CN105824179A - Projection system - Google Patents

Projection system Download PDF

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Publication number
CN105824179A
CN105824179A CN201610323828.XA CN201610323828A CN105824179A CN 105824179 A CN105824179 A CN 105824179A CN 201610323828 A CN201610323828 A CN 201610323828A CN 105824179 A CN105824179 A CN 105824179A
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CN
China
Prior art keywords
laser diode
described
light
light source
blue
Prior art date
Application number
CN201610323828.XA
Other languages
Chinese (zh)
Other versions
CN105824179B (en
Inventor
詹姆斯·W·拉林
保罗·鲁迪
Original Assignee
天空激光二极管有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US18210509P priority Critical
Priority to US61/182,105 priority
Priority to US12/789,303 priority patent/US8427590B2/en
Priority to US12/789,303 priority
Application filed by 天空激光二极管有限公司 filed Critical 天空激光二极管有限公司
Priority to CN201080023738.XA priority patent/CN102449550B/en
Publication of CN105824179A publication Critical patent/CN105824179A/en
Application granted granted Critical
Publication of CN105824179B publication Critical patent/CN105824179B/en

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/20Lamp housings
    • G03B21/2006Lamp housings characterised by the light source
    • G03B21/2033LED or laser light sources
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00Details of colour television systems
    • H04N9/12Picture reproducers
    • H04N9/31Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3129Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] scanning a light beam on the display screen
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00Details of colour television systems
    • H04N9/12Picture reproducers
    • H04N9/31Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141Constructional details thereof
    • H04N9/315Modulator illumination systems
    • H04N9/3161Modulator illumination systems using laser light sources
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031Edge-emitting structures
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4087Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength

Abstract

The present invention relates to a projection system. The projection system includes an interface for receiving an image or video signal; a light source including a green laser diode which is arranged on an installation substrate and a surface, wherein the installation substrate comprises a gallium nitride material, the surface has {20-21} semi-polar orientation, and on the surface, the green laser diode has a laser stripe region being characterized by a cavity orientation in a projection of a c-direction; and a power source electrically coupled to the light source.

Description

A kind of optical projection system

The application be international application no be PCT/US2010/036739, international filing date is 2010 May 28, entrance National Phase in China day is on November 29th, 2011, Application No. 201080023738.X, the divisional application of the application of invention entitled " a kind of optical projection system ", it is complete Portion's content is hereby expressly incorporated by reference.

Cross-Reference to Related Applications

This application claims in the U.S. Provisional Patent Application that on May 29th, 2009 submits to The priority of No. 61/182,105.The application also requires in the U.S. Shen that on May 27th, 2010 submits to Please the priority of No. 12/789,303.

The statement of the rights and interests of invention for carrying out under the research and development of government-funded

Can not apply

With reference to " sequence list " (table submitted to by CD or computer program listing appendix)

Can not apply

Technical field

The present invention relates to Display Technique.More specifically, each embodiment of the present invention provides wherein One or more laser diodes and/or LED show by the projection acting on the light source illuminating image System.In one group of embodiment, the invention provides the material manufacture utilizing use containing gallium nitride Blueness and/or the projecting apparatus system of green laser.In another group embodiment, the present invention provides There is the digital light illuminated by blue and/or green laser device and process the optical projection system of engine.At tool In the embodiment of body, the invention provides 3D display system.There is other embodiments as well.

Background technology

Along with LCD show for TV become more and more cheap and digital advertisement in gas station, business Field and cafe become to become more and more popular, and big display becomes to become more and more popular and estimate in future Within several years, will become more attractive.Come in the past few years, it is noted that large-screen display is (such as, 40 inches of TV) there is substantive growth (such as, more than 40%), and consumer is the most increasingly Getting used on knee is also bigger display with PC.Although be obtained in that more by hand-held device Content viewable (such as TV, the Internet and video), but due to keyboard, photographing unit and other spies Levy the competition to space and electric power so that the hand-held display in consumption electronic product the least (< 3”)。

Therefore, it is desirable to for the improvement system showing image and/or video.

Summary of the invention

The present invention relates to Display Technique.More specifically, each embodiment of the present invention provides wherein One or more laser diodes projection type display system acting on the light source illuminating image.One Group embodiment in, the invention provides utilize use containing gallium nitride material manufacture blueness and/ Or the projecting apparatus system of green laser.Another group embodiment in, the invention provides have by The digital light that blue and/or green laser device illuminates processes the optical projection system of engine.There is also other Embodiment.

According to embodiment, the invention provides optical projection system.This optical projection system includes: interface, uses In receiving image or video signal;Light source, is included in 490nm~540nm work in wavelength ranges Green laser diode, described green laser diode is arranged on mounting substrate and a surface, institute State mounting substrate and include gallium nitride material, and described surface has, and { 20-21} semi-polarity is orientated, described Green laser diode has on said surface by swashing that the chamber orientation in the projection in c direction characterizes Rhizoma Dioscoreae (peeled) region;And power supply, it is electrically connected to described light source.

According to embodiment, the invention provides optical projection system.This optical projection system includes: interface, uses In receiving image or video signal;Light source, described light source is included in 430nm~480nm wave-length coverage The blue laser diode of work, described blue laser diode is arranged on mounting substrate and a surface On, described mounting substrate includes gallium nitride material, and described surface have 20-21} semi-polarity is orientated, Described blue laser diode has on said surface by the chamber orientation sign in the projection in c direction Laser strip region;And power supply, it is electrically connected to described light source.

According to embodiment, the invention provides optical projection system.This optical projection system includes regarding for reception The interface of frequency.This system also includes the image processor for processing video.This system includes comprising many The light source of individual laser diode.Multiple laser diodes include blue laser diode.Blue laser two Pole pipe is manufactured on the gallium nitride material of nonpolar orientation.This system includes the electricity being electrically connected to light source Source.

According to another embodiment, the invention provides optical projection system.This system includes regarding for reception The interface of frequency.This system also includes the image processor for processing video.This system includes comprising many The light source of individual laser diode.Multiple laser diodes include blue laser diode.Blue laser two Pole pipe is manufactured on the gallium nitride material of semi-polarity orientation.This system also includes the electricity being electrically connected to light source Source.

According to the embodiment of the present invention, the invention provides projection arrangement.This projection arrangement includes tool There is the housing of opening.This device also includes the input interface for receiving one or more picture frame.Should Device includes video processing module.It addition, this device includes lasing light emitter.Lasing light emitter includes blue laser Diode, green laser diode and red laser diode.Blue laser diode is manufactured in non-pole Property or semi-polarity orientation the substrate containing Ga on, and have about 430nm~480nm peak value work Wavelength.Green laser diode be manufactured in nonpolar or semipolar orientation containing in Ga substrate, and There is the peak value operation wavelength of about 490nm~540nm.Red laser diode is by AlInGaP system Make.Lasing light emitter is configured to combine from blue laser diode, green laser diode and red The output of color laser diode produces laser beam.This device also includes Laser Drive module, and it is even It is connected to lasing light emitter.Laser Drive module produces three based on the pixel from one or more picture frames Drive electric current.Three each of which driven in electric current are used for driving laser diode.This device also wraps Include MEMS (MEMS) scanning mirror (or " flying mirror (flying mirror) "), be configured to By opening by laser beam projects to ad-hoc location, thus produce single picture.By with two-dimensional square Formula raster scanning (raster) pixel, forms complete image.It is attached that this device includes being arranged at lasing light emitter Optics near field, this optics for guiding MEMS scanning mirror by laser beam.Should Device includes being electrically connected to lasing light emitter and the power supply of MEMS scanning mirror.

According to embodiment, the invention provides projection arrangement.This projection arrangement includes having opening Housing.This device also includes the input interface for receiving one or more picture frame.This device includes Video processing module.It addition, this device includes lasing light emitter.Lasing light emitter include blue laser diode, Green laser diode and red laser diode.Blue laser diode is manufactured in nonpolar or half-shadow In the substrate containing Ga of sexual orientation, and there is the peak value operation wavelength of about 430nm~480nm. Green laser diode be manufactured in nonpolar or semipolar orientation containing in Ga substrate, and have about The peak value operation wavelength of 490nm~540nm.In this embodiment, blue laser diode and Green laser diode will share same substrate.Red laser diode can be manufactured by AlInGaP.Swash Light source is configured to combination from blue laser diode, green laser diode and red laser The output of diode produces laser beam.This device also includes Laser Drive module, and it is connected to swash Light source.Laser Drive module produces three based on the pixel from one or more picture frames and drives electricity Stream.Three each driven in electric current are used for driving laser diode.This device also includes MEMS Scanning mirror (or " flying mirror "), is configured on laser beam projects to ad-hoc location by opening, from And produce single picture.By raster scanning pixel in two dimensions, form complete image.This dress Putting the optics including being arranged in lasing light emitter near zone, this optics is for leading laser beam To MEMS scanning mirror.This device includes being electrically connected to lasing light emitter and the power supply of MEMS scanning mirror.

According to embodiment, the invention provides projection arrangement.This projection arrangement includes having opening Housing.This device also includes the input interface for receiving one or more picture frame.This device includes Video processing module.It addition, this device includes lasing light emitter.Lasing light emitter include blue laser diode, Green laser diode and red laser diode.Blue laser diode is manufactured in nonpolar or half-shadow In the substrate containing Ga of sexual orientation, and there is the peak value operation wavelength of about 430nm~480nm. Green laser diode be manufactured in nonpolar or semipolar orientation containing in Ga substrate, and have about The peak value operation wavelength of 490nm~540nm.Red laser diode can be manufactured by AlInGaP. In this embodiment, the laser instrument of two or more different colours will be packaged in same packaging part together In.In this embodiment jointly encapsulated, from blue laser diode, green laser diode Output with red laser diode will be combined into single light beam.This device also includes Laser Drive Module, it is connected to lasing light emitter.Laser Drive module is based on the picture from one or more picture frames Element produces three and drives electric current.Three each of which driven in electric current are used for driving laser diode. This device also includes MEMS (MEMS) scanning mirror (or " flying mirror "), is configured to pass through Opening is by laser beam projects to ad-hoc location, thus produces single picture.By light in two dimensions Grid scanning element, forms complete image.This device includes the light being arranged in lasing light emitter near zone Department of the Chinese Academy of Sciences's part, this optics for guiding MEMS scanning mirror by laser beam.This device includes being electrically connected It is connected to lasing light emitter and the power supply of MEMS scanning mirror.

According to another embodiment, the invention provides projection arrangement.This device includes having opening Housing.This device also includes the input interface for receiving one or more picture frame.This device includes Lasing light emitter.Lasing light emitter includes blue laser diode, green laser diode and red laser diode. Blue laser diode is manufactured in the substrate containing Ga of nonpolar or semipolar orientation, and has The peak value operation wavelength of about 430nm~480nm.Green laser diode is manufactured in nonpolar or half Polarity orientation containing in Ga substrate, and there is the peak value operation wavelength of about 490nm~540nm. Red laser diode can be manufactured by AlInGaP.Lasing light emitter is configured to be swashed from blueness by combination The output of optical diode, green laser diode and red laser diode produces laser beam.This dress Putting and include that digital light processes (DLP) chip, it includes digital mirror device.Digital mirror device includes many Individual reflecting mirror, each reflecting mirror is corresponding to one or more pixels of one or more picture frames.This dress Put and include being electrically connected to lasing light emitter and the power supply of numeral optical processing chip.Can deposit preferably permitted Shape changeable, such as blue laser diode and green laser diode shares same substrate or two or more The laser instrument of different colours is contained in the embodiment in same packaging part.In this enforcement jointly encapsulated In mode, from blue laser diode, green laser diode and the output of red laser diode Single light beam will be combined into.

According to another embodiment, the invention provides projection arrangement.This device includes having opening Housing.This device includes the input interface for receiving one or more picture frame.This device includes swashing Light source.Lasing light emitter includes blue laser diode, green laser diode and red laser diode. Blue laser diode is manufactured in the substrate containing Ga of nonpolar or semipolar orientation, and has The peak value operation wavelength of about 430nm~480nm.Green laser diode is manufactured in nonpolar or half Polarity orientation containing in Ga substrate, and there is the peak value operation wavelength of about 490nm~540nm. Red laser diode can be manufactured by AlInGaP.This device includes that digital light processes (DLP) chip, It includes three digital mirror device.Each in digital mirror device includes multiple reflecting mirror, each instead Penetrate the mirror one or more pixels corresponding to one or more picture frames.Column of colour is projected respectively In digital mirror device.This device includes being electrically connected to lasing light emitter and the power supply of numeral optical processing chip.Can Depositing many deformation preferably, such as blue laser diode and green laser diode share The laser instrument of same substrate or two or more different colours is contained in the embodiment in same packaging part. In embodiment of this common encapsulation, from blue laser diode, green laser diode and red The output of color laser diode will be combined into single light beam.

As example, colour wheel can include the fluorophor material of the color for changing the light sent from light source Material.In a particular embodiment, colour wheel includes multiple region, and each region corresponds to specific face Color (such as, red, green, blue etc.).In the exemplary embodiment, projector includes Containing blue-light source and the light source of red light source.Colour wheel includes for the slit of blue light with for by blueness Light is converted into the region containing fluorophor of green light.In operation, blue-light source is (such as, blue Laser diode or blue led) provide blue light by slit, and swash from the region containing fluorophor Glow green;Red light source is provided independently red light.Green light transmissive from fluorophor crosses color Wheel, or reflected back by colour wheel.In either case, green light is collected by optics and is led To micro-display.It is also directed at micro-display by the blue light of slit.Blue-light source can be It is manufactured in the laser diode on nonpolar or semipolar orientation GaN or LED.Alternatively, may be used There is the blue laser diode of fluorophor to send green light to use green laser diode to substitute. Should be understood that color light source is also feasible with other combinations of its colour wheel.

As another example, colour wheel can include multiple fluorescent material.Such as, colour wheel can include Green-emitting phosphor and red-emitting phosphors with blue-light source combination.In a particular embodiment, colour wheel Including multiple regions, each region is corresponding to specific color (such as, red, green, blue etc.). In the exemplary embodiment, projector includes the light source comprising blue-light source.Colour wheel includes for indigo plant The slit of color laser and two regions containing fluorophor, the region that the two contains fluorophor is used respectively In converting blue light into green light and converting blue light into red light.In operation, blue-light source (such as, blue laser diode or blue led) provides blue light and from containing fluorescence by slit The region of body excites green light and red light.Can be transmitted through from the green light of fluorophor and red light Colour wheel, or reflected back by colour wheel.In either case, green light and red light are received by optics Collect and be re-oriented micro-display.Blue-light source can be to be manufactured in nonpolar or semipolar orientation Laser diode on GaN or LED.Should be understood that other that can there is color light source and its colour wheel Combination.

As another example, colour wheel can include blue emitting phophor material, green phosphor material and red Color fluorescent material.Such as, colour wheel can include the blue-fluorescence with ultraviolet (UV) combination of light sources Body, green-emitting phosphor and red-emitting phosphors.In a particular embodiment, colour wheel includes multiple region, Each region is corresponding to specific color (such as, red, green, blue etc.).In exemplary reality Executing in mode, projector includes the light source containing UV light source.Colour wheel includes three containing fluorophor Region, the region that these three contains fluorophor is respectively used to UV light is converted into blue light, by UV Light is converted into green light and UV light is converted into red light.In operation, colour wheel is from containing fluorescence The region of body sequentially sends blue light, green light and red light.Blue light, green from fluorophor Coloured light and red light transmitted through colour wheel, or can be reflected back by colour wheel.In either case, blue Light, green light and red light are collected by optics and are re-oriented micro-display.UV light source can Be manufactured in nonpolar or semipolar orientation GaN on laser diode or LED.Should be understood that Can be other combinations of color light source and its colour wheel.

According to another embodiment, the invention provides projection arrangement.This device includes having opening Housing.This device includes the input interface for receiving one or more picture frame.This device includes swashing Light source.Lasing light emitter includes blue laser diode, green laser diode and red laser diode. Blue laser diode is manufactured in the substrate containing Ga of nonpolar or semipolar orientation, and has The peak value operation wavelength of about 430nm~480nm.Green laser diode is manufactured in nonpolar or half Polarity orientation containing in Ga substrate, and there is the peak value operation wavelength of about 490nm~540nm. Red laser diode can be manufactured by AlInGaP.Green laser diode has about 490nm~540 The wavelength of nm.Lasing light emitter is configured to by combination from blue laser diode, green laser two The output of pole pipe and red laser diode produces laser beam.This device includes that digital light processes (DLP) chip, it includes three digital mirror device.Each digital mirror device includes multiple reflecting mirror, Each reflecting mirror is corresponding to one or more pixels of one or more picture frames.Column of colour is distinguished Project in digital mirror device.This device includes being electrically connected to lasing light emitter and the electricity of numeral optical processing chip Source.Many deformation preferably, such as blue laser diode and green laser two pole can be deposited Pipe shares the laser instrument of same substrate or two or more different colours and is contained in the reality in same packaging part Execute mode.In this embodiment jointly encapsulated, from blue laser diode, green laser two The output of pole pipe and red laser diode will be combined into single light beam.

As example, colour wheel can include the fluorophor material of the color for changing the light sent from light source Material.In a particular embodiment, colour wheel includes multiple region, and each region corresponds to specific face Color (such as, red, green, blue etc.).In the exemplary embodiment, projector includes Containing blue-light source and the light source of red light source.Colour wheel includes for the slit of blue light with for by blueness Light is converted into the region containing fluorophor of green light.In operation, blue-light source is (such as, blue sharp Optical diode or blue led) provide blue light by slit, and excite green from the region containing fluorophor Coloured light;Red light source is provided independently red light.From the green light of fluorophor transmitted through colour wheel, or Reflected back by colour wheel.In either case, green light is collected by optics and is re-oriented micro- Display.It is also directed at micro-display by the blue light of slit.Blue-light source can be manufactured in non- Laser diode in polarity or semi-polarity orientation GaN or LED.It is alternatively possible to use it is green Color laser diode substitutes has the blue laser diode of fluorophor to send green light.Should be understood that Color light source is also possible with other combinations of its colour wheel.

As another example, colour wheel can include multiple fluorescent material.Such as, colour wheel can include Green-emitting phosphor and red-emitting phosphors with blue-light source combination.In a particular embodiment, colour wheel Including multiple regions, each region is corresponding to specific color (such as, red, green, blue etc.). In the exemplary embodiment, projector includes the light source containing blue-light source.Colour wheel includes for indigo plant The slit of color laser and two regions containing fluorophor, the region that the two contains fluorophor is used respectively In converting blue light into green light and converting blue light into red light.In operation, blue light Source (such as, blue laser diode or blue led) provides blue light and from containing glimmering by slit The region of body of light excites green light and red light.Green light and red light from fluorophor can be with transmissions Cross colour wheel, or reflected back by colour wheel.In either case, green light and red light are by optics Collect and be re-oriented micro-display.Blue-light source can be to be manufactured in nonpolar or semipolar orientation GaN on laser diode or LED.Should be understood that can be color light source and its of its colour wheel He combines.

As another example, colour wheel can include blue emitting phophor material, green phosphor material and red Color fluorescent material.Such as, colour wheel can include the blue-fluorescence with ultraviolet (UV) combination of light sources Body, green-emitting phosphor and red-emitting phosphors.In a particular embodiment, colour wheel includes multiple region, Each region is corresponding to specific color (such as, red, green, blue etc.).In exemplary reality Executing in mode, projector includes the light source containing UV light source.Colour wheel includes three containing fluorophor Region, the region that these three contains fluorophor is respectively used to UV light is converted into blue light, by UV Light is converted into green light and UV light is converted into red light.In operation, colour wheel is from containing fluorescence The region of body sequentially sends blue light, green light and red light.Blue light, green from fluorophor Coloured light and red light transmitted through colour wheel, or can be reflected back by colour wheel.In either case, blue Light, green light and red light are collected by optics and are re-oriented micro-display.UV light source can Be manufactured in nonpolar or semipolar orientation GaN on laser diode or LED.Should be understood that Can be other combinations of color light source and its colour wheel.

Use and present invention obtains the various advantages being better than prior art.Specifically, present invention achieves Use the optical projection system of the high performance-price ratio of high efficiency light source.In a particular embodiment, light source can be with Relatively easy and high performance-price ratio mode manufactures.According to embodiment, these apparatus and method can use this Traditional material and/or method that field those of ordinary skill is familiar with manufacture.In one or more enforcements In mode, Laser Devices can have multiple wavelength.Certainly, there is other deformation, revise and replace Change.According to embodiment, these advantages one or more can be obtained.The advantage of these and other will It is described in this specification, gives description in further detail below.

The present invention achieves these advantages and other advantages under the background of known treatment technology, so And, to the nature and advantages of the present invention be further appreciated by can be by with reference to specification and drawings after a while Part realizes.

Accompanying drawing explanation

Fig. 1 shows the diagram of conventional projection system.

Fig. 2 A shows the simplification figure of the projection arrangement according to embodiment of the present invention.

Fig. 2 B shows and is manufactured in { the suprabasil laser of 20-21} according to embodiment of the present invention The detailed cross sectional view of device 200.

Fig. 2 C shows the simplification figure of the projector with LED light source.

Fig. 3 A is the alternative diagram of the projection arrangement according to embodiment of the present invention.

Fig. 3 B shows the letter of the laser diode being packaged together according to embodiment of the present invention Change figure.

Fig. 3 C shows having of the emission wavelength with fractional distribution according to embodiment of the present invention The diagram in the cross section of source region.

Fig. 3 D shows the simplification figure in the cross section of the multiple active areas according to embodiment of the present invention.

Fig. 3 E shows the simplification figure of the projector with LED light source.

Fig. 4 A shows the simplification figure of the projection arrangement according to embodiment of the present invention.

Fig. 4 B shows laser two pole being integrated into single package according to embodiment of the present invention The simplification figure of pipe.

Fig. 5 A shows the simplification figure of the DLP projection arrangement according to embodiment of the present invention.

Fig. 5 B shows the simplification figure of the DLP projector according to embodiment of the present invention.

Fig. 6 shows the simplification figure of the 3 chip DLP projection system according to embodiment of the present invention.

Fig. 7 shows the simplification figure that the 3D of polarization image relating to being filtered by polarising glass shows.

Fig. 8 shows the simplification figure of the 3D optical projection system according to embodiment of the present invention.

Fig. 9 shows the simplification figure of the LCOS optical projection system 900 according to embodiment of the present invention.

Detailed description of the invention

The present invention relates to Display Technique.More specifically, each embodiment of the present invention provides wherein One or more laser diodes and/or LED show by the projection acting on the light source illuminating image System.In one group of embodiment, the invention provides the material manufacture utilizing use containing gallium nitride Blueness and/or the projecting apparatus system of green laser.In another group embodiment, the present invention provides There is the digital light illuminated by blue and/or green laser device and process the optical projection system of engine.Also deposit Embodiment at other.

As it has been described above, tradition display type is the most inadequate.Micro projector is by setting from hand-held The image (reaching more than 60 inches) that standby projection is big so that film, net surfing and other images Can be shared with the size as the display sizes be accustomed to user, solved this problem.Cause This, embedding in pocket-sized projector, separate sets micro projector and mobile device (e.g., phone) The micro projector entered is used more and more.

Currently, the InGaN base laser of commercialization and LED are grown on polarity c of GaN lattice In face.It is known that the InGaN luminescent layer being deposited in this tradition GaN orientation by internal with The impact of the electric field that polarity is relevant.In these structures, during spontaneous polarization results from GaN bonding Electric charge is asymmetric, and piezoelectric polarization is the product of stress.In quantum well structure, these polarization fields make Electron wave function and hole wave functions are spatially separating, thus reduce their radioactivity combined efficiency. Stress dependence due to piezoelectric polarization so that along with blue and that (especially) is green laser instrument and The increase of indium content in luminescent layer required for LED, these fields inside become more and more stronger.

In addition to radioactivity recombination coefficient except reducing hinders LED luminance, internal electric field promotes sending out Quantum confined Stark effect (QCSE) is produced in light quantum well layer.This effect causes peak luminescence ripple Long along with in quantum well layer the increase of carrier density and there is blue shift.Owing to carrier density is along with electricity Stream increase and increase, so blue led or green LED will occur peak wavelength along with electric current Mobile.This wavelength is to driving the dependency of electric current for LED through the display of current-modulation scheme Should be used to say that undesirable, this is because color will change along with electric current.In laser diode, Carrier density increases along with electric current and increases, and exceedes laser threshold during loss until the gain in chamber Till.In order to make optical maser wavelength be in blue region and green area, the peak value ripple below this threshold value Long blue shift promotes to grow luminescent layer along with the increase of indium content, to compensate blue shift.Well-known It is that this increase of indium content will cause the quality of materials of poor quality, this is because stress increases and indium divides Solidifying.In order to realize efficient blue laser and green laser and LED, it is therefore desirable for be to subtract The little electric field relevant with polarization or the relevant electric field that is completely eliminated and polarizes.

Long-term understanding is, device architecture unconventional GaN be orientated (such as, nonpolar a face or M face) upper or growth on the semi-polarity face between non-polar plane and c surface, can eliminate or Reduce polarization field.In these Novel crystal dignity, epitaxial structure and device architecture all may utilize distinctive Design freedom.Additionally, be grown on nonpolar and semi-polarity suprabasil InGaN film anisotropy Stress causes effective hole mass to reduce, and the reduction of effective hole mass can make laser diode In differential gain increase and transparent electrical current density reduce.Such as it is manufactured in nonpolar and semi-polarity face On blueness and the device of green laser instrument and LED be that (higher radioactivity is multiple for the performance improved Close efficiency, reduction with drive the peak wavelength blue shift of electric current, the device design flexibility of raising and Good epitaxial growth quality) provide stem-winding possibility.

Canonical projection instrument based on solid state illuminator includes:

Light source (laser instrument or LED),

Optics,

Such as liquid crystal on silicon (LCOS) or the micro-display of DMD (DMD),

Drive plate, and

Power supply (that is, battery or power supply adaptor).

According to application, optical projection system may utilize polarized light or non-polarized light.Such as, based on single scanning The optical projection system (such as, micro-projector) of instrument and system based on DLP generally use unpolarized Light source.Applying for some, such as optical projection system based on LCOS, polarized light source is desired. Generally, the blue led used in conventional projector and green LED (can be red LED) It is unpolarized (or there is low polarization ratio), thus causes because depending on the optics of polarization Too much light loss, and show the spatial mode quality gone on business, it requires big LCOS or LCD Chip, and be infeasible for Miniaturization Design, this is because light can not be focused at little region In.Due to the separation of X and Y electronics valence band in nonpolar and semi-polarity GaN so that from being manufactured in The light itself that the device of the such as LED on these platforms sends is polarization.By by semi-polarity and/ Or non-polar GaN-based LED is for using LCOS technology or needing other light valves of polarized light In projection display equipment, the light loss being associated with LED will be minimized, all without utilizing Such as the optional feature of polarization recycler, and optional feature can increase complexity and the cost of system.Tradition Optical projection system generally use laser instrument and/or LED as light source to illuminate image.Generally, throwing In shadow system, lasing light emitter provides better performance than LED light source.

Fig. 1 shows the diagram of traditional optical projection system.As it can be seen, blue laser, green swash Light and red laser are combined into laser beam, and then this laser beam is projected onto MEMS scanning mirror.

In the conventional projection system of all optical projection systems as shown in Figure 1, green second_harmonic generation (SHG) laser instrument is used for providing green laser.Current still do not have direct diode solution Sending green laser, this forces use frequency multiplication 1060nm diode laser, it is expensive, volume is big, It is difficult to High Speed Modulation and the spectrum that sends is narrow and make to produce in the picture speckle.Additionally, Owing to these devices need to use recurrent pulses Lithium metaniobate (PPLN) to produce second harmonic, institute It is the lowest with the efficiency about this technology.

Firstly, there are the efficiency of 1060nm device itself.Secondly there are and direct the light to PPLN Relevant light coupling loss is derived from PPLN with by light.Again, there is the conversion loss in PPLN. Finally there are and parts are cooled to the loss that accurate temperature is relevant.

In order to manufacture the efficient display that battery life maximizes and cost, size, weight minimize, Must be by the minimum optical losses in system.The source of the light loss in system includes but does not limit to In, come from the loss that its transmission is to rely on the optical element of polarization.At such as micro projector In many small projector, use the micro display technology of high polarization sensitivity, such as LCOS or LCD. Regular display based on LCOS typically requires high polarized light source according to the essence of lcd technology.

In each embodiment, the invention provides blue and green Direct-type diode GaN base Laser instrument, its provide height polarization output, single spatial mode formula, in arrive big spectral width, high efficiency And high modulation rate, this is for such as micro-projector, DLP projector, display based on liquid crystal Various projectors and the display of device (such as, liquid crystal on silicon or " LCOS ") etc. are preferable.

Should be understood that by using height polarization in the projection display equipment provided by embodiment of the present invention Light source, can realize cost minimization simultaneously by maximizing optical efficiency and the selection to optics has There is maximum flexibility.In the traditional lighting source of the most unpolarized LED and system thereof, need complexity Optics is used for polarizing regeneration, thus improves the efficiency of unpolarized light source.By comparison, by Forming blue and green laser and/or LED in nonpolar or semipolar GaN, light output will be high Degree polarization, thus eliminate the needs to the additional optical for processing polarization.

As described in the present invention, the Direct-type diode laser with GaN base laser instrument is used In blue and green light source.When laser instrument is less than threshold value, traditional c face GaN laser instrument sends Unpolarized or close to non-polarized light.After reaching threshold value along with the increase laser instrument of electric current, output light becomes For polarization.By comparison, it is manufactured in nonpolar or semipolar GaN according to embodiment of the present invention On laser instrument when less than threshold value, send polarized light, and along with the increase polarization ratio of electric current increases.Logical Cross in projection display equipment, use high polarized light source, light efficiency can be maximized, realize cost simultaneously Minimize and selection to optics has maximum flexibility.

In order to manufacture the efficient display that battery life maximizes and cost, size, weight minimize, The minimum optical losses in system must be made.For LCOS system, traditional LCOS generally shrinks As far as possible little to meet small volume, and also be used for reducing cost.Therefore, for display Optical efficiency maximum in device and the power consumption of minimum, size and weight, need lasing light emitter to have high Optical space brightness.

Traditional LED shows the spatial mode quality gone on business, it is therefore desirable to big LCOS or LCD Chip, and be infeasible for small design, this is because light can not be focused in little region. By comparison, blueness and green Direct-type diode GaN base according to embodiment of the present invention swash Light device shows the single spatial mode formula of maximum throughput.

Embodiments of the present invention additionally provide the advantage reducing speckle.Such as, legacy system is made Frequency multiplication 1060nm diode laser produce narrow spectrum, and this can make to produce in the picture Speckle.Direct-type diode visible lasers used in embodiment of the present invention is (such as, green Laser instrument) the spectrum increase that provides up to > 100x, substantially reduce the speckle in image, and Reduce the needs to expensive additional large component.

Additionally, the frequency multiplication 1060nm diode laser used in legacy system is poor efficiency, former Because being to produce second harmonic.Direct-type diode visible lasers used in the present invention provides The substantially possibility of higher efficiency, and have and reduce the excellent of optics and system dimension and weight Gesture.

As it has been described above, typical small projector (such as, micro projector) includes with lower component:

Light source (laser instrument or LED),

Optics,

The micro-display that such as LCOS or DMD shows,

Drive plate, and

Power supply (that is, battery or power supply adaptor).

Currently, blue and green (can be red) LED is unpolarized, and this causes excess Light loss, and show the spatial mode quality gone on business, and this needs big LCOS or LCD core Sheet, and be infeasible for small design, this is because light can not be focused on little region. Due to the separation of X and Y electronics valence band in nonpolar and semi-polarity GaN so that from being manufactured in these The light itself that the device of the such as LED on platform sends is polarization.By by semi-polarity and/or non- The LED of polar GaN base is in projection display equipment or other LCOS technology, with unpolarized LED Relevant light loss will be minimized, without utilizing the optional feature of such as polarization recycler, and Optional feature can increase complexity and the cost of system.

Currently, the Direct-type diode solution still launched not used for green laser, this forces and makes With frequency multiplication 1060nm diode laser, and its be expensive, bulky, be difficult to high velocity modulation Make and send narrow spectrum and make to produce in the picture speckle.Additionally, due to these devices need Recurrent pulse Lithium metaniobate (PPLN) is used to produce second harmonic, therefore relevant to this technology effect Rate is the lowest.First, the efficiency of 1060nm device itself, secondly there are and direct the light to PPLN Derive relevant light coupling loss with by light from PPLN, again, there is the conversion loss in PPLN, Finally there are and parts are cooled to the loss that accurate temperature is relevant.

Blueness according to embodiment of the present invention and green Direct-type diode GaN base laser instrument carry Supplied the output of high polarization, single spatial mode formula, in arrive big spectral width, high efficiency and high Modulation rate, this is preferable for display based on liquid crystal.

Traditional method for frequency multiplication achieves high spatial brightness, but it can not conveniently realize height Modulating frequency and image artifacts can be produced when attempting to realize.The modulating frequency in source is defined to by this ~100MHz, wherein, it is necessary to utilize amplitude (simulation) to modulate.Along with frequency quantity increases to~300 MHz, it is possible to use pulse (digital) is modulated, and which simplify system and eliminates the need to look-up table Want.

The Direct-type diode solution provided by embodiment of the present invention is provided, can reach 300 Modulating frequency outside MHz, and digital manipulation can be realized.Nonpolar and/or semi-polarity GaN Base laser greatly ensure that the realization of the scheme of Direct-type diode green, therefore, it is possible to realize Digital scan projector with micro lens.

Fig. 2 A shows the simplification figure of the projection arrangement according to embodiment of the present invention.This diagram is only Being only example, it should not unduly limit the scope of claim.Those skilled in the art should realize To many deformation, substitutions and modifications.Optical projection system 250 includes MEMS scanning mirror 251, reflecting mirror 252, optics 254, green laser diode 253, red laser diode 256 and blueness Laser diode 255.

As example, optical projection system 250 is micro projector.Except the parts shown in Fig. 2 A it Outward, optical projection system 250 also includes the housing with opening and for receiving one or more picture frame Input interface.Optical projection system 250 also includes video processing module.In one embodiment, depending on Frequently processing module is electrically connected to ASIC and the MEMS scanning mirror 251 for driving laser diode.

In one embodiment, laser diode constitutes lasing light emitter together with optics 254.Green Color laser diode 253 is characterised by that wavelength is about 490nm to 540nm.Lasing light emitter is configured Become by defeated from blue laser diode, green laser diode and red laser diode of combination Out produce laser beam.According to application, it is possible to use various types of opticses combine from laser The light of diode output.Such as, this optics can be color separation lens, prism, collecting lens etc.. In a particular embodiment, the laser beam of combination is polarized.

In one embodiment, Laser Drive module is set.Additionally, Laser Drive module is used Amount in the electric power adjusting laser diode to be supplied to.Such as, Laser Drive module based on from One or more pixels of one or more picture frames produce three and drive electric current, and three drive in electric current Each of which be used for driving laser diode.In a particular embodiment, Laser Drive module It is configured to produce frequency range and is about the pulse-modulated signal of 50MHz to 300MHz.

MEMS scanning mirror 251 is configured to laser beam projects by opening to ad-hoc location.Example As, MEMS scanning mirror 251 processes on the ad-hoc location corresponding with the pixel of image at special time One pixel.With high frequency, MEMS scanning mirror 251 the pixel pie graph picture projected.

MEMS scanning mirror 251 receives light by reflecting mirror 252 from lasing light emitter.As it can be seen, Reflecting mirror 252 is set in the near zone of lasing light emitter.It addition, this optics is for leading laser beam To MEMS scanning mirror 251.

Should be understood that optical projection system 250 also includes miscellaneous part, be such as electrically connected to lasing light emitter and The power supply of MEMS scanning mirror 251.Miscellaneous part can include buffer storage, communication interface, network Interface etc..

As it has been described above, the key component of optical projection system 250 is LASER Light Source.With traditional optical projection system Comparing, embodiments of the present invention use efficient laser diode.In a particular embodiment, Blue laser diode is with unilateral mould running.Such as, blue laser diode is characterised by spectral width Degree is about 0.5nm to 2nm.In a particular embodiment, blue laser diode is designed to It is integrated in portable use (such as, embedded and set type micro projector), and small-sized TO-38 packaging part shows the 445nm single-mode output power of 60mW.Such as, blue laser Device operates efficiently, and needs the power consumption of minimum in wide temperature range, meets consumption projection Display, protection indicator and illuminator, bio-instruments and treatment and industry imaging applications institute The requirement needed.According to each embodiment, blue laser is based on indium gallium nitrogen (InGaN) half Conductor technology and be manufactured at the bottom of GaN base.

In each embodiment, GaN material is used to manufacture blue laser diode and green laser Diode.Blue laser diode can be semi-polarity or nonpolar.Similarly, green laser two Pole pipe can be semi-polarity or nonpolar.Such as, red laser diode can use GaAlInP material Material manufactures.Such as, it is provided that the following combination of laser diode, but can exist other combination:

Blue polarity+green non-polar+redness * AlInGaP

Blue polarity+green semi-polarity+redness * AlInGaP

Blue polarity+green polarity+redness * AlInGaP

Blue semi-polarity+green non-polar+redness * AlInGaP

Blue semi-polarity+green semi-polarity+redness * AlInGaP

Blue semi-polarity+green polarity+redness * AlInGaP

Blue nonpolar+green non-polar+redness * AlInGaP

Blue nonpolar+green semi-polarity+redness * AlInGaP

Blue nonpolar+green polarity+redness * AlInGaP

Can be manufactured on m face as example, blue laser diode and green laser diode.? In specific embodiment, blue laser diode or green laser diode include having cutting (off-cut) the gallium nitride substrates component in region, m faceted crystal surface.In a specific embodiment, This cutting angle (offcut angle) is between-2.0 to-0.5 degree in c face.In concrete reality Execute in mode, gallium nitride substrates component be at the bottom of block GaN base (it is characterized in that having semi-polarity or Region, Non-Polar Crystal surface) but it also may it is other substrates.In a specific embodiment, block Include nitrogen at the bottom of GaN base and have less than 105cm-2Surface dislocation density.Element nitride crystal or crystalline substance Sheet can include AlxInyGa1-x-yN, wherein 0≤x, y, x+y≤1.In a detailed description of the invention, Element nitride crystal includes GaN but it also may be other crystal.In one or more embodiments, On direction that is substantially orthogonal about surface or that tilt, there is threading dislocation (threading at the bottom of GaN base Dislocation), its density is about 105cm-2To about 108cm-2Between.Due to the orthogonal of dislocation or Tilted alignment, so surface dislocation density is below about 105cm-2.In a particular embodiment, device Part can be manufactured in the semi-polarity substrate of light cutting.

Laser instrument be manufactured in the detailed description of the invention on 20-21} semi-polarity GaN surface orientation, Device has a part of overlapping the formed laser strip region in the region, crystal orientation surface with cutting. In a specific embodiment, laser strip region is characterised by that chamber is orientated substantially basic with a direction In the vertical projection on c direction.In a particular embodiment, laser strip region has the first end With the second end.In a preferred embodiment, laser cavity be directed and be formed at 20-21} containing nitrogen With in the projection on the suprabasil c direction of gallium, this substrate has a pair cleavage illuminating apparatus in the end in chamber Structure.Certainly, other deformation can be there is, revise and replace.

It is manufactured in the detailed description of the invention on non-polar m-surface GaN surface orientation at laser instrument, device Part has the laser strip region that the part in the region, crystal orientation surface being overlapped in cutting is formed.? In specific embodiment, laser strip region is characterised by that chamber is orientated substantially basic with a direction In the vertical projection on c direction.In a particular embodiment, laser strip region has the first end With the second end.In a preferred embodiment, laser cavity be directed be formed at m face containing nitrogen and gallium Suprabasil c direction on, this substrate has a pair cleavage mirror structure in the end in chamber.Certainly, may be used There is other deformation, revise and replace.

In a preferred embodiment, device has the first cleavage surface, is arranged at the first of laser strip region On end;Second cleavage surface, is arranged on second end in laser strip region.One or more embodiment party In formula, the first cleavage surface is arranged essentially parallel to the second cleavage surface.Minute surface is formed in each cleavage surface. First cleavage surface includes the first minute surface.In a preferred embodiment, the first minute surface is by top saltatory Line and the break process of line (cutting) provide.Line technique can use any suitable skill Art, such as diamond line or laser scribe or a combination thereof.In a particular embodiment, first Minute surface includes reflectance coating.Reflectance coating selected from silicon dioxide, hafnium oxide, titanium dioxide, five Tantalum oxide, zirconium oxide and combinations thereof etc..According to embodiment, the first minute surface may also include antireflection and is coated with Layer.Certainly, other deformation can be there is, revise and replace.

The most in a preferred embodiment, the second cleavage surface includes the second minute surface.According to specific embodiment party Formula, line and break process that the second minute surface is rule by top saltatory provide.Preferably, line It is diamond line or laser scribe etc..In a particular embodiment, the second minute surface includes reflection Coating, such as silicon dioxide, hafnium oxide, titanium dioxide, tantalum pentoxide, zirconium oxide and combinations thereof Deng.In a particular embodiment, the second minute surface includes anti-reflection coating.Certainly, can be there are other Deformation, revise and replace.

In a particular embodiment, laser strip has length and width.Length is at about 50 microns extremely In the range of about 3000 microns.Band also has in the range of about 0.5 micron to about 50 micron Width but it also may be other sizes.In a particular embodiment, although width can vary slightly, But the size of width is substantially constant.Generally use mask commonly used in prior art and Etching technics forms width and length.

In a particular embodiment, the invention provides and can send out in ridge laser embodiment Penetrate the replaceable device architecture of 501nm and bigger light.This device is provided with following epitaxial growth unit One or more in element, but be not limited thereto:

N-GaN coating, has the thickness of 100nm to 5000nm, and the doped level of Si is 5E17 to 3E18cm-3

N side sch layer, is made up of InGaN, and wherein the molar fraction of indium is between 3% to 10%, And thickness is 20nm to 100nm

Multiple Quantum well active region layer, by being more than 2.5nm (alternatively, reaching about 8nm) by thickness GaN barrier layer separate at least two 2.0-8.5nm InGaN SQW composition

P side sch layer, is made up of InGaN, and wherein the molar fraction of indium is between 1% to 10%, And thickness is 15nm to 100nm

Electron-blocking layer, is made up of AlGaN, and wherein the molar fraction of aluminum is between 12% to 22%, And thickness is 5nm to 20nm, and doped with Mg

P-GaN coating, has the thickness of 400nm to 1000nm, and the doped level of Mg For 2E17cm-3To 2E19cm-3

P++-GaN contact layer, has the thickness of 20nm to 40nm, and the doped level of Mg For 1E19cm-3To 1E21cm-3

In a particular embodiment, Laser Devices are manufactured in that { 20-21} semi-polarity is containing in Ga substrate. However, it is understood that Laser Devices can also be manufactured in other kinds of substrate, such as, nonpolar take To containing in Ga substrate.

Although be widely used based on red source, green source and the white light source of blue sources, but other groups It is also feasible for closing.According to the embodiment of the present invention, the light source used in optical projection system is by yellow Light source is combined with red light source, green light source and blue-light source.Such as, the interpolation of yellow light sources changes The projection of RGB base and the chromatic characteristic (such as, it is allowed to broader colour gamut) of display system are entered.At tool In the embodiment of body, RGYB light source is used for optical projection system.Yellow light sources can be by gallium nitride material The yellow laser diode that material or AlInGaP material manufacture.In each embodiment, yellow light sources Can have polarity orientation, nonpolar orientation or semi-polarity orientation.Should be understood that the projection according to the present invention System can also use the light source of other colors.Such as, other colors include cyan, carmetta and Other colors.In a particular embodiment, the laser diode of different colours is packaged separately.? In another detailed description of the invention, the laser diode of two or more different colours is mutually encapsulated into together. In still another embodiment, the laser diode of two or more different colours is manufactured in identical base At at the end.

Fig. 2 B is to be manufactured according to embodiment of the present invention { the suprabasil Laser Devices of 20-21} 200 Detailed cross sectional view.This diagram is only example, should not limit this paper claim irrelevantly Scope.One of ordinary skill in the art would recognize that many deformation, substitutions and modifications.As it can be seen, laser Device includes gallium nitride substrates 203, has N-shaped back metal contact district 201 under it.Specifically Embodiment in, back metal contact district is by the suitable material of all those and other as is noted below Material manufactures.The further detail below of contact area can obtain, in further detail below in the whole text in this specification Ground describes.

In a particular embodiment, device also has the n-type gallium nitride layer 205 of stacking, active area 207 and the p-type gallium nitride layer (being configured to laser strip region 209) of stacking.Concrete embodiment party In formula, each in these regions uses metal organic chemical vapor deposition (MOCVD), molecule Beam epitaxy (MBE) or other be suitable at least one extension in the growth technology of GaN growth Deposition technique is formed.In a particular embodiment, epitaxial layer is the height of stacking n-type gallium nitride layer Quality epitaxial layer.In some embodiments, this high quality layer doped with such as Si or O with formed N-type material, wherein doping content is about 1016cm-3To 1020cm-3Between.

In a particular embodiment, depositing n-type Al in substrateuInvGa1-u-vN shell, wherein 0 ≤u,v,u+v≤1.In a particular embodiment, carrier density can be about 1016cm-3To 1020 cm-3Between.MOCVD or MBE can be used to deposit.Certainly, can be there are other Deform, revise and replace.

As example, it is positioned on the pedestal in MOCVD reactor at the bottom of block GaN base.To Reactor (or use load lock chamber structure) is closed, bleeds and backfilled to reactor to after atmospheric pressure, Under there is the gas containing nitrogen, pedestal is heated between about 900 degrees Celsius and about 1200 degrees Celsius Between.In a specific embodiment, in the case of flowing has ammonia, pedestal is heated to about 1100 degrees Celsius.Such as trimethyl gallium (TMG) or triethyl-gallium (TEG) is started in carrier gas The flowing of the metallorganic precursors containing gallium, total flow velocity is about 1 to 50 standard cubic centimeter every point Between clock (sccm).Carrier gas can include hydrogen, helium, nitrogen or argon.Group V precursor (ammonia) The stream of flow velocity and Group III precursor (trimethyl gallium, triethyl-gallium, trimethyl indium, trimethyl aluminium) The ratio of speed is about between 2000 to about 12000 during growing.With about 0.1sccm and 10sccm Between overall flow rate start the flowing of Disilicoethane in carrier gas.

In a particular embodiment, laser strip region is made up of p-type gallium nitride layer 209.Specifically Embodiment in, laser strip by from dry etching or wet etching select etching technics carry Supply.In a preferred embodiment, etching technics is dry method but it also may be other.As showing Example, dry etch process is to use the inductivity combined process of chlorine-bearing compound or use similar chemistry The reactive ion etching process of thing.It addition, as example, chlorine-bearing compound generally derivative from chlorine etc. and Come.Device also has the dielectric region of stacking, and it exposes contact area 213.In specific embodiment In, dielectric region is oxide or the silicon nitride of such as silicon dioxide but it also may be other.Connect Touch district to engage with laminated metal floor 215.Laminated metal layer is to include palladium and gold (Pd/Au), platinum and gold (Pt/Au), nickel and the multiple structure of gold (Ni/Au) but it also may be other.Certainly, may be used There is other deformation, revise and replace.

In a particular embodiment, Laser Devices have active area 207.According to one or more realities Executing mode, active area can include 1 to 20 quantum well region.As example, by N-shaped AluInvGa1-u-vAfter N shell deposits predetermined amount of time and arrives predetermined thickness, deposit active layer.Active layer Can be made up of multiple SQWs, there is 2-10 SQW.SQW can be made up of InGaN, And they are separated by GaN barrier layer.In other implementations, well layer (potential well layer) and Barrier layer (barrier layer) includes Al respectivelywInxGa1-w-xN and AlyInzGa1-y-zN, wherein, 0≤w, X, y, z, w+x, y+z≤1, wherein w<u, y and/or x>V, z so that the band gap of well layer is less than stopping Layer and the band gap of n-layer.Well layer and barrier layer are respectively provided with between about 1nm and about 20nm Thickness.The composition of active layer and structure are selected as providing the luminescence of preselected wavelength.Active layer can be Undoped (or unintentionally adulterate), can be maybe N-shaped or p-type doping.Of course, it is possible to deposit Other deformation, revise and replace.

In a particular embodiment, active area may also include electronics baffle area and separation restricted type is heterogeneous Structure.In some embodiments, electron-blocking layer is the most deposited.Electron-blocking layer can include AlsIntGa1-s-tN, wherein 0≤s, t s+t≤1, and there is the band gap wider than active area, it is possible to doping For p-type.In a specific embodiment, electron-blocking layer includes AlGaN.Another embodiment party In formula, electron-blocking layer includes AlGaN/GaN superlattice structure, and it comprises AlGaN and GaN Alternating layer, every layer of thickness having between about 0.2nm and about 5nm.Certainly, can be there is it His deformation, revise and replace.

It is noted that p-type gallium nitride structure is deposited on electron-blocking layer and active layer.P-type layer Can be doped with level between about 1016cm-3With 1022cm-3Between Mg, and can have about 5nm And the thickness between about 1000nm.The outmost 1-50nm of p-type layer is than other portions of this layer Divide and more heavily adulterate, enable to improve electrical contact.In a particular embodiment, by being selected from Etching technics in dry etching or wet etching provides laser strip.In a preferred embodiment, Etching technics is dry method but it also may be other types.Device also has the dielectric region of stacking, It exposes contact area 213.In a particular embodiment, dielectric region is the oxygen of such as silicon dioxide Compound but it also may be other materials, such as silicon nitride.Certainly, other deformation can be there is, repair Change and replace.

Should be understood that the light source of projector 250 can also include one or more LED.Fig. 2 C is to show Go out to have the simplification figure of the projector of LED light source.This diagram is only example, should be not incorrect Ground limits the scope of claim.Those skilled in the art will appreciate that many deformation, substitutions and modifications. As example, blue led and green LED by the material manufacture containing gallium nitride.Concrete at one Embodiment in, blue led is characterised by nonpolar orientation.In another embodiment, Blue led is characterised by that semi-polarity is orientated.

Fig. 3 A shows the alternative of the projection arrangement according to embodiment of the present invention.This diagram is only It is only example, the scope of claim should not limited irrelevantly.Those skilled in the art will appreciate that Many deformation, substitutions and modifications.In figure 3 a, projection arrangement includes MEMS scanning mirror, reflection Mirror, light converting member, red laser diode, blue diode and green laser diode.Shown in Blue laser diode and green laser diode be integrated into single package.Such as, blue laser Diode and green laser diode share same substrate and surface.From blue laser diode and green The output of color laser diode sends in common surface plane.Should be understood that by making blue laser Diode is together with green laser diode package, it is possible to substantially reduce projection arrangement size and Cost (such as, less parts).

Additionally, green laser diode and blue laser diode are characterised by high efficiency.Such as, Blue laser diode and green laser diode are manufactured by bulk gallium nitride material.Blue laser two pole Pipe can be nonpolar or semipolar orientation.As green laser diode-like can be nonpolar or Semi-polar.Such as, it is provided that the following combination of laser diode, but can exist other combination:

Blue polarity+green non-polar+redness * AlInGaP

Blue polarity+green semi-polarity+redness * AlInGaP

Blue polarity+green polarity+redness * AlInGaP

Blue semi-polarity+green non-polar+redness * AlInGaP

Blue semi-polarity+green semi-polarity+redness * AlInGaP

Blue semi-polarity+green polarity+redness * AlInGaP

Blue nonpolar+green non-polar+redness * AlInGaP

Blue nonpolar+green semi-polarity+redness * AlInGaP

Blue nonpolar+green polarity+redness * AlInGaP

In one embodiment, green laser diode is characterised by that wavelength is at 480nm~540 Between nm, this is different from use infra-red laser diode (that is, transmitted wave length is about 1060nm) And use SHG to carry out the traditional mode of production device of frequency multiplication.

Fig. 3 B shows the letter of the laser diode being packaged together according to embodiment of the present invention Change figure.This diagram is only example, should not limit the scope of claim irrelevantly.This area skill Art personnel are it is to be realized that many deforms, substitutions and modifications.As shown in Figure 3 B, two laser two pole Pipe is arranged on single package.Such as, shown laser instrument 1 is blue laser diode, laser Device 2 is green laser diode.Optics can be used to carry out the output of combination laser device.

The output of two shown in Fig. 3 B laser instrument can be combined in many ways.Such as, all As the optics of color separation lens, waveguide can be used for combining the defeated of shown laser instrument 1 and laser instrument 2 Go out.

In other embodiments, blue laser diode and green laser diode are single-chip integration 's.Fig. 3 C shows has, according to embodiment of the present invention, the luminescence that classification (gradient) is distributed The diagram in the cross section of the active area of wavelength.This diagram is only example, should not limit right irrelevantly The scope required.Those skilled in the art will appreciate that many deformation, substitutions and modifications.Such as Fig. 3 C Shown in, such as, use and there is the different active area launching gradient.Ridged at active area different piece Waveguide is for sending different wavelength.

Fig. 3 D shows the simplification figure in the cross section of the multiple active areas according to embodiment of the present invention. This diagram is only example, should not limit the scope of claim irrelevantly.Those skilled in the art It is to be realized that many deformation, substitutions and modifications.Additionally, each active area is relevant to specific wavelength.

Should be understood that the light source of projector 300 can also include one or more LED.Fig. 3 E is to show Go out to have the simplification figure of the projector of LED light source.This diagram is only example, should be not incorrect Ground limits the scope of claim.Those skilled in the art will appreciate that many deformation, substitutions and modifications. As example, blue led and green LED by the material manufacture containing gallium nitride.Concrete at one Embodiment in, blue led is characterised by nonpolar orientation.In another embodiment, Blue led is characterised by that semi-polarity is orientated.

Fig. 4 A shows the simplification figure of the projection arrangement according to embodiment of the present invention.This diagram is only It is only example, the scope of claim should not limited irrelevantly.Those skilled in the art will appreciate that Many deformation, substitutions and modifications.As shown in Figure 4 A, blue laser diode, green laser two Pole pipe and red laser diode are integrated in light source 401.Light source 401 is each laser diode The combination of output.Combination light is projected onto on reflecting mirror, and combination luminous reflectance is scanned by it to MEMS On mirror.Should be understood that by providing laser diode in same packaging part, light source 401 can be reduced Size and cost.Such as, it is provided that following laser diode combines, but can there is other combination:

Blue polarity+green non-polar+redness * AlInGaP

Blue polarity+green semi-polarity+redness * AlInGaP

Blue polarity+green polarity+redness * AlInGaP

Blue semi-polarity+green non-polar+redness * AlInGaP

Blue semi-polarity+green semi-polarity+redness * AlInGaP

Blue semi-polarity+green polarity+redness * AlInGaP

Blue nonpolar+green non-polar+redness * AlInGaP

Blue nonpolar+green semi-polarity+redness * AlInGaP

Blue nonpolar+green polarity+redness * AlInGaP

Fig. 4 A shows laser two pole being integrated into single package according to embodiment of the present invention The simplification figure of pipe.This diagram is only example, should not limit the scope of claim irrelevantly.This Skilled person is it is to be realized that many deforms, substitutions and modifications.Such as, laser instrument 1 can be green Color laser diode, laser instrument 2 can be red laser diode, and laser instrument 3 can be blue Color laser diode.According to application, green laser diode can be manufactured in semi-polarity, nonpolar or pole In the substrate containing gallium of property.Similarly, blue laser diode can be formed at semi-polarity, nonpolar Or in the substrate containing gallium of polarity.

Should be understood that each optical projection system according to the present invention has a wide range of applications.Each embodiment party In formula, above-mentioned optical projection system is integrated in cell phone, photographing unit, personal computer, portable meter In calculation machine and other electronic installations.

Fig. 5 A shows the simplification figure of the DLP projection arrangement according to embodiment of the present invention.Should Diagram is only example, should not limit the scope of claim irrelevantly.Those skilled in the art can Recognize many deformation, substitutions and modifications.As shown in Figure 5A, wherein, projection arrangement includes: light Source, collecting lens, colour wheel, shaping lens and Digital Light Processor (DLP) plate and projection are thoroughly Mirror.Additionally, DLP board includes processor, memorizer and DMD (DMD).

As an example, colour wheel can include the fluorescence of the color for changing the light sent from light source Body material.In a particular embodiment, colour wheel includes multiple region, and each region is corresponding to specific Color (such as, red, green, blue etc.).In the exemplary embodiment, projector bag Include the light source containing blue-light source and red light source.Colour wheel includes for the slit of blue light with containing glimmering The region of body of light, should be used for converting blue light into green light containing the region of fluorophor.In operation, Blue-light source (such as, blue laser diode or blue led) by slit provide blue light and from Region containing fluorophor excites green light;Red light source is provided independently red light.Carry out autofluorescence The green light transmissive of body crosses colour wheel, or is reflected back by colour wheel.In either case, green light quilt Light source part is collected and is re-oriented micro-display.Blue light through slit is also directed at micro display Device.Blue-light source can be the laser diode being manufactured on the GaN of nonpolar or semipolar orientation And/or LED.In some cases, by blue laser and blue led are combined, can improve Chromatic characteristic.The replaceable light source of green light can include green laser diode and/or green LED, It is by the substrate manufacture containing Ga of nonpolar or semipolar.In some embodiments, including Some combinations of the fluorophor of LED, laser instrument and/or conversion green light are useful.Should be understood that can To be other combinations of color light source and its colour wheel.

As another example, colour wheel can include multiple fluorescent material.Such as, colour wheel can include Green-emitting phosphor and red-emitting phosphors with blue-light source combination.In a particular embodiment, colour wheel Including multiple regions, each region is corresponding to specific color (such as, red, green, blue etc.). In the exemplary embodiment, projector includes the light source containing blue-light source.Colour wheel includes for indigo plant The slit of color laser and two regions containing fluorophor, the region that the two contains fluorophor is used respectively In converting blue light into green light and converting blue light into red light.In operation, blue light Source (such as, blue laser diode or blue led) provides blue light and from containing glimmering by slit The region of body of light excites green light and red light.Green light and red light from fluorophor can be with transmissions Cross colour wheel, or reflected back by colour wheel.In either case, green light and red light are by optics Collect and be re-oriented micro-display.Blue-light source can be manufactured in nonpolar or semipolar orientation Laser diode on GaN or LED.Should be understood that can be color light source and other of its colour wheel Combination.

As another example, colour wheel can include blue emitting phophor material, green phosphor material and red Color fluorescent material.Such as, colour wheel can include the blue-fluorescence with ultraviolet (UV) combination of light sources Body, green-emitting phosphor and red-emitting phosphors.In a particular embodiment, colour wheel includes multiple region, Each region is corresponding to specific color (such as, red, green, blue etc.).In exemplary reality Executing in mode, projector includes the light source containing UV light source.Colour wheel includes three containing fluorophor Region, is respectively used to UV light be converted into blue light, UV light is converted into green light and incites somebody to action UV light is converted into red light.In operation, colour wheel sequentially sends indigo plant from the region containing fluorophor Coloured light, green light and red light.Blue light, green light and red light from fluorophor can be with transmissions Cross colour wheel, or reflected back by colour wheel.In either case, blue light, green light and red light quilt Optics is collected and is re-oriented micro-display.UV light source can be to be manufactured in nonpolar or half-shadow Laser diode on the GaN of sexual orientation or LED.Should be understood that it can is color light source and its color Other combinations of wheel.

Shown light source can be made based on laser instrument.In one embodiment, from light source Output be laser beam, this laser beam be characterised by substantially white.In one embodiment, Combination of light sources exports from blue laser diode, green laser diode and red laser diode Light.Such as, blue laser diode, green laser diode and red laser diode can be integrated into Single package as above.Other combination is also feasible.Such as, blue laser diode Share a packaging part with green laser diode, and red laser diode is the most packed.At this In embodiment, laser instrument can be modulated individually, so that color has time sequencing, Because of without colour wheel.Blue laser diode can be polarity, semi-polar and nonpolar. Similarly, green laser diode can be polarity, semi-polar and nonpolar.Such as, blue Color and/or green diode can be by the bulk substrate manufactures containing gallium nitride material.Such as, it is provided that with Under laser diode combination, but other combination can be there is:

Blue polarity+green non-polar+redness * AlInGaP

Blue polarity+green semi-polarity+redness * AlInGaP

Blue polarity+green polarity+redness * AlInGaP

Blue semi-polarity+green non-polar+redness * AlInGaP

Blue semi-polarity+green semi-polarity+redness * AlInGaP

Blue semi-polarity+green polarity+redness * AlInGaP

Blue nonpolar+green non-polar+redness * AlInGaP

Blue nonpolar+green semi-polarity+redness * AlInGaP

Blue nonpolar+green polarity+redness * AlInGaP

In fig. 5, DLP projection system utilizes colour wheel once to a kind of color (example of DMD projection As, red, green or blue) light.The reason needing colour wheel is that light source provides white continuously Light.Should be understood that due to use in embodiments of the present invention solid-state devices as light source, so root The colour wheel shown in Fig. 5 A is need not according to the DLP projector of the present invention.Fig. 5 B shows basis The simplification figure of the DLP projector of embodiment of the present invention.This diagram is only example, should not be not proper The local scope limiting claim.Those skilled in the art can be appreciated that many deformation, replace and Amendment.

In interchangeable embodiment, light source includes single laser diode.Such as, light source includes The blue laser diode of output blue laser beam.Light source also includes the blue color for changing laser beam One or more opticses.Such as, one or more opticses include fluorescent material.Swash Beam excitation fluorescent material is producing the luminous source of basic white, and it becomes and shows for projection Light source.In this embodiment, colour wheel is needed to arrange blue frame, green frame and red frame to DLP Order.

Optical projection system 500 includes light source 501, light source controller 502, optics 504 and DLP Chip 505.Light source 501 is configured to optics 504 and launches colourama to DMD 503. More specifically, light source 501 includes color laser diode.Such as, laser diode includes red sharp Optical diode, blue laser diode and green laser diode.In predetermined time interval, single Laser diode is unlocked, and other laser diode is closed, thus launches list to DMD 503 The laser beam of individual color.Light source controller 502 provides control signal to light source 501, with based on predetermined Frequency and the opening and closing of sequential switched laser diode.Such as, the switching class of laser diode It is similar to the function of the colour wheel shown in Fig. 5 A.

Fig. 6 shows the simplification figure of the 3 chip DLP projection system according to embodiment of the present invention. This diagram is only example, should not limit the scope of claim irrelevantly.Those skilled in the art Member can be appreciated that many deformation, replaces and revise.As shown in Figure 5 A, 3 chip DLP projections are System includes light source, optics, multiple DMD and color wheel system.As it can be seen, each DMD Relevant to particular color.

In each embodiment, white light beam includes the laser beam of the basic white provided by light source. In one embodiment, the output from light source is laser beam, and this laser beam is characterised by basic For white.In one embodiment, combination of light sources is from blue laser diode, green laser two pole Pipe and the light of red laser diode output.Such as, blue laser diode, green laser diode Single package as above can be integrated into red laser diode.Other combination is also feasible 's.Such as, blue laser diode and green laser diode share a packaging part, and red sharp Optical diode is the most packed.Blue laser diode can be polarity, semi-polar and nonpolar 's.Similarly, green laser diode can be polarity, semi-polar and nonpolar.Such as, Blue and/or green diode can be by the bulk substrate manufacture containing gallium nitride material.Such as, it is provided that Following laser diode combination, but other combination can be there is:

Blue polarity+green non-polar+redness * AlInGaP

Blue polarity+green semi-polarity+redness * AlInGaP

Blue polarity+green polarity+redness * AlInGaP

Blue semi-polarity+green non-polar+redness * AlInGaP

Blue semi-polarity+green semi-polarity+redness * AlInGaP

Blue semi-polarity+green polarity+redness * AlInGaP

Blue nonpolar+green non-polar+redness * AlInGaP

Blue nonpolar+green semi-polarity+redness * AlInGaP

Blue nonpolar+green polarity+redness * AlInGaP

In interchangeable embodiment, light source includes single laser diode.Such as, light source includes The blue laser diode of output blue laser beam.Light source also includes the blue color for changing laser beam One or more opticses.Such as, one or more opticses include fluorescent material.

Should be understood that light source can include laser diode and/or LED.In one embodiment, Light source includes the laser diode of different colours.Such as, light source can additionally include for change from The fluorescent material of the color of the light that laser diode sends.In another embodiment, light source includes One or more color LEDs.In yet, light source includes laser diode and LED. Such as, light source can include the fluorophor of color of the light for changing laser diode and/or LED Material.

In each embodiment, in 3D display application, use laser diode.Generally, 3D Display system depends on stereo display principle, and wherein, stereo display technique uses discrete device, so that Everyone watches the left eye to people and right eye to provide the scene of different images.The example of this technology includes Stereographic images (anaglyph image) and polarising glass.Fig. 7 shows and relates to by polarizing The simplification figure that the 3D of the polarization image after glasses optical filtering shows.As it can be seen, by polarising glass, Left eye and right eye perceive different images.

Generally include by RealD CinemaTMThe conventional polarization glasses of the circular polarization glasses used exist Many cinemas are widely accepted.It is to be provided by interference light filter technology that another kind of image separates 's.Such as, glasses constitute the major part of this technology with special interference light filter in projector And thus gain the name.Visual chromatic spectrum is divided in six arrowband red areas two by light filter;Green In territory, zone in two and blue region two (in order to this is described, referred to as R1, R2, G1, G2, B1 and B2).R1, G1 and B1 wavestrip is for the image of eyes, R2, G2 With B2 for another eyes.Human eye is extremely sensitive for this trickle SPECTRAL DIVERSITY, because of This this technology utilizes the only slight aberration between two just can produce full color 3D rendering.Sometimes, This technology is described as " super stereo ", this is because it is in conventional stereo photo technology Core spectrum multiplexing advanced form.In a particular embodiment, following ripple is used Long group:

Left eye: red 629nm;Green 532nm;Blue 446nm

Right eye: red 615nm;Green 518nm;Blue 432nm

In each embodiment, present invention provide for projecting the optical projection system of 3D rendering, its Middle use laser diode provides basic RGB color.Fig. 8 shows according to the present invention real Execute the simplification figure of the 3D optical projection system of mode.This diagram is only example, should not limit irrelevantly The scope of claim.Those skilled in the art will appreciate that many deformation, replace and revise.Such as figure Shown in 8, optical projection system includes projector 801.Projector 801 is configured to projection and an eye The image that eyeball (such as, left eye) is relevant.Projector 801 includes the first light source.First light source includes First group of laser diode: red laser diode, green laser diode and blue laser two pole Pipe.Each laser diode is relevant to specific wavelength.Such as, red laser diode is configured to Sending the laser beam being characterised by 629nm wavelength, green laser diode is configured to send feature It is the laser beam of 532nm wavelength, and blue laser diode is configured to send and is characterised by The laser beam of 446nm wavelength.Should be understood that other wavelength are also feasible.

In each embodiment, blue laser diode is characterised by nonpolar orientation or semi-polarity Orientation.Such as, blue laser diode is by the substrate manufacture containing gallium nitride.A concrete reality Executing in mode, blue laser diode is manufactured by bulk substrate materials.Similarly, green laser two pole Pipe also can be by the substrate manufacture containing gallium nitride.Such as, green laser diode is characterised by non-pole Sexual orientation or semi-polarity orientation.

Should be understood that color LED can also be used to come for projection element provides colourama.Such as, Use red LED to substitute red laser diode and red light is provided.Similarly, shades of colour LED and/or laser diode are interchangeable as light source.Can use fluorescent material change from The light color of the light that LED and/or laser diode send.

Projector 802 is configured to the image that projection is relevant with another eyes (such as, right eye).The Two light sources include second group of laser diode: red laser diode, green laser diode and indigo plant Color laser diode.Each laser diode is relevant to specific wavelength, and each wavelength is different from The wavelength of the respective laser diodes of the first light source.Such as, red laser diode is configured to send It is characterised by that the laser beam of 615nm wavelength, green laser diode are configured to send to be characterised by The laser beam of 518nm wavelength, and blue laser diode is configured to send and is characterised by 432 The laser beam of nm wavelength.Should be understood that other wavelength are also feasible.

Projector 801 and 802 shown in Fig. 8 is positioned as away from each other, it should be appreciated that two Projector can be integrally located in a housing unit.In addition to light source and image source, projector is also Including for the image from two projectors is assembled optics on the screen at the same.

According to concrete application, various types of light filter can be used by beholder's figure to being projected As filtering.In one embodiment, band pass filter is used.Such as, band pass filter is only One group of RGB color wavelength is allowed to be delivered to eyes.In another embodiment, notch filtering light is used Device, wherein, notch filter will allow the most all in addition to specific group of RGB color wavelength Wavelength be delivered to eyes.Other embodiment can also be there is.

In some embodiments, the invention provides liquid crystal on silicon (LCOS) optical projection system.Figure The 9 simplification figures showing the LCOS optical projection system 900 according to embodiment of the present invention.This diagram It is only example, and the scope of claim should not limited irrelevantly.Those skilled in the art are gratifying Know to many deformation, replace and revise.As it is shown in figure 9, green laser diode is by beam splitter 901 Green laser is provided to green LCOS;Blue laser diode passes through beam splitter 903 to blue LCOS Blue laser is provided;And red laser diode provides red by beam splitter 904 to red LCOS Color laser.Each LCOS is for forming the predetermined single color provided by its corresponding laser diode Image, and x cubic part 902 combines the image of single color.Coloured image after combination It is projected onto on lens 906.

One or more laser diodes in each embodiment, used in optical projection system 900 It is characterised by semi-polarity orientation or nonpolar orientation.In one embodiment, laser diode by Bulk substrate manufactures.In a particular embodiment, blue laser diode and green laser diode By the substrate manufacture containing gallium nitride.Should be understood that and color LED can also be used to come for projection unit Part provides colourama.Such as, red LED can be used for substituting red laser diode provides red Light.Similarly, LED and/or the laser diode of shades of colour are interchangeable as light source.Fluorophor Material can be used for changing the light color of the light sent from LED and/or laser diode.

LCOS optical projection system 900 includes three panels.In replaceable embodiment, the present invention carries Supply the optical projection system with single LCOS panel.Red laser diode, green laser diode It is aligned to red laser beam, green laser beam and blue laser beam with blue laser diode be collimated Change on single LCOS.Laser diode is pulse modulation, so that in the given time Interior only one laser diode is powered, thus LCOS is illuminated by single color.Should be understood that due to Use the laser diode of colour, so need not tradition according to the LCOS optical projection system of the present invention The beam splitter of the light beam that single white light is divided into shades of colour used in LCOS optical projection system.? In each embodiment, the one or more laser diodes used in single LCOS optical projection system It is characterised by semi-polarity orientation or nonpolar orientation.In one embodiment, laser diode is by block Shape substrate manufactures.In a particular embodiment, blue laser diode and green laser diode by Substrate manufacture containing gallium nitride.In each embodiment, the structure shown in Fig. 9 is also used in In silicon-based ferroelectric liquid crystal (FLCOS) system.Such as, the panel shown in Fig. 9 can be FLCOS Panel.

Although being presented above the complete description of detailed description of the invention, but can use various modification, Replacing structure and equivalent.Therefore, above description and example are not construed as the scope of the present invention Limiting, the scope of the present invention be defined by the appended claims.

Claims (28)

1. an optical projection system, including:
Interface, is used for receiving image or video signal;
Light source, is included in the green laser two of 490nm~540nm work in wavelength ranges Pole is managed, and described green laser diode is arranged on mounting substrate and a surface, described installation Substrate includes gallium nitride material, and described surface has, and { 20-21} semi-polarity is orientated, described green Color laser diode has on said surface by the chamber orientation sign in the projection in c direction Laser strip region;And
Power supply, is electrically connected to described light source.
Optical projection system the most according to claim 1, farther includes:
There is the light source of one or more light emitting diode.
Optical projection system the most according to claim 1, farther includes: optics, for group Incompatible from described green laser diode and the output of blue laser diode.
Optical projection system the most according to claim 1, wherein, also includes:
Red laser diode.
Optical projection system the most according to claim 1, farther includes: MEMS scanning mirror, electricity It is connected to described power supply.
Optical projection system the most according to claim 1, farther includes:
Digital light processes chip (DLP), and including digital mirror device, described digital light processes core Sheet is electrically connected to described power supply.
Optical projection system the most according to claim 1, farther includes: collecting lens, and combination comes Export from the light of described green laser diode and blue laser diode.
Optical projection system the most according to claim 1, farther includes: color separation lens, and combination comes Export from the light of described green laser diode and blue laser diode.
Optical projection system the most according to claim 1, farther includes:
Wavelength regulation module, including fluorescent material, fluorophor material described in described light source activation Material is to constitute colored hair light source.
Optical projection system the most according to claim 9, farther includes:
Digital light processes chip, including digital mirror device, is electrically connected to described power supply.
11. optical projection systems according to claim 1, farther include:
One or more liquid crystal on silicon (LCOS) panel, is electrically connected to described power supply.
12. optical projection systems according to claim 1, farther include:
Colour wheel, including multiple wavelength regulation parts, the regulation of described colour wheel sends from described light source The color of light.
13. optical projection systems according to claim 12, wherein, described colour wheel includes fluorescent material, The color of the light that the regulation of described fluorescent material sends from described light source.
14. optical projection systems according to claim 1, wherein, described light source is additionally included in 430 The blue laser diode of nm~480nm work in wavelength ranges, described blue laser two pole Pipe is arranged on described mounting substrate and described surface, and described blue laser diode is described Have on surface and be orientated, by the chamber in the projection in c direction, the laser strip region characterized.
15. 1 kinds of optical projection systems, including:
Interface, is used for receiving image or video signal;
Light source, described light source is included in the blueness of 430nm~480nm wave-length coverage work and swashs Optical diode, described blue laser diode is arranged on mounting substrate and a surface, described Mounting substrate includes gallium nitride material, and described surface has, and { 20-21} semi-polarity is orientated, institute State blue laser diode to have on said surface by the chamber orientation in the projection in c direction The laser strip region characterized;And
Power supply, is electrically connected to described light source.
16. optical projection systems according to claim 15, farther include:
There is the light source of one or more light emitting diode.
17. optical projection systems according to claim 15, farther include: optics, for group Incompatible from described blue laser diode with the output of green laser diode.
18. optical projection systems according to claim 15, wherein, also include:
Red laser diode.
19. optical projection systems according to claim 15, farther include: MEMS scanning mirror, It is electrically connected to described power supply.
20. optical projection systems according to claim 15, farther include:
Digital light processes chip (DLP), and including digital mirror device, described digital light processes core Sheet is electrically connected to described power supply.
21. optical projection systems according to claim 15, farther include: collecting lens, and combination comes Export from the light of described blue laser diode and green laser diode.
22. optical projection systems according to claim 15, farther include: color separation lens, and combination comes Export from the light of described blue laser diode and green laser diode.
23. optical projection systems according to claim 15, farther include:
Wavelength regulation module, including fluorescent material, fluorophor material described in described light source activation Material is to constitute colored hair light source.
24. optical projection systems according to claim 23, farther include:
Digital light processes chip, including digital mirror device, is electrically connected to described power supply.
25. optical projection systems according to claim 15, farther include:
One or more liquid crystal on silicon (LCOS) panel, is electrically connected to described power supply.
26. optical projection systems according to claim 15, farther include:
Colour wheel, including multiple wavelength regulation parts, the regulation of described colour wheel sends from described light source The color of light.
27. optical projection systems according to claim 26, wherein, described colour wheel includes fluorescent material, The color of the light that the regulation of described fluorescent material sends from described light source.
28. optical projection systems according to claim 1, wherein, described light source is additionally included in 490nm ~the green laser diode of 540nm work in wavelength ranges, described green laser diode Being arranged on described mounting substrate and described surface, described green laser diode is at described table Have on face and be orientated, by the chamber in the projection in c direction, the laser strip region characterized.
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