CN1056937C - 无需母片为媒介的制造光盘的型片的方法 - Google Patents

无需母片为媒介的制造光盘的型片的方法 Download PDF

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Publication number
CN1056937C
CN1056937C CN95102747A CN95102747A CN1056937C CN 1056937 C CN1056937 C CN 1056937C CN 95102747 A CN95102747 A CN 95102747A CN 95102747 A CN95102747 A CN 95102747A CN 1056937 C CN1056937 C CN 1056937C
Authority
CN
China
Prior art keywords
photoresist film
unshaped
matrix
added
template
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN95102747A
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English (en)
Chinese (zh)
Other versions
CN1121240A (zh
Inventor
M·E·鲁曼-休斯肯
A·T·范德普拉特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Singulus Mastering BV
Original Assignee
ODME International BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ODME International BV filed Critical ODME International BV
Publication of CN1121240A publication Critical patent/CN1121240A/zh
Application granted granted Critical
Publication of CN1056937C publication Critical patent/CN1056937C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
CN95102747A 1994-02-14 1995-02-14 无需母片为媒介的制造光盘的型片的方法 Expired - Fee Related CN1056937C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9400225A NL9400225A (nl) 1994-02-14 1994-02-14 Werkwijze voor het zonder tussenkomst van een master vervaardigen van een stamper voor het voortbrengen van optische schijven.
NL9400225 1994-02-14

Publications (2)

Publication Number Publication Date
CN1121240A CN1121240A (zh) 1996-04-24
CN1056937C true CN1056937C (zh) 2000-09-27

Family

ID=19863833

Family Applications (1)

Application Number Title Priority Date Filing Date
CN95102747A Expired - Fee Related CN1056937C (zh) 1994-02-14 1995-02-14 无需母片为媒介的制造光盘的型片的方法

Country Status (11)

Country Link
US (1) US6159664A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0667608B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP3636387B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100336105B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN1056937C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AT (1) ATE187010T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69513424T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ES (1) ES2140613T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL9400225A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SG (1) SG52782A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW279978B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1300792C (zh) * 2004-03-15 2007-02-14 周照耀 信息记录薄膜材料及其制备方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19653078A1 (de) * 1996-12-19 1998-06-25 Trace Optical Leitstrukturen in optischen Speichermedien
SE9703479D0 (sv) * 1997-06-02 1997-09-25 Toolex Alpha Ab Stamper
SE9703480D0 (sv) * 1997-07-16 1997-09-25 Toolex Alpha Ab Stamper and method of manufacturing the same
NL1007216C2 (nl) * 1997-10-07 1999-04-08 Od & Me Bv Werkwijze voor het vervaardigen van een stamper voor het voortbrengen van optische schijven, aldus verkregen stamper en optische schijf verkregen onder toepassing van een dergelijke stamper.
NL1009106C2 (nl) * 1998-05-08 1999-11-09 Od & Me Bv Werkwijze voor het vervaardigen van een stamper, stamper verkregen volgens een dergelijke werkwijze alsmede optische schijf verkregen onder toepassing van een dergelijke stamper.
DE19919764A1 (de) * 1999-04-29 2000-11-02 Innovators Ag Neuhausen Am Rhe Herstellung eienr Preßform für Compact Discs
JP3104699B1 (ja) * 1999-06-01 2000-10-30 株式会社ニコン 細溝付き成形基板の製造方法
FR2809532B1 (fr) * 2000-05-23 2003-09-26 St Microelectronics Sa Procede de fabrication de circuits semiconducteurs double face
NL1015524C2 (nl) * 2000-06-26 2001-12-28 Otb Group Bv Werkwijze ter vervaardiging van een substraat om te worden toegepast in een stampervervaardigingsproces, alsmede substraat verkregen volgens een dergelijke werkwijze.
JP2002096334A (ja) * 2000-09-25 2002-04-02 Nippon Columbia Co Ltd スタンパの製造方法
JP3592678B2 (ja) 2002-02-27 2004-11-24 松下電器産業株式会社 ブランク盤の製造方法とダイレクトスタンパーの製作方法
ITTO20011038A1 (it) * 2001-10-30 2003-04-30 St Microelectronics Srl Procedimento per la fabbricazione di una fetta semiconduttrice integrante dispositivi elettronici e una struttura per il disaccoppiamento el
CN100386807C (zh) * 2003-09-18 2008-05-07 周照耀 圆片上集成电路图案的制作方法及其应用
US20050151283A1 (en) * 2004-01-08 2005-07-14 Bajorek Christopher H. Method and apparatus for making a stamper for patterning CDs and DVDs
TWI298522B (en) * 2004-01-13 2008-07-01 Hon Hai Prec Ind Co Ltd A manufacturing method of a cavity
US20060115789A1 (en) * 2004-11-26 2006-06-01 Wishart Kenneth D Self-approximating intraoral
US20100086880A1 (en) * 2007-01-17 2010-04-08 Sony Corporation Developing solution and method for production of finely patterned material

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60251537A (ja) * 1984-05-25 1985-12-12 Fujitsu Ltd 光デイスク用原盤の製造方法
EP0490547A1 (en) * 1990-11-30 1992-06-17 Sharp Kabushiki Kaisha Method of manufacturing a photomask for an optical memory

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3832176A (en) * 1973-04-06 1974-08-27 Eastman Kodak Co Novel photoresist article and process for its use
US4164754A (en) * 1974-07-16 1979-08-14 Thomson-Brandt Method of manufacturing a die designed to duplicate a video frequency signal recording
FR2278474A1 (fr) * 1974-07-16 1976-02-13 Thomson Brandt Procede de fabrication d'une matrice destinee a la duplication d'un enregistrement de signaux en videofrequence, et matrice ainsi obtenue
JPS57172548A (en) * 1981-04-17 1982-10-23 Toshiba Corp Original disk for medium for reproducing stored information
US4650735A (en) * 1982-10-14 1987-03-17 U.S. Philips Corporation Method of manufacturing a metal matrix and an intermediate product obtained in performing the method
JPS6045956A (ja) * 1983-08-20 1985-03-12 Dainippon Screen Mfg Co Ltd 光ディスク原盤作成方法
JPS60256947A (ja) * 1984-06-01 1985-12-18 Hitachi Ltd スタンパ作製方法
JPS6168746A (ja) * 1984-09-04 1986-04-09 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 光学記憶デイスクを製造するためのモ−ルド・インサ−トを形成する方法
US4724043A (en) * 1984-09-04 1988-02-09 International Business Machines Corporation Process for forming a master mold for optical storage disks
US4729940A (en) * 1986-05-16 1988-03-08 Cbs Inc. Method of manufacturing master for optical information carrier
US5156936A (en) * 1989-09-19 1992-10-20 U.S. Philips Corporation Contact device for the photocathode of photoelectric tubes and manufacturing method
JP2868682B2 (ja) * 1992-05-15 1999-03-10 シャープ株式会社 光ディスク
FR2701151B1 (fr) * 1993-02-03 1995-03-10 Digipress Sa Procédé de fabrication d'une matrice de pressage, notamment pour la réalisation de disques optiques, matrice de pressage obtenue par ce procédé et produit, tel que disque optique, obtenu à partir de cette matrice de pressage.
US5407787A (en) * 1993-04-14 1995-04-18 The United States Of America As Represented By The Secretary Of The Navy Process to fabricate thick coplanar microwave electrode structures

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60251537A (ja) * 1984-05-25 1985-12-12 Fujitsu Ltd 光デイスク用原盤の製造方法
EP0490547A1 (en) * 1990-11-30 1992-06-17 Sharp Kabushiki Kaisha Method of manufacturing a photomask for an optical memory

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1300792C (zh) * 2004-03-15 2007-02-14 周照耀 信息记录薄膜材料及其制备方法

Also Published As

Publication number Publication date
JPH07326077A (ja) 1995-12-12
CN1121240A (zh) 1996-04-24
ATE187010T1 (de) 1999-12-15
EP0667608A1 (en) 1995-08-16
DE69513424T2 (de) 2000-03-23
DE69513424D1 (de) 1999-12-30
ES2140613T3 (es) 2000-03-01
HK1003736A1 (en) 1998-11-06
TW279978B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1996-07-01
JP3636387B2 (ja) 2005-04-06
US6159664A (en) 2000-12-12
NL9400225A (nl) 1995-09-01
KR950034137A (ko) 1995-12-26
KR100336105B1 (ko) 2002-11-27
SG52782A1 (en) 1998-09-28
EP0667608B1 (en) 1999-11-24

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: OTB GROUP B V

Free format text: FORMER OWNER: ODME INTERNATIONAL B.V.

Effective date: 20030627

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20030627

Address after: Holland Ian Deho Finn

Patentee after: OTB Group B V

Address before: Holland HOFEN feld

Patentee before: Odme International B.V.

ASS Succession or assignment of patent right

Owner name: SINGLE CONTROL CO., LTD.

Free format text: FORMER OWNER: OTB GROUP B V

Effective date: 20041029

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20041029

Address after: Holland Ian Deho Finn

Patentee after: Singulus Mastering B. V.

Address before: Holland Ian Deho Finn

Patentee before: OTB Group B V

C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20000927

Termination date: 20110214