CN105704852B - Vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus - Google Patents
Vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus Download PDFInfo
- Publication number
- CN105704852B CN105704852B CN201610215357.0A CN201610215357A CN105704852B CN 105704852 B CN105704852 B CN 105704852B CN 201610215357 A CN201610215357 A CN 201610215357A CN 105704852 B CN105704852 B CN 105704852B
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- China
- Prior art keywords
- shielded layer
- side wall
- pedestal
- head cover
- layer
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/22—Furnaces without an endless core
- H05B6/24—Crucible furnaces
- H05B6/26—Crucible furnaces using vacuum or particular gas atmosphere
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/22—Furnaces without an endless core
- H05B6/24—Crucible furnaces
- H05B6/28—Protective systems
Abstract
The invention discloses a kind of vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus, including pedestal, cylindric side wall and head cover, the pedestal by top No. I pedestal shielded layer, No. II pedestal shielded layer at middle part, No. III pedestal shielded layer of lower layer stacks, the side wall by inside No. I side wall shielded layer, No. II side wall shielded layer at middle part, No. III side wall shielding interlamellar spacing brick work in outside forms, the head cover is by No. I head cover shielded layer from bottom to top, No. II head cover shielded layer, No. I buffer layer, No. III head cover shielded layer, No. II buffer layer is fixed by carbon carbon bolt, survey hole of thermocouple is formed in the pedestal, infrared measurement of temperature hole is formed in the head cover.Pedestal, side wall, cap structure and the material of the present invention uses in superhigh temperature, high vacuum and electromagnetic induction heating environment, effectively shields heat radiation, and reduce the pollution in environment, and structure of the invention is simpler, and easy processing is safeguarded.
Description
Technical field
The invention belongs to a kind of thermal shield apparatus, and in particular to a kind of vacuum electromagnetic sensing heating superhigh temperature heat shielding dress
It sets.
Background technology
During vacuum electromagnetic sensing heating, the electromagnetic field of alternation directly heats crucible or material, and setting adds
Hot heating rate is gradually warming up to required temperature.Under hot environment, heating object will produce a large amount of heat radiation, radiation
Amount of heat is directly proportional to the biquadratic of heating temperature.When heating temperature is 2300 DEG C or so of superhigh temperature, if without heat
Shielding, the environment temperature under heat radiation is very high, and hot environment brings adverse effect to miscellaneous equipment in vacuum furnace body and stove.And
Since heat radiation will produce huge energy loss, temperature is difficult to maintain.
When using electromagnetic induction heating, due to the metals type shielding materials conductive performance such as common tungsten, tantalum, molybdenum under high temperature
It is good, it can cause directly to heat shielding material autonomous induction, heat shield effect can not be played, and influence the electromagnetic induction of material
Heating effect, therefore metal group material cannot be used as shielding material.In pervious design, the heat safe graphite of generally use
Felt is as shielding material, but graphite felt, when higher than 2000 DEG C, saturated vapour pressure is higher, is easier to volatilize, this can to melting or
Evaporate material generate pollution, therefore graphite felt be applied to 2000 DEG C or less when it is preferable.To use at higher temperatures, in order to press down
The volatilization of graphite felt processed after vacuum degree is usually evacuated to pa magnitude, is passed through the gases such as nitrogen, argon gas to inhibit its volatilization, it is clear that
This does not meet the requirement of high vacuum, and can bring the negative effect of other aspects.Such as melting or the chemism of evaporation material
Height may react with the gas being passed through, and generate other materials, influence the purity of material;If application direction is to pass through electricity
Magnetic induction heats to evaporate material, and the gas being passed through can also inhibit the evaporation of material while inhibiting graphite felt volatilization, influence
Practical application effect.Therefore the high temperature that graphite felt shielded layer is only applicable under or inert atmosphere conditions not high to vacuum level requirements adds
Heat, and cannot be satisfied the electromagnetic induction heating under high vacuum condition.
Therefore, there is an urgent need to design it is a kind of can be in high vacuum, 2300 DEG C or so of superhigh temperature, electromagnetic induction heating environment
The thermal shield apparatus of application.
Invention content
The present invention proposes that the purpose is to provide a kind of vacuum electromagnetic sensing heating in order to solve the problems existing in the prior art
With superhigh temperature thermal shield apparatus.
The technical scheme is that:A kind of vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus, including pedestal, circle
The side wall and head cover of tubular, the pedestal is by No. I pedestal shielded layer at top, No. II pedestal shielded layer at middle part, lower layer
No. III pedestal shielded layer stacks, the side wall by No. I side wall shielded layer of inside, middle part No. II side wall shielded layer,
No. III side wall shielding interlamellar spacing brick work in outside forms, and the head cover is by No. I head cover shielded layer, No. II head cover from bottom to top
Shielded layer, No. I buffer layer, No. III head cover shielded layer, No. II buffer layer are fixed by carbon carbon bolt, are formed in the pedestal
Survey hole of thermocouple, forms infrared measurement of temperature hole in the head cover, described No. I pedestal shielded layer, No. I side wall shielded layer, No. I
Head cover shielded layer is made of heavy zirconia brick, described No. II pedestal shielded layer, No. II side wall shielded layer, No. II head cover shielding
Layer is made of Bubble zirconia brick, and described No. III pedestal shielded layer, No. III side wall shielded layer, No. III head cover shielded layer are by oxygen
Change aluminium hollow ball brick composition, described No. I buffer layer, No. II buffer layer are made of graphite felt, are additionally provided on the pedestal
The bearing platform being made of heavy zirconia brick.
No. I side wall shielded layer is by the heavy zirconia brick brick work of tiles at cylindrical shape.
No. I side wall shielded layer, No. II side wall shielded layer are arranged on pedestal, and No. I side wall shielded layer is axial
Height is less than the axial height of No. II side wall shielded layer.
The diameter of No. I head cover shielded layer is consistent with the outer diameter of No. I side wall shielded layer.
Pedestal, side wall, cap structure and the material of the present invention makes in superhigh temperature, high vacuum and electromagnetic induction heating environment
With improving performance of the device in electromagnetic induction heating, effectively shield heat radiation, and reduce in environment
Pollution, structure of the invention is simpler, and easy processing is safeguarded.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention;
Fig. 2 is present invention vacuum degree and temperature variations during electromagnetic induction heating;
Wherein:
1 pedestal, 2 side wall
The 3 pedestal shielded layers of head cover 4 I
5 No. II pedestal shielded layers, 6 No. III pedestal shielded layers
The 7 side wall shielded layers of bearing platform 8 I
9 No. II side wall shielded layers, 10 No. III side wall shielded layers
11 No. I head cover shielded layers, 12 No. II head cover shielded layers
13 No. I buffer layers, 14 No. III head cover shielded layers
15 No. II 16 survey hole of thermocouple of buffer layer
17 infrared measurement of temperature hole, 18 carbon carbon bolt.
Specific implementation mode
Hereinafter, with reference to drawings and examples, the present invention is described in detail:
As shown in Figure 1, a kind of vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus, including pedestal 1, cylindric side
Wall 2 and head cover 3, the pedestal 1 by No. I pedestal shielded layer 4 at top, No. II pedestal shielded layer 5 at middle part, No. III of lower layer
Pedestal shielded layer 6 stacks, the side wall 2 by No. I side wall shielded layer 8 of inside, middle part No. II side wall shielded layer 9,
The 10 spacing brick work of No. III side wall shielded layer in outside forms, and the head cover 3 is by No. I head cover shielded layer 11, II from bottom to top
Number 14, No. II buffer layers 15 of the head cover shielded layer of buffer layer 13, III of head cover shielded layer 12, I are by carbon carbon bolt 18 is fixed
At forming survey hole of thermocouple 16 in the pedestal 1, form infrared measurement of temperature hole 17, described No. I pedestal in the head cover 3
The head cover shielded layer 11 of side wall shielded layer 8, I of shielded layer 4, I is made of heavy zirconia brick, described No. II pedestal shielded layer
5,9, No. II head cover shielded layers 12 of No. II side wall shielded layer are made of Bubble zirconia brick, described No. III pedestal shielded layer 6,
10, No. III head cover shielded layers 14 of No. III side wall shielded layer are made of alumina bubble brick, described No. I buffer layer 13, II
Buffer layer 15 is made of graphite felt, and the bearing platform 7 being made of heavy zirconia brick is additionally provided on the pedestal 1.
No. I side wall shielded layer 8 is by the heavy zirconia brick brick work of tiles at cylindrical shape.
No. II side wall shielded layer 9 is by the Bubble zirconia brick brick work of tiles at cylindrical shape.
No. III side wall shielded layer 10 is by the alumina bubble brick brick work of tiles at cylindrical shape.
Between described 8, No. II side wall shielded layers 9 of No. I side wall shielded layer, 9, No. III side wall shieldings of No. II side wall shielded layer
Gap value between layer 10 is 5 ~ 10mm.
Described 8, No. II side wall shielded layers 9 of the side wall shielded layer of pedestal shielded layer 5, I of No. I pedestal shielded layer 4, II,
The thickness of No. III 12, No. III head cover shielded layers 14 of head cover shielded layer of head cover shielded layer 11, II of side wall shielded layer 10, I is
The thickness of 20mm, described No. III pedestal shielded layer 6 are 40mm.
Described 8, No. II side wall shielded layers 9 of No. I side wall shielded layer are arranged on pedestal 1, and No. I side wall shielded layer 8
Axial height is less than the axial height of No. II side wall shielded layer 9.So as to reserve installation space for No. I head cover shielded layer 11.
The diameter of No. I head cover shielded layer 11 is consistent with the outer diameter of No. I side wall shielded layer 8.
The thermocouple being arranged in survey hole of thermocouple 16 can directly measuring device temperature.
Infrared probe in infrared measurement of temperature hole 17 can carry out device contactless infrared measurement of temperature.
As shown in Fig. 2, it is 10~15 DEG C/min that heating rate is controlled in heating process, and when being warming up to 2300 DEG C, constant temperature 1
Hour, then stop heating, furnace cooling.When temperature is room temperature~1450 DEG C, using thermocouple temperature measurement, when temperature is higher than
At 1450 DEG C, thermometric is carried out using colorimetric infrared radiation thermometer, bold portion is temperature measurement result in Fig. 2.It is same in heating process
When vacuum degree is monitored, in Fig. 2 dotted portion be vacuum-degree monitoring result.The present apparatus is in 2300 DEG C of superhigh temperature and high vacuum
Under the conditions of, electromagnetic induction heating application effect is good.
Pedestal, side wall, cap structure and the material of the present invention makes in superhigh temperature, high vacuum and electromagnetic induction heating environment
With improving performance of the device in electromagnetic induction heating, effectively shield heat radiation, and reduce in environment
Pollution, structure of the invention is simpler, and easy processing is safeguarded.
Claims (4)
1. a kind of vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus, including pedestal(1), cylindric side wall(2)The top and
Lid(3), it is characterised in that:The pedestal(1)By No. I pedestal shielded layer at top(4), middle part No. II pedestal shielded layer
(5), lower layer No. III pedestal shielded layer(6)It stacks, the side wall(2)By No. I side wall shielded layer of inside(8), in
No. II side wall shielded layer in portion(9), outside No. III side wall shielded layer(10)Spacing brick work forms, the head cover(3)By certainly
No. I head cover shielded layer on down(11), No. II head cover shielded layer(12), No. I buffer layer(13), No. III head cover shielded layer
(14), No. II buffer layer(15)Pass through carbon carbon bolt(18)Fixation forms, the pedestal(1)Middle formation survey hole of thermocouple
(16), the head cover(3)Middle formation infrared measurement of temperature hole(17), No. I pedestal shielded layer(4), No. I side wall shielded layer
(8), No. I head cover shielded layer(11)It is made of heavy zirconia brick, described No. II pedestal shielded layer(5), No. II side wall shielding
Layer(9), No. II head cover shielded layer(12)It is made of Bubble zirconia brick, described No. III pedestal shielded layer(6), No. III side wall
Shielded layer(10), No. III head cover shielded layer(14)It is made of alumina bubble brick, described No. I buffer layer(13), No. II it is slow
Rush layer(15)It is made of graphite felt, the pedestal(1)On be additionally provided with the bearing platform being made of heavy zirconia brick(7).
2. vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus according to claim 1, it is characterised in that:Described
No. I side wall shielded layer(8)By the heavy zirconia brick brick work of tiles at cylindrical shape.
3. vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus according to claim 1, it is characterised in that:Described
No. I side wall shielded layer(8), No. II side wall shielded layer(9)It is arranged at pedestal(1)On, and No. I side wall shielded layer(8)It is axial high
Degree is less than No. II side wall shielded layer(9)Axial height.
4. vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus according to claim 1, it is characterised in that:Described
No. I head cover shielded layer(11)Diameter and No. I side wall shielded layer(8)Outer diameter it is consistent.
Priority Applications (1)
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CN201610215357.0A CN105704852B (en) | 2016-04-08 | 2016-04-08 | Vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus |
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CN201610215357.0A CN105704852B (en) | 2016-04-08 | 2016-04-08 | Vacuum electromagnetic sensing heating superhigh temperature thermal shield apparatus |
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CN105704852A CN105704852A (en) | 2016-06-22 |
CN105704852B true CN105704852B (en) | 2018-10-02 |
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CN108977668A (en) * | 2018-06-20 | 2018-12-11 | 核工业理化工程研究院 | The heat shield structure of atom vapor |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE02290769T1 (en) * | 2001-03-06 | 2004-07-08 | Celes | Vacuum and gas-tight container for the thermal insulation of induction heating devices |
CN201178496Y (en) * | 2008-03-28 | 2009-01-07 | 郝随江 | High-efficient heating body |
CN105119162A (en) * | 2015-09-08 | 2015-12-02 | 国网山东沂南县供电公司 | Power distribution box with novel shell structure |
CN205648045U (en) * | 2016-04-08 | 2016-10-12 | 核工业理化工程研究院 | Vacuum electromagnetic induction heating is with warm shield assembly of superelevation |
-
2016
- 2016-04-08 CN CN201610215357.0A patent/CN105704852B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE02290769T1 (en) * | 2001-03-06 | 2004-07-08 | Celes | Vacuum and gas-tight container for the thermal insulation of induction heating devices |
CN201178496Y (en) * | 2008-03-28 | 2009-01-07 | 郝随江 | High-efficient heating body |
CN105119162A (en) * | 2015-09-08 | 2015-12-02 | 国网山东沂南县供电公司 | Power distribution box with novel shell structure |
CN205648045U (en) * | 2016-04-08 | 2016-10-12 | 核工业理化工程研究院 | Vacuum electromagnetic induction heating is with warm shield assembly of superelevation |
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