CN105866942B - Bimetal coil electromagnetic driving of the micromirror - Google Patents

Bimetal coil electromagnetic driving of the micromirror Download PDF

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CN105866942B
CN105866942B CN201610399981.0A CN201610399981A CN105866942B CN 105866942 B CN105866942 B CN 105866942B CN 201610399981 A CN201610399981 A CN 201610399981A CN 105866942 B CN105866942 B CN 105866942B
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coil
drive
micromirror
torsion
mirror
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CN105866942A (en
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沈文江
余晖俊
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常州创微电子机械科技有限公司
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Abstract

本发明公开了一种双金属线圈的电磁驱动微镜,镜面组件包括扭转镜板,扭转镜板两侧分别通过扭转轴与固定框架连接,所述扭转镜板上环绕有驱动线圈,驱动线圈两侧分别引出输入端和输出端导线,所述导线与驱动线圈为两种不同材质金属线,且导线与驱动线圈的厚度为可调节式的。 The present invention discloses an electromagnetic coil driving the micromirrors one double metal mirror assembly comprises a torsion mirror plate, both sides of the torsion mirror plate is connected via the torsion shaft and the fixed frame, the torsion mirror plate around the drive coil, the drive coil two side respectively input lead and an output lead, the wire and the driving coils of two metal wires of different materials, and the thickness of the wire of the drive coil is adjustable. 通过上述方式,本发明采用双金属材料作为线圈,在微镜的扭转轴上的金属导线使用剪切模量较小的金属材料,可以降低扭转轴的转动惯量。 By the above-described embodiment, the present invention is employed as a bimetal coil, using a smaller shear modulus metallic material twisted metal wire axis micromirrors can be reduced torsional moment of inertia of the shaft. 可以使微镜的转角更大。 You can make bigger micromirror corner. 而驱动线圈使用密度更小的金属材料作为线圈,可以降低质量,提高微镜的响应频率,并且铁磁材料可使驱动线圈的磁感应强度增大从而增加驱动力。 And the driving coil having a density less coil as a metal material can reduce the quality, improve the frequency response of the micromirror, and a ferromagnetic material can drive the magnetic induction coil is increased to increase the driving force.

Description

双金属线圈的电磁驱动微镜 Bimetal coil electromagnetic driving of the micromirror

技术领域 FIELD

[0001] 本发明涉及微光电机系统领域,特别是涉及一种双金属线圈的电磁驱动微镜。 [0001] The present invention relates to the field of LLL motor system, particularly to a dual-metal coil electromagnetic driving the micromirror.

背景技术 Background technique

[0002] —般来说,电磁驱动的微镜有两种最主要的驱动方案:可动磁体和可动线圈。 [0002] - In general, two electromagnetically driven micromirrors main driving scheme: the movable magnet and movable coil. 可动磁体使用一个外部线圈结合一块磁体或沉积的磁性薄膜。 A movable magnet may be used in conjunction with external coil magnets or a magnetic thin film deposition. 在可动线圈方案中,线圈被制作在扫描镜器件的结构上,外部磁铁提供一个静态磁场。 The movable coil, the coil structure is formed on the scanning mirror device, the external magnet providing a static magnetic field. 当可动线圈通入变化的电流时,线圈产生的洛仑兹力提供微镜振动的扭矩。 When the movable coil current changes through the Lorentz force generated by the coil to provide torque vibration micromirrors.

[0003] 采用可动线圈的方案目前来说线圈一般采用单种材料(金、镍、铜等等)。 [0003] The movable coil is a coil of the present embodiment generally use a single material (gold, nickel, copper, etc.). 单材料的线圈由于材料本身性质所限,不能使微镜的性能达到最优化。 Single coil material due to the nature of the material itself, can not optimize the performance of the micromirror.

发明内容 SUMMARY

[0004] 本发明主要解决的技术问题是提供一种采用双金属复合材料做线圈的电磁驱动微镜,能够使微镜获得更大的转角以及更高的响应频率。 [0004] The present invention solves the technical problem is to provide a bimetallic composite material made coil electromagnetically driven micromirrors, the micromirrors can be made greater angle and a higher response frequency.

[0005] 为解决上述技术问题,本发明采用的一个技术方案是:提供一种双金属线圈的电磁驱动微镜,包括固定框架,所述固定框架内围设有镜面组件,外围为磁场系统;镜面组件包括扭转镜板,扭转镜板两侧分别通过扭转轴与固定框架连接,所述扭转镜板上环绕有驱动线圈,驱动线圈两侧分别引出输入端和输出端导线,所述导线与驱动线圈为两种不同材质金属线,且导线与驱动线圈的厚度为可调节式的。 [0005] To solve the above problems, an aspect of the present invention is that: the bimetal coil to provide an electromagnetically driven micromirrors, comprising a fixed frame provided around the mirror assembly within said stationary frame, a peripheral magnetic field system; the mirror assembly includes a mirror plate twisted, the torsion mirror plate on both sides are connected to the fixed frame by a torsion axis, torsional mirror plate surrounding the drive coil, the drive coils are led out on both sides of the input and output end of the wire, and the wire drive Two different material of the metal coil is a wire, and the wires of the driving coil of adjustable thickness.

[0006] 在本发明一个较佳实施例中,所述导线采用剪切模量小的金属,并通过减小导线厚度,从而增大微镜的转角。 [0006] In a preferred embodiment of the present invention, the wire with a small shear modulus of the metal, and by reducing the thickness of the wire, thereby increasing the rotational angle of the micromirror.

[0007] 在本发明一个较佳实施例中,剪切模量小的金属包括金。 [0007] In a preferred embodiment of the present invention, a small shear modulus metals include gold.

[0008] 在本发明一个较佳实施例中,驱动线圈采用密度小的金属,并通过增加驱动线圈厚度,从而保证线圈的整体有足够小的电阻同时不影响扭转的转动惯量。 [0008] In a preferred embodiment of the present invention, the driving coil using low density of the metal, and by increasing the thickness of the driving coil, so as to ensure the entire coil is sufficiently low electric resistance without affecting the moment of inertia of the torsion.

[0009] 在本发明一个较佳实施例中,密度小的金属包括镍或铜。 [0009] In a preferred embodiment of the present invention, the lower density metals include nickel or copper.

[0010] 在本发明一个较佳实施例中,输入端和输出端导线分别从两侧的扭转轴引出,并与连接芯片上的金属电极连接。 [0010] In a preferred embodiment of the present invention, the input and output conductors are led out from both sides of the torsion shaft, and connected with a metal electrode on the chip are connected.

[0011] 在本发明一个较佳实施例中,所述扭转镜板上环绕的驱动线圈中至少包括一圈封闭式线圈。 [0011] In a preferred embodiment of the present invention, the torsional drive coil surrounding the mirror plates comprises at least a closed coil turn.

[0012] 在本发明一个较佳实施例中,所述驱动线圈相围形成的区域内设有反射镜面。 The region of [0012] In a preferred embodiment of the present invention, the driving coils are formed around mirror.

[0013] 在本发明一个较佳实施例中,所述驱动线圈和导线设于扭转镜板一侧,扭转镜板另一侧为反射镜面。 [0013] In a preferred embodiment of the present invention, the driving coil and the conductor plate provided on one side of the torsion mirror, the mirror plate on the other side of the torsion mirror.

[0014] 在本发明一个较佳实施例中,磁场系统包括多个永磁体组成。 [0014] In a preferred embodiment of the present invention, the magnetic field system of permanent magnets comprising a plurality of components.

[0015] 本发明的有益效果是:本发明采用双金属材料作为线圈,在微镜的扭转轴上的金属导线使用剪切模量较小的金属材料,可以降低扭转轴的转动惯量。 [0015] Advantageous effects of the present invention are: the present invention uses a metal material as a double twisting moment of inertia axis of the coil, using a smaller shear modulus metallic material twisted metal wire axis micromirrors can be reduced. 在相同的驱动力的作用下,扭转轴上的金属导线材料使用金相比于镍或铜等材料,可以使微镜的转角更大。 Under the action of the same driving force, the torsional axis of the metal wires using gold nickel or copper as compared to other materials, a larger angle allows the micromirror. 而驱动线圈使用密度更小的金属材料作为线圈,可以降低质量,提高微镜的响应频率,并且铁磁材料可使驱动线圈的磁感应强度增大从而增加驱动力。 And the driving coil having a density less coil as a metal material can reduce the quality, improve the frequency response of the micromirror, and a ferromagnetic material can drive the magnetic induction coil is increased to increase the driving force.

附图说明 BRIEF DESCRIPTION

[0016] 为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图,其中: [0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, as briefly described in the introduction to the accompanying drawings required for use in describing the embodiments. Apparently, the drawings in the following description are only some of the present invention. embodiments, those of ordinary skill in the art is concerned, without creative efforts, you can derive other drawings from such accompanying drawings, wherein:

[0017] 图1是本发明双金属线圈的电磁驱动微镜一较佳实施例中镜面组件的结构示意图; [0017] FIG. 1 is an electromagnetic driving bimetal coil structure of the present invention, a schematic view of the mirror assembly of a preferred embodiment of the micromirror;

[0018] 图2是图1所示的镜面组件的截面图; [0018] FIG. 2 is a sectional view of the mirror assembly shown in Figure 1;

[0019] 图3是本发明双金属线圈的电磁驱动微镜另一较佳实施例中镜面组件的截面图。 [0019] FIG. 3 is an electromagnetic drive coil of the present invention the bimetal sectional view of the mirror assembly of another preferred embodiment of the micromirror.

具体实施方式 Detailed ways

[0020] 下面将对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅是本发明的一部分实施例,而不是全部的实施例。 [0020] Hereinafter, the present invention will be apparent technical solutions in the embodiments, fully described, obviously, the described embodiments are merely part of embodiments of the present invention rather than all embodiments. 基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。 Based on the embodiments of the present invention, all other embodiments of ordinary skill in the art without any creative effort shall fall within the scope of the present invention.

[0021] 本发明实施例包括: [0021] Embodiments of the invention comprises:

[0022] —种双金属线圈的电磁驱动微镜,包括固定框架,所述固定框架内围设有镜面组件,外围是包括多个永磁体组成的磁场系统。 [0022] - electromagnetic drive species bimetal coil micromirror, comprising a fixed frame provided around the mirror assembly within said stationary frame, is surrounded by a magnetic system comprising a plurality of permanent magnets thereof.

[0023] 如图1所示,镜面组件包括扭转镜板1,扭转镜板1两侧分别通过扭转轴2与固定框架连接,所述扭转镜板1上环绕有驱动线圈3,且驱动线圈3中至少包括一圈封闭式线圈。 [0023] As shown, the mirror assembly 1 comprises a torsion mirror plate 1, on both sides of the torsion mirror plate 1 are respectively connected to the fixed frame by a torsion shaft 2, the torsion plate 1 around the mirror drive coil 3, and the driving coil 3 comprising at least one turn in a closed coil.

[0024] 当驱动线圈3通入电流之后,驱动线圈3与外部永磁体的相互作用下产生的电磁力会使扭转镜板绕扭转轴2扭转。 [0024] After passing a current through the driving coil 3, the driving coil 3 and the electromagnetic force generated in the interaction of the external permanent magnet causes the mirror plate about the torsion axis of the torsion torsion.

[0025] 驱动线圈3两侧分别引出输入端和输出端导线4,输入端和输出端导线4分别从两侧的扭转轴2引出,并与连接芯片上的金属电极连接。 [0025] The drive coils 3 are both input and output lead wire 4, the input and output leads 4 are led out from two sides of the torsion shaft, and connected with a metal electrode on the chip are connected.

[0026] 所述导线4与驱动线圈3为两种不同材质金属线,且导线4与驱动线圈3的厚度为可调节式的,调节范围在1 〇μπι-40μηι之间。 [0026] The lead wire 4 and the driving coil 3 is made of two different metal wires, and the wires 4 and the thickness of the driving coil 3 is adjustable, the adjustment range between 1 〇μπι-40μηι.

[0027] 其中,所述导线4采用剪切模量小的金属,优选金,在相同的驱动力的作用下,扭转轴2上的导线材料使用金相比于镍或铜等材料,可以使微镜的转角更大。 [0027] wherein, the conductor 4 with a small shear modulus of the metal, preferably gold, under the action of the same driving force, the torsion shaft material used on the gold wire 2 as compared to materials like nickel or copper, can be made bigger micromirror corner. 并通过减小导线厚度,从而增大微镜的转角。 And by reducing the thickness of the wire, thereby increasing the rotational angle of the micromirror.

[0028] 金的剪切模量为27Gpa,而镍的剪切模量为76Gpa,铜的剪切模量为48GPa,采用剪切模量小的金属,导线4的厚度可以适当降低到10μηι-20μηι,例如导线的厚度为12μηι、15μηι或18μηι等等。 [0028] The shear modulus of the gold is 27 GPa, and the shear modulus of 76 GPa nickel, copper shear modulus is 48 GPa, with a small shear modulus of the metal, the thickness of the wire 4 may be suitably reduced to 10μηι- 20μηι, for example, a thickness of the wire 12μηι, 15μηι 18μηι or the like.

[0029] 驱动线圈3采用密度小的金属,优选镍或铜,可以降低质量,提高微镜的响应频率, 并且镍为铁磁材料可使驱动线圈3的磁感应强度增大从而增加驱动力。 [0029] The driving coil 3 using low-density metal, preferably nickel or copper, can reduce the quality, improve the frequency response of the micromirror, and the nickel can drive the magnetic induction coil 3 is a ferromagnetic material is increased to increase the driving force. 并通过增加驱动线圈3厚度,从而保证线圈的整体有足够小的电阻同时不影响扭转的转动惯量。 And by increasing the thickness of the driving coil 3, thereby ensuring the entire coil is sufficiently low electric resistance without affecting the moment of inertia of the torsion.

[0030] 镍的密度为8.908g/cm3,铜的密度为8.96 g/cm3,金的密度为19.30 g/cm3,驱动线圈3为镍或铜时,厚度可以增加到20μηι到30μηι之间甚至30μηι以上,例如驱动线圈3的厚度为22μηι、25μηι、28μηι 或40μηι 等等。 [0030] Ni density 8.908g / cm3, the density of copper is 8.96 g / cm3, a density of gold 19.30 g / cm3, the driving coil 3 is copper or nickel, the thickness may be increased to between 20μηι 30μηι even 30μηι above, for example, a thickness of the driving coil 3 is 22μηι, 25μηι, 28μηι 40μηι or the like.

[0031] 而铜和镍的密度差不多,本发明优选的是镍,原因是因为镍是铁磁材料,可以增大线圈的磁感应强度从而增大驱动力使微镜转角变大。 [0031] The density of the copper and nickel are similar, the invention is preferably nickel, the reason is because the nickel is a ferromagnetic material, the magnetic induction coil can be increased, thereby increasing the driving force becomes large angle micromirror.

[0032] 这样双金属的结构通过自由调节金属导线4与驱动线圈3的材料以及厚度来实现微镜大转角扭转的目的。 [0032] Such structure of the double metal object is achieved by twisting the micromirror large rotation freely adjustable metal wire 4 and the driving coil 3 and the thickness of the material.

[0033] 本发明具体的工作原理:将如图1所示的微镜放在由外部永磁体组成的磁场系统中,将交流电从扭转轴2上的金属导线4一端输入,经过微镜扭转镜板1上环绕的驱动线圈3, 从扭转轴2的金属导线4另一端输出,驱动线圈3在磁场的作用下会产生洛伦兹力,使微镜发生扭转,实现扫描的功能。 [0033] The present invention specifically works: The micromirror shown in Figure 1 on an external magnetic field by a permanent magnet system consisting of the alternating current from the end of the metal wire 4 on the input shaft 2, torsion, torsion mirror through the micromirror the upper plate 1 around the driving coil 3, the torsion shaft 2, the metal wire 4 is outputted from the other end of the driving coil 3 generates a Lorentz force in the magnetic field, so that the micromirror twisting, to achieve a scan function.

[0034] 如图2所示,驱动线圈3相围形成的区域内设有反射镜面。 [0034] As shown in FIG. 2, the region of 3-phase drive coils is formed around the reflective mirror. 扭转轴2上沉积剪切模量小的金属材料且适当的减小厚度可以有效提高微镜的转角;而驱动线圈3电镀密度小的金属材料如镍并适当的增加厚度来减小电阻,微镜的响应频率将提高而且由于电阻的减小同样的电流驱动下线圈的发热会减轻。 Torsion shaft 2 is deposited small shear modulus metallic material and suitable to reduce the thickness can improve the angle of the micromirror; small driving coil 3 and the density of metallic material such as nickel plating and increasing the thickness appropriate to reduce the resistance, micro the frequency response of the mirror will increase and decrease in resistance due to the same current driving coil will reduce the heat.

[0035] 如图3所示,将驱动线圈3和导线4全沉积到扭转镜板1 一侧,扭转镜板1另一侧为反射镜面。 [0035] As shown in FIG. 3, the drive coils 3 and 4 leads to the deposition of the torsion whole mirror plate 1 side, the other side of the torsion mirror 1 is mirror plate.

[0036] 上述结论的推理过程为: [0036] The conclusion of the reasoning process is:

Figure CN105866942BD00051

[0038] 上述理论公式中推导出微镜的转角以及谐振频率,可以看到微镜的扭转轴剪切模量G越小,在相同的力的作用下,微镜的转角g越大(转角越大可以实现更大范围的扫描);微镜的密度P越小,微镜的响应频率越高(响应频率越高,响应时间越短,抗干扰能力越强)。 [0038] In the above theoretical formula deduced micromirror corner and the resonant frequency, the smaller the micromirror can be seen torsion axis shear modulus G, under the effect of the same force, the greater the micromirror g angle (angle the larger a larger scan range may be achieved); the higher the frequency response of the micromirror density P is smaller, the micromirror (the higher the frequency response, the shorter the response time, the anti-interference ability).

[0039] 而目前一般采用的都是单金属线圈材料。 [0039] At present, it is generally used a single metal coil material. 例如:金的剪切模量小但是密度大而镍的剪切模量大但密度小。 For example: Small gold shear modulus and density of nickel but shear modulus but lower density. 这就使单一的使用金材料可以使微镜转角较大,但会降低微镜的响应频率;而使用镍材料可以提高微镜的响应频率,但会降低微镜的转角。 This allows the use of a single material may be gold micromirror angle larger, but will reduce the response frequency of the micromirror; Nickel materials can be used to improve the frequency response of the micromirror, but reduces the angle of the micromirror.

[0040] 为了解决目前的问题,提出使用双金属线圈,可以同时提高微镜的转角并提高微镜的响应频率。 [0040] In order to solve the present problem, the use of bi-metal coil can be increased while the angle of micromirrors and increase the response frequency of a micromirror.

[0041] 公式(2)中的G为材料的剪切模量,a为扭转轴宽度,b为扭转轴厚度,Lf为扭转轴长度。 [0041] Formula G (2) of the shear modulus of the material, a is the width of the torsion axis, b-axis of the torsion thickness, Lf is the length of the torsion shaft. 双金属的优点在于可以灵活的控制金属导线与驱动线圈的材料以及厚度,如金属导线采用剪切模量小的金属,而且金属导线的厚度可以薄一点来减小转动惯量从而增大微镜的转角;驱动线圈除了可以采用密度较小的金属以外可以电镀厚一点,这样可以保证线圈的整体有足够小的电阻同时不影响扭转的转动惯量。 The advantage is that the bimetal can flexibly control material and the thickness of the metal wire and the driving coil, such as a metal wire using a small shear modulus of the metal, and the thickness of the thinner metal wires can be reduced so as to increase the moment of inertia of the micromirror angle; driving coil in addition to the plating thickness smaller than the density of the metal that may be employed, which can ensure that the entire coil is sufficiently low electric resistance without affecting the moment of inertia of the torsion. 这样双金属的设计通过自由调节金属导线与驱动线圈的材料以及厚度来实现微镜大转角扭转的目的。 Bimetal designed microscope object is achieved by a large angle twist freely adjust the metal wire material and the thickness of the driving coil.

[0042] 因此,根据理论公式,在微镜结构确定的情况下即扭转轴长、宽等参数确定,以及外部磁场力固定的情况下,转角§:主要跟扭转轴的剪切模量以及厚度有关,即剪切模量越小,厚度越小,转角S越大。 [0042] Thus, according to the theoretical formula, in the case where the micro mirror is determined, i.e. the torsion shaft length, width and other parameters is determined, and the external magnetic field strength is fixed, the angle §: main shaft with torsional shear modulus and thickness For, i.e., shear modulus, the smaller the thickness, the larger the angle S. 因此选择剪切模量较小的金属材料作为扭转轴上的线圈且厚度适当的薄一点,从而使微镜实现大转角。 Thus the shear modulus smaller selected metal material and a coil torsion shaft a thin thickness suitable point, to achieve a large angle so that the micromirror.

[0043] 而微镜的响应频率在结构确定的情况下,扭转轴材料的剪切模量也确定的情况下,驱动线圈材料的密度越小,微镜的响应频率越尚。 [0043] and in the case of the micromirror in response to the frequency of a case where the structure is determined, the torsional shear modulus of the shaft material is also determined, the smaller the density of the driving coil material, still more micromirror frequency response. 另外适当的增加驱动线圈的厚度可以减小线圈整体的电阻,从而降低线圈的发热量,降低功耗。 Further increasing the thickness of an appropriate drive coil may reduce the overall resistance of the coil, and thus reduce the heat of the coil and reduce power consumption.

[0044] 综上所述,得出结论:使用双金属材料作为线圈的方法将提高微镜的性能。 [0044] In summary, it concluded: As a method of using a bimetal coil will improve the performance of the micromirror.

[0045] 本发明的有益效果是:本发明采用双金属材料作为线圈,在微镜的扭转轴上的金属导线使用剪切模量较小的金属材料,可以降低扭转轴的转动惯量。 [0045] Advantageous effects of the present invention are: the present invention uses a metal material as a double twisting moment of inertia axis of the coil, using a smaller shear modulus metallic material twisted metal wire axis micromirrors can be reduced. 在相同的驱动力的作用下,扭转轴上的金属导线材料使用金相比于镍或铜等材料,可以使微镜的转角更大。 Under the action of the same driving force, the torsional axis of the metal wires using gold nickel or copper as compared to other materials, a larger angle allows the micromirror. 而驱动线圈使用密度更小的金属材料作为线圈,可以降低质量,提高微镜的响应频率,并且铁磁材料可使驱动线圈的磁感应强度增大从而增加驱动力。 And the driving coil having a density less coil as a metal material can reduce the quality, improve the frequency response of the micromirror, and a ferromagnetic material can drive the magnetic induction coil is increased to increase the driving force.

[0046] 以上所述仅为本发明的实施例,并非因此限制本发明的专利范围,凡是利用本发明说明书内容所作的等效结构或等效流程变换,或直接或间接运用在其它相关的技术领域,均同理包括在本发明的专利保护范围内。 [0046] Other related art described above are only embodiments of the present invention, not intended to limit the scope of the present invention, the present invention is usually made by using a description equivalent structures or equivalent process, or applied directly or indirectly art shall fall within the scope of protection of the present invention.

Claims (6)

1. 一种双金属线圈的电磁驱动微镜,包括固定框架,所述固定框架内围设有镜面组件, 外围为磁场系统;其特征在于, 镜面组件包括扭转镜板,扭转镜板两侧分别通过扭转轴与固定框架连接,所述扭转镜板上环绕有驱动线圈,驱动线圈两侧分别引出输入端和输出端导线,所述导线采用金材质的金属线,驱动线圈采用镍或铜材质的金属线,且导线与驱动线圈的厚度为可调节式的。 An electromagnetic drive micromirror bimetal coil, comprising a fixed frame provided around the mirror assembly within said stationary frame, a peripheral magnetic field system; wherein the mirror assembly comprises a mirror plate twisted, torsion sides were mirror plate connected to the fixed frame by a torsion axis, torsional mirror plate surrounding the drive coil, the drive coils are led out on both sides of the input and output end of the wire, the wire material is metal wire of gold, nickel or copper drive coil material metal wire, and a thickness of the wire of the drive coil is adjustable.
2. 根据权利要求1所述的双金属线圈的电磁驱动微镜,其特征在于,输入端和输出端导线分别从两侧的扭转轴引出,并与连接芯片上的金属电极连接。 2. The electromagnetic drive of claim 1 micromirror bimetal coil claim, wherein the input and output conductors are led out from both sides of the torsion axis, and connected to the metal electrodes on the chips are connected.
3. 根据权利要求1所述的双金属线圈的电磁驱动微镜,其特征在于,所述扭转镜板上环绕的驱动线圈中至少包括一圈封闭式线圈。 3. The electromagnetically driven micromirrors bimetal coil according to claim 1, characterized in that the torsion drive coil surrounding the mirror plates comprises at least a closed coil turn.
4. 根据权利要求3所述的双金属线圈的电磁驱动微镜,其特征在于,所述驱动线圈相围形成的区域内设有反射镜面。 4. The electromagnetic driven micromirrors bimetal coil according to claim 3, characterized in that the region of the drive coils are formed around mirror.
5. 根据权利要求1所述的双金属线圈的电磁驱动微镜,其特征在于,所述驱动线圈和导线设于扭转镜板一侧,扭转镜板另一侧为反射镜面。 The drive electromagnetic micromirror according to the bi-metal coil 1 claim, wherein said drive coils and the conductor plate provided on one side of the torsion mirror, the mirror plate on the other side of the torsion mirror.
6. 根据权利要求1所述的双金属线圈的电磁驱动微镜,其特征在于,磁场系统包括多个永磁体组成。 The electromagnetic coil 1 as claimed in claim bimetal driving the micromirror, wherein the system comprises a plurality of permanent magnets the magnetic field components.
CN201610399981.0A 2016-06-08 2016-06-08 Bimetal coil electromagnetic driving of the micromirror CN105866942B (en)

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