CN105352664B - A kind of multichannel spray equipment leak detection tool equipment and detection method - Google Patents

A kind of multichannel spray equipment leak detection tool equipment and detection method Download PDF

Info

Publication number
CN105352664B
CN105352664B CN201510677407.2A CN201510677407A CN105352664B CN 105352664 B CN105352664 B CN 105352664B CN 201510677407 A CN201510677407 A CN 201510677407A CN 105352664 B CN105352664 B CN 105352664B
Authority
CN
China
Prior art keywords
leak detection
channel
adapter
spray equipment
spray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510677407.2A
Other languages
Chinese (zh)
Other versions
CN105352664A (en
Inventor
吕光泉
苏欣
吴凤丽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tuojing Technology Co.,Ltd.
Original Assignee
Shenyang Tuojing Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenyang Tuojing Technology Co Ltd filed Critical Shenyang Tuojing Technology Co Ltd
Priority to CN201510677407.2A priority Critical patent/CN105352664B/en
Publication of CN105352664A publication Critical patent/CN105352664A/en
Application granted granted Critical
Publication of CN105352664B publication Critical patent/CN105352664B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors

Abstract

Multichannel spray equipment leak detection tool equipment is to improve the leak detection working efficiency of multichannel spray equipment, for the purpose of security risk when reducing leak detection operation, it is ensured that the performance of multichannel spray equipment key component meets production requirement in semiconductor equipment.The tooling includes adapter, vacuum sealing plate, three parts of fixture.Detection method, first vacuum sealing plate is positioned in the groove at clamp central, multichannel spray equipment is locked on fixture with screw, the spray aperture side of multichannel spray equipment is set to fit closely in vacuum sealing plate, the spray aperture of multichannel spray equipment is one side closed, the flange of adapter is connect with the air inlet of multichannel spray equipment again, in this way, the a certain leak detection mouth of leakage detecting instrument and adapter connects, open wide other leak detection mouths of adapter, open leakage detecting instrument, it hunts leak to this gas passage, similarly, leakage detecting instrument is connect with other leak detection mouths of adapter respectively, open leakage detecting instrument, it hunts leak respectively to other gas passages, realize the leak detection operation in each channel of multichannel spray equipment.

Description

A kind of multichannel spray equipment leak detection tool equipment and detection method
Technical field
The present invention relates to a kind of multichannel spray equipment leak detection tool equipment, being mainly used in semiconductor coated film equipment has phase The leak detection operation of mutual independent multichannel spray equipment, since these spray equipments often have multiple gases because of technological requirement Autonomous channel and the characteristics of uniformly spray, so this multichannel spray dress produced in batches when manufacturing such semiconductor equipment It sets and just needs easily to hunt leak mode to examine one by one, this tooling belongs to semiconductive thin film deposition applications and technology of preparing neck Domain.
Background technology
Existing semiconductor coated film equipment is required because of the special nature of film in thin film deposition processes in technical process When, two or more gas or more admixture of gas are passed through above film, according to the spray equipment of single channel, Then when being passed through different types of gas, there is the byproduct of reaction such as solid particle for generating unfavorable film growth or have vigorous reaction Danger, the requirement for the film product for growing performance qualification cannot be met, thus just need use multiple gases channel separation The spray equipment of spray, these spray equipments inside have multiple independent gas passages, it is clear that the independence in each channel is airtight Property is particularly important, and in the manufacturing of these semiconductor equipments, this labyrinth spray equipment of batch is before use Quality inspection and film production in the regular maintenance shut down to spray equipment, it is necessary to this spray equipment is carried out a large amount of Leak detection work, and the gas access of these spray equipments is mostly of different sizes, and position is different, and outlet is uniformly distributed mostly again In the intensive of device panel side and spray aperture that machining accuracy grade is very high, this just give leak detection work cause it is prodigious not Just, it needs to connect leakage detecting instrument when leak detection, and needs to block one end of spray equipment gas passage, these operations are easy to damage Intensive and spray aperture that machining accuracy grade is very high, causes the spray equipment of this labyrinth to be scrapped, causes huge damage It loses.
Invention content
The present invention reduces security risk when leak detection operation, inspection to improve the leak detection working efficiency of multichannel spray equipment The quality of fresh processed multichannel spray equipment in manufacture semiconductor equipment is tested, semiconductor equipment, which produces, shuts down dimension in thin-film process For the purpose of each channel air-tightness for verifying multichannel spray equipment when shield, it is ensured that this multichannel spray dress in semiconductor equipment The performance for setting key component meets production requirement.
To achieve the above object, the present invention uses following technical proposals:
Multichannel spray equipment leak detection tool equipment, including adapter, vacuum sealing plate, three parts of fixture.The adapter Structure by connecting flange, the leak detection mouth to match with leakage detecting instrument interface, channel corresponding with multichannel spray equipment and Passway forms.The vacuum sealing plate is then a kind of compressible material plank.The clamp structure is the round gold of one piece of plate Belong to part, there is mounting structure corresponding with multichannel spray equipment edge mounting characteristic at edge, has placement vacuum close at center The groove of sealing plate.
Detection method:In use, first vacuum sealing plate is positioned in the groove at clamp central, with screw by multichannel Spray equipment is locked on fixture, and the spray aperture side of multichannel spray equipment is made to fit closely in vacuum sealing plate, will be more The spray aperture of channel spray equipment is one side closed, then the flange of adapter is connect with the air inlet of multichannel spray equipment, In this way, a certain leak detection mouth of leakage detecting instrument and adapter connects, other leak detection mouths of adapter are opened wide, leakage detecting instrument is opened, it is right This gas passage is hunted leak, and similarly, leakage detecting instrument is connect with other leak detection mouths of adapter respectively, opens leakage detecting instrument, It hunts leak respectively to other gas passages, realizes the leak detection operation in each channel of multichannel spray equipment.
Beneficial effects of the present invention and feature are:
Leak detection tool equipment is formed using simple part combination, operating method is simple, and face where protection spray aperture is not collided with And scratch, security risk when leak detection operation is reduced, the fresh processed multichannel spray when manufacturing semiconductor equipment is efficiently examined The quality of device, whens maintenance shut-downs, facilitate each channel air-tightness of verification multichannel spray equipment, effectively ensure that semiconductor is set This multichannel spray equipment key component is qualified in standby, meets film production requirement.It can be in semiconductor coated film equipment technical field Middle promotion and application.
Description of the drawings
Fig. 1 is the adapter structural schematic diagram of the present invention.
Fig. 2 is the adapter sectional view of the present invention.
Fig. 3 is the clamp structure schematic diagram of the present invention.
Fig. 4 is the scheme of installation of the present invention.
Fig. 5 is the schematic diagram of the function of the present invention.
Specific implementation mode
Embodiment
Referring to Figures 1 and 2, by monoblock aluminum material by the way of material removal, the bottom of adapter 1 is made to form flange 4, The corresponding several screw holes 5 of air inlet mounting hole of the 4 edge channels You Yuliang spray equipment of flange are opened in the inside of adapter 1 If channel A17, channel B18, the leak detection mouth 2 being connected with channel A17 is processed, processes the leak detection mouth 3 being connected with channel B18.
It is processed into fixture 6, is formed at the center of fixture 6 by monoblock aluminum material by the way of material removal with reference to Fig. 3 Groove 10, edge are formed with N number of boss 7 corresponding with two channel spray equipment edge mounting structures, mounting hole are formed on boss 7 8, the structure of boss 7 is supported by reinforcing rib 9.
The edge of the fixture 6 is formed with 6 boss corresponding with two channel spray equipment edge mounting structures 7.
Vacuum sealing plate 16 is positioned in the groove 10 at 6 center of fixture when leak detection operates with reference to Fig. 4 and Fig. 5, it will 6 mounting holes 23 at two channel spray equipments, 13 edge are corresponded with 6 mounting holes 8 at 6 edge of fixture, are protected with 6 nylon Sheath 15 entangles 6 screws 14, and two channel spray equipments 13 are locked on fixture 6, makes the spray of two channel spray equipments 13 Aperture side is fitted closely with vacuum rubber slab 16, and spray aperture is made all to be closed.In two channel spray equipments, 13 upper surface Sealing rubber ring is installed at air inlet A19, air inlet B20 at center, the flange 4 of 1 bottom end of adapter and two channels spray fill It sets and is bonded at 13 upper surface center, the channel A17 of adapter 1 is made to communicate, make with the air inlet A19 of two channel spray equipments 13 The channel B18 of adapter 1 is communicated with the air inlet B20 of two channel spray equipments 13, and screw 11 passes through 1 bottom end flange 4 of adapter On screw hole A5 screw in the screw hole B12 at two channel spray equipments, 13 upper surface center, locking adapter 1 and the spray of two channels Shower device 13 opens wide leak detection mouth B3, opens in this way, leakage detecting instrument pump-line connector to be connected to the leak detection mouth A 2 of adapter 1 Leakage detecting instrument is opened, to leak detection mouth A 2, channel A17, the air inlet A19 of two channel spray equipments 13, spray aperture B22 this four Feature is formed by channel leak detection similarly, and leakage detecting instrument pump-line connector is connected to the leak detection mouth B3 of adapter 1, is opened wide Hunt leak mouth A2, opens leakage detecting instrument, to leak detection mouth B3, channel B18, the air inlet B20 of two channel spray equipments 13, spray aperture This four features of A21 are formed by channel leak detection.Realize the independent leak detection operation in two channel spray equipments, 13 two channels.

Claims (1)

1. a kind of detection method hunted leak to multichannel spray equipment using multichannel spray equipment leak detection tool equipment, the inspection Leak detection tool equipment involved in survey method, including adapter, vacuum sealing plate, three parts of fixture, the structure of the adapter by Connecting flange, the leak detection mouth to match with leakage detecting instrument interface, channel corresponding with multichannel spray equipment and passway group At;The vacuum sealing plate is then a kind of compressible material plank;The clamp structure is one piece of plate circular metal part, side Edge has mounting structure corresponding with multichannel spray equipment edge mounting characteristic, has at center and places the recessed of vacuum sealing plate Multichannel spray equipment is locked in use, first vacuum sealing plate is positioned in the groove at clamp central with screw by slot On fixture, the spray aperture side of multichannel spray equipment is set to fit closely in vacuum sealing plate, by multichannel spray equipment It is one side closed to spray aperture, then the flange of adapter is connect with the air inlet of multichannel spray equipment, in this way, leakage detecting instrument and The a certain leak detection mouth of adapter connects, and opens wide other leak detection mouths of adapter, opens leakage detecting instrument, carried out to this gas passage Leak detection, similarly, leakage detecting instrument are connect with other leak detection mouths of adapter respectively, leakage detecting instrument are opened, to other gas passages point It does not hunt leak, realizes the leak detection operation in each channel of multichannel spray equipment, this method is walked by following concrete operations Suddenly it realizes:
Vacuum sealing plate is positioned in the groove at clamp central, by the mounting hole at two channel spray equipment edges and fixture side The mounting hole of edge corresponds, and entangles screw with nylon protective case, two channel spray equipments are locked on fixture, two channels are made Spray aperture side and the vacuum rubber slab of spray equipment fit closely, and spray aperture is made all to be closed, and are sprayed in two channels Sealing rubber ring is installed at air inlet A, air inlet B at the center of device upper surface, the flange of adapter bottom end and two channels are sprayed It is bonded at the upper surface center of shower device, the channel A of adapter is made to be communicated with the air inlet A of two channel spray equipments, make switching The channel B of part is communicated with the air inlet B of two channel spray equipments, and screw is screwed in by the screw hole A on the flange of adapter bottom end Screw hole B at two channels spray equipment upper surface center locks adapter and two channel spray equipments, in this way, by leak detector Device pump-line connector is connected to the leak detection mouth A of adapter, open wide leak detection mouth B, open leakage detecting instrument, to leak detection mouth A, channel A, The air inlet A of two channel spray equipments, spray aperture B this four features are formed by channel leak detection similarly, and leakage detecting instrument is taken out Feed channel connector is connected to the leak detection mouth B of adapter, opens wide leak detection mouth A, opens leakage detecting instrument, leads to leak detection mouth B, channel B, two Air inlet B, the spray aperture A of road spray equipment are formed by channel leak detection, realize two channel spray equipments, two channels Independent leak detection operation.
CN201510677407.2A 2015-10-19 2015-10-19 A kind of multichannel spray equipment leak detection tool equipment and detection method Active CN105352664B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510677407.2A CN105352664B (en) 2015-10-19 2015-10-19 A kind of multichannel spray equipment leak detection tool equipment and detection method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201510677407.2A CN105352664B (en) 2015-10-19 2015-10-19 A kind of multichannel spray equipment leak detection tool equipment and detection method
PCT/CN2015/096935 WO2017067048A1 (en) 2015-10-19 2015-12-10 Leakage detection tool for multichannel spraying device and detection method thereof

Publications (2)

Publication Number Publication Date
CN105352664A CN105352664A (en) 2016-02-24
CN105352664B true CN105352664B (en) 2018-09-14

Family

ID=55328671

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510677407.2A Active CN105352664B (en) 2015-10-19 2015-10-19 A kind of multichannel spray equipment leak detection tool equipment and detection method

Country Status (2)

Country Link
CN (1) CN105352664B (en)
WO (1) WO2017067048A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1894574A (en) * 2003-12-12 2007-01-10 空中客车德国有限公司 Vaccum sensor application and method for nondetachably joining a sensor workpiece to a body component
CN102865979A (en) * 2012-09-14 2013-01-09 四川制动科技股份有限公司 Testing system and testing method for air tightness of main valve body component of 120 valve
CN103837311A (en) * 2014-02-20 2014-06-04 广东鸿图科技股份有限公司 Method and device for detecting internal leakage of multi-cavity valve

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005274291A (en) * 2004-03-24 2005-10-06 Yamaha Fine Technologies Co Ltd Leakage inspection system of multi-channel work
CN202710264U (en) * 2012-07-19 2013-01-30 河南中烟工业有限责任公司 Blockage detection and leakage detection test device for high-pressure micro-mist humidification nozzle
US20140250981A1 (en) * 2013-03-08 2014-09-11 General Electric Company Seal test fixture for a gas turbine fuel nozzle
JP2014228105A (en) * 2013-05-24 2014-12-08 本田技研工業株式会社 High-pressure gas vessel and gas leakage determination method of high-pressure gas vessel seal part
WO2015038964A1 (en) * 2013-09-12 2015-03-19 Wilcox Loren Gas monitoring device, system and methods
CN204128758U (en) * 2014-08-02 2015-01-28 新昌县万成科技有限公司 A kind of filter cleaner ten station vacuum-tightness differential pressure measuring machine
CN104316273A (en) * 2014-10-29 2015-01-28 内蒙古科技大学 Gas cylinder body airtightness detection device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1894574A (en) * 2003-12-12 2007-01-10 空中客车德国有限公司 Vaccum sensor application and method for nondetachably joining a sensor workpiece to a body component
CN102865979A (en) * 2012-09-14 2013-01-09 四川制动科技股份有限公司 Testing system and testing method for air tightness of main valve body component of 120 valve
CN103837311A (en) * 2014-02-20 2014-06-04 广东鸿图科技股份有限公司 Method and device for detecting internal leakage of multi-cavity valve

Also Published As

Publication number Publication date
WO2017067048A1 (en) 2017-04-27
CN105352664A (en) 2016-02-24

Similar Documents

Publication Publication Date Title
US8707754B2 (en) Methods and apparatus for calibrating flow controllers in substrate processing systems
CN104882399B (en) Apparatus and method for improving wafer uniformity
CN105352664B (en) A kind of multichannel spray equipment leak detection tool equipment and detection method
TW201402857A (en) Shared gas panels in plasma processing chambers employing multi-zone gas feeds
CN107808838A (en) Drycorrosion apparatus and dry etching method
TWI233377B (en) Continuous coating apparatus
KR102141590B1 (en) Online sealing detection device, multi-section closed chamber processing device and method
CN1187586C (en) Two-piece manifold
CN203112919U (en) Gas phase processing device
WO2017020544A1 (en) A vapor deposition apparatus
CN103903946A (en) Gas spray head used for plasma reactor
KR101141549B1 (en) Semiconductor and LCD with Exhaust gas access hole
KR101747490B1 (en) Vacuum processing device and valve control method
CN104103483B (en) A kind of inlet duct and plasma processing device
TWI642329B (en) Gas flow adjustment device, ICP etching equipment, nozzle and gas flow adjustment method
US20150187562A1 (en) Abatement water flow control system and operation method thereof
WO2011156625A4 (en) Full-enclosure, controlled-flow mini-environment for thin film chambers
KR101019622B1 (en) Clean port for exhaust air duct of semiconductor manufacturing process
CN210513579U (en) Airtight screening test fixture
CN216337946U (en) Gas uniform flow plate with adjustable gas inlet rate and distribution
CN210413898U (en) Grinding wheel cooling device of glass edge grinding machine
CN215701805U (en) A suction means for fretwork film material
US20210313144A1 (en) Ion implanter toxic gas delivery system
CN107081454A (en) Hex nut fuse hole Simple Drilling Jig and processing method based on vice
CN216698273U (en) Visual apron and dry etching machine

Legal Events

Date Code Title Description
PB01 Publication
C06 Publication
SE01 Entry into force of request for substantive examination
C10 Entry into substantive examination
GR01 Patent grant
GR01 Patent grant
CP03 Change of name, title or address

Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province

Patentee after: Tuojing Technology Co.,Ltd.

Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province

Patentee before: PIOTECH Co.,Ltd.

CP03 Change of name, title or address