CN106024651A - Intelligent power module and manufacturing method thereof - Google Patents

Intelligent power module and manufacturing method thereof Download PDF

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Publication number
CN106024651A
CN106024651A CN201610616058.8A CN201610616058A CN106024651A CN 106024651 A CN106024651 A CN 106024651A CN 201610616058 A CN201610616058 A CN 201610616058A CN 106024651 A CN106024651 A CN 106024651A
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Prior art keywords
wiring layer
circuit
pin
circuit wiring
component
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冯宇翔
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Midea Group Co Ltd
GD Midea Air Conditioning Equipment Co Ltd
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Midea Group Co Ltd
Guangdong Midea Refrigeration Equipment Co Ltd
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Priority to CN201610616058.8A priority Critical patent/CN106024651A/en
Publication of CN106024651A publication Critical patent/CN106024651A/en
Priority to PCT/CN2016/113993 priority patent/WO2018018849A1/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/464Additional interconnections in combination with leadframes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/22Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
    • H10W40/226Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections characterised by projecting parts, e.g. fins to increase surface area
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL

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  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

一种智能功率模块及其制造方法,智能功率模块包括:作为载体的电路布线层,所述电路布线层具有上表面和与该上表面相对的下表面;倒扣并焊接于所述电路布线层的上表面预定位置的电路元件;贴装于所述电路元件中的功率元件的散热器;及覆盖所述电路布线层的上表面和所述电路元件,并使所述散热器部分表面裸露的密封层。不再需要金属基板,通过可重复利用的底板固定电路布线层进行加工,通过树脂进行最后固定,不再需要金属邦定线,节省了成本,将电路布线背面和散热片完全露出在树脂外面,最大限度提高散热效果,电路布线间的间隙完全暴露,湿气难以附着,并且,即使外部湿气内侵,因为已不存在金属线,已难以构成腐蚀。

An intelligent power module and its manufacturing method. The intelligent power module includes: a circuit wiring layer as a carrier, the circuit wiring layer has an upper surface and a lower surface opposite to the upper surface; it is reversed and welded to the circuit wiring layer A circuit element at a predetermined position on the upper surface of the circuit element; a radiator mounted on a power element in the circuit element; and a circuit element covering the upper surface of the circuit wiring layer and the circuit element, and exposing part of the surface of the radiator Sealing layer. The metal substrate is no longer needed, and the circuit wiring layer is fixed by a reusable bottom plate for processing, and the final fixation is done by resin, and the metal bonding wire is no longer required, which saves costs, and the back of the circuit wiring and the heat sink are completely exposed to the outside of the resin. The heat dissipation effect is maximized, the gap between the circuit wiring is completely exposed, and it is difficult for moisture to adhere. Moreover, even if external moisture invades in, it is difficult to cause corrosion because there are no metal wires.

Description

一种智能功率模块及其制造方法An intelligent power module and its manufacturing method

技术领域technical field

本发明属于电子器件制造工艺领域,尤其涉及一种智能功率模块及其制造方法。The invention belongs to the field of electronic device manufacturing technology, and in particular relates to an intelligent power module and a manufacturing method thereof.

背景技术Background technique

智能功率模块(Intelligent Power Module,IPM)是一种将电力电子和集成电路技术结合的功率驱动类产品。IPM把功率开关器件和高压驱动电路集成在一起,并内藏有过电压、过电流和过热等故障检测电路。IPM一方面接收MCU的控制信号,驱动后续电路工作,另一方面将系统的状态检测信号送回MCU。与传统分立方案相比,IPM以其高集成度、高可靠性等优势赢得越来越大的市场,尤其适合于驱动电机的变频器及各种逆变电源,是变频调速,冶金机械,电力牵引,伺服驱动,变频家电的一种理想电力电子器件。Intelligent Power Module (IPM) is a power drive product that combines power electronics and integrated circuit technology. IPM integrates power switching devices and high-voltage drive circuits, and has built-in fault detection circuits such as overvoltage, overcurrent and overheating. On the one hand, the IPM receives the control signal from the MCU to drive the subsequent circuits to work, and on the other hand, sends the system status detection signal back to the MCU. Compared with the traditional discrete solution, IPM wins more and more markets with its advantages of high integration and high reliability. It is especially suitable for frequency converters and various inverter power supplies for driving motors. An ideal power electronic device for electric traction, servo drive, and frequency conversion home appliances.

智能功率模块一般会工作在恶劣的工况中,如变频空调的室外机,高温高湿的状态下,高温会使智能功率模块内部温度升高,对于现行智能功率模块被所述密封树脂完全密封的结构,智能功率模块内部非常容易产生热积聚,高湿会使水气通过所述密封树脂与引脚之间的间隙进入所述智能功率模块的内部电路,所述智能功率模块内部的高温使离子,特别是氯离子和溴离子在水气的作用下发生迁移,对金属线产生腐蚀,这种腐蚀往往出现在金属线与电路元件或金属线与所述电路布线的结合部,导致开路,对智能功率模块构成致命破坏,严重时会使智能功率模块发生失控爆炸事故,对其应用环境构成损害,造成重大经济损失。Smart power modules generally work in harsh working conditions, such as the outdoor unit of an inverter air conditioner, under high temperature and high humidity conditions, high temperature will increase the internal temperature of the smart power module, and the current smart power module is completely sealed by the sealing resin The structure of the intelligent power module is very easy to generate heat accumulation inside the intelligent power module. High humidity will cause water vapor to enter the internal circuit of the intelligent power module through the gap between the sealing resin and the pins. The high temperature inside the intelligent power module makes Ions, especially chloride ions and bromide ions, migrate under the action of water vapor and corrode metal wires. This corrosion often occurs at the joints between metal wires and circuit components or metal wires and the circuit wiring, resulting in open circuits. It will cause fatal damage to the intelligent power module, and in severe cases, it will cause an out-of-control explosion accident of the intelligent power module, causing damage to its application environment and causing major economic losses.

另外,智能功率模块有不同功率的器件,对于不同功率的器件,金属线的材质和粗细各不相同,增加了智能功率模块的加工难度,购买不同的邦线设备还增加了加工成本,并且,多种邦线工艺的组合使所述智能功率模块的制造直通率变低,生产良率难以提高。最终导致所述智能功率模块的成本居高不下,影响了智能功率模块的普及应用。In addition, smart power modules have devices with different powers. For devices with different powers, the material and thickness of metal wires are different, which increases the processing difficulty of smart power modules. Purchasing different state wire equipment also increases processing costs. The combination of various wire-bang processes makes the manufacturing pass rate of the intelligent power module lower, and it is difficult to improve the production yield. Ultimately, the cost of the intelligent power module remains high, which affects the popularization and application of the intelligent power module.

发明内容Contents of the invention

本发明旨在解决现有技术的不足,提供一种高可靠性的智能功率模块及适应此种结构的工序流程作为制造方法,可在保证智能功率模块有更良好接触可靠性的同时降低了智能功率模块的成本。The present invention aims to solve the deficiencies of the prior art, and provides a high-reliability intelligent power module and a process flow adapted to this structure as a manufacturing method, which can reduce the intelligence while ensuring better contact reliability of the intelligent power module. The cost of the power module.

本发明是这样实现的,一种智能功率模块,包括:The present invention is achieved in this way, an intelligent power module, comprising:

作为载体的电路布线层,所述电路布线层具有上表面和与该上表面相对的下表面;A circuit wiring layer as a carrier, the circuit wiring layer having an upper surface and a lower surface opposite to the upper surface;

倒扣并焊接于所述电路布线层的上表面预定位置的电路元件;Undercut and soldered to the circuit element at a predetermined position on the upper surface of the circuit wiring layer;

贴装于所述电路元件中的功率元件的散热器;及heat sinks for power components mounted in said circuit components; and

覆盖所述电路布线层的上表面和所述电路元件,并使所述散热器部分表面裸露的密封层。A sealing layer that covers the upper surface of the circuit wiring layer and the circuit elements and exposes the surface of the heat sink part.

进一步地,还包括引脚,所述电路布线层包括靠近边缘的引脚焊盘,所述引脚与所述引脚焊盘连接并自所述电路布线外延伸。Further, pins are also included, and the circuit wiring layer includes pin pads close to the edge, and the pins are connected to the pin pads and extend outside the circuit wiring.

进一步地,所述引脚表面覆盖有镀层。Further, the surface of the pin is covered with plating.

进一步地,所述功率元件为平面功率器件。Further, the power element is a planar power device.

进一步地,所述散热器为散热片。Further, the heat sink is a heat sink.

进一步地,所述密封层为树脂层。Further, the sealing layer is a resin layer.

上述智能功率模块的有益效果是:不再需要金属基板,通过可重复利用的底板固定电路布线层进行加工,通过树脂进行最后固定,不再需要金属邦定线,节省了成本,将电路布线背面和散热片完全露出在树脂外面,最大限度提高散热效果,电路布线间的间隙完全暴露,湿气难以附着,并且,即使外部湿气内侵,因为已不存在金属线,已难以构成腐蚀。The beneficial effects of the above-mentioned intelligent power module are: no metal base plate is needed, the circuit wiring layer is fixed by the reusable base plate for processing, and the final fixation is performed by resin, the metal bonding wire is no longer required, and the cost is saved, and the circuit wiring layer is fixed on the back The heat sink and the heat sink are completely exposed outside the resin to maximize the heat dissipation effect. The gap between the circuit wiring is completely exposed, and it is difficult for moisture to adhere. Moreover, even if the external moisture invades in, it is difficult to cause corrosion because there are no metal wires.

本发明的另一目的在于提供一种智能功率模块的制造方法,包括以下步骤:Another object of the present invention is to provide a method for manufacturing an intelligent power module, including the following steps:

利用金属板材制作作为载体的电路布线层;Utilize the metal plate to make the circuit wiring layer as the carrier;

于所述电路布线层的表面装配电路元件,其中,所述电路元件以倒扣的方式装配;Installing circuit elements on the surface of the circuit wiring layer, wherein the circuit elements are assembled in an inverted manner;

于所述电路元件中的功率元件上贴装散热器;Mounting a radiator on the power element in the circuit element;

于所述电路布线层的表面包覆密封层,将所述电路元件覆盖并使所述散热器至少部分表面裸露。A sealing layer is coated on the surface of the circuit wiring layer to cover the circuit elements and expose at least part of the surface of the radiator.

上述智能功率模块的制造方法有益效果是:免去制作基板及其上的绝缘层的工序,通过底座进行定位,降低了塑封时定位的难度,底部完全露出,降低了注胶时上下表面厚度悬殊对参数控制的难度,免去了金属线邦定和清洗工序,节省了设备投入,提高了生产效率,降低了工艺管控要求,使智能功率模块的制造难度大幅下降,制造良率得到提高,进一步降低了智能功率模块的成本。The beneficial effect of the manufacturing method of the above-mentioned intelligent power module is that the process of making the substrate and the insulating layer on it is eliminated, and the positioning is performed through the base, which reduces the difficulty of positioning during plastic sealing, and the bottom is completely exposed, reducing the difference in thickness between the upper and lower surfaces when injecting glue. For the difficulty of parameter control, metal wire bonding and cleaning processes are eliminated, equipment investment is saved, production efficiency is improved, process control requirements are reduced, the difficulty of manufacturing intelligent power modules is greatly reduced, and the manufacturing yield is improved. Reduced cost of intelligent power modules.

附图说明Description of drawings

图1(A)为本发明实施例提供的智能功率模块的俯视图;FIG. 1(A) is a top view of an intelligent power module provided by an embodiment of the present invention;

图1(B)是图1(A)中沿X-X’线的剖面图;Fig. 1 (B) is the sectional view along X-X ' line in Fig. 1 (A);

图1(C)是本发明的智能功率模块去掉密封层后的俯视图;Fig. 1 (C) is a top view of the intelligent power module of the present invention after removing the sealing layer;

图1(D)是本发明的智能功率模块的下表面俯视图;FIG. 1(D) is a top view of the lower surface of the intelligent power module of the present invention;

图2为本发明实施例提供的智能功率模块的制造工艺流程图;FIG. 2 is a flow chart of the manufacturing process of the intelligent power module provided by the embodiment of the present invention;

图3(A)、3(B)分别是本发明智能功率模块的制造方法中制作电路布线的俯视和侧视工序示意图;3(A) and 3(B) are schematic diagrams of top and side view processes for making circuit wiring in the manufacturing method of the smart power module of the present invention, respectively;

图4(A)为引脚的尺寸标示图;Fig. 4 (A) is the size marking diagram of the pin;

图4(B)为制作引脚的工序示意图;Fig. 4 (B) is the schematic diagram of the procedure of making pin;

图5为在功率元件的底部贴装在散热片的工序示意图Figure 5 is a schematic diagram of the process of mounting on the heat sink at the bottom of the power element

图6(A)为在底座上配置电路布线的工序示意图;Figure 6(A) is a schematic diagram of the process of configuring circuit wiring on the base;

图6(B)和6(C)分别为装配电路元件、引脚的侧视和俯视工序示意图;6(B) and 6(C) are schematic diagrams of the side view and top view process of assembling circuit components and pins, respectively;

图7为智能功率模块的制造方法的密封工序示意图;7 is a schematic diagram of the sealing process of the manufacturing method of the intelligent power module;

图8为智能功率模块的制造方法的检测工序示意图;8 is a schematic diagram of a detection process of a manufacturing method of an intelligent power module;

图9为智能功率模块的制造方法的工序流程图。FIG. 9 is a process flowchart of a manufacturing method of an intelligent power module.

具体实施方式detailed description

为了使本发明要解决的技术问题、技术方案及有益效果更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

如图1(A)、图1(B)、图1(C)、图1(D)所示,智能功率模块包括电路布线层(电路布线)18、电路元件14、散热器15构成的电路,和配置在所述电路布线层18边缘的引脚11,和密封该电路且完全覆盖所述电路元件14和所述电路布线18上表面的密封层12。其中,图1(A)是本发明的智能功率模块10的上表面俯视图,所述散热器15从上表面露出,图1(B)是沿图1(A)的X-X’线的截面图,图1(C)是去掉覆盖所述电路元件14的所述密封层12后的俯视图,图1(D)是本发明的智能功率模块10的下表面俯视图,所述电路布线18从下表面露出。As shown in Figure 1(A), Figure 1(B), Figure 1(C), and Figure 1(D), the intelligent power module includes a circuit composed of a circuit wiring layer (circuit wiring) 18, a circuit element 14, and a heat sink 15 , and the pins 11 disposed on the edge of the circuit wiring layer 18, and the sealing layer 12 that seals the circuit and completely covers the upper surface of the circuit elements 14 and the circuit wiring 18. Wherein, Fig. 1(A) is a top view of the upper surface of the intelligent power module 10 of the present invention, and the heat sink 15 is exposed from the upper surface, and Fig. 1(B) is a cross section along the XX' line of Fig. 1(A) Figure 1 (C) is a top view after removing the sealing layer 12 covering the circuit element 14, and Fig. 1 (D) is a top view of the lower surface of the intelligent power module 10 of the present invention, and the circuit wiring 18 is viewed from below The surface is exposed.

具体地,电路布线层18作为智能功率模块10的载体,所述电路布线层18具有上表面和与该上表面相对的下表面;电路元件14倒扣并焊接于所述电路布线层18的上表面预定位置;散热器15贴装于所述电路元件14中的功率元件;密封层12覆盖所述电路布线层18的上表面和所述电路元件18,并使所述散热器15部分表面裸露。Specifically, the circuit wiring layer 18 is used as the carrier of the intelligent power module 10, and the circuit wiring layer 18 has an upper surface and a lower surface opposite to the upper surface; the circuit element 14 is reversed and welded on the circuit wiring layer 18 Predetermined position on the surface; the heat sink 15 is attached to the power element in the circuit element 14; the sealing layer 12 covers the upper surface of the circuit wiring layer 18 and the circuit element 18, and exposes part of the surface of the heat sink 15 .

具体地,功率元件为平面功率器件,如IGBT管,必须使用LIGBT。散热器15为散热片,散热片表面可以考虑进行电镀银处理,增加沁润性。密封层12为密封树脂层。Specifically, the power element is a planar power device, such as an IGBT tube, and LIGBT must be used. The heat sink 15 is a heat sink, and the surface of the heat sink can be considered to be electroplated with silver to increase the wetness. The sealing layer 12 is a sealing resin layer.

进一步地,电路布线18的靠近至少一个边缘上,有用于配置引脚11的特殊的电路布线,称为引脚焊盘18A。引脚11引脚焊盘18A连接并自所述电路布线18外延伸。所述引脚11表面覆盖有镀层。Further, on at least one edge of the circuit wiring 18, there is a special circuit wiring for configuring the pin 11, which is called the pin pad 18A. The pin 11 is connected to and extends from the circuit wiring 18 to the pin pad 18A. The surface of the pin 11 is covered with plating.

以下说明这样的各构成要素。Each of these constituent elements will be described below.

电路布线18由厚度为5盎司以上的铜材通过冲压或刻蚀的形式制作而成,为了防止氧化,所述电路布线18的上表面可以进行镀金处理,为了成本,所述电路布线18的上表面也可以进行镀银处理,或者通过真空或充氮包装进行运输,上表面不作处理。The circuit wiring 18 is made of a copper material with a thickness of more than 5 ounces by stamping or etching. In order to prevent oxidation, the upper surface of the circuit wiring 18 can be gold-plated. For cost, the upper surface of the circuit wiring 18 The surface can also be silver-plated, or shipped in vacuum or nitrogen-filled packaging with the upper surface untreated.

所述电路元件14被倒装固定在所述电路布线18上。所述电路元件14采用晶体管或二极管等有源元件、或者电容或电阻等无源元件。另外,通过由铜等制成的散热器15贴装在功率元件等发热量大的元件背面。The circuit element 14 is flip-chip fixed on the circuit wiring 18 . The circuit element 14 is an active element such as a transistor or a diode, or a passive element such as a capacitor or a resistor. In addition, the heat sink 15 made of copper or the like is mounted on the back surface of components that generate a large amount of heat, such as power components.

在此,设计成一边上设有多条引脚11,其具有例如与外部进行输入、输出的作用。引脚11和引脚焊盘18A通过焊锡等导电电性粘结剂焊接。Here, it is designed that a plurality of pins 11 are provided on one side, for example, for input and output with the outside. The pin 11 and the pin pad 18A are soldered with a conductive adhesive such as solder.

引脚11一般采用铜等金属制成,铜表面通过化学镀和电镀形成一层镍锡合金层,合金层的厚度一般为5μm,镀层可保护铜不被腐蚀氧化,并可提高可焊接性。Pin 11 is generally made of copper and other metals. The copper surface forms a layer of nickel-tin alloy layer through electroless plating and electroplating. The thickness of the alloy layer is generally 5 μm. The plating layer can protect copper from corrosion and oxidation and improve solderability.

所述密封层12可通过传递模方式使用热硬性树脂模制也可使用注入模方式使用热塑性树脂模制。在此,所述密封层12完全密封所述电路布线18的一面上的所有元素,并包裹所述电路布线18的大部分深度,只露出小部分电路布线下表面18B,电路布线下表面18B深度一般可以考虑设计成0.5盎司左右,如果电路布线下表面18B深度过小,可能会造成本发明的智能功率模块10后续焊接固定过程中难以被锡膏等焊料包裹,如果电路布线下表面18B深度过大,可能会造成本发明的智能功率模块10后续焊接固定过程中锡膏的爬锡高度不能完全包裹电路布线下表面18B;在此,所述散热器15从所述密封层12中露出,使功率元件的热量被快速散失。The sealing layer 12 may be molded using a thermosetting resin by transfer molding or may be molded using a thermoplastic resin by injection molding. Here, the sealing layer 12 completely seals all elements on one side of the circuit wiring 18, and wraps most of the depth of the circuit wiring 18, only exposing a small part of the lower surface 18B of the circuit wiring, and the depth of the lower surface 18B of the circuit wiring is Generally, it can be considered to be designed to be about 0.5 ounces. If the depth of the lower surface 18B of the circuit wiring is too small, it may cause the intelligent power module 10 of the present invention to be difficult to be wrapped by solder such as solder paste during the subsequent welding and fixing process. If the depth of the lower surface 18B of the circuit wiring is too deep If it is too large, it may cause the solder paste height to not completely cover the circuit wiring lower surface 18B during the subsequent welding and fixing process of the intelligent power module 10 of the present invention; here, the heat sink 15 is exposed from the sealing layer 12, so that The heat of the power components is quickly dissipated.

智能功率模块的有益效果是:不再需要金属基板,通过可重复利用的底板固定电路布线层进行加工,通过树脂进行最后固定,不再需要金属邦定线,节省了成本,将电路布线背面和散热片完全露出在树脂外面,最大限度提高散热效果,电路布线间的间隙完全暴露,湿气难以附着,并且,即使外部湿气内侵,因为已不存在金属线,已难以构成腐蚀。The beneficial effects of the intelligent power module are: no metal base plate is needed, the circuit wiring layer is fixed by the reusable base plate for processing, the final fixation is done by resin, the metal bonding wire is no longer needed, the cost is saved, and the circuit wiring backside and The heat sink is completely exposed to the outside of the resin to maximize the heat dissipation effect. The gap between the circuit wiring is completely exposed, and it is difficult for moisture to adhere. Moreover, even if the external moisture invades in, it is difficult to cause corrosion because there are no metal wires.

参考图2,说明所述智能功率模块的制造方法,包括以下步骤:Referring to Fig. 2, the manufacturing method of the intelligent power module is illustrated, including the following steps:

步骤S110,利用金属板材制作作为载体的电路布线层;Step S110, using a metal plate to make a circuit wiring layer as a carrier;

步骤S120,于所述电路布线层的表面装配电路元件,其中,所述电路元件以倒扣的方式装配;Step S120, assembling circuit elements on the surface of the circuit wiring layer, wherein the circuit elements are assembled in an upside-down manner;

步骤S120,于所述电路元件中的功率元件上贴装散热器;Step S120, mounting a radiator on the power element in the circuit element;

步骤S140,于所述电路布线层的表面包覆密封层,将所述电路元件覆盖并使所述散热器至少部分表面裸露。Step S140 , covering the surface of the circuit wiring layer with a sealing layer, covering the circuit elements and exposing at least part of the surface of the radiator.

步骤S140具体为:在所述电路布线层的表面周围设置热硬性树脂框;在所述热硬性树脂框的范围内注入热塑性树脂以密封所述电路布线层和电路元件。Step S140 specifically includes: setting a thermosetting resin frame around the surface of the circuit wiring layer; injecting thermoplastic resin into the range of the thermosetting resin frame to seal the circuit wiring layer and circuit elements.

在步骤S120之前还包括:制成独立的带镀层的引脚的步骤。该步骤具体包括:选取铜基材,对铜基材通过冲压或蚀刻的方式,制成一排引脚,引脚之间通过加强筋连接;在所述引脚表面依次形成镍层和镍锡合金层,得到带镀层的引脚。Before the step S120, it also includes: a step of making independent pins with plating. This step specifically includes: selecting a copper base material, forming a row of pins on the copper base material by punching or etching, and connecting the pins through reinforcing ribs; forming a nickel layer and nickel-tin layer on the surface of the pins in sequence Alloy layer to get plated pins.

在步骤S140之前还包括以下步骤:清除残留在所述绝缘层的助焊剂。Before the step S140, the following step is also included: removing the soldering flux remaining on the insulating layer.

通过底座进行定位,降低了塑封时定位的难度,底部完全露出,降低了注胶时上下表面厚度悬殊对参数控制的难度,免去了金属线邦定和清洗工序,节省了设备投入,提高了生产效率,降低了工艺管控要求,使智能功率模块的制造难度大幅下降,制造良率得到提高,进一步降低了智能功率模块的成本。Positioning through the base reduces the difficulty of positioning during plastic sealing, and the bottom is completely exposed, which reduces the difficulty of parameter control due to the difference in thickness between the upper and lower surfaces during glue injection. Production efficiency reduces the requirements for process control, greatly reduces the difficulty of manufacturing smart power modules, improves the manufacturing yield, and further reduces the cost of smart power modules.

在更具体的实施例中,结合图3(A)至图9,智能功率模块的制造方法包括以下工序。In a more specific embodiment, referring to FIG. 3(A) to FIG. 9 , the manufacturing method of the smart power module includes the following steps.

第一工序,参照图3(A)和3(B):The first process, with reference to Figure 3 (A) and 3 (B):

本发明的第一工序是作为本发明特征的工序,本工序是在大小合适的铜基板上形成电路布线的工序。The first step of the present invention is a characteristic step of the present invention, and this step is a step of forming circuit wiring on a copper substrate having an appropriate size.

首先,参照图3(A)和延图3(A)的X-X’线的截面图3(B),根据需要的电路布局设计,对于一般的智能功率模块,电路布局不应大于64mm×30mm。制造出合适的冲压模具冲压出特定的形状。也可通过锣刀使用高速钢作为材质,马达使用5000转/分钟的转速,锣刀与铝材平面呈直角下刀行程特定的形状。也可通过蚀刻工具,通过化学反应刻蚀出特定的形状。First, refer to Figure 3(A) and the cross-sectional view 3(B) along the XX' line of Figure 3(A), according to the required circuit layout design, for general intelligent power modules, the circuit layout should not be greater than 64mm× 30mm. Manufacture a suitable stamping die to punch out a specific shape. It is also possible to use high-speed steel as the material through the gong knife, and the motor uses a rotating speed of 5000 rpm. The gong knife and the aluminum plane are at right angles to the specific shape of the knife stroke. Specific shapes can also be etched through chemical reactions with etching tools.

在此,这个特定形状就是所述电路布线18。Here, this specific shape is the circuit wiring 18 .

在对抗氧化要求很高的场合,可以通过电镀金或化学沉金的方式,在所述电路布线18表面形成金层。In occasions where the anti-oxidation requirement is very high, a gold layer can be formed on the surface of the circuit wiring 18 by means of electroplating gold or chemical immersion gold.

在此,用于制造所述电路布线18的铜板的厚度应该不小于5盎司,保证能与后续的所述树脂12有更大的接触面积,使所述智能功率模块10成品有更强的固定效果。Here, the thickness of the copper plate used to manufacture the circuit wiring 18 should not be less than 5 ounces to ensure a larger contact area with the subsequent resin 12, so that the finished product of the intelligent power module 10 has a stronger fixation. Effect.

第二工序,参照图4(A)和图4(B):The second process, referring to Figure 4(A) and Figure 4(B):

本发明的第二工序是作为本发明特征的工序,本工序是制成独立的带镀层的引脚11的工序。The second step of the present invention is a characteristic step of the present invention, and this step is a step of forming an independent plated pin 11 .

每个引脚11都是用铜基材,制成长度C为25mm,宽度K为1.5mm,厚度H为1mm的长条状,如图4(A)所示;在此,为便于装配,在其中一端压制出一定的弧度,如图4(B)所示;Each pin 11 is all to use copper base material, makes length C be 25mm, and width K is 1.5mm, and thickness H is the elongated shape of 1mm, as shown in Figure 4 (A); Here, for ease of assembly, A certain arc is pressed at one end, as shown in Figure 4(B);

然后通过化学镀的方法形成镍层:通过镍盐和次亚磷酸钠混合溶液,并添加了适当的络合剂,在已形成特定形状的铜材表面形成镍层,在金属镍具有很强的钝化能力,能迅速生成一层极薄的钝化膜,能抵抗大气、碱和某些酸的腐蚀。镀镍结晶极细小,镍层厚度一般为0.1μm;Then the nickel layer is formed by electroless plating: through the mixed solution of nickel salt and sodium hypophosphite, and adding an appropriate complexing agent, a nickel layer is formed on the surface of the copper material that has formed a specific shape, and the metal nickel has a strong Passivation ability, can quickly form an extremely thin passivation film, which can resist the corrosion of atmosphere, alkali and some acids. The crystals of nickel plating are very small, and the thickness of nickel layer is generally 0.1μm;

接着通过酸性硫酸盐工艺,在室温下将已形成形状和镍层的铜材浸在带有正锡离子的镀液中通电,在镍层表面形成镍锡合金层,镍层厚度一般控制在5μm,镍层的形成极大提高了保护性和可焊性;Then, through the acid sulfate process, the copper material with the formed shape and nickel layer is immersed in the plating solution with positive tin ions at room temperature and energized to form a nickel-tin alloy layer on the surface of the nickel layer. The thickness of the nickel layer is generally controlled at 5 μm. , the formation of nickel layer greatly improves the protection and solderability;

到此,所述引脚11制造完成。So far, the manufacturing of the pin 11 is completed.

在此,本发明的所述引脚11是一个个单独的引脚,不同于现行技术的整排引脚,因为所述引脚11被固定在的所述电路布线18仅通过树脂部分包裹固定,抗冲击强度有限,单独的引脚避免了切除加强筋的工序,能够降低对本发明的智能功率模块10的系统性冲击。Here, the pins 11 of the present invention are individual pins, which are different from the entire row of pins in the prior art, because the circuit wiring 18 on which the pins 11 are fixed is only partially wrapped and fixed by resin , the impact strength is limited, and the single pin avoids the process of cutting the reinforcing rib, which can reduce the systemic impact on the intelligent power module 10 of the present invention.

第三工序,参考图5:The third process, refer to Figure 5:

本发明的第三工序是作为本发明特征的工序,本工序是将制造出散热器15,并将L型功率元件14的底部贴装在所述散热器15上的工序。The third step of the present invention is a characteristic step of the present invention. This step is to manufacture the heat sink 15 and mount the bottom of the L-shaped power element 14 on the heat sink 15 .

散热器15可设计为厚度为1.5mm左右的铜片,通过冲压或刻蚀的方式制作而成,铜片通过电镀的方式镀银,银层厚度可考虑设计为22~30μm。The heat sink 15 can be designed as a copper sheet with a thickness of about 1.5 mm, which is manufactured by stamping or etching. The copper sheet is plated with silver by electroplating, and the thickness of the silver layer can be designed to be 22-30 μm.

然后通过共晶工艺,用熔点300℃以上的高温锡膏,可考虑使用田村品牌,将L型功率元件14的背面贴装在所述散热器15上。在此,L型功率器件14即为平面型功率器件,此种功率器件的所有电极都位于功率器件的正面,正面的电极在下述工序中与所述电路布线18相连。Then, through the eutectic process, the back of the L-shaped power element 14 is mounted on the heat sink 15 with a high-temperature solder paste with a melting point above 300° C., which may be considered to be Tamura brand. Here, the L-shaped power device 14 is a planar power device, and all electrodes of this power device are located on the front side of the power device, and the electrodes on the front side are connected to the circuit wiring 18 in the following process.

在此,所述功率器件14的共晶平整度考虑控制在<0.1mm。Here, the flatness of the eutectic of the power device 14 is considered to be controlled at <0.1 mm.

第四工序,参考图6(A)、6(B)和6(C):The fourth process, with reference to Figures 6(A), 6(B) and 6(C):

本发明的第三工序是作为本发明特征的工序,本工序是在底板16上配置所述电路布线18,并在所述电路布线18表面倒装所述电路元件14和配置所述引脚11的工序。The third process of the present invention is a process that is characteristic of the present invention. In this process, the circuit wiring 18 is arranged on the base plate 16, and the circuit element 14 and the pins 11 are arranged on the surface of the circuit wiring 18. process.

首先,制作出如图6(A)的底板16,所述底板16可以使用高强度的不锈钢制作而成,在所述底板16的表面,有根据所述电路布线18形状挖出的凹陷17,所述凹陷17的宽度略大于对应的所述电路布线18的宽度,所述凹陷17的深度约为0.5盎司。First, make the base plate 16 as shown in FIG. 6(A), the base plate 16 can be made of high-strength stainless steel, and on the surface of the base plate 16, there are recesses 17 dug out according to the shape of the circuit wiring 18, The width of the recess 17 is slightly larger than that of the corresponding circuit wiring 18, and the depth of the recess 17 is about 0.5 ounces.

其次,参照侧视图图6(B)和俯视图图6(C),将制作好的电路布线18放置在所述底板16的对应所述凹陷处,并通过锡膏印刷机,使用钢网,对所述电路布线18的特定位置进行锡膏涂装,钢网可使用0.13mm的厚度。通过SMT机或DA机等设备,进行电路元件14,包括已经配置所述散热器15的电路元件14,和引脚11的安装,所述电路元件14可直接倒装在所述电路布线18的特定位置,而引脚11则一端要安放在所述焊盘18A上,另一端需要载具20进行固定,所述载具20通过合成石等材料制成。Next, referring to the side view FIG. 6(B) and the top view FIG. 6(C), the prepared circuit wiring 18 is placed in the corresponding depression of the bottom plate 16, and is passed through a solder paste printing machine, using a steel mesh, for The specific position of the circuit wiring 18 is coated with solder paste, and the thickness of the stencil can be 0.13 mm. Through equipment such as SMT machine or DA machine, carry out circuit element 14, comprise the circuit element 14 that has configured described radiator 15, and the installation of pin 11, described circuit element 14 can be directly flip-chip on described circuit wiring 18 A specific position, while one end of the pin 11 should be placed on the pad 18A, and the other end needs to be fixed by a carrier 20, and the carrier 20 is made of synthetic stone and other materials.

然后,放于所述载具20上的所述底板16通过回流焊,锡膏固化,所述电路元件14和所述引脚11被固定。Then, the base plate 16 placed on the carrier 20 is reflowed, the solder paste is solidified, and the circuit elements 14 and the pins 11 are fixed.

第五工序,参照图7:The fifth process, refer to Figure 7:

本发明的第五工序是作为本发明特征的工序,参照图7,本工序是说明由密封树脂12密封电路布线18的工序。图7表示使用模具50由密封树脂密封被所述底板16承载的电路布线18的工序的剖面图。The fifth step of the present invention is a characteristic step of the present invention. Referring to FIG. 7 , this step is a step of sealing the circuit wiring 18 with the sealing resin 12 . 7 is a cross-sectional view showing a step of sealing the circuit wiring 18 carried by the base plate 16 with a sealing resin using a mold 50 .

首先,在无氧环境中对电路布线18进行烘烤,烘烤时间不应小于2小时,烘烤温度和选择125℃。Firstly, the circuit wiring 18 is baked in an oxygen-free environment, the baking time should not be less than 2 hours, and the baking temperature should be 125°C.

将配置好所述电路布线18的底板16搬送到模型44及45。通过使引脚11的特定部分与固定装置46接触,进行所述电路基板16的定位。The base plate 16 on which the circuit wiring 18 is arranged is conveyed to the molds 44 and 45 . The positioning of the circuit substrate 16 is performed by bringing specific portions of the pins 11 into contact with the fixing means 46 .

合模时,在形成于模具50内部的模腔中放置底板16,然后由浇口53注入密封树脂形成密封层12。进行密封的方法可采用使用热硬性树脂的传递模模制或使用热硬性树脂的注入模模制。而且,对应自浇口53注入的密封树脂12模腔内部的气体通过排气口54排放到外部。When closing the mold, the bottom plate 16 is placed in the mold cavity formed inside the mold 50 , and then the sealing resin is injected through the gate 53 to form the sealing layer 12 . A method of performing sealing may employ transfer molding using a thermosetting resin or injection molding using a thermosetting resin. Also, the gas inside the cavity corresponding to the sealing resin 12 injected from the gate 53 is discharged to the outside through the exhaust port 54 .

在此,所述上模44应与所述散热器15接触,所述下模45应与底板16接触。Here, the upper mold 44 should be in contact with the heat sink 15 , and the lower mold 45 should be in contact with the bottom plate 16 .

第六工序,参照图8:The sixth process, refer to Figure 8:

本发明第六工序是进行所述引脚11成型和模块功能测试的工序,智能功率模块经由此工序作为制品完成。The sixth process of the present invention is the process of forming the pin 11 and testing the module function, and the intelligent power module is completed as a product through this process.

在前工序即传递模模装工序使除引脚11以外的其他部分都被树脂12密封。本工序根据使用的长度和形状需要,例如,在虚线51的位置将外部引脚11折弯成一定形状,便于后续装配。The parts other than the lead 11 are sealed with the resin 12 in the previous process, that is, the transfer molding process. In this process, according to the length and shape required, for example, the external pin 11 is bent into a certain shape at the position of the dotted line 51 to facilitate subsequent assembly.

然后将模块放入测试设备中,进行常规的电参数测试,因为所述引脚11相互独立,成型后可能会有部分引脚不在同一水平面上,影响接触,所以一般需要先进行测试机金手指与引脚的接触测试,如果接触测试不通过,需要对所述引脚11进行修调处理,直到接触测试通过后,再进行电气特性测试,包括绝缘耐压、静态功耗、迟延时间等测试项目,测试合格者为成品。Then put the module into the test equipment and conduct conventional electrical parameter tests. Because the pins 11 are independent of each other, some pins may not be on the same level after molding, which will affect the contact. Therefore, it is generally necessary to test the golden finger of the machine first The contact test with the pin, if the contact test fails, the pin 11 needs to be trimmed until the contact test is passed, and then the electrical characteristic test, including insulation withstand voltage, static power consumption, delay time, etc. Items that pass the test are finished products.

利用上述工序,完成图2所示的智能功率模块10。Through the above steps, the smart power module 10 shown in FIG. 2 is completed.

以上仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention. Inside.

Claims (10)

1. a SPM, it is characterised in that including:
As the circuit-wiring layer of carrier, described circuit-wiring layer has upper surface and relative with this upper surface Lower surface;
Back-off is also welded in the component in upper surface precalculated position of described circuit-wiring layer;
The radiator of the power component being mounted in described component;And
Cover the upper surface of described circuit-wiring layer and described component, and make described heat sink part surface Exposed sealant.
2. SPM as claimed in claim 1, it is characterised in that also include pin, described electricity Road wiring layer includes that, by antermarginal pin pad, described pin is connected and from described electricity with described pin pad Road wiring is outer to be extended.
3. SPM as claimed in claim 2, it is characterised in that described pin surface is coated with Coating.
4. SPM as claimed in claim 1, it is characterised in that described power component is plane Power device.
5. SPM as claimed in claim 1, it is characterised in that described radiator is fin.
6. SPM as claimed in claim 1, it is characterised in that described sealant is resin bed.
7. the manufacture method of a SPM, it is characterised in that comprise the following steps:
Sheet metal is utilized to make the circuit-wiring layer as carrier;
In the surface-mounted component of described circuit-wiring layer, wherein, described component is with the side of back-off Formula is assembled;
Radiator is mounted on power component in described component;
In the Surface coating sealant of described circuit-wiring layer, described component is covered and makes described heat radiation At least part of surface exposure of device.
8. the manufacture method of SPM as claimed in claim 7, it is characterised in that be set forth in The Surface coating sealant of described circuit-wiring layer, covers described component and makes described heat sink part The sealant step of surface exposure particularly as follows:
It is arranged around thermosetting resin frame on the surface of described circuit-wiring layer;
Thermoplastic resin is injected to seal described circuit-wiring layer and electricity in the range of described thermosetting resin frame Circuit component.
9. the manufacture method of SPM as claimed in claim 7, it is characterised in that be set forth in Also include before the surface-mounted component step of described circuit-wiring layer:
Make the pin of independent band coating;Specifically include:
Choose Copper base material, to Copper base material by the way of punching press or etching, make pin in a row, between pin Connected by reinforcement;
Sequentially form nickel dam and nickeltin layer at described pin surface, obtain the pin of band coating;
Described pin is welded on the pin pad at described circuit-wiring layer edge by Reflow Soldering.
10. the manufacture method of SPM as claimed in claim 7, it is characterised in that described In the Surface coating sealant of described circuit-wiring layer, described component is covered and makes described radiator extremely Before the step of the sealant of small part surface exposure further comprising the steps of:
Remove the scaling powder remaining in described insulating barrier.
CN201610616058.8A 2016-07-29 2016-07-29 Intelligent power module and manufacturing method thereof Pending CN106024651A (en)

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