CN105590964B - 半导体装置 - Google Patents
半导体装置 Download PDFInfo
- Publication number
- CN105590964B CN105590964B CN201510993428.5A CN201510993428A CN105590964B CN 105590964 B CN105590964 B CN 105590964B CN 201510993428 A CN201510993428 A CN 201510993428A CN 105590964 B CN105590964 B CN 105590964B
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- Prior art keywords
- layer
- oxide semiconductor
- insulating layer
- electrode
- transistor
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
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| JP2020074461A (ja) | 2020-05-14 |
| JP6818917B2 (ja) | 2021-01-27 |
| JP5138788B2 (ja) | 2013-02-06 |
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| JP2013042176A (ja) | 2013-02-28 |
| JP2021073686A (ja) | 2021-05-13 |
| US20110193081A1 (en) | 2011-08-11 |
| KR20180114967A (ko) | 2018-10-19 |
| JP2015035614A (ja) | 2015-02-19 |
| TW201203545A (en) | 2012-01-16 |
| JP6349427B2 (ja) | 2018-06-27 |
| KR102026603B1 (ko) | 2019-10-01 |
| CN105590964A (zh) | 2016-05-18 |
| JP2018133597A (ja) | 2018-08-23 |
| TWI582991B (zh) | 2017-05-11 |
| US8546811B2 (en) | 2013-10-01 |
| CN102687275B (zh) | 2016-01-27 |
| CN102687275A (zh) | 2012-09-19 |
| JP2017108175A (ja) | 2017-06-15 |
| CN109560140A (zh) | 2019-04-02 |
| KR20120117915A (ko) | 2012-10-24 |
| JP6654216B2 (ja) | 2020-02-26 |
| JP2011181917A (ja) | 2011-09-15 |
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