CN106066319A - The lossless detection method of thermally grown oxide layer residual stress in thermal barrier coating - Google Patents

The lossless detection method of thermally grown oxide layer residual stress in thermal barrier coating Download PDF

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CN106066319A
CN106066319A CN201610570420.2A CN201610570420A CN106066319A CN 106066319 A CN106066319 A CN 106066319A CN 201610570420 A CN201610570420 A CN 201610570420A CN 106066319 A CN106066319 A CN 106066319A
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coating
tgo
stress
oxide layer
thermally grown
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陶顺衍
杨加胜
赵华玉
邵芳
钟兴华
王亮
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Shanghai Institute of Ceramics of CAS
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Shanghai Institute of Ceramics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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    • GPHYSICS
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    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0047Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to residual stresses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6402Atomic fluorescence; Laser induced fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N21/643Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" non-biological material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N2021/6417Spectrofluorimetric devices

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Abstract

The present invention provides the lossless detection method of thermally grown oxide layer residual stress in a kind of thermal barrier coating, comprise the steps: the laser beam by specific wavelength, incide the surface of tested described thermal barrier coating, inspire in described thermal barrier coating trace element Cr in thermally grown oxide layer3+Fluorescence spectrum;The Cr that will be inspired3+Fluorescence spectral characteristic peak and unstress state under the Cr that inspired3+Fluorescence spectral characteristic peak compare, calculate the distribution of thermally grown oxide layer internal stress according to the side-play amount of characteristic peak.The present invention can solve tradition stress mornitoring method and be difficult to the technical barrier of TGO layer stress measurement;Can detect coating sample change of TGO layer internal stress before and after various different operating mode (such as thermal shock, constant temperature oxidation, thermal cycle or hot flame stream thermal shock etc.) examinations without destroying sample itself, military service behavior and failure Mechanism for coating provide experiment basis;Before and after being on active service for practical work piece, in coating, the Non-Destructive Testing of TGO internal stress provides feasibility.

Description

The lossless detection method of thermally grown oxide layer residual stress in thermal barrier coating
Technical field
The present invention relates to the lossless detection method of thermally grown oxide layer residual stress in a kind of thermal barrier coating, more specifically Ground, relates in a kind of thermal barrier coating preparing using plasma spraying-physical vapour deposition (PVD) (PS-PVD) technique thermally grown The method that oxide skin(coating) (TGO) interior residual stress carries out Non-Destructive Testing.
Background technology
Thermal barrier coating (TBCs) is one of three big key technologies of engine blade technology, for promoting advanced electromotor Development, significantly obtains high-temperature service excellent performance, thermal barrier coating highly reliable, long-life.Thermal barrier coating is normal at present It is mainly using plasma spraying (PS) and electron beam-physical vapour deposition (PVD) (EB-PVD) by preparation technology.Plasma spraying Thermal barrier coating is deposited with the molten drop of semi-molten by melting, and the flat lamella accumulation sprawling and quickly cooling and solidifying formation forms, logical Being often layer structure, coating heat-proof quality is good, but owing to coating interface combines more weak, thermal shock resistance EB-PVD to be less than is coated with Layer, and the columnar crystal structure of EB-PVD coating makes its heat-proof quality be inferior to the former.
A kind of new spraying coating process based on ultralow pressure plasma spray coating, i.e. plasma spray coating-physical vapor Deposition (Plasma Spray-Physical Vapor Deposition is called for short PS-PVD), has two kinds of skills of PS and EB-PVD concurrently The advantage of art, ceramic powder accelerates through plasma, melts and in gasification, can pass through the codeposition of gas phase, liquid phase and solid phase, Realize the compound of different tissues structure (fine and close, stratiform and column etc.), obtain at aspects such as coating structure design and preparation methoies Break through, provide new thinking and technical feasibility for new generation high reliability, long-life thermal barrier coating.
Thermal barrier coating is generally made up of 4 material primitives, i.e. surface ceramic coat, high temperature alloy substrate, substrate and pottery Between coating rich in the metal bonding coating of aluminium element and between ceramic coating and metal bonding coating formed with Alpha-alumina Thermally grown oxide layer (Thermally Grown Oxide, TGO) for main component.The invalid position of thermal barrier coating is often sent out Raw in the interface of ceramic layer/TGO/ metal bonding coating or in the ceramic layer of near interface.Visible thermally grown oxide layer It it is the key factor affecting heat barrier coat material thermodynamic property and durability.
When whole coating system is cooled to normal temperature environment by hot operation state, the thermal expansion between coating and matrix is lost Join phenomenon to produce~the residual compressive stress of 3~6GPa in TGO layer.The Thickening Process of TGO layer itself also can produce simultaneously Raw stress, its value generally~1GPa, equally on the impact of material property clearly.The thickness of TGO layer is generally only 3~10 μ M, the strain energy density wherein saved is at a relatively high, it is sufficient to induces the extension of various micro-crack, and then may result in coating local weak Ftracture in region.Therefore, coating stress distribution feature after different operating modes are on active service in TGO layer is obtained to research by experiment detection The military service behavior of coated component and inefficacy mechanism and coated component service life forecast model is set up significant.
Coating residual stress test can be divided into lossless and damage two class detection methods, and Non-Destructive Testing mainly includes diffraction approach (X X ray diffraction, neutron diffraction method and synchrotron radiation diffraction approach), curvature method etc., damaging detection mainly has boring method, except layer method etc.. Diffraction approach is that the lattice deformation caused due to stress by measuring coating material near surface obtains stress distribution;Curvature method one As for measuring coating residual stress distribution in deposition process, the method is to calculate by measuring the Curvature varying of matrix Deposition residual stress;If boring method exists residual stress in referring to coating, in stress field, successively hole in arbitrfary point, answering at this Power is i.e. gradually discharged, and will produce a certain amount of release strain, by pasting the foil gauge of coating surface around institute's drilling blind hole Surface strain after record release, can obtain the distribution of stress in coating according to strain-stress relation.Except layer method is by machinery Or the method for chemistry successively removes coating, discharge stress therein, utilize various technology for detection to strain simultaneously, and then acquisition should The distribution of power.
Above traditional stress mornitoring means are all difficult to the stress mornitoring in TGO layer, and reason is: 1. due to TGO layer surface also has the ceramic layer on surface of a layer thickness about 100~500 μm, and X-ray penetration depth in the coating is by its wavelength Determining with the character of coating material, being generally only~10 μm, the most weak penetration capacity greatly limit the application of the method.With Traditional x-ray method is compared, and synchrotron radiation X-ray and neutron diffraction techniques have the penetration capacity more higher than typical X-ray, but Being limited by conditions such as instrument and equipments, such method does not obtain in terms of coating stress measurement and is widely applied at present;② The thickness of TGO is typically only 3~10 μm, and curvature method, boring method and except the methods such as layer method are all difficult to meet the precision of this harshness Requirement.
Summary of the invention
For the deficiency overcoming above-mentioned existing stress detection to exist, the technical problem to be solved is Thering is provided the lossless detection method of thermally grown oxide layer residual stress in a kind of thermal barrier coating, can successfully solve other coating should Power detection means cannot measure the deficiency of TGO layer internal stress distribution and without destroying tested sample.
For solving the problems referred to above, the invention provides the lossless of thermally grown oxide layer residual stress in a kind of thermal barrier coating Detection method, comprises the steps: the laser beam by specific wavelength, incides the surface of tested described thermal barrier coating, swashs Send in described thermal barrier coating trace element Cr in thermally grown oxide layer3+Fluorescence spectrum;The Cr that will be inspired3+Glimmering The Cr inspired under light spectral signature peak and unstress state3+Fluorescence spectral characteristic peak compare, inclined according to characteristic peak Shifting amount calculates the distribution of thermally grown oxide layer internal stress.
According to the present invention, Cr 1. can be passed through3+Fluorescence pressure spectrometry obtains the distribution of TGO layer internal stress, solves tradition stress inspection Survey method is difficult to the technical barrier of TGO layer stress measurement;2. the method is when detecting TGO layer stress, it is not necessary to destroy sample Itself can detect coating sample through various different operating modes (such as thermal shock, constant temperature oxidation, thermal cycle or hot flame stream thermal shock Deng) change of TGO layer internal stress before and after examination, military service behavior and failure Mechanism for coating provide experiment basis;3. it is Before and after practical work piece military service, in coating, the Non-Destructive Testing of TGO internal stress provides feasibility.
Preferably, two the strongest fluorescence peak R are marked1And R2The characteristic peak positions of line, is calculating described thermal growth oxide During stress in Ceng, select R2Line spectrum characteristic peak, described R2Offset Δ υ of line spectrum characteristic peakTGOWith described thermally grown oxygen Residual stress σ in compound layerTGOBetween linear, it may be assumed that Δ υTGOTGO·σTGO, wherein ПTGOFor piezoelectric modulus and For constant, with this by described R2In the side-play amount described thermally grown oxide layer of acquisition of line spectrum characteristic peak, residual stress divides Cloth.
Preferably, described thermal barrier coating is prepared by plasma spray coating-physical gas-phase deposition, described thermal barrier coating Include high temperature alloy substrate, metal bonding coating, thermally grown oxide layer and ceramic layer on surface successively.
It is preferred that described high temperature alloy substrate can be carried out pretreatment, described pretreatment includes described high-temperature alloy base Surface to be sprayed, the end carries out being roughened and purified treatment.
It is preferred that spraying coating process can be used in described high temperature alloy substrate to prepare described metal bonding coating, described spraying Technique includes the techniques such as low pressure plasma spray, vacuum plasma spray or HVAF;Preferably, described gold The material belonging to tack coat is MCrAlY, and wherein M is Ni or NiCo.It is highly preferred that the thickness of metal bonding coating can be 75~250 μ m。
It is preferred that described thermally grown oxide layer can be to pass through pre-oxidation treatment before preparing described ceramic layer on surface Technique is formed on the surface of described metal bonding coating.
Or, described thermally grown oxide layer can also be after high-temperature service due to described metal bonding coating oxidation and Formed.
Wherein, described thermally grown oxide layer be mainly composed of α-Al2O3.Preferably, the thickness of TGO layer can be 0.1~ 10μm。
Additionally, described ceramic layer on surface can be prepared by using plasma spraying-physical gas-phase deposition, the painting deposited Layer material can be the zirconium oxide that yittrium oxide is partially stabilized.Preferably, the thickness of ceramic layer on surface can be 100~500 μm.
It is to say, the thermal barrier coating sample in the present invention can use following steps to prepare:
First, described high temperature alloy substrate being carried out pretreatment, described pretreatment includes described high temperature alloy substrate to be sprayed Surface carries out being roughened and purified treatment;
Afterwards, spraying coating process is used to prepare metal bonding coating at pretreated high temperature alloy substrate surface;
Afterwards, metal bonding coating carried out pre-oxidation treatment or high-temperature service and form thermally grown oxide layer;
Finally, using plasma spraying-physical gas-phase deposition prepares described ceramic layer on surface.
Also, can be by described thermal barrier coating being carried out multiple spot detection or Surface scan detection to obtain on described thermal barrier coating relatively The statistical result of a large amount of stress numerical in big region (millimeter or centimetres).Thus so that values of stress have high can Repeated and credible.
The present invention has the advantage that and beneficial effect:
1. the Cr that the present invention uses3+Fluorescent spectrometry can characterize YSZ coating prepared by PS-PVD technique effectively to be prepared In journey, the change of TGO layer internal stress, compensate for common detection methods and is difficult to characterize the deficiency of its stress distribution.2. use the method table Levy stress and there is many advantages: 1. Cr3+R1And R2Peak is very strong, has stronger penetration capacity, it is ensured that the method can be effective Ground obtains bottom α-Al through certain thickness YSZ ceramic layer2O3In stress distribution;2. the laser used during measuring Hot spot the least (I is to 2 μm), still can keep higher spatial resolution even across the scattering process of coating, it is possible to Efficiently differentiate the STRESS VARIATION of various location in micron dimension region;Obtain the inspection of coating micron dimension region internal stress Surveying, this is also that micron dimension matches with coating interface roughness, illustrates the advantage that other detection method hardly matches;3. lead to Cross multiple spot even Surface scan, the statistical distribution of (millimeter or centimetres) TGO layer internal stress in a certain regional area can be detected, It is effectively improved repeatability and the accuracy of stress mornitoring;4. as a kind of lossless detection method, it is not necessary to destroy sample or workpiece Itself can obtain its under different working conditions (such as constant temperature oxidation, thermal shock, thermal cycle or hot flame stream thermal shock etc.) former The situation of change of region, position TGO layer internal stress.
Accompanying drawing explanation
Fig. 1 is the Cr using the present invention3+The schematic diagram of the device of residual stress distribution in fluorescence pressure spectrometry test TGO layer;
Fig. 2 is PS-PVD deposit thermal barrier coatings structural representation;
Fig. 3 is surveyed different R by coating1And R2Compressive stress in characteristic peak side-play amount correspondence TGO layer;
(a) and (b) in Fig. 4 is respectively metal bonding coating optical photograph and surface SEM figure after pre-oxidation treatment;
Fig. 5 is the EDS collection of illustrative plates on metal bonding coating surface;
(a) and (b) in Fig. 6, surveyed α-Al at two positions of A and B in (c) and (d) corresponding diagram 4 (a) respectively2O3Layer internal stress Cloud charts and the distribution statistics of stress numerical;
(a) and (b) in Fig. 7, (c) and (d) is respectively PS-PVD process deposits YSZ As-deposited state coating and coating through 20 thermal shocks The cloud charts of residual stress and the distribution statistics of stress numerical in surveyed TGO layer after experiment;
Fig. 8 prepares YSZ coating the dividing of residual stress numerical value in institute's survey TGO layer after different thermal shock number of times experiments by PS-PVD technique Cloth statistics variations situation;
(a) in Fig. 9 is coating optical photograph after 200 thermal shocks, and (b) and (c) is respectively coating and occurs after thermal shock The region substantially ftractureed and the distribution statistics that region the surveyed TGO layer stress numerical substantially ftractureed does not occurs;
Symbol description:
1 nickel base superalloy
2 laser instrument
3 incident illuminations
4 Cr3+Fluorescence
5 eyepieces
6 detectors
7 computers
8 thermal barrier coatings
9 metal bonding coatings
10 TGO layer
11 ceramic layer on surfaces.
Detailed description of the invention
Below in conjunction with accompanying drawing and following embodiment, the present invention is described in further detail.Should be understood that accompanying drawing and following enforcement Mode is merely to illustrate the present invention, and the unrestricted present invention.
Concrete, Fig. 1 is the Cr using the present invention3+The device of residual stress distribution in fluorescence pressure spectrometry test TGO layer Schematic diagram, Fig. 2 is PS-PVD deposit thermal barrier coatings structural representation, and Fig. 3 is surveyed different R by coating1And R2Characteristic peak side-play amount pair Answer the compressive stress in TGO layer, different compressive stress (respectively-0.81GPa and-1.83GPa) the corresponding R in TGO layer is i.e. shown1With R2The skew of line.
In embodiment as shown in Figure 1 to Figure 3, Cr3+TGO layer internal stress in fluorescence pressure spectrometry detection PS-PVD coating Test process includes: using plasma spraying-physical vapour deposition (PVD) (PS-PVD) technique prepares thermal barrier coating 8, and this thermal boundary is coated with Layer 8 is made up of nickel base superalloy 1, metal bonding coating 9, TGO layer 10 and ceramic layer on surface 11.Described ceramic layer on surface 11 is formed On described TGO layer 10.
Further, use laser instrument 2 can the laser of a length of 532nm or 633nm of transmitted wave, by swashing as incident illumination 3 Light is directly incident on YSZ surface ceramii layer (ceramic layer on surface 11), owing to fluorescence has stronger penetration capacity, can penetrate one The ceramic layer on surface 11 determining thickness incides TGO layer 10 surface (spot size is about 2 μm) and inspires wavelength in red range Cr in (about λ=693nm)3+Fluorescence.
Specifically, owing to being mainly composed of α-Al2O3TGO layer 10 containing a small amount of Cr element, and because Cr3+And Al3 +Ionic radius similar, both form solid solution, and the former is present in Al with Impure forms2O3In, wavelength can be inspired in HONGGUANG In the range of Cr3+Fluorescence 4,2 fluorescence peaks the strongest at demarcation are often noted as R1And R2The characteristic peak positions of line, if Al2O3In When there is not stress, R1And R2Line spectrum characteristic peak lays respectively at 14402cm-1And 14432cm-1
When calculating the stress of described thermally grown oxide layer, select R2Line spectrum characteristic peak (14432cm-1), and it is special Levy side-play amount (the Δ υ at peakTGO) with thermally grown oxide layer in residual stress (σTGOBetween) linear, it may be assumed that Δ υTGO= ПTGO·σTGO, wherein ПTGOFor piezoelectric modulus and be constant, with this according to fluorescence peak R2Line spectrum characteristic peak side-play amount obtains The distribution of residual stress in TGO layer.
Below in conjunction with accompanying drawing, by exemplary embodiment, the invention will be further described.
Embodiment 1
Use Cr3+Fluorescence pressure spectrometry measures metal bonding coating through special procedure (diffusion in vacuum processs, hidden lino removal, in advance Oxidation processes or high-temperature service rear oxidation etc.) pretreatment rear surface formed α-Al2O3Layer internal stress distribution.Comprise the steps:
Step (1) carries out pretreatment to such as GH3128 nickel base superalloy, including: surface to be sprayed to metal base is carried out slightly Roughening and purified treatment;
High temperature alloy size can be Φ 30mm × 5.8mm, first carries out spray treatment through 20# white fused alumina sand, operating pressure be 0.4~ 0.5MPa, carries out EtOH Sonicate subsequently and cleans 5 minutes, then dried up by compressed air.
Step (2) uses low-voltage plasma spraying (LPPS) technique in processed metallic substrate surface deposition CoNiCrAlY metal bonding coating, its thickness is 80~100 μm.In addition to above-mentioned low pressure plasma spray, it is also possible to use true The techniques such as empty plasma spray coating (VPS), HVAF (HVOF).
Step (3) before metal bonding coating surface spraying ceramic layer, for obtain high-performance coating system, can to spraying after Metal bonding coating carry out the technique pretreatment such as diffusion in vacuum process, hidden lino removal, pre-oxidation treatment, after pretreatment Metal bonding layer surface formed one layer of oxide skin(coating), or the coating of As-deposited state after high-temperature service due to the oxidation of tack coat And formed, it is mainly composed of α-Al2O3, its thickness is 0.5~5 μm.
Metal bonding coating surface roughness Ra is 8.38 ± 1.27 μm after pretreatment.
The surface topography of metal bonding coating shows after pretreatment: the tie layer surface after pre-oxidation treatment is more smooth, but Owing to the no cofusing particle in spherical shape is contained on surface, cause uneven (see Fig. 4) that coating surface is certain.By tie layer surface Energy spectrum analysis permissible, oxidation-treated after, tack coat top layer primarily forms equally distributed α-Al2O3Layer (see Fig. 5).
Use Cr3+Fluorescence pressure spectrometry measures the α-Al that tack coat is formed after pretreatment2O3Stress distribution in Ceng:
Select the laser that laser emission wavelength is 532nm, select two measured zone A and B, its area be 1mm × 1mm, laser light incident is about 2 μm in the spot size of tie layer surface, and the spacing measured between hot spot is 8 μ m 8 μm, therefore exists The data of the area residual stress by being obtained in 1mm × 1mm are 15876, and the stress data obtained is done statistical Cloth is analyzed, and result sees in Fig. 6.
Further, the most corresponding different stress numerical of different colours of stress distribution cloud atlas, such as (a) in Fig. 6 and Shown in (c), even if in 1mm × 1mm region, various location Al in the same area2O3Stress and differ, i.e. tack coat The concavo-convex morphology change on surface can affect Al2O3The distribution of middle stress.
Further, the statistical result of stress shows, in identical area (1mm × 1mm), and Al in A and B region2O3Flat All compressive stress numerical value is respectively-1.10 ± 0.38GPa and-1.11 ± 0.39GPa, and two data can be good at coincideing, and shows Pre-oxidation treatment technique is uniform at the distribution of the compressive stress of the various location introducing of tack coat.
Embodiment 2
Use Cr3+Fluorescence pressure spectrometry detection PS-PVD technique prepares YSZ coating TGO layer STRESS VARIATION before and after thermal shock.Including such as Lower step.
Step (1) carries out pretreatment to nickel base superalloy, including: surface to be sprayed to metal base carry out roughening and Purified treatment.
Such as GH3128 nickel base superalloy size can be 25mm × 25mm × 2.7mm, first sprays through 20# white fused alumina sand Sand processes, and operating pressure is 0.4~0.5MPa, carries out EtOH Sonicate subsequently and cleans 5 minutes, then is dried up by compressed air.
Step (2) uses LPPS technique at processed metallic substrate surface deposition CoNiCrAlY metal bonding coating, and it is thick Degree is 80~100 μm.Except LPPS technique, it is also possible to use the techniques such as VPS, HVOF.
Step (3) is before metal bonding coating surface spraying ceramic layer, for obtaining high-performance coating system, and can be to spraying After metal bonding coating carry out the works such as diffusion in vacuum process, hidden lino removal, pre-oxidation treatment or high-temperature service rear oxidation Skill pretreatment, forms one layer of thermally grown oxide layer after pretreatment, is mainly composed of α-Al on metal bonding layer surface2O3, its Thickness is 1~6 μm.
Step (4) uses PS-PVD technique at the most pretreated metal bonding coating surface deposition surface ceramic layer, is sunk Long-pending coating is the zirconium oxide (being called for short YSZ) that yittrium oxide is partially stabilized, and thickness is~170 μm.
Use Cr3+Fluorescence pressure spectrometry measures TGO layer stress distribution after PS-PVD process deposits YSZ coating.
The laser wavelength selected is 532nm, and selecting the area measuring regional area is 1mm × 1mm, measures between hot spot Spacing be 8 μ m 8 μm, the data of the TGO layer internal stress obtained in area is by 1mm × 1mm equally are 15876, and Statistical analysis is done in stress data distribution to being obtained.
Further, PS-PVD deposition YSZ thermal shock performance of coatings test is carried out.Test uses 1100 DEG C of tube furnace-water-cooleds Thermal cycling method, will be equipped with the crucible of coating sample as tube furnace flat-temperature zone, is incubated 20min at 1100 DEG C, takes out rapidly and incline Enter quenching in water, to room temperature, to dry up by compressed air afterwards, in this, as a circulation.
Further, Cr is used3+Fluorescence pressure spectrometry detection YSZ coating answering in TGO layer after different thermal shock experiment number Power is distributed.The measurement process of stress and the selection of relevant parameter are identical with spraying state coating.PS-PVD deposition YSZ coating sprays State and after 20 thermal shocks the statistical result of the cloud charts of TGO layer stress and stress numerical distribution see Fig. 7.
Further, as shown in Fig. 7 (a), various location correspondence difference TGO stress distribution cloud atlas color, show to spray state Stress distribution in YSZ coating pattern concavo-convex with interface is closely related.
Further, as shown in Fig. 7 (c), compared with spraying state coating stress cloud charts, YSZ coating is after 20 thermal shocks The color of stress distribution cloud atlas is substantially deepened, and shows that the stress numerical after thermal shock there occurs significantly change.
Further, the statistical result of stress shows, in identical area (1mm × 1mm), and sample after spraying state and thermal shock At the same position of coating surface the mean values of surveyed TGO layer compressive stress be respectively-1.95 ± 0.17GPa and-3.94 ± 0.28GPa, shows the initial stage that coating is tested in thermal shock, and the compressive stress in TGO layer significantly increases.
In PS-PVD deposition YSZ coating, TGO stress is shown in Fig. 8 with the change of thermal shock number of times situation of change and coating morphology.
Further, YSZ coating, along with the increase of thermal shock number of times, owing to base material occurs significantly deformation, causes in edge Peel off with zone line coating, even if but after up to 300 thermal shocks are tested, it is the least that area is peeled off on the surface of coating In 10%, it is seen that thermal barrier coating prepared by PS-PVD technique shows the thermal shock resistance of excellence.
Further, in TGO layer, the statistical result of stress numerical distribution shows, in the initial stage of thermal shock experiment, the pressure in TGO layer Stress increases (being increased to-3.94 ± 0.28GPa by-1.95 ± 0.17GPa) rapidly, but with the further increase of thermal shock number of times, STRESS VARIATION in TGO layer is the most inconspicuous, is indicated above in thermal shock experimentation, and the STRESS VARIATION in TGO layer is not to lead Cause the key reason that coating occurs to peel off.Thus in thermal shock experimentation, YSZ coating is peeled off mainly at edge and zone line Owing to base material occurs caused by obvious deformation.
Further, Fig. 9 shows that coating occurs the region substantially ftractureed after 200 thermal shocks and do not occurs substantially to ftracture The distribution statistics of numerical value of region surveyed TGO layer stress.Visible, there is the meansigma methods of the surveyed stress in region of cracking in coating (-3.13 ± 0.51GPa) to be significantly lower than the region (-4.03 ± 0.39GPa) not occurring substantially to ftracture, and shows ceramic layer on surface Crack and flake off the stress that can effectively discharge in TGO layer.
Further, can be by detecting the change of various location TGO layer stress in real time at YSZ surface ceramii layer, if sending out In some regional area existing, TGO layer stress significantly decreases, and shows Local Cracking may occur at this region interface, can See that the detection by TGO layer stress can reflect the failure conditions of coating.
Using plasma spraying-physical gas-phase deposition prepares the preparation method of thermal barrier coating, and uses Cr3+Fluorescence Pressure spectrometry detection thermal barrier coating residual stress distribution in preparation process TGO layer.Comprise the steps:
Step (1) carries out pretreatment to nickel base superalloy base material, including surface to be sprayed to metal base carry out roughening and Purified treatment.
Step (2) is further, uses low pressure plasma spray (LPPS), vacuum plasma spray (VPS) or Supersonic The techniques such as speed flame-spraying (HVOF) are at processed high-temperature alloy surface deposition metal bonding coating, and bonding layer material is MCrAlY (M is Ni or NiCo), its thickness is 75~250 μm.
Step (3) is further, before metal bonding coating surface spraying ceramic layer, for obtaining high-performance coating system, right Tack coat carries out the pretreatment process such as diffusion in vacuum process and hidden lino removal.After pretreatment on metal bonding coating surface Form a thin layer, i.e. TGO layer 10 and (be mainly composed of α-Al2O3), its thickness is about 0.1~10 μm.Use Cr3+Fluorescence pressure spectrometry Measure TGO layer internal stress to be distributed:
Due at α-Al2O3Layer is containing a small amount of Cr element, and Cr3+And Al3+Ionic radius similar, both are easily formed solid solution Body, Cr3+It is solid-solution in Al with Impure forms2O3In, first, the laser using laser emission wavelength to be 532nm or 633nm is logical Cross laser and be directly incident on thin layer TGO surface (spot size is about 2 μm), can inspire wavelength in red range (λ= About 693nm) Cr3+Fluorescence, 2 fluorescence peak R the strongest at demarcation1And R2The characteristic peak positions of line;
Further, under unstress state, ruby (is mainly composed of α-Al2O3) Cr that inspired3+The wavelength of fluorescence is 693nm, 2 fluorescence peak R1And R2Line characteristic peak lays respectively at 14402cm-1And 14432cm-1
Further, when calculating the stress of described thermally grown oxide layer, select R2Line spectrum characteristic peak (14432cm-1), and its Side-play amount (the Δ υ of characteristic peakTGO) with thermally grown oxide layer in residual stress (σTGOBetween) linear, it may be assumed that Δ υTGO= ПTGO·σTGO, wherein ПTGOFor piezoelectric modulus and be constant, with this by R2The side-play amount of line spectrum characteristic peak obtains in TGO layer The distribution of residual stress, i.e. passes through R2The side-play amount of line characteristic peak obtains the preprocessed rear surface of metal bonding coating and forms α-Al2O3 The stress of change in Ceng.
Step (4) uses PS-PVD technique at pretreated metal bonding coating surface deposition surface ceramic layer, coating material Material is the zirconium oxide (being called for short YSZ) that yittrium oxide is partially stabilized, and its thickness is 100~500 μm.
In step (4), use Cr3+Fluorescence pressure spectrometry is measured TGO layer internal stress after PS-PVD technique prepares YSZ coating and is divided Cloth:
The laser using laser emission wavelength to be 532nm or 633nm, is directly incident on YSZ surface ceramii layer by laser, by In fluorescence, there is stronger penetration capacity, certain thickness ceramic layer on surface can be penetrated and inspire wavelength in red range Cr3+Fluorescence, 2 the strongest fluorescence peaks are often noted as R1And R2The characteristic peak positions of line spectrum;
Further, under unstress state, ruby (is mainly composed of α-Al2O3) Cr that inspired3+The wavelength of fluorescence is 693nm, 2 fluorescence peak R1And R2Line characteristic peak lays respectively at 14402cm-1And 14432cm-1
Further, when calculating the stress of described thermally grown oxide layer, select R2Line spectrum characteristic peak (14432cm-1), and its Side-play amount (the Δ υ of characteristic peakTGO) with thermally grown oxide layer in residual stress (σTGOBetween) linear, it may be assumed that Δ υTGO= ПTGO·σTGO, wherein ПTGOFor piezoelectric modulus and be constant, with this by R2The side-play amount of line spectrum characteristic peak obtains in TGO layer The distribution of residual stress, i.e. passes through R2The side-play amount of line characteristic peak obtains PS-PVD process deposits YSZ coating through different operating mode clothes TGO layer internal stress change after labour.
Present method be advantageous in that, 1. can successfully solve other coating stress detection means and cannot measure TGO layer planted agent The deficiency of power distribution;2. as a kind of Dynamic Non-Destruction Measurement, it is not necessary to destroy tested sample;3. incoming laser beam hot spot is only~2 μ M, thus the detection of coating micron dimension region internal stress can be obtained, this is also micron dimension phase with coating interface roughness Join, illustrate the advantage that other detection method hardly matches;4. detected by multimetering even Surface scan, coating can be obtained relatively The statistical result of a large amount of stress numerical in big region (millimeter or centimetres) so that values of stress have high repeatability and Credible.
Although the present invention is open as above with preferred embodiment, but it is not for limiting the present invention, any this area Technical staff without departing from the spirit and scope of the invention, may be by the method for the disclosure above and technology contents to this Bright technical scheme makes possible variation and amendment, therefore, every content without departing from technical solution of the present invention, according to the present invention Technical spirit any simple modification, equivalent variations and modification that above example is made, belong to technical solution of the present invention Protection domain.

Claims (10)

1. the lossless detection method of thermally grown oxide layer residual stress in a thermal barrier coating, it is characterised in that include as follows Step:
By the laser beam of specific wavelength, incide the surface of tested described thermal barrier coating, inspire in described thermal barrier coating Trace element Cr in thermally grown oxide layer3+Fluorescence spectrum;
The Cr that will be inspired3+Fluorescence spectral characteristic peak and unstress state under the Cr that inspired3+Fluorescence spectral characteristic Peak compares, and calculates the distribution of thermally grown oxide layer internal stress according to the side-play amount of characteristic peak.
Lossless detection method the most according to claim 1, it is characterised in that
Mark two the strongest fluorescence peak R1And R2The characteristic peak positions of line, when calculating described thermally grown oxide layer internal stress, Select R2Line spectrum characteristic peak, described R2Offset Δ υ of line spectrum characteristic peakTGOShould with remnants in described thermally grown oxide layer Power σTGOBetween linear, it may be assumed that Δ υTGOTGO·σTGO, wherein ПTGOFor piezoelectric modulus and be constant, with this by described R2The distribution of residual stress in the side-play amount described thermally grown oxide layer of acquisition of line spectrum characteristic peak.
Lossless detection method the most according to claim 1 and 2, it is characterised in that
Described thermal barrier coating is prepared by plasma spray coating-physical gas-phase deposition, and described thermal barrier coating includes height successively Temperature alloy substrate, metal bonding coating, thermally grown oxide layer and ceramic layer on surface.
Lossless detection method the most according to claim 3, it is characterised in that
Described high temperature alloy substrate is carried out pretreatment, and described pretreatment includes entering described high temperature alloy substrate surface to be sprayed Row roughening and purified treatment.
Lossless detection method the most according to claim 3, it is characterised in that
Using spraying coating process to prepare described metal bonding coating in described high temperature alloy substrate, described spraying coating process includes low pressure etc. Ionomer spray, vacuum plasma spray or HVAF technique;Preferably, the material of described metal bonding coating is MCrAlY, wherein M is Ni or NiCo.
Lossless detection method the most according to claim 3, it is characterised in that
Described thermally grown oxide layer is to pass through pre-oxidation treatment means before preparing described ceramic layer on surface at described metal The surface of tack coat is formed.
Lossless detection method the most according to claim 3, it is characterised in that
Described thermally grown oxide layer is to be formed due to the oxidation of described metal bonding coating after high-temperature service.
8. according to the lossless detection method described in claim 6 or 7, it is characterised in that
Described thermally grown oxide layer be mainly composed of α-Al2O3
Lossless detection method the most according to claim 3, it is characterised in that
Prepared by described ceramic layer on surface using plasma spraying-physical gas-phase deposition, the coating material deposited is oxygen Change yttrium partially stabilized zirconium oxide.
Lossless detection method the most according to any one of claim 1 to 9, it is characterised in that
By described thermal barrier coating being carried out multiple spot detection or Surface scan detection with in large area on the described thermal barrier coating of acquisition The statistical result of a large amount of stress numerical.
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