CN104932752B - A kind of touch screen base plate and preparation method thereof, touch panel and display device - Google Patents
A kind of touch screen base plate and preparation method thereof, touch panel and display device Download PDFInfo
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- CN104932752B CN104932752B CN201510395802.1A CN201510395802A CN104932752B CN 104932752 B CN104932752 B CN 104932752B CN 201510395802 A CN201510395802 A CN 201510395802A CN 104932752 B CN104932752 B CN 104932752B
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Abstract
This application discloses a kind of touch screen base plate and preparation method thereof, touch panel and display device, including underlay substrate and the first touch control electrode and second touch control electrode that are arranged on the underlay substrate, the orthographic projection of first touch control electrode and the second touch control electrode on the underlay substrate has overlapping, the overlapping region of the orthographic projection of first touch control electrode and the second touch control electrode on the underlay substrate is provided with insulating barrier and contacted with obstructing first touch control electrode and the second touch control electrode, so as to metal tip occur when avoiding metal etch touch control electrode, and when metal is built bridge, easily there is the problem of impedance is bigger than normal with meticulous at metallic bone in ITO, realize that technique is simple, the excellent effect of touch-control.
Description
Technical field
The application is related to display technology field, more particularly to a kind of touch screen base plate and preparation method thereof, touch panel
And display device.
Background technology
Touch-screen has lively intuitively operate interface and meets making for human body as a kind of brand-new human-computer interaction device
With custom, amusement office can be allowed to become more lively and loosen, the high grade of transparency, durability based on capacitance touch screen, multiple spot touch
The advantage such as touch, be widely used in consumer electronics field.For touch screen base plate because manufacturing process is simple, touch-control performance is good, and one
Directly favored by manufacturer, be especially widely used on the mobile phone screen of small size.The touch-screen made currently with patterning processes
Some defects be present in substrate：Usually there is metal tip (Metal Tip) when forming touch control electrode and reduces touch-control electricity in metal etch
The antistatic effect of pole；When metal is built bridge, such as metal electrode and transparency electrode such as tin indium oxide (Indium Tin
Oxide, ITO) overlap joint when, lap-joint is meticulous easily to cause impedance bigger than normal, so as to influence the sensitivity of touch-control and the linearity.
The content of the invention
In view of this, the embodiments of the invention provide a kind of touch screen base plate and preparation method thereof, touch panel and aobvious
Showing device.
The embodiments of the invention provide a kind of touch screen base plate, including underlay substrate and it is arranged on the underlay substrate
The first touch control electrode and second touch control electrode, first touch control electrode and the second touch control electrode are in the underlay substrate
On orthographic projection have overlapping, the orthographic projection on the underlay substrate of first touch control electrode and the second touch control electrode is handed over
Folded region is provided with insulating barrier and contacted with obstructing first touch control electrode and the second touch control electrode.
Alternatively, first touch control electrode includes the rectangle net grating texture that the first electrode line that transverse and longitudinal is intersected is formed,
The first electrode line surrounds multiple void regions.
Alternatively, first touch control electrode is additionally included in the second electrode line of second direction extension, multiple rectangles
Fenestral fabric extends and is arranged at intervals in a first direction with multiple second touch control electrodes, multiple rectangle net trellis
The second electrode line that structure is extended by second direction connects, and the second electrode line is with the second touch control electrode in the substrate
Orthographic projection on substrate, which has to overlap, forms the overlapping region, wherein the first direction and the second direction are vertical.
Alternatively, the first electrode line and the second electrode line are integrally formed, the first electrode line and described
Two electrode wires include metal material, and the metal material includes any one of molybdenum, silver, titanium, copper, aluminium.
Alternatively, the second touch control electrode includes transparent conductive material, and the second touch control electrode includes electrically conducting transparent
Material, the transparent conductive material include any one of tin indium oxide, indium zinc oxide, graphene.
Alternatively, the void region is filled with and the second touch control electrode identical material.
Alternatively, the friendship of the orthographic projection of first touch control electrode and the second touch control electrode on the underlay substrate
Folded region falls completely within the insulating barrier in the orthographic projection on the underlay substrate, and the area of the insulating barrier is more than or waited
In the region area that the orthographic projection of first touch control electrode and the second touch control electrode on the underlay substrate overlaps.
Alternatively, first electrode line and/or second electrode the line width scope is 4um~6um.
Alternatively, first touch control electrode is arranged to emitter stage, and first touch control electrode is arranged to emitter stage, described
Second touch control electrode is arranged to receiving pole；Or first touch control electrode is arranged to receiving pole, the second touch control electrode is set
It is set to emitter stage.
Correspondingly, the embodiment of the present invention additionally provides a kind of touch panel, including provided in an embodiment of the present invention above-mentioned
Touch screen base plate.
Correspondingly, the embodiment of the present invention additionally provides a kind of display device, including provided in an embodiment of the present invention above-mentioned tactile
Touch panel substrate.
Correspondingly, the embodiment of the present invention additionally provides a kind of preparation method of above-mentioned touch screen base plate, including：
The first touch control electrode is formed on underlay substrate；
Insulating barrier is formed above first touch control electrode；
Second touch control electrode is formed above the insulating barrier；Or
Second touch control electrode is formed on underlay substrate；
Insulating barrier is formed above the second touch control electrode；
The first touch control electrode is formed above the insulating barrier；
Wherein, first touch control electrode has friendship with orthographic projection of the second touch control electrode on the underlay substrate
Folded, the insulating barrier is formed in first touch control electrode and orthographic projection of the second touch control electrode on the underlay substrate
Overlapping region is contacted with obstructing first touch control electrode and the second touch control electrode.
Alternatively, methods described specifically includes：
The first touch control electrode is formed by first time patterning processes, first touch control electrode includes first that transverse and longitudinal is intersected
The rectangle net grating texture and the second electrode line of the multiple rectangle net grating textures of connection that electrode wires are formed, the rectangle
Fenestral fabric extends in a first direction, and the second electrode line extends in a second direction, and the first electrode line surrounds
Multiple void regions；
Insulating barrier is formed by second of patterning processes；
By third time patterning processes formed second touch control electrode, the second touch control electrode extend in a first direction and
Set with the rectangle net trellis spacing structure, the second electrode line is with the second touch control electrode on the underlay substrate
The overlapping place of orthographic projection form the overlapping region；
Wherein, the first direction and the second direction are vertical.
Alternatively, methods described also includes, and conduction material is filled in multiple void regions that the first electrode line surrounds
Material.
Alternatively, by forming the second touch control electrode with a patterning processes and being filled in the void region
Conductive material.
Above-mentioned touch screen base plate provided in an embodiment of the present invention and preparation method thereof, touch panel and display device, can
To there is metal tip when avoiding and etching metal touch control electrode, and when metal is built bridge, ITO and meticulous appearance at metallic bone
The problem of impedance is bigger than normal, realize that technique is simple, the excellent effect of touch-control.
Brief description of the drawings
Fig. 1 is the overlooking the structure diagram of touch screen base plate provided in an embodiment of the present invention；
Fig. 2 is the overlooking the structure diagram of the overlapping region of touch screen base plate provided in an embodiment of the present invention；
Fig. 3 is the cross-sectional view of the overlapping region of touch screen base plate provided in an embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawings, to touch screen base plate provided in an embodiment of the present invention and preparation method thereof, touch panel and
The embodiment of display device is described in detail.
Condenser type touch screen substrate of the present invention refers to include underlay substrate, touch control electrode and insulating barrier isostructural
The substrate of touch controllable function can be achieved, the substrate can be the substrate that said structure is provided with external hanging type touch-screen, or
The display base plate of said structure is integrated with display panel with touch function, i.e., the condenser type touch screen substrate can be independent
Touch screen base plate, or be integrated with substrate such as display base plate of other structures or function etc., the present invention is not limited this
It is fixed.Touch panel of the present invention can be the external hanging type touch panel that can independently realize touch controllable function, can also
It is display panel with touch function etc., this is not limited by the present invention.Wherein, display panel includes but is not limited to organic light emission
Diode (OLED) panel, Thin Film Transistor-LCD (TFT-LCD) panel, bistable state cholesterin liquid-crystal display, electricity
Swimming formula display (Electrophoresis Display, EPD), electrowetting display (Electrowetting
Display, EWD) etc. display panel.
The shape size in each region does not reflect the actual proportions of touch screen base plate in accompanying drawing, and purpose is this schematically illustrate Shen
Please content.
The embodiment of the present invention provides a kind of touch screen base plate, as shown in Figure 1：
Touch screen base plate includes underlay substrate 105 and the first touch control electrode 101 being arranged on the underlay substrate 105
With second touch control electrode 102, first touch control electrode 101 and the second touch control electrode 102 are on the underlay substrate 105
Orthographic projection have it is overlapping, wherein, first touch control electrode 101 and the second touch control electrode 102 are in the underlay substrate 105
On the overlapping region of orthographic projection be provided with insulating barrier 103, for obstructing first touch control electrode 101 and second touch-control
Electrode 102 contacts.So design can realize the operation that position of touch and touch-control are sensed by interelectrode capacitance variations.
The first touch control electrode 101 in the embodiment is the structure completely connected, avoids caused by metal is put up a bridge that impedance is bigger than normal asks
Topic, the problem of so as to avoid the occurrence of the sensitivity of touch-control and the inaccurate linearity.
Further, first touch control electrode 101 includes the rectangle net that the first electrode line 1011 that transverse and longitudinal is intersected is formed
Grating texture.The first electrode line surrounds multiple void regions 104.The first electrode line 1011 of such rectangular lattice structure
It is connected in parallel equivalent to a plurality of electrode wires, impedance can be reduced by being so designed that, and keep the sensitivity of the first touch control electrode 101
Homogeneity, the phenomenon of signal delay can be reduced.
Further, as shown in figure 1, multiple rectangle net grating textures exist with multiple second touch control electrodes 102
It is arranged at intervals on first direction.The second electrode line 1012 that the rectangle net grating texture is extended by second direction connects, wherein
The first direction and the second direction are vertical.The second electrode line 1012 is with the second touch control electrode 102 described
Orthographic projection on underlay substrate 105, which has to overlap, forms the overlapping region.
Further, the first electrode line 1011 and second electrode line 1012 can be made of metal materials, metal material
Material can specifically include any one low resistive metal in molybdenum (Mo), silver-colored (Ag), titanium (Ti), copper (Cu), aluminium (Al), use these
The reason for material, is that the electric conductivity of these materials is preferable.The width range of first electrode line 1011 and second electrode line 1012 can
With between 4um~6um.Because the electrode wires being so designed that are very thin with respect to structures such as second touch control electrodes, so as to have
Effect eliminates pattern phenomenons, that is, reduces the obvious phenomenon of visual contrast, it is not easy to see electrode line pattern, improve the whole of screen
Body display effect and attractive in appearance.
Further, the second touch control electrode 102 can be transparent conductive material, such as tin indium oxide (ITO), oxidation
The material of any one in indium zinc (IZO), graphene, as depicted in figs. 1 and 2, second touch control electrode 102 can be designed as square
The part of shape shape, wherein overlapping region inside contracts to center, forms " recessed " shape shape.Second touch control electrode 102 can also
For waveform or other shapes, the present invention is not restricted in this respect.
Further, the void region 104 is filled by transparent conductive material, so as to increase the first touch control electrode
101 and the mutual capacitance of second touch control electrode 102, and can effectively realize the shadow that disappears.Transparent conductive material for example can be oxygen
Change the material of any one in indium tin (ITO), indium zinc oxide (IZO), graphene, be these using the reason for these materials
Material transparent degree is higher, and electric conductivity is also preferable.
Further, the packing material of the void region 104 is identical with the material of the second touch control electrode 102, this
Sample can be formed with the same technique of second touch control electrode, simplify technique.
Further, first touch control electrode 101 is arranged to emitter stage, and the second touch control electrode 102 is arranged to connect
Receive pole；Or first touch control electrode 101 is arranged to receiving pole, the second touch control electrode 102 is arranged to emitter stage, transmitting
The other structures and driving principle of pole and receiving pole are identical with touch-control principle in the prior art, and the application repeats no more.
Further, between the first touch control electrode 101 and second touch control electrode 102, insulating barrier 103 is set, for exhausted
The first touch control electrode of edge 101 and second touch control electrode 102.
Further, the material of insulating barrier 103 can be silica (SiO2), silicon nitride (SiNx) or aluminum oxide etc.
Material.The overlapping region of the orthographic projection of first touch control electrode and the second touch control electrode on the underlay substrate is complete
The insulating barrier is fallen into the orthographic projection on the underlay substrate, and the area of insulating barrier 103 can be more than or equal to described
The area in overlapping region, so as to fully play insulating effect.Alternatively, the area of the insulating barrier touches with described first
The ratio for controlling the overlapping region area of the orthographic projection of electrode and the second touch control electrode on the underlay substrate is 1~1.2：
1。
The overlooking the structure diagram of the overlapping region of embodiment as shown in Figure 2, the touch-control of second electrode line 1012 and second
There is insulating barrier 103 to obstruct between electrode 102, the area of the insulating barrier 103 is more than the first touch control electrode 101 and second touch control electrode
The area of 102 orthographic projection overlapping regions.
Further, multiple rectangle net grating textures and multiple second touch control electrodes 102 are in a first direction
It is arranged at intervals.The second electrode line 1012 that multiple rectangle net grating textures are extended by second direction connects, second electricity
Polar curve 1012 and orthographic projection of the second touch control electrode 102 on the underlay substrate 105 have it is overlapping formed it is described overlapping
Region.
The cross-sectional view of the overlapping region of embodiment as shown in Figure 3, first on underlay substrate 105 formed with
First touch control electrode 101, then formed with insulating barrier 103, topmost formed with second touch control electrode 102.The embodiment of the present invention
In, first electrode line and second electrode line are structure as a whole, i.e., no matter in overlapping region either rectangular lattice structure region, the
One touch control electrode 101 is made up of the electrode wires completely connected.And second touch control electrode 102 is also by the transparent of multiple rectangles
Conductive material is formed.Embodiments herein touch screen base plate without traditional lap joint process, therefore avoids during being made
The overlap joint meticulous phenomenon for causing impedance bigger than normal.Because the first touch control electrode 101 is made up of full electrode line, regular shape, from
And the probability of metal tip appearance is avoided, the possibility that electrostatic occurs can be reduced.
In addition, the overlapping region shown in Fig. 3, the first touch control electrode 101, second touch control electrode 102 and insulating barrier 103 are not
Set with layer；In other regions, such as the first touch control electrode 101 and the non-overlapping region of second touch control electrode 102, the first touch-control
Electrode 101 and second touch control electrode 102 can be set with layer, can also different layers set, it is but necessary non-contact.Alternatively, exist
Non-overlapping region can also set insulating barrier 103, for the first touch control electrode 101 and the second touch control electrode 102 of insulating, the application
Do not limit in this respect.
The embodiment of the present invention additionally provides a kind of touch panel, including above-mentioned touch-screen base provided in an embodiment of the present invention
Plate.
The embodiment of the present invention additionally provides a kind of display device, including above-mentioned touch-screen base provided in an embodiment of the present invention
Plate.It is similar to a kind of foregoing touch screen base plate to solve the principle of problem due to the display device, therefore the implementation of the display device
The implementation of aforementioned touch panel substrate is may refer to, part is repeated and repeats no more.
Specifically, display device provided in an embodiment of the present invention can be：Mobile phone, tablet personal computer, television set, display,
Any product or part with display function such as notebook computer, DPF, navigator, are not limited thereto.
The embodiment of the present invention additionally provides a kind of preparation method of any of the above-described kind of touch screen base plate, and the preparation method includes
Following steps：
The first touch control electrode 101 is formed on underlay substrate 105；
Insulating barrier 103 is formed above first touch control electrode；
Second touch control electrode 102 is formed above the insulating barrier 103；
Or
Second touch control electrode 102 is formed on underlay substrate 105；
Insulating barrier 103 is formed above the second touch control electrode 102；
The first touch control electrode 101 is formed above the insulating barrier 103；
Wherein, first touch control electrode 101 and the second touch control electrode 102 on the underlay substrate 105 just
Projection has overlapping, and the insulating barrier 103 is formed in first touch control electrode 101 with the second touch control electrode 102 described
The overlapping region of orthographic projection on underlay substrate 105, to obstruct the He of second electrode line 1012 of first touch control electrode 101
The second touch control electrode 102 contacts.
According to preparation method above, optional implementation steps are as follows：
First, the first touch control electrode, first touch control electrode are formed in underlay substrate 105 by first time patterning processes
The rectangle net grating texture and the plurality of rectangle net grating texture of connection formed including the first electrode line 1011 that transverse and longitudinal is intersected
Second electrode line 1012, the rectangle net grating texture extends in a first direction, and the first electrode line 1011 surrounds more
Individual void region 104, the second electrode line 1012 extend in a second direction.
Secondly, insulating barrier 103 is formed by second of patterning processes.
Then, second touch control electrode 102 is formed by third time patterning processes, the second touch control electrode 102 is first
Side upwardly extends and set with the rectangle net trellis spacing structure, the second electrode line 1012 and the second touch control electrode
The overlapping place of 102 orthographic projection on the underlay substrate 105 forms the overlapping region.
Wherein, the first direction and the second direction are vertical.
Further, the packing material of the void region 104 and the second touch control electrode 102 pass through a composition work
Skill is formed.
Or second touch control electrode 102 can be initially formed and then form the first touch control electrode 101, comprise the following steps that：
First, second touch control electrode 102 is formed in underlay substrate 105 by first time patterning processes.
Secondly, insulating barrier 103 is formed by second of patterning processes.
Then, the first touch control electrode is formed by third time patterning processes, first touch control electrode is intersected including transverse and longitudinal
The rectangle net grating texture that forms of first electrode line 1011 and the multiple rectangle net grating textures of connection second electrode line
1012, the rectangle net grating texture extends in a first direction, and the first electrode line 1011 surrounds multiple void regions
104, the second electrode line 1012 extends in a second direction.
Wherein described second touch control electrode 102 extends and set with the rectangle net trellis spacing structure in a first direction
Put, the second electrode line 1012 and the overlapping place of orthographic projection of the second touch control electrode 102 on the underlay substrate 105
Form the overlapping region.
Wherein, the first direction and the second direction are vertical.
Further, with reference to concrete technology, a kind of optional embodiment party of the preparation method of any of the above-described kind of touch screen base plate
Formula is：
(1) metal level of 300nm thickness is formed in underlay substrate 105 using sputtering technology (sputter), then passes through structure
Figure technique forms first electrode line 1011 and second electrode line 1012, and the patterning processes can for example include one layer of light of coating
Photoresist, photoresist removal region is formed by exposure and photoresist reservation region, the photoresist reservation region are correspondingly formed gold
The region of category figure is the region of first electrode line and second electrode line, and the photoresist removal region is corresponding not to form metal figure
The region of shape, afterwards development remove the photoresist that photoresist removes region, and first electrode line and the second electricity are obtained after performing etching
The figure of polar curve, the photoresist being finally peeled away on the figure of first electrode line and second electrode line.The patterning processes can be with
For the technique that other are used for forming special pattern, the present invention does not limit.Wherein first electrode line 1011 and second electrode line
1012 width control system is not easy the effect being detected by human eye in 5um or so, such as 4um~6um, realization.
(2) insulating barrier 103 formed using transparent material, such as nitrogen-oxygen-silicon, aluminum oxide etc..Insulating barrier 103 will at least wrap
The overlapping region of the orthographic projection of the first touch control electrode 101 and second touch control electrode 102 on underlay substrate is included, i.e., described first touches
The overlapping region for controlling the orthographic projection of electrode and the second touch control electrode on the underlay substrate falls completely within the insulating barrier
In orthographic projection on the underlay substrate.Chemical vapor deposition can be specifically used to pass through composition work after forming insulating layer of thin-film
Skill such as exposes, developed, etching technique forms the figure of required insulating barrier 103.Noted also pair in patterning processes design
The protection of the electrode wires of first touch control electrode 101, prevents electrode wires to be corroded during subsequent etching.
(3) making of second touch control electrode 102 is finally carried out on the underlay substrate for completing insulating barrier 103 is prepared, such as
Indium oxide layer tin thin film is deposited, its thickness is about 45nm, is such as exposed by patterning processes afterwards, develops, etches technique shape
Into second touch control electrode 102 and the filling figure of void region.Consider to coordinate the subsequent techniques, such as Fig. 1 such as binding (bonding)
Shown, the marginal position of second touch control electrode 102 can be designed using the prominent design extended out, such as second touch control electrode 102
Edge terminal component or connection member 1021 are set, for binding (bonding).
(4) flexible printed circuit board (Flexible Printed Circuit Board, FPCB) is bound, for driving the
One touch control electrode and second touch control electrode are to realize touch controllable function.
For second of preparation method, that is, it is initially formed second touch control electrode 102 and then forms the tool of the first touch control electrode 101
Body technology process, it is similar with above-mentioned technological process in addition to production order, it will not be described here.
Those skilled in the art can be modified and optimize to above-mentioned steps, for example, before step (1), Ke Yili
One layer of black matrix is formed with a patterning processes, idiographic flow is：Black matrix layer is deposited, then passes through the technique such as expose, develop
Formed.The black matrix can be located at the marginal position of underlay substrate 105, for covering flexible printed circuit board and touch screen base plate
Wire.
Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the application to the application
God and scope.So, if these modifications and variations of the application belong to the scope of the application claim and its equivalent technologies
Within, then the application is also intended to comprising including these changes and modification.
Claims (13)
1. a kind of touch screen base plate, including underlay substrate and the first touch control electrode being arranged on the underlay substrate and second
Touch control electrode, it is characterised in that the positive throwing of first touch control electrode and the second touch control electrode on the underlay substrate
Shadow has the rectangle net grating texture of the first electrode line formation overlapping, the first touch control electrode is intersected including transverse and longitudinal and in second direction
The second electrode line of extension；The first electrode line surrounds multiple void regions；First touch control electrode and described second is touched
Control the overlapping region of orthographic projection of the electrode on the underlay substrate be provided with insulating barrier with obstruct first touch control electrode and
The second touch control electrode contact；
The void region is filled with and the second touch control electrode identical material.
2. touch screen base plate according to claim 1, it is characterised in that multiple rectangle net grating textures and multiple institutes
State second touch control electrode to extend and be arranged at intervals in a first direction, multiple rectangle net grating textures are connected by second electrode line
Connect, the second electrode line has to overlap with orthographic projection of the second touch control electrode on the underlay substrate forms described overlap
Region, wherein the first direction and the second direction are vertical.
3. touch screen base plate according to claim 2, it is characterised in that the first electrode line and the second electrode line
Integrally formed, the first electrode line and the second electrode line include metal material, the metal material including molybdenum, silver, titanium,
Any one of copper, aluminium.
4. touch screen base plate according to claim 1, it is characterised in that the second touch control electrode includes electrically conducting transparent material
Material, the transparent conductive material include any one of tin indium oxide, indium zinc oxide, graphene.
5. touch screen base plate according to claim 1, it is characterised in that first touch control electrode and second touch-control
The overlapping region of orthographic projection of the electrode on the underlay substrate falls completely within the insulating barrier on the underlay substrate just
In projection, and the area of the insulating barrier is more than or equal to first touch control electrode and the second touch control electrode in the lining
The region area that orthographic projection on substrate overlaps.
6. touch screen base plate according to claim 2, it is characterised in that the first electrode line and/or second electrode line
Width range is 4um-6um.
7. according to the touch screen base plate described in claim any one of 1-6, it is characterised in that first touch control electrode is arranged to
Emitter stage, the second touch control electrode are arranged to receiving pole；Or first touch control electrode is arranged to receiving pole, described second
Touch control electrode is arranged to emitter stage.
8. a kind of touch panel, it is characterised in that the touch panel includes the touch described in claim any one of 1-7
Panel substrate.
9. a kind of display device, it is characterised in that the display device includes the touch-screen base described in claim any one of 1-7
Plate.
A kind of 10. preparation method of touch screen base plate, it is characterised in that including：
The first touch control electrode is formed on underlay substrate；
Insulating barrier is formed above first touch control electrode；
Second touch control electrode is formed above the insulating barrier；Or
Second touch control electrode is formed on underlay substrate；
Insulating barrier is formed above the second touch control electrode；
The first touch control electrode is formed above the insulating barrier；
Wherein, orthographic projection of first touch control electrode with the second touch control electrode on the underlay substrate has overlapping, institute
The orthographic projection that insulating barrier is formed in first touch control electrode with the second touch control electrode on the underlay substrate is stated to overlap
Region contacted with obstructing first touch control electrode and the second touch control electrode；First touch control electrode includes what transverse and longitudinal was intersected
The rectangle net grating texture and the second electrode line in second direction extension that first electrode line is formed；The first electrode line surrounds
Multiple void regions；The void region is filled with and the second touch control electrode identical material.
11. according to the method for claim 10, it is characterised in that specifically include：
The first touch control electrode is formed by first time patterning processes, the second electrode line connects multiple rectangle net trellis knots
Structure, the rectangle net grating texture extend in a first direction, and the second electrode line extends in a second direction；
Insulating barrier is formed by second of patterning processes；
By third time patterning processes formed second touch control electrode, the second touch control electrode extend in a first direction and with institute
State the setting of rectangle net trellis spacing structure, the second electrode line and the second touch control electrode on the underlay substrate just
The overlapping place of projection forms the overlapping region；
Wherein, the first direction and the second direction are vertical.
12. according to the method for claim 11, it is characterised in that also include：Surrounded in the first electrode line multiple
Conductive material is filled in void region.
13. according to the method for claim 12, it is characterised in that
By forming the second touch control electrode with a patterning processes and filling conductive material in the void region.
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105718105B (en) * | 2015-12-25 | 2018-12-11 | 业成科技（成都）有限公司 | Organic Light Emitting Diode touch-control display panel |
| CN108062187A (en) | 2016-11-07 | 2018-05-22 | 京东方科技集团股份有限公司 | Touch-control structure and preparation method thereof and touch device |
| CN110221730B (en) * | 2019-06-17 | 2022-06-07 | 京东方科技集团股份有限公司 | Touch panel and touch display device |
| CN113728296B (en) * | 2020-03-24 | 2024-01-23 | 京东方科技集团股份有限公司 | Touch substrate and touch display device |
| CN112230798B (en) * | 2020-10-14 | 2024-03-15 | 京东方科技集团股份有限公司 | Display panel, manufacturing method and display device |
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| CN201465069U (en) * | 2009-06-22 | 2010-05-12 | 比亚迪股份有限公司 | Multi-point touch screen |
| CN103412697A (en) * | 2013-07-23 | 2013-11-27 | 京东方科技集团股份有限公司 | Touch screen, and manufacturing method and display device thereof |
| CN203338323U (en) * | 2013-07-23 | 2013-12-11 | 京东方科技集团股份有限公司 | Touch screen and display device |
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