CN104971927B - Laser cleaning equipment based on fiber laser unit - Google Patents

Laser cleaning equipment based on fiber laser unit Download PDF

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Publication number
CN104971927B
CN104971927B CN201510343456.2A CN201510343456A CN104971927B CN 104971927 B CN104971927 B CN 104971927B CN 201510343456 A CN201510343456 A CN 201510343456A CN 104971927 B CN104971927 B CN 104971927B
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CN
China
Prior art keywords
module
laser
optical fiber
polygonal mirror
cleaning equipment
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CN201510343456.2A
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Chinese (zh)
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CN104971927A (en
Inventor
张卓鹏
杨国伟
魏振
魏一振
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湖州志英光电有限公司
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Priority to CN201510343456.2A priority Critical patent/CN104971927B/en
Publication of CN104971927A publication Critical patent/CN104971927A/en
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Publication of CN104971927B publication Critical patent/CN104971927B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning

Abstract

The invention discloses laser cleaning equipment based on a fiber laser unit. The laser cleaning equipment comprises a fiber laser unit module, a polygonal mirror scanning module, a central control module, a refrigeration module and a power supply module, wherein the power supply module is electrically connected to the fiber laser unit module, the polygonal mirror scanning module, the central control module and the refrigeration module; the fiber laser unit module, the polygonal mirror scanning module and the refrigeration module are electrically connected to the central control module; the fiber laser unit module is connected to the polygonal mirror scanning module through an optical fiber, and a laser beam generated by the fiber laser unit module is transmitted to the polygonal mirror scanning module through the optical fiber. The laser cleaning equipment disclosed by the invention is high in cleaning cleanliness and efficiency; a substrate is not damaged; operation and monitoring are convenient; operation and maintenance cost is low; on-line cleaning is easy; and no secondary pollution is caused.

Description

Laser cleaning equipment based on optical fiber laser

Technical field

The present invention relates to a kind of laser cleaning equipment, refers in particular to a kind of laser cleaning equipment based on optical fiber laser.

Background technology

In productive life, various equipment and product all can form or adhere one during production or use on surface A little noxious pollutants, accumulating over a long period can have a strong impact on its surface aesthetic and stable performance.Therefore, it is necessary to using some physics, change The means such as learn removing these pollutant so that article reaches fixed cleanliness factor and other property indices.

At present, the most frequently used cleaning means have manual/mechanical friction, Chemical cleaning, Cleaning by High Pressure Water Jet, shot-peening clear Wash with ultrasound wave cleaning etc..The shortcomings of presence of manual/mechanical friction is wasted time and energy, easily damages substrate, poor working environment;Change Learn ablution relatively cheap, but exist cleaning selectivity strong, the recovery of chemical agent and emission treatment be difficult, secondary pollution it is tight The problems such as weight;Cleaning by High Pressure Water Jet method existence and stability is poor, operation/monitoring is difficult, it is very big etc. to consume great lot of water resources, noise A difficult problem;The abrasive material of shot-peening ablution injection needs to reclaim, and there is relatively costly, high labor intensive, etc. big to operator's harm and lacks Point;The cleaning objects of ultrasonic cleaning process are size-constrained, also there is abluent replacing/process inconvenience, high cost, secondary pollution etc. Problem.

With the extensive application and development of laser technology, novel laser cleaning technique is also developed.It is using high Power density laser beam irradiates the surface of object to be cleaned, cause the dirt on surface, coating or oxide layer occur flash evapn, Rupture is peeled off, and departs from object surface.Laser cleaning technique is considered as a kind of most reliable, maximally effective " green " cleaning Solution.Compared with conventional cleaning process, laser cleaning has cleaning degree and efficiency high(Pulsed laser energy and frequency It is high), do not damage substrate(Without grinding and without heat effect), operation/monitoring it is convenient(Laser direction is good, energy and frequency-adjustable Section), operation/maintenance cost it is low(Stabilization of equipment performance is good and pure power consumption), be easy to on-line cleaning(Contactless and positioning is accurate)、 Non-secondary pollution(Luminous energy will be dissipated with form of thermal energy)The features such as.Additionally, laser cleaning can solve some adopts conventional clean The very scabrous problem of mode, such as, remove submicron particles dirt in semi-conductor industry.For generally, laser cleaning skill Art has overcome every shortcoming of conventional cleaning process substantially.

At present the laser cleaning equipment of exploitation is with solid state laser and vibration mirror scanning head as core.Wherein, high power solid Laser instrument is expensive, causes cleaning equipment on the high side, high cost, and vast middle and low-end market is promoted and is difficult;Laser instrument is sent out Heat is big, needs water-cooling system, causes cleaning equipment size bigger than normal, limited using place;The scanning speed of vibration mirror scanning head is very Hardly possible is improved and size also is difficult to reduce, and leads to not further improve cleaning efficiency and non-easy cleaning small articles inner surface.It can be seen that, Laser cleaning equipment with solid state laser and vibration mirror scanning head as core is subject to many technologies and market application to limit, and hinders The popularization and application of the laser cleaning technique having a high potential.

The content of the invention

In order to solve the problems, such as that existing laser cleaning equipment cost is high and cleaning efficiency is low, the present invention proposes one kind and is based on The laser cleaning equipment of optical fiber laser.

The technical solution adopted in the present invention is:A kind of laser cleaning equipment based on optical fiber laser, including optical fiber swash Light device module, polygonal mirror scan module, central control module, refrigeration module and supply module, described supply module respectively with Optical fiber laser module, polygonal mirror scan module, central control module, refrigeration module electrical connection, the optical fiber laser module, Polygonal mirror scan module, refrigeration module are electrically connected respectively with central control module, optical fiber laser module and multiaspect scarnning mirror mould Connected by optical fiber between block, the laser beam that optical fiber laser module is produced is sent to polygonal mirror scan module by optical fiber.

The present invention proposes the laser cleaning equipment of a superior performance, complete function, application extensively, such as automobile, The paint removal of ship, aircraft, the paint removal rust cleaning of all kinds of iron structures, the removing oxide layer of various metals, mould, precision component, stone material Cleaning etc..Carry out clean dirt using the present invention, cleaning degree and efficiency high, do not damage substrate, operation/monitoring it is convenient, Operation/maintenance cost is low, be easy to on-line cleaning, non-secondary pollution etc..

Preferably, described optical fiber laser module includes seed laser source, the power amplification of multistage master oscillator Device and fiber output head, the input of multistage MOPA is connected with seed laser source, and multistage master control is shaken The input for swinging the power amplifier of device is connected with fiber output head.The present invention adopts first high-power optical fiber laser conduct The LASER Light Source of laser cleaning equipment, can provide the pulse peak power density for meeting various cleaning demands.With conventional solid Laser instrument is compared, and this optical fiber laser module has lower price, higher photoelectric transformation efficiency, lower caloric value, higher Pulse recurrence frequency and less size etc. so that cost is lower, more energy-conservation, cleaning efficiency is more high.Size is less Laser instrument causes laser cleaning compact equipment, it is easy to make portable or Backpack type, will be unrestricted using place.

Preferably, the multistage MOPA is single by several power amplification being sequentially connected Unit is constituted, and described power amplification subelement includes several semiconductor pumping sources, fiber coupler and double- cladding doped fiber, One end of the fiber coupler is connected with several semiconductor pumping sources, and one end and the double clad of the fiber coupler are adulterated Optical fiber connects.

Preferably, the polygonal mirror scan module includes beam shaping system, reflecting mirror, polygonal mirror, motor and strip Cylindrical mirror, described polygonal mirror and motor connection, beam shaping system, reflecting mirror, polygonal mirror and strip cylindrical mirror Set gradually the light path to form laser beam.The laser beam of optical fiber laser module output incides beam shaping system, laser beam It is collimated, expands and assembles, then strip cylindrical mirror is incident to Jing after the reflection of polygonal mirror reflecting surface;Laser beam Jing strips again Cleaning object surface is incident to after cylindrical mirror reflection;Polygonal mirror is driven by the motor of high speed and carries out high speed rotation, is come with this Realize the quick scanning of the laser facula on cleaning object surface.Using the polygonal mirror scan module of high speed, shake with tradition scanning Mirror is compared, the scanning speed more increased, higher stability and the lower price having so that cleaning efficiency it is higher, safeguard Cycle is longer and cost is lower.

Preferably, the central control module includes controller, touch-display unit, temperature monitoring and reflected light prison Device is surveyed, described touch-display unit, temperature monitoring and reflected light monitor are electrically connected with the controller respectively.Central authorities' control mould Block directly selects the parameter setting of store washing routine dirt for operator;In order to clean other dirts, there is provided laser arteries and veins Rush the regulation of energy and width;Central control module has been also connected with temperature monitoring to regulate and control refrigeration module, it is ensured that equipment is normal Stable operation;Connect reflected light monitor to determine whether to automatic locked laser, in case stop loss hindering substrate and accidental injury phase Pass personnel.

The reflected light monitor monitoring enters the reflected light of scanning mouth, and numerical value is sent to into the data processing list Unit.Data processing unit carries out locking control according to reflection light characteristic to the high-capacity optical fiber laser module, in case stopping loss Hinder substrate and accidentally injure related personnel.

Preferably, the refrigeration module is air cooling system.Controller is switched according to temperature data to air cooling system Control and wind speed are adjusted.The less air cooling system of size causes laser cleaning compact equipment, it is easy to make portable or shoulder Back of the body formula, will be unrestricted using place.

The invention has the beneficial effects as follows:Cleaning degree and efficiency high, do not damage substrate, and operation and monitoring are convenient, operation And maintenance cost is low, it is easy to on-line cleaning, non-secondary pollution.

Description of the drawings

Fig. 1 is a kind of structural representation of the present invention;

Fig. 2 is the structural representation of optical fiber laser module;

Fig. 3 is the structural representation of polygonal mirror scan module;

Fig. 4 is the structural representation of central control module.

In figure, optical fiber laser module 1, polygonal mirror scan module 2, central control module 3, refrigeration module 4, laser beam 5, Cleaning object 6, seed laser source 11, multistage MOPA 12, fiber output head 13, semiconductor pumping sources 121st, fiber coupler 122, double- cladding doped fiber 123, beam shaping system 21, polygonal mirror 22, motor 23, strip cylinder are anti- Penetrate mirror 24, reflecting mirror 25, touch-display unit 31, data processing unit 32, temperature monitoring 33 and reflected light monitor 34.

Specific embodiment

With reference to the accompanying drawings and examples the present invention is described in further detail.

As shown in figure 1, a kind of laser cleaning equipment based on optical fiber laser, is swept by optical fiber laser module 1, polygonal mirror Retouch module 2, central control module 3, refrigeration module 4 and supply module composition, wherein, supply module respectively with optical fiber laser mould Block, polygonal mirror scan module, central control module, refrigeration module electrical connection, optical fiber laser module, polygonal mirror scan module, Refrigeration module is electrically connected respectively with central control module, is connected by optical fiber between optical fiber laser module and polygonal mirror scan module Connect.

As shown in Fig. 2 optical fiber laser module includes seed laser source 11, multistage MOPA 12 And fiber output head 13, the input of multistage MOPA is connected with seed laser source, and multistage master control is shaken The input for swinging the power amplifier of device is connected with fiber output head.Seed laser source provides the nanosecond pulse of lower-wattage and swashs Light, after multistage MOPA, pulse peak power will be by for the lower powered nanosecond pulse laser The threshold value being amplified to needed for cleaning, forms high-power laser beam, then through fiber exit to multiaspect scarnning mirror module.

Wherein, multistage MOPA abbreviation MOPA, it is single by multiple power amplifications being sequentially connected Unit is constituted, and power amplification subelement includes multiple semiconductor pumping sources 121, fiber coupler 122 and double- cladding doped fiber 123, one end of fiber coupler is connected with each semiconductor pumping sources, and one end and the double- cladding doped fiber of fiber coupler connect Connect.The pump light of semiconductor pumping sources is entered in double- cladding doped fiber by fiber coupler, and seed pulse laser is limited Make and transmitted in the fibre core of double- cladding doped fiber, and pump light is then limited in transmission in inner cladding.Being transmitted across at both Cheng Zhong, the power of seed pulse laser is progressively amplified.

As shown in figure 3, polygonal mirror scan module 2 includes beam shaping system 21, polygonal mirror 22, reflecting mirror 25, motor 23 With strip cylindrical mirror 24.The minute surface of reflecting mirror is pressed from both sides with the shoot laser beam place direction of beam shaping system into an acute angle Angle, preferably 45 degree angles;Polygonal mirror and motor connection, carry out high speed rotation under the driving of motor;Polygonal mirror periphery it is multiple Side is reflecting surface, and the laser beam that reflecting mirror is reflected incides one of side of polygonal mirror;From polygonal mirror outgoing Laser beam incides strip cylindrical mirror;Thus, beam shaping system, reflecting mirror, polygonal mirror and strip cylindrical mirror according to It is secondary that the whole light path for forming laser beam is set.

The laser beam of the output of optical fiber laser module 1 incides beam shaping system, and laser beam will be collimated, expand goodbye Poly-, focusing distance is adjustable, so as to the operating distance for realizing cleaning equipment it is adjustable;From the convergent beam Jing of beam shaping system exit The reflecting surface that the polygonal mirror of rotation at a high speed is driven by motor is incided after reflecting mirror reflection.In rotary course, converging light Beam to the angle of incidence of a reflecting surface of polygonal mirror is continually changing so that its reflected beams to incide strip cylinder anti- The position for penetrating the curved reflecting surface of mirror is also to be continually changing so that laser beam 5 goes out straight line in the surface scan of cleaning object 6. When rotating at a high speed, each reflecting surface of polygonal mirror can scan straight line, therefore can further improve scanning speed.

As shown in figure 4, central control module 3 includes touch-display unit 31, controller 32, temperature monitoring 33 and reflection Light detection device 34.Touch-display unit selects the parameter setting of the conventional dirt of cleaning for operator, also can directly adjust laser Pulse energy, pulse width and pulse recurrence frequency, the setting and regulation of these parameters all will be made accordingly by controller 32 Control and operation.Controller regulates and controls refrigeration module by temperature monitoring, it is ensured that equipment is steady within the scope of suitable temperature Fixed operation;Connection is arranged on the reflected light monitor of scanning mouth and determines whether to automatic locked laser, in case stop loss hindering substrate With accidental injury related personnel.Additionally, the key parameter of some laser cleaning equipment can also be included showing in touch-control by touch-display unit Show on the display screen of unit, for operator's observation.

Refrigeration module is made up of air cooling system.Central control module measures temperature value according to the temperature monitoring for being connected, To control whether air cooling system is opened and wind speed size, to ensure that laser cleaning equipment is operated within the temperature range of permission.

Supply module is made up of power adaption system, and to each energy-consuming parts corresponding electric energy is provided.

Present invention could apply to multiple fields, such as automobile, ship, the paint removal of aircraft, the paint removal of all kinds of iron structures is removed Rust, the removing oxide layer of various metals, mould, precision component, the cleaning of stone material, etc..Clean dirt is carried out using the present invention, is cleaned Cleanliness factor and efficiency high, do not damage substrate, operation/monitoring is convenient, operation/maintenance cost is low, be easy to on-line cleaning, without secondary dirt Dye etc..

Above example technological thought only to illustrate the invention, it is impossible to which protection scope of the present invention is limited with this, it is every According to technological thought proposed by the present invention, any change done on the basis of technical scheme, the protection model of the present invention is each fallen within Within enclosing.

Claims (5)

1. a kind of laser cleaning equipment based on optical fiber laser, it is characterised in that:Sweep including optical fiber laser module, polygonal mirror Retouch module, central control module, refrigeration module and supply module, described supply module respectively with optical fiber laser module, many Face scarnning mirror module, central control module, refrigeration module electrical connection, the optical fiber laser module, polygonal mirror scan module, system Chill block is electrically connected respectively with central control module, is connected by optical fiber between optical fiber laser module and polygonal mirror scan module Connect, the laser beam that optical fiber laser module is produced is sent to polygonal mirror scan module, the polygonal mirror scan module by optical fiber Including beam shaping system, reflecting mirror, polygonal mirror, motor and strip cylindrical mirror, described polygonal mirror and motor connection, light Beam orthopedic systems, reflecting mirror, polygonal mirror and strip cylindrical mirror set gradually the light path to form laser beam.
2. the laser cleaning equipment based on optical fiber laser according to claim 1, it is characterised in that:Described optical fiber swashs Light device module includes seed laser source, multistage MOPA and fiber output head, multistage master oscillator The input of power amplifier be connected with seed laser source, the input and optical fiber of multistage MOPA Delivery connects.
3. the laser cleaning equipment based on optical fiber laser according to claim 2, it is characterised in that:The multistage master control The power amplifier of agitator is made up of several power amplification subelements being sequentially connected, described power amplification subelement bag Include several semiconductor pumping sources, fiber coupler and double- cladding doped fiber, one end of the fiber coupler and several Semiconductor pumping sources connect, and one end of the fiber coupler is connected with double- cladding doped fiber.
4. the laser cleaning equipment based on optical fiber laser according to claim 1 or 2 or 3, it is characterised in that:In described Centre control module includes controller, touch-display unit, temperature monitoring and reflected light monitor, and described touch-control shows single Unit, temperature monitoring and reflected light monitor are electrically connected with the controller respectively.
5. the laser cleaning equipment based on optical fiber laser according to claim 1, it is characterised in that:The refrigeration module For air cooling system.
CN201510343456.2A 2015-06-19 2015-06-19 Laser cleaning equipment based on fiber laser unit CN104971927B (en)

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Publication number Priority date Publication date Assignee Title
CN105750743A (en) * 2016-05-20 2016-07-13 上海市激光技术研究所 Laser welding device and method based on laser cleaning pretreatment
CN106199951B (en) * 2016-08-12 2019-05-24 武汉光谷航天三江激光产业技术研究院有限公司 A kind of compact single shaft scanning means of laser cleaning machine
CN107185916B (en) * 2017-05-09 2019-12-03 中国科学院半导体研究所 Laser cleaning system for inner wall of the pipe cleaning
CN108216411B (en) * 2017-12-27 2020-01-17 武汉金顿激光科技有限公司 Crawling robot and ship steel surface pretreatment process
CN109226096A (en) * 2018-08-15 2019-01-18 中车青岛四方机车车辆股份有限公司 A kind of Al-Mg-Zn alloy workpiece surface laser cleaning process
CN109590288A (en) * 2018-11-28 2019-04-09 四川大学 The method of laser cleaning light transmission medium transmission plane impurity

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US5954974A (en) * 1997-09-25 1999-09-21 Lucent Technologies Inc. Laser-assisted coating removal from optical fibers
JP3566580B2 (en) * 1999-05-26 2004-09-15 Necセミコンダクターズ九州株式会社 Resin-sealed mold cleaning apparatus, resin-sealed mold cleaning method, and cleaning system
CN101214488A (en) * 2007-12-26 2008-07-09 长春德信光电技术有限公司 Semiconductor laser cleaning machine
CN203526145U (en) * 2013-09-16 2014-04-09 上海海固电器设备有限公司 Laser washing device
CN103817113B (en) * 2014-03-14 2016-07-06 华中科技大学 A kind of metal surface dirt laser cleaning system and method
CN204685586U (en) * 2015-06-19 2015-10-07 湖州志英光电有限公司 Based on the laser cleaning equipment of optical fiber laser

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