CN105355531B - Filament Holder for Ion Sources - Google Patents

Abstract

The invention discloses a kind of filament clamping device for ion gun, including arc chamber, stalk and insulating base, the insulating base is sheathed on stalk, stalk is fixedly installed on arc chamber by the insulating base, and stretched into stalk in arc chamber, the stalk passes through arc chamber, and filament is installed in one end, one end of close filament is arranged the insulating sheath beneficial to filament fastening clamp on the stalk, the protective jacket is abutted with the end face of insulating base, and is stretched into the periphery of arc chamber and blocked in the front of insulating base.The filament clamping device of the present invention, its protective jacket is sheathed on filament, not only improves filament fastening clamp, and abut with insulating base, stalk is separated with arc chamber insulation, during so that stalk introducing voltage, insulated between filament and arc chamber, furthermore, block in the front of insulating base the periphery that protective jacket stretches into arc chamber, avoid insulating base from being directly exposed in arc chamber, reduce insulation pollution, reduce the maintenance period of ion gun.

Description

Filament Holder for Ion Sources

technical field

The invention relates to the technical field of ion beam etching, in particular to a filament clamping device for an ion source.

Background technique

Ion beam etching is a purely physical etching process. It has the highest resolution and the best steepness among conventional etching methods, and can etch most materials. It is widely used in microelectronics technology. Usually, the discharge filament in the ion source of the ion beam etching machine uses a nut to fix the filament on the filament rod, and the filament rod is fixed on the discharge chamber through an insulator, and the insulator is directly exposed to the discharge chamber. This structure has the following disadvantages: (1 ) The insulating ceramic parts are easy to be polluted, which causes a short circuit between the filament and the discharge chamber; (2) The filament is fixed and installed in a nut-clamped manner, which is inconvenient to install, and the position is easy to change. The installed filament changes, which ultimately changes the consistency of the ion source performance .

Contents of the invention

The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, and provide a filament clamping device for an ion source that has good insulation, can reduce insulation pollution, and reduces the maintenance cycle of the ion source.

In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions:

A filament clamping device for an ion source, comprising a discharge chamber, a filament rod and an insulating seat, the insulating seat is sheathed on the filament rod, and the insulating seat fixes the filament rod on the discharge chamber, and with the filament The rod extends into the discharge chamber, the filament rod passes through the discharge chamber, and a filament is installed at one end, and the end of the filament rod close to the filament is covered with an insulating protective sleeve that facilitates the fastening and clamping of the filament. The end faces are in contact with each other, and the outer periphery protruding into the discharge chamber is shielded in front of the insulating seat.

As a further improvement of the above technical solution:

At least one labyrinth groove for reducing insulation pollution is provided on the outer periphery of the insulating seat extending into the discharge chamber, and the protective cover is shielded in front of the labyrinth groove.

The labyrinth groove is an annular groove or a spiral groove, and the axis of the labyrinth groove is the same as the axis of the filament rod.

The filament rod is radially provided with a clamping hole for installing the filament, and axially provided with a through groove that divides the clamping hole into two. The through groove extends into the discharge chamber, and the protective sleeve is sleeved in the through groove. outside to clamp the filament in the clamping hole.

The end of the protective sleeve away from the insulating seat is provided with a first tapered surface with the large end facing outwards, and the outer periphery of the filament rod is provided with a second tapered surface that matches the first tapered surface. The first tapered surface The taper of the shaped surface is smaller than the taper of the second tapered surface.

The other end of the filament rod away from the filament protrudes through the insulating seat, the protruding end is provided with a screw thread, and the protruding end is sleeved with an adjustment piece that facilitates the second tapered surface to be far away from or close to the first tapered surface.

The adjusting member includes an elastic member and a locking nut, the elastic member is arranged between the insulating seat and the locking nut, and when the locking nut compresses the elastic member against the insulating seat, the second tapered surface is close to the first The tapered surface closely fits with the first tapered surface to realize filament clamping.

The insulating seat is an inverted T-shaped structure, the large end face of the inverted T shape is located on the outer wall of the discharge chamber and fastened to the discharge chamber through the installation holes and bolts, and the small end face extends into the discharge chamber.

The protective sleeve is a stepped sleeve arranged coaxially with the filament rod and the insulating seat. The large end of the stepped sleeve faces downward, and the stepped inner hole of the stepped sleeve abuts against the end face of the insulating seat. The cylinder wall at the big end is shielded in front of the insulating seat, and the cylinder wall at the small end is close to the filament.

Compared with the prior art, the present invention has the advantages of:

The invention is used for the filament clamping device of the ion source. The protective sleeve is sleeved on the filament, which is not only beneficial to the fastening and clamping of the filament, but also abuts against the insulating seat to insulate and separate the filament rod from the discharge chamber, so that the filament rod can be introduced into the When the voltage is high, the filament is insulated from the discharge chamber. Furthermore, the protective sleeve extends into the outer periphery of the discharge chamber to cover the front of the insulating seat, preventing the insulating seat from being directly exposed to the discharge chamber, reducing insulation pollution, and reducing the maintenance cycle of the ion source.

Description of drawings

Fig. 1 is a schematic structural view of a filament clamping device used in an ion source according to the present invention.

Fig. 2 is a schematic structural view of the insulating seat of the present invention.

Fig. 3 is a schematic structural view of the filament rod of the present invention.

Each label in the figure means:

1. Discharge chamber; 2. Filament rod; 3. Insulation seat; 4. Protective cover; 5. Clamping hole; 6. Regulator; 10. Filament; 21. Second tapered surface; 30. Labyrinth groove; 41. The first tapered surface; 50, the through groove; 61, the elastic member; 62, the locking nut.

detailed description

The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

Figures 1 to 3 show an embodiment of the filament clamping device for ion sources of the present invention, including a discharge chamber 1, a filament rod 2 and an insulating seat 3, the insulating seat 3 is sleeved on the filament rod 2, and is insulated The base 3 fixedly installs the filament rod 2 on the discharge chamber 1, and extends into the discharge chamber 1 along with the filament rod 2, the filament rod 2 passes through the discharge chamber 1, and a filament 10 is installed at one end, and the end of the filament rod 2 close to the filament 10 The insulating protective sheath 4 which facilitates the fastening and clamping of the filament 10 is sheathed. The protective sheath 4 abuts against the end face of the insulating seat 3 and extends into the outer periphery of the discharge chamber 1 to shield the front of the insulating seat 3 . In the filament clamping device of the present invention, the protective cover 4 is sleeved on the filament 10, which not only facilitates the fastening and clamping of the filament 10, but also abuts against the insulating seat 3 to insulate and separate the filament rod 2 from the discharge chamber 1, so that When the filament rod 2 introduces a voltage, the filament 10 is insulated from the discharge chamber 1. Furthermore, the protective cover 4 extends into the outer periphery of the discharge chamber 1 to cover the front of the insulating seat 3, preventing the insulating seat 3 from being directly exposed to the discharge chamber 1. Reduce insulation pollution and reduce ion source maintenance cycle.

In this embodiment, at least one labyrinth groove 30 for reducing insulation pollution is provided on the periphery of the insulating base 3 protruding into the discharge chamber 1 , and the protective cover 4 is shielded in front of the labyrinth groove 30 . The labyrinth groove 30 can protect the insulating seat 3, reduce the pollution of the insulating seat 3 in the discharge chamber 1, extend the service time of the insulating seat 3, and reduce the maintenance of the ion source.

In this embodiment, the labyrinth groove 30 is an annular groove or a spiral groove, the axis of the labyrinth groove 30 is the same as the axis of the filament rod 2 , and a plurality of annular labyrinth grooves 30 are arranged at intervals along the axis. The labyrinth groove 30 of this structure can reduce the pollution of the insulating seat 3 better and uniformly.

In this embodiment, the filament rod 2 is radially provided with a clamping hole 5 for installing the filament 10 , and axially provided with a through groove 50 that divides the clamping hole 5 into two, and the through groove 50 extends to the discharge chamber 1 Inside, the protective sleeve 4 is sheathed outside the through groove 50 to clamp the filament 10 in the clamping hole 5 . The filament 10 is installed by using the clamping hole 5, the position is not easy to change, and the consistency of the performance of the ion source is maintained.

When installing or dismounting the filament 10 in the clamping hole 5, the through slot 50 plays a role of space buffer adjustment to facilitate disassembly.

In this embodiment, the end of the protective sleeve 4 away from the insulating seat 3 is provided with a first tapered surface 41 with the large end facing outward, and the outer periphery of the filament rod 2 is provided with a second tapered surface that matches the first tapered surface 41 21. The taper of the first tapered surface 41 is smaller than that of the second tapered surface 21, which is convenient for self-locking. When the protective cover 4 is fastened and installed on the filament rod 2 through the taper surface, the clamping hole 5 divided into two is also tightly clamped with the filament 10 .

In this embodiment, the other end of the filament rod 2 away from the filament 10 protrudes through the insulating seat 3, and the protruding end is provided with a screw thread, and the protruding end is sleeved to facilitate the second tapered surface 21 to stay away from or approach the first tapered surface. 41 adjustment piece 6. The second tapered surface 21 of the filament rod 2 is adjusted by the adjusting member 6 to cooperate with the tapered surface of the first tapered surface 41 of the protective cover 4 to further adjust the fastening installation of the filament 10 in the clamping hole 5 and improve the filament. 10% position installation accuracy to maintain the consistency of ion source performance.

In this embodiment, the adjusting member 6 includes an elastic member 61 and a locking nut 62. The elastic member 61 is arranged between the insulating seat 3 and the locking nut 62. When the locking nut 62 compresses the elastic member 61 against the insulating seat 3 At this time, the second tapered surface 21 is close to the first tapered surface 41 and closely fits with the first tapered surface 41 to realize the clamping of the filament 10 . In this embodiment, the elastic member 61 is a spring. During installation, tighten the locking nut 62, compress the elastic member 61, and the filament rod 2 moves downward, so that the second tapered surface 21 of the filament rod 2 is close to and tightly attached to the first tapered surface 41 of the protective sleeve 4, thereby clamping Tight filament 10. When replacing the filament 10 , loosen the locking nut 62 , lift the filament rod 2 up until the second tapered surface 21 is separated from the first tapered surface 41 , and loosen the filament 10 in the clamping hole 5 .

In this embodiment, the insulating seat 3 is an inverted T-shaped structure, the large end face of the inverted T shape is located on the outer wall of the discharge chamber 1 and fastened to the discharge chamber 1 through the installation holes and bolts, and the small end face extends into the discharge chamber 1 .

In this embodiment, the protective sleeve 4 is a stepped sleeve arranged coaxially with the filament rod 2 and the insulating seat 3. abutting, the cylinder wall at the big end is shielded in front of the insulating seat 3 , and the cylinder wall at the small end is close to the filament 10 .

Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person familiar with the art, without departing from the scope of the technical solution of the present invention, can use the technical content disclosed above to make many possible changes and modifications to the technical solution of the present invention, or modify it into an equivalent implementation of equivalent changes example. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims (9)

1. a kind of filament clamping device for ion gun, including arc chamber（1）, stalk（2）And insulating base（3）, it is described exhausted Edge seat（3）It is sheathed on stalk（2）On, it is characterised in that：The insulating base（3）By stalk（2）It is fixedly installed in arc chamber （1）On with by stalk（2）With arc chamber（1）It is dielectrically separated from, and with stalk（2）Stretch into arc chamber（1）It is interior, the stalk （2）Through arc chamber（1）, and positioned at arc chamber（1）Interior one end is installed by filament（10）, the stalk（2）Upper close filament （10）One end be arranged beneficial to filament（10）The insulating sheath of fastening clamp（4）, the protective jacket（4）With insulating base（3）'s End face is abutted, and stretches into arc chamber（1）Periphery block in insulating base（3）Front.

2. the filament clamping device according to claim 1 for ion gun, it is characterised in that：The insulating base（3）Stretch Enter arc chamber（1）Periphery on open up at least one be used for reduce insulation pollute maze trough（30）, the protective jacket（4）Block In maze trough（30）Front.

3. the filament clamping device according to claim 2 for ion gun, it is characterised in that：The maze trough（30）For Annular groove or spiral slot, the maze trough（30）Axis and stalk（2）Axis it is identical.

4. the filament clamping device as claimed in any of claims 1 to 3 for ion gun, it is characterised in that：Institute State stalk（2）Radially open up an installation filament（10）Clamping hole（5）, one is opened up vertically will clamp hole（5）One point is Two groove（50）, the groove（50）Extend to arc chamber（1）It is interior, the protective jacket（4）It is sheathed on groove（50）Outside with general Filament（10）It is clamped in clamping hole（5）It is interior.

5. the filament clamping device according to claim 4 for ion gun, it is characterised in that：The protective jacket（4）Far From insulating base（3）One end inside the first taper surface provided with big end outwardly（41）, the stalk（2）Periphery be provided with and the One taper surface（41）The second taper surface coordinated（21）, first taper surface（41）Taper be less than the second taper surface（21）'s Taper.

6. the filament clamping device according to claim 5 for ion gun, it is characterised in that：The stalk（2）Far From filament（10）The other end pass through insulating base（3）Stretch out, external part is provided with screw thread, external part and is arranged beneficial to the second taper surface （21）Away from or close to the first taper surface（41）Regulating part（6）.

7. the filament clamping device according to claim 6 for ion gun, it is characterised in that：The regulating part（6）Bag Include elastic component（61）And locking nut（62）, the elastic component（61）Located at insulating base（3）With locking nut（62）Between, work as lock Tight nut（62）Compression elastic piece（61）It is closely against insulating base（3）When upper, the second taper surface（21）Close to the first taper surface（41） And with the first taper surface（41）It is fitted close to realize filament（10）Clamp.

8. the filament clamping device according to claim 1 for ion gun, it is characterised in that：The insulating base（3）For Inverted T-shaped structure, the large end face of inverted T-shaped is located at arc chamber（1）Outer wall on and pass through mounting hole and bolt and coordinate fastening arc chamber （1）On, small end face stretches into arc chamber（1）It is interior.

9. the filament clamping device according to claim 8 for ion gun, it is characterised in that：The protective jacket（4）For With stalk（2）, insulating base（3）The stairstepping sleeve being coaxially disposed, the big end of stairstepping sleeve down, the stairstepping The ladder endoporus and insulating base of sleeve（3）End face abut, the barrel held greatly blocked in insulating base（3）Front, the cylinder of small end Wall is close to filament（10）.