and pressure simultaneously.
In sum, owing to have employed technique scheme, the invention has the beneficial effects as follows:
1, the realization measured while temperature and pressure, fiber-optic grating sensor by section gratings different on single fiber in temperature There is wave length shift under the indirect action of degree and pressure, according to wavelength shift and temperature and the relation of pressure, can survey simultaneously Amount temperature and pressure.
2, the strain of temperature and pressure can be distinguished, solve fiber-optic grating sensor simultaneously in temperature and pressure is measured The cross sensitivity problem occurred, it is to avoid the biggest error occurs during measurement, obtains more accurate measured value.Distinguish in the sensor Identical according to same material wavelength shift at the same temperature, by measuring the drift value under differently strained effect, try to achieve pressure Power;Identical according to the lower wavelength shift of uniform pressure strain, by measuring different materials drift value at temperature, try to achieve temperature Degree;Thus temperature and pressure is distinguished, improve certainty of measurement.
Accompanying drawing explanation
Examples of the present invention will be described by way of reference to the accompanying drawings, wherein:
Fig. 1 is the structural representation of the present invention a kind of optical fiber temperature and pressure integrative sensor.
Fig. 2 is the structural representation of induction module in the present invention.
Detailed description of the invention
All features disclosed in this specification, or disclosed all methods or during step, except mutually exclusive Feature and/or step beyond, all can combine by any way.
Any feature disclosed in this specification (including any accessory claim, summary), unless specifically stated otherwise, By other equivalences or there is the alternative features of similar purpose replaced.I.e., unless specifically stated otherwise, each feature is a series of An example in equivalence or similar characteristics.
Such as Fig. 1, one optical fiber temperature and pressure integrative sensor of the present invention, including light source, circulator, spectroanalysis instrument and sensing mould Block;Described light source connects circulator by optical fiber, and circulator connects induction module and spectroanalysis instrument respectively;Described induction module For cylindrical housings, described enclosure interior includes cavity and fiber grating, and described cavity is made up of cavity A, cavity B and interlayer; Described interlayer is located between cavity A and cavity B, and interlayer is provided with import and export M;Described cavity B is convex cavity, including big footpath Cavity and path cavity, the cavity wall on cavity B interlayer opposite is provided with import and export N;Described housing surface is pasted with series welding FBG1, FBG2 and FBG3 fiber grating together, FBG1, FBG2 and FBG3 fiber grating be pasted on respectively corresponding cavity A with And the size path position of cavity B.
One optical fiber temperature and pressure integrative sensor of the present invention, described spectroanalysis instrument connects computer, carries out data process.
One optical fiber temperature and pressure integrative sensor of the present invention, the chamber of big footpath cavity in the cavity wall thickness of described cavity A and cavity B Wall thickness is identical;Described alite paste is cyanoacrylate 502-1 binding agent.
One optical fiber temperature and pressure integrative sensor of the present invention, the cavity wall of described cavity A is 10MoWVNb alloy-layer, cavity B's Cavity wall is nickel based highly elastic alloy layer.
One optical fiber temperature and pressure integrative sensor of the present invention, the chemical composition of described nickel based highly elastic alloy includes: Be:1.9- 2.5wt%, Ti:0.4-0.6wt%, Fe:0.3wt%, Cu:0.1wt%, Al:0.1wt%, Si:0.05wt%, Mn: 0.03wt%, C:0.03wt%, S:0.01wt%, P:0.01wt%, surplus is Ni and inevitable impurity.
One optical fiber temperature and pressure integrative sensor of the present invention, also includes the manufacture method of optical fiber temperature and pressure integrative sensor: with 10MoWVNb alloy is that material makes spill cavity A, and its inner chamber is square cavity A, makes with nickel based highly elastic alloy for material Spill cavity B, the opening part of interlayer and spill cavity A, through being made as convex cavity B, is pasted onto by its inner chamber by binding agent Together, interlayer is opened an import and export M, pastes spill cavity B at interlayer another side by binding agent, at cavity B interlayer simultaneously Import and export N it is provided with in the cavity wall on opposite;Paste series welding at housing surface by cyanoacrylate 502-1 binding agent to exist FBG1, FBG2 and FBG3 fiber grating together, position, described FBG1, FBG2 paste section corresponding with FBG3 fiber grating is respectively sky The big path cavity of chamber A and cavity B;Cavity is fixed in the housing.
One optical fiber temperature and pressure integrative sensor of the present invention, also includes the measuring method of optical fiber temperature and pressure integrative sensor, its bag Include following step:
Step one: send broadband light from light source, enters the port of circulator;
Step 2: light from the exit ports of circulator out, enters induction module;
Step 3: after the modulation of induction module, is reflected back circulator, then penetrates from another port;
Step 4: spectroanalysis instrument receives emergent light, carries out spectrum analysis, obtains FBG1, FBG2 the most corresponding with FBG3 Peak wavelength λ1、λ2And λ3, analysis result is uploaded to computer;
Step 5: computer is according to formulaCalculate temperature, according toCalculate pressure, KP For the pressure-sensitivity of sensor, KTFor the temperature control of sensor, λ0For initial wavelength, λ1For the peak wavelength of FBG1, λ2 For the peak wavelength of FBG2, λ3Peak wavelength for FBG3.
The invention is not limited in aforesaid detailed description of the invention.The present invention expands to any disclose in this manual New feature or any new combination, and the arbitrary new method that discloses or the step of process or any new combination.

Claims (7)

1. an optical fiber temperature and pressure integrative sensor, it is characterised in that: include light source, circulator, spectroanalysis instrument and induction module; Described light source connects circulator by optical fiber, and circulator connects induction module and spectroanalysis instrument respectively;Described induction module is Cylindrical housings, described enclosure interior includes cavity and fiber grating, and described cavity is made up of cavity A, cavity B and interlayer;Institute State interlayer to be located between cavity A and cavity B, interlayer is provided with import and export M;Described cavity B is convex cavity, empty including big footpath Chamber and path cavity, the cavity wall on cavity B interlayer opposite is provided with import and export N;Described housing surface is pasted with series welding and exists FBG1, FBG2 and FBG3 fiber grating together, FBG1, FBG2 and FBG3 fiber grating be pasted on respectively corresponding cavity A and The size path position of cavity B.
A kind of optical fiber temperature and pressure integrative sensor the most according to claim 1, it is characterised in that: described spectroanalysis instrument connects Computer, carries out data process.
A kind of optical fiber temperature and pressure integrative sensor the most according to claim 1, it is characterised in that: the cavity wall of described cavity A is thick Spend identical with the cavity wall thickness of big footpath cavity in cavity B;Described alite paste is cyanoacrylate 502-1 binding agent.
A kind of optical fiber temperature and pressure integrative sensor the most according to claim 1, it is characterised in that: the cavity wall of described cavity A is 10MoWVNb alloy-layer, the cavity wall of cavity B is nickel based highly elastic alloy layer.
A kind of optical fiber temperature and pressure integrative sensor the most according to claim 4, it is characterised in that: described nickel based highly elastic alloy Chemical composition include: Be:1.9-2.5wt%, Ti:0.4-0.6wt%, Fe:0.3wt%, Cu:0.1wt%, Al: 0.1wt%, Si:0.05wt%, Mn:0.03wt%, C:0.03wt%, S:0.01wt%, P:0.01wt%, surplus is Ni and not Evitable impurity.
A kind of optical fiber temperature and pressure integrative sensor the most according to claim 1, it is characterised in that: also include optical fiber temperature and pressure one The manufacture method of sensor: making spill cavity A with 10MoWVNb alloy for material, its inner chamber is square cavity A, with Ni-based height Elastic alloy is that material makes spill cavity B, and its inner chamber is through being made as convex cavity B, by interlayer and the opening of spill cavity A Place is pasted together by binding agent, opens an import and export M, paste spill at interlayer another side by binding agent simultaneously on interlayer Cavity B, is provided with import and export N in the cavity wall on cavity B interlayer opposite;Glued by cyanoacrylate 502-1 at housing surface Mixture pastes series welding FBG1, FBG2 and FBG3 fiber grating together, described FBG1, FBG2 and FBG3 fiber grating pair Position should be pasted and be respectively the big path cavity of cavity A and cavity B;Cavity is fixed in the housing.
A kind of optical fiber temperature and pressure integrative sensor the most according to claim 1, it is characterised in that: also include optical fiber temperature and pressure one The measuring method of sensor, it includes following step:
Step one: send broadband light from light source, enters the port of circulator;
Step 2: light from the exit ports of circulator out, enters induction module;
Step 3: after the modulation of induction module, is reflected back circulator, then penetrates from another port;
Step 4: spectroanalysis instrument receives emergent light, carries out spectrum analysis, obtains FBG1, FBG2 peak the most corresponding with FBG3 Value wavelength X1、λ2And λ3, analysis result is uploaded to computer;
Step 5: computer is according to formulaCalculate temperature, according toCalculate pressure, KPFor passing The pressure-sensitivity of sensor, KTFor the temperature control of sensor, λ0For initial wavelength, λ1For the peak wavelength of FBG1, λ2For The peak wavelength of FBG2, λ3Peak wavelength for FBG3.
CN201610821034.6A 2016-09-13 2016-09-13 A kind of optical fiber temperature and pressure integrative sensor Active CN106153124B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107894527A (en) * 2017-12-20 2018-04-10 天津理工大学 Random waveguide optical grating voltage sensor and its voltage detection method based on electrooptic effect
CN107966170A (en) * 2017-11-27 2018-04-27 山东省科学院激光研究所 Monitor sensing device and system
CN108120479A (en) * 2017-11-24 2018-06-05 辽宁世达通用航空股份有限公司 Medicinal liquid flow flowmeter sensor is sprayed in a kind of agricultural
CN108801308A (en) * 2018-08-29 2018-11-13 闫静 A kind of fiber grating Multifunction Sensor

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CN1384341A (en) * 2002-06-14 2002-12-11 清华大学 Optical-fiber grating sensor detecting pressure temperature simultaneously
CN2786586Y (en) * 2003-11-26 2006-06-07 南开大学 Automatic temperature compensation optical fiber and raster pressure intensity sensor
CN2833523Y (en) * 2005-09-29 2006-11-01 西安石油大学 Fiber grating sensor capable of simultaneously and respectively measuring pressure and temperature
US20080212917A1 (en) * 2005-07-02 2008-09-04 Schlumberger Technology Corporation Fiber Optic Temperature and Pressure Sensor and System Incorporating Same
CN201364167Y (en) * 2009-01-16 2009-12-16 比亚迪股份有限公司 Fiber grating sensor and system thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1384341A (en) * 2002-06-14 2002-12-11 清华大学 Optical-fiber grating sensor detecting pressure temperature simultaneously
CN2786586Y (en) * 2003-11-26 2006-06-07 南开大学 Automatic temperature compensation optical fiber and raster pressure intensity sensor
US20080212917A1 (en) * 2005-07-02 2008-09-04 Schlumberger Technology Corporation Fiber Optic Temperature and Pressure Sensor and System Incorporating Same
CN2833523Y (en) * 2005-09-29 2006-11-01 西安石油大学 Fiber grating sensor capable of simultaneously and respectively measuring pressure and temperature
CN201364167Y (en) * 2009-01-16 2009-12-16 比亚迪股份有限公司 Fiber grating sensor and system thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108120479A (en) * 2017-11-24 2018-06-05 辽宁世达通用航空股份有限公司 Medicinal liquid flow flowmeter sensor is sprayed in a kind of agricultural
CN107966170A (en) * 2017-11-27 2018-04-27 山东省科学院激光研究所 Monitor sensing device and system
CN107894527A (en) * 2017-12-20 2018-04-10 天津理工大学 Random waveguide optical grating voltage sensor and its voltage detection method based on electrooptic effect
CN107894527B (en) * 2017-12-20 2020-07-31 天津理工大学 Random waveguide grating voltage sensor based on electro-optic effect and voltage detection method thereof
CN108801308A (en) * 2018-08-29 2018-11-13 闫静 A kind of fiber grating Multifunction Sensor

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