CN105016293B - 一种制作球面硅微通道板的装置及其制备方法 - Google Patents
一种制作球面硅微通道板的装置及其制备方法 Download PDFInfo
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CN108281338B (zh) * | 2018-01-26 | 2019-06-18 | 长春理工大学 | 用于硅微通道板基体整体氧化防变形约束装置 |
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JP2001351509A (ja) * | 2000-06-08 | 2001-12-21 | Hamamatsu Photonics Kk | マイクロチャネルプレート |
CN100338722C (zh) * | 2004-12-14 | 2007-09-19 | 中国科学院西安光学精密机械研究所 | 球面微通道板及其制备方法 |
CN101728146B (zh) * | 2009-12-22 | 2011-09-28 | 中国科学院长春光学精密机械与物理研究所 | 一种球面实芯微通道板制备装置 |
CN102956416B (zh) * | 2012-10-19 | 2016-12-21 | 华东师范大学 | 一种硅微通道板的氧化方法 |
CN104326439B (zh) * | 2014-08-22 | 2016-09-21 | 华东师范大学 | 一种改进硅微通道板表面形貌的方法 |
CN204778807U (zh) * | 2015-05-08 | 2015-11-18 | 华东师范大学 | 一种制作球面硅微通道板的装置 |
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Address after: 200062 Putuo District, Zhongshan North Road, No. 3663, Co-patentee after: Shanghai Putai technology venture Limited by Share Ltd Patentee after: East China Normal University Address before: 200062 Putuo District, Zhongshan North Road, No. 3663, Co-patentee before: Shanghai Optech Technology Carve Out Co., Ltd. Patentee before: East China Normal University |
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CP01 | Change in the name or title of a patent holder |
Address after: 200062 Putuo District, Zhongshan North Road, No. 3663, Co-patentee after: Shanghai Putai technology venture Limited by Share Ltd Patentee after: East China Normal University Address before: 200062 Putuo District, Zhongshan North Road, No. 3663, Co-patentee before: Shanghai Optech Technology Carve Out Co., Ltd. Patentee before: East China Normal University |
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