CN106123793B - A kind of portable optical interferometry sphere diameter sphericity fast detector - Google Patents

A kind of portable optical interferometry sphere diameter sphericity fast detector Download PDF

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Publication number
CN106123793B
CN106123793B CN201610497687.3A CN201610497687A CN106123793B CN 106123793 B CN106123793 B CN 106123793B CN 201610497687 A CN201610497687 A CN 201610497687A CN 106123793 B CN106123793 B CN 106123793B
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China
Prior art keywords
sphere diameter
test plate
laser
sphericity
optical
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CN106123793A (en
Inventor
段荣
汪雪
董清宇
焦国涛
闫珺
岳春国
葛新伟
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China Aerospace Times Electronics Corp
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China Aerospace Times Electronics Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/08Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Abstract

A kind of portable optical interferometry sphere diameter sphericity fast detector, including hand-held gauge head, host and display;The front end of hand-held gauge head is a baseline optical test plate, surrounding carries monochromation illumination, baseline optical test plate is bonded with tested ball or ball bowl part when detection, because the interference fringe pattern that spheroid diameter difference generates through CCD system imagings and exports, image procossing and calculating are carried out to the interference fringe based on principle of optical interference and known monochromatic wavelength, F-number, iris shape and its correlation, the interference fringe pattern after being exported sphere diameter sphericity value by display and simplified.The present invention it is easy to carry, using flexible, it can be achieved that part process when on-line checking, greatly improve the detection efficiency of high-precision bulb.

Description

A kind of portable optical interferometry sphere diameter sphericity fast detector
Technical field
The present invention relates to be machined and measure industry.Specially one kind can easily and fast, accurately to bulb Carry out the device of sphere diameter and sphericity detection.
Background technology
The final precision of high-precision bulb (including ball and ball bowl) is realized by ball grinding machine or manual lappingout.At present The low production efficiency of this kind of part, one of major reason are that detection efficiency is low.Realize the ball of micron or submicron order Diameter and sphericity detect, and are completed using the compound three-coordinate instrument of high-precision optical and roundness measuring equipment in engineering.Using these equipment into When row sphere diameter and sphericity detect, the drawbacks of there are following several respects:1. detected part need to be removed from its process equipment, send to Be detected at above-mentioned detection device, after detection, such as have not yet been reached size requirement, then need to install back again on process equipment after Continuous processing;Because element precision has been approached equipment precision, and it is multi-point fitting value 2. detected value is approximation;3. detection process Time is long, largely occupies device resource;It is completed 4. efficient staff need to be relied on and coordinated.It will be apparent that this detection method process It is cumbersome, time-consuming, efficiency is low, greatly restrict production efficiency.
Invention content
The present invention provides a kind of portable optical interferometry sphere diameter sphericity fast detectors, it can be achieved that bulb is adding The on-line quick detection of working hour its sphere diameter and sphericity.
The technical scheme is that:
A kind of portable optical interferometry sphere diameter sphericity fast detector, including hand-held gauge head, host and display;It is hand-held Gauge head is made of baseline optical test plate, laser illumination system, imaging system and button switch;Baseline optical test plate is inserted On thang-kng sleeve, it is located at the front end of hand-held gauge head, it is therefore an objective to facilitate quick between different sphere diameter baseline optical test plates It replaces, and is contacted with tested bulb;Optical glass model provides laser monochromation illumination on the basis of laser illumination system, swashs Light monochromatic light is to be imported laser from transmitting terminal by the shinny optical fiber of entire body, and the shinny optical fiber of the entire body is wrapped in thang-kng sleeve On, realization illuminates baseline optical test plate;The laser monochromatic light that button switch is used to control laser illumination system shines It is bright;Baseline optical test plate rear is imaging system, and imaging system contacts it to baseline optical test plate with tested part Between the interference fringe image imaging that generates of spheroid diameter difference, the image after imaging is transferred into image processor in host, at image The sphere diameter and sphericity value for the tested bulb that reason device is calculated through image procossing and software export over the display.
Described image processor calculates through image procossing and software and also directly exports the interference item after simplifying over the display Line figure.
The imaging system is made of camera lens, CCD components, and tail end has a focusing knob, adjust between CCD and camera lens away from From realization focusing.
The principle of the present invention:A kind of portable optical interferometry sphere diameter sphericity fast detector, including hand-held gauge head, host And display;Hand-held gauge head is made of baseline optical test plate, laser illumination system, imaging system and button switch;Benchmark Optical glass model is inserted on thang-kng sleeve, is located at the front end of hand-held gauge head, it is therefore an objective to facilitate different sphere diameter baseline optical glass The quick-replaceable of glass model room, and contacted with tested part;Optical glass model provides laser list on the basis of laser illumination system Colorama lighting, improve interference fringe clarity, laser monochromatic light be by the shinny optical fiber of entire body by laser from transmitting terminal import, and The shinny optical fiber of the entire body is wrapped on thang-kng sleeve, what realization illuminated baseline optical test plate;Button switch is used In the laser monochromation illumination of control laser illumination system, electric energy is saved;Baseline optical test plate rear is imaging system, at As the interference fringe image imaging that spheroid diameter difference of the system between baseline optical test plate is contacted with tested part generates, imaging Image afterwards is transferred into the image processor in host, interference fringe pattern after processing and the tested spherical shape being calculated The sphere diameter and sphericity value of part export over the display.
The advantage of the invention is that:
(1) present invention directly displays sphere diameter and sphericity numerical value.In addition, simplify treated interference fringe have it is succinct, straight It sees, understandable feature, is conducive to analyze and determine ball looks error, has broken away from the dependence to high accuracy three coordinate instrument and roundness measuring equipment;
(2) accuracy of detection of the present invention is high.Laser monochromatic light of the present invention is by laser by the shinny optical fiber of entire body from transmitting terminal It imports, and the shinny optical fiber of the entire body is wrapped on thang-kng sleeve, realization illuminates baseline optical test plate, reflects ball Diameter and the interference fringe pattern of sphericity are worked based on monochromatic wavelength unit (nanoscale), therefore accuracy of detection is high.
(3) the integrated design of the present invention, small, light-weight, easy to carry, using flexible is, it can be achieved that part adds The on-line checking in working hour greatly improves the detection efficiency of part.
Description of the drawings
Fig. 1 is the general three schematic diagram of the present invention, wherein 1 is hand-held gauge head, 3 be host, and 2 be display.
Fig. 2 is the sectional view of hand-held gauge head 1, wherein:Optical glass model on the basis of 4,5 be front end sleeve, and 6 be steel ball, 7 It is thang-kng sleeve for elastic trim ring, 8,9 be entirely lighting optical fiber, and 10 be optical fiber guide pipe, and 11 be laser module, and 12 open for button It closes, 13 be main casing;14 be camera lens, and 15 be CCD, and 16 be CCD sleeves, and 17 be jackscrew, and 18 be tail end sleeve;19 be focusing bottom Seat, 20 be screw thread suspended block, and 21 be focusing knob, and 22 be jackscrew.
Specific implementation mode
It elaborates below in conjunction with the accompanying drawings to the specific implementation mode of the present invention.
As shown in Figure 1, a kind of portable optical interferometry sphere diameter sphericity fast detector of the present invention include hand-held gauge head 1, Host 3 and display 2.
As shown in Fig. 2, the baseline optical test plate 4 of hand-held 1 front end of gauge head is inserted in front end sleeve 5, by steel ball 6 and bullet Property trim ring 7 constitute elastic decorative pearl on top of an official cap mechanism be fixed, can not only prevent baseline optical test plate 4 from loosening, but also can realize difference The quick-replaceable of sphere diameter baseline optical test plate 4;Entirely lighting optical fiber 9 is wound between thang-kng sleeve 8 and front end sleeve 5, The other end of the entirely lighting optical fiber 9 is directed at the Laser emission port of laser module 11 by optical fiber guide pipe 10, constitutes laser Lighting system, button switch 12 is for controlling laser lighting;There is camera lens 14 at the rear of baseline optical test plate 4, and behind CCD15 constitute imaging system, CCD15 is fixed in CCD sleeves 16, and CCD sleeves 16 are by four jackscrews 17 on main casing 13 Positioning can realize being accurately positioned for CCD15 screen center by finely tuning jackscrew 17;Tail end sleeve 18, focusing pedestal 19, screw thread are outstanding Block 20, focusing knob 21 constitute focus adjusting mechanism, and focusing pedestal 19 is fixed on 13 tail end of main casing, focusing knob 21 and tune by jackscrew 22 Burnt pedestal 19 is Rotatable connecting structure, and focusing knob 21 is meshing relation with screw thread suspended block 20, and spiral shell is adjusted in turn focusing knob 21 Line suspended block 20 moves forward or back, and the conducting wire of screw thread suspended block 20 and CCD15 is connected, and then passes through the mode reality for adjusting screw thread suspended block 20 The adjusting (focusing) of the positions CCD15 is showed.Above-mentioned structure has simple, the high advantage of degree of regulation.
In use, pressing button switch 12, laser module 11 sends out laser monochromatic light, and the laser is through entirely lighting optical fiber 9 Import, thang-kng sleeve 8 is illuminated, on the basis of optical glass model 4 provide monochromation illumination.
When detection, baseline optical test plate 4 is bonded with the spherical surface of tested bulb, is generated because of the two spheroid diameter difference Interference fringe image is imaged on through camera lens 14 on CCD15, and image information is transmitted to image processor, and image processing program is to acquisition Image carry out gray processing, denoising, the processing such as edge detection, extract the boundary of interference fringe, obtained using Hough transformation The radius parameter of each interference fringe is obtained, it is last to be calculated according to tested correlation formula between bulb and interference fringe radius Its sphere diameter sphericity value, and output sphere diameter sphericity value and the interference fringe pattern after simplification on a display 2.
If in host containing PC104 embedded main boards image processing module, the GUI image processing routine based on MATLAB, Dry DC/DC voltage reduction module and power supply, DC/DC voltage reduction modules be respectively laser module, CCD components and display provide it is different Voltage, total voltage 12V, rechargeable lithium battery power supply.
The present invention, which does not elaborate, belongs to techniques well known.

Claims (3)

1. a kind of portable optical interferometry sphere diameter sphericity fast detector, it is characterised in that:Including hand-held gauge head, host and show Show device;Hand-held gauge head is made of baseline optical test plate, laser illumination system, imaging system and button switch;Baseline optical Test plate is inserted on thang-kng sleeve, is located at the front end of hand-held gauge head, it is therefore an objective to facilitate different sphere diameter baseline optical hyaloids Quick-replaceable between plate, and contacted with tested bulb;Optical glass model provides laser list on the basis of laser illumination system Colorama lighting, laser monochromatic light are to be imported laser from transmitting terminal by the shinny optical fiber of entire body, and the shinny optical fiber of the entire body is twined It is wound on thang-kng sleeve, realization illuminates baseline optical test plate;Button switch is for controlling laser illumination system Laser monochromation illumination;Baseline optical test plate rear is imaging system, and imaging system is to baseline optical test plate and quilt The interference fringe image imaging that the spheroid diameter difference surveyed between feature contacts generates, the image after imaging are transferred into host at image Device is managed, the sphere diameter and sphericity value of the tested bulb that image processor is calculated through image procossing and software are over the display Output.
2. portable optical interferometry sphere diameter sphericity fast detector according to claim 1, it is further characterized in that:It is described Image processor calculates through image procossing and software and also directly exports the interference fringe pattern after simplifying over the display.
3. portable optical interferometry sphere diameter sphericity fast detector according to claim 1, it is further characterized in that:It is described Imaging system is made of camera lens, CCD components, and tail end has focusing knob, adjusts the distance between CCD and camera lens, realizes focusing.
CN201610497687.3A 2016-06-29 2016-06-29 A kind of portable optical interferometry sphere diameter sphericity fast detector Active CN106123793B (en)

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Publication number Priority date Publication date Assignee Title
CN110030945B (en) * 2019-04-12 2021-02-09 北京航天控制仪器研究所 Quick sphere diameter and sphericity detection system for special-shaped spherical parts
CN111351425B (en) * 2020-03-10 2022-06-03 南通大学 Method for determining dynamic range of interferometer during spherical defocus detection

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CN201903332U (en) * 2010-12-10 2011-07-20 西安科技大学 Laser Newton ring apparatus measuring device
CN203325305U (en) * 2013-05-29 2013-12-04 湖南工业大学 Light interference experiment instrument
CN104064092A (en) * 2014-06-04 2014-09-24 黄河科技学院 Auxiliary experiment device for measuring radius of curvature of lens through Newton ring
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