CN104950598A - Up-and-down distributed double-workpiece-stage device - Google Patents
Up-and-down distributed double-workpiece-stage device Download PDFInfo
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- CN104950598A CN104950598A CN201510398828.1A CN201510398828A CN104950598A CN 104950598 A CN104950598 A CN 104950598A CN 201510398828 A CN201510398828 A CN 201510398828A CN 104950598 A CN104950598 A CN 104950598A
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- worktable
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- guide rail
- horizontal slide
- end points
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Abstract
An up-and-down distributed double-workpiece-stage device comprises a base provided with a boss, the boss is provided with a first horizontal guide rail and a support frame which is provided with a second horizontal guide rail, and the second horizontal guide rail is parallel to and located at the upper end of the first horizontal guide rail; the two horizontal guide rails are connected with a first horizontal sliding seat and a second horizontal sliding seat respectively, and the first horizontal sliding seat and the second horizontal sliding seat have the same horizontal sliding stroke along the two horizontal guide rails respectively; the first horizontal sliding seat and the second horizontal sliding seat are fixedly connected with a first L-shaped support and a second L-shaped support respectively, the two L-shaped supports are each provided with a vertical sliding seat, and the vertical sliding seats are each provided with a workbench through support tables. According to the up-and-down distributed double-workpiece-stage device, the two workbenches switch the positions with each other through the horizontal guide rails and vertical guide rails, different processes are completed at different positions, switching of the processes is completed by switching the positions, exposure and assembly and disassembly of a PCB can be conducted simultaneously, and the exposure efficiency is increased.
Description
Technical field
The present invention relates to a kind of workpiece table device, particularly a kind of device with the work stage that two work alone mutually.
Background technology
Locating platform is the parts that PCB direct imaging equipment must configure, and for adsorbing fixing pcb board, the position of Primary Location pcb board, ensures that PCB can moving to reach correct position and moving with correct route and speed with work stage in LDI photoetching process.Surface due to pcb board needs to apply light-sensitive surface, so the multiplex absorption type of location fixed form of pcb board.In modern industry is produced, be endless to the pursuit of efficiency.Double workpiece platform device effectively can promote the efficiency of LDI exposure machine, completes receive plate and put plate at upper table, and the work of aiming at, and completes the work of exposure at lower table.Be equivalent to the workload that an equipment completes two equipment.Because upper and lower two worktable are non-interference, carry out so work can walk abreast.In addition on the exposure sources of pcb board, the quality influence of YAW value to exposure of scan axis platform is large especially.Center and the exposure station of scan axis are more close, and the impact of the yaw value of scan axis platform can drop to minimum.The dual-workpiece of up-down structure arrangement, affects and optimizing structure of carrying out to drop to out-of-alignment YAW value just.The work stage of current PCB direct imaging equipment use, substantially based on single work stage, also has double-workpiece-table.But current double-workpiece-table is exactly the superposition of two work stage, two parallel placements of work stage.Man-machine interaction is exactly two stations, does not have upper and lower exchange.Although also have a certain upgrade to efficiency, double-workpiece-table that can not be real at last.
Summary of the invention
For solving the problems of the technologies described above, the invention provides a kind of upper and lower distributed double workpiece platform device, it comprises pedestal, described pedestal is provided with a boss, described boss is provided with one first horizontal guide rail and a bracing frame, support frame as described above is provided with the second horizontal guide rail, and described second horizontal guide rail is parallel and be positioned at described first horizontal guide rail upper end;
Described first horizontal guide rail, the second horizontal guide rail are connected to the first horizontal slide, the second horizontal slide, and described first horizontal slide, the second horizontal slide have an identical horizontal slip stroke respectively along described two horizontal guide rails respectively;
Described first horizontal slide, the second horizontal slide are fixedly connected with one first L bracket, the second L bracket respectively, described two L brackets have a horizon bar and vertical bar respectively, described two horizon bars and base parallel are also connected on two horizontal slides, and described two vertical bars are positioned at both sides and upwards arrange; The vertical bar of described first L bracket, the second L bracket is connected to vertical guide, and described two vertical guide are respectively equipped with vertical slide, and described two vertical slides are connected to brace table, and described two brace tables are respectively equipped with worktable;
What be connected with the first horizontal slide is the first worktable, what be connected with the second horizontal slide is the second worktable, described two worktable are parallel with described base respectively, have a parallel distance between described two worktable, and described two worktable can move in parallel the plane to the other side place respectively.
Preferably, described two worktable are respectively equipped with work sucker.
Preferably, described second horizontal guide rail is positioned at directly over described first horizontal guide rail.
Preferably, the first horizontal slide, the second horizontal slide lay respectively at the first end points/the second end points, second end points/the first end points of horizontal slip stroke; When described first horizontal slide is positioned at the first end points, described second horizontal slide is positioned at the second end points, described first worktable is positioned at described second worktable upper end, and described first worktable region is PCB loading and unloading area, and described second worktable region is PCB exposure area; Described first worktable and the second worktable complete location swap by horizontal shift and vertical displacement.
Preferably, described two horizontal slides are respectively equipped with horizontal drive apparatus, described horizontal drive apparatus moves on horizontal guide rail for driving horizontal slide, and described two vertical slides are respectively equipped with vertical drive, and described vertical drive is for driving the displacement of vertical slide in the vertical direction.
Present invention also offers a kind of method of work of upper and lower distributed double workpiece platform device, comprise the following steps:
S1: respectively the first horizontal slide, the second horizontal slide are moved to the first end points and the second end points on respective horizontal guide rail; By described first movable workbench to upper surface, by the second movable workbench to lower surface;
S2 a: pcb board to be exposed is placed on described first worktable, described first worktable and the second planimetric position, worktable place are exchanged, and described first horizontal slide is slid into described second end points, described second horizontal slide is slid into described first end points;
S3: open exposure device and the pcb board on described first worktable is exposed, place pcb board simultaneously on described second worktable;
S4: after end exposure, exchanges described first worktable and the second worktable place plane, respectively the first horizontal slide, the second horizontal slide is moved to the first end points, the second end points on respective horizontal guide rail simultaneously;
S5: taken off by the pcb board on described first worktable and place another unexposed pcb board, opens exposure device to the pcb board exposure on the second worktable simultaneously;
S6: after end exposure, exchanges described first worktable and the second worktable place plane, respectively the first horizontal slide, the second horizontal slide is moved to the second end points, the first end points on respective horizontal guide rail simultaneously;
S7: taken off by the pcb board on described second worktable and place another unexposed pcb board, opens exposure device to the pcb board exposure on the first worktable simultaneously;
S8: continue to perform step S4 to S7 until complete the exposure-processed of all pcb boards.
The present invention has following beneficial effect:
Two worktable of the present invention exchange respective position by horizontal guide rail, upright guide rail, different operations is completed at diverse location, and the exchange of operation is completed by switch, and do not affect mutually between the operation of two worktable, carry out while achieving pcb board exposure and loading and unloading, add exposure efficiency.
Certainly, implement arbitrary product of the present invention might not need to reach above-described all advantages simultaneously.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme of the embodiment of the present invention, be briefly described describing the required accompanying drawing used to embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The upper and lower distributed double workpiece platform device front view that Fig. 1 provides for the embodiment of the present invention;
The upper and lower distributed double workpiece platform device stereographic map that Fig. 2 provides for the embodiment of the present invention;
The upper and lower distributed double workpiece platform device side sectional view that Fig. 3 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making other embodiments all obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiments provide a kind of upper and lower distributed double workpiece platform device, as shown in Figure 1 and Figure 2, it comprises pedestal 1, pedestal is provided with boss 2, boss 2 is provided with the first horizontal guide rail 3 and bracing frame 4, it is parallel and be positioned at the first horizontal guide rail 3 upper end that bracing frame 4 is provided with the second horizontal guide rail 5, second horizontal guide rail 5;
First horizontal guide rail 3, second horizontal guide rail 5 is connected to the horizontal slide 7 of first horizontal slide the 6, second horizontal slide 7, first horizontal slide 6, second and has an identical horizontal slip stroke along the horizontal rail 5 of the first horizontal guide rail 3, second respectively;
The horizontal slide 7 of first horizontal slide 6, second is fixedly connected with the first L bracket 81, second L bracket 82 respectively;
Described two worktable are parallel with described base respectively, have a parallel distance between described two worktable, and described two worktable can move in parallel the plane to the other side place respectively.As shown in Figure 3, in the present embodiment, two worktable lay respectively at work top A and work top B.
In the present embodiment, described two worktable are respectively equipped with work sucker.Work sucker, for adsorbing workpiece, makes workpiece fixing on the table.
The present embodiment is pcb board for the workpiece processed, and mainly carries out exposure-processed to pcb board.
In the present embodiment, the second horizontal guide rail 5 is positioned at directly over the first horizontal guide rail 3.
Wherein the horizontal slide 7 of the first horizontal slide 6, second lays respectively at the first end points/the second end points, second end points/the first end points of horizontal slip stroke; When first horizontal slide 6 is positioned at the first end points, second horizontal slide 7 is positioned at the second end points, first worktable 121 is positioned at the second worktable 122 upper end, and the first worktable 121 region is PCB loading and unloading area, and the second worktable 122 region is PCB exposure area; First worktable 121 and the second worktable 122 complete location swap by horizontal shift and vertical displacement.PCB loading and unloading area is used for laying pcb board to be exposed on the table, and unload the pcb board completing exposure, loading and unloading can have mechanical arm to complete, also can by manually completing, certain space is needed, so PCB loading and unloading area is positioned at upper surface owing to performing charge and discharge operations; PCB exposure area is under the exposure environment of exposure device, and the pcb board in this region completes exposure process.
The described two horizontal slides that the present embodiment provides are respectively equipped with horizontal drive apparatus, described horizontal drive apparatus moves on horizontal guide rail for driving horizontal slide, described two vertical slides are respectively equipped with vertical drive, and described vertical drive is for driving the displacement of vertical slide in the vertical direction.
The embodiment of the present invention additionally provides a kind of method of work of upper and lower distributed double workpiece platform device, and it comprises the following steps:
S1: respectively the horizontal slide 7 of the first horizontal slide 6, second is moved to the first end points and the second end points on respective horizontal guide rail; First worktable 121 is moved to upper surface, the second worktable 122 is moved to lower surface;
S2: be placed on by a pcb board to be exposed on first worktable 121, exchanges the first worktable 121 and the second planimetric position, worktable 122 place, and the first horizontal slide 6 is slid into described second end points, the second horizontal slide 7 is slid into described first end points;
S3: open exposure device and the pcb board on the first worktable 121 is exposed, place pcb board simultaneously on the second worktable 122;
S4: after end exposure, exchanges the first worktable 121 and the second worktable 122 place plane, respectively the horizontal slide 7 of the first horizontal slide 6, second is moved to the first end points, the second end points on respective horizontal guide rail simultaneously;
S5: taken off by the pcb board on the first worktable 121 and place another unexposed pcb board, opens exposure device to the pcb board exposure on the second worktable 122 simultaneously;
S6: after end exposure, exchanges the first worktable 121 and the second worktable 122 place plane, respectively the horizontal slide 7 of the first horizontal slide 6, second is moved to the second end points, the first end points on respective horizontal guide rail simultaneously;
S7: taken off by the pcb board on the second worktable 122 and place another unexposed pcb board, opens exposure device to the pcb board exposure on the first worktable 121 simultaneously;
S8: continue to perform step S4 to S7 until complete the exposure-processed of all pcb boards.
Two worktable of the present invention exchange respective position by horizontal guide rail, upright guide rail, different operations is completed at diverse location, and the exchange of operation is completed by switch, and do not affect mutually between the operation of two worktable, carry out while achieving pcb board exposure and loading and unloading, add exposure efficiency.
The disclosed preferred embodiment of the present invention just sets forth the present invention for helping above.Preferred embodiment does not have all details of detailed descriptionthe, does not limit the embodiment that this invention is only described yet.Obviously, according to the content of this instructions, can make many modifications and variations.This instructions is chosen and is specifically described these embodiments, is to explain principle of the present invention and practical application better, thus makes art technician understand well and to utilize the present invention.The present invention is only subject to the restriction of claims and four corner and equivalent.
Claims (6)
1. about one kind distributed double workpiece platform device, it is characterized in that, comprise pedestal, described pedestal is provided with a boss, described boss is provided with one first horizontal guide rail and a bracing frame, support frame as described above is provided with the second horizontal guide rail, and described second horizontal guide rail is parallel and be positioned at described first horizontal guide rail upper end;
Described first horizontal guide rail, the second horizontal guide rail are connected to the first horizontal slide, the second horizontal slide, and described first horizontal slide, the second horizontal slide have an identical horizontal slip stroke respectively along described two horizontal guide rails respectively;
Described first horizontal slide, the second horizontal slide are fixedly connected with one first L bracket, the second L bracket respectively, described two L brackets have a horizon bar and vertical bar respectively, described two horizon bars and base parallel are also connected on two horizontal slides, and described two vertical bars are positioned at both sides and upwards arrange; The vertical bar of described first L bracket, the second L bracket is connected to vertical guide, and described two vertical guide are respectively equipped with vertical slide, and described two vertical slides are connected to brace table, and described two brace tables are respectively equipped with worktable;
What be connected with the first horizontal slide is the first worktable, what be connected with the second horizontal slide is the second worktable, described two worktable are parallel with described base respectively, have a parallel distance between described two worktable, and described two worktable can move in parallel the plane to the other side place respectively.
2. upper and lower distributed double workpiece platform device as claimed in claim 1, is characterized in that, described two worktable are respectively equipped with work sucker.
3. upper and lower distributed double workpiece platform device as claimed in claim 2, is characterized in that, described second horizontal guide rail is positioned at directly over described first horizontal guide rail.
4. upper and lower distributed double workpiece platform device as claimed in claim 3, is characterized in that, the first horizontal slide, the second horizontal slide lay respectively at the first end points/the second end points, second end points/the first end points of horizontal slip stroke; When described first horizontal slide is positioned at the first end points, described second horizontal slide is positioned at the second end points, described first worktable is positioned at described second worktable upper end, and described first worktable region is PCB loading and unloading area, and described second worktable region is PCB exposure area; Described first worktable and the second worktable complete location swap by horizontal shift and vertical displacement.
5. upper and lower distributed double workpiece platform device as claimed in claim 4, it is characterized in that, described two horizontal slides are respectively equipped with horizontal drive apparatus, described horizontal drive apparatus moves on horizontal guide rail for driving horizontal slide, described two vertical slides are respectively equipped with vertical drive, and described vertical drive is for driving the displacement of vertical slide in the vertical direction.
6. the method for work of upper and lower distributed double workpiece platform device as claimed in claim 4, is characterized in that, comprise the following steps:
S1: respectively the first horizontal slide, the second horizontal slide are moved to the first end points and the second end points on respective horizontal guide rail; By described first movable workbench to upper surface, by the second movable workbench to lower surface;
S2 a: pcb board to be exposed is placed on described first worktable, described first worktable and the second planimetric position, worktable place are exchanged, and described first horizontal slide is slid into described second end points, described second horizontal slide is slid into described first end points;
S3: open exposure device and the pcb board on described first worktable is exposed, place pcb board simultaneously on described second worktable;
S4: after end exposure, exchanges described first worktable and the second worktable place plane, respectively the first horizontal slide, the second horizontal slide is moved to the first end points, the second end points on respective horizontal guide rail simultaneously;
S5: taken off by the pcb board on described first worktable and place another unexposed pcb board, opens exposure device to the pcb board exposure on the second worktable simultaneously;
S6: after end exposure, exchanges described first worktable and the second worktable place plane, respectively the first horizontal slide, the second horizontal slide is moved to the second end points, the first end points on respective horizontal guide rail simultaneously;
S7: taken off by the pcb board on described second worktable and place another unexposed pcb board, opens exposure device to the pcb board exposure on the first worktable simultaneously;
S8: continue to perform step S4 to S7 until complete the exposure-processed of all pcb boards.
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CN201510398828.1A CN104950598B (en) | 2015-07-07 | 2015-07-07 | Up-and-down distributed double-workpiece-stage device |
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CN201510398828.1A CN104950598B (en) | 2015-07-07 | 2015-07-07 | Up-and-down distributed double-workpiece-stage device |
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CN104950598B CN104950598B (en) | 2017-05-24 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109856862A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备(集团)股份有限公司 | Dual stage light alignment apparatus and alignment method |
WO2020019653A1 (en) * | 2018-07-26 | 2020-01-30 | 中山新诺科技股份有限公司 | Cantilevered double-table double-sided digital exposure system and exposure method |
CN111347159A (en) * | 2020-04-07 | 2020-06-30 | 湖南汽车工程职业学院 | Multifunctional laser welding machine |
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US6417914B1 (en) * | 1999-10-18 | 2002-07-09 | Nikon Corporation | Stage device and exposure apparatus |
CN1485694A (en) * | 2003-08-29 | 2004-03-31 | 清华大学 | Step-by-step projection photo-etching machine double set shifting exposure ultra-sophisticated positioning silicon chip bench system |
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US6128069A (en) * | 1997-03-13 | 2000-10-03 | Canon Kabushiki Kaisha | Stage mechanism for exposure apparatus |
JP2000216082A (en) * | 1999-01-27 | 2000-08-04 | Nikon Corp | Stage device and aligner |
US6417914B1 (en) * | 1999-10-18 | 2002-07-09 | Nikon Corporation | Stage device and exposure apparatus |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109856862A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备(集团)股份有限公司 | Dual stage light alignment apparatus and alignment method |
WO2020019653A1 (en) * | 2018-07-26 | 2020-01-30 | 中山新诺科技股份有限公司 | Cantilevered double-table double-sided digital exposure system and exposure method |
CN111347159A (en) * | 2020-04-07 | 2020-06-30 | 湖南汽车工程职业学院 | Multifunctional laser welding machine |
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Effective date of registration: 20190916 Address after: Room B30, 3rd floor, 151 Keyuan Road, China (Shanghai) Free Trade Pilot Area, Pudong New Area, Shanghai Patentee after: Zhongxia Xinji (Shanghai) Technology Co., Ltd. Address before: 230000 Anhui city of Hefei Province Economic and Technological Development Zone North Fairview Avenue, Xiyou Road East Patentee before: Hefei AdvanTools Semiconductor Co., Ltd. |
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