CN105984828B - Microcomputer electric component - Google Patents

Microcomputer electric component Download PDF

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Publication number
CN105984828B
CN105984828B CN201510099283.4A CN201510099283A CN105984828B CN 105984828 B CN105984828 B CN 105984828B CN 201510099283 A CN201510099283 A CN 201510099283A CN 105984828 B CN105984828 B CN 105984828B
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CN
China
Prior art keywords
electric component
microcomputer electric
mass
anchor point
electrode
Prior art date
Application number
CN201510099283.4A
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Chinese (zh)
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CN105984828A (en
Inventor
吴嘉昱
罗烱成
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立锜科技股份有限公司
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Priority to CN201510099283.4A priority Critical patent/CN105984828B/en
Publication of CN105984828A publication Critical patent/CN105984828A/en
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Abstract

The present invention provides a kind of microcomputer electric component, wherein including:One substrate;One mass, comprising a housing and an at least internal projection, the inside of the wherein housing defines a hollow structure, and the internal projection is directly connected to the housing and is extended internally from the housing;An at least spring, in the hollow structure, at least an internal projection is accordingly directly connected to this;One anchor point, in the hollow structure, it is directly connected to an at least spring and the anchor point is connected to the substrate;Multiple float electrodes, it is connected and is located in hollow structure with mass;And multiple fixed electrodes, set corresponding to multiple float electrodes, and by multiple fixed parts to be connected to substrate.

Description

Microcomputer electric component

Technical field

The present invention relates to a kind of microcomputer electric component, specifically for the design of the internal projection by wherein mass, can save Omit connecting rod and there is a kind of microcomputer electric component of higher sensitivity.

Background technology

For microcomputer electric component in commonly used daily life, motion sensing is application common in microcomputer electric component.Fig. 1 shows Show a microcomputer electric component 10 of a prior art (U.S. Patent number US 6,892,576), it is regarded for the part of microcomputer electric component 10 Figure (microcomputer electric component 10 is a symmetrical structure, and Fig. 1 shows the partial view of a quarter of microcomputer electric component 10), its mass 11 Substrate (schema is not shown) is connected to by spring 12, connecting rod 13 and multiple anchor points 14, its connecting rod 13 need to be paid special attention to and passed through Multiple anchor points 14 are connected to substrate, to avoid it from deforming or distort, though partly solve the problem of deformation or distortion, wherein connecting rod 13 are used for connecting spring 12, but the occupied area of connecting rod 13 is excessive causes mass 11 to have larger external dimensions with needed for reaching Quality, microcomputer electric component 10 and then is also required to a larger area, therefore the minimum for limiting microcomputer electric component 10 may size.In addition, The structure of multiple anchor points also increases manufacture complexity.

Fig. 2 shows another prior art (U.S. Patent number US 8,393,215) microcomputer electric component 20, its mass 21 By spring 22, connecting rod 23, with anchor point 24 to be connected on substrate 25.Connecting rod 23 is in addition to connecting spring 22, its occupied area mistake Greatly, cause mass 21 to be also required to a larger Outside Dimensions to reach required quality indirectly, cause microcomputer electric component 20 to be also required to Larger area.Connecting rod is in addition to foregoing space consuming shortcoming, when thermal deformation produces, may also be made because its length increases or shortened Into the skew of mass, and then influence sensing accuracy.

The shortcomings that in view of above prior art, the present invention proposes a kind of microcomputer electric component, by wherein in mass The design of portion's protuberance, connecting rod can be omitted and there is higher sensitivity.

The content of the invention

It is an object of the invention to overcome the deficiencies in the prior art and defect, a kind of microcomputer electric component is proposed, by wherein The design of the internal projection of mass, connecting rod can be omitted and there is higher sensitivity.

For the above-mentioned purpose, a kind of microcomputer electric component is provided with regard to one of viewpoint, the present invention, comprising:One substrate;One matter Gauge block, comprising a housing and an at least internal projection, the inside of the wherein housing defines a hollow structure, and inside this Protuberance is directly connected to the housing and extended internally from the housing;An at least spring, in the hollow structure, with this extremely A few internal projection is accordingly directly connected to;One anchor point, in the hollow structure, be directly connected to an at least spring, And the anchor point is connected to the substrate;Multiple float electrodes, it is connected and is located in hollow structure with mass;And multiple fixed electricity Pole, set corresponding to multiple float electrodes, and by multiple fixed parts to be connected to substrate.

In one embodiment, the anchor point is located at geometric center position or the position of mass center of the mass.

In one embodiment, position of mass center one segment distance of the anchor point apart from the mass.It is the plurality of in one embodiment Float electrode and multiple fixed electrodes be respectively included in the float electrode that first party sets up and fixed electrode with sense this Movement on one direction, and the float electrode that sets in a second direction and fixed electrode are to sense the shifting in the second direction Dynamic, first and second direction is not parallel to each other.

In one embodiment, the plurality of float electrode forms multiple differential type electric capacity with the plurality of fixed electrode.

In one embodiment, the plurality of float electrode is connected to an at least internal projection or is connected to the housing or connects It is connected between an at least internal projection and the housing.

In one embodiment, the plurality of float electrode is located at the both sides of an at least internal projection, and the plurality of fixed electricity Pole is located at the both sides of an at least internal projection.

In one embodiment, the microcomputer electric component includes multiple intermediate active electrodes and multiple middle fixed electrodes again, and this is more Individual intermediate active electrode is connected to the mass, wherein the plurality of intermediate active electrode is located at the both sides of the anchor point, and it is the plurality of Middle fixed electrode is located at the both sides of the anchor point.

In one embodiment, the microcomputer electric component includes even number spring, respectively by corresponding even number internal projection with The anchor point connects.

Below by specific embodiment elaborate, when be easier to understand the purpose of the present invention, technology contents, feature and its The effect of reached.

Brief description of the drawings

Fig. 1 and Fig. 2 shows two microcomputer electric components of prior art;

Fig. 3-Fig. 8 shows the schematic diagram of the microcomputer electric component according to the multiple embodiments of the present invention.

Symbol description in figure

10th, 20,30,40,50,60,70,80 microcomputer electric component

11 masses

12 springs

13 connecting rods

14 anchor points

21 masses

22 springs

23 connecting rods

24 anchor points

25 substrates

31 masses

310 housings

311 hollow structures

312 internal projections

32 springs

33 anchor points

34 float electrodes

341 intermediate active electrodes

35 fixed electrodes

351 middle fixed electrodes

36 fixed parts

39 connecting portions

C mass centres

X, Y directions

Embodiment

For the present invention foregoing and other technology contents, feature and effects, coordinate following with reference to the one preferable of schema In the detailed description of embodiment, can clearly it present.The direction term being previously mentioned in following examples, such as:Upper and lower, left, It is right, front or rear etc., only it is the direction with reference to annexed drawings.Schema in the present invention belongs to signal, is mostly intended to represent each composition Relativeness between part, as shape, thickness and width then and not according to ratio drafting.

Reference picture 3, the present invention provides a kind of microcomputer electric component 30, wherein including:One substrate (the structure shown positioned at schema Lower section, covered by schematic structure);One mass 31, comprising a housing 310 and an at least internal projection 312, wherein The inside of the housing 310 defines a hollow structure 311, and the internal projection 312 is directly connected to housing 310 and outside Frame 310, which extends internally, (it is worth noting that, internal projection 312 is a part for mass 31, has the work of increase quality With);An at least spring 32, in hollow structure 311, at least an internal projection 312 is accordingly directly connected to this;One anchor Point 33, in hollow structure 311, at least a spring 32 is directly connected to and anchor point 33 is connected to substrate with this;Multiple flexible lamps Pole 34, it is connected with mass 31 and in hollow structure 311;And multiple fixed electrodes 35, corresponding to multiple float electrodes 34 and set, and by multiple fixed parts 36 to be connected to substrate.Pass through the relative shifting between float electrode 34 and fixed electrode 35 Capacitance caused by moving changes, and can reach sensing function, such as sensing acceleration etc..

In the present embodiment, one end of float electrode 34 is connected to housing 310 and the other end is connected to internal projection 312, But not limited to this when implementing, float electrode 34 can only have one end and be connected to housing 310 or internal projection 312.

In the present embodiment, anchor point 33 is arranged at the geometric center position of mass 31, not limited to this when so implementing, such as In another embodiment, may be provided at mass 31 position of mass center (when the unequal distribution of the quality of mass 31, quality Center is not equal to geometric center position).In another example in another embodiment, position of mass center and the anchor point of mass can With a distance, such mass can therefore distance and there is an eccentric motion (referring to aftermentioned Fig. 7 embodiments).

In another embodiment, the quantity of foregoing anchor point 33 can be not limited to one, can also increase because of implementation demand, such as Two springs 32 are connected to two anchor points (schema is not shown) etc..

Foregoing multiple fixed electrodes 35 by multiple fixed parts 36 to be connected to substrate, fixed electrode 35 and fixed part 36 Connection corresponding relation correspond to the mode of a fixed part 36 connection except a fixed electrode 35 shown in Fig. 3.In another embodiment In, also can be that multiple fixed electrodes 35 correspond to a fixed part refering to the microcomputer electric component 40 of another embodiment shown by Fig. 4 36.In Fig. 3 and Fig. 4 embodiments, preferable (but nonessential), fixed part 36, which is preferably set, is connected to 35 closer matter of fixed electrode The position of the mass centre of gauge block 31, it can so reduce the influence caused by stress.

In the present embodiment, hollow structure 311 is continuous and closing a structure.In another embodiment, hollow structure 311 Can be that (such as hollow structure 311 is divided into multiple disjunct spaces, or any portion of mass 31 to discontinuous structure Any part is to form separately independent space in hollow structure 311).In another embodiment, hollow structure 311 can be Semi-enclosed structure (such as housing 310 can have opening, communicate hollow structure 311 and the outside of housing 310).

Reference picture 5, in the present embodiment, microcomputer electric component 50 on (such as illustrating X-direction) except setting in a first direction Float electrode 34 and fixed electrode 35, can be second direction (such as illustrating Y-direction) to sense outside the movement on the first direction To sense the movement in the second direction, first and second direction is not mutually equal for upper setting float electrode 34 and fixed electrode 35 OK.Also, shown in the present embodiment is symmetrical structure, but not limited to this when implementing, also can be asymmetrical structure, and own Spring is not limited to all be connected to single anchor point 33;For example, multiple anchor points can be set, and at least part spring is connected to not Same anchor point.

In the preferred embodiment, multiple float electrodes arrange structure differential type electric capacity with multiple fixed electrodes (Differential Capacitor).Such as:In Fig. 3 microcomputer electric component 30, two adjacent fixed electrodes 35 are folded in two It is another when relative movement causes the float electrode 34 of wherein side to increase with the gap of fixed electrode 35 in float electrode 34 Side float electrode 34 and the gap of fixed electrode 35 will reduce.In another example in the microcomputer electric component 40 that Fig. 4 is shown, left side Float electrode 34 and fixed electrode 35, float electrode 34 and fixed electrode 35 with right side, its relative position on the contrary, i.e. left side with The float electrode 34 on right side is with the relative direction relation of fixed electrode 35 on the contrary, therefore also constituting differential type electric capacity.

The arrangement of differential type electric capacity described above is not necessarily;Fig. 6 shows the microcomputer electric component 60 of an embodiment, then does not have There is the structure of differential type electric capacity, its left and right side float electrode 34 and the gap of fixed electrode 35 for increase simultaneously or reduce.Herein Under kind layout, in another embodiment, Fig. 7 embodiments are referred to, can arrange that there is the mass centre C of anchor point 33 and mass One distance (in the present embodiment, anchor point 33 with mass centre C Y-directions in figure there is a distance), then microcomputer electric component 70 Left and right side float electrode 34 can have the operating characteristic of differential type electric capacity with fixed electrode 35 because of the swing of mass 31. In Fig. 7 embodiments, the lower section quality of housing 310 is larger, therefore mass centre C and is not located at its geometric center.

Fig. 8 shows the microcomputer electric component 80 of another embodiment.The present embodiment and the difference of Fig. 3 embodiments are:Implement in Fig. 3 In example, float electrode 34 is arranged in the both sides of internal projection 312 with fixed electrode 35, and wherein float electrode 34 is connected to housing Between 310 and internal projection 312, and in the present embodiment, microcomputer electric component 80 is again including being arranged in the more of the both sides of anchor point 33 Individual intermediate active electrode 341 and middle fixed electrode 351, one end of wherein intermediate active electrode 341 are connected to housing 310, separately One end can be not attached to any part, or as illustrated, may connect to a connecting portion 39.In addition, the present embodiment also shows anchor point 33 size can change according to need, can such as, but not limited to extend toward the direction of internal projection 312.

Compared to prior art, microcomputer electric component of the invention eliminates connecting rod;The present invention is directly connected with internal projection Connect spring, spring is directly connected in anchor point, therebetween without connecting rod, and internal projection is a part for mass, thus Under identical entire area, the quality of mass of the invention is larger, makes the sensitivity of sensing increase.Or the matter in mass In the case of measuring identical, sensing sensitivity identical, the overall dimensions of microcomputer electric component of the invention can reduce.In addition, because Eliminate connecting rod, thus connecting rod stress and the influence caused by deforming also is exempted.

Illustrate the present invention for preferred embodiment above, it is simply described above, only make those skilled in the art easy In understanding present disclosure, not it is used for limiting the interest field of the present invention.For those skilled in the art, when can be in this hair It is bright spirit in, immediately think and various equivalence changes.For example, housing is not limited to rectangle, and can be any topological shape;Again For example, in the upper left of embodiment illustrated in fig. 5, upper right, lower-left, bottom right space, the float electrode and fixed electrode of Z-direction can be designed Deng.Therefore all concepts under this invention and spiritual equivalent change or modification for it, claim model of the invention all should be included in In enclosing.Any embodiment or claim of the present invention is not necessary to reach whole purposes or advantage or feature disclosed in this invention. Summary part and title are intended merely to aid in patent document search to be used, and are not used for limiting the interest field of the present invention.

Claims (10)

1. a kind of microcomputer electric component, it is characterised in that include:
One substrate;
One mass, comprising a housing and an at least internal projection, the inside of the wherein housing defines a hollow structure, And the internal projection is directly connected to the housing and is extended internally from the housing;
An at least spring, in the hollow structure, at least an internal projection is accordingly directly connected to this;
One anchor point, in the hollow structure, it is directly connected to an at least spring and the anchor point is connected to the substrate;
Multiple float electrodes, it is connected and is located in hollow structure with mass;And
Multiple fixed electrodes, set corresponding to multiple float electrodes, and by multiple fixed parts to be connected to substrate;
Wherein, the microcomputer electric component is in only including single anchor point in the hollow structure, and at least one inside of the mass is convex Go out portion by an at least spring and the single anchor point, be connected to the substrate.
2. microcomputer electric component as claimed in claim 1, wherein, the anchor point is located at geometric center position or the quality of the mass Center.
3. microcomputer electric component as claimed in claim 1, wherein, the anchor point apart from the mass one section of position of mass center away from From.
4. microcomputer electric component as claimed in claim 1, wherein, the plurality of float electrode is respectively included in multiple fixed electrodes Float electrode that first party is set up and fixed electrode are to sense the movement on the first direction, and set in a second direction For the float electrode and fixed electrode put to sense the movement in the second direction, first and second direction is not parallel to each other.
5. microcomputer electric component as claimed in claim 1, wherein, the plurality of float electrode forms multiple with the plurality of fixed electrode Differential type electric capacity.
6. microcomputer electric component as claimed in claim 1, wherein, the plurality of float electrode is connected at least one inside and protruded Portion is connected to the housing or is connected between an at least internal projection and the housing.
7. microcomputer electric component as claimed in claim 1, wherein, the plurality of float electrode is located at an at least internal projection Both sides, and the plurality of fixed electrode is located at the both sides of an at least internal projection.
8. microcomputer electric component as claimed in claim 7, wherein, include multiple intermediate active electrodes and multiple middle fixed electricity again Pole, the plurality of intermediate active electrode are connected to the mass, wherein the plurality of intermediate active electrode is located at the both sides of the anchor point, and The plurality of middle fixed electrode is located at the both sides of the anchor point.
9. microcomputer electric component as claimed in claim 1, wherein, an at least spring is even number spring, respectively by corresponding to Even number internal projection is connected with the anchor point.
10. microcomputer electric component as claimed in claim 9, wherein, the even number spring is two or four.
CN201510099283.4A 2015-03-06 2015-03-06 Microcomputer electric component CN105984828B (en)

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Application Number Priority Date Filing Date Title
CN201510099283.4A CN105984828B (en) 2015-03-06 2015-03-06 Microcomputer electric component

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Application Number Priority Date Filing Date Title
CN201510099283.4A CN105984828B (en) 2015-03-06 2015-03-06 Microcomputer electric component

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CN105984828B true CN105984828B (en) 2018-04-03

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Publication number Priority date Publication date Assignee Title
CN108732383A (en) * 2017-04-18 2018-11-02 立锜科技股份有限公司 Microelectromechanicdevices devices

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CN101563616A (en) * 2006-12-19 2009-10-21 罗伯特·博世有限公司 Acceleration sensor with comb-shaped electrodes
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CN102597699A (en) * 2009-08-04 2012-07-18 飞兆半导体公司 Micromachined inertial sensor devices
CN103151220A (en) * 2013-02-28 2013-06-12 刘双杰 Long-contact time micro-electromechanical universal inertia switch and manufacturing method for same
CN104198763A (en) * 2014-09-17 2014-12-10 安徽北方芯动联科微系统技术有限公司 TSV (through silicon via) wafer-level packaged triaxial MEMS (micro-electro-mechanical systems) accelerometer

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US8941192B2 (en) * 2010-11-15 2015-01-27 DigitalOptics Corporation MEMS MEMS actuator device deployment
US9246017B2 (en) * 2012-02-07 2016-01-26 Mcube, Inc. MEMS-based dual and single proof-mass accelerometer methods and apparatus

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Publication number Priority date Publication date Assignee Title
CN101563616A (en) * 2006-12-19 2009-10-21 罗伯特·博世有限公司 Acceleration sensor with comb-shaped electrodes
CN102334010A (en) * 2009-02-27 2012-01-25 感应动力股份公司 Mems gyroscope for detecting rotational motions about an x-, y-, and/or z-axis
CN102597699A (en) * 2009-08-04 2012-07-18 飞兆半导体公司 Micromachined inertial sensor devices
CN103151220A (en) * 2013-02-28 2013-06-12 刘双杰 Long-contact time micro-electromechanical universal inertia switch and manufacturing method for same
CN104198763A (en) * 2014-09-17 2014-12-10 安徽北方芯动联科微系统技术有限公司 TSV (through silicon via) wafer-level packaged triaxial MEMS (micro-electro-mechanical systems) accelerometer

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