CN105204082B - A kind of piezoelectric type gravimeter - Google Patents

A kind of piezoelectric type gravimeter Download PDF

Info

Publication number
CN105204082B
CN105204082B CN201510641801.0A CN201510641801A CN105204082B CN 105204082 B CN105204082 B CN 105204082B CN 201510641801 A CN201510641801 A CN 201510641801A CN 105204082 B CN105204082 B CN 105204082B
Authority
CN
China
Prior art keywords
piezoelectric
signal
patches
vibra
recipient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201510641801.0A
Other languages
Chinese (zh)
Other versions
CN105204082A (en
Inventor
谭成忠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN201510641801.0A priority Critical patent/CN105204082B/en
Publication of CN105204082A publication Critical patent/CN105204082A/en
Application granted granted Critical
Publication of CN105204082B publication Critical patent/CN105204082B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

A kind of piezoelectric type gravimeter, it is characterised in that:Piezoelectric type gravimeter is by piezoelectric patches(1), electrode slice(2), mass(3), signal generating system(4)Receive processing system with signal(5)Composition;Electrode slice(2)Piezoelectric patches is pasted onto by conducting resinl(1)Two parallel surfaces on;Signal generating system(4)The alternating voltage signal of generation is applied to electrode slice by wire(1)On;Piezoelectric patches(1), electrode slice(2)And signal generating system(4)The composition that links together piezoelectric vibra;Another piezoelectric patches(1)With pasting two electrode slices in its surface(2)Constitute piezoelectric signal recipient;Resettlement effect block is distinguished from top to down along gravity direction(3), piezoelectric signal recipient, piezoelectric vibra;Signal receives processing system(5)Receive and system occurs for process signal(4)Input voltage signal and piezoelectric signal recipient produce output voltage signal.

Description

A kind of piezoelectric type gravimeter
Technical field
The present invention relates to a kind of piezoelectric type gravimeter, measurement earth's surface, high-altitude and under water the acceleration of gravity of the earth and There is specific use, it can also be used to inertial navigation, mapping, aerial survey, geology and geophysical exploration, earthquake in terms of earth gravitational field Monitoring, heavy construction safety monitoring field.
Background technology
Terrestrial gravitation accelerationgAccurate measurement be that pay close attention to for a long time one of geology and geophysics and survey field grinds Study carefully problem.In theory, the interaction between terrestrial gravitation acceleration and the earth and the sun, the moon and other planets and ground The rotation of ball is related to internal structure.In application aspect, point of the terrestrial gravitation acceleration accurately measured and earth gravitational field Cloth and change are for inertial navigation, mapping, aerial survey, geology and geophysical exploration, seismic monitoring, heavy construction safety monitoring etc. Field is also important physical parameter.The e measurement technology of terrestrial gravitation acceleration is divided into absolute value measurement and two kinds of sides of relative measurement Formula.In principle, absolute value e measurement technology is based on the physical principle of free-fall acceleration.By the displacement for measuring freely falling body The absolute gravity acceleration in certain point measurement period is determined with the time.According to measurement means, absolute value e measurement technology is divided into machine Tool pendulum-type, optical interference formula and the atomic interferometer mode based on quantum effect.This several ways measurement accuracy is all very high, can Reach microgal precision level.But absolute value measuring apparatus volume is huge, it is difficult to move, time of measuring is long, and measuring condition will Ask harsh, equipment is expensive.The relative measurement of terrestrial gravitation acceleration is a certain physical quantity and gravity exported based on measuring apparatus Acceleration relative theory, output quantity and the functional relation of acceleration of gravity can be drawn by the demarcation to output quantity.It is general next Say, the measurement physical quantity corresponding with acceleration of gravity is all transformed into voltage signal output.Traditional relative gravity meter has Spring mechanical is swing, and sensor is the spring that metal or quartz glass zero-length change.The super-conductive magnetic suspension researched and developed in the recent period In relative gravity meter, sensor is compensation supercurrent instrument.The measurement accuracy of this quasi-instrument up to microgal level even more Height, but all have that equipment volume is huge, time of measuring is longer, measuring condition requires limitation harsh, that equipment is expensive.In recent years The research and development of micro-acceleration sensor are taken seriously.Micro-acceleration gauge is with integrated circuit technique and micro electronmechanical (MEMS) process technology Based on the novel sensor that grows up.In micro-acceleration gauge, pressure resistance type or capacitance type sensor and microcomputer electrical measurement With control system integration on monocrystalline silicon piece.Micro-acceleration gauge compared with common accelerometer, with small volume, it is lightweight, Cost is low, it is low in energy consumption the characteristics of.But micro-acceleration gauge is larger by temperature and such environmental effects, measurement accuracy is relatively low.
Therefore small volume, the gravimeter that lightweight, measurement accuracy is high and measuring speed is fast are still terrestrial gravitation acceleration The technological development direction of measurement.Particularly high-resolution airborne gravity measurement requires very high to measuring speed.Quick gravity measurement Equipment seems particularly significant for the airborne gravity measurement of high speed.
Piezoelectric acceleration transducer is the maximally effective technological means of vibration acceleration measurement.Accelerate with other types of Degree sensor is compared, and piezoelectric acceleration transducer has that dynamic range is wide, the linearity is good, wide frequency range, small volume, light weight The characteristics of, with the advantage that other acceleration transducers are incomparable.But it is due to the factor that there is charge leakage, piezoelectric type adds The traditional measurement mode of velocity sensor is unsuitable for the terrestrial gravitation acceleration of measurement static state or zero-frequency.
The present invention provides a kind of piezoelectric type gravimeter.This piezoelectric type gravimeter is a relative gravity meter device, can Overcome that existing gravimeter is bulky, time of measuring is longer, measuring condition requires limitation harsh, that equipment is expensive;Also can gram The limitation of zero-frequency terrestrial gravitation acceleration can not be measured by taking conventional piezoelectric formula acceleration transducer.Novel pressure electric-type gravimeter has Dynamic range is wide, the linearity is good, wide frequency range, short time of measuring, small volume, light weight and it is simple in construction the characteristics of, can Quick and precisely measure terrestrial gravitation acceleration.
The content of the invention
The present invention relates to a kind of piezoelectric type gravimeter, one of or polylith piezoelectric patches is believed by additional alternating voltage Number sound wave or ultrasonic wave are produced, constitute piezoelectric vibra.Another piezoelectric patches and two electrode slices being attached thereto constitute pressure Electric signal recipient.Piezoelectric vibra and piezoelectric signal recipient are vertically superposed, and place matter at top Gauge block.Additional alternating voltage signal makes the piezoelectric patches in piezoelectric vibra produce strain and forms alternation along gravity direction Acceleration.Under the synergy of alternation acceleration and the acceleration of gravity of mass, the piezoelectricity in piezoelectric signal recipient Piece produces periodically variable net charge, and produces the voltage signal of alternation between two electrodes for being pasted on its surface, electric Press signal related to terrestrial gravitation acceleration.
The present invention provides a kind of piezoelectric type gravimeter and produces sound wave or ultrasonic wave by additional alternating voltage signal.Piezoelectricity The acceleration for the alternation that vibration machine is formed is superimposed upon on the piezoelectric patches in piezoelectric signal recipient with acceleration of gravity.It is logical The voltage signal of the input signal of measurement piezoelectric vibra and the output of piezoelectric signal recipient is crossed to calculate the processing earth Acceleration of gravity.Therefore novel pressure electric-type gravimeter can overcome conventional piezoelectric formula acceleration transducer to measure the zero-frequency earth The limitation of acceleration of gravity.This novel pressure electric-type gravimeter has that dynamic range is wide, the linearity is good, wide frequency range, volume Small, light weight and it is simple in construction the characteristics of, can for quick and precisely measurement terrestrial gravitation acceleration a kind of robust techniques hand be provided Section.
The purpose of the present invention is achieved through the following channels:
One piezoelectric type gravimeter, it is characterised in that:Piezoelectric type gravimeter is by piezoelectric patches 1, electrode slice 2, mass 3, signal Generation system 4 and signal receive processing system 5 and constituted.Electrode slice 2 is pasted onto two parallel surfaces of piezoelectric patches 1 by conducting resinl On.The alternating voltage signal that signal generating system 4 is produced is applied on electrode slice 2 by wire.Piezoelectric patches 1, electrode slice 2 and Signal generating system 4 links together composition piezoelectric vibra.Another piezoelectric patches 1 is with pasting two electricity in its surface Pole piece 2 constitutes piezoelectric signal recipient.Resettlement effect block 3, piezoelectric signal recipient, piezoelectricity are distinguished from top to down along gravity direction Vibration machine.The alternating voltage signal that signal generating system 4 is sent produces the piezoelectric patches 1 in piezoelectric vibra should Power and the acceleration that mechanical periodicity is formed along gravity direction.In the acceleration of gravity and the connection of periodic vibration acceleration of mass 3 Under cooperation is used, the piezoelectric patches 1 in piezoelectric signal recipient produces periodically variable net charge, and is being pasted on the two of its surface The voltage signal of alternation is produced between individual electrode slice 2, voltage signal is related to acceleration of gravity.Signal receives processing system 5 and connect The output voltage signal produced by input voltage signal and piezoelectric signal recipient that system 4 occurs with process signal.
Further, the upper-lower position of piezoelectric signal recipient and piezoelectric vibra is exchanged;I.e. along gravity direction certainly On down distinguish resettlement effect block 3, piezoelectric vibra, piezoelectric signal recipient.Piezoelectric vibra and piezoelectric signal The public electrode ground connection that recipient is superimposed.
Further, piezoelectric vibra includes one piece or polylith piezoelectric patches 1.Polylith piezoelectricity covered with electrode Piece 1 is overlapped mutually;Electrode slice 2 is in parallel with signal generating system 4 by wire.In the condition of identical input alternating voltage signal Under, the superposition parallel with one another of polylith piezoelectric patches can increase the amplitude of vibration acceleration, thus strengthen the defeated of piezoelectric signal recipient Go out signal.
Piezoelectric patches 1 in the present invention can be piezoelectric crystal material, or piezoceramic material.In order to avoid warm with reduction The influence of drift is spent, the AT sections or SC sections of quartz crystal may be selected in piezoelectric patches 1.In order to increase piezoelectric signal recipient Piezoelectric patches thickness in output signal voltage, piezoelectric signal recipient should be greater than or equal to piezoelectric patches in piezoelectric vibra Thickness.
Mass 3 in the present invention is by the solid more stable than great and physicochemical properties(As metal W, Ta, red copper, Stainless steel)Or liquid(Such as liquid mercury)Constitute.
The principle of the present invention is as follows:
If the alternating voltage signal that signal generating system 4 is produced and exported is:
(1)
In formulaV 0For signal amplitude,ωFor signal angular frequency.This signal voltage puts on the pressure of piezoelectric vibra Electric piece two sides, makes piezoelectric patches produce cyclic strains.According to piezo-electric effect principle, the strain displacement amount of generationxFor
(2)
In above formulad ij For piezoelectric modulus.Simultaneous(1)With(2)Two formulas, can guiding system vibration acceleration (α = d 2 x/dt 2) be:
(3)
As shown in figure 1, along gravity direction, resettlement effect block 3, piezoelectric signal connect respectively from top to down in piezoelectric type gravimeter Receiver, piezoelectric vibra.If the piezoelectric patches load-bearing quality in piezoelectric signal recipient ism, the terrestrial gravitation acceleration of measuring point Spend and beg.Then the overall acceleration of piezoelectric patches isα+ g, it is suffered make a concerted effort beF = m(α+ g).According to piezo-electric effect principle, this Acting on makes its two sides produce net charge making a concerted effort on piezoelectric patchesq, the value of net charge isq = d ij F, i.e.,:q = d ij m(α+g).Therefore the signal voltage of alternation is produced between two electrodes for being pasted on piezoelectric patches surfaceV.Due toV = q/C, whereinC For the capacitance of piezoelectric patches, therefore output signal voltageVIt is relevant with acceleration of gravity.By(3)Formula can export acceleration of gravityg With the input signal of piezoelectric vibraV in And the output signal of piezoelectric signal recipientVBetween relation be:
(4)
By frequency scanning under measurement varying input signal frequencyV in ,V, the terrestrial gravitation that can calculate measurement point adds Speedg.Because the frequency input signal of piezoelectric vibra may be provided at sound wave or ultrasonic wave range, therefore combine quick Sampled signal receives processing system, and novel pressure electric-type gravimeter can realize the function of quick and precisely measuring terrestrial gravitation acceleration.
Brief description of the drawings
The present invention is described in further detail below in conjunction with the accompanying drawings:
Fig. 1 is the cross-sectional view for the piezoelectric type gravimeter for including two piezoelectric patches 1;One piezoelectric patches 1 and electricity Pole piece 2 and signal generating system 4 constitute piezoelectric vibra, and another piezoelectric patches 1 constitutes piezoelectric signal with electrode slice 2 and received Device, and processing system 5 is received by wire and signal be connected;Piezoelectric signal recipient is vertically placed in the He of mass 3 Between piezoelectric vibra;
Fig. 2 is the cross-sectional view for the piezoelectric type gravimeter for including two piezoelectric patches 1;One piezoelectric patches 1 and electricity Pole piece 2 and signal generating system 4 constitute piezoelectric vibra, and another piezoelectric patches 1 constitutes piezoelectric signal with electrode slice 2 and received Device, and processing system 5 is received by wire and signal be connected;Piezoelectric vibra is vertically placed in the He of mass 3 Between piezoelectric signal recipient;
Fig. 3 is the cross-sectional view for the piezoelectric type gravimeter for including four piezoelectric patches 1;Three piezoelectric patches 1 and electricity Pole piece 2 and the composition piezoelectric vibra in parallel of signal generating system 4, another piezoelectric patches 1 constitute piezoelectric signal with electrode slice 2 Recipient, and processing system 5 is received by wire and signal be connected;Piezoelectric signal recipient is vertically placed in mass Between 3 and piezoelectric vibra;
Fig. 4 is the cross-sectional view for the piezoelectric type gravimeter for including four piezoelectric patches 1;Three piezoelectric patches 1 and electricity Pole piece 2 and the composition piezoelectric vibra in parallel of signal generating system 4, another piezoelectric patches 1 constitute piezoelectric signal with electrode slice 2 Recipient, and processing system 5 is received by wire and signal be connected;Piezoelectric vibra is vertically placed in mass Between 3 and piezoelectric signal recipient.
Specific embodiment
Embodiment 1:
A piezoelectric type gravimeter as shown in Figure 1, it is characterised in that:Piezoelectric type gravimeter is by two piezoelectric patches 1, electrode slices 2nd, mass 3, signal generating system 4 and signal receive processing system 5 and constituted.Electrode slice 2 is pasted onto piezoelectric patches 1 by conducting resinl Two parallel surfaces on.The alternating voltage signal that signal generating system 4 is produced is applied on electrode slice 2 by wire.It is single Piezoelectric patches 1, electrode slice 2 and signal generating system 4 link together composition piezoelectric vibra.Another piezoelectric patches 1 is with gluing Two electrode slices 2 being attached on its face constitute piezoelectric signal recipient.Along gravity direction from top to down distinguish resettlement effect block 3, Piezoelectric signal recipient, piezoelectric vibra.The alternating voltage signal that signal generating system 4 is sent makes piezoelectric vibration Piezoelectric patches 1 in device produces stress and the acceleration of mechanical periodicity is formed along gravity direction;Mass 3 acceleration of gravity and Under the synergy of periodic vibration acceleration, the piezoelectric patches 1 in piezoelectric signal recipient produces periodically variable net charge, and The voltage signal of alternation is produced between two electrode slices 2 for being pasted on its surface.Signal receives processing system 5 and receives and handle The output voltage signal that the input voltage signal and piezoelectric signal recipient of signal generating system 4 are produced.In order to avoid and reduce The AT sections or SC sections of quartz crystal may be selected in the influence of temperature drift, piezoelectric patches 1.In order to increase piezoelectric signal recipient Output signal voltage, the piezoelectric patches thickness in piezoelectric signal recipient should be greater than or equal to piezoelectricity in piezoelectric vibra Piece thickness.If mass 3 is metal material, the upper surface of piezoelectric patches can be affixed directly to using conducting resinl, and adopt Receive processing system 5 with wire and signal to be connected.It is public that piezoelectric vibra and piezoelectric signal recipient are superimposed Electrode is grounded.
Embodiment 2:
A piezoelectric type gravimeter as shown in Figure 2, it is characterised in that:Piezoelectric type gravimeter is by two piezoelectric patches 1, electrode slices 2nd, mass 3, signal generating system 4 and signal receive processing system 5 and constituted.Electrode slice 2 is pasted onto piezoelectric patches 1 by conducting resinl Two parallel surfaces on.The alternating voltage signal that signal generating system 4 is produced is applied on electrode slice 2 by wire.It is single Piezoelectric patches 1, electrode slice 2 and signal generating system 4 link together composition piezoelectric vibra.Another piezoelectric patches 1 is with gluing Two electrode slices 2 being attached on its face constitute piezoelectric signal recipient.Along gravity direction from top to down distinguish resettlement effect block 3, Piezoelectric vibra, piezoelectric signal recipient.The alternating voltage signal that signal generating system 4 is sent makes piezoelectric vibration Piezoelectric patches 1 in device produces stress and the acceleration of mechanical periodicity is formed along gravity direction;Mass 3 acceleration of gravity and Under the synergy of periodic vibration acceleration, the piezoelectric patches 1 in piezoelectric signal recipient produces periodically variable net charge, and The voltage signal of alternation is produced between two electrode slices 2 for being pasted on its surface.Signal receives processing system 5 and receives and handle The output voltage signal that the input voltage signal and piezoelectric signal recipient of signal generating system 4 are produced.In order to avoid and reduce The AT sections or SC sections of quartz crystal may be selected in the influence of temperature drift, piezoelectric patches 1.In order to increase piezoelectric signal recipient Output signal voltage, the piezoelectric patches thickness in piezoelectric signal recipient should be greater than or equal to piezoelectricity in piezoelectric vibra Piece thickness.If mass 3 is metal material, the upper surface of piezoelectric patches can be affixed directly to using conducting resinl, and adopt It is connected with wire with signal generating system 4.
Embodiment 3:
A piezoelectric type gravimeter as shown in Figure 3, it is characterised in that:Piezoelectric type gravimeter is by four piezoelectric patches 1, electrode slices 2nd, mass 3, signal generating system 4 and signal receive processing system 5 and constituted.Electrode slice 2 is pasted onto piezoelectric patches 1 by conducting resinl Two parallel surfaces on.The alternating voltage signal that signal generating system 4 is produced is applied on electrode slice 2 by wire.Three Piezoelectric patches is in parallel with electrode slice 2 and signal generating system 4 to constitute piezoelectric vibra.Another piezoelectric patches 1 is with being pasted onto it Two electrode slices 2 on face constitute piezoelectric signal recipient.Distinguish resettlement effect block 3, piezoelectricity letter from top to down along gravity direction Number recipient, piezoelectric vibra.The alternating voltage signal that signal generating system 4 is sent makes in piezoelectric vibra Piezoelectric patches 1 produces stress and the acceleration of mechanical periodicity is formed along gravity direction;Shaken in the acceleration of gravity of mass 3 and cycle Under the synergy of dynamic acceleration, the piezoelectric patches 1 in piezoelectric signal recipient produces periodically variable net charge, and is pasting The voltage signal of alternation is produced between two electrode slices 2 on its surface.Signal receives processing system 5 and received and process signal hair The output voltage signal that the input voltage signal and piezoelectric signal recipient of raw system 4 are produced.In order to avoid being floated with reduction temperature The AT sections or SC sections of quartz crystal may be selected in the influence of shifting, piezoelectric patches 1.If mass 3 is metal material, it can adopt The upper surface of piezoelectric patches is affixed directly to conducting resinl, and use wire receives processing system 5 with signal and is connected.Identical Input under conditions of alternating voltage signal, the superposition parallel with one another of polylith piezoelectric patches can increase the amplitude of vibration acceleration, enhancing The output signal of piezoelectric signal recipient.The public electrode that piezoelectric vibra and piezoelectric signal recipient are superimposed connects Ground.
Embodiment 4:
A piezoelectric type gravimeter as shown in Figure 4, it is characterised in that:Piezoelectric type gravimeter is by four piezoelectric patches 1, electrode slices 2nd, mass 3, signal generating system 4 and signal receive processing system 5 and constituted.Electrode slice 2 is pasted onto piezoelectric patches 1 by conducting resinl Two parallel surfaces on.The alternating voltage signal that signal generating system 4 is produced is applied on electrode slice 2 by wire.Three Piezoelectric patches is in parallel with electrode slice 2 and signal generating system 4 to constitute piezoelectric vibra.Another piezoelectric patches 1 is with being pasted onto it Two electrode slices 2 on face constitute piezoelectric signal recipient.Along gravity direction, resettlement effect block 3, piezoelectricity shake respectively from top to down Dynamic generator, piezoelectric signal recipient.The alternating voltage signal that signal generating system 4 is sent makes in piezoelectric vibra Piezoelectric patches 1 produces stress and the acceleration of mechanical periodicity is formed along gravity direction;Shaken in the acceleration of gravity of mass 3 and cycle Under the synergy of dynamic acceleration, the piezoelectric patches 1 in piezoelectric signal recipient produces periodically variable net charge, and is pasting The voltage signal of alternation is produced between two electrode slices 2 on its surface.Signal receives processing system 5 and received and process signal hair The output voltage signal that the input voltage signal and piezoelectric signal recipient of raw system 4 are produced.In order to avoid being floated with reduction temperature The AT sections or SC sections of quartz crystal may be selected in the influence of shifting, piezoelectric patches 1.If mass 3 is metal material, it can adopt The upper surface of piezoelectric patches is affixed directly to conducting resinl, and is connected using wire with signal generating system 4.In identical input Under conditions of alternating voltage signal, the superposition parallel with one another of polylith piezoelectric patches can increase the amplitude of vibration acceleration, strengthen piezoelectricity The output signal of signal receiver.
Novel pressure electric-type gravimeter provided by the present invention has that dynamic range is wide, the linearity is good, wide frequency range, volume It is small, the characteristics of light weight is simple in construction, a kind of robust techniques means can be provided for quick and precisely measurement terrestrial gravitation acceleration.

Claims (6)

1. a kind of piezoelectric type gravimeter, it is characterised in that:Piezoelectric type gravimeter is by piezoelectric patches(1), electrode slice(2), mass (3), signal generating system(4)Receive processing system with signal(5)Composition;Electrode slice(2)Piezoelectric patches is pasted onto by conducting resinl (1)Two parallel surfaces on;Signal generating system(4)The alternating voltage signal of generation is applied to electrode slice by wire(2) On;Piezoelectric patches(1), electrode slice(2)And signal generating system(4)The composition that links together piezoelectric vibra;Another pressure Electric piece(1)With pasting two electrode slices in its surface(2)Constitute piezoelectric signal recipient;Divide from top to down along gravity direction Other resettlement effect block(3), piezoelectric signal recipient, piezoelectric vibra;Signal generating system(4)The alternating voltage sent Signal makes the piezoelectric patches in piezoelectric vibra(1)Produce stress and the acceleration of mechanical periodicity is formed along gravity direction; Mass(3)Acceleration of gravity and periodic vibration acceleration synergy under, the piezoelectric patches in piezoelectric signal recipient(1) Periodically variable net charge is produced, and is being pasted on two electrode slices on its surface(2)Between produce alternation voltage signal, Voltage signal is related to acceleration of gravity;Signal receives processing system(5)Receive and system occurs for process signal(4)Input electricity The output voltage signal for pressing signal and piezoelectric signal recipient to produce.
2. piezoelectric type gravimeter as claimed in claim 1, it is characterised in that:Piezoelectric signal recipient and piezoelectric vibra Upper-lower position exchange;Resettlement effect block is distinguished from top to down along gravity direction(3), piezoelectric vibra, piezoelectric signal connect Receiver.
3. piezoelectric type gravimeter as claimed in claim 1, it is characterised in that:Piezoelectric vibra includes one piece or polylith Piezoelectric patches (1);Polylith piezoelectric patches covered with electrode(1)It is overlapped mutually;Electrode slice(2)Pass through wire and signal generating system (4)It is in parallel.
4. piezoelectric type gravimeter as claimed in claim 1, it is characterised in that:Piezoelectric patches(1)It is made up of piezoelectric crystal material.
5. piezoelectric type gravimeter as claimed in claim 1, it is characterised in that:Piezoelectric patches(1)It is made up of piezoceramic material.
6. piezoelectric type gravimeter as claimed in claim 1, it is characterised in that:Mass(3)By than great and physical chemistry The stable solid of property or liquid are constituted.
CN201510641801.0A 2015-10-07 2015-10-07 A kind of piezoelectric type gravimeter Expired - Fee Related CN105204082B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510641801.0A CN105204082B (en) 2015-10-07 2015-10-07 A kind of piezoelectric type gravimeter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510641801.0A CN105204082B (en) 2015-10-07 2015-10-07 A kind of piezoelectric type gravimeter

Publications (2)

Publication Number Publication Date
CN105204082A CN105204082A (en) 2015-12-30
CN105204082B true CN105204082B (en) 2017-08-15

Family

ID=54951856

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510641801.0A Expired - Fee Related CN105204082B (en) 2015-10-07 2015-10-07 A kind of piezoelectric type gravimeter

Country Status (1)

Country Link
CN (1) CN105204082B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113325242A (en) * 2021-05-27 2021-08-31 四川亚美电陶科技有限公司 Is suitable for in-situ actual measurement of piezoelectric ceramics d under different conditions33Temperature-controlled excitation system and method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841772A (en) * 1987-12-03 1989-06-27 University Of Maryland, College Park Three-axis superconducting gravity gradiometer
DD269458A1 (en) * 1988-02-24 1989-06-28 Akad Wissenschaften Ddr PIEZOELECTRIC GRAVIMETRIC VERTICAL GRADIENT GAUGE
CN1558255A (en) * 2004-02-11 2004-12-29 华中科技大学 Gravitational wave detecting device
CN202453517U (en) * 2012-01-30 2012-09-26 杨桂林 Gravity acceleration gauge
CN203323864U (en) * 2013-06-13 2013-12-04 南京师范大学 High-sensitivity piezoelectric vibration sensor
CN205038361U (en) * 2015-10-07 2016-02-17 谭成忠 Piezoelectric type gravity appearance

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841772A (en) * 1987-12-03 1989-06-27 University Of Maryland, College Park Three-axis superconducting gravity gradiometer
DD269458A1 (en) * 1988-02-24 1989-06-28 Akad Wissenschaften Ddr PIEZOELECTRIC GRAVIMETRIC VERTICAL GRADIENT GAUGE
CN1558255A (en) * 2004-02-11 2004-12-29 华中科技大学 Gravitational wave detecting device
CN202453517U (en) * 2012-01-30 2012-09-26 杨桂林 Gravity acceleration gauge
CN203323864U (en) * 2013-06-13 2013-12-04 南京师范大学 High-sensitivity piezoelectric vibration sensor
CN205038361U (en) * 2015-10-07 2016-02-17 谭成忠 Piezoelectric type gravity appearance

Also Published As

Publication number Publication date
CN105204082A (en) 2015-12-30

Similar Documents

Publication Publication Date Title
Narasimhan et al. Micromachined high-g accelerometers: a review
Scudero et al. MEMS technology in seismology: A short review
Wung et al. Vertical-plate-type microaccelerometer with high linearity and low cross-axis sensitivity
CN102252746B (en) Big-damping-ratio-based double parameter speed and acceleration output vibration pickup
Wu et al. A nano-g MEMS accelerometer for earthquake monitoring
CN105424978A (en) High-g value acceleration sensor based on flexoelectric effects and measurement method
CN105652334A (en) Displacement difference-based MEMS gravity gradiometer
CN205038361U (en) Piezoelectric type gravity appearance
CN202631100U (en) Ultralow frequency absolute vibrating sensor amplitude-frequency characteristic compensating circuit
CN105204082B (en) A kind of piezoelectric type gravimeter
CN102279414B (en) Machine core of MEMS (Micro Electro Mechanical System) simulation detector
John et al. Instrument for lunar seismic activity studies on Chandrayaan-2 Lander
Rao et al. A High-resolution area-change-based capacitive MEMS accelerometer for tilt sensing
CN104062689A (en) Long cycle perpendicular vibration isolation ocean gravity sensor
Guo A vibration sensor design research
CN103575383B (en) The low frequency multi output passive servo vibrating sensor of acceleration and speed can be measured simultaneously
Xu et al. Using three-axis acceleration sensor to measure the frequency of the precession vortex signal
CN202141809U (en) Core mechanism of MEMS analog detector
CN109239403A (en) A kind of single device virtual accelerometer and its implementation based on time measurement
Xing et al. Design and research on piezoelectric acceleration geophone
CN203012148U (en) Movement of wave detector for seismic exploration
CN202720048U (en) Low frequency multiple output passive servo vibration sensor capable of simultaneously measuring acceleration and velocity
EP4357738B1 (en) Directional sensor for infrasound measurement, and corresponding infrasound emitter
Stringer et al. Experience using MEMS-based accelerometers in dynamic testing
Khodegaonkar et al. Vibration Measurements From Seismometer To Miniature Accelerometer: A Study

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170815

CF01 Termination of patent right due to non-payment of annual fee