CN106081561A - Wet process equipment cleaning device and wet process equipment - Google Patents

Wet process equipment cleaning device and wet process equipment Download PDF

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Publication number
CN106081561A
CN106081561A CN201610487931.8A CN201610487931A CN106081561A CN 106081561 A CN106081561 A CN 106081561A CN 201610487931 A CN201610487931 A CN 201610487931A CN 106081561 A CN106081561 A CN 106081561A
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CN
China
Prior art keywords
cleaning
wet
equipment
conveying
adjusting
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610487931.8A
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Chinese (zh)
Inventor
阳振军
汪永佳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Govisionox Optoelectronics Co Ltd
Kunshan Guoxian Photoelectric Co Ltd
Original Assignee
Kunshan Guoxian Photoelectric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kunshan Guoxian Photoelectric Co Ltd filed Critical Kunshan Guoxian Photoelectric Co Ltd
Priority to CN201610487931.8A priority Critical patent/CN106081561A/en
Publication of CN106081561A publication Critical patent/CN106081561A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G45/00Lubricating, cleaning, or clearing devices
    • B65G45/10Cleaning devices
    • B65G45/18Cleaning devices comprising brushes

Abstract

The invention discloses a kind of wet process equipment cleaning device and wet process equipment, described wet process equipment cleaning device is for cleaning the conveying mechanism in wet process equipment, including a support component, cleaning assemblies and adjusting part;Prop up support component and there is the first end face;First end face is oppositely arranged with the surface of conveying mechanism;Cleaning assemblies is arranged on the first end face, and towards the surface of conveying mechanism;Adjusting part is connected with a support component, the distance between regulation the first end face and the surface of conveying mechanism so that cleaning assemblies can contact with the surface of conveying mechanism and produce friction.Conveying mechanism in wet process equipment is cleaned replacing manually cleaning by it by arranging wet process equipment cleaning device, it is effectively increased cleaning efficiency, reach time saving and energy saving effect, finally efficiently solve the problem that traditional conveying mechanism mode using artificial cleaning wet process board needs to expend substantial amounts of manpower and time.

Description

Wet process equipment cleaning device and wet process equipment
Technical field
The present invention relates to wet process technical field, particularly relate to a kind of wet process equipment cleaning device and wet process sets Standby.
Background technology
Generally, along with the increase of wet process board converted products quantity, it is to be added that the conveying mechanism of wet process board carries The quantity of chemical product (such as: substrate) increases the most accordingly.Thus, the back side (that is, processed product and the conveying mechanism of processed product The surface contacted) on granule or foreign body can the gradually transfer unit in pollution transportation mechanism.When pollutant are accumulated necessarily During degree, certain impact will be produced in the back side towards processed products so that the back side of processed product forms groove mark, thus Affect the yield of processed product.Accordingly, it would be desirable to the conveying mechanism of wet process board is periodically cleaned, to remove conveyer Pollutant on transfer unit surface in structure.At present, the cleaning of the conveying mechanism of wet process board is typically by manually carrying out. And use artificial cleaning, not only need to expend substantial amounts of manpower, also need to spend the longer time simultaneously, have a strong impact on cleaning Efficiency.
Summary of the invention
Based on this, it is necessary to need to expend greatly for traditional conveying mechanism mode using artificial cleaning wet process board The manpower of amount and the problem of time, it is provided that a kind of wet process equipment cleaning device and wet process equipment.
For realizing a kind of wet process equipment cleaning device that the object of the invention provides, described wet process equipment cleaning device is used Conveying mechanism in cleaning wet process equipment, including a support component, cleaning assemblies and adjusting part;
Described support component has the first end face;
Described first end face is oppositely arranged with the surface of described conveying mechanism;
Described cleaning assemblies is arranged on described first end face, and towards the surface of described conveying mechanism;
Described adjusting part is connected with described support component, for regulating the table of described first end face and described conveying mechanism Distance between face so that described cleaning assemblies can contact with the surface of described conveying mechanism and produce friction.
Wherein in an embodiment, described cleaning assemblies removably connects with described support component.
Wherein in an embodiment, the number of described adjusting part is two;And two described adjusting parts set respectively Put the both sides at described support component.
Wherein in an embodiment, described support component is gripper shoe;Described adjusting part is thread spindle;
Described support component is threadeded with described adjusting part, and can move along the screw thread of described adjusting part.
Wherein in an embodiment, described cleaning assemblies includes cleaning brush fixed mount and cleaning brush;
Described cleaning brush fixed mount is arranged on described first end face, and described cleaning brush fixed mount and described cleaning brush phase Coupling;
Described cleaning brush is arranged on described cleaning brush fixed mount.
Wherein in an embodiment, the number of the transfer unit in the number of described cleaning assemblies and described conveying mechanism Identical;And
The arrangement on described first end face of the described cleaning assemblies is arranged with described transfer unit in described conveying mechanism Arrangement arrange identical.
Wherein in an embodiment, also include the moving assembly being suitably mounted on described wet process equipment;
Shifting chute is offered on described moving assembly;
Described adjusting part is placed in described shifting chute away from one end of described support component, and described adjusting part and institute State moving assembly to be slidably connected.
Wherein in an embodiment, the number of described cleaning assemblies is multiple;
In multiple described cleaning assemblies arrangement mode on described first end face and described conveying mechanism arbitrarily a line or The arrangement of the transfer unit of string matches;And
The orientation of the plurality of cleaning assemblies is intersected with the direction of described shifting chute;
Wherein, when described adjusting part moves along described shifting chute, it is possible to drive on described support component described clearly Described transfer unit is cleaned by clean assembly successively.
Wherein in an embodiment, also include driving assembly and controller;
Described driving assembly is connected with described adjusting part, for driving the motion of described adjusting part;
The outfan of described controller electrically connects with the input of described driving assembly;And
Described controller, for controlling the described driving assembly driving track to described adjusting part.
Accordingly, present invention also offers a kind of wet process equipment, including arbitrary described wet process equipment cleaning Device.
Above-mentioned wet process equipment cleaning device, by arranging defeated in wet process equipment of the first end face of support component Send the surface of mechanism, and relative with the surface of conveying mechanism.Meanwhile, cleaning assemblies is arranged on the first end face of a support component On, and the cleaning assemblies surface towards conveying mechanism is set.Further, adjusting part is connected with support component, for regulation the Distance between end face and the surface of conveying mechanism.Thus, the first end face of support component is propped up with defeated when adjusting part in regulation During sending the distance between the surface of mechanism, it is possible to make cleaning assemblies contact with the surface of conveying mechanism and rub Wipe, thus realize the cleaning assemblies cleaning to conveying mechanism by the friction between cleaning assemblies and the surface of conveying mechanism.Its It is cleaned the conveying mechanism in wet process equipment replacing manually cleaning, effectively by arranging wet process equipment cleaning device Improve cleaning efficiency, reached time saving and energy saving effect, finally efficiently solve traditional employing and manually clean wet process machine The problem that the conveying mechanism mode of platform needs to expend substantial amounts of manpower and time.
Accompanying drawing explanation
Fig. 1 is the structural representation of a specific embodiment of the conveying mechanism in the wet process equipment of the present invention;
Fig. 2 is the structural representation of a specific embodiment of the wet process equipment cleaning device of the present invention;
Fig. 3 is that the arrangement on the end face of a support component of the cleaning assemblies in the wet process equipment cleaning device of the present invention sets Put mode schematic diagram;
Fig. 4 is the structural representation of a specific embodiment of the cleaning assemblies in the wet process equipment cleaning device of the present invention Figure;
Fig. 5 is the structural representation of the embodiment one of the wet process equipment cleaning device of the present invention;
Fig. 6 is the structural representation of the embodiment two of the wet process equipment cleaning device of the present invention;
Fig. 7 is the structural representation of the embodiment three of the wet process equipment cleaning device of the present invention;
Fig. 8 is the structural representation of the embodiment four of the wet process equipment cleaning device of the present invention.
Detailed description of the invention
For making technical solution of the present invention clearer, below in conjunction with drawings and the specific embodiments, the present invention is made the most in detail Describe in detail bright.
Firstly, it is necessary to explanation, the wet process equipment cleaning device of the present invention is for cleaning in wet process equipment Conveying mechanism.Wherein, conveying mechanism refers to for carrying processed product, such as: substrate, display panel etc..Concrete, ginseng See that Fig. 1, conveying mechanism 200 generally include conveying axis 210 and transfer unit 220.Transfer unit 220 is set on conveying axis 210. Further, the number of transfer unit 220 can be multiple.Multiple transfer units 220 are arranged in conveying axis according to certain distribution mode On 210.Meanwhile, the number of conveying axis 210 is the most multiple, and conveying axis 210 is arranged side by side.More specifically, conveying axis 210 Can be roller bearing, transfer unit 220 be then ball.By the rotation rotating drive ball of roller bearing, so that be placed on ball The processed product in face moves according to certain speed under the rotary action of ball.
Seeing Fig. 2, as a specific embodiment of the wet process equipment cleaning device 100 of the present invention, it includes support group Part 110, cleaning assemblies 120 and adjusting part 130.Wherein, prop up support component 110 and there is the first end face 111.This first end face 111 The surface of the conveying mechanism 200 in the above-mentioned wet process equipment, and be oppositely arranged with the surface of conveying mechanism 200.Herein, need It is noted that owing to conveying mechanism 200 is typically rely on conveying axis 210 and be set in the transfer unit on conveying axis 210 The rotation of 220 realizes the conveying of processed product, and therefore the surface of conveying mechanism 200 both can be the upper of conveying mechanism 200 Face, it is possible to below conveying mechanism 200.It is to say, the support component in the wet process equipment cleaning device 100 of the present invention When first end face 111 of 110 is oppositely arranged with the surface of conveying mechanism 200, a support component 110 both may be provided at conveying mechanism The top of 200, can also be provided at the lower section of conveying mechanism 200.
Meanwhile, cleaning assemblies 120 is arranged on the first end face 111 of a support component 110, and towards conveying mechanism 200 Surface.Adjusting part 130 is then connected with a support component 110, for the first end face 111 and the conveying of regulation support component 110 Distance between the surface of mechanism 200 so that cleaning assemblies 120 can contact with the surface of conveying mechanism 200 and produce and rub Wipe.
That is, it is connected with support component 110 by arranging adjusting part 130 so that the first end face of a support component 110 Distance between 111 and the surface of conveying mechanism 200 is adjustable.Thus, when wet process equipment is in running order, a support component A certain distance can be had, to ensure that conveying mechanism 200 can between first end face 111 and the surface of conveying mechanism 200 of 110 It is normally carried out the conveying of processed product.When wet process equipment is in idle condition or is in the maintenance stage, now by regulating Distance between first end face 111 and the surface of conveying mechanism 200 of a support component 110 is adjusted by assembly 130 so that First end face 111 of support component 110 moves closer to the surface of conveying mechanism 200, until the cleaning being arranged on the first end face 111 Till assembly 120 contacts with the surface of conveying mechanism 200.And then, then by the transfer unit 220 on conveying mechanism 200 Rotate and make cleaning assemblies 120 produce friction with the surface of conveying mechanism 200, it is achieved cleaning assemblies 120 is to conveying mechanism 200 The cleaning action on surface.
Conveying mechanism 200 in wet process equipment is cleaned by it by arranging wet process equipment cleaning device 100 Replace traditional artificial cleaning mode, be effectively increased cleaning efficiency, reach time saving and energy saving effect.Finally solve tradition Artificial cleaning mode expend substantial amounts of manpower and the problem of time.
Wherein it is desired to explanation, cleaning assemblies 120 contacts with the surface of conveying mechanism 200, and and conveying mechanism When the surface of 200 produces friction, it both can realize by controlling the rotation of the transfer unit 220 in conveying mechanism 200, it is possible to The rotation arranging cleaning assemblies 120 realizes.Arrange owing to the conveying mechanism 200 in wet process equipment self has rotation, because of This is in order to simplify the structure of the wet process equipment cleaning device 100 of the present invention, reduces processing cost simultaneously, simplified processing process, Preferably, use cleaning assemblies 120 to be fixedly installed, rely on the rotation of the transfer unit 220 in conveying mechanism 200 to realize cleaning Mutually motion between assembly 120 and conveying mechanism 200 thus produce the mode of friction.
Further, owing to the major function of a support component 110 is for installing fixing cleaning assemblies 120.Therefore, see Fig. 3, Preferably, propping up support component 110 can directly use gripper shoe to realize.Gripper shoe is used to clean as the wet process equipment of the present invention A support component 110 of device 100, the most further reduces production cost, has further simplified processing technique simultaneously, made The structure obtaining wet process equipment cleaning device 100 is simpler.
Further, since cleaning assemblies 120 belongs to consumable goods, when cleaning assemblies 120 uses overlong time or owing to using not When effectively can not clean conveying mechanism 200 when causing cleaning assemblies 120 to be damaged, need cleaning assemblies 120 is replaced. As a specific embodiment of the wet process equipment cleaning device 100 of the present invention, for the ease of the replacing of cleaning assemblies 120, clearly Installation between clean assembly 120 and a support component 110 is connected as removably connecting.
Meanwhile, in order to improve cleaning efficiency further, it is preferred that see Fig. 3, it is arranged on the first end of a support component 110 The number of the cleaning assemblies 120 on face 111 should be identical with the number of the transfer unit 220 on conveying mechanism 200.Further, many The individual cleaning assemblies 120 arrangement set-up mode on the first end face 111 of a support component 110 should be with transfer unit 220 defeated The arrangement in mechanism 200 is sent to arrange identical.As: when the transfer unit 220 in conveying mechanism 200 is arranged in determinant, now The corresponding cleaning assemblies 120 arrangement on the first end face 111 is the most also in determinant.Thus, the first end face of support component 110 is propped up 111 surfaces that conveying mechanism 200 should be completely covered, and the corresponding transfer unit 220 of each cleaning assemblies 120.When When using the surface cleaning that cleaning assemblies 120 carries out conveying mechanism 200, can be right to its institute respectively by multiple cleaning assemblies 120 The transfer unit 220 answered is cleaned simultaneously.Which obviate and the transfer unit 220 in conveying mechanism 200 is carried out successively The phenomenon of cleaning, thus drastically increase cleaning efficiency, it is effectively increased cleaning quality simultaneously.
Further, see Fig. 4, as another specific embodiment of the wet process equipment cleaning device 100 of the present invention, Cleaning assemblies 120 can use cleaning brush fixed mount 121 and cleaning brush 122 to realize.Concrete, cleaning brush fixed mount 121 is installed On the first end face 111 of a support component 110.Further, cleaning brush fixed mount 121 matches with cleaning brush 122.Cleaning brush 122 Then it is directly installed on cleaning brush fixed mount 121.Thus, when cleaning assemblies 120, the surface of conveying mechanism 200 is cleaned Time, can directly by the brush of cleaning brush 122, the surface of conveying mechanism 200 be cleaned repeatedly.It is by using cleaning brush 122 surface cleaning carrying out conveying mechanism 200, increase effectively the frictional force between cleaning assemblies 120 and conveying mechanism 200, So that cleaning effect is more preferable.This most further improves cleaning efficiency and cleaning quality.
It addition, see Fig. 5, owing to adjusting part 130 is the first end face 111 for regulation support component 110 and conveying Distance between the surface of mechanism 200, in order to ensure first end face 111 table near conveying mechanism 200 of a support component 110 The stationarity in face, it is preferred that the number of adjusting part 130 is two.Further, two adjusting parts 130 are separately positioned on support The both sides of assembly 110.Thus, mutually coordinated by two adjusting parts 130, it is possible to be effectively ensured a support component 110 towards The stationarity of conveying mechanism 200 motion, thus the wet process equipment cleaning device 100 of the present invention reliable has the most just been effectively ensured Property and stability.
Further, in order to further reduce production cost, it is real that adjusting part 130 can use screw thread lifting shaft Existing.That is, use thread spindle by arranging adjusting part 130, a support component 110 be set on adjusting part 130, and with regulation Assembly 130 is threaded.Thus so that a support component 110 can move along the screw thread of adjusting part 130.That is, by by screw thread Lifting shaft is arranged on and props up between support component 110 and the fixed part of conveying mechanism 200, by controlling rising or the fall of screw thread lifting shaft Low, reach to control being raised and lowered of a support component 110, thus realize the first end face 111 and conveyer of a support component 110 The adjustable purpose of distance between the surface of structure 200.
It addition, also, it should be noted the another of wet process equipment cleaning device 100 as the present invention is embodied as Example, it also can be deposited in the upper installation cleaning agent of the second end face 112 (that is, opposing with the first end face 111 one side) of a support component 110 Storage assembly (not shown), arranges an outlet, by going out at cleaning agent storage assembly on cleaning agent storage assembly simultaneously A cleaning agent guiding subassembly (not shown) is set up between mouth and cleaning assemblies 120.Will cleaning by cleaning agent guiding subassembly In agent storage assembly, the cleaning agent of storage is guided on cleaning assemblies 120.Thus, conveying mechanism 200 is carried out when cleaning assemblies 120 The cleaning on surface time, it is possible to the significantly more efficient pollutant cleaned on conveying mechanism 200 surface so that cleaning quality is more High.
Meanwhile, seeing Fig. 6, as the still another embodiment of the wet process equipment cleaning device 100 of the present invention, it also wraps Include the moving assembly 140 being suitably mounted on wet process equipment.Wherein, moving assembly 140 offers shifting chute (in figure not Illustrate).Adjusting part 130 is placed in shifting chute away from one end of a support component 110, and, adjusting part 130 and moving assembly 140 are slidably connected.It is slidably connected with moving assembly 140 by arranging adjusting part 130 so that adjusting part 130 can edge The shifting chute offered on moving assembly 140 to move, this is also achieved that a support component 110 and cleaning assemblies 120 are in longitudinal direction Way moving transversely, thus it is effectively increased the motility of the wet process equipment cleaning device 100 of the present invention.
Accordingly, based on above-described embodiment, the cleaning assemblies 120 being arranged on the first end face 111 of a support component 110 Number can be multiple equally.Further, multiple cleaning assemblies 120 arrangement mode on the first end face 111 only needs and conveying mechanism The arrangement mode of the transfer unit 220 of any a row or column in 200 matches.As: multiple cleanings are set up at a support component Single setting on first end face 111 of 110.Herein, it should be noted that the orientation of multiple cleaning assemblies 120 should be with The direction of offering of the shifting chute of moving assembly 140 is intersected.That is, the orientation of multiple cleaning assemblies 120 should be with moving assembly The direction of offering of the shifting chute of 140 is not parallel.
Thus, propped up between support component 110 and conveying mechanism 200 by regulation cleaning assemblies 120 regulation when adjusting part 130 Distance time cleaning assemblies 120 is contacted with the surface of conveying mechanism 200, be now arranged on the first of a support component 110 Its current corresponding transfer unit 220 is cleaned by the row's cleaning assemblies 120 on end face 111.When this layer of transfer unit After 220 have cleaned, then on moving assembly 140, move another layer to conveying mechanism 200 by control and regulation assembly 130 Transfer unit 220 position, can realize the cleaning to another layer of transfer unit 220.By repeating above-mentioned same operation just The cleaning of all transfer units 220 can be sequentially completed.It is by setting up moving assembly on wet process equipment cleaning device 100 140, effectively reduce the volume of wet process equipment cleaning device 100, thus save its shared space, not only contribute to deposit Put, be also convenient for operation simultaneously.
Wherein it is desired to explanation, moving assembly 140 can directly use guide rail to realize.It is simple and convenient, it is easy to accomplish, And it is with low cost.
See Fig. 5 and Fig. 6, it should be noted that the wet process equipment cleaning device 100 of the present invention also includes driving assembly 150.Wherein, drive assembly 150 to be connected with adjusting part 130, for driving the motion of adjusting part 130, thus realize adjusting The regulation to a support component 110 of the joint assembly 130.Concrete, drive assembly 150 can directly use driving motor to realize.Pass through The drive shaft driving motor is connected with adjusting part 130, so that the unlatching of cleanup crew's direct controlling and driving motor Or closedown can realize clean operation, it is achieved that semi-automatic clean operation, more time saving and energy saving.
Further, seeing Fig. 7 and Fig. 8, in the wet process equipment cleaning device 100 of the present invention, it may also include Controller 160.Wherein, the outfan of controller 160 electrically connects with the input driving assembly 150.Further, this controller 160 For controlling the driving assembly 150 driving track to adjusting part 130.That is, control by input in controller 160 is corresponding Program, specifically can include cleaning time and the setting etc. of cleaning track.So that controller 160 drives according to controlling programme-control The dynamic assembly 150 driving to adjusting part 130.As: controller 160 drives assembly 150 to drive regulation according to controlling programme-control The distance between support component 110 and conveying mechanism 200 is propped up in assembly 130 regulation, and controller 160 drives according to controlling programme-control Dynamic assembly 150 drives mobile etc. on moving assembly 140 of adjusting part 130.It controls to drive assembly by controller 160 150, thus realize driving the assembly 150 driving to adjusting part 130, it is achieved that full-automatic clean operation, further Improve cleaning efficiency, and more efficiently save substantial amounts of manpower.
For the cleaning process of the wet process equipment cleaning device 100 of the clearer explanation present invention, individually below with four The wet process equipment cleaning device 100 of the present invention is described in more detail by individual different embodiment.
Seeing Fig. 5, as the embodiment one of the wet process equipment cleaning device 100 of the present invention, it includes a support component 110, cleaning assemblies 120, adjusting part 130 and driving assembly 150.When the wet process equipment cleaning device using the present embodiment During the surface cleaning that 100 carry out conveying mechanism 200, the wet process equipment cleaning device 100 of the present embodiment is arranged on conveyer The top of structure 200.When wet process equipment is in idle condition or carries out time-based maintenance, cleanup crew drives assembly by starting 150, manually adjust the height of adjusting part 130 make cleaning assemblies 120 with in conveying mechanism 200 transfer unit 220 (such as: Ball) contact.And then control conveying mechanism 200 again and start so that the transfer unit 220 on conveying mechanism 200 rotates automatically. Thus, can rub with cleaning assemblies 120 when transfer unit 220 rotates thus realize the cleaning of transfer unit 220.
Seeing Fig. 7, as the embodiment two of the wet process equipment cleaning device 100 of the present invention, it includes support group equally Part 110, cleaning assemblies 120, adjusting part 130 and driving assembly 150.Meanwhile, controller 160 is also included.When using this enforcement When the wet process equipment cleaning device 100 of example carries out the surface cleaning of conveying mechanism 200, equally the wet process of the present embodiment is set Standby cleaning device 100 is arranged on the top of conveying mechanism 200.Meanwhile, controller 160 duty of wet process equipment is entered Row in real time detection, and when detecting that wet process equipment needs to be cleaned (concrete, can be by detecting the work of wet process equipment Time, the parameter such as number of conveying processed product realize the detection to its duty), control wet process equipment and shut down, It is at idle condition.And then, then controlled to drive assembly 150 to drive adjusting part 130 by controller 160, by driving assembly 150 control to adjust the height of adjusting part 130.When the height driving assembly 150 to control to adjust assembly 130 reaches preset height After, the cleaning assemblies 120 now propped up on support component 110 contacts with the surface of conveying mechanism 200.When in conveying mechanism 200 When transfer unit 220 rotates automatically can with cleaning assemblies 120 phase friction thus reach cleaning effect.Wherein, controller 160 can PLC (programmable logic controller (PLC) 160) is used to realize.Further, touch screen, cleanup crew also can be set in controller 160 Directly can realize, to driving assembly 150 and the control of adjusting part 130, finally realizing cleaning assemblies by operation touch screen The control of 120.It effectively achieves the full-automatic routine cleaning of wet process equipment.
Seeing Fig. 6, as the embodiment three of the wet process equipment cleaning device 100 of the present invention, it is arranged on a support component Cleaning assemblies 120 on first end face 111 of 110 is single setting.Meanwhile, moving assembly 140 also it is additionally arranged.Further, regulation Assembly 130 is placed in the shifting chute that moving assembly 140 is offered away from one end of a support component 110.Thus, when using the present embodiment Wet process equipment cleaning device 100 when carrying out the surface cleaning of conveying mechanism 200, by cleanup crew's Non-follow control regulation group Part 130 declines so that cleaning assemblies 120 connects with the surface of certain a line in conveying mechanism 200 or certain string transfer unit 220 Touch.And then the transfer unit 220 rotating this row maybe these row can realize the cleaning of the transfer unit 220 to this row maybe these row.When The transfer unit 220 of this row maybe these row clean complete after, by drive assembly 150 drive adjusting part 130 at moving assembly Move on 140, until moving to, at other a row or column transfer unit 220, repeat same operation and can realize current line Or the cleaning of the transfer unit 220 when prostatitis.Thus, the cleaning of all transfer units 220 can the most sequentially be completed.It need not Take bigger space, and be easy to dispose.
Seeing Fig. 8, as the embodiment four of the wet process equipment cleaning device 100 of the present invention, it is in the enforcement shown in Fig. 6 Controller 160 it is additionally arranged on the basis of example three.Equally the wet process equipment cleaning device 100 of the present embodiment is arranged on wet process The top of the conveying mechanism 200 of equipment., controller 160 duty of wet process equipment is detected in real time meanwhile, when Detect when wet process equipment needs to be cleaned, control wet process equipment and shut down so that it is be in idle condition.And then, then by Controller 160 controls to drive assembly 150 to drive adjusting part 130, first controls to drive assembly 150 to drive adjusting part 130 to exist Move on moving assembly 140, until mobile to the transfer unit 220 of certain a line in conveying mechanism 200 or certain string, Jin Erzai Control to drive assembly 150 to drive adjusting part 130 to carry out the regulation of height.When the height driving assembly 150 to control to adjust assembly 130 After degree reaches preset height, now prop up the cleaning assemblies 120 on support component 110 and current line or when the transfer unit 220 in prostatitis Surface contact.When the transfer unit 220 of this row maybe these row rotates automatically can with cleaning assemblies 120 phase friction thus reach The effect of cleaning.Meanwhile, controller 160 monitors current line or the cleaning time of the transfer unit 220 when prostatitis in real time, when reaching After Preset Time, control current line or when the transfer unit 220 in prostatitis stops operating.Meanwhile, by driving assembly 150 to drive regulation Assembly 130 continues to move along the shifting chute of moving assembly 140, until moving to the transfer unit 220 of next line or next column Put place, thus carry out the cleaning of the transfer unit 220 of next line or next column.
Herein, it should be noted that in this embodiment four, when controller 160 controls to drive assembly 150 to be adjusted group During part 130 mobile, can be first by driving assembly 150 that adjusting part 130 rises one section of height so that cleaning assemblies 120 is with defeated The surface sending mechanism 200 is separated.Thus avoid adjusting part 130 along the shifting chute of moving assembly 140 move time, conveying mechanism The surface of 200 causes the wear phenomenon of cleaning assemblies 120 to the friction of cleaning assemblies 120.This most effectively extends this The service life of bright wet process equipment cleaning device 100.
Accordingly, present invention also offers a kind of wet process equipment, it includes that arbitrary described wet process equipment is clear Clean device 100.After any of the above-described kind of wet process cleaning device is installed to wet process equipment, it is possible to achieve wet process sets Standby regular automated cleaning, thus instead of the mode of artificial cleaning, it is ensured that the cleannes on conveying mechanism 200 surface, and then Ensure that the yield of converted products.
Embodiment described above only have expressed the several embodiments of the present invention, and it describes more concrete and detailed, but also Therefore the restriction to the scope of the claims of the present invention can not be interpreted as.It should be pointed out that, for those of ordinary skill in the art For, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement, these broadly fall into the guarantor of the present invention Protect scope.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.

Claims (10)

1. a wet process equipment cleaning device, it is characterised in that described wet process equipment cleaning device is used for cleaning wet process Conveying mechanism in equipment, including a support component, cleaning assemblies and adjusting part;
Described support component has the first end face;
Described first end face is oppositely arranged with the surface of described conveying mechanism;
Described cleaning assemblies is arranged on described first end face, and towards the surface of described conveying mechanism;
Described adjusting part is connected with described support component, for regulate described first end face and described conveying mechanism surface it Between distance so that described cleaning assemblies can contact with the surface of described conveying mechanism and produce friction.
Wet process equipment cleaning device the most according to claim 1, it is characterised in that described cleaning assemblies and described support Assembly removably connects.
Wet process equipment cleaning device the most according to claim 1, it is characterised in that the number of described adjusting part is two Individual;And two described adjusting parts are separately positioned on the described both sides propping up support component.
Wet process equipment cleaning device the most according to claim 1, it is characterised in that described support component is gripper shoe; Described adjusting part is thread spindle;
Described support component is threadeded with described adjusting part, and can move along the screw thread of described adjusting part.
Wet process equipment cleaning device the most according to claim 1, it is characterised in that described cleaning assemblies includes cleaning brush Fixed mount and cleaning brush;
Described cleaning brush fixed mount is arranged on described first end face, and described cleaning brush fixed mount and described cleaning brush are mutually Join;
Described cleaning brush is arranged on described cleaning brush fixed mount.
Wet process equipment cleaning device the most according to claim 1 or 5, it is characterised in that the number of described cleaning assemblies Identical with the number of the transfer unit in described conveying mechanism;And
The arrangement on described first end face of the described cleaning assemblies is arranged and described transfer unit row in described conveying mechanism Cloth arranges identical.
7. according to the wet process equipment cleaning device described in any one of claim 1 to 5, it is characterised in that also include being applicable to It is arranged on the moving assembly on described wet process equipment;
Shifting chute is offered on described moving assembly;
Described adjusting part is placed in described shifting chute away from one end of described support component, and described adjusting part and described shifting Dynamic component slippage connects.
Wet process equipment cleaning device the most according to claim 7, it is characterised in that the number of described cleaning assemblies is many Individual;
Multiple described cleaning assemblies arrangement mode on described first end face is any a row or column with described conveying mechanism The arrangement of transfer unit match;And
The orientation of the plurality of cleaning assemblies is intersected with the direction of described shifting chute;
Wherein, when described adjusting part moves along described shifting chute, it is possible to drive the described cleaning group on described support component Described transfer unit is cleaned by part successively.
Wet process equipment cleaning device the most according to claim 1, it is characterised in that also include driving assembly and control Device;
Described driving assembly is connected with described adjusting part, for driving the motion of described adjusting part;
The outfan of described controller electrically connects with the input of described driving assembly;And
Described controller, for controlling the described driving assembly driving track to described adjusting part.
10. a wet process equipment, it is characterised in that include the wet process equipment sanitizer cartridge described in any one of claim 1 to 9 Put.
CN201610487931.8A 2016-06-28 2016-06-28 Wet process equipment cleaning device and wet process equipment Pending CN106081561A (en)

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CN204021829U (en) * 2014-09-03 2014-12-17 合肥鑫晟光电科技有限公司 A kind of washing equipment for roller transmission apparatus
CN105414136A (en) * 2015-07-28 2016-03-23 中节能太阳能科技有限公司 Cleaning trolley for cleaning photovoltaic module

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CN102741180A (en) * 2010-02-02 2012-10-17 凯拉格拉斯工程有限责任公司 Roller cleaning device
CN203006400U (en) * 2012-11-13 2013-06-19 沈阳创达技术交易市场有限公司 Conveying belt cleaning device
CN103418581A (en) * 2013-07-19 2013-12-04 新奥光伏能源有限公司 Washing device
CN203411013U (en) * 2013-08-27 2014-01-29 东旭集团有限公司 Glass conveying device with foreign matter clearing mechanism
CN204021829U (en) * 2014-09-03 2014-12-17 合肥鑫晟光电科技有限公司 A kind of washing equipment for roller transmission apparatus
CN105414136A (en) * 2015-07-28 2016-03-23 中节能太阳能科技有限公司 Cleaning trolley for cleaning photovoltaic module

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Application publication date: 20161109