CN105624635A - Automatic adjusting device for anode cap for vacuum coating - Google Patents
Automatic adjusting device for anode cap for vacuum coating Download PDFInfo
- Publication number
- CN105624635A CN105624635A CN201410621527.6A CN201410621527A CN105624635A CN 105624635 A CN105624635 A CN 105624635A CN 201410621527 A CN201410621527 A CN 201410621527A CN 105624635 A CN105624635 A CN 105624635A
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- CN
- China
- Prior art keywords
- anode cap
- ball screw
- guide rail
- baffle plate
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention relates to an automatic adjusting device for an anode cap for vacuum coating. The automatic adjusting device comprises the anode cap; a guide rail is arranged at one end of the anode cap; a baffle is arranged on the guide rail and does rectilinear motion on the guide rail; a ball screw is arranged at the middle part of one side of the baffle; a stepping motor is arranged at the end part of the ball screw; a vacuum box body is arranged on the ball screw; a magnetic fluid sealing device is arranged at the joint of the vacuum box body and the ball screw. The automatic adjusting device disclosed by the invention is capable of freely adjusting the coating thickness and greatly improving the work efficiency, simple in structure, few in mechanical faults and long in service life.
Description
Technical field
The present invention relates to a kind of coating film thickness and regulate device, be specifically related to a kind of coating film thickness self-checking device.
Background technology
Existing vacuum coater structure is complicated, and manufacturing cost is higher, in actual use, it is easy to there was a mechanical failure, it is necessary to personnel's periodic maintenance, and most importantly, in coating process, coating film thickness can not freely regulate, and work efficiency is relatively low.
Summary of the invention
Goal of the invention: the invention aims to overcome deficiency of the prior art, it is provided that a kind of coating film thickness can freely regulate, and work efficiency is greatly improved, simple in construction, and mechanical breakdown is few, the vacuum coating of long service life anode cap self-checking device.
Technical scheme: in order to solve above-mentioned technical problem, a kind of vacuum coating anode cap self-checking device of the present invention, it includes anode cap, it is provided with guide rail in described anode cap one end, described guide rail is provided with baffle plate, described baffle plate is for linear motion on guide rail, it is provided with ball screw at described baffle plate one middle side part, it is provided with motor in described ball screw end, described ball screw is provided with vacuum chamber, is provided with device for sealing magnetic fluid in the junction of described vacuum chamber Yu ball screw.
Described baffle plate is titanium alloy baffle plate.
Described anode cap is provided with plasma emission window.
The side of described vacuum chamber is atmospheric side, and opposite side is inlet side, and described device for sealing magnetic fluid is arranged on the atmospheric side of vacuum tank.
The present invention regulates kinetic energy from atmosphere end to vacuum end by motor and device for sealing magnetic fluid, reciprocating on guide rail in the horizontal direction by ball screw drive titanium alloy baffle plate again, thus the purpose having reached to regulate plasma anode cap window size controls the yield size of sputter plasma to regulate plated film thicknesses of layers.
Beneficial effect: the present invention is compared with prior art, it has the remarkable advantages that: overall structure of the present invention is simple, adopting guide rail and be located at the titanium alloy baffle plate on guide rail, it is possible to being used for controlling the size of the plasma emission window of anode cap, thus realizing freely regulating of coating film thickness, adopt motor, device for sealing magnetic fluid and ball screw, realizing freely accurately regulating of baffle plate, be greatly improved work efficiency, this device for mechanical fault is few, long service life, meets actual operation requirements.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is further illustrated.
As shown in Figure 1, a kind of vacuum coating anode cap self-checking device of the present invention, it includes anode cap 1, it is provided with guide rail 2 in described anode cap 1 one end, described guide rail 2 is provided with baffle plate 3, described baffle plate 3 is for linear motion on guide rail 2, it is provided with ball screw 4 at described baffle plate 3 one middle side part, it is provided with motor 5 in described ball screw 4 end, described ball screw 4 is provided with vacuum chamber 6, is provided with device for sealing magnetic fluid 7 in the junction of described vacuum chamber 6 with ball screw 4; Described baffle plate 3 is titanium alloy baffle plate; Described anode cap 1 is provided with plasma emission window 8; The side of described vacuum chamber 6 is atmospheric side, and opposite side is inlet side, and described device for sealing magnetic fluid 7 is arranged on the atmospheric side of vacuum tank 6. Overall structure of the present invention is simple, adopt guide rail and be located at the titanium alloy baffle plate on guide rail, can be used to control the size of the plasma emission window of anode cap, thus realizing freely regulating of coating film thickness, adopt motor, device for sealing magnetic fluid and ball screw, it is achieved freely accurately regulating of baffle plate, it is greatly improved work efficiency, this device for mechanical fault is few, and long service life meets actual operation requirements.
The invention provides a kind of thinking and method; the method and the approach that implement this technical scheme are a lot; the above is only the preferred embodiment of the present invention; should be understood that; for those skilled in the art, under the premise without departing from the principles of the invention, it is also possible to make some improvements and modifications; these improvements and modifications also should be regarded as protection scope of the present invention, and all available prior art of each ingredient not clear and definite in the present embodiment is realized.
Claims (4)
1. a vacuum coating anode cap self-checking device, it is characterized in that: it includes anode cap (1), it is provided with guide rail (2) in described anode cap (1) one end, described guide rail (2) is provided with baffle plate (3), described baffle plate (3) is upper for linear motion at guide rail (2), it is provided with ball screw (4) at described baffle plate (3) middle side part, it is provided with motor (5) in described ball screw (4) end, described ball screw (4) is provided with vacuum chamber (6), it is provided with device for sealing magnetic fluid (7) in the junction of described vacuum chamber (6) Yu ball screw (4).
2. vacuum coating anode cap self-checking device according to claim 1, it is characterised in that: described baffle plate (3) is titanium alloy baffle plate.
3. vacuum coating anode cap self-checking device according to claim 1, it is characterised in that: on described anode cap (1), it is provided with plasma emission window (8).
4. vacuum coating anode cap self-checking device according to claim 1, it is characterized in that: the side of described vacuum chamber (6) is atmospheric side, opposite side is inlet side, and described device for sealing magnetic fluid (7) is arranged on the atmospheric side of vacuum tank (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410621527.6A CN105624635A (en) | 2014-11-06 | 2014-11-06 | Automatic adjusting device for anode cap for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410621527.6A CN105624635A (en) | 2014-11-06 | 2014-11-06 | Automatic adjusting device for anode cap for vacuum coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105624635A true CN105624635A (en) | 2016-06-01 |
Family
ID=56039973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410621527.6A Pending CN105624635A (en) | 2014-11-06 | 2014-11-06 | Automatic adjusting device for anode cap for vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105624635A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11200029A (en) * | 1998-01-13 | 1999-07-27 | Victor Co Of Japan Ltd | Sputtering device |
| US20080115729A1 (en) * | 2006-11-16 | 2008-05-22 | Yamagata Promotional Organization For Industrial Technology | Evaporation source and vacuum evaporator using the same |
| CN202157118U (en) * | 2011-07-18 | 2012-03-07 | 深圳市三鑫精美特玻璃有限公司 | Movable baffle plate device for continuous coating production line |
| CN102588606A (en) * | 2012-03-14 | 2012-07-18 | 无锡康力电子有限公司 | Magnetic fluid sealing device for vacuum coating drive mechanism |
| CN202744623U (en) * | 2012-08-05 | 2013-02-20 | 许昌天地和光能源有限公司 | Adjustable vacuum magnetron sputtering anode cap |
| CN203700485U (en) * | 2014-01-13 | 2014-07-09 | 深圳市金耀玻璃机械有限公司 | Adjustable movable baffle plate arranged on vacuum coating cavity |
| CN204401101U (en) * | 2014-11-06 | 2015-06-17 | 无锡康力电子有限公司 | A kind of vacuum plating anode cap automatic-adjusting device |
-
2014
- 2014-11-06 CN CN201410621527.6A patent/CN105624635A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11200029A (en) * | 1998-01-13 | 1999-07-27 | Victor Co Of Japan Ltd | Sputtering device |
| US20080115729A1 (en) * | 2006-11-16 | 2008-05-22 | Yamagata Promotional Organization For Industrial Technology | Evaporation source and vacuum evaporator using the same |
| CN202157118U (en) * | 2011-07-18 | 2012-03-07 | 深圳市三鑫精美特玻璃有限公司 | Movable baffle plate device for continuous coating production line |
| CN102588606A (en) * | 2012-03-14 | 2012-07-18 | 无锡康力电子有限公司 | Magnetic fluid sealing device for vacuum coating drive mechanism |
| CN202744623U (en) * | 2012-08-05 | 2013-02-20 | 许昌天地和光能源有限公司 | Adjustable vacuum magnetron sputtering anode cap |
| CN203700485U (en) * | 2014-01-13 | 2014-07-09 | 深圳市金耀玻璃机械有限公司 | Adjustable movable baffle plate arranged on vacuum coating cavity |
| CN204401101U (en) * | 2014-11-06 | 2015-06-17 | 无锡康力电子有限公司 | A kind of vacuum plating anode cap automatic-adjusting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160601 |
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| RJ01 | Rejection of invention patent application after publication |