CN105629675A - Vector arc stage switching method and device for double hexagon magnetic steel layout-based dynamic magnetic steel type magnetic levitation workpiece stages - Google Patents
Vector arc stage switching method and device for double hexagon magnetic steel layout-based dynamic magnetic steel type magnetic levitation workpiece stages Download PDFInfo
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- CN105629675A CN105629675A CN201610023025.2A CN201610023025A CN105629675A CN 105629675 A CN105629675 A CN 105629675A CN 201610023025 A CN201610023025 A CN 201610023025A CN 105629675 A CN105629675 A CN 105629675A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Abstract
The invention provides a vector arc stage switching method and device for double hexagon magnetic steel layout-based dynamic magnetic steel type magnetic levitation workpiece stages, and belongs to a semiconductor manufacturing equipment technology. The device comprises a support frame, a balance mass block, magnetic levitation workpiece stages, a workpiece stage measurement device and a workpiece stage drive device, wherein the two workpiece stages work between a measurement station and an exposure station; the positions of the workpiece stages are measured by laser interferometers; the workpiece stages are driven by dynamic magnetic steel type magnetic levitation planar motors with a hexagon magnetic steel layout; and the two workpiece stages are driven by the planar motors to achieve single-beat arc fast stage switching in the double workpiece stage switching process. According to the vector arc stage switching method and device, the problems that an existing stage switching scheme has multiple beats, a long track, multiple starting and stopping beats, long stabilization time and the like are solved; the stage switching link is reduced; the stage switching time is shortened; and the productivity of a lithography machine is improved.
Description
Technical field
The invention belongs to semiconductor manufacturing equipment technical field, relate generally to based on the floating double-workpiece-table vector circular arc revolution channel switching method of a kind of dynamic magnet steel magnetic based on hexagon magnet steel layout and device.
Background technology
Litho machine is one of ultraprecise equipment important during great scale integrated circuit manufactures. Work stage as litho machine key subsystem determines the resolution of litho machine, alignment precision and productivity to a great extent.
Productivity is mainly one of pursuing a goal of litho machine development. When meeting resolution and alignment precision, improve work stage operational efficiency and then improve the developing direction that litho machine productivity is work stage technology. Improving the work stage the most direct mode of operational efficiency is exactly improve acceleration of motion and the speed of work stage, but for ensureing original precision, speed and acceleration can not unrestrictedly improve. Initial work stage only one of which silicon wafer carrying device, litho machine once can only process a silicon chip, and whole operation serial process, production efficiency is low. Dual-stage technology is proposed for this, this is also the mainstream technology means improving litho machine production efficiency at present. Dual-stage technology is provided with exposure, two stations of pretreatment and two work stage in work stage, exposure and measure adjustment can parallel processing, substantially reduce the time, improve production efficiency. Current representative products is the ASML company of the Holland litho machine based on Twinscan technology and dual-stage technology.
The operational efficiency of raising double-workpiece-table is one of developing goal of current photo-etching machine work-piece platform technology. Dual-stage technology involve the problem that work stage switches between two stations, zapping efficiency directly influences the operational efficiency of photo-etching machine work-piece platform and the productivity of litho machine. How to reduce zapping when shortening the zapping time as far as possible and the interference of other system is always up the emphasis of research. In tradition dual stage handoff procedure, work stage is the same with in pretreatment process in exposure is linear drives, in dual stage patent US2001/0004105A1 and W098/40791, each work stage has the unit of two commutative cooperations to realize the exchange of dual stage, productivity is improve under the premise not improving work stage movement velocity, but owing to adopting the mode that is of coupled connections between work stage and guide rail, in zapping process, work stage there will be of short duration separating with driver element, and the positioning precision of work stage is produced considerable influence. Moving cell and guide rail are longer simultaneously, and moving-mass is relatively big, and the raising for movement velocity and acceleration all has a negative impact. Chinese patent CN101609265 proposes the silicon slice platform multi-platform exchange system that a kind of planar motor drives, and planar motor stator is arranged on base station top, and mover is arranged on bottom silicon wafer stage, drives the separation being absent from work stage and driver element relative to linear electric motors; Chinese patent CN101694560 proposes a kind of double-platform switching system adopting air supporting to support permanent-magnet planar motor driving, work stage adopts planar motor drive and supported by air supporting, avoid driver element and work stage separation problem in aforementioned zapping process, reduce work stage running resistance, reduce planar motor and drive electric current, reduce heat dissipation problem.
Adopting straight line zapping scheme during above-mentioned patent zapping, revolution zapping scheme relatively straight line zapping scheme has unique advantage, therefore occurs in that the dual-stage technology adopting revolution zapping. Chinese patent CN101071275 adopts the mode turning round whole base station to realize the transposition of double-workpiece-table, simplifies system structure, two work stage are moved non-overlapping regions simultaneously, it is to avoid collision safety hidden danger. But realizing work stage transposition by turning round whole base station to there is rotary inertia big, high-power turning motor precision positioning difficulty and caloric value cause greatly the problems such as system temperature rise, and the radius of gyration is big, makes litho machine main machine structure enlarge markedly simultaneously. Chinese patent CN102495528 adopts at base station center one to turn round through position and completes double-workpiece-table zapping, and zapping is divided into three beats, improves zapping efficiency, but revolution zapping mechanism structure is complicated, and revolution positioning precision is relatively low.
The Lorentz force that planar motor is produced in permanent magnet array air-gap field by hot-wire coil provides driving force and support force, adopts permanent magnet array as the levitation planar motor of mover, has and disturb without cable, adapts to the feature of vacuum working environment. Along with the requirement that grand dynamic planar motor speed, acceleration are improved, it is necessary to improve constantly the magnetic induction between air gap.
Summary of the invention
For above-mentioned the deficiencies in the prior art, the present invention proposes the floating double-workpiece-table vector circular arc revolution channel switching method of dynamic magnet steel magnetic and the device of a kind of hexagon magnet steel layout, reaches to realize work stage single-unit and claps quick camber line zapping, reduces zapping link, shortens the zapping time, is effectively increased the purpose of litho machine productivity.
The object of the present invention is achieved like this:
A kind of floating double-workpiece-table vector circular arc channel switching method of dynamic magnet steel magnetic deforming magnet steel arrangement based on six, the method comprises the following steps: original operating state, measures position the first work stage and is in prealignment state, and exposure position second workpiece platform is in exposure status, the first step, by dynamic magnet steel actuation movement to measuring position zapping precalculated position A and charging and wait after the first work stage prealignment of measurement position, exposes after position second workpiece platform exposes by dynamic magnet steel actuation movement to exposure precalculated position, position C, second step, first work stage and second workpiece platform by planar motor vector controlled along arc track counterclockwise movement, in motor process, the phase place of two work stage does not change, movement position is measured by interferometer, when the first work stage is by moving magnet steel actuation movement to exposure precalculated position, position C, second workpiece platform by moving magnet steel actuation movement to when measuring precalculated position, position D, zapping terminates, first work stage carries out silicon chip photolithographic exposure in exposure position, and second workpiece platform carries out silicon chip upper slice and wafer pre-alignment operation in measurement position, 3rd step, by dynamic magnet steel actuation movement to measuring position zapping precalculated position A' and charging and wait after the second workpiece platform prealignment of measurement position, exposes after position the first work stage exposes by dynamic magnet steel actuation movement to exposure precalculated position, position C, 4th step, second workpiece platform and the first work stage by planar motor vector controlled along arc track clockwise movement, when second workpiece platform is by moving magnet steel actuation movement to exposing precalculated position, position C, first work stage is by moving magnet steel actuation movement to when measuring precalculated position, position D, zapping terminates, exposure position second workpiece platform enters exposure status, measure position the first work stage and carry out fluctuating plate and prealignment operation, now system returns to original operating state, complete the working cycle comprising twice zapping operation, measuring, exposure and zapping process adopt wireless communication mode complete.
A kind of dynamic magnet steel magnetic based on hexagon magnet steel layout floats double-workpiece-table vector circular arc programme changer, this device includes supporting framework, balance mass block, first work stage, second workpiece platform, wireless charging emitter, described balance mass block is positioned at above support framework, grand dynamic planar motor stator is arranged in the plane on balance mass block, first work stage and second workpiece platform are arranged in above grand dynamic planar motor stator, described first work stage and second workpiece platform run between measurement position and exposure position, bracing frame is fixing on the support frame, 6 interferometers are arranged on bracing frame, first work stage and second workpiece platform are six-freedom-degree magnetic suspension jiggle station, described six-freedom-degree magnetic suspension jiggle station is by Chuck, sucker, pyramid corner angle, crashproof frame, grand dynamic planar motor rotor, null pick-up, leveling and focusing sensor, wireless charging receptor, wireless communication transceiver forms, described fine motion motor is integrated by fine motion planar motor rotor and gravity compensator mover and constitutes, described sucker is arranged on Chuck, Chuck surrounding is provided with four pyramid corner angle, Chuck surrounding is provided with crashproof frame, described grand dynamic planar motor rotor is arranged on below crashproof frame, grand dynamic planar motor rotor is made up of magnetic steel array, the hexagonal layout of described magnetic steel array, grand dynamic planar motor stator is that herringbone arrangement is constituted by coil array.
The present invention has following innovative point and outstanding advantages:
1) the circular arc vector zapping scheme proposed can effectively shorten the zapping time, improves zapping efficiency. Adopting vector zapping strategy that existing for double-workpiece-table many beats straight line zapping is optimized for single-unit and clap fast channel switching, start-stop number of times is few, stable element is few; Adopting arc trajectory planning to shorten zapping path, revolution impact is little, stabilization time is short, and this is one of the innovative point and outstanding advantages of the present invention simultaneously;
2) the dynamic magnet steel levitation planar motor based on hexagon magnet steel layout proposed, recombination current driving is adopted to realize high effect vector controlled, have that range of movement is big, pushing force density is big, dynamic characteristic is good, winding utilization is high, the feature such as uniformity of temperature profile, thermal deformation are little, adopt dynamic magnet steel driving, wireless data transmission simultaneously, fetter without cable, simple in construction, positioning precision is high, and this is the two of the innovative point of the present invention and outstanding advantages;
3) propose the work stage switching method without cable interference of wireless energising and radio communication, and devise the double workpiece platform device of wireless energising and radio communication. This device is on the basis that the floating magnetic of magnetic drives, adopt wireless energising and transmission of wireless signals mode, realize being wirelessly transferred and controlling of two micropositioner power supplys and communication signal, make compact overall structure, prior it is a cancellation cable and the signal cable disturbance impact on double-workpiece-table positioning precision, it is achieved that wireless power, the transmission of wireless communication data and fetter without cable. This is the three of the innovative point of the present invention and outstanding advantages.
Accompanying drawing explanation
Fig. 1 is that single-unit claps optimization planning camber line fast channel switching schematic flow sheet.
Fig. 2 is based on the floating double-workpiece-table vector circular arc programme changer population structure schematic diagram of dynamic magnet steel magnetic of hexagon magnet steel layout.
Fig. 3 is the sectional view of double-workpiece-table system.
Fig. 4 is six-freedom-degree magnetic suspension jiggle station structural representation.
Fig. 5 is fine motion planar motor rotor and gravity compensator integrated mechanism schematic diagram.
Fig. 6 is the grand firm array arrangement schematic diagram of dynamic planar motor rotor magnetic.
Fig. 7 is grand dynamic planar motor stator coil array arrangement schematic diagram.
Piece number in figure: 1-supports framework; 2-balance mass system; The grand dynamic planar motor stator of 3-; 4a-the first work stage; 4b-second workpiece platform; 5-interferometer; 10-bracing frame; 11-measures position; 12-exposes position; 401-Chuck; 402-sucker; 403-pyramid corner angle; The crashproof frame of 404-; The grand dynamic planar motor rotor of 405-; 406-null pick-up; 407-leveling and focusing sensor; 408-fine motion planar motor rotor; 409-gravity compensator mover; 411-magnetic steel array; 412-coil array; 413-wireless charging receptor; 414-wireless communication transceiver.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
A kind of floating double-workpiece-table vector circular arc channel switching method of dynamic magnet steel magnetic deforming magnet steel arrangement based on six, the method comprises the following steps: original operating state, measures position the first work stage and is in prealignment state, and exposure position second workpiece platform is in exposure status, the first step, by dynamic magnet steel actuation movement to measuring position zapping precalculated position A and charging and wait after the first work stage prealignment of measurement position, exposes after position second workpiece platform exposes by dynamic magnet steel actuation movement to exposure precalculated position, position C, second step, first work stage and second workpiece platform by planar motor vector controlled along arc track counterclockwise movement, in motor process, the phase place of two work stage does not change, movement position is measured by interferometer, when the first work stage is by moving magnet steel actuation movement to exposure precalculated position, position C, second workpiece platform by moving magnet steel actuation movement to when measuring precalculated position, position D, zapping terminates, first work stage carries out silicon chip photolithographic exposure in exposure position, and second workpiece platform carries out silicon chip upper slice and wafer pre-alignment operation in measurement position, 3rd step, by dynamic magnet steel actuation movement to measuring position zapping precalculated position A' and charging and wait after the second workpiece platform prealignment of measurement position, exposes after position the first work stage exposes by dynamic magnet steel actuation movement to exposure precalculated position, position C, 4th step, second workpiece platform and the first work stage by planar motor vector controlled along arc track clockwise movement, when second workpiece platform is by moving magnet steel actuation movement to exposing precalculated position, position C, first work stage is by moving magnet steel actuation movement to when measuring precalculated position, position D, zapping terminates, exposure position second workpiece platform enters exposure status, measure position the first work stage and carry out fluctuating plate and prealignment operation, now system returns to original operating state, complete the working cycle comprising twice zapping operation, measuring, exposure and zapping process adopt wireless communication mode complete.
A kind of dynamic magnet steel magnetic based on hexagon magnet steel layout floats double-workpiece-table vector circular arc programme changer, this device includes supporting framework 1, balance mass block 2, first work stage 4a, second workpiece platform 4b, wireless charging emitter 30, described balance mass block 2 is positioned at above support framework 1, grand dynamic planar motor stator 3 is arranged in the plane on balance mass block 2, first work stage 4a and second workpiece platform 4b is arranged in above grand dynamic planar motor stator 3, described first work stage 4a and second workpiece platform 4b runs between measurement position 11 and exposure position 12, bracing frame 10 is fixed on support framework 1, 6 interferometers 5 are arranged on bracing frame 10, first work stage 4a and second workpiece platform 4b is six-freedom-degree magnetic suspension jiggle station, described six-freedom-degree magnetic suspension jiggle station is by Chuck401, sucker 402, pyramid corner angle 403, crashproof frame 404, grand dynamic planar motor rotor 405, null pick-up 406, leveling and focusing sensor 407, wireless charging receptor 413, wireless communication transceiver 414 forms, described fine motion motor 403 is integrated by fine motion planar motor rotor 408 and gravity compensator mover 409 and constitutes, described sucker 402 is arranged on Chuck401, Chuck401 surrounding is provided with four pyramid corner angle 403, Chuck401 surrounding is provided with crashproof frame 404, described grand dynamic planar motor rotor 405 is arranged on below crashproof frame 404, grand dynamic planar motor rotor 405 is made up of magnetic steel array 411, the described hexagonal layout of magnetic steel array 411, by coil array 412, in herringbone, arrangement is constituted grand dynamic planar motor stator 3.
Workflow of the present invention is as follows:
First work stage 4a after measuring position 11 prealignment by the dynamic actuation movement of planar motor to zapping position A, wait that second workpiece platform 4b completes exposure in exposure position 12, second workpiece platform 4b completes after exposure by planar motor actuation movement to zapping position B, and then the first work stage 4a and second workpiece platform 4b complete zapping by planar motor vector controlled along arc track counterclockwise movement and operate; After zapping completes, the first work stage 4a to exposure position 12 move exposure position 12 be exposed, second workpiece platform 4b to measure position 11 move measure position 11 carry out upper slice and prealignment operation; The complete second workpiece platform 4b of wafer pre-alignment that taken the lead in moves to measurement zapping position, position A', wait that the first work stage 4a moves to zapping position B' after completing exposure, then, second workpiece platform 4b and the first work stage 4a along arc track clockwise movement, completes second time zapping by planar motor vector controlled; After zapping completes, the first work stage 4a moves to measuring position 11, and second workpiece platform 4b moves to exposure position 12, so completes once the complete working cycle.
Claims (2)
1. the floating double-workpiece-table vector circular arc channel switching method of dynamic magnet steel magnetic deforming magnet steel arrangement based on six, it is characterized in that the method comprises the following steps: original operating state, measuring position the first work stage and be in prealignment state, exposure position second workpiece platform is in exposure status, the first step, by dynamic magnet steel actuation movement to measuring position zapping precalculated position A and charging and wait after the first work stage prealignment of measurement position, exposes after position second workpiece platform exposes by dynamic magnet steel actuation movement to exposure precalculated position, position C, second step, first work stage and second workpiece platform by planar motor vector controlled along arc track counterclockwise movement, in motor process, the phase place of two work stage does not change, movement position is measured by interferometer, when the first work stage is by moving magnet steel actuation movement to exposure precalculated position, position C, second workpiece platform by moving magnet steel actuation movement to when measuring precalculated position, position D, zapping terminates, first work stage carries out silicon chip photolithographic exposure in exposure position, and second workpiece platform carries out silicon chip upper slice and wafer pre-alignment operation in measurement position, 3rd step, by dynamic magnet steel actuation movement to measuring position zapping precalculated position A' and charging and wait after the second workpiece platform prealignment of measurement position, exposes after position the first work stage exposes by dynamic magnet steel actuation movement to exposure precalculated position, position C, 4th step, second workpiece platform and the first work stage by planar motor vector controlled along arc track clockwise movement, when second workpiece platform is by moving magnet steel actuation movement to exposing precalculated position, position C, first work stage is by moving magnet steel actuation movement to when measuring precalculated position, position D, zapping terminates, exposure position second workpiece platform enters exposure status, measure position the first work stage and carry out fluctuating plate and prealignment operation, now system returns to original operating state, complete the working cycle comprising twice zapping operation, measuring, exposure and zapping process adopt wireless communication mode complete.
2. the floating double-workpiece-table vector circular arc programme changer of the dynamic magnet steel magnetic based on hexagon magnet steel layout, it is characterized in that this device includes supporting framework (1), balance mass block (2), first work stage (4a), second workpiece platform (4b), wireless charging emitter (30), described balance mass block (2) is positioned at support framework (1) top, grand dynamic planar motor stator (3) is arranged in the plane on balance mass block (2), first work stage (4a) and second workpiece platform (4b) are arranged in grand dynamic planar motor stator (3) top, described first work stage (4a) and second workpiece platform (4b) run between measurement position (11) and exposure position (12), bracing frame (10) is fixed in support framework (1), 6 interferometers (5) are arranged on bracing frame (10), first work stage (4a) and second workpiece platform (4b) are six-freedom-degree magnetic suspension jiggle station, described six-freedom-degree magnetic suspension jiggle station is by Chuck(401), sucker (402), pyramid corner angle (403), crashproof frame (404), grand dynamic planar motor rotor (405), null pick-up (406), leveling and focusing sensor (407), wireless charging receptor (413), wireless communication transceiver (414) forms, described fine motion motor (403) is integrated by fine motion planar motor rotor (408) and gravity compensator mover (409) and constitutes, described sucker (402) is arranged on Chuck(401) on, Chuck(401) surrounding is provided with four pyramid corner angle (403), Chuck(401) surrounding is provided with crashproof frame (404), described grand dynamic planar motor rotor (405) is arranged on crashproof frame (404) lower section, grand dynamic planar motor rotor (405) is made up of magnetic steel array (411), described magnetic steel array (411) hexagonal layout, grand dynamic planar motor stator (3) is arranged in herringbone by coil array (412) and is constituted.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10503081B2 (en) | 2017-03-27 | 2019-12-10 | Boe Technology Group Co., Ltd. | Carrying platform and exposure method |
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| US10503081B2 (en) | 2017-03-27 | 2019-12-10 | Boe Technology Group Co., Ltd. | Carrying platform and exposure method |
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Application publication date: 20160601 |