CN105311940A - Novel chlorosilane tail gas processing apparatus - Google Patents

Novel chlorosilane tail gas processing apparatus Download PDF

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Publication number
CN105311940A
CN105311940A CN201410333282.7A CN201410333282A CN105311940A CN 105311940 A CN105311940 A CN 105311940A CN 201410333282 A CN201410333282 A CN 201410333282A CN 105311940 A CN105311940 A CN 105311940A
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China
Prior art keywords
tail gas
exhaust gas
tower
eluting column
novel
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Withdrawn
Application number
CN201410333282.7A
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Chinese (zh)
Inventor
丁春燕
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Individual
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Individual
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Priority to CN201410333282.7A priority Critical patent/CN105311940A/en
Publication of CN105311940A publication Critical patent/CN105311940A/en
Withdrawn legal-status Critical Current

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Abstract

The invention discloses a tail gas processing apparatus, and especially discloses a novel chlorosilane tail gas processing apparatus. The apparatus comprises a leaching tower, a tail gas inlet pipe, a tail gas outlet pipe, an alkali liquor inlet pipe, and a nozzle, which is arranged on the lower end of the alkali liquor inlet pipe; and is characterized in that the tail gas inlet pipe penetrates the wall of the leaching tower and stretches into the leaching tower, and the included angle between the part, which is in the leaching tower, of the tail gas inlet pipe and the wall of the leaching tower is 60 degrees. The apparatus has the advantages that obstruction of the tail gas inlet in the leaching tower is avoided; at the same time, the speed of air flow in the leaching tower is researched so as to conveniently determine the distance between the nozzle in the tower and the tail gas inlet and the distance between the nozzle in the tower and the outlet in the tower top, the phenomenon that the outlet of the leaching tower is obstructed is prevented, and moreover, the labor strength and the safety risk are both reduced.

Description

A kind of novel chlorosilane exhaust gas processing device
Technical field
The present invention relates to a kind of exhaust gas processing device, particularly relate to a kind of novel chlorosilane exhaust gas processing device.
Background technology
Along with the fast development of photovoltaic industry, world's polysilicon output rapidly goes up.Will discharge large quantity of exhaust gas waste liquid in production of polysilicon, containing a large amount of chlorosilane compositions in these waste gas, it mainly comprises dichlorosilane, trichlorosilane, silicon tetrachloride.The way generally adopting alkali lye to spray for above-mentioned waste gas processes.There is following reaction in tail gas and alkali lye:
Be easy under chlorosilane wet environment produce silica, cause equipment or line clogging, and generate hydrogen and cause very large security risk to the cleaning of equipment.For trichlorosilane, its reaction equation is as follows:
SiHCl3+3H2O=H2SiO3+3HCl+H2
H2SiO3=H2O+SiO2
Existing tail gas eluting column inlet exhaust gas is horizontal pipeline, easily causes alkali lye to spray and enters exhaust pipe, result in blockage.Alkali lye shower nozzle at eluting column top to strengthen alkali lye and tail gas time of contact.But tail gas is as easy as rolling off a log to be brought incomplete for reaction silica or vaporific reacted sodium silicate solution into outlet line and results in blockage, once the material in this thing happens eluting column is difficult to cleaning, the hydrogen that in tower, reaction produces can not cement out, and cleaning causes potential safety hazard.
Therefore, invent a kind of device preventing eluting column outlet obstruction, become those skilled in the art's problem demanding prompt solution.
Summary of the invention
The present invention proposes a kind of novel novel chlorosilane exhaust gas processing device, this novel chlorosilane exhaust gas processing device can avoid the inner inlet exhaust gas of tail gas eluting column to result in blockage effectively, simultaneously by the distance determined between shower nozzle and inlet exhaust gas in tower, tower top outlet to air velocity in tower, the phenomenon preventing eluting column outlet obstruction occurs.
The present invention solves the problems of the technologies described above adopted technical scheme as described by below:
A kind of novel chlorosilane exhaust gas processing device, comprise eluting column, inlet exhaust gas pipe, offgas outlet pipe, alkali lye inlet tube and be arranged on the shower nozzle of alkali lye inlet tube lower end, it is characterized in that: described inlet exhaust gas pipe is through eluting column tower wall, stretch into eluting column inside, and the part that inlet exhaust gas pipe enters eluting column inside originally becomes 60 inclination angles with eluting column wall.
Further, preferred structure is, the part of described inlet exhaust gas pipe outside eluting column is vertical with eluting column.
The present invention at the beneficial effect taking technique scheme as described by below:
Avoid the inner inlet exhaust gas of tail gas eluting column to result in blockage, simultaneously by determining the distance between shower nozzle and inlet exhaust gas in tower, tower top outlet easily to the research of air velocity in tower, the phenomenon preventing eluting column outlet obstruction occurs.Reduce labour intensity, reduce security risk.
Accompanying drawing explanation
By the description carried out its exemplary embodiment below in conjunction with accompanying drawing, the above-mentioned feature and advantage of the present invention will become apparent and easy understand.
Fig. 1 is the structural representation of the novel chlorosilane exhaust gas processing device of the present invention.
In figure, 1 eluting column, 2 inlet exhaust gas pipes, 3 offgas outlet pipes, 4 alkali lye inlet tubes, 5 shower nozzles.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in detail.
Fig. 1 is the structural representation of the novel chlorosilane exhaust gas processing device of the present invention.
As shown in the figure, this device comprises, eluting column 1, inlet exhaust gas pipe 2, offgas outlet pipe 3, alkali lye inlet tube 4, shower nozzle 5.
Wherein, eluting column 1 is provided with inlet exhaust gas pipe 2, offgas outlet pipe 3, alkali lye inlet tube 4 and is arranged on the shower nozzle 5 of alkali lye inlet tube 4 lower end, inlet exhaust gas pipe 2 is through eluting column 1 tower wall, stretch into eluting column 1 inner, and the part that inlet exhaust gas pipe 2 enters eluting column 1 inside originally becomes 60 inclination angles with eluting column 1 tower wall.The part of inlet exhaust gas pipe 2 outside eluting column 1 is vertical with eluting column 1.
The present invention is because have employed technique scheme, the inner inlet exhaust gas pipe 2 of tail gas eluting column 1 is avoided to result in blockage, simultaneously by determining shower nozzle and inlet exhaust gas pipe 2 in tower easily to the research of air velocity in tower, the offgas outlet pipe 3 of tower top export between distance, prevent the phenomenon generation of eluting column outlet obstruction.Reduce labour intensity, reduce security risk.
It should be noted that above-mentioned specific embodiment is exemplary, under above-mentioned instruction of the present invention, those skilled in the art can carry out various improvement and distortion on the basis of above-described embodiment, and these improve or distortion drops in protection scope of the present invention.
It will be understood by those skilled in the art that specific descriptions are above to explain object of the present invention, not for limiting the present invention.Protection scope of the present invention is by claim and equivalents thereof.

Claims (2)

1. a novel chlorosilane exhaust gas processing device, comprise eluting column, inlet exhaust gas pipe, offgas outlet pipe, alkali lye inlet tube and be arranged on the shower nozzle of alkali lye inlet tube lower end, it is characterized in that: described inlet exhaust gas pipe is through eluting column tower wall, stretch into eluting column inside, and the part that inlet exhaust gas pipe enters eluting column inside originally becomes 60 inclination angles with eluting column wall.
2. novel chlorosilane exhaust gas processing device according to claim 1, is characterized in that: the part of described inlet exhaust gas pipe outside eluting column is vertical with eluting column.
CN201410333282.7A 2014-07-15 2014-07-15 Novel chlorosilane tail gas processing apparatus Withdrawn CN105311940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410333282.7A CN105311940A (en) 2014-07-15 2014-07-15 Novel chlorosilane tail gas processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410333282.7A CN105311940A (en) 2014-07-15 2014-07-15 Novel chlorosilane tail gas processing apparatus

Publications (1)

Publication Number Publication Date
CN105311940A true CN105311940A (en) 2016-02-10

Family

ID=55240858

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410333282.7A Withdrawn CN105311940A (en) 2014-07-15 2014-07-15 Novel chlorosilane tail gas processing apparatus

Country Status (1)

Country Link
CN (1) CN105311940A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110917854A (en) * 2019-12-04 2020-03-27 西安奕斯伟硅片技术有限公司 Tail gas treatment device
CN113181757A (en) * 2021-03-11 2021-07-30 北京鑫晟环能科技发展有限公司 Chlorosilane waste gas atomization treatment device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110917854A (en) * 2019-12-04 2020-03-27 西安奕斯伟硅片技术有限公司 Tail gas treatment device
CN113181757A (en) * 2021-03-11 2021-07-30 北京鑫晟环能科技发展有限公司 Chlorosilane waste gas atomization treatment device

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C04 Withdrawal of patent application after publication (patent law 2001)
WW01 Invention patent application withdrawn after publication

Application publication date: 20160210