CN105415509A - Silicon ingot squarer and silicon ingot squaring cutting method - Google Patents

Silicon ingot squarer and silicon ingot squaring cutting method Download PDF

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Publication number
CN105415509A
CN105415509A CN201510617450.XA CN201510617450A CN105415509A CN 105415509 A CN105415509 A CN 105415509A CN 201510617450 A CN201510617450 A CN 201510617450A CN 105415509 A CN105415509 A CN 105415509A
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cutting
silicon ingot
cut
plummer
support
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CN201510617450.XA
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CN105415509B (en
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卢建伟
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Haining Dijin science and Technology Co., Ltd.
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SHANGHAI NISSIN MACHINE TOOL CO Ltd
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Abstract

The invention provides a silicon ingot squarer and a silicon ingot squaring cutting method. The silicon ingot squarer comprises a base, a bearing platform arranged on the base in a sliding mode, a cutting mechanism and a lifting rotation mechanism. The bearing platform is provided with a plurality of cutting seams. The cutting mechanism comprises a cutting supporting frame fixedly arranged on the base and located in the sliding direction of the bearing platform and a plurality of cutting liens erected on the cutting supporting frame in parallel. The lifting rotation mechanism is arranged on the base and located below the bearing platform, and comprises a seat frame, a lifting mechanism, a lifting supporting frame, a rotary part and an ejection rod. When the lifting rotation mechanism ascends, the ejection rod is driven to push a silicon ingot to be cut upwards along the cutting seams, and the silicon ingot to be cut breaks away from the bearing platform under the pushing of the ejection rod. When the lifting rotation mechanism rotates, the ejection rod drives the silicon ingot to be cut to rotate by a cutting angle. By means of the silicon ingot squarer and the silicon ingot squaring cutting method, the problems that when block-shaped finished products are obtained through existing cutting equipment, silicon ingots need to be cut one by one multiple times, so that the cutting efficiency is low, and waste of labor cost is caused due to manual overturning are solved.

Description

Silicon ingot excavation machine and silicon ingot evolution cutting method
Technical field
The present invention relates to cutting field, particularly relate to a kind of silicon ingot excavation machine and silicon ingot evolution cutting method.
Background technology
Line cutting technology is evolution process technology more advanced in the world at present, its principle is rubbed to workpiece to be processed (such as: silicon rod, sapphire or other semiconductor hard brittle materials) by the golden steel wire of high-speed motion, the side's of cutting out ingot, thus reach cutting object.To in the cutting process of workpiece, gold steel wire is by the guiding of guide roller, main line roller is formed a bracing cable net, and workpiece to be processed realizes the feeding of workpiece by the rise and fall of workbench, under the effect of compression pump, cooling water is sprayed to the cutting position of golden steel wire and workpiece by the cooling water automatic spraying device be assemblied on equipment, is moved back and forth to produce cut, so that the hard brittle materials such as semiconductor are once cut into polylith simultaneously by golden steel wire.Have compared with line cutting technology cuts with traditional knife saw sheet, grinding wheel and inner circle that efficiency is high, production capacity is high, precision advantages of higher.But, current linear cutting equipment still Shortcomings, cutting effect only can be in blocks, obtain into the finished product of block if want, need the workpiece of dicing transverse direction one by one to place cutting on the table, make cutting efficiency low, and need manual operation, waste of manpower cost.
Summary of the invention
The invention provides a kind of silicon ingot excavation machine, for solve existing cutting equipment need when obtaining into block finished product repeatedly to cut one by one and make cutting efficiency low and needs manually upset cause the problems such as waste of manpower cost.
One aspect of the present invention provides a kind of silicon ingot excavation machine, comprising: base; Be slidedly arranged on described base, for the plummer carrying silicon ingot to be cut, described plummer is parallel is provided with multiple cutting seam; Cutting mechanism, comprise be fixedly arranged on described base and the cutting support be positioned on the sliding set direction of described plummer and parallel laying in many lines of cut of described cutting support; When described plummer slides to described cutting support, described line of cut cuts the silicon ingot described to be cut on described plummer, and described line of cut is positioned at described cutting seam when cutting described silicon ingot to be cut; And be located at described base, be positioned at lifting rotation mechanism below described plummer, comprising: mounting, the lifting support be located at by elevating mechanism on described mounting, the push rod be located at the revolving part on described lifting support and be located on described revolving part; When described lifting rotation mechanism rises, drive described push rod to stitch up silicon ingot to be cut described in jacking along described cutting, described silicon ingot to be cut is departed from described plummer under the jacking of described push rod; When described lifting rotation mechanism rotates, described silicon ingot to be cut is driven to rotate a cutting angle by described push rod.
Alternatively, described elevating mechanism comprises the multiple elevating levers be located between described mounting and described lifting support.
Alternatively, described revolving part comprises the swivel plate be set up on described lifting support, for rotating, and described push rod is fixedly arranged on described swivel plate.
Alternatively, the length of described push rod is greater than the thickness of described plummer.
Alternatively, described base is relatively set with a pair slide rail, described plummer is slidedly arranged on described slide rail.
Alternatively, described slide rail is chute, and the bottom of described plummer is provided with the pulley be suitable in described chute; Or described slide rail is provided with pulley, the bottom of described plummer is provided with the chute of corresponding described pulley.
Alternatively, described cutting support is added is provided with multipair cutting roller, and arbitrary is setting up and down to the described cutting roller of two in described cutting roller, and many described line of cut correspondences are wrapped on multipair described cutting roller to form cutting net.
Alternatively, described cutting support is П type structure, comprises the brace summer of back timber both sides relative to being positioned at described back timber.
Alternatively, described cutting angle is 90 ° or 270 °.
On the other hand, present invention also offers a kind of silicon ingot evolution cutting method being applied to above-mentioned silicon ingot evolution cutting equipment, comprise: the plummer being placed with silicon ingot to be cut, towards cutting support slippage, is stitched along the cutting on described plummer by the line of cut on described cutting support and not exclusively cuts described silicon ingot to be cut; When described line of cut is close in the non-cutting zone reserved at described silicon ingot edge to be cut, described plummer stops mobile also described cutting support slippage dorsad; When described plummer slides onto above lifting rotation mechanism, lifting support in described lifting rotation mechanism rises, push rod in described lifting rotation mechanism correspond to described cutting and stitches up silicon ingot to be cut described in jacking, and described silicon ingot to be cut is departed from described plummer under the jacking of described push rod; When described silicon ingot to be cut departs from described plummer, described plummer continues described cutting support slippage dorsad and detaches between described silicon ingot to be cut and described lifting rotation mechanism, revolving part in described lifting rotation mechanism rotates, and drives described silicon ingot to be cut to rotate a cutting angle by described push rod; Described plummer is towards described cutting support slippage and move between described silicon ingot to be cut and described lifting rotation mechanism, and the lifting support of described lifting rotation mechanism declines, and described silicon ingot to be cut falls within described plummer; And described plummer continues towards the slippage of cutting support direction, stitched along the cutting on described plummer by the line of cut on described cutting support and described silicon ingot to be cut is cut completely, completing the evolution of silicon ingot.
Silicon ingot excavation machine of the present invention and silicon ingot evolution cutting method, at least have following technique effect or advantage:
By being positioned in the base below plummer, lifting rotation mechanism is set, before silicon ingot to be cut carries out second time cutting, described in the rising jacking of lifting rotation mechanism, silicon ingot to be cut departs from described plummer, and rotarily drive described silicon ingot to be cut and rotate a cutting angle, thus achieve the cutting angle automatically regulated needed for described silicon ingot to be cut, solve existing cutting equipment need repeatedly to cut one by one when obtaining into block finished product and make cutting efficiency low, and need artificial upset to cause the problems such as waste of manpower cost, greatly improve operating efficiency.
Accompanying drawing explanation
Fig. 1 is the perspective view of silicon ingot excavation machine of the present invention.
Fig. 2 is the side view of silicon ingot excavation machine in Fig. 1.
Fig. 3 is the side view that in silicon ingot excavation machine one embodiment of the present invention, silicon ingot to be cut is positioned over plummer.
Fig. 4 is the top view that in silicon ingot excavation machine one embodiment of the present invention, silicon ingot to be cut is positioned over plummer.
Fig. 5 is the side view that in silicon ingot excavation machine one embodiment of the present invention, line of cut is close in the non-cutting zone that silicon ingot edge to be cut is reserved.
Fig. 6 is the top view that in silicon ingot excavation machine one embodiment of the present invention, line of cut is close in the non-cutting zone that silicon ingot edge to be cut is reserved.
Fig. 7 be in Fig. 6 silicon ingot to be cut overlook enlarged drawing.
Fig. 8 is the side view that the push rod in silicon ingot excavation machine one embodiment of the present invention in lifting rotation mechanism correspond to that up jacking silicon ingot to be cut is stitched in cutting.
Fig. 9 is that in silicon ingot excavation machine one embodiment of the present invention, silicon ingot to be cut to depart from when plummer plummer from the side view detached between silicon ingot to be cut and lifting rotation mechanism.
Figure 10 is that the push rod in silicon ingot excavation machine one embodiment of the present invention in lifting rotation mechanism drives silicon ingot to be cut to rotate the side view of a cutting angle.
Figure 11 is that after in silicon ingot excavation machine one embodiment of the present invention, silicon ingot to be cut rotates a cutting angle, plummer moves into the side view between silicon ingot to be cut and lifting rotation mechanism.
Figure 12 is the side view that after silicon ingot to be cut rotates a cutting angle in silicon ingot excavation machine one embodiment of the present invention, lifting rotation mechanism declines.
Figure 13 is the side view that after silicon ingot to be cut rotates a cutting angle in invention silicon ingot excavation machine one embodiment, line of cut cuts completely to silicon ingot to be cut.
Detailed description of the invention
Below by way of specific instantiation, embodiments of the present invention are described, those skilled in the art the content disclosed by this description can understand other advantages of the present invention and effect easily.The present invention can also be implemented or be applied by detailed description of the invention different in addition, and the every details in this description also can based on different viewpoints and application, carries out various modification or change not deviating under spirit of the present invention.
It should be noted that, structure, ratio, size etc. that this description institute accompanying drawings illustrates, content all only in order to coordinate description to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the present invention can produce and the object that can reach, still all should drop on disclosed technology contents and obtain in the scope that can contain.Simultaneously, quote in this description as " on ", D score, "left", "right", " centre " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the present invention.
Refer to Fig. 1, Fig. 2 and Fig. 3, show silicon ingot excavation machine of the present invention structural representation in one embodiment, wherein, Fig. 1 is the perspective view of silicon ingot excavation machine of the present invention, Fig. 2 is the side view of silicon ingot excavation machine in Fig. 1, and Fig. 3 is the side view that in silicon ingot excavation machine one embodiment of the present invention, silicon ingot to be cut is positioned over plummer.It should be noted that, in the present invention, silicon ingot excavation machine is except carrying out except cutting evolution to silicon ingot, can also cut other workpiece to be cut, such as: glass cover-plate, pottery, graphite, sapphire etc., following examples are mainly described in detail for silicon ingot.Existing silicon ingot, can first by silicon ingot dicing when carrying out evolution, and then the silicon ingot of dicing transverse direction one by one placed and carrying out the finished product cutting to obtain into block on the table, the method needs manual operation, and cutting efficiency is low, waste of manpower cost.Silicon ingot excavation machine of the present invention will rotarily drive silicon ingot 4 to be cut and rotate a cutting angle after silicon ingot 4 to be cut being carried out first time cutting, thus achieve the cutting angle automatically regulated needed for silicon ingot 4 to be cut.
As depicted in figs. 1 and 2, the present invention shows described silicon ingot excavation machine in one embodiment, comprising: base 5, the plummer 1 be slidedly arranged on base 5, cutting mechanism 2 and be located at the lifting rotation mechanism 3 of base 5.
Below silicon ingot excavation machine of the present invention is described in detail.
As depicted in figs. 1 and 2, base 5, as the main body frame of silicon ingot excavation machine of the present invention, plummer 1, cutting mechanism 2 and lifting rotation mechanism 3 are all located on base 5, wherein, plummer 1 is slidedly arranged on base 5, and cutting mechanism 2 is fixedly installed on an end of base 5.Preferably, for preventing plummer 1 from skidding off in base 5, as shown in Figure 2, the other end of base 5 is provided with baffle plate 6, and baffle plate 6 can be curved.Plummer 1 is slidedly arranged between cutting mechanism 2 and baffle plate 6.Lifting rotation mechanism 3 is fixedly installed on base 5, and between cutting mechanism 2 and baffle plate 6, preferably, lifting rotation mechanism 3 is near cutting mechanism 2.
As depicted in figs. 1 and 2, plummer 1, for carrying silicon ingot 4 to be cut and being slidedly arranged on base 5, plummer 1 is parallel is provided with multiple cutting seam 10.As depicted in figs. 1 and 2, plummer 1 can be that silicon ingot 4 to be cut is positioned in plummer 1 and is positioned on lower ladder loading end in a stair-stepping carrying workbench.Plummer 1 can pass through but be not limited to be slidedly arranged on base 5 with under type, as depicted in figs. 1 and 2, base 5 is relatively set with a pair slide rail 70, plummer 1 is slidedly arranged on slide rail 70, the bracing frame 71 be slidedly arranged on respectively on a pair slide rail 70 is relatively installed with bottom plummer 1, bracing frame 71 can be side plate as depicted in figs. 1 and 2, and described side plate top is fixed on bottom plummer 1, and described side plate bottom is slidedly arranged on slide rail 70.Slide rail 70 can be chute, the bracing frame 71 be positioned at bottom plummer 1 is provided with the pulley being suitable for described chute, in order to realize the slippage of Automated condtrol plummer 1, described pulley can be connected with drive motors, by controlling the running of described drive motors to realize the control of advancing to plummer 1, plummer 1 can be made along described chute constantly close cutting mechanism 2, advance left, also also can make plummer 1 along chute away from cutting mechanism 2, advance to the right.In other embodiments, slide rail 70 also can be provided with pulley, the bracing frame 71 be positioned at bottom plummer 1 is provided with the chute of corresponding described pulley, in order to realize the slippage of Automated condtrol plummer 1, described chute can be connected with drive motors, by controlling the running of drive motors to realize the control of advancing to plummer 1, plummer 1 can be made along described pulley constantly near cutting mechanism 2, advance left, also also can make plummer 1 along described pulley away from cutting mechanism 2, advance to the right.
As depicted in figs. 1 and 2, cutting mechanism 2 comprise be fixedly arranged on base 5 and the cutting support 20 be positioned on the sliding set direction of plummer 1 and parallel laying in many lines of cut 21 of cutting support 20.Line of cut 21 can be the diamond wire being applicable to cut parts to be processed (such as: crystalline silicon, pottery, glass, graphite, sapphire etc.).Cutting support 20 is added is provided with multipair cutting roller 22, arbitrary is setting up and down to the cutting roller of two in cutting roller 22, each line of cut correspondence is wrapped on a pair pair of cutting roller 22, so, many line of cut 21 correspondence is wrapped on multipair cutting roller 22 to form cutting net, between adjacent two lines of cut 21 and row distance corresponds to the distance in plummer 1 between adjacent two cutting seams 10, thus when plummer 1 slides to cutting support 20, line of cut 21 can enter to cut silicon ingot 4 to be cut along the cutting seam 10 in plummer 1.Cutting support 20 can be that comprise the brace summer 202 of a back timber 201 both sides relative to being positioned at back timber 201, a pair slide rail 70 is arranged between two brace summers 202 as shown in Figure 1 in П type structure.As shown in Figure 5 and Figure 6, when plummer 1 slides to cutting support 20 on slide rail 70, line of cut 21 enters plummer 1 inside along the cutting seam 10 in plummer 1 and cuts silicon ingot 4 to be cut, and line of cut 21 is positioned at cutting seam 10 all the time when cutting silicon ingot 4 to be cut.
As shown in Figures 2 and 3, the invention provides and be located at base 5, be positioned at the lifting rotation mechanism 3 below plummer 1, comprise: mounting 30, the lifting support 35 on mounting 30 is located at by elevating mechanism, be located at the revolving part on described lifting support 35, and the push rod 33 be located on described revolving part, here, described elevating mechanism comprises the multiple elevating levers 31 be located between mounting 30 and described lifting support 35, elevating lever 31 can be connected with a lift cylinder and control by it, the lifting of elevating lever 31 is controlled by the running controlling described lift cylinder, described lift cylinder can be arranged at the inside of base 5 or mounting 30.Described revolving part comprises the swivel plate 32 be set up on lifting support 35, for rotating, and push rod 33 is fixedly arranged on swivel plate 32.Swivel plate 32 can be rotate in the following manner, and lifting support 35 top is provided with rotating shaft base, and swivel plate 32 to be located on rotating shaft base and to be engaged each other with swivel bearing.Particularly, the top of rotating shaft base is provided with multiple first fluted disc, the bottom of swivel plate 32 is provided with multiple second fluted discs corresponding with the first fluted disc of rotating shaft base, in the present embodiment, the central authorities of the bottom of swivel plate 32 are also provided with a rotating shaft, and described rotating shaft is connected with a rotary cylinder and controls by it, and described rotary cylinder is arranged at the below of rotating shaft base, utilize rising rotary cylinder and rising rotating shaft, swivel plate 32 can be driven to rotate.Facts have proved, the table top running accuracy of swivel plate 32 can reach ± scope of 3um within.Swivel plate 32 is installed with push rod 33, can enter in cutting seam 10 when lifting rotation mechanism 3 rises in order to make push rod 33, the width of push rod 33 corresponds to the width of cutting seam 10, simultaneously in order to make push rod 33 can push up from plummer 1 by silicon ingot 4 to be cut, the length of push rod 33 is greater than the thickness of plummer 1.In actual applications, when lifting rotation mechanism 3 rises, namely when elevating lever 31 rises, as shown in Figure 8, drive push rod 33 along cutting seam 10 up jacking silicon ingot 4 to be cut, the length of push rod 33 is greater than the thickness of plummer 1, and then silicon ingot 4 to be cut is departed from plummer 1 under the jacking of push rod 33; When lifting rotation mechanism 3 rotates, when namely swivel plate 32 rotates, under the effect of the frictional force between push rod 33 and silicon ingot to be cut 4, push rod 33 drives silicon ingot 4 to be cut to rotate a cutting angle, and described cutting angle at least comprises 90 ° or 270 °.It should be noted that, depart under the jacking of push rod 33 after plummer 1 at silicon ingot 4 to be cut, and before lifting rotation mechanism 3 rotates, please refer to Fig. 9, plummer 1 cutting support 20 slippage to the right detaching between silicon ingot 4 to be cut and lifting rotation mechanism 3 dorsad need be controlled, only at plummer 1 from after detaching between silicon ingot 4 to be cut and lifting rotation mechanism 3, swivel plate 32 can rotate, and drives silicon ingot 4 to be cut to rotate a cutting angle by push rod 33.
Next, composition graphs 1 to Figure 13, the present invention can also provide a kind of silicon ingot evolution cutting method, is applied to above-mentioned silicon ingot excavation machine, described method following steps:
Step 1, please refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, silicon ingot 4 to be cut is positioned on plummer 1, open described drive motors, and by controlling the running of described drive motors, the plummer 1 being placed with silicon ingot 4 to be cut is advanced left, along described chute constantly near cutting support 20, in figure 3, plummer 1 is moved to the left with silicon ingot 4 to be cut; Following with reference to Fig. 5 and Fig. 6, when plummer 1 slides to cutting support 20 on slide rail 70, line of cut 21 enters plummer 1 inside along the cutting seam 10 in plummer 1 and cuts silicon ingot 4 to be cut, and line of cut 21 is positioned at cutting seam 10 all the time when cutting silicon ingot 4 to be cut.
Step 2, please refer to Fig. 5, Fig. 6 and Fig. 7, and silicon ingot 4 to be cut carries out first time when cutting, and silicon ingot 4 edge to be cut is reserved with non-cutting zone 40, and the width of non-cutting zone 40 can be 1mm to 5mm.Carry out first time cut silicon ingot 4 to be cut time non-cutting zone 40 is set, make first time cutting terminate rear silicon chip in blocks to be sticked together due to non-cutting zone 40 in common one end, make described silicon chip when carrying out second time and cutting, not easily topple over or beat, ensure that stability, ensure that carrying out smoothly of silicon ingot evolution.When silicon ingot 4 to be cut carry out first time cut time, and when line of cut 21 is close in the reserved non-cutting zone 40 in silicon ingot 4 edge to be cut, by controlling the running of described drive motors, make plummer 1 stop mobile and cutting support 20 slippage dorsad to the right.On slide rail 70, accurate slippage is carried out in order to realize plummer 1, such as, when line of cut 21 is close in the non-cutting zone 40 reserved at silicon ingot 4 edge to be cut, plummer 1 needs to stop mobile also cutting support 20 slippage dorsad to the right, cutting support 20 can arrange positioning component, described positioning component can comprise the Laser emission and the receiving equipment that are arranged on cutting support 20 and honour the laser reflection equipment should be located on microscope carrier 1, described Laser emission and receiving equipment are arranged in cutting support 20 on a side of plummer 1, described Laser emission and receiving equipment are right against plummer 1, described laser reflection equipment is right against described Laser emission and receiving equipment.Below the operation principle of described positioning component is described: when locating, first, described laser transmitting set is facing to the continual Emission Lasers of described laser reflection equipment, described laser reflection equipment is continual gives described laser receiving set by laser reflection, the distance between plummer 1 and cutting support 20 can be drawn by the time difference calculating Laser emission and reception, and then real-time judge can go out line of cut 21 and whether be close in the reserved non-cutting zone 40 in silicon ingot 4 edge to be cut, and then control according to the running of judged result to described drive motors.
Step 3, please refer to Fig. 8, silicon ingot 4 to be cut is after first time, cutting terminated, by controlling the running of described drive motors, make plummer 1 slippage to the right and away from cutting support 20, in the process of plummer 1 slippage to the right, by above-mentioned positioning component orient plummer 1 slide onto above lifting rotation mechanism 3 time, close described drive motors, plummer 1 is made to stop slippage, next by controlling the running of described lift cylinder, control elevating lever 31 to rise, and then described lifting support is risen overally, and drive is set up on described lifting support, for the swivel plate 32 that rotates to rising, push rod 33 on swivel plate 32 upwards enters in cutting seam 10, and up jacking silicon ingot 4 to be cut, when swivel plate 32 is to when rising to the bottom being posted by plummer 1, length due to push rod 33 is greater than the thickness of plummer 1, silicon ingot to be cut 4 now departs from plummer 1 under the jacking of push rod 33.
Step 4, please refer to Fig. 9, depart from plummer 1 when at silicon ingot 4 to be cut, open described drive motors, by controlling the running of described drive motors, plummer 1 is made to continue slippage to the right, when plummer 1 continues cutting support 20 slippage to the right dorsad and from after detaching between silicon ingot 4 to be cut and lifting rotation mechanism 3, close described drive motors, make plummer 1 stop slippage.Next please refer to Figure 10, control lifting rotation mechanism 3 rotate by the running controlling described rotary cylinder, that is, the running of described rotary cylinder drives swivel plate 32 to rotate, and swivel plate 32 rotarily drives push rod 33 and rotates.Under the effect of the frictional force between push rod 33 and silicon ingot to be cut 4, silicon ingot 4 to be cut is driven to rotate a cutting angle by push rod 33, described cutting angle comprises 90 ° or 270 °, now, can see the gap that silicon ingot 4 to be cut first time cut seam 10 cutting stays from side view.
Step 5, please refer to Figure 11, after push rod 33 drives silicon ingot 4 to be cut to rotate a cutting angle, open described drive motors, by controlling the running of described drive motors, plummer 1 is made to continue slippage left, until plummer 1 moves between 4 silicon ingots 4 to be cut and lifting rotation mechanism 3 towards cutting support 20 slippage, close described drive motors, make plummer 1 stop slippage.Then please refer to Figure 12, by controlling the running of described lift cylinder, control elevating lever 31 to decline, and then make described lifting support entire lowering, and drive to be set up on described lifting support, for the swivel plate 32 that rotates to decline, lifting rotation mechanism 3 declines, until the silicon ingot to be cut 4 be positioned on push rod 33 falls within plummer 1 and push rod 33 departs from plummer 1.
Step 6, please refer to Figure 13, when silicon ingot 4 to be cut to fall within plummer 1 and push rod 33 departs from after plummer 1, open described drive motors, and by controlling the running of described drive motors, the plummer 1 being placed with silicon ingot 4 to be cut is advanced left, along described chute constantly near cutting support 20, by the line of cut 21 on cutting support 20, along the cutting seam 10 on plummer 1, silicon ingot to be cut 4 cuts completely, completes the evolution of silicon ingot.
Silicon ingot excavation machine of the present invention and silicon ingot evolution cutting method, at least have following technique effect or advantage:
By being positioned in the base below plummer, lifting rotation mechanism is set, before silicon ingot to be cut carries out second time cutting, described in the rising jacking of lifting rotation mechanism, silicon ingot to be cut departs from described plummer, and rotarily drive described silicon ingot to be cut and rotate a cutting angle, thus achieve the cutting angle automatically regulated needed for described silicon ingot to be cut, solve existing cutting equipment need repeatedly to cut one by one when obtaining into block finished product and make cutting efficiency low, and need artificial upset to cause the problems such as waste of manpower cost, greatly improve operating efficiency.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.

Claims (10)

1. a silicon ingot excavation machine, is characterized in that, comprising:
Base;
Be slidedly arranged on described base, for the plummer carrying silicon ingot to be cut, described plummer is parallel is provided with multiple cutting seam;
Cutting mechanism, comprise be fixedly arranged on described base and the cutting support be positioned on the sliding set direction of described plummer and parallel laying in many lines of cut of described cutting support; When described plummer slides to described cutting support, described line of cut cuts the silicon ingot described to be cut on described plummer, and described line of cut is positioned at described cutting seam when cutting described silicon ingot to be cut; And
Be located at described base, be positioned at lifting rotation mechanism below described plummer, comprising: mounting, the lifting support be located at by elevating mechanism on described mounting, the push rod be located at the revolving part on described lifting support and be located on described revolving part; When described lifting rotation mechanism rises, drive described push rod to stitch up silicon ingot to be cut described in jacking along described cutting, described silicon ingot to be cut is departed from described plummer under the jacking of described push rod; When described lifting rotation mechanism rotates, described silicon ingot to be cut is driven to rotate a cutting angle by described push rod.
2. silicon ingot excavation machine as claimed in claim 1, it is characterized in that, described elevating mechanism comprises the multiple elevating levers be located between described mounting and described lifting support.
3. silicon ingot excavation machine as claimed in claim 2, it is characterized in that, described revolving part comprises the swivel plate be set up on described lifting support, for rotating, and described push rod is fixedly arranged on described swivel plate.
4. silicon ingot excavation machine as claimed any one in claims 1 to 3, it is characterized in that, the length of described push rod is greater than the thickness of described plummer.
5. silicon ingot excavation machine as claimed in claim 1, it is characterized in that, described base is relatively set with a pair slide rail, described plummer is slidedly arranged on described slide rail.
6. silicon ingot excavation machine as claimed in claim 5, is characterized in that,
Described slide rail is chute, and the bottom of described plummer is provided with the pulley be suitable in described chute; Or
Described slide rail is provided with pulley, and the bottom of described plummer is provided with the chute of corresponding described pulley.
7. silicon ingot excavation machine as claimed in claim 1, it is characterized in that, described cutting support is added is provided with multipair cutting roller, and arbitrary is setting up and down to the described cutting roller of two in described cutting roller, and many described line of cut correspondences are wrapped on multipair described cutting roller to form cutting net.
8. silicon ingot excavation machine as claimed in claim 7, it is characterized in that, described cutting support is П type structure, comprises the brace summer of back timber both sides relative to being positioned at described back timber.
9. silicon ingot excavation machine as claimed in claim 1, it is characterized in that, described cutting angle is 90 ° or 270 °.
10. a silicon ingot evolution cutting method, is applied to silicon ingot evolution cutting equipment as claimed in any one of claims 1-9 wherein, it is characterized in that, comprise the following steps:
The plummer being placed with silicon ingot to be cut, towards cutting support slippage, is stitched along the cutting on described plummer by the line of cut on described cutting support and not exclusively cuts described silicon ingot to be cut;
When described line of cut is close in the non-cutting zone reserved at described silicon ingot edge to be cut, described plummer stops mobile also described cutting support slippage dorsad;
When described plummer slides onto above lifting rotation mechanism, lifting support in described lifting rotation mechanism rises, push rod in described lifting rotation mechanism correspond to described cutting and stitches up silicon ingot to be cut described in jacking, and described silicon ingot to be cut is departed from described plummer under the jacking of described push rod;
When described silicon ingot to be cut departs from described plummer, described plummer continues described cutting support slippage dorsad and detaches between described silicon ingot to be cut and described lifting rotation mechanism, revolving part in described lifting rotation mechanism rotates, and drives described silicon ingot to be cut to rotate a cutting angle by described push rod;
Described plummer is towards described cutting support slippage and move between described silicon ingot to be cut and described lifting rotation mechanism, and the lifting support of described lifting rotation mechanism declines, and described silicon ingot to be cut falls within described plummer; And
Described plummer continues towards the slippage of cutting support direction, is stitched and cuts completely described silicon ingot to be cut, complete the evolution of silicon ingot by the line of cut on described cutting support along the cutting on described plummer.
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CN106182479A (en) * 2016-08-25 2016-12-07 上海日进机床有限公司 The workbench of silicon ingot cutting machine, silicon ingot cutting machine and silicon ingot cutting method
CN106182474A (en) * 2016-08-30 2016-12-07 上海日进机床有限公司 Work-piece rotating device and the work piece cut equipment with this work-piece rotating device
CN107263747A (en) * 2016-04-06 2017-10-20 上海日进机床有限公司 Diamond wire and multi-wire saw equipment
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CN107263748A (en) * 2016-04-06 2017-10-20 上海日进机床有限公司 Work piece cut structure, work piece cut equipment and work piece cut method
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CN106182474A (en) * 2016-08-30 2016-12-07 上海日进机床有限公司 Work-piece rotating device and the work piece cut equipment with this work-piece rotating device

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