CN105204448B - A kind of monitoring system and method - Google Patents

A kind of monitoring system and method Download PDF

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Publication number
CN105204448B
CN105204448B CN201410258160.6A CN201410258160A CN105204448B CN 105204448 B CN105204448 B CN 105204448B CN 201410258160 A CN201410258160 A CN 201410258160A CN 105204448 B CN105204448 B CN 105204448B
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CN
China
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signal
drawing device
optocoupler
control
film drawing
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CN201410258160.6A
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Chinese (zh)
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CN105204448A (en
Inventor
谭汉军
黄仁禄
曹志兵
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北大方正集团有限公司
深圳方正微电子有限公司
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Priority to CN201410258160.6A priority Critical patent/CN105204448B/en
Publication of CN105204448A publication Critical patent/CN105204448A/en
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Publication of CN105204448B publication Critical patent/CN105204448B/en

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

This application discloses a kind of monitoring system and method, the system includes:First detection means, it is arranged on the film drawing device of a laminator and the place to be passed through in the direction of motion of film drawing device, it is used to characterize first optocoupler signal of the film drawing device in membrane start position, and the second optocoupler signal in the final position for being characterized in the film drawing device for detecting to obtain;Second detection device, it is used to characterize first detection signal of the film drawing device during membrane is carried out from the start position to the final position for detecting to obtain;Control unit, it is connected with first detection means and the second detection device, for receiving and being based on the first optocoupler signal and/or the second optocoupler signal, and the first detection signal generates and exports the first control signal, to control the laminator to be in halted state.

Description

A kind of monitoring system and method

Technical field

The application is related to electronic technology field, more particularly to a kind of monitoring system and method.

Background technology

With the extensive use of semiconductor, manufacturer largely produces various semiconductor devices, is produced in semiconductor devices During need to chip pad pasting, therefore also there is the laminator for having various models.Laminator pastes various blue films or UV films In wafer surface, to protect chip in process of production.

At present, because the model of laminator has a variety of, the model of film is also different, differs for same laminator and surely fits For every kind of film, if the film that laminator can not be well with current versions matches, may occur during pad pasting The situation of film breakage, such as, model ATM-1000C laminator is in patch this models of Mitsui Chemicals SB-085L-BN20-R2 During blue film, it is easy to film breakage occur at useless film end, although the lower cutter position of regulation blade can be taken, reduces the dynamics for drawing useless film, The counter-measures such as one layer of blue film are pasted on slide holder, but the situation for pasting such a blue film film breakage can not be inherently eliminated, unless changing The blue film of other model, but the problem of the model for changing blue film further relates to the technique and use cost of semiconductor devices, so In actual production, the model realizability for changing film is not high.

Therefore, existing stage laminator during pad pasting still it is possible that the situation of film breakage, after film breakage, if Board, which works on, to cause chip to break, it is seen then that existing laminator presence can not detect whether film breakage occur and cause crystalline substance The technical problem that piece is broken.

The content of the invention

The embodiment of the present application is by providing a kind of monitoring system and method, to solve to examine existing for existing laminator Survey whether the technical problem for film breakage occur and causing chip to break.

On the one hand, the embodiment of the present application provides a kind of monitoring system, including:First detection means, it is arranged on a laminator Film drawing device on and the direction of motion of film drawing device on the place to be passed through, for detect obtain be used for characterize the membrane Device is in the first optocoupler signal of membrane start position, and second light in the final position for being characterized in the film drawing device Coupling signal;Second detection device, it is used to characterize the film drawing device from the start position to the end for detecting to obtain Point position carries out the first detection signal during membrane;Control unit, with first detection means and second detection Device connects, for receiving and being based on the first optocoupler signal and/or the second optocoupler signal, and first detection Signal generation simultaneously exports the first control signal, to control the laminator to be in halted state.

Optionally, first detection means, is specifically included:First luminescence unit, it is arranged on the fortune of the film drawing device The place to be passed through on dynamic direction, for launching the first light;First receiving unit, it is arranged on the motion side of the film drawing device The place to be passed through upwards, it is corresponding with first luminescence unit, for receiving first light;Second luminescence unit, The place to be passed through in the direction of motion of the film drawing device is arranged on, for launching the second light;Second receiving unit, set The place to be passed through in the direction of motion of the film drawing device, it is corresponding with second luminescence unit, it is described for receiving Second light;Block, it is arranged on the film drawing device, as film drawing device moves;Wherein, when the block moves to first When between luminescence unit and first receiving unit, first receiving unit can not receive first light, then obtain The the first optocoupler signal obtained is ON signals;When block not first luminescence unit and first receiving unit it Between, first receiving unit can receive first light, then the first optocoupler signal obtained is OFF signal;When The block is moved between second luminescence unit and second receiving unit, and second receiving unit can not receive To second light, then the second optocoupler signal obtained is ON signals;When the block is luminous single not described second First second receiving unit can receive second light between second receiving unit, then described obtained Two optocoupler signals are OFF signal.

Optionally, the second detection device, is specifically included:Launch receiving unit, the motion of the film drawing device is set Above the easily broken position of film on direction, film drawing device described herein is without going past for launching downwards the 3rd light;Reflective list Member, below the easily broken position of the film that is arranged in the direction of motion of the film drawing device, film drawing device described herein without going past, It is corresponding with the transmitting receiving unit, for reflecting the 3rd light so that the transmitting receiving unit receive it is described 3rd light;Wherein, when it is described transmitting receiving unit receive three light when, then show it is described transmitting receiving unit with There is no film process between the reflecting unit, then the first detection signal obtained is ON signals;When the transmitting receives list When member does not receive three light, then show there is film process between the transmitting receiving unit and the reflecting unit, then The first detection signal obtained is OFF signal.

Optionally, when the film drawing device is in the start position, described control unit, it is specifically used for:Based on institute State the first optocoupler signal and the first detection signal generates and exports the first control signal, to control the laminator to be in Halted state.

Optionally, it is default in one moved to the final position after the film drawing device leaves the start position In period, described control unit is not responding to the first optocoupler signal and/or the second optocoupler signal, and described first Detection signal.

Optionally, when after the preset time period, continue what is moved to the final position in the film drawing device During, described control unit, it is specifically used for:Based on the first optocoupler signal and the second optocoupler signal, and it is described First detection signal, generate and export the first control signal, to control the laminator to be in halted state.

Optionally, when the film drawing device is moved to the final position, described control unit, it is specifically used for:It is based on The second optocoupler signal and the first detection signal, generate and export the first control signal, to control the laminator In halted state.

Optionally, it is described during the film drawing device leaves the final position to start position movement Control unit, it is specifically used for:Based on the first optocoupler signal and the second optocoupler signal, and the first detection letter Number, generate and export the first control signal, to control the laminator to be in halted state.

On the other hand, the embodiment of the present application also provides a kind of monitoring method, including:

Detection, which obtains, to be used to characterize first optocoupler signal of the film drawing device in membrane start position, and detection obtains For the second optocoupler signal in the final position for being characterized in the film drawing device;Detection obtains to exist for characterizing the film drawing device The first detection signal during membrane is carried out from the start position to the final position;Receive and be based on first light Coupling signal and/or the second optocoupler signal, and the first detection signal generate and export the first control signal, with control The laminator is in halted state.

Optionally, it is described to receive and believed based on first optocoupler when the film drawing device is in the start position Number and/or the second optocoupler signal, and the first detection signal generates and exports the first control signal, with described in control Laminator is in halted state, is specially:Generate and export based on the first optocoupler signal and the first detection signal First control signal, to control the laminator to be in halted state.

Optionally, when after the preset time period, continue what is moved to the final position in the film drawing device During, it is described to receive and be based on the first optocoupler signal and/or the second optocoupler signal, and the first detection letter Number generate and export the first control signal, to control the laminator be in halted state, specially:Based on first optocoupler Signal and the second optocoupler signal, and the first detection signal, generate and export the first control signal, with described in control Laminator is in halted state.

Optionally, it is described to receive and be based on first optocoupler when the film drawing device is moved to the final position Signal and/or the second optocoupler signal, and the first detection signal generate and export the first control signal, to control State laminator and be in halted state, be specially:Based on the second optocoupler signal and the first detection signal, generate and defeated Go out the first control signal, to control the laminator to be in halted state.

Optionally, it is described during the film drawing device leaves the final position to start position movement Receive and be based on the first optocoupler signal and/or the second optocoupler signal, and first detection signal generation and defeated Go out the first control signal, to control the laminator to be in halted state, be specially:Based on the first optocoupler signal and described Second optocoupler signal, and the first detection signal, generate and export the first control signal, to control the laminator to be in Halted state.

The one or more technical schemes provided in the embodiment of the present application, have at least the following technical effects or advantages:

Due in the embodiment of the present application, monitoring system being formed using detection means and PLC control system, by not With detection means obtain at film drawing device stop place different during the once complete pad pasting and be moved through respectively Signal in journey, PLC is carried out analysis using the signal of acquisition and draw film breakage situation whether occur, be used for being generated in film breakage The control signal that control board is stopped, solving can not detect whether film breakage occur and cause crystalline substance existing for existing laminator The technical problem that piece is broken, the beneficial effect that a set of film breakage testing mechanism is provided for laminator is realized, reduces semiconductor die The probability of fragmentation in piece production process.

Brief description of the drawings

Fig. 1 is the moving process figure for being film drawing device during pad pasting that the embodiment of the present application provides;

Fig. 2 is the schematic diagram for twining film detecting system that the laminator that the embodiment of the present application provides carries;

Schematic diagrams of the Fig. 3 for the output by monitoring system that the embodiment of the present application provides after in parallel with twining film detecting system;

Fig. 4 is the structural representation for the monitoring system that the embodiment of the present application provides;

Fig. 5 is the mistake for carrying out analysis output Y000 in the PLC that the embodiment of the present application provides using the signal of relay input Cheng Tu;

Fig. 6 is a kind of schematic flow sheet for monitoring method that the embodiment of the present application provides.

Embodiment

In order that the purpose, technical scheme and advantage of present invention are clearer, below in conjunction with Figure of description And technical scheme is described in detail specific embodiment, it should be understood that the embodiment of the present application and implementation Specific features in example are detailed description to technical scheme, rather than the restriction to technical scheme, In the case of not conflicting, the technical characteristic in the embodiment of the present application and embodiment can be mutually combined.

It will be clear that herein presented term "and/or", a kind of only association for describing affiliated partner is closed System, expression may have three kinds of relations, for example, A and/or B, can be represented:Individualism A, while A and B be present, individualism These three situations of B.In addition, character "/" herein, it is a kind of relation of "or" to typically represent forward-backward correlation object.

The monitoring system that the embodiment of the present application provides is applied to during the pad pasting of laminator, for monitoring pad pasting process, Just control board to be stopped when there is film breakage, so as to solving to detect whether to occur film breakage existing for existing laminator and Cause the technical problem that chip is broken.The model for laminator and the model of film are all not specifically limited in this application, Suitable for various semiconductor wafer laminators, and suitable for various blue films and UV films, in the following embodiments particularly as with The laminator of ATM-1000C models illustrates exemplified by the blue film of patch this models of Mitsui Chemicals SB-085L-BN20-R2.

Mainly it is located at the top of board including a film drawing device in ATM-1000C laminators, is often led for one and half When body chip carries out pad pasting, film drawing device is responsible for moving blue film to centre position, after the completion for the treatment of the chip pad pasting, film drawing device weight Membrane next time newly is come back for, so as to which film drawing device forms the course of work moved back and forth on board, as shown in figure 1, Fig. 1 is moving process figure of the film drawing device during pad pasting, and film drawing device is since start position to the direction in final position Mobile, blue film has mobile and has shake in process 1, and after entering process 2 by conversion position, blue film is stable not to be trembled Dynamic, when film drawing device reaches home position, board starts to a chip pad pasting, and after the completion of pad pasting, film drawing device is from end Point position begins to pass through the return to origin position of process 3, is prepared for next chip pad pasting.

The monitoring system provided in the embodiment of the present application is mainly by increasing blue film detecting device, and programmable control System (PLC) processed is judged the state of blue film using sequential with logic control, if detecting film breakage, just controls board to stop Only operation, avoids causing board fragmentation, while output alarm signal is to prompt user to handle board.In general pasting A set of self-checking system is come with film machine, mainly for detection of film situation is twined, as shown in Fig. 2 the self-checking system that laminator carries Microswitch 500 in, board work when COM be connected with normally-closed contact NC, when twining film, COM and normally opened contact NO connection, machine There is d and alarms and be stopped in platform.Therefore, as shown in figure 3, the monitoring system in the embodiment of the present application can utilize showing for board There is testing mechanism, the PLC output results Y000 in monitoring system is directly twined to the normally opened contact of the microswitch 500 of film with detection NO ends are in parallel, and the blue film detection signal of PLC outputs is participated in into logic judgment.

As shown in figure 4, the monitoring system that the embodiment of the present application provides, is specifically included:First detection means 10, the second detection Device 20, and control unit 30, wherein,

First detection means 10, is arranged on the film drawing device of a laminator and will be through in the direction of motion of film drawing device The place crossed, it is used to characterize first optocoupler signal of the film drawing device in membrane start position 501 for detecting to obtain, and For the second optocoupler signal in the final position 502 for being characterized in the film drawing device;

Second detection device 20, for detect obtain be used for characterize the film drawing device from the start position 501 to The final position 502 carries out the first detection signal during membrane;

Control unit 30, it is connected with first detection means and the second detection device, for receiving and being based on institute State the first optocoupler signal and/or the second optocoupler signal, and the first detection signal judges whether to generate and exports one For controlling the laminator to be in the first control signal of halted state.

In specific implementation process, the first detection means 10 is arranged on the film drawing device of laminator and film drawing device The place to be passed through in the direction of motion, with movement of the film drawing device on board, acquisition film drawing device can be detected and be in Point position 501 and optocoupler signal during final position 502, when film drawing device is in start position 501, the first detection means 10 It is ON signals to obtain the first optocoupler signal X002, and when film drawing device is in final position 502, the first detection means 10 obtains the Two optocoupler signal X000 are ON signals, and the first optocoupler signal X002 can show that in start position 501 whether film breakage occur, with And second optocoupler signal X000 can show that at final position 502 whether film breakage occur.Second detection device 20, is predominantly detected First detection signal X001 of the film drawing device during final position 502 is moved to from start position 501 is obtained, this first Whether detection signal X001 is characterized in moving process there is film breakage.In actual applications, second detection device 20 is arranged on In the direction of motion of board film drawing device but film drawing device without going past place and be easiest to occur near the position of film breakage, root May be different according to the position of different model laminator installation.Control unit 30, with the first detection means 10 and second detection device 20 connections, for receiving and being based on the first optocoupler signal X002 and/or the second optocoupler signal X000, and first detection signal X001 judges whether to generate and exports a first control signal Y000 for being used to control laminator to be in halted state.Namely Say, at the same moment, when film drawing device is in some position on board, the first control signal Y000 is by the first detection Two or one decisions in signal X001 and the first optocoupler signal X002 and the second optocoupler signal X000.Such as with reference to Fig. 1 Shown, in start position, the first control signal Y000 is by this 2 letters of first detection signal X001 and the first optocoupler signal X002 Number determine;In process 2 and process 3, the first control signal Y000 is by first detection signal X001 and the first optocoupler signal 3 signal decidings in X002 and the second optocoupler signal X000, in final position, the first control signal Y000 is by first detection signal X001 and the second optocoupler signal X000 is determined.

It can be seen that lead in the embodiment of the present application due to forming monitoring system using detection means and PLC control system Different detection means is crossed to obtain respectively at film drawing device stop place different during the once complete pad pasting and shifting Signal during dynamic, makes PLC carry out analysis using the signal of acquisition and draws film breakage situation whether occur, to be generated in film breakage For the control signal for controlling board to be stopped, solving can not detect whether film breakage occur and lead existing for existing laminator The technical problem for causing chip to break, realizes the beneficial effect that a set of film breakage testing mechanism is provided for laminator, reduces and partly lead The probability of fragmentation in body wafer production processes.

Further, first detection means 10, is specifically included:

First luminescence unit, the place to be passed through in the direction of motion of the film drawing device is arranged on, for launching first Light;

First receiving unit, the place to be passed through in the direction of motion of the film drawing device is arranged on, with the described first hair Light unit is corresponding, for receiving first light;

Second luminescence unit, the place to be passed through in the direction of motion of the film drawing device is arranged on, for launching second Light;

Second receiving unit, the place to be passed through in the direction of motion of the film drawing device is arranged on, with the described second hair Light unit is corresponding, for receiving second light;

Block, it is arranged on the film drawing device, as film drawing device moves;

Wherein, when the block is moved between the first luminescence unit and first receiving unit, described first connects First light can not be received by receiving unit, then the first optocoupler signal obtained is ON signals;When block is not described Between first luminescence unit and first receiving unit, first receiving unit can receive first light, then obtain The the first optocoupler signal obtained is OFF signal;

When the block is moved between second luminescence unit and second receiving unit, described second receives list Member can not receive second light, then the second optocoupler signal obtained is ON signals;When the block is not described Between second luminescence unit and second receiving unit, second receiving unit can receive second light, then obtain The the second optocoupler signal obtained is OFF signal.

In specific implementation process, the first detection means 10 specifically can be understood as two cover detection means, i.e., the first hair Light unit, the first receiving unit and block, the second luminescence unit, the second receiving unit and block, wherein, the first luminescence unit with First receiving unit is arranged on the start position of the film drawing device direction of motion, and the first luminescence unit is used to launch the first light, the One receiving unit is used to receive first light;Second luminescence unit and the second receiving unit are arranged on the film drawing device direction of motion Final position, the second luminescence unit be used for launch the second light, the second receiving unit be used for receive second light;And block It is arranged on film drawing device, as film drawing device moves, that is to say, that when block is moved between luminescence unit and receiving unit When, receiving unit does not just receive the light of luminescence unit transmitting.Therefore, this point is utilized, it can be determined that film drawing device moves During to start position and final position, the optocoupler signal of acquisition is ON or OFF, so as to judge in start position and terminal position Put:When block is moved between the first luminescence unit and the first receiving unit, the first receiving unit can not receive the first light Line, then the first optocoupler signal obtained are ON signals;When block is not between the first luminescence unit and the first receiving unit, first Receiving unit can receive the first light, then the first optocoupler signal obtained is OFF signal;When block moves to the second luminous list Between member and the second receiving unit, the second receiving unit can not receive the second light, then the second optocoupler signal obtained is ON Signal;When block is not between the second luminescence unit and the second receiving unit, the second receiving unit can receive the second light, then The the second optocoupler signal obtained is OFF signal.

In actual applications, the first detection means 10 can specifically use location sensitive optocoupler, such as model EE- SPX301 location sensitive optocoupler, there is a small block on the film drawing device of used laminator in the embodiment of the present application, The width of small block has just enough blocked the fluting of the location sensitive optocoupler, by membrane position at the even fluting of the location sensitive light Small block shading, the first optocoupler signal of output is at ON state.The principle of the location sensitive optocoupler is, fluting While there is a light emitting diode, lighting always, the another side of fluting is the receiving terminal of light, when block will block at fluting, Receiving terminal cannot receive the light of luminous tube, and this light is occasionally at ON, and just (24V negative terminal) turns on output end over the ground.Work as gear For block not at fluting, receiving terminal receives the light of luminous tube, and this light is occasionally at OFF, and (24V negative terminal) is in height to output end over the ground Resistance state.

Further, the second detection device 20, is specifically included:

Launch receiving unit, set above the easily broken position of the film in the direction of motion of the film drawing device, it is described herein Film drawing device is without for launching downwards the 3rd light;

Reflecting unit, below the easily broken position of the film that is arranged in the direction of motion of the film drawing device, drawing described herein Film device without, it is corresponding with the transmitting receiving unit, for reflecting the 3rd light so that the transmitting receive it is single Member receives the 3rd light;

Wherein, when it is described transmitting receiving unit receive three light when, then show it is described transmitting receiving unit with There is no film process between the reflecting unit, then the first detection signal obtained is the optocoupler signal for showing to have film breakage;

When it is described transmitting receiving unit do not receive three light when, then show it is described transmitting receiving unit with it is described There is film process between reflecting unit, then the first detection signal obtained is to show the optocoupler signal of no film breakage.

In specific implementation process, second detection device 20 specifically includes transmitting receiving unit and reflecting unit, and this two Individual part is also relative respectively to be arranged on film drawing device both sides, and be arranged on film and be easiest to disconnected position both sides up and down, and transmitting connects Receive unit to be used to launch light and receive the light reflected, reflecting unit is just used for reflection light.Filled with the first detection Put 10 Cleaning Principle it is similar, but the detection means 10 of second detection device 20 and first obtain signal results on the contrary, for For second detection device 20, if the transmitting receiving unit when receiving the light, show to launch receiving unit with There is no film process between reflecting unit, then the first detection signal obtained is to be shown to be the optocoupler signal of film breakage, i.e. ON;When When transmitting receiving unit does not receive light, then showing to launch between receiving unit and reflecting unit has film process, then obtains First detection signal is to show the optocoupler signal of no film breakage.

In actual applications, the second detection device 20 can specifically use sensor (sensor) and mirror plate group Into such as model E3S-RS30E4 sensor, the reflective mirror with model E39-R1, sensor is transmitting reflection-type, is being passed There is a light emitting diode lighting in sensor, sensor internal also has a reception pipe, and the light that sensor is sent is through reflective mirror Passback sensor is reflected, sensor output ON, therefore, when not having blue film between sensor and reflective mirror, this sensor is in ON, Just (24V negative terminal) turns on output end over the ground, and when blue film blocks reflective ytterbium, sensor is in OFF, and (24V's is negative over the ground for output End) it is in high-impedance state.

In addition, used PLC is specially transistor output type in the embodiment of the present application, model CF2n-20MT, Include time switch T0, auxiliary reclay M0, M1, M3 and M4 in the PLC, each relay is responsible for obtaining film drawing device shifting When during dynamic on diverse location, PLC internally makees translation operation.Wherein, the first optocoupler signal X002 of start position It is responsible for by auxiliary reclay M4, process 1 is responsible for process 2 by time switch T0, and process 3 is responsible for by auxiliary reclay M1, eventually Second optocoupler signal X000 of point position is responsible for by auxiliary reclay M3.Therefore, as shown in figure 5, to utilize relay defeated in PLC The signal entered carry out analysis output Y000 procedure chart, input X000, X001 and X002, PLC utilize inside time switch Make translation operation with auxiliary reclay.

Further, when the film drawing device is in the start position, described control unit, it is specifically used for:

Judge whether to generate based on the first optocoupler signal and the first detection signal and export one and be used to control The laminator is in the first control signal of halted state.

In specific implementation process, when film drawing device is located at start position, for the first detection means, detect ON be the start position the first optocoupler signal, therefore, as shown in the rows of Fig. 5 the 18th, in start position, T0, M1, M3 is in OFF state, only M4 work for ON, and it was found from the rows of Fig. 5 the 2nd, that M4 is received is the first optocoupler signal X002, so, Start position PLC output Y000 is determined by M4 and X001.

Further, it is pre- in one moved to the final position after the film drawing device leaves the start position If in the period, described control unit is in and is not responding to state, the process for being not responding to state is in described control unit In, described control unit will not be based on the first optocoupler signal and/or the second optocoupler signal, and first detection Signal generation simultaneously exports first control signal.

In specific implementation process, blue film is mobile in a period of time after film drawing device leaves start position and has The situation of shake occurs, that is, the process 1 mentioned in the embodiment of the present application, if examined in this process to film breakage situation Survey, it is possible that the situation of error detection, therefore, in preset time period after film drawing device leaves starting point, system can make Control unit PLC is in and is not responding to state, to note here is that a preset time period spy refers to that film drawing device passes through process 1 The time spent is wanted, that is, the time of blue film movement, the preset time period may be different in different laminators, with regard to this Shen Please embodiment citing ATM-1000C laminators for, the preset time period be 4S (K40) left and right.It is in PLC and is not responding to shape During state, PLC will not be based on the first optocoupler signal and/or the second optocoupler signal, and first detection signal generation and defeated Go out the first control signal, that is to say, that even if having detected that film breakage situation occurs also PLC and will not also generate the within this time One control signal.

It can be seen that in the embodiment of the present application due to PLC is arranged to when one section after film drawing device leaves starting point is default Between in section in state is not responding to, recover to respond again until by process 1, realize reduction and occur error detection in detection process The beneficial effect of probability.

Further, when after the preset time period, described control unit is adjusted to loud from the state that is not responding to State is answered, during described control unit is in the responsive state, described control unit can be based on first light Coupling signal and the second optocoupler signal, and the first detection signal, generate and export first control signal.

In specific implementation process, after film drawing device passes through process 1, into process 2, blue film no longer moves, now, Control unit PLC recovers responsive state, the first optocoupler signal and the second optocoupler signal that can be based on input, and the first detection letter Number, decide whether to generate and export the first control signal.That is, when detecting film breakage situation, the first control Signal output is stopped and alarmed to the original microswitch NO ends of board, control board.

Further, when the film drawing device is moved to the final position, described control unit is kept in described Responsive state, so that described control unit can be based on the second optocoupler signal and the first detection signal, generation is simultaneously Export first control signal.

In specific implementation process, when film drawing device is located at final position, for the first detection with start position similarly For device, the ON detected is the second optocoupler signal in final position, therefore, as shown in the rows of Fig. 5 the 18th, in final position When, T0, M1, M4 are in OFF state, and only M3 works for ON, and it was found from the rows of Fig. 5 the 2nd, what M3 was received is the second optocoupler letter Number X000, so, in final position, PLC output Y000 is determined by M3 and X001.

Further, during the film drawing device leaves the final position to start position movement, institute State control unit to keep be in the responsive state, so that described control unit can be based on the first optocoupler signal and described Second optocoupler signal, and the first detection signal, generate and export first control signal.

In specific implementation process, after the completion of a pad pasting process, film drawing device is from final position is left to starting point position Movement is put, into process 3, as process 2, control unit PLC continues to keep responsive state, while is based on the first optocoupler signal With the second optocoupler signal, and first detection signal, decide whether to generate and export the first control signal.

Film drawing device is further elucidated below in the moving process during a complete pad pasting and stop place in PLC The working condition of each relay:

Blue film has mobile and has shake (4 seconds this process used times) in process 1, and blue film detection sensor occasionals go out Existing blue film without error detection, process 2 and 3 blue film of process will not move.The state-detection of 1 blue film of process is not involved in reporting by programming Alert pause, by setting 4 seconds time to the time switch in PLC, i.e., X002 is by ON when film drawing device has just left initial position It is changed into OFF, auxiliary reclay M4 is changed into OFF from ON so that auxiliary reclay M0 obtains electric and self-locking, and time switch T0 obtains electric meter When, the normally opened contact T0 of time switch is changed into ON, process 2 from OFF after 4 seconds, and contact T0 maintains ON.Film drawing device is to terminal position When putting, X000 is changed into ON from OFF, and auxiliary reclay M3 obtains electric, and M3 normally-closed contact is changed into OFF from ON so that auxiliary reclay M0 dead electricity, time switch T0 dead electricity, its contact T0 are changed into OFF.In final position, M3 normally opened contact is ON.Membrane fills Put just when leaving final position, X000 is changed into OFF from ON, auxiliary reclay M3 from electric be changed into dead electricity so that auxiliary reclay M1 obtains electric and self-locking, and its normally opened contact M1 is changed into ON, process 3, and M1 normally opened contact M1 maintains ON.During to initial position, X002 ON is changed into from OFF, auxiliary reclay M4 is changed into electric from dead electricity, and M4 normally-closed contact is changed into OFF from ON, and auxiliary reclay M1 loses Electricity, M1 normally opened contact M1 is changed into OFF, while M4 normally opened contact is changed into ON from OFF.PLC inputs, relay and contact and fortune The relation of dynamic process is listed in Table 1 below.

Table 1

Therefore, as shown in Table 1, film drawing device rises with blue film detection signal and connected during whole stop with motion The condition of effect, in initial position, auxiliary reclay M4 normally opened contact works for ON;4 seconds of process 1, all conditions are not Meet, for the ON or OFF of blue film detection signal on exporting without influence, Y000 output is OFF;Process 2, time switch T0's touches Point T0 works for ON;In final position, auxiliary reclay M3 normally opened contact works for ON;Process 3, auxiliary reclay M1 Normally opened contact worked for ON.This ensure that blue film detection signal is excluded in process 1.

When the external outputs of output relay Y000 are OFF, output transistor is in high-impedance state.When blue film is not disconnected, blue film is examined It is OFF state to survey sensor signals X001, and externally output is OFF to Y000, is not in d alarms.

Output relay Y000 outputs are when be ON, and for output transistor in the state turned on, the high level on board is defeated by PLC Go out transistor to drag down, just look like detection twine film microswitch action it is the same, there is alarm d in board.

Broken in initial position indigo plant film, blue film detection sensor is detected, and X001 is changed into ON, and initial position X002 is ON State, then auxiliary reclay M4 be it is electric, auxiliary reclay M4 normally opened contact M4 is ON, and such contact M4 and X001 is For ON, output relay Y000 outputs are ON, and alarm d and Suspend Job occurs in board.

In process 1, blue film breaks X001 and is changed into ON, because of normally opened contact T0, normally opened contact M1, normally opened contact M3, normally opened Contact M4 is OFF state, and board will not alarm, and this process does not have chip on sucker, will not cause board fragmentation, Zhi Daojin Enter process 2 contact T0ON, output relay Y000 output ON, alarm d and Suspend Job occurs in board.

In final position, indigo plant film is broken, and X001 is changed into ON, and final position X000 is ON, then auxiliary reclay M3 be it is electric , auxiliary reclay M3 normally opened contact M3 is ON, and such contact M3 and X001 is ON, and output relay Y000 exports ON, There is alarm d and Suspend Job in board.

In process 3, blue film break X001 be changed into ON, because auxiliary reclay M1 be it is electric, its normally opened contact M1 is ON State, such normally opened contact M1 and X001 is ON, and output relay Y000 output ON, board alarm d occurs and simultaneously suspends work Industry.

Based on same inventive concept, the embodiment of the present application also provides a kind of monitoring method, as shown in fig. 6, specifically including:

S1:Detection, which obtains, to be used to characterize first optocoupler signal of the film drawing device in membrane start position, and detection Obtain the second optocoupler signal in the final position for being characterized in the film drawing device;

S2:Detection, which obtains, is used to characterize the film drawing device in the progress membrane from the start position to the final position During first detection signal;

S3:Receive and be based on the first optocoupler signal and/or the second optocoupler signal, and the first detection letter Number generate and export the first control signal, to control the laminator to be in halted state.

Further, when the film drawing device is in the start position, step S3 is specially:

Generated based on the first optocoupler signal and the first detection signal and export the first control signal, with control The laminator is in halted state.

Further, when after the preset time period, continue to move to the final position in the film drawing device During, step S3 is specially:Based on the first optocoupler signal and the second optocoupler signal, and first detection Signal, generate and export the first control signal, to control the laminator to be in halted state.

Further, when the film drawing device is moved to the final position, step S3 is specially:

Based on the second optocoupler signal and the first detection signal, generate and export the first control signal, with control Make the laminator and be in halted state.

Further, during the film drawing device leaves the final position to start position movement, step Suddenly S3 is specially:

Based on the first optocoupler signal and the second optocoupler signal, and the first detection signal, generate and defeated Go out the first control signal, to control the laminator to be in halted state.

According to the description of the method for the information processing provided above the application, above-mentioned electronic equipment is used to realize above-mentioned side Method, so, the course of work of the electronic equipment is consistent with one or more embodiments of the above method, does not just repeat one by one herein .

It should be understood by those skilled in the art that, embodiments of the invention can be provided as method, system or computer program Product.Therefore, the present invention can use the reality in terms of complete hardware embodiment, complete software embodiment or combination software and hardware Apply the form of example.Moreover, the present invention can use the computer for wherein including computer usable program code in one or more The computer program production that usable storage medium is implemented on (including but is not limited to magnetic disk storage, CD-ROM, optical memory etc.) The form of product.

The present invention is the flow with reference to method according to embodiments of the present invention, equipment (system) and computer program product Figure and/or block diagram describe.It should be understood that can be by every first-class in computer program instructions implementation process figure and/or block diagram Journey and/or the flow in square frame and flow chart and/or block diagram and/or the combination of square frame.These computer programs can be provided The processors of all-purpose computer, special-purpose computer, Embedded Processor or other programmable data processing devices is instructed to produce A raw machine so that produced by the instruction of computer or the computing device of other programmable data processing devices for real The device for the function of being specified in present one flow of flow chart or one square frame of multiple flows and/or block diagram or multiple square frames.

These computer program instructions, which may be alternatively stored in, can guide computer or other programmable data processing devices with spy Determine in the computer-readable memory that mode works so that the instruction being stored in the computer-readable memory, which produces, to be included referring to Make the manufacture of device, the command device realize in one flow of flow chart or multiple flows and/or one square frame of block diagram or The function of being specified in multiple square frames.

These computer program instructions can be also loaded into computer or other programmable data processing devices so that counted Series of operation steps is performed on calculation machine or other programmable devices to produce computer implemented processing, so as in computer or The instruction performed on other programmable devices is provided for realizing in one flow of flow chart or multiple flows and/or block diagram one The step of function of being specified in individual square frame or multiple square frames.

Although preferred embodiments of the present invention have been described, but those skilled in the art once know basic creation Property concept, then can make other change and modification to these embodiments.So appended claims be intended to be construed to include it is excellent Select embodiment and fall into having altered and changing for the scope of the invention.

Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the present invention to the present invention God and scope.So, if these modifications and variations of the present invention belong to the scope of the claims in the present invention and its equivalent technologies Within, then the present invention is also intended to comprising including these changes and modification.

Claims (13)

  1. A kind of 1. monitoring system, it is characterised in that including:
    First detection means, it is arranged on the film drawing device of a laminator and in the direction of motion of film drawing device, for detecting The first optocoupler signal for characterizing the film drawing device in membrane start position is obtained, and for being characterized in the membrane dress The second optocoupler signal in the final position put;
    Second detection device, it is used to characterize the film drawing device from the start position to the terminal position for detecting to obtain Put the first detection signal during progress membrane;
    Control unit, it is connected with first detection means and the second detection device, for receiving and based on described first Optocoupler signal and/or the second optocoupler signal, and the first detection signal generate and export the first control signal, with control Make the laminator and be in halted state.
  2. 2. the system as claimed in claim 1, it is characterised in that first detection means, specifically include:
    First luminescence unit, the place to be passed through in the direction of motion of the film drawing device is arranged on, for launching the first light;
    First receiving unit, the place to be passed through in the direction of motion of the film drawing device is arranged on, it is luminous single with described first Member is corresponding, for receiving first light;
    Second luminescence unit, the place to be passed through in the direction of motion of the film drawing device is arranged on, for launching the second light;
    Second receiving unit, the place to be passed through in the direction of motion of the film drawing device is arranged on, it is luminous single with described second Member is corresponding, for receiving second light;
    Block, it is arranged on the film drawing device, as film drawing device moves;
    Wherein, when the block is moved between the first luminescence unit and first receiving unit, described first receives list Member can not receive first light, then the first optocoupler signal obtained is ON signals;When block is not described first Between luminescence unit and first receiving unit, first receiving unit can receive first light, then obtain The first optocoupler signal is OFF signal;
    When the block is moved between second luminescence unit and second receiving unit, second receiving unit is not Second light can be received, then the second optocoupler signal obtained is ON signals;When the block is not described second Between luminescence unit and second receiving unit, second receiving unit can receive second light, then obtain The second optocoupler signal is OFF signal.
  3. 3. system as claimed in claim 2, it is characterised in that the second detection device, specifically include:
    Launch receiving unit, set above the easily broken position of the film in the direction of motion of the film drawing device, membrane described herein Device is without going past for launching downwards the 3rd light;
    Reflecting unit, below the easily broken position of the film that is arranged in the direction of motion of the film drawing device, membrane dress described herein Put without going past, with it is described transmitting receiving unit it is corresponding, for reflecting the 3rd light, so that the transmitting receiving unit Receive the 3rd light;
    Wherein, when it is described transmitting receiving unit receive three light when, then show it is described transmitting receiving unit with it is described There is no film process between reflecting unit, then the first detection signal obtained is ON signals;
    When it is described transmitting receiving unit do not receive three light when, then show it is described transmitting receiving unit with it is described reflective There is film process between unit, then the first detection signal obtained is OFF signal.
  4. 4. system as claimed in claim 3, it is characterised in that described when the film drawing device is in the start position Control unit, it is specifically used for:
    Generated based on the first optocoupler signal and the first detection signal and export the first control signal, with described in control Laminator is in halted state.
  5. 5. system as claimed in claim 4, it is characterised in that after the film drawing device leaves the start position, to In one preset time period of final position movement, described control unit is not responding to the first optocoupler signal and/or described Second optocoupler signal, and the first detection signal.
  6. 6. system as claimed in claim 5, it is characterised in that when after the preset time period, in the film drawing device Continue during being moved to the final position, described control unit, be specifically used for:
    Based on the first optocoupler signal and the second optocoupler signal, and the first detection signal, generate and export One control signal, to control the laminator to be in halted state.
  7. 7. system as claimed in claim 6, it is characterised in that when the film drawing device is moved to the final position, institute Control unit is stated, is specifically used for:
    Based on the second optocoupler signal and the first detection signal, generate and export the first control signal, to control State laminator and be in halted state.
  8. 8. system as claimed in claim 7, it is characterised in that when the film drawing device leaves the final position to described During the movement of point position, described control unit, it is specifically used for:
    Based on the first optocoupler signal and the second optocoupler signal, and the first detection signal, generate and export One control signal, to control the laminator to be in halted state.
  9. A kind of 9. monitoring method, it is characterised in that including:
    Detection obtains first optocoupler signal of the film drawing device in membrane start position for being used for characterizing laminator, and detection obtains For the second optocoupler signal in the final position for being characterized in the film drawing device;
    Detection, which obtains, is used to characterize the film drawing device during membrane is carried out from the start position to the final position First detection signal;
    Receive and be based on the first optocoupler signal and/or the second optocoupler signal, and first detection signal generation And the first control signal is exported, to control the laminator to be in halted state.
  10. 10. method as claimed in claim 9, it is characterised in that described when the film drawing device is in the start position Receive and be based on the first optocoupler signal and/or the second optocoupler signal, and first detection signal generation and defeated Go out the first control signal, to control the laminator to be in halted state, be specially:
    Generated based on the first optocoupler signal and the first detection signal and export the first control signal, with described in control Laminator is in halted state.
  11. 11. method as claimed in claim 10, it is characterised in that when after preset time period, the film drawing device after Continue during being moved to the final position, it is described to receive and be based on the first optocoupler signal and/or second optocoupler Signal, and the first detection signal generate and export the first control signal, to control the laminator to be in halted state, Specially:
    Based on the first optocoupler signal and the second optocoupler signal, and the first detection signal, generate and export One control signal, to control the laminator to be in halted state.
  12. 12. method as claimed in claim 11, it is characterised in that when the film drawing device is moved to the final position, It is described to receive and be based on the first optocoupler signal and/or the second optocoupler signal, and first detection signal generation And the first control signal is exported, to control the laminator to be in halted state, it is specially:
    Based on the second optocoupler signal and the first detection signal, generate and export the first control signal, to control State laminator and be in halted state.
  13. 13. method as claimed in claim 12, it is characterised in that when the film drawing device leaves the final position to described It is described to receive and be based on the first optocoupler signal and/or the second optocoupler signal during start position moves, and The first detection signal generates and exports the first control signal, to control the laminator to be in halted state, is specially:
    Based on the first optocoupler signal and the second optocoupler signal, and the first detection signal, generate and export One control signal, to control the laminator to be in halted state.
CN201410258160.6A 2014-06-11 2014-06-11 A kind of monitoring system and method CN105204448B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006036560A (en) * 2004-07-23 2006-02-09 Hoya Corp Glass member with optical multilayer film and optical element using the glass member
JP2008046093A (en) * 2006-08-21 2008-02-28 National Institute Of Advanced Industrial & Technology Waveguide mode sensor with pores
CN103287056A (en) * 2013-03-21 2013-09-11 浙江水晶光电科技股份有限公司 A surface blue film mounting machine for wafers
CN103602271A (en) * 2013-11-13 2014-02-26 东莞轩朗实业有限公司 Automatic adhesive sticking device and method for optical diaphragm

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006036560A (en) * 2004-07-23 2006-02-09 Hoya Corp Glass member with optical multilayer film and optical element using the glass member
JP2008046093A (en) * 2006-08-21 2008-02-28 National Institute Of Advanced Industrial & Technology Waveguide mode sensor with pores
CN103287056A (en) * 2013-03-21 2013-09-11 浙江水晶光电科技股份有限公司 A surface blue film mounting machine for wafers
CN103602271A (en) * 2013-11-13 2014-02-26 东莞轩朗实业有限公司 Automatic adhesive sticking device and method for optical diaphragm

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