CN105444662A - Axial deviation six-sensitive-grid full bridge mixed interdigital metal foil gauge for measuring outer axial partial derivatives for double-side sheet - Google Patents

Axial deviation six-sensitive-grid full bridge mixed interdigital metal foil gauge for measuring outer axial partial derivatives for double-side sheet Download PDF

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CN105444662A
CN105444662A CN201510884615.XA CN201510884615A CN105444662A CN 105444662 A CN105444662 A CN 105444662A CN 201510884615 A CN201510884615 A CN 201510884615A CN 105444662 A CN105444662 A CN 105444662A
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sensitive
gate
grid
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left
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张端
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浙江工业大学
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic means
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic means for measuring deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic means for measuring deformation in a solid, e.g. by resistance strain gauge using change in resistance

Abstract

The invention relates to an axial deviation six-sensitive-grid full bridge mixed interdigital metal foil gauge for measuring outer axial partial derivatives for a double-side sheet. The axial deviation six-sensitive-grid full bridge mixed interdigital metal foil gauge comprises a substrate and six sensitive grids fixed on the substrate, wherein each sensitive grid includes a sensitive section and a transition section; the axes of all the sensitive sections are parallel lines in the same plane; in the plane, the direction along the axis is the axial direction, and the direction being perpendicular to the axial direction is the transverse direction; the transverse directions between the centers of six sensitive grids have no deviation and the axial directions between the centers of six sensitive grids have deviation; according to the sequence of the center positions of the sensitive grids, the sensitive grids are respectively a left seven sensitive grid and a left five sensitive grid, an intermediate-A sensitive grid and an intermediate-B sensitive grid, and at last a right five sensitive grid and a right seven sensitive grid; the total resistance variation values for the sensitive sections of all the sensitive grids are 7:5:12:12:5:7 under the same strain; and the first four and last four sensitive grids are arranged in the interdigital way. The axial deviation six-sensitive-grid full bridge mixed interdigital metal foil gauge for measuring outer axial partial derivatives for a double-side sheet can measure the strain axial first order partial derivatives at a center at the same time, wherein the distance between the left and right sides of the centers of the left seven sensitive grid and the right seven sensitive grid and the center is equal to the distance between the center and the centers of the right five sensitive grid and the left five sensitive grid.

Description

可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片 Bilateral axially outer sheet measure the axial deviation deflector sensitive grid six full-bridge strain gages mixed interdigitated metal

技术领域 FIELD

[0001] 本发明设及传感器领域,尤其是一种金属应变片。 [0001] The present invention is provided and a sensor, in particular a metal strain gauge.

背景技术 Background technique

[0002] 金属电阻应变片的工作原理是电阻应变效应,即金属丝在受到应变作用时,其电阻随着所发生机械变形(拉伸或压缩)的大小而发生相应的变化。 Working Principle [0002] Metal resistance strain gauge is a resistance strain effect, i.e., when the wire is strained action, as the size of its resistance to mechanical deformation (tensile or compressive) which occurs while the corresponding changes. 电阻应变效应的理论公式如下: Theoretical Formula resistance strain effect is as follows:

[0003] [0003]

Figure CN105444662AD00041

(1) (1)

[0004] 其中R是其电阻值,P是金属材料电阻率,L是金属材料长度,S为金属材料截面积。 [0004] where R is a resistance value, P is a metallic material resistivity, L is the length of a metal material, S is the cross-sectional area of ​​a metal material. 金属丝在承受应变而发生机械变形的过程中,P、L、S^者都要发生变化,从而必然会引起金属材料电阻值的变化。 Mechanical deformation processes occurring in the wire receiving Strain, P, L, S ^ those changes have occurred, thereby inevitably causing a change in resistance value of a metal material. 当金属材料被拉伸时,长度增加,截面积减小,电阻值增加;当受压缩时,长度减小,截面积增大,电阻值减小。 When the metal material is stretched, increasing the length, the cross-sectional area is reduced, increasing the resistance value; when compressed, reducing the length, the cross-sectional area increases, the resistance value decreases. 因此,只要能测出电阻值的变化,便可知金属丝的应变情况。 Thus, as long as the change in resistance value can be measured, they found that the strain of the wire. 由式(1)和材料力学等相关知识可导出金属材料电阻变化率公式 Knowledge by the formula (1), and the like may be derived mechanical resistance change metal material of formula

[0005] [0005]

Figure CN105444662AD00042

(2) (2)

[0006] 其中ΔΚ为电阻变动量,AL为金属材料在拉力或者压力作用方向上长度的变化量,ε为同一方向上的应变常常称为轴向应变,K为金属材料应变灵敏度系数。 [0006] wherein an amount of variation in the resistance ΔΚ, AL is a metal material in the tensile direction or the pressure variation of the length, ε is the strain in the same direction is often referred to as axial strain, K strain sensitivity of a metal material.

[0007] 在实际应用中,将金属电阻应变片粘贴在传感器弹性元件或被测机械零件的表面。 [0007] In practice, the strain gauges attached to the metal surface of the sensor element or the elastic measured mechanical parts. 当传感器中的弹性元件或被测机械零件受作用力产生应变时,粘贴在其上的应变片也随之发生相同的机械变形,引起应变片电阻发生相应的变化。 When the sensor element or the elastic force generated by the mechanical part under test strain, attached thereon also will be the same strain gauge mechanical deformation, causing the gauge resistance changes accordingly. 运时,电阻应变片便将力学量转换为电阻的变化量输出。 When transported, the amount of resistance put mechanical strain gauge resistance change amount is converted to an output.

[000引但是有时我们也需要了解工件应变的偏导数,比如下面有Ξ种场合,但不限于此Ξ,需要用到工件表面应变偏导数: [000 primer but sometimes we need to understand the partial derivative of strain of the workpiece, such as a Cascade kinds of occasions below, but not limited to a Cascade, the need to use the surface strain partial derivatives:

[0009] 第一,由于工件形状突变处附近会出现应变集中,往往成为工件首先出现损坏之处,监测形状突变处附近的应变偏导数,可直观的获取该处应变集中程度。 [0009] First, since the shape of the vicinity of the workpiece mutant strain concentration occurs, often become damaged at the workpiece occurs first mutant strain near the shape of monitoring the partial derivative, there can directly obtain the degree of concentration of strain.

[0010] 第二,建筑、桥梁、机械设备中受弯件大量存在,材料力学有关知识告诉我们,弯曲梁表面轴向应变与截面弯矩成正比,截面弯矩的轴向偏导数与截面剪应变成正比,也就是可W通过表面轴向应变的轴向偏导数获知截面剪应变,而该剪应变无法用应变片在工件表面直接测量到; [0010] Second, buildings, bridges, mechanical equipment abound bending member, mechanical knowledge tell us surface of the axial strain and bending beam cross section is proportional to the moment, axial cross-sectional moment of Shear partial derivatives with proportional to the strain, W is the partial derivative can be informed by a cross-sectional surface of the axial shear strain of axial strain, shear strain which can not be measured directly on the surface of the workpiece with a strain gauge;

[0011] 第Ξ,应用弹性力学研究工件应变时,内部应变决定于偏微分方程,方程求解需要边界条件,而工件表面应变偏导数就是边界条件之一,运是一般应变片无法提供的。 [0011] of a Cascade, when applied elasticity research work strain, internal strain determined by partial differential equations, boundary conditions needed to solve the equation, the partial derivative of the surface strain is one of the boundary conditions, operation is generally not available strain gauge.

[0012] 此外,对工件的某些部位,比如轴肩、零件边缘处等位置,由于形状尺寸的突变,其应变往往相应存在比较大的变化。 Position [0012] In addition, some parts of the workpiece, such as the shoulder, the edge of the other part, the shape and size due to mutations, the strain often present correspondingly relatively large change. 然而,正由于形状尺寸的突变,使得该处较难安置一般的应变片,需要一种能测量应变片偏边缘甚至边缘外侧位置而不是正中位置应变偏导的产品。 However, due to mutations positive shapes and sizes, so that there is disposed generally difficult strain gauge, a need for a sheet measuring strain outer edge even partial edge position rather than the position of the middle product of a strain deflector. 如此便可实现在避开较难安放应变片的目标被测点一定距离处布置应变片,而最终测量到该目标被测点处的应变偏导。 Thus can be realized avoiding the strain gauges are arranged at a distance from the target point is difficult to place the measured strain gauge, and the final measurement to the strain measured at the target point deflector.

发明内容 SUMMARY

[0013] 为了克服已有的金属应变片无法检测应变偏导的不足,本发明提供一种既能测量应变更能有效检测表面应变轴向偏导的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,特别是测量工件角落、边缘等对应变片有尺寸限制部位或者其他不宜布置应变片位置的轴向一阶偏导。 [0013] In order to overcome the existing metallic strain gage can not detect the lack of the deflector, the present invention provides a more efficient detection of both measuring strain measurable outer surface of double-sided sheet deflector axial strain in the axial direction of the deflector six sensitive axial deviation mixed interdigitated gate full bridge strain gauge metal, particularly the measurement of the workpiece corners, edges etc. of the strain gauges is limited in size or other parts not disposed axial strain first partial guide position.

[0014] 本发明解决其技术问题所采用的技术方案是: [0014] aspect of the present invention to solve the technical problem are:

[0015] -种可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,包括基底,所述金属应变片还包括六个敏感栅,每个敏感栅的两端分别连接一根引脚,所述基底上固定所述六个敏感栅; [0015] - bilateral external measurable species axially sheet deflector gate axial deviation sensitive six full bridge strain mixed interdigitated metal sheet, comprising a substrate, the metal sheet further includes six strain sensitive grid, each sensitive gate They are connected to both ends of a pin, fixed on the substrate sensitive to the six gate;

[0016] 每一敏感栅包括敏感段和过渡段,所述敏感段的两端为过渡段,所述敏感段呈细长条形,所述过渡段呈粗短形,所述敏感段的电阻远大于所述过渡段的电阻,相同应变状态下所述敏感段的电阻变化值远大于所述过渡段的电阻变化值,所述过渡段的电阻变化值接近于0; [0016] Each gate comprises a sensitive sensitive section and a transition section, both ends of the transition section is a sensitive section, said sensitive segment in an elongated strip, stubby-shaped segment in the transition resistance of the sensitive section the transition section is much greater than the resistance, the resistance change of the state of the same strain sensitive segment is much larger than the value of the resistance change value of the transition section, the transition section changes the resistance value is close to 0;

[0017] 每个敏感段的所有横截面形屯、构成敏感段轴线,该敏感段轴线为一条直线段,所述六个敏感栅中各敏感段的轴线平行并且位于同一平面中,敏感段轴线所确定平面内,沿所述敏感段轴线方向即轴向,与轴向垂直的方向为横向;每个敏感段上存在其两侧电阻值相等的一个横截面,取该截面形屯、位置并W该敏感段电阻值为名义质量构成所在敏感段的名义质点,各个敏感段的名义质点共同形成的质屯、位置为敏感栅的中屯、; [0017] All the cross-sectional shape of each village sensitive segment, segment constituting the sensitive axis, the sensitive axis of a section of straight line segments, the six axis parallel to the gate of each sensitive sensitive segment and located in the same plane, the sensitive axis of the section the determined in-plane direction of the axis i.e. axial sensitive segment, a direction perpendicular to the axial transverse; a cross-section on both sides thereof is equal to the resistance value of each sensitive to the presence of segment-shaped cross-section to take the village, and the location the segment sensitive resistance value W nominal configuration where the nominal particle mass sensitive segments, each sensitive mass Tun nominal dot forming sections together, the position sensitive grid village,;

[0018] 六个敏感栅中屯、之间在横向上无偏差,在轴向部分存在偏差,六个敏感栅按敏感栅中屯、位置的顺序,沿轴向从左至右,首先是左屯敏感栅和左五敏感栅,然后是中甲敏感栅和中乙敏感栅,最后是右五敏感栅和右屯敏感栅;左屯敏感栅中屯、与左五敏感栅中屯、之间距离为0,左屯敏感栅中屯、与中甲敏感栅中屯、的距离为ΔXI,中甲敏感栅中屯、与中乙敏感栅中屯、的距离为0,中乙敏感栅中屯、与右屯敏感栅中屯、的距离为ΔXI,右屯敏感栅中屯、与右五敏感栅中屯、之间距离为0; [0018] six Tun sensitive gate, in the transverse direction between the unbiased, there is a deviation in axial section, six sensitive grid by sensitive gate Tun, ordinal position, in the axial direction from left to right, left Tun sensitive gate and the fifth from the left-sensitive gate, and the gate is in the a and b-sensitive sensitive grid, and finally the right and five right-sensitive grid Tun sensitive grid; Tun sensitive gate Tun left, the left gate Tun sensitive five, between distance is 0, a left Tun sensitive gate Tun, as in a sensitive gate village, a distance ΔXI, the a sensitive gate Tun, and the b-sensitive gate Tun, the distance is 0, the b sensitive gate Tun , right Tun Tun sensitive gate, a distance ΔXI, right-Tun Tun sensitive gate, gate sensitive to the right five village, a distance between a 0;

[0019] 各敏感段轴线所确定平面上,左屯敏感栅、左五敏感栅、中部中甲敏感栅与中乙敏感栅之间互为叉指布置,中甲敏感栅、中乙敏感栅、右边右屯敏感栅与右五敏感栅之间互为叉指布置; [0019] Each critical section on a plane determined by the axis, the left Tun sensitive grid, arranged between the mutually left five interdigital sensitive grid, the middle and the methyl acetate sensitive grid sensitive gate, the gate sensitivity A, B of the sensitive gate, mutually disposed between the right and right interdigital Tun sensitive gate and the right five sensitive grid;

[0020] 左屯敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右屯敏感栅的敏感段总电阻呈7:5:12:12:5:7的比例关系,左屯敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右屯敏感栅的敏感段在相同的应变下敏感段的总电阻变化值也呈7:5: 12:12:5:7的比例关系。 [0020] The total resistance of the sensitive period left Tun sensitive grid, fifth from left sensitive grid, the A sensitive grid, the B sensitive grid, fifth right sensitive gate and right Tun sensitive gate was 7: 5: 12: 12: 5: 7 proportional relationship sensitive segments left Tun sensitive grid, fifth from left sensitive grid, the a sensitive grid, the b sensitive grid, fifth right sensitive gate and right Tun sensitive gate at the same total resistance change value sensitive segments strain also showed 7 : ratio between 7: 5: 12: 12: 5.

[0021 ]进一步,每个敏感段的所有横截面形状尺寸一致,取每个敏感段的轴线中点位置并W该敏感段电阻值为名义质量构成所在敏感段的名义质点,所述左屯敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右屯敏感栅的敏感段总长度呈7:5:12:12:5:7 的比例关系。 [0021] Further, all the same cross-sectional shape and size of each critical section, whichever is the midpoint of each segment sensitive axis W and the resistance value of the nominal mass sensitive segments constituting nominal dot location sensitive segment of the left sensitive Tun the total length of the critical section of the gate, five left-sensitive grid, the gate sensitivity a, b of the sensitive gate, the gate and the right fifth right sensitive Tun sensitive gate was 7: 7 ratio between: 5: 12: 12: 5. 该方案为一种可W选择的方案,名义质点的位置只要符合其两侧电阻值相等的横截面形屯、位置即可,也可w是其他位置。 This embodiment is an embodiment chosen W, the nominal position of the particle on both sides thereof that they meet the resistance value of equal cross-sectional shape Tun, the position can also be other position w.

[0022] 更进一步,左屯敏感栅均与右屯敏感栅、右五敏感栅之间呈叉指布置,左五敏感栅均与右屯敏感栅、右五敏感栅之间呈叉指布置;也可W没有叉指布置。 [0022] Still further, the left and right are sensitive grid Tun Tun sensitive grid, is disposed between the right was five interdigital sensitive grid, the left and right are sensitive grid five Tun sensitive grid, is disposed between the right was five interdigital sensitive grid; W may not interdigitated arrangement. 所述叉指布置是指: 两敏感栅的各敏感段轴线所在平面上,在与敏感段轴线垂直方向上两敏感栅的敏感段错落分布,对在该方向上两敏感栅之敏感段分别出现的次序和次数不做限制。 It refers to the interdigital arrangement: two sensitive axis lies on the plane of the gate sensitivity in each segment, the segment with the sensitive axis perpendicular to a direction-sensitive two-sensitive segment scattered distribution grid, two sensitive sensitive segment of the gate respectively, in the direction order and does not limit the number of times.

[0023] 再进一步,相对中甲敏感栅和中乙敏感栅,右屯敏感栅和左屯敏感栅的敏感段轴向长度可较短而横向分布可较密。 [0023] Still further, the relative sensitivity of the gate A and gate B-sensitive, and the left and right gate Tun Tun sensitive sensitive sensitive gate axial length shorter period may be more densely distributed laterally. 目的是减小左屯敏感栅中屯、到应变片左侧边缘的距离W 及右屯敏感栅中屯、到应变片右侧边缘的距离。 Object is to reduce the sensitive gate Tun Tun left, and right from the W Tun left edge to the strain gauge sensitive gate Tun, from the right edge to the strain gauges.

[0024] 利用金属材料电阻变化值与应变之间的线性关系,本应变片正如普通应变片那样可W用于测量应变。 [0024] The linear relationship between the value of the variable resistance metal material strain, this strain gauge may be as general as strain gauges for measuring the W strain. 另一方面,依据数值微分理论中(如依冯康等编、国防工业出版社1978 年12月出版的《数值计算方法》21页(1.4.11)-(1.4.14)式作等距插值分析)关于一阶偏导的具体计算方法,f(x,y)的X方向一阶偏导数的数值计算方法如下: On the other hand, based on numerical differentiation theory (eg according to Feng Kang et al. Eds, "numerical methods" National Defense Industry Press in December 1978, published 21 (1.4.11) - (1.4.14) for equidistant interpolation formula analysis) a specific method for calculating the partial derivative, f (x, y) in the X direction, a first order numerical methods partial derivatives as follows:

[0025] [0025]

Figure CN105444662AD00061

[0026] 其中^ = ^+]1,义2 = ^+11,特别注意上式为^2+化,7)位置的一阶偏导数值公式,该式的截断误差较小为0化2)即为步长平方的高阶无穷小量。 [0026] wherein ^ = ^ +] 1, Yi + 2 ^ = 11, the particular attention of the formula + ^ 2, first partial derivative values ​​Equation 7) position, the truncation error of formula 2 0 is smaller ) is the step size of the square of higher-order infinitesimals. 由式(2)工程上一般认为敏感栅电阻变化量正比与敏感栅中屯、的应变,结合各敏感栅电阻W及在相同应变下之电阻变化量的比例关系,左屯敏感栅与右五敏感栅的电阻和减去中甲敏感栅的电阻值,再除W左屯敏感栅中屯、与右五敏感栅中屯、的距离为应变的轴向一阶数值偏导,按照数值微分理论运是左屯敏感栅中屯、向左侧化距离处位置的轴向一阶数值偏导,运里的h当然等于左屯敏感栅中屯、到中甲敏感栅中屯、之间的距离;同样,右屯敏感栅与左五敏感栅的电阻和减去中乙敏感栅的电阻值,再除W右屯敏感栅中屯、与左五敏感栅中屯、的距离为应变的轴向一阶数值偏导,按照数值微分理论运是右屯敏感栅中屯、向右侧化距离处位置的轴向一阶数值偏导,运里的h当然等于右屯敏感栅中屯、到中乙敏感栅中屯、之间的距离。 By the formula (2) engineering is generally considered sensitive gate resistance change amount proportional to the sensitive gate Tun, Strain, in connection with the sensitive gate resistance W, and the ratio between the amount of resistivity change under the same strain, left Tun sensitive gate and the right five the resistance values ​​of the resistors and the gate subtracting a sensitive sensitive gate, in addition to W and then left Tun Tun-sensitive gate, and the right five-sensitive gate Tun, strain axial distance of the first order partial derivative value, the differential value in accordance with the theoretical is transported from the left Tun Tun sensitive gate, a first order partial derivative value in the axial direction at a distance from the left side of the position, of course, equal to h in the transport left Tun Tun sensitive gate, gate sensitive to the a Tun, between ; Similarly, the gate resistance of the right and left five Tun sensitive sensitive gate and the gate subtracting acetate sensitive resistance value, then W and right Tun Tun inter-sensitive gate, and five left sensitive gate Tun, the axial distance of the strain the first order partial derivative value, according to the theory of operation is a right side numerical differentiation Tun Tun sensitive gate, a first order partial derivative value in the axial direction at a distance from the right side of the position, in the transport course, equal to the right h Tun Tun sensitive gate, into the Tun sensitive gate b, the distance between. 上述两处位置的轴向一阶偏导可同时测量。 Partial Derivative axially above two positions can be measured simultaneously. 因此该应变片的优势在于其两侧均可用于测量工件角落、边缘等一般应变片由于尺寸限制无法测量的部位的轴向一阶偏导;而叉指布置使得步长h减小,根据前面的分析运样能减小测量误差。 Thus the strain gauges on both sides thereof can be used to advantage in measuring the workpiece corners, edges, etc. Usually a strain gauge order derivative axial size limitations could not be measured due to the site; arranged such that the interdigital step h is reduced, the foregoing analysis of the sample transport can reduce the measurement error.

[0027] 在工艺上应注意保持左屯敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右屯敏感栅过渡段总电阻W及过渡段电阻在外部应变下之变化量呈7:5:12:12:5:7 的数值关系W调高测量精度,如果过渡段的电阻W及应变下电阻变化量不可忽略,也能作为系统误差在检测时加W消除。 [0027] In the process should keep the left Tun sensitive grid, fifth from left sensitive grid, the A sensitive grid, the B sensitive grid, fifth right sensitive gate and right Tun sensitive grid transition segment total resistance W, and the transition section external resistor strain under the form of variation of 7: 5: 12: 12: 5: 7 W numerical relation increase measurement accuracy, if the resistance of the transition section W and the resistance change amount of strain can not be ignored, but also as a system error in testing and W eliminate.

[0028] 进一步,所述金属应变片还包括盖片,所述盖片覆盖于所述敏感栅和基底上。 [0028] Further, the metal strain gauge further comprises a cover sheet, the cover sheet covers the sensitive gate and the substrate.

[0029] 再进一步,所述敏感栅为丝式、锥式、薄膜式或厚膜式敏感栅。 [0029] Still further, the sensitivity is a wire grid type, cone, film or thick film type sensitive grid.

[0030] 更进一步,所述基底为胶膜基底、玻璃纤维基底、石棉基底、金属基底或临时基底。 [0030] Still further, the substrate is a film substrate, a glass substrate fiber, asbestos substrate, a metal substrate or a temporary substrate.

[0031] 所述六个敏感栅左、中、右布置在基底上。 [0031] The six-sensitive gate on the substrate left, right arrangement. 当然,也可W为其他的布置方式。 Of course, W may be other arrangement.

[0032] 本发明的有益效果主要表现在:可同时检测左屯敏感栅中屯、左外侧一处和右屯敏感栅中屯、右外侧一处的轴向一阶偏导,其中左屯敏感栅中屯、左外侧处横向上与左屯敏感栅中屯、无偏差,轴向上该处与左屯敏感栅中屯、的间距等于右五敏感栅中屯、与左屯敏感栅中屯、 的间距;右屯敏感栅中屯、右外侧处横向上与右屯敏感栅中屯、无偏差,轴向上该处与右屯敏感栅中屯、的间距等于左五敏感栅中屯、与右屯敏感栅中屯、的间距。 [0032] Advantageous effects of the present invention are mainly: simultaneous detection sensitivity gate Tun Tun left, the left and right outside a gate Tun Tun-sensitive, axial-order partial derivatives of a right outer side, wherein the left sensitive Tun Tun gate, on the left outer side of the left lateral sensitive gate Tun Tun, without deviation, to the left in the axial direction where the sensitive gate Tun Tun, a pitch equal to the right five Tun sensitive gate, gate sensitive left Tun Tun , spacing; and right Tun Tun sensitive gate, right outside the lateral direction at the right sensitive gate Tun Tun, unbiased, and right in the axial direction where the sensitive gate Tun Tun, the pitch is equal to five left Tun sensitive gate, right Tun Tun sensitive gate, pitch. 因此本发明可测量工件角落、边缘等对应变片有尺寸限制部位或者其他不宜布置应变片位置的轴向一阶偏导。 Thus, the present invention can measure a workpiece corner, edge or the like is limited in size to strain gauges or other parts of the first order partial derivative not axial position of the strain gauge arrangement.

附图说明 BRIEF DESCRIPTION

[0033]图1是可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片的示意图。 [0033] FIG. 1 is a two-sided sheet may measure axially outer axial deviation deflector sensitive grid six full bridge strain gauge metal mixed schematic cross fingers.

[0034]图2是可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片俯视图。 [0034] FIG. 2 is a double-sided sheet may measure axially outer axial deviation deflector sensitive grid six full bridge strain gauge metal mixed interdigitated plan view.

[0035]图3是测量电桥示意图。 [0035] FIG. 3 is a schematic view of the electrical measurement bridge.

具体实施方式 Detailed ways

[0036]下面结合附图对本发明作进一步描述。 [0036] The following drawings in conjunction with the present invention will be further described.

[0037]参照图1~图3,一种可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,包括基底,所述金属应变片还包括六个敏感栅,每个敏感栅的两端分别连接一根引脚,所述基底上固定所述六个敏感栅; [0037] Referring to FIGS. 1 to 3, one measurable axially outer double-sided sheet deflector gate axial deviation sensitive six full bridge strain mixed interdigitated metal sheet, comprising a substrate, the metal sheet further includes six strain sensitive grid, both ends of each are connected to a sensitive gate pin, is fixed on said substrate sensitive to the six gate;

[0038]每一敏感栅包括敏感段和过渡段,所述敏感段的两端为过渡段,所述敏感段呈细长条形,所述过渡段呈粗短形,所述敏感段的电阻远大于所述过渡段的电阻,相同应变状态下所述敏感段的电阻变化值远大于所述过渡段的电阻变化值,所述过渡段的电阻变化值接近于0; [0038] Each gate comprises a sensitive sensitive section and a transition section, both ends of the transition section is a sensitive section, said sensitive segment in an elongated strip, stubby-shaped segment in the transition resistance of the sensitive section the transition section is much greater than the resistance, the resistance change of the state of the same strain sensitive segment is much larger than the value of the resistance change value of the transition section, the transition section changes the resistance value is close to 0;

[0039]每个敏感段的所有横截面形屯、构成敏感段轴线,该敏感段轴线为一条直线段,所述六个敏感栅中各敏感段的轴线平行并且位于同一平面中,敏感段轴线所确定平面内,沿所述敏感段轴线方向即轴向,与轴向垂直的方向为横向;每个敏感段上存在其两侧电阻值相等的一个横截面,取该截面形屯、位置并W该敏感段电阻值为名义质量构成所在敏感段的名义质点,各个敏感段的名义质点共同形成的质屯、位置为敏感栅的中屯、; [0039] All the cross-sectional shape of each village sensitive segment, segment constituting the sensitive axis, the sensitive axis of a section of straight line segments, the six axis parallel to the gate of each sensitive sensitive segment and located in the same plane, the sensitive axis of the section the determined in-plane direction of the axis i.e. axial sensitive segment, a direction perpendicular to the axial transverse; a cross-section on both sides thereof is equal to the resistance value of each sensitive to the presence of segment-shaped cross-section to take the village, and the location the segment sensitive resistance value W nominal configuration where the nominal particle mass sensitive segments, each sensitive mass Tun nominal dot forming sections together, the position sensitive grid village,;

[0040]六个敏感栅中屯、之间在横向上无偏差,在轴向部分存在偏差,六个敏感栅按敏感栅中屯、位置的顺序,沿轴向从左至右,首先是左屯敏感栅和左五敏感栅,然后是中甲敏感栅和中乙敏感栅,最后是右五敏感栅和右屯敏感栅;左屯敏感栅中屯、与左五敏感栅中屯、之间距离为0,左屯敏感栅中屯、与中甲敏感栅中屯、的距离为ΔXI,中甲敏感栅中屯、与中乙敏感栅中屯、的距离为0,中乙敏感栅中屯、与右屯敏感栅中屯、的距离为ΔXI,右屯敏感栅中屯、与右五敏感栅中屯、之间距离为0; [0040] six Tun sensitive gate, in the transverse direction between the unbiased, there is a deviation in axial section, six sensitive grid by sensitive gate Tun, ordinal position, in the axial direction from left to right, left Tun sensitive gate and the fifth from the left-sensitive gate, and the gate is in the a and b-sensitive sensitive grid, and finally the right and five right-sensitive grid Tun sensitive grid; Tun sensitive gate Tun left, the left gate Tun sensitive five, between distance is 0, a left Tun sensitive gate Tun, as in a sensitive gate village, a distance ΔXI, the a sensitive gate Tun, and the b-sensitive gate Tun, the distance is 0, the b sensitive gate Tun , right Tun Tun sensitive gate, a distance ΔXI, right-Tun Tun sensitive gate, gate sensitive to the right five village, a distance between a 0;

[0041]各敏感段轴线所确定平面上,左屯敏感栅、左五敏感栅、中部中甲敏感栅与中乙敏感栅之间互为叉指布置,中甲敏感栅、中乙敏感栅、右边右屯敏感栅与右五敏感栅之间互为叉指布置; [0041] Each critical section on a plane determined by the axis, the left Tun sensitive grid, arranged between the mutually left five interdigital sensitive grid, the middle and the methyl acetate sensitive grid sensitive gate, the gate sensitivity A, B of the sensitive gate, mutually disposed between the right and right interdigital Tun sensitive gate and the right five sensitive grid;

[0042]左屯敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右屯敏感栅的敏感段总电阻呈7:5:12:12:5:7的比例关系,左屯敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右屯敏感栅的敏感段在相同的应变下敏感段的总电阻变化值也呈7:5: 12:12:5:7的比例关系。 [0042] The total resistance of the sensitive period left Tun sensitive grid, fifth from left sensitive grid, the A sensitive grid, the B sensitive grid, fifth right sensitive gate and right Tun sensitive gate was 7: 5: 12: 12: 5: 7 proportional relationship sensitive segments left Tun sensitive grid, fifth from left sensitive grid, the a sensitive grid, the b sensitive grid, fifth right sensitive gate and right Tun sensitive gate at the same total resistance change value sensitive segments strain also showed 7 : ratio between 7: 5: 12: 12: 5.

[0043]据此,串联左屯敏感栅和右五敏感栅、中甲敏感栅、串联左五敏感栅和右屯敏感栅、中乙敏感栅正好构成测量电桥的四个桥臂。 [0043] Accordingly, the gate sensitivity in series the left and right five Tun sensitive grid, the A sensitive gate, gate sensitive five series left and right Tun sensitive grid, the B sensitive grid exactly four arm configuration measuring bridge.

[0044] 进一步,每个敏感段的所有横截面形状尺寸一致,取每个敏感段的轴线中点位置并W该敏感段电阻值为名义质量构成所在敏感段的名义质点,所述左屯敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右屯敏感栅的敏感段总长度呈7:5:12:12:5:7 的比例关系。 [0044] Further, all the same cross-sectional shape and size of each critical section, whichever is the midpoint of each segment sensitive axis W and the resistance value of the nominal mass sensitive segments constituting nominal dot location sensitive segment of the left sensitive Tun the total length of the critical section of the gate, five left-sensitive grid, the gate sensitivity a, b of the sensitive gate, the gate and the right fifth right sensitive Tun sensitive gate was 7: 7 ratio between: 5: 12: 12: 5. 该方案为一种可W选择的方案,名义质点的位置只要符合其两侧电阻值相等的横截面形屯、位置即可,也可W是其他位置。 This embodiment is an embodiment chosen W, the nominal position of the particle on both sides thereof that they meet the resistance value of equal cross-sectional shape Tun, the position can also be W is other locations.

[0045] 更进一步,左屯敏感栅、左五敏感栅与右屯敏感栅、右五敏感栅两两之间呈叉指布置;也可W没有叉指布置。 [0045] Furthermore, the left Tun sensitive grid, was disposed between any two interdigital fifth left and right Tun sensitive grid sensitive grid, fifth right sensitive grid; W can not interdigitated arrangement. 所述叉指布置是指:两敏感栅的各敏感段轴线所在平面上,在与敏感段轴线垂直方向上两敏感栅的敏感段错落分布,对在该方向上两敏感栅之敏感段分别出现的次序和次数不做限制。 It refers to the interdigital arrangement: two sensitive axis lies on the plane of the gate sensitivity in each segment, the segment with the sensitive axis perpendicular to a direction-sensitive two-sensitive segment scattered distribution grid, two sensitive sensitive segment of the gate respectively, in the direction order and does not limit the number of times.

[0046] 再进一步,相对中甲敏感栅和中乙敏感栅,右屯敏感栅和左屯敏感栅的敏感段轴向长度可较短而横向分布可较密。 [0046] Still further, the relative sensitivity of the gate A and gate B-sensitive, and the left and right gate Tun Tun sensitive sensitive sensitive gate axial length shorter period may be more densely distributed laterally. 目的是减小左屯敏感栅中屯、到应变片左侧边缘的距离W 及右屯敏感栅中屯、到应变片右侧边缘的距离。 Object is to reduce the sensitive gate Tun Tun left, and right from the W Tun left edge to the strain gauge sensitive gate Tun, from the right edge to the strain gauges.

[0047] 本实施例的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,包括基底1,所述金属应变片还包括六个敏感栅,每个敏感栅的两端分别连接一根引脚,所述基底1上固定所述六个敏感栅。 [0047] This double-sided sheet may measure axially outer deflector axial deviation of six embodiments sensitive grid full bridge strain mixed interdigitated metal sheet, comprising a substrate 1, the metal sheet further includes six strain sensitive grid, each a sensitive gate ends are connected to a pin fixed on the base 1 of the six-sensitive gate.

[004引基底1之上可固定左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7,用于保持各敏感栅固定的形状、位置和尺寸;基底1很薄,从而将试件表面的应变准确地传递到左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7。 [004 lead can be fixed on the substrate 1 Tun left sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, the right and the right five sensitive grid 6 7 Tun sensitive grid, for holding the respective sensitive a fixed gate shape, position and dimensions; thin substrate 1, whereby the surface of the specimen strain is transferred accurately to the left Tun sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 a, b the sensitive gate 5, the right five sensitive gate 6 and right Tuen sensitive gate 7. 基底1可W是胶膜基底、玻璃纤维基底、石棉基底、金属基底和临时基底。 W 1 may be the substrate film substrate, a glass substrate fiber, asbestos substrate, a metal substrate and temporary substrate. 通常用黏结、焊接、陶瓷喷涂等方式将基底固定于测试件的被测部位。 Usually bonding, welding, spraying, etc. The ceramic substrate is fixed to the measured portion of the test piece. 基底1上还可印有一些用于应变片定位的线条。 Some may also be printed with lines for strain gauges positioned on the substrate 1.

[0049] 盖片用纸或者胶等材料制成,覆盖于左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6、右屯敏感栅7和基底1上,起防潮、防蚀、防损等作用的保护层。 [0049] The cover sheets of paper or plastic like material, covering the left Tun sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, five right-sensitive grid 6, a right sensitive grid Tun 7 and the substrate 1, a protective layer, moisture, corrosion, loss prevention effect.

[0050] 引脚8用于连接敏感栅和测量电路,左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7各有两个引脚8,对与锥式和膜式应变片,引脚8与其所连接的左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7联为一体。 [0050] Pin 8 is connected to the gate and sensitive measurement circuits, Tun left sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, and 6 right-sensitive grid five right-sensitive grid 7 Tun each of the two pins 8, of the cone diaphragm and strain gauges, the left pin 8 which it is attached Tun sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 a, b the sensitive gate 5, the right 6 and five right-sensitive grid Tun sensitive grid 7 together as one. 左屯敏感栅2的两个引脚为8-1和8-2,左五敏感栅3的两个引脚为8-3和8-4,中甲敏感栅4的两个引脚为8-5和8-6,中乙敏感栅5的两个引脚为8-7和8-8,右五敏感栅6 的两个引脚为8-9和8-10,右屯敏感栅7的两个引脚为8-11和8-12。 Tun sensitive grid left two pins 2 and 8-2 to 8-1, the left two sensitive grid five pins 3 and 8-4 to 8-3, the two pins 4 A sensitive grid of 8 -5 and 8-6, the two pins 5 gate acetate sensitive for 8-7 and 8-8, two right-sensitive grid five pins 8-9 and 8-10 of 6, a right Tun sensitive grid 7 the two pins 8-11 and 8-12.

[0051 ]左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7按照其金属敏感材料和加工工艺的不同,可W为丝式、锥式、薄膜式、厚膜式。 [0051] Left Tun sensitive gate 2, fifth from left sensitive grid 3, the A sensitive grid 4, the B sensitive gate 5, the right five-sensitive gate 6 and a right Tun sensitive gate 7 in accordance with its metal-sensitive materials and processing technology different, can be W is a wire type, cone type, thin film, thick film. 无论何种左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7的厚度均很小,使得左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7的轴向长度随其所依附工件的形变而变化。 Regardless left Tun sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, the right five-sensitive thickness of the gate 6 and the gate 7 of the right-sensitive Tun are very small, so that the left Tun sensitive grid 2 , fifth left sensitive grid 3, the gate 4 a sensitive, the sensitive gate 5 b, the axial length of the right five-sensitive gate 6 and the gate 7 of the right Tun sensitive deformation of the workpiece with which it is attached varies. 本发明基本的关键之处在于左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7之间的配合, 有如下要点: The basic key point of the present invention wherein the left Tun sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, 6 and the right fit between the gate 7 and right five Tun sensitive sensitive grid, the following Highlights:

[0052]第一,在基底上布置六个敏感栅,分别称为左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7。 [0052] First, six sensitive grid disposed on the substrate, referred to as a left Tun sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, the right and the right five Tun sensitive grid 6 sensitive gate 7.

[0053] 第二,左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7均可分为多个敏感段9和多个过渡段10,各过渡段10将各敏感段9连接形成敏感栅。 [0053] Second, left Tun sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, and 6 right-sensitive grid five right-Tun sensitive grid 7 can be divided into a plurality of sensitive sections 9 and a plurality of transition section 10, each transition segment 10 is connected to each of the sensitive portion 9 formed in the gate sensitivity. 比较而言,敏感段9呈细长形,电阻较大并且其阻值对应变较为敏感;所述过渡段10基本呈粗短形,使得所述过渡段的电阻很小并且对应变不敏感,工作状态下电阻变化接近于0, 因此敏感段电阻的总和基本为单个敏感栅的总电阻。 In comparison, the sensitive section 9 has an elongated shape, which is sensitive to large resistance and resistance to strain; the transition section 10 substantially stubby shape, such that the resistance is small and the transition section is not sensitive to strain, resistance change the operating state is close to 0, so the total resistance of the sensitive section is substantially sensitive to the total resistance of a single gate. 图2从更清晰的角度更详细地标出了敏感段9和过渡段10。 Figure 2 more clearly from the perspective indicated sensitive section 9 and a transition section 10 in more detail.

[0054] 第Ξ,每个敏感栅的敏感段9呈细长条状,每个敏感段9的所有横截面形屯、构成敏感段轴线,该敏感段9轴线为一条直线段,各敏感段9的轴线平行并且位于同一平面中。 [0054] of a Cascade, each sensitive sensitive section 9 of the gate of elongated strips, each sensitive to all segment-shaped cross-section Tun 9, segments constituting the sensitive axis, the sensitive axis of one segment 9 straight line segment, each segment sensitive parallel to the axis 9 and located in the same plane. 每个敏感段9的所有横截面沿敏感段轴线方向的投影形状一致。 9 consistent with all cross sections in the axial direction of the projection shape of each segment sensitive sensitive segment. 取每个敏感段的轴线中点位置并W该敏感段电阻值为名义质量构成所在敏感段的名义质点,各个敏感段的名义质点共同形成的质屯、位置为敏感栅的中屯、。 Taking the midpoint of each segment sensitive axis W and the nominal value of mass-sensitive resistor segment forms the nominal dot location sensitive segments, each sensitive mass Tun nominal dot forming sections together, the position sensitive grid village.

[0055] 第四,左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7的敏感段总长度呈7:5:12:12:5:7的比例关系。 [0055] Fourth, Village left sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, and 6 right-five total length of the gate sensitive sensitive sensitive gate section 7, the right Tun was 7: 5 : ratio between 7: 12: 12: 5. 左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7的敏感段总电阻呈7:5:12:12:5:7的比例关系,左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7的敏感段在相同的应变下敏感段的总电阻变化值也呈7: 5:12:12 :5: 7的比例关系。 Left Tun sensitive gate 2, fifth from left sensitive grid 3, the A sensitive grid 4, the B sensitive gate 5, the right five-sensitive gate 6 and a right Tun sensitive gate total resistance of the sensitive section 7 was 7: 5: 12: 12: 5 : ratio between 7 left Tun sensitive gate 2, fifth from left sensitive grid 3, the a sensitive grid 4, the b sensitive gate 5, the right five-sensitive gate 6 and a right Tun sensitive grid sensitive section 7 sensitive in the same strain the total value of the variable resistance section 7 also showed: the ratio between 7: 5:12:12: 5. 据此,串联左屯敏感栅2和右五敏感栅6、中甲敏感栅4、串联左五敏感栅3和右屯敏感栅7、中乙敏感栅5正好构成测量电桥的四个桥臂。 Accordingly, the gate sensitivity series left 2 and right Tun five sensitive grid 6 and the gate 4 A sensitive, five series left and right sensitive grid 3 Tun sensitive grid 7 and B constituting the sensitive gate 5 just four measuring bridge arm .

[0056] 第五,俯视左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6 和右屯敏感栅7,它们均具有对称轴且对称轴重合(图2中的X轴),左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7各自的敏感段9全都与该对称轴平行,各敏感栅的敏感段9均关于此轴对称分布。 [0056] Fifth, a top left Tun sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, and 6 right-sensitive grid five Tun sensitive grid 7 a right, each having an axis of symmetry and symmetry coincident with the axis (X-axis in FIG. 2), a left Tun sensitive gate 2, fifth from left sensitive grid 3, the a sensitive grid 4, the b sensitive gate 5, the right five-sensitive gate 6 and a right Tun sensitive grid of each critical section 7 9 are all parallel to the axis of symmetry, each sensitive sensitive grid segments 9 are symmetrically distributed about this axis. 因此,可W说左屯敏感栅2、左五敏感栅3、 中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7同轴,即检测同方向的应变并且左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7的中屯、 位置均在X轴上,它们的中屯、在横向上无偏差,在轴向上部分存在偏差。 Therefore, said left Tun W sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, a right fifth right Tun sensitive sensitive grid 6 and the gate 7 coaxially, i.e., the detection strain in the same direction and Tun left sensitive gate 2, gate 3 left five sensitive, the sensitive gate 4 a, b the sensitive gate 5, and 6 right-sensitive grid five right-Tun Tun sensitive gate 7, both the position of the X axis thereof Tun , without deviation in the lateral direction, there is a deviation in the axial portion. 根据图2中应变片的俯视图,左屯敏感栅2和左五敏感栅3的敏感段9有横向对称轴yL,左屯敏感栅2和左五敏感栅2的中屯、在X轴与yL轴的交点,中甲敏感栅4和中乙敏感栅5的敏感段9有横向对称轴yM,中甲敏感栅4和中乙敏感栅5的中屯、在X轴与yM轴的交点,右五敏感栅6和右屯敏感栅7的敏感段9有横向对称轴yR,右五敏感栅6和右屯敏感栅7的中屯、在X轴与yR轴的交点。 The plan view in FIG. 2 strain gauge, left Tun sensitive gate 2 and the left five sensitive grid sensitive section 3 9 transverse symmetry axis yL, left Tun sensitive gate 2 and the left five sensitive gate Tun 2, X axis yL in the intersection of the axis, the a sensitive grid sensitive section 4 and the b-sensitive gate 5 9 transverse axis of symmetry yM, the a sensitive gate 4 and the b-sensitive gate Tun 5, at the intersection of X-axis and yM shaft right 6 and five right-sensitive grid Tun sensitive sensitive grid segments 7 9 yR transverse axis of symmetry, the right and the right five sensitive grid 6 Tun Tun sensitive gate 7, the intersection of the X axis and the axis yR.

[0057] 第六,左屯敏感栅2的中屯、与左五敏感栅3的中屯、之间距离为0,左屯敏感栅2的中屯、与中甲敏感栅4的中屯、的距离为ΔXI,中甲敏感栅4的中屯、与中乙敏感栅5的中屯、的距离为0,中乙敏感栅5的中屯、与右屯敏感栅7的中屯、的距离为ΔXI,右屯敏感栅7的中屯、与右五敏感栅6的中屯、之间距离为0,如图2所示。 [0057] Sixth, the left Tun Tun sensitive gate 2, and five left Tun sensitive gate 3, the distance between a 0, the left Tun Tun sensitive gate 2, as in A sensitive gate 4 is Tun, the distance ΔXI, the a sensitive gate Tun 4, and the b-sensitive gate Tun 5, the distance is 0, the b sensitive gate Tun 5, the right Tun sensitive gate Tun 7, a distance is ΔXI, right-Tun Tun sensitive gate 7, and the fifth right Tun sensitive gate 6, the distance is between 0, as shown in FIG. 按图2所示,各敏感段9的轴线所确定平面上,左屯敏感栅2、左五敏感栅3、中甲敏感栅4与中乙敏感栅5之间互为叉指布置,右五敏感栅6、右屯敏感栅7、中甲敏感栅4与中乙敏感栅5之间互为叉指布置,左屯敏感栅2、左五敏感栅3、右五敏感栅6与右屯敏感栅7之间可W互为叉指布置也可W相反,例如图2中运4个敏感栅没有形成叉指,但如果该4个敏感栅的长度调大就可W形成叉指。 According to the axis 2 shown in FIG. 9 each sensitive segments on the determined plane, left Tun sensitive gate 2, gate 3 left five sensitive, the A sensitive grid 4 between the gate 5 and the B-sensitive mutually interdigitated arrangement, the right five sensitive grid 6, 7 and right Tun sensitive grid, the A sensitive grid 4 between the gate 5 and the b-sensitive mutually interdigitated arrangement, left Tun sensitive gate 2, gate 3 sensitive five left and right gate 6 and the right five-sensitive sensitive Tun W between the gate 7 may also be arranged mutually interdigitated W contrast, FIG. 2, for example, four operation interdigital sensitive grid is not formed, but if the length of the four sensitive transfer large gate can be formed interdigital W. 所述叉指布置是指:两敏感栅的各敏感段9轴线所在平面上,在与敏感段轴线垂直方向上两敏感栅的敏感段错落分布,对在该方向上两敏感栅之敏感段分别出现的次序和次数不做限制。 Refers to the interdigital arrangement: two segments of each sensitive gate 9 sensitive axis lies on a plane, in a direction perpendicular to segment sensitive sensitive sensitive two axial segments scattered distribution grid, in the direction of the critical section of the gate were two sensitive order and does not limit the number of occurrences. 由于左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7的相对位置由应变片生产工艺保证被相当精确地固定了,运也是本发明能检测工件应变轴向偏导数的关键之一。 Since the left Tun sensitive gate 2, fifth from left sensitive grid 3, the A sensitive grid 4, the B sensitive gate 5, the relative position of the right five-sensitive gate 6 and a right Tun sensitive grid 7 is fairly accurately secured by the strain gages production process to ensure , the present invention can be also detected transport key piece axially partial derivative strain.

[005引综上所述,本发明左屯敏感栅2、左五敏感栅3、中甲敏感栅4、中乙敏感栅5、右五敏感栅6和右屯敏感栅7的敏感段在相同的应变下敏感段的总电阻变化值也呈7:5:12:12:5:7 的比例关系,各敏感栅中屯、在横向上无偏差,在轴向上部分存在偏差,左屯敏感栅2的中屯、 与左五敏感栅3的中屯、之间距离为0,左屯敏感栅2的中屯、与中甲敏感栅4的中屯、的距离为Δ XI,中甲敏感栅4的中屯、与中乙敏感栅5的中屯、的距离为0,中乙敏感栅5的中屯、与右屯敏感栅7的中屯、的距离为ΔXI,右屯敏感栅7的中屯、与右五敏感栅6的中屯、之间距离为0。 [005 cited summary, the present invention is susceptible Tun left gate 2, gate 3 left five sensitive, the sensitive gate 4 A, B the sensitive gate 5, the gate 6 and the right five-sensitive sensitive sensitive grid Tun a right section 7 in the same the total value of the resistance change in the strain sensitive sections also showed 7: 7 ratio between the respective gate Tun sensitive, no deviation in the lateral direction, there is a deviation in the axial portion, Tun sensitive left: 5: 12: 12: 5 Tun gate 2, and five left Tun sensitive gate 3, the distance is between 0, left Tun Tun sensitive gate 2, the distance a Tun sensitive gate 4, is Δ XI, the a sensitive gate Tun 4, and the b-sensitive gate Tun 5, the distance is 0, the b sensitive gate Tun 5, the right Tun sensitive gate Tun 7, a distance ΔXI, right-Tun sensitive grid 7 in the village, and the right five Tun sensitive gate 6, the distance is between 0.

[0059]令自由状态下左五敏感栅3电阻为化0,中乙敏感栅5电阻为Rmo,右屯敏感栅7电阻为化0,应有化o+Rro=Rmo=Ro。 [0059] The left five sensitive resistance of the gate 3 so that a free state 0, the gate 5 in the B sensitive resistance Rmo, the right Tun sensitive resistance of the gate 7 0, should be of o + Rro = Rmo = Ro. 将本发明的应变片安置于某有表面应变时,左五敏感栅3电阻为Ro+Δ化,中敏感栅4电阻为Ro+ΔRmo,右屯敏感栅7电阻为Ro+Δ化;另一方面,左五敏感栅3 W及右屯敏感栅7的中屯、分别位于图2中X轴与yL的交点W及X轴与yR的交点,轴向上相距2A XI。 When the strain gauge of the present invention is disposed with a certain surface strain, fifth from left sensitive grid 3 of the resistance Ro + Δ, the gate 4 sensitive resistance Ro + ΔRmo, the right Tun sensitive gate 7 of the resistance Ro + Δ; other aspect, fifth from left and right sensitive grid 3 W Tun Tun sensitive gate 7, respectively, located at the intersection of the intersection of W, and the X-axis in FIG. 2 yR and yL the X axis, the axial distance 2A XI. 设X为右屯敏感栅7中屯、右侧2ΔXI处,也就是图2中X轴与yoR的交点,利用敏感栅电阻与表面应变的关系W及数值微分的公式(3)有: Let X Right Tun Tun-sensitive gate, at the right 2ΔXI 7, i.e. X-axis in FIG. 2 yoR the intersection with the surface of the gate resistance using sensitive strain relationship W and numerical differential equation (3):

[0060] [0060]

Figure CN105444662AD00101

[0061 ] 其中el为左五敏感栅3中屯、处的应变,εΜ为中乙敏感栅5中屯、处的应变,εκ为右屯敏感栅7中屯、处的应变。 [0061] el wherein the gate to the left of five sensitive strain 3 Tun, at, εΜ acetic strain sensitive grid 5 Tun, at, εκ strain sensitive grid 7 a right Tun Tun, at. 运即是本实施例测量表面应变轴向偏导的原理。 That is the principle of operation of the present embodiment the measuring surface strain in axial direction of the deflector. 特别注意,上式所计算的数值微分为右屯敏感栅7中屯、偏右外侧2ΔXI位置的应变轴向一阶偏导,该位置为应变片的右侧边缘之外,因此具有便于测量工件角落处、边缘处等对应变片有尺寸限制部位的轴向一阶偏导的优势。 Special attention, numerical differentiation formula is calculated to be sensitive to the right Tun Tun gate 7, an axially-right order derivative strain 2ΔXI outer position, which is beyond the right edge position of the strain gauge, and therefore easy to measure a workpiece having strain gauge is limited in size advantage axial portion partial Derivative of corners, edges and the like. 结合图2,注意到右屯敏感栅7的敏感段9较中乙敏感栅4的敏感段9 短,其目的均在于尽量缩小右屯敏感栅7中屯、到应变片右侧边缘的距离,W便于进一步发挥上述优势。 In conjunction with FIG. 2, the right notes Tun sensitive sensitive grid section 7 of 9 B shorter than the sensitive sensitive grid section 4 9, wherein an object to minimize both the right Tun Tun sensitive gate 7, the distance to the right edge of the strain gauge, W easy to further develop these advantages. 同样,左屯敏感栅2、中甲敏感栅4和右五敏感栅6可配合计算左屯敏感栅2中屯、偏左外侧2ΔXI位置的应变轴向一阶偏导数,该位置位于图2中X轴与yoL的交点;通过缩短左屯敏感栅2的敏感段9的长度,尽量缩小左屯敏感栅2中屯、到应变片左侧边缘的距离。 Similarly, the left Tun sensitive gate 2, gate 4 in A sensitive and a right-sensitive gate 6 can be used with five of left and Tun Tun-sensitive gate 2, strain left axially outer position 2ΔXI first order partial derivatives, the position is located in FIG. 2 yoL intersection with the X axis; Tun left by shortening the gate length sensitive 9-sensitive section 2, to minimize the left Tun Tun-sensitive gate 2, a distance to the left edge of the strain gauges. 上述右屯敏感栅7中屯、偏右外侧2ΔXI位置的应变轴向一阶偏导和左屯敏感栅2中屯、偏左外侧2ΔXI位置的应变轴向一阶偏导数可W同时测量。 He said right sensitive grid 7 Tun Tun, Strain axially outer 2ΔXI-right position and a left-order derivative Tun Tun-sensitive gate 2, left outside position 2ΔXI axial strain may be a partial derivatives of W measured simultaneously.

[0062] 将本实施例配合电桥可用于测量应变、应变轴向一阶偏导,假设电桥输入电压为ui、输出电压为U。 [0062] The present embodiment can be used with the bridge measuring strain, axial strain a partial derivative, assuming the input voltage of the bridge ui, output voltage U. ,测量电桥的示意图见图3。 , A schematic view of the measuring bridge shown in Figure 3. 在无工件应变作用时,电桥各桥臂电阻依顺时针方向分别标记为扣、1?2、1?3、1?4,在不会混淆的情况下也用运些符号标记电阻所在电桥。 Strain in the absence of the work piece, each arm of the bridge resistors are labeled clockwise buckle, 1? 2,? 3,? 4, in the case also not be confused with the operation of these symbol mark resistance bridge where . 每个电桥上可W安放应变片的敏感栅或者电阻。 Each electrical bridge can be placed W sensitive grid or resistance strain gauge. 与一般的应变片布置相同,如果在多个桥臂上安置敏感栅,对各安置位置的次序、应变有定性的要求。 The same general arrangement of strain gauges, if disposed in a plurality of sensitive grid bridge arm, of the order of the setting position, the strain qualitative requirements. 无工件应变作用时,电桥的输出电压公式为 When unstrained the work piece, the output voltage of the bridge to the formula

[0063] [0063]

Figure CN105444662AD00102

(5、 (5,

[0064] 此时,要求电桥平衡也就是11。 [0064] In this case, the bridge balance is required 11. = 0,于是必须满足所谓电桥平衡条件RiR3-R2R4 = 0, 采用的电桥进一步满足 = 0, then the electrical equilibrium condition must satisfy the so-called bridge RiR3-R2R4 = 0, using the bridge further satisfies

[00化]化=化=33 = 1?4, (6) [Of 00] of 33 = = = of 1? 4, (6)

[0066] 因为,第一,满足条件(6)时,根据有关理论应变片灵敏度最高;第二,测量应变或者应变轴向偏导的方法均要求条件(6)成立。 [0066] Because, first, the condition (6), according to the theory of strain gauge highest sensitivity; second, axial strain or strain measurement methods require the partial derivatives of the condition (6) is established. 当应变片随外界应变也发生应变时,上述电桥平衡条件一般不再成立,此时 When the strain gauge with a strained also occur outside the bridge balance condition is no longer true in general, at this time

[0067] [0067]

Figure CN105444662AD00111

[006引由于ΔRi<<Ri(i=l,2,3,4)故第一个-成立,第二个-当ΔR广ΔR2与ΔR3-ΔR4 同号或者异号但IARi-AR2|与IAR3-AR4|不十分接近时成立,在工程上合理选择应变片安置位置完全可W实现。 [006 since the lead ΔRi << Ri (i = l, 2,3,4) so ​​that the first - set up, the second - when ΔR wide ΔR2 and ΔR3-ΔR4 same number or different numbers, but IARi-AR2 | and IAR3 -AR4 | is not very close to the establishment, a reasonable choice of strain gauges placed in position on the W project fully realized. 一般可用式(7)获取的电压测量应变;对应变轴向偏导可结合式(4)和式(7),合理地设计安排各桥臂敏感栅和电阻,例如桥臂化布置中乙敏感栅5,桥臂R2串联布置右屯敏感栅7和左五敏感栅3,其余桥臂配置等值电阻,可获得与右屯敏感栅7中屯、偏右外侧2ΔXI处应变轴向一阶偏导呈线性关系的电压值U。 Voltage measurement generally available strain of formula (7) obtained; deflector may be axially strain of Formula (4) and (7), the rational design of each arm arranged sensitive resistor and a gate, for example of the arm arrangement acetate sensitive the gate 5, the right arm is arranged in series R2 Tun sensitive grid 7 and the fifth left sensitive grid 3, the arm rest configuration equivalent resistance can be obtained with a right sensitive grid 7 Tun Tun, strain-right outer side at one axial 2ΔXI order partial guide was a linear relationship of voltage U. ,该电压为微弱信号需进行放大。 The voltage required to amplify the weak signal.

Claims (8)

1. 一种可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,包括基底,其特征在于:所述金属应变片还包括六个敏感栅,每个敏感栅的两端分别连接一根引脚,所述基底上固定所述六个敏感栅; 每一敏感栅包括敏感段和过渡段,所述敏感段的两端为过渡段,所述敏感段呈细长条形,所述过渡段呈粗短形,所述敏感段的电阻远大于所述过渡段的电阻,相同应变状态下所述敏感段的电阻变化值远大于所述过渡段的电阻变化值,所述过渡段的电阻变化值接近于0; 每个敏感段的所有横截面形心构成敏感段轴线,该敏感段轴线为一条直线段,所述六个敏感栅中各敏感段的轴线平行并且位于同一平面中,敏感段轴线所确定平面内,沿所述敏感段轴线方向即轴向,与轴向垂直的方向为横向;每个敏感段上存在其两侧电阻值相等的一个横截面, A double-sided sheets may measure axially outer axial deviation deflector sensitive grid six full bridge strain mixed interdigitated metal sheet, comprising a substrate, wherein: said metal plate further includes six strain sensitive grid, each a sensitive gate ends are connected to a pin fixed on the substrate sensitive to the six gate; sensitive segments comprising each sensitive grid and a transition section, both ends of the transition section is a sensitive section, said sensitive elongated strip segment, said transition segment in stubby shape, the resistance is much greater than the resistance of the sensitive transition section segments, the resistance change of the state of the same strain sensitivity is much greater than the segment transition section variable resistance value, the resistance change value of the transition section close to 0; all sensitive cross-sectional centroid of each segment constituting the sensitive axis segment, the segment is a sensitive axis of the straight line segment, each of the six gate sensitive sensitive sections parallel to the axis and located in the same plane, the sensitive axis of the segment is determined in a plane, the sensitive direction of the axis i.e. axial sections, perpendicular to the axial direction is transverse; resistance value in the presence of both sides of each segment equal sensitive a cross section, 取该截面形心位置并以该敏感段电阻值为名义质量构成所在敏感段的名义质点,各个敏感段的名义质点共同形成的质心位置为敏感栅的中心; 六个敏感栅中心之间在横向上无偏差,在轴向部分存在偏差,六个敏感栅按敏感栅中心位置的顺序,沿轴向从左至右,首先是左七敏感栅和左五敏感栅,然后是中甲敏感栅和中乙敏感栅,最后是右五敏感栅和右七敏感栅;左七敏感栅中心与左五敏感栅中心之间距离为0,左七敏感栅中心与中甲敏感栅中心的距离为ΔX1,中甲敏感栅中心与中乙敏感栅中心的距离为0,中乙敏感栅中心与右七敏感栅中心的距离为△XI,右七敏感栅中心与右五敏感栅中心之间距离为0; 各敏感段轴线所确定平面上,左七敏感栅、左五敏感栅、中部中甲敏感栅与中乙敏感栅之间互为叉指布置,中甲敏感栅、中乙敏感栅、右边右七敏感栅与右五 The centroid position of the cross section taken in and constitute a critical section where the dot nominal resistance value at the nominal mass-sensitive section, the nominal position of the centroid of each particle sensitive segments together form the center of the sensitive gate; transverse center between the six sensitive grid the unbiased, there is a deviation in axial section, six in the order sensitive sensitive grid gate center position, in the axial direction from left to right, a left and a left five seven sensitive grid sensitive grid, then the sensitive gate and the a the b sensitive grid, and finally the right and the right seven five sensitive grid sensitive grid; distance between the center of the left seven five sensitive sensitive grid center of the left gate 0, gate sensitive seventh left center distance a of the center of the sensitive gate ΔX1, a sensitive grid in the center of the gate from the b sensitive centers is 0, from the center of the gate sensitivity in the b right seven sensitive grid center is △ XI, right seven sensitive grid center distance between the right and five sensitive grid center is 0; each segment sensitive axes defined on a plane, is arranged between mutually interdigitated seventh left sensitive grid, five left-sensitive grid, the middle and the sensitive grid acetate a sensitive gate, the gate sensitivity a, b of the sensitive grid, the right right seven sensitive gate and the fifth from right 敏感栅之间互为叉指布置; 左七敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右七敏感栅的敏感段总电阻呈7 :5:12:12:5:7的比例关系,左七敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右七敏感栅的敏感段在相同的应变下敏感段的总电阻变化值也呈7:5: 12:12:5:7的比例关系。 Disposed between mutually interdigitated sensitive grid; total resistance of the sensitive sensitive grid segment seventh left, left five sensitive gate, the gate sensitivity A, B of the sensitive gate, the gate sensitivity and the right five right seven-sensitive gate was 7: 5:12 : ratio between 7 and seventh left sensitive grid, fifth from left sensitive grid, the a sensitive grid, the b sensitive grid, fifth right sensitive gate and the seventh right sensitive grid sensitive segments in the same strain sensitive section: 12: 5 the total resistance change value also showed a ratio of 7: relationship 7: 5: 12: 12: 5.
2. 如权利要求1所述的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,其特征在于:每个敏感段的所有横截面形状尺寸一致,取每个敏感段的轴线中点位置并以该敏感段电阻值为名义质量构成所在敏感段的名义质点,所述左七敏感栅、左五敏感栅、中甲敏感栅、中乙敏感栅、右五敏感栅和右七敏感栅的敏感段总长度呈7:5:12:12: 5:7的比例关系。 Double-sided sheet may measure axially outer axial deflector as claimed in claim 1, said deviation sensitive grid six full bridge strain mixed interdigitated metal sheet, wherein: all of uniform cross-sectional shape of each segment size sensitive , taking the midpoint of each segment sensitive axis and constituting a resistance value at the nominal mass sensitive section where nominal particle sensitive segment of the left seven-sensitive gate, five left-sensitive grid, the grid a sensitive, the sensitive gate b the total length of the fifth right segment sensitive sensitive sensitive gate and the gate of the seventh right was 7: 7 ratio between: 5: 12: 12: 5.
3. 如权利要求1或2所述的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,其特征在于:左七敏感栅均与右七敏感栅、右五敏感栅之间呈叉指布置,左五敏感栅均与右七敏感栅、右五敏感栅之间呈叉指布置。 3 or the outer sheet 12 may measure an axial deflector bilateral axial deviation sensitive grid six full bridge strain mixed interdigitated metal sheet as claimed in claim, wherein: the gate-sensitive seventh left and right seven were sensitive gate, was fifth from right interdigital between sensitive grid layout, fifth from left and right seven sensitive grid are sensitive gate, was arranged between fifth from right interdigital sensitive gate.
4. 如权利要求1或2所述的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,其特征在于:相对中甲敏感栅和中乙敏感栅,右七敏感栅和左七敏感栅的敏感段轴向长度可较短而横向分布可较密。 4. The double-sided sheets may measure axially outer axial deflector according to claim 1 or 2, the gate bias sensitive six full bridge strain mixed interdigitated metal sheet, wherein: the gate relative to the A and B-sensitive sensitive the axial length of the critical section of the gate, the gate sensitivity and the left and right seven seven shorter sensitive grid may be densely distributed laterally.
5. 如权利要求1或2所述的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,其特征在于:所述金属应变片还包括盖片,所述盖片覆盖于所述敏感栅和基底上。 5. The double-sided sheets may measure axially outer axial deflector 12 or the gate bias sensitive six full bridge strain mixed interdigitated metal sheet as claimed in claim, wherein: said sheet metal strain further comprises a cover sheet the cover slip on the sensitive gate and the substrate.
6. 如权利要求1或2所述的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,其特征在于:所述敏感栅为丝式、箱式、薄膜式或厚膜式敏感栅。 6 or the outer sheet 12 may measure an axial deflector bilateral axial deviation sensitive grid six full bridge strain mixed interdigitated metal sheet as claimed in claim, wherein: said wire is a sensitive gate, box type, film type or a thick film sensitive grid.
7. 如权利要求1或2所述的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,其特征在于:所述基底为胶膜基底、玻璃纤维基底、石棉基底、金属基底或临时基底。 7 or the outer sheet 12 may measure an axial deflector bilateral axial deviation sensitive grid six full bridge strain mixed interdigitated metal sheet as claimed in claim, wherein: said substrate is a film substrate, a glass fibrous substrate, asbestos substrate, a metal substrate or a temporary substrate.
8. 如权利要求1或2所述的可测量双侧片外轴向偏导的轴向偏差六敏感栅全桥混合叉指金属应变片,其特征在于:所述六个敏感栅左、中、右布置在基底上。 8 or the outer sheet 12 may measure an axial deflector bilateral axial deviation sensitive grid six full bridge strain mixed interdigitated metal sheet as claimed in claim, characterized in that: said sensitive grid six left, right disposed on the substrate.
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