CN104835794A - Intelligent power module and method for manufacturing same - Google Patents

Intelligent power module and method for manufacturing same Download PDF

Info

Publication number
CN104835794A
CN104835794A CN201510129237.4A CN201510129237A CN104835794A CN 104835794 A CN104835794 A CN 104835794A CN 201510129237 A CN201510129237 A CN 201510129237A CN 104835794 A CN104835794 A CN 104835794A
Authority
CN
China
Prior art keywords
heat sink
power module
insulating layer
circuit wiring
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510129237.4A
Other languages
Chinese (zh)
Other versions
CN104835794B (en
Inventor
冯宇翔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Midea Group Co Ltd
GD Midea Air Conditioning Equipment Co Ltd
Original Assignee
Midea Group Co Ltd
Guangdong Midea Refrigeration Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Midea Group Co Ltd, Guangdong Midea Refrigeration Equipment Co Ltd filed Critical Midea Group Co Ltd
Priority to CN201510129237.4A priority Critical patent/CN104835794B/en
Publication of CN104835794A publication Critical patent/CN104835794A/en
Priority to US15/559,834 priority patent/US10615155B2/en
Priority to JP2018500841A priority patent/JP6500162B2/en
Priority to PCT/CN2016/077143 priority patent/WO2016150391A1/en
Application granted granted Critical
Publication of CN104835794B publication Critical patent/CN104835794B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/531Shapes of wire connectors
    • H10W72/5363Shapes of wire connectors the connected ends being wedge-shaped
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/753Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

本发明公开一种智能功率模块及其制造方法,该智能功率模块包括电路布线、设置在所述电路布线预定位置的功率元件和非功率元件,以及作为载体的纸质散热器,所述散热器的一面作为正面覆盖有绝缘层,所述电路布线设置在所述绝缘层上远离所述散热器的一面;所述散热器的另一面作为背面,在对应所述功率元件的位置设置有用于散热的皱褶,所述散热器的背面设置有隔断部。本发明提高了智能功率模块的散热效果、电性能和热稳定性,降低了成本。

The invention discloses an intelligent power module and a manufacturing method thereof. The intelligent power module includes circuit wiring, power components and non-power components arranged at predetermined positions of the circuit wiring, and a paper radiator as a carrier. The radiator One side of the radiator is covered with an insulating layer as the front side, and the circuit wiring is arranged on the side of the insulating layer away from the heat sink; Wrinkles, the back of the radiator is provided with a partition. The invention improves the cooling effect, electrical performance and thermal stability of the intelligent power module, and reduces the cost.

Description

智能功率模块及其制造方法Intelligent power module and manufacturing method thereof

技术领域technical field

本发明涉及智能功率模块技术领域,尤其涉及一种变频空调等特定的应用场合,通过传递模形式进行封装的智能功率模块及其制造方法。The invention relates to the technical field of intelligent power modules, in particular to an intelligent power module packaged in the form of a transfer mold for specific application occasions such as frequency conversion air conditioners and a manufacturing method thereof.

背景技术Background technique

智能功率模块(IPM,Intelligent Power Module)是一种将电力电子和集成电路技术结合的功率驱动类产品。智能功率模块把功率开关器件和高压驱动电路集成在一起,并内藏有过电压、过电流和过热等故障检测电路。智能功率模块一方面接收MCU的控制信号,驱动后续电路工作,另一方面将系统的状态检测信号送回MCU。智能功率模块以其高集成度、高可靠性等优势赢得越来越大的市场,尤其适合于驱动电机的变频器及各种逆变电源。Intelligent Power Module (IPM, Intelligent Power Module) is a power drive product that combines power electronics and integrated circuit technology. The intelligent power module integrates the power switching device and the high-voltage driving circuit, and has built-in fault detection circuits such as overvoltage, overcurrent and overheating. On the one hand, the intelligent power module receives the control signal from the MCU to drive the subsequent circuit to work, and on the other hand, it sends the system status detection signal back to the MCU. Intelligent power modules win more and more markets with their advantages of high integration and high reliability, and are especially suitable for frequency converters and various inverter power supplies for driving motors.

现有的智能功率模块的结构如图1(A)、图1(B)和图1(C)所示。图1(A)是现有的智能功率模块100的俯视图,图1(B)是图1(A)的X-X’线剖面图,图1(C)是图1(A)去除树脂后的示意图。The structures of existing intelligent power modules are shown in Fig. 1(A), Fig. 1(B) and Fig. 1(C). Fig. 1(A) is a top view of an existing smart power module 100, Fig. 1(B) is a cross-sectional view taken along line XX' of Fig. 1(A), and Fig. 1(C) is after removing the resin in Fig. 1(A) schematic diagram.

如图1(A)、图1(B)和图1(C)所示,现有的智能功率模块100具有如下结构,其包括:电路基板106;设于电路基板106表面上的绝缘层107;绝缘层107上形成的电路布线108;覆盖于绝缘层107和电路布线108特定位置的阻焊层110;通过锡膏112固定在电路布线108上的功率元件109和非功率元件104;连接非功率元件104、功率元件109和电路布线108的金属线105;与电路布线108连接的引脚101;电路基板106的至少一面被密封树脂102密封,为了提高密封性,会将电路基板106的整个面全部密封。As shown in Fig. 1(A), Fig. 1(B) and Fig. 1(C), the existing intelligent power module 100 has the following structure, which includes: a circuit substrate 106; an insulating layer 107 arranged on the surface of the circuit substrate 106 the circuit wiring 108 formed on the insulating layer 107; the solder resist layer 110 covering the specific position of the insulating layer 107 and the circuit wiring 108; the power element 109 and the non-power element 104 fixed on the circuit wiring 108 by the solder paste 112; Power elements 104, power elements 109, and metal wires 105 of circuit wiring 108; pins 101 connected to circuit wiring 108; at least one side of circuit substrate 106 is sealed by sealing resin 102, and the entire circuit substrate 106 is sealed in order to improve sealing performance. All surfaces are sealed.

由于智能功率模块100一般工作在高温环境中,并且功率元件109在工作时会发出大量的热,导致功率元件109的结温很高,虽然电路基板106具有散热作用,但是因为绝缘层107的存在,导致智能功率模块100的整体热阻较高。并且,由于电路基板106的导热,使功率元件109的热量传递到其他器件中,使其他器件的电参数发生不可忽略的温飘。Since the smart power module 100 generally works in a high-temperature environment, and the power element 109 emits a large amount of heat during operation, the junction temperature of the power element 109 is very high. , resulting in higher overall thermal resistance of the smart power module 100 . Moreover, due to the heat conduction of the circuit substrate 106, the heat of the power element 109 is transferred to other devices, causing non-negligible temperature drift in the electrical parameters of other devices.

因此,现有的智能功率模块长期工作在高温下,会严重降低其使用寿命,并且会影响性能的稳定性,在极端情况下,会导致智能功率模块在工作过程中因内部器件过热而失控爆炸,造成人员伤亡和财产损失。Therefore, the existing intelligent power module works at high temperature for a long time, which will seriously reduce its service life and affect the stability of performance. In extreme cases, it will cause the intelligent power module to explode out of control due to overheating of internal components during operation. , causing casualties and property damage.

发明内容Contents of the invention

本发明的主要目的在于提供一种结构简单、利于散热、可靠性高的智能功率模块及其制造方法。The main purpose of the present invention is to provide an intelligent power module with simple structure, good heat dissipation and high reliability and its manufacturing method.

为了达到上述目的,本发明提出一种智能功率模块,包括电路布线、设置在所述电路布线预定位置的功率元件和非功率元件,以及作为载体的纸质散热器,所述散热器的一面作为正面覆盖有绝缘层,所述电路布线设置在所述绝缘层上远离所述散热器的一面;所述散热器的另一面作为背面,在对应所述功率元件的位置设置有用于散热的皱褶,所述散热器的背面设置有隔断部。In order to achieve the above object, the present invention proposes an intelligent power module, including circuit wiring, power components and non-power components arranged at predetermined positions of the circuit wiring, and a paper heat sink as a carrier, one side of the heat sink serves as The front side is covered with an insulating layer, and the circuit wiring is arranged on the side of the insulating layer away from the heat sink; the other side of the heat sink is used as the back side, and corrugations for heat dissipation are provided at positions corresponding to the power components , the back of the radiator is provided with a partition.

优选地,所述功率元件与所述非功率元件之间具有设定间隔区,所述隔断部设置在散热器的背面上对应所述间隔区的位置,所述隔断部的宽度为1mm~5mm。Preferably, there is a set interval between the power element and the non-power element, and the partition is arranged on the back of the radiator at a position corresponding to the interval, and the width of the partition is 1 mm to 5 mm .

优选地,该智能功率模块还包括用于连接所述电路布线、所述功率元件和所述非功率元件以构成相应电路的金属线。Preferably, the intelligent power module further includes metal wires for connecting the circuit wiring, the power elements and the non-power elements to form corresponding circuits.

优选地,该智能功率模块还包括配置在所述功率模块边缘、与所述电路布线连接并向与所述皱褶相反方向延伸的作为输入输出的引脚。Preferably, the intelligent power module further includes input and output pins disposed on the edge of the power module, connected to the circuit wiring, and extending in a direction opposite to the wrinkle.

优选地,该智能功率模块还包括沿所述绝缘层边缘设有热硬性树脂框,所述电路布线、所述功率元件和非功率元件、金属线,以及所述引脚与电路布线的连接部分由热塑性树脂封装,所述热塑性树脂填充所述热硬性树脂框。Preferably, the intelligent power module further includes a thermosetting resin frame along the edge of the insulating layer, the circuit wiring, the power components and non-power components, metal wires, and the connection part between the pin and the circuit wiring Encapsulated by a thermoplastic resin filling the thermosetting resin frame.

优选地,所述热硬性树脂框上设置有用于安装所述智能功率模块的通孔,所述通孔贯穿所述热硬性树脂框、所述绝缘层和所述纸质散热器。Preferably, the thermosetting resin frame is provided with a through hole for installing the intelligent power module, and the through hole passes through the thermosetting resin frame, the insulating layer and the paper radiator.

优选地,所述电路布线在所述绝缘层的至少一边缘形成一个或多个焊垫;所述多个焊垫沿所述绝缘层的边缘对准排列;所述引脚通过所述焊垫固定,并与所述电路布线连接。Preferably, the circuit wiring forms one or more welding pads on at least one edge of the insulating layer; the plurality of welding pads are aligned and arranged along the edge of the insulating layer; the pins pass through the welding pads fixed and connected with the circuit wiring.

优选地,所述散热器和所述皱褶均为湿式碳素复合材料功能纸;所述散热器与所述皱褶粘接或者一体制成;所述散热器的厚度为1.5mm~2.5mm;所述散热器的厚度大于所述皱褶的厚度。Preferably, both the heat sink and the folds are wet-type carbon composite functional paper; the heat sink and the folds are bonded or made integrally; the thickness of the heat sink is 1.5 mm to 2.5 mm ; The thickness of the heat sink is greater than the thickness of the corrugation.

优选地,所述功率元件、所述非功率元件、所述电路布线、所述金属线组成的电路,具有桥堆、压缩机逆变以及功率因素校正功能,或者具有桥堆、压缩机逆变、功率因素校正以及风机逆变功能。Preferably, the circuit composed of the power element, the non-power element, the circuit wiring, and the metal wire has the functions of bridge stack, compressor inverter and power factor correction, or has bridge stack, compressor inverter , power factor correction and fan inverter function.

本发明实施例还提出一种智能功率模块制造方法,包括以下步骤:The embodiment of the present invention also proposes a method for manufacturing an intelligent power module, including the following steps:

形成纸质散热器,在所述散热器的正面覆盖绝缘层,在绝缘层表面形成电路布线和焊垫;Forming a paper heat sink, covering the front of the heat sink with an insulating layer, and forming circuit wiring and welding pads on the surface of the insulating layer;

在所述电路布线的表面装配功率元件、非功率元件,以及在所述焊垫的表面装配预先制成的引脚;assembling power components and non-power components on the surface of the circuit wiring, and assembling prefabricated pins on the surface of the pad;

通过金属线将所述功率元件、非功率元件以及所述电路布线间连接形成相应的电路;Connecting the power elements, non-power elements and the circuit wiring through metal wires to form corresponding circuits;

在所述绝缘层上装配预先制成的热硬性树脂框并灌封热塑性树脂;Assembling a prefabricated thermosetting resin frame on the insulating layer and potting thermoplastic resin;

在所述散热器的背面形成隔断部,将预先制成的散热皱褶固定在所述散热器的背面对应于所述功率元件的位置。A partition is formed on the back of the heat sink, and the prefabricated heat dissipation folds are fixed on the back of the heat sink corresponding to the position of the power element.

优选地,所述通过金属线将所述功率元件、非功率元件以及所述电路布线间连接形成相应的电路的步骤之前还包括:Preferably, before the step of connecting the power element, the non-power element and the circuit wiring through metal wires to form a corresponding circuit, the step further includes:

将装配有各元素的散热器置于清洗机中进行清洗。Place the radiator with the elements assembled in the washing machine for cleaning.

优选地,所述在电路布线的表面装配功率元件、非功率元件,以及在所述焊垫的表面装配预先制成的引脚的步骤之前还包括:制成独立的带镀层的引脚;具体包括:选取铜基材,对铜基材通过冲压或蚀刻的方式,制成独立的引脚;在所述引脚表面依次形成镍层和镍锡合金层,得到带镀层的引脚。Preferably, before the steps of assembling power components and non-power components on the surface of the circuit wiring, and assembling prefabricated pins on the surface of the solder pads, it also includes: making independent pins with plating; specifically The method includes: selecting a copper base material, and forming independent pins on the copper base material by stamping or etching; forming a nickel layer and a nickel-tin alloy layer on the surface of the pins in order to obtain a plated pin.

优选地,所述制成独立的带镀层的引脚的步骤之后还包括:制成独立的热硬性树脂框;具体为:通过传递模的方式模制独立的热硬性树脂框。Preferably, after the step of manufacturing the independent plated pin, it further includes: manufacturing an independent thermosetting resin frame; specifically: molding the independent thermosetting resin frame by way of transfer molding.

优选地,所述在所述绝缘层上装配预先制成的热硬性树脂框并灌封热塑性树脂的步骤包括:Preferably, the step of assembling a prefabricated thermosetting resin frame on the insulating layer and potting thermoplastic resin includes:

在热硬性树脂框上形成用于安装所智能功率模块的通孔;forming a through hole for installing the intelligent power module on the thermosetting resin frame;

将所述带有通孔的热硬性树脂框装配在所述绝缘层上;assembling the thermosetting resin frame with through holes on the insulating layer;

在所述热硬性树脂的通孔处将所述绝缘层和所述纸质散热器打穿,使所述通孔贯穿所述绝缘层和所述纸质散热器。The insulating layer and the paper heat sink are pierced at the through holes of the thermosetting resin, so that the through holes penetrate the insulating layer and the paper heat sink.

优选地,所述在所述散热器的背面形成隔断部,将预先制成的散热皱褶固定在所述散热器的背面对应于所述功率元件的位置的步骤之后还包括:Preferably, after the step of forming a partition on the back of the heat sink and fixing the prefabricated heat dissipation folds on the back of the heat sink corresponding to the position of the power element, the step further includes:

进行模块功能测试。Carry out module function test.

优选地,所述形成纸质散热器,在所述散热器的正面覆盖绝缘层,在绝缘层表面形成电路布线和焊垫的步骤包括:Preferably, the step of forming a paper heat sink, covering the front of the heat sink with an insulating layer, and forming circuit wiring and welding pads on the surface of the insulating layer includes:

根据设定的电路布局选取预定尺寸的湿式碳素复合材料形成纸质散热器;According to the set circuit layout, a wet carbon composite material with a predetermined size is selected to form a paper radiator;

在散热器的正面,使用绝缘材料和铜材,通过热压的方式,使绝缘材料形成于所述散热器的表面并作为所述绝缘层,使铜材形成于所述绝缘层的表面作为铜箔层;On the front side of the radiator, insulating material and copper are used, and the insulating material is formed on the surface of the radiator as the insulating layer by hot pressing, and the copper is formed on the surface of the insulating layer as the copper foil layer;

将所述铜箔层的特定位置腐蚀掉,剩余部分形成电路布线及焊垫;Corroding a specific position of the copper foil layer, and forming circuit wiring and welding pads in the remaining part;

所述在所述散热器的背面形成隔断部,将预先制成的散热皱褶固定在所述散热器的背面对应于所述功率元件的位置的步骤包括:The step of forming a partition on the back of the heat sink and fixing the prefabricated heat dissipation folds on the back of the heat sink at a position corresponding to the power element includes:

通过切割、撕裂、腐蚀等方式,将所述纸质散热器的背面的特定位置的材料去除,形成隔断部。By cutting, tearing, corroding, etc., the material at a specific position on the back of the paper heat sink is removed to form a partition.

使用湿式碳素复合材料形成皱褶,通过耐高温胶水粘接于所述散热器的背面对应于功率元件的位置。Wet carbon composite material is used to form folds, which are bonded to the back of the heat sink corresponding to the position of the power element by high temperature resistant glue.

优选地,所述在电路布线的表面装配功率元件、非功率元件,以及在所述焊垫的表面装配预先制成的引脚的步骤中包括:Preferably, the steps of assembling power components and non-power components on the surface of the circuit wiring, and assembling prefabricated pins on the surface of the pads include:

通过锡膏或银胶将所述功率元件、非功率元件及引脚固定。The power components, non-power components and pins are fixed by solder paste or silver glue.

本发明提出的一种智能功率模块及其制造方法,在智能功率模块中引入作为载体的纸质散热器,并在纸质散热器的背面设置隔断部,散热器背面对应于功率元件的位置设置散热皱褶,散热面积极大增加,绝缘层无需使用高导热材料即可满足功率元件散热要求;而且功率元件的大部分热量被迅速散出而不传导到非功率元件,使非功率元件始终工作在低温环境中,非功率元件的温飘极大减小,并且不同功能的所述功率元件群因隔断部的存在极大减小了热串扰,各发热部分的发热虽互不相同但极少相互间传导而通过所述皱褶散失,提高了智能功率模块的电性能和热稳定性;本发明采用重量更轻的纸质散热器,降低了智能功率模块总体重量,并且对加工时所用载具要求低,定位容易,降低了制造成本,提高了过程合格率;省去将功率元件贴装到内部散热器的工序,降低了设备投资费用。The invention proposes an intelligent power module and its manufacturing method. A paper heat sink as a carrier is introduced into the intelligent power module, and a partition part is set on the back of the paper heat sink. The back of the heat sink is set corresponding to the position of the power element. Heat dissipation folds, the heat dissipation area is greatly increased, and the insulation layer can meet the heat dissipation requirements of power components without using high thermal conductivity materials; moreover, most of the heat of power components is quickly dissipated without being conducted to non-power components, so that non-power components always work In a low-temperature environment, the temperature drift of non-power components is greatly reduced, and the existence of the partition part of the power component group with different functions greatly reduces thermal crosstalk, and the heat generation of each heat-generating part is different but very little conduction between each other and dissipate through the wrinkles, which improves the electrical performance and thermal stability of the intelligent power module; the invention adopts a lighter paper heat sink, which reduces the overall weight of the intelligent power module and reduces the load used in processing. Low tool requirements, easy positioning, reduced manufacturing costs, improved process pass rate; saves the process of mounting power components to the internal heat sink, reducing equipment investment costs.

附图说明Description of drawings

图1(A)是现有的智能功率模块的俯视图;FIG. 1(A) is a top view of an existing intelligent power module;

图1(B)是图1(A)的X-X’线剖面图;Fig. 1 (B) is the X-X ' line sectional view of Fig. 1 (A);

图1(C)是图1(A)去除树脂后的示意图;Fig. 1 (C) is the schematic diagram after Fig. 1 (A) removes resin;

图2(A)是本发明智能功率模块较佳实施例的背面视图;Fig. 2 (A) is the rear view of the preferred embodiment of the intelligent power module of the present invention;

图2(B)是本发明智能功率模块较佳实施例的正面视图;FIG. 2(B) is a front view of a preferred embodiment of the intelligent power module of the present invention;

图2(C)是图2(A)或者图2(B)X-X’线的截面图;Fig. 2 (C) is the sectional view of Fig. 2 (A) or Fig. 2 (B) X-X ' line;

图2(D)是本发明实施例智能功率模块去掉密封树脂后的俯视图;Fig. 2(D) is a top view of the smart power module according to the embodiment of the present invention after removing the sealing resin;

图3(A)是本发明实施例第一工序中纸质散热器的主视图;Fig. 3 (A) is the front view of the paper radiator in the first process of the embodiment of the present invention;

图3(B)是图3(A)的X-X’线的截面图;Fig. 3 (B) is the sectional view of the X-X ' line of Fig. 3 (A);

图3(C)是在纸质散热器的正面形成绝缘层和铜箔层的示意图;Fig. 3 (C) is the schematic diagram that forms insulation layer and copper foil layer on the front of paper radiator;

图3(D)是在图3(C)所示的铜箔层上形成电路布线的示意图;Fig. 3 (D) is the schematic diagram that forms circuit wiring on the copper foil layer shown in Fig. 3 (C);

图3(E)是图3(D)的X-X’线的截面图;Fig. 3 (E) is the sectional view of the X-X ' line of Fig. 3 (D);

图3(F)是形成散热皱褶的示意图;FIG. 3(F) is a schematic diagram of forming heat dissipation wrinkles;

图3(G)是为单个引脚的示意图;Figure 3 (G) is a schematic diagram of a single pin;

图3(H)是带有弧度的单个引脚的示意图;Figure 3(H) is a schematic diagram of a single pin with a radian;

图4(A)是本发明实施例第二工序中,装配功率元件、非功率元件及引脚的智能功率模块的侧视图;Fig. 4(A) is a side view of an intelligent power module assembled with power components, non-power components and pins in the second process of the embodiment of the present invention;

图4(B)是图4(A)的俯视图;Fig. 4 (B) is the top view of Fig. 4 (A);

图5(A)是本发明实施例第四工序中,通过金属线使功率元件、非功率元件、散热器和电路布线间形成连接的侧视图;Fig. 5(A) is a side view of connecting power elements, non-power elements, heat sinks and circuit wiring through metal wires in the fourth process of the embodiment of the present invention;

图5(B)是图5(A)的俯视图;Fig. 5 (B) is the top view of Fig. 5 (A);

图6(A)是本发明实施例第五工序中,在绝缘层上装配预先制成的热硬性树脂框的侧视图;Fig. 6 (A) is a side view of assembling a prefabricated thermosetting resin frame on the insulating layer in the fifth process of the embodiment of the present invention;

图6(B)是图6(A)的俯视图;Fig. 6 (B) is the top view of Fig. 6 (A);

图6(C)是本发明实施例第五工序中,在热硬性树脂框中灌封热塑性树脂的侧视图;Fig. 6 (C) is a side view of the thermoplastic resin potting in the thermosetting resin frame in the fifth process of the embodiment of the present invention;

图7(A)是本发明实施例第六工序中,在热硬性树脂框上形成用于安装智能功率模块的通孔的俯视图;Fig. 7(A) is a top view of the through hole for installing the intelligent power module formed on the thermosetting resin frame in the sixth process of the embodiment of the present invention;

图7(B)是本发明实施例第六工序中,在散热器的背面形成隔断部并在功率元件对应位置粘贴散热皱褶的仰视图;Fig. 7(B) is a bottom view of forming partitions on the back of the radiator and pasting heat dissipation folds on the corresponding positions of the power components in the sixth process of the embodiment of the present invention;

图7(C)是图7(B)的X-X’线的截面图;Fig. 7 (C) is the sectional view of the X-X ' line of Fig. 7 (B);

图8是本发明实施例的智能功率模块的制造方法流程图。Fig. 8 is a flowchart of a manufacturing method of an intelligent power module according to an embodiment of the present invention.

为了使本发明的技术方案更加清楚、明了,下面将结合附图作进一步详述。In order to make the technical solution of the present invention clearer and clearer, it will be further described below in conjunction with the accompanying drawings.

具体实施方式Detailed ways

应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

如前所述,现有的智能功率模块由于散热效果不佳,长期工作在高温下,会严重降低其使用寿命,并且会影响智能模块性能的稳定性。As mentioned above, due to the poor heat dissipation effect of the existing intelligent power modules, working at high temperature for a long time will seriously reduce their service life and affect the stability of the intelligent module performance.

本发明考虑到,在变频空调等特定的应用场合,高导热绝缘层和增加散热器虽然可以解决智能功率模块的散热问题,但是,选用高导热绝缘层散热,一方面成本非常高,另一方面由于高导热绝缘层使用了大量的参杂而导致智能功率模块硬度很大,从而增加了智能功率模块的制造难度;如果在智能功率模块内部增加散热器,将功率元件贴装在散热器上,一方面会增加原材料成本,另一方面也增加了智能功率模块的工艺难度;如果在智能功率模块外部增加散热器,散热器贴装在智能功率模块的背面,由于与智能功率模块配合的应用电路上还有其他发热元件,如果为所有发热元件安装同一个散热器,会增加散热器面积,从而提高应用成本,如果为所有发热元件分别安装散热器,则会增加装配难度。因此选用高导热绝缘层和增加散热器均对智能功率模块的应用推广产生了困难,不利于智能功率模块在变频空调等民用场合的普及。The present invention considers that in specific applications such as frequency conversion air conditioners, although the high thermal conductivity insulating layer and the addition of radiators can solve the heat dissipation problem of the intelligent power module, the cost of using the high thermal conductivity insulating layer for heat dissipation is very high on the one hand, and on the other hand Due to the use of a large amount of doping in the high thermal conductivity insulating layer, the smart power module is very hard, which increases the difficulty of manufacturing the smart power module; if a heat sink is added inside the smart power module, and the power components are mounted on the heat sink, On the one hand, it will increase the cost of raw materials, and on the other hand, it will also increase the difficulty of the process of the intelligent power module; if a heat sink is added outside the intelligent power module, the heat sink is mounted on the back of the intelligent power There are other heating elements on the board. If the same radiator is installed for all heating elements, the area of the radiator will be increased, thereby increasing the application cost. If radiators are installed separately for all heating elements, it will increase the difficulty of assembly. Therefore, the selection of high thermal conductivity insulating layer and the addition of heat sinks have created difficulties in the application and popularization of intelligent power modules, which is not conducive to the popularization of intelligent power modules in civilian applications such as frequency conversion air conditioners.

基于上述考虑,本发明实施例通过引入纸质散热器,在纸质散热器的背面形成隔断部并在对应于功率元件的位置设置散热皱褶,在纸质散热器的正面形成绝缘层、电路布线、功率元件、非功率元件等元素,并完成有序加工,由于纸质散热器重量更轻,对加工时所用载具要求低,定位容易,从而可以降低制造成本,提高过程合格率;省去将功率元件贴装到内部散热器的工序,降低了设备投资费用;此外,由于在纸质散热器的背面设置散热皱褶,散热面积极大增加,并且不同功能的所述功率元件群因隔断部的存在极大减小了热串扰,各发热部分的发热虽互不相同但极少相互间传导而通过所述皱褶散失,在使用普通绝缘层的前提下,使智能功率模块及其应用平台的发热部件获得良好的散热效果,并且各发热源间热干扰很少,使得智能功率模块性能稳定,进而提高了智能功率模块的可靠性;除此之外,纸质散热器还便于运输。Based on the above considerations, the embodiment of the present invention introduces a paper heat sink, forms a partition on the back of the paper heat sink and arranges heat dissipation wrinkles at positions corresponding to power components, and forms an insulating layer and a circuit on the front of the paper heat sink Wiring, power components, non-power components and other elements, and complete orderly processing, because the paper heat sink is lighter in weight, has low requirements for the carrier used in processing, and is easy to locate, which can reduce manufacturing costs and improve process pass rate; save Eliminate the process of mounting power components to the internal heat sink, reducing equipment investment costs; in addition, due to the heat dissipation folds on the back of the paper heat sink, the heat dissipation area is greatly increased, and the power components with different functions are due to The existence of the partition greatly reduces thermal crosstalk. Although the heat generation of each heating part is different from each other, it is seldom conducted between each other and dissipated through the folds. Under the premise of using a common insulating layer, the intelligent power module and its The heat-generating parts of the application platform have a good heat dissipation effect, and there is little thermal interference between the heat-generating sources, which makes the performance of the intelligent power module stable, thereby improving the reliability of the intelligent power module; in addition, the paper heat sink is also convenient for transportation .

具体地,参照图2(A)、图2(B)、图2(C)及图2(D)所示,本发明实施例提出的一种智能功率模块10,本实施例以具有桥堆、压缩机逆变、功率因素校正、风机逆变功能的智能功率模块10为例进行说明,对于不需要风机逆变功能的应用场合,将风机逆变部分去除即可,其他部分完全相同。Specifically, referring to FIG. 2(A), FIG. 2(B), FIG. 2(C) and FIG. 2(D), an intelligent power module 10 proposed by an embodiment of the present invention, this embodiment has a bridge stack , compressor inverter, power factor correction, and fan inverter function of the intelligent power module 10 as an example to illustrate, for applications that do not need the fan inverter function, just remove the fan inverter part, and the other parts are identical.

本实施例智能功率模块10包括作为载体的纸质散热器17、电路布线18、设置在所述电路布线18预定位置的功率元件19和非功率元件14;其中:The intelligent power module 10 of this embodiment includes a paper radiator 17 as a carrier, a circuit wiring 18, a power element 19 and a non-power element 14 arranged at a predetermined position of the circuit wiring 18; wherein:

所述散热器17的一面作为正面,另一面作为背面。One side of the radiator 17 is used as the front side, and the other side is used as the back side.

在散热器17的正面覆盖有绝缘层21,所述电路布线18设置在所述绝缘层21上远离散热器17的一面。The front surface of the radiator 17 is covered with an insulating layer 21 , and the circuit wiring 18 is arranged on a side of the insulating layer 21 away from the radiator 17 .

在所述散热器17的背面,在对应所述功率元件19的位置设置有用于散热的皱褶17A。Corrugations 17A for heat dissipation are provided on the back of the heat sink 17 at positions corresponding to the power elements 19 .

其中,所述散热器17和皱褶17A均可以采用湿式碳素复合材料功能纸。Wherein, both the radiator 17 and the crease 17A can use wet carbon composite material functional paper.

在散热器17的背面设置有隔断部22,隔断部22是将散热器背面特定位置的散热材料去除形成,可以部分去除也可以全部去除露出绝缘层21,本实施例为了取得更好的散热效果,采用全部去除的方式。A partition 22 is provided on the back of the radiator 17. The partition 22 is formed by removing the heat dissipation material at a specific position on the back of the radiator. It can be partially removed or completely removed to expose the insulating layer 21. In order to obtain a better heat dissipation effect in this embodiment , adopt the way of all removal.

在此,功率元件19的下方必须具有皱褶17A,具有所述隔断部22的上方不具有功率元件19。Here, the corrugation 17A must be provided below the power element 19 , and the power element 19 is not provided above the partition portion 22 .

所述散热器17与所述皱褶17A可以通过高温胶水粘接,或者也可以两者一体制成。The heat sink 17 and the folds 17A can be bonded by high-temperature glue, or both can be integrally formed.

(后续详述)。(Follow-up details).

此外,所述智能功率模块10还包括:用于连接所述电路布线18、所述功率元件19和所述非功率元件14以构成相应电路的金属线15。In addition, the intelligent power module 10 further includes: a metal wire 15 for connecting the circuit wiring 18 , the power element 19 and the non-power element 14 to form a corresponding circuit.

在此,所述功率元件19、所述非功率元件14、所述电路布线18、所述金属线15组成的电路,具有桥堆、压缩机逆变和功率因素校正功能,或者具有桥堆、压缩机逆变、功率因素校正和风机逆变功能,使变频空调等应用领域的所有发热电路集中在一起同时散热;本实施例以具有桥堆、压缩机逆变、功率因素校正、风机逆变功能的智能功率模块10为例进行说明,对于不需要风机逆变功能的应用场合,将风机逆变部分去除即可,其他部分完全相同。Here, the circuit composed of the power element 19, the non-power element 14, the circuit wiring 18, and the metal wire 15 has functions of bridge stack, compressor inverter and power factor correction, or has bridge stack, Compressor inverter, power factor correction and fan inverter functions, so that all heating circuits in the application fields such as frequency conversion air conditioners are integrated together to dissipate heat at the same time; this embodiment is equipped with bridge stack, compressor inverter, power factor correction, fan inverter function of the intelligent power module 10 as an example, for applications that do not require the inverter function of the wind turbine, the inverter part of the wind turbine can be removed, and the other parts are completely the same.

如图2(A)和图2(B)所示,电路单元1001实现桥堆功能、电路单元1002实现压缩机逆变功能、电路单元1003实现功率因素校正、电路单元1004实现风机逆变功能。As shown in Figure 2(A) and Figure 2(B), the circuit unit 1001 implements the bridge stack function, the circuit unit 1002 implements the compressor inverter function, the circuit unit 1003 implements power factor correction, and the circuit unit 1004 implements the fan inverter function.

在此,所述桥堆、所述压缩机逆变的驱动部分、所述功率因素校正的驱动部分、所述风机逆变的驱动部分与其他控制部分间被所述隔断部22隔离。Here, the bridge stack, the driving part of the inverter of the compressor, the driving part of the power factor correction, the driving part of the fan inverter and other control parts are isolated by the partition part 22 .

此外,所述智能功率模块10还包括:配置在所述功率模块边缘、与所述电路布线18连接并向与所述散热皱褶相反方向延伸的作为输入输出的引脚。In addition, the intelligent power module 10 further includes: input and output pins disposed on the edge of the power module, connected to the circuit wiring 18 and extending in a direction opposite to the heat dissipation folds.

在此,根据智能功率模块10内部电路布局及外围应用需要,所述引脚11可以配置于智能功率模块10的一个边缘、两个边缘、三个边缘或四个边缘。Here, according to the internal circuit layout and peripheral application requirements of the intelligent power module 10 , the pins 11 can be arranged on one edge, two edges, three edges or four edges of the intelligent power module 10 .

此外,所述智能功率模块10还包括:配置在所述绝缘层上的热硬性树脂框13,。In addition, the intelligent power module 10 further includes: a thermosetting resin frame 13' disposed on the insulating layer.

在此,热硬性树脂框的高度必须高于所述金属线15的高度。Here, the height of the thermosetting resin frame must be higher than that of the metal wire 15 .

在本实施例中,所述电路布线18、所述功率元件19和非功率元件14、金属线15,以及所述引脚11与电路布线18的连接部分由热塑性密封树脂12封装,热塑性密封树脂12填充所述热硬性树脂框13将所有元素密封,只有引脚11部分露出。In this embodiment, the circuit wiring 18, the power element 19, the non-power element 14, the metal wire 15, and the connection part between the pin 11 and the circuit wiring 18 are encapsulated by a thermoplastic sealing resin 12, and the thermoplastic sealing resin 12 filling the thermosetting resin frame 13 to seal all elements, only the pin 11 is partially exposed.

此外,所述智能功率模块10还包括:用于安装所述智能功率模块10的通孔16。In addition, the intelligent power module 10 further includes: a through hole 16 for installing the intelligent power module 10 .

在此,通孔16贯穿热硬性树脂框13、绝缘层21和纸质散热器17。所述散热皱褶17A位于所述功率元件19的背面被所述隔断部22包围,并在所述纸质散热器17的背面的短边边缘的距离至少2mm,确保不对所述通孔16形成遮挡。Here, the through hole 16 penetrates the thermosetting resin frame 13 , the insulating layer 21 and the paper heat sink 17 . The heat dissipation folds 17A are located on the back of the power element 19 and surrounded by the partition 22, and the distance between the short edge of the back of the paper heat sink 17 is at least 2mm, so as to ensure that the through hole 16 is not formed. block.

另外,所述电路布线18可以在绝缘层21的至少一边缘形成一个或多个焊垫18A;若为多个焊垫18A,则所述多个焊垫18A沿所述绝缘层21的边缘对准排列;所述引脚11通过所述焊垫18A固定,并与所述电路布线18连接。In addition, the circuit wiring 18 may form one or more pads 18A on at least one edge of the insulating layer 21; The pins 11 are fixed through the pads 18A and connected to the circuit wiring 18.

以下详细阐述本发明实施例智能功率模块10各构成要素:The components of the smart power module 10 according to the embodiment of the present invention are described in detail below:

其中,纸质散热器17为湿式碳素复合材料功能纸,可由粉末和纤维状碳素材料复合加工成石墨质,该湿式碳素复合材料可耐受350℃以上的高温并可根据需要折叠成任意形状,得到所述散热皱褶17A。为了提高抗腐蚀性和防水,表面可进行防水处理。Among them, the paper radiator 17 is a wet-type carbon composite material functional paper, which can be compositely processed into graphite by powder and fibrous carbon materials. The wet-type carbon composite material can withstand high temperatures above 350°C and can be folded into Any shape can be used to obtain the heat dissipation corrugations 17A. In order to improve corrosion resistance and waterproof, the surface can be waterproofed.

所述纸质散热器17可以与所述散热皱褶17A一体制成,也可以与所述散热皱褶17A通过高温胶水粘接。The paper radiator 17 can be made integrally with the heat dissipation folds 17A, or can be bonded with the heat dissipation folds 17A by high-temperature glue.

其中,纸质散热器17的两面平整,而散热皱褶17A的形状不规则;所述纸质散热器17与散热皱褶17A也可以为采用不同厚度的湿式碳素复合材料,其中,为了增加机械强度,纸质散热器17采用较厚的湿式碳素复合材料,其厚度优选为1.5mm~2.5mm,实际设计中,薄处厚度可设计为1.5mm,厚处厚度可以为2.5mm,为了降低成本和增加皱褶17A的密度,散热皱褶17A采用了较薄的湿式碳素复合材料,作为一种优选方案,厚度可设计为0.5mm。Wherein, the two sides of paper radiator 17 are smooth, and the shape of heat dissipation fold 17A is irregular; Described paper radiator 17 and heat dissipation fold 17A also can be the wet carbon composite material that adopts different thickness, wherein, in order to increase Mechanical strength, the paper radiator 17 adopts a thicker wet carbon composite material, and its thickness is preferably 1.5mm to 2.5mm. In actual design, the thickness of the thin part can be designed to be 1.5mm, and the thickness of the thick part can be 2.5mm. To reduce the cost and increase the density of the pleats 17A, the radiating pleats 17A use a thinner wet carbon composite material, and as an optimal solution, the thickness can be designed to be 0.5mm.

所述绝缘层21可以采用常用的绝缘材料,可以加入二氧化硅、氮化硅、碳化硅等掺杂以提高导热性,在此,掺杂可以是球形或角形,通过热压方式,压合在纸质散热器17的表面,即正面。The insulating layer 21 can use commonly used insulating materials, and can be doped with silicon dioxide, silicon nitride, silicon carbide, etc. to improve thermal conductivity. Here, the doping can be spherical or angular. On the surface of the paper radiator 17, i.e. the front side.

所述电路布线18由铜等金属构成,形成于绝缘层21上的特定位置,根据功率需要,电路布线18的厚度可设计成0.035mm或0.07mm等,对于一般的智能功率模块10,优先考虑设计成0.07mm,本实施例中采用0.07mm的厚度。另外,在所述绝缘层21的边缘,形成有由所述电路布线18构成的焊垫18A。在此,在所述绝缘层21的一边附近设置多个对准排列的焊垫18A,根据功能需要,也可在所述绝缘层21的多个边缘附近设置多个对准排列的焊垫18A。The circuit wiring 18 is made of metal such as copper, and is formed at a specific position on the insulating layer 21. According to the power requirement, the thickness of the circuit wiring 18 can be designed to be 0.035mm or 0.07mm, etc. For general intelligent power modules 10, it is preferred to It is designed to be 0.07 mm, and a thickness of 0.07 mm is adopted in this embodiment. In addition, on the edge of the insulating layer 21, a pad 18A composed of the circuit wiring 18 is formed. Here, a plurality of aligned pads 18A are provided near one side of the insulating layer 21, and according to functional requirements, a plurality of aligned pads 18A may also be provided near multiple edges of the insulating layer 21. .

所述隔断部22为所述纸质散热器17挖空形成的镂空,所述隔断部位于各功能电路的发热功率元件群之间,使热量不可能通过高导热的所述纸质散热器17进行传导,所述隔断部22的宽度根据所述发热功率元件群之间的距离而定,一般来说,为了达到热隔断部效果,所述隔断部22的宽度不应小于1mm,为了增加强度所述纸质散热器17的机械强度,所述隔断部22的宽度不应大于5mm。此外所述隔断部22可以完全将所述纸质散热器17去除,使所述绝缘层21露出,也可以仅去除所述纸质散热器17的绝大部分而保留与所述绝缘层21结合的极薄的一层,本实施例中,采用完全去除的方法。The partition part 22 is a hollow formed by hollowing out the paper radiator 17, and the partition part is located between the heating power element groups of each functional circuit, making it impossible for heat to pass through the paper radiator 17 with high thermal conductivity. Conduction, the width of the partition 22 is determined according to the distance between the heating power element groups. Generally speaking, in order to achieve the effect of the thermal partition, the width of the partition 22 should not be less than 1mm. In order to increase the strength For the mechanical strength of the paper radiator 17, the width of the partition 22 should not be greater than 5 mm. In addition, the partition part 22 can completely remove the paper heat sink 17 to expose the insulating layer 21, or only remove most of the paper heat sink 17 and keep it in combination with the insulating layer 21. In this embodiment, the extremely thin layer is completely removed.

所述功率元件19和非功率元件14被固定在电路布线18上构成规定的电路。在此,所述功率元件19可以采用IGBT管、高压MOSFET管、高压FRD管、高压二极管等元件,所述功率元件19通过金属线15与电路布线18等连接;所述非功率元件14采用集成电路、晶体管或二极管等有源元件、或者电容或电阻等无源元件,面朝上安装的有源元件等通过金属线15与电路布线18连接。在此,所述电路单元1001、所述电路单元1002、所述电路单元1003、所述电路单元1004的各自所属的所述功率元件19之间,至少具有2mm的距离。The power element 19 and the non-power element 14 are fixed on the circuit wiring 18 to form a predetermined circuit. Here, the power element 19 can be an IGBT tube, a high-voltage MOSFET tube, a high-voltage FRD tube, a high-voltage diode, etc., and the power element 19 is connected to the circuit wiring 18 through a metal wire 15; the non-power element 14 adopts an integrated Active elements such as circuits, transistors, and diodes, or passive elements such as capacitors and resistors, active elements mounted face-up, and the like are connected to circuit wiring 18 through wires 15 . Here, there is at least a distance of 2 mm between the respective power elements 19 of the circuit unit 1001 , the circuit unit 1002 , the circuit unit 1003 , and the circuit unit 1004 .

所述金属线15可以是铝线、金线或铜线,通过绑定使各功率元件19之间、各非功率元件14之间、各电路布线18之间建立电连接关系;此外,金属线15还可以用于使引脚11和电路布线18或功率元件19、非功率元件14之间建立电连接关系。对于功率元件19的连接,可采用300μm~400μm的铝线,对于非功率元件14的电连接,可采用38μm~125μm的铝线,如果存在跨通孔22的连接,优选采用250μm以上的铝线。在此,所述隔断部22的上方最好不设计有所述金属线15的邦定点。The metal wires 15 can be aluminum wires, gold wires or copper wires, and electrical connections are established between the power elements 19, between the non-power elements 14, and between the circuit wirings 18 through binding; in addition, the metal wires 15 can also be used to establish an electrical connection between the pin 11 and the circuit wiring 18 or the power element 19 and the non-power element 14 . For the connection of the power element 19, an aluminum wire of 300 μm to 400 μm can be used, for the electrical connection of the non-power element 14, an aluminum wire of 38 μm to 125 μm can be used, if there is a connection across the through hole 22, an aluminum wire of 250 μm or more is preferably used . Here, preferably no bonding point for the metal wire 15 is designed above the partition portion 22 .

所述引脚11被固定在设于电路布线18一个边缘的焊垫18A上,其具有与外部进行输入、输出的作用。The pin 11 is fixed on a pad 18A provided on one edge of the circuit wiring 18, and has the functions of inputting and outputting with the outside.

作为一种实施方式,可以设计成智能功率模块10的一边设置多条引脚11,引脚11和焊垫18A通过焊锡等导电的电性粘结剂焊接。引脚11可以采用铜等金属制成,铜表面通过化学镀和电镀形成一层镍锡合金层,合金层的厚度一般为5μm,镀层可保护铜不被腐蚀氧化,并可提高可焊接性。As an implementation manner, it may be designed that one side of the smart power module 10 is provided with multiple pins 11 , and the pins 11 and the pads 18A are welded by conductive electrical adhesive such as solder. The pin 11 can be made of copper and other metals. The copper surface forms a layer of nickel-tin alloy layer through electroless plating and electroplating. The thickness of the alloy layer is generally 5 μm. The plating layer can protect copper from corrosion and oxidation and improve solderability.

所述热硬性树脂框13通过传递模方式模制形成,所述热硬性树脂框13外边缘大小与所述纸质散热器17一致或比所述纸质散热器17略小,所述热硬性树脂框13内边缘与外边缘的距离不小于1.5mm,并且在所述热硬性树脂框13矩形短边处,有直径与所述纸质散热器17的通孔位置、直径一致的通孔。The thermosetting resin frame 13 is formed by transfer molding, and the size of the outer edge of the thermosetting resin frame 13 is consistent with or slightly smaller than the paper radiator 17. The distance between the inner edge and the outer edge of the resin frame 13 is not less than 1.5mm, and at the short side of the rectangle of the thermosetting resin frame 13, there is a through hole with the same diameter as the position and diameter of the through hole of the paper radiator 17.

所述热塑性树脂12通过注入模方式模制。在此,所述热塑性树脂12完全位于所述热硬性树脂框13内并密封所述纸质散热器17上表面上的所有元素。The thermoplastic resin 12 is molded by injection molding. Here, the thermoplastic resin 12 is completely inside the thermosetting resin frame 13 and seals all elements on the upper surface of the paper heat sink 17 .

所述通孔16由所述热硬性树脂框13的通孔、所述绝缘层21的通孔、所述纸质散热器17的通孔合并组成,贯穿所述热硬性树脂框13、所述绝缘层21、所述纸质散热器17。The through hole 16 is composed of the through hole of the thermosetting resin frame 13, the through hole of the insulating layer 21, and the through hole of the paper radiator 17, and runs through the thermosetting resin frame 13, the Insulation layer 21, the paper radiator 17.

相比现有技术,本发明实施例的智能功率模块10具有如下有益效果:Compared with the prior art, the intelligent power module 10 of the embodiment of the present invention has the following beneficial effects:

1、由于本发明智能功率模块10的背面具有散热皱褶17A,散热面积极大增加,绝缘层21无需使用高导热材料即可满足功率元件19的散热要求。1. Since the intelligent power module 10 of the present invention has heat dissipation folds 17A on the back, the heat dissipation area is greatly increased, and the insulating layer 21 can meet the heat dissipation requirements of the power element 19 without using high thermal conductivity materials.

2、智能功率模块10具有了桥堆、压缩机逆变功能,或者具有桥堆、压缩机逆变、风机逆变功能,使变频空调等应用领域的所有发热电路集中在一起同时散热。2. The intelligent power module 10 has the functions of bridge stack and compressor inverter, or has the functions of bridge stack, compressor inverter, and fan inverter, so that all heating circuits in the application fields such as frequency conversion air conditioners can be integrated together to dissipate heat at the same time.

3、散热皱褶17A位于功率元件19下方,使发热元件的大部分热量被迅速散出而不传导到非功率元件14,使非功率元件14始终工作在低温环境中,非功率元件14的温飘极大减小,提高了智能功率模块10的电性能和热稳定性。3. The heat dissipation folds 17A are located under the power element 19, so that most of the heat of the heating element is quickly dissipated and not conducted to the non-power element 14, so that the non-power element 14 always works in a low temperature environment, and the temperature of the non-power element 14 Drift is greatly reduced, improving the electrical performance and thermal stability of the intelligent power module 10 .

4、桥堆、压缩机逆变的驱动部分、功率因素校正的驱动部分、风机逆变的驱动部分与其他控制部分(包括非功率元件14等)间被隔断部22隔离,不但使各发热部分的热干扰很低,绝大部分热量通过皱褶17A散失,并且使控制部分的温度保持在一个低的状态,避免了因为控制部分温飘引起的智能功率模块10性能下降。4. The bridge stack, the driving part of the compressor inverter, the driving part of the power factor correction, the driving part of the fan inverter and other control parts (including non-power components 14, etc.) The thermal interference is very low, most of the heat is dissipated through the folds 17A, and the temperature of the control part is kept at a low state, avoiding the performance degradation of the intelligent power module 10 caused by the temperature drift of the control part.

5、散热结构为纸质材料,重量轻,使得智能功率模块10总体重量降低,便于长途运输和工人装配;由于本发明智能功率模块10本身具备散热器17,因此在应用过程,外部无需再接散热器17,降低应用难度和应用成本,提高装配品质。5. The heat dissipation structure is made of paper material, which is light in weight, so that the overall weight of the intelligent power module 10 is reduced, which is convenient for long-distance transportation and assembly by workers; since the intelligent power module 10 of the present invention is equipped with a radiator 17, no external connection is required during the application process. The radiator 17 reduces application difficulty and application cost, and improves assembly quality.

由上述可知,本发明的智能功率模块10在降低成本同时,提高了可靠性和性能,并且可设计成与现行智能功率模块10功能及引脚11定义兼容,便于智能功率模块10的推广应用。It can be seen from the above that the smart power module 10 of the present invention improves reliability and performance while reducing costs, and can be designed to be compatible with the functions of the current smart power module 10 and the definition of pins 11, which facilitates the popularization and application of the smart power module 10.

此外,本发明一实施例还提出一种智能功率模块10制造方法,包括:In addition, an embodiment of the present invention also proposes a manufacturing method of the intelligent power module 10, including:

步骤S1,形成纸质散热器17,在所述散热器17的正面覆盖绝缘层21,在绝缘层21表面形成电路布线18和焊垫18A。Step S1 , forming a paper radiator 17 , covering the front surface of the radiator 17 with an insulating layer 21 , and forming circuit wiring 18 and welding pads 18A on the surface of the insulating layer 21 .

具体地,根据设定的电路布局选取预定尺寸的湿式碳素复合材料形成纸质散热器17。Specifically, a wet carbon composite material with a predetermined size is selected according to the set circuit layout to form the paper heat sink 17 .

在散热器17的正面,使用绝缘材料和铜材,通过热压的方式,使绝缘材料形成于所述散热器17的表面并作为所述绝缘层21,使铜材形成于所述绝缘层21的表面作为铜箔层。On the front side of the heat sink 17, insulating material and copper material are used, and the insulating material is formed on the surface of the heat sink 17 as the insulating layer 21 by hot pressing, and the copper material is formed on the insulating layer 21 surface as a copper foil layer.

之后,将铜箔层的特定位置腐蚀掉,剩余部分形成电路布线18及焊垫18A。After that, the specific position of the copper foil layer is etched away, and the remaining part forms the circuit wiring 18 and the welding pad 18A.

步骤S2,在所述电路布线18的表面装配功率元件19、非功率元件14,以及在所述焊垫18A的表面装配预先制成的引脚11。Step S2 , assembling the power element 19 and the non-power element 14 on the surface of the circuit wiring 18 , and assembling the prefabricated pin 11 on the surface of the solder pad 18A.

步骤S3,通过金属线15将所述功率元件19、非功率元件14以及所述电路布线18间连接形成相应的电路。Step S3 , connecting the power element 19 , the non-power element 14 and the circuit wiring 18 through the metal wire 15 to form a corresponding circuit.

步骤S4,在绝缘层21上装配预先制成的热硬性树脂框13并灌封热塑性密封树脂12。Step S4 , assembling the prefabricated thermosetting resin frame 13 on the insulating layer 21 and potting the thermoplastic sealing resin 12 .

步骤S5,在散热器17的背面形成隔断部22,将预先制成的散热皱褶17A固定在散热器17的背面对应于所述功率元件19的位置。Step S5 , forming the partition portion 22 on the back of the heat sink 17 , and fixing the prefabricated heat dissipation folds 17A on the back of the heat sink 17 corresponding to the position of the power element 19 .

具体地,通过切割、撕裂、腐蚀等方式,将所述纸质散热器17的背面的特定位置的材料去除,形成隔断部。Specifically, the material at a specific position on the back of the paper heat sink 17 is removed by means of cutting, tearing, corrosion, etc., to form a partition.

使用湿式碳素复合材料形成皱褶17A,通过耐高温胶水粘接于所述散热器17的背面。The corrugation 17A is formed by wet carbon composite material, and bonded to the back of the radiator 17 by high temperature resistant glue.

进一步地,在步骤S3之前还可以包括:Further, it may also include before step S3:

步骤S6,将装配有各元素的散热器17置于清洗机中进行清洗。In step S6, the radiator 17 equipped with various elements is placed in a cleaning machine for cleaning.

进一步地,在步骤S2之前还可以包括:制成独立的带镀层的引脚11。Further, before the step S2, it may also include: forming an independent pin 11 with plating.

具体地,首先,选取铜基材,对铜基材通过冲压或蚀刻的方式,制成单独的引脚11。Specifically, firstly, a copper substrate is selected, and the copper substrate is stamped or etched to form individual pins 11 .

然后,在所述引脚11表面依次形成镍层和镍锡合金层,得到带镀层的引脚11。Then, a nickel layer and a nickel-tin alloy layer are sequentially formed on the surface of the pin 11 to obtain a plated pin 11 .

进一步地,在上述步骤S5之后还包括:进行模块功能测试。Further, after the above step S5, it also includes: performing a module function test.

以下参照附图对本实施例智能功率模块10的制造工序进行详细阐述。The manufacturing process of the smart power module 10 of this embodiment will be described in detail below with reference to the accompanying drawings.

作为一种较佳实施例,本发明智能功率模块10的制造方法可以包括:形成纸质散热器17及散热皱褶17A的工序,压合绝缘层21上形成电路布线18、焊垫18A的工序;在电路布线18上配置功率元件19、非功率元件14和引脚11的工序;清洗的工序;用金属线15连接所述非功率元件14、功率元件19和所述电路布线16的工序;在纸质散热器17表面配置热硬性树脂框13的工序;使用热塑性树脂12注入模模制方式将上述要素密封的工序;在纸质散热器17背面形成隔断部22并配置散热皱褶17A的工序;进行功能测试的工序。具体工序图如图8所示。As a preferred embodiment, the manufacturing method of the intelligent power module 10 of the present invention may include: the process of forming the paper radiator 17 and the heat dissipation folds 17A, and the process of forming the circuit wiring 18 and the welding pad 18A on the insulating layer 21 ; the process of disposing the power element 19, the non-power element 14 and the pin 11 on the circuit wiring 18; the process of cleaning; the process of connecting the non-power element 14, the power element 19 and the circuit wiring 16 with a metal wire 15; The process of arranging the thermosetting resin frame 13 on the surface of the paper radiator 17; the process of sealing the above elements by injection molding with the thermoplastic resin 12; Process; a process for performing functional tests. The specific process diagram is shown in Figure 8.

以下说明的各工序的详细情况。The details of each step will be described below.

第一工序:参照图3(A)、图3(B)、图3(C)、图3(D)、图39(E)、图3(F)、图3(G)及图3(H)。The first process: refer to Figure 3 (A), Figure 3 (B), Figure 3 (C), Figure 3 (D), Figure 39 (E), Figure 3 (F), Figure 3 (G) and Figure 3 ( h).

图3(A)是本发明实施例第一工序中纸质散热器的主视图;Fig. 3 (A) is the front view of the paper radiator in the first process of the embodiment of the present invention;

图3(B)是图3(A)的X-X’线的截面图;Fig. 3 (B) is the sectional view of the X-X ' line of Fig. 3 (A);

图3(C)是在纸质散热器的正面形成绝缘层和铜箔层的示意图;Fig. 3 (C) is the schematic diagram that forms insulation layer and copper foil layer on the front of paper radiator;

图3(D)是在图3(C)所示的铜箔层上形成电路布线的示意图;Fig. 3 (D) is the schematic diagram that forms circuit wiring on the copper foil layer shown in Fig. 3 (C);

图3(E)是图3(D)的X-X’线的截面图;Fig. 3 (E) is the sectional view of the X-X ' line of Fig. 3 (D);

图3(F)是形成散热皱褶的示意图;FIG. 3(F) is a schematic diagram of forming heat dissipation wrinkles;

图3(G)是为单个引脚的示意图;Figure 3 (G) is a schematic diagram of a single pin;

图3(H)是带有弧度的单个引脚示意图。Figure 3(H) is a schematic diagram of a single pin with arcs.

本发明实施例的第一工序是形成大小合适的湿式碳素复合材料形成纸质散热器17和散热皱褶17A的工序,制成独立的带镀层的引脚11的工序。The first process of the embodiment of the present invention is the process of forming a wet carbon composite material of appropriate size to form the paper radiator 17 and heat dissipation corrugations 17A, and the process of making an independent plated pin 11 .

首先,参照图3(A)和延图3(A)的X-X’线的截面图3(B),根据需要的电路布局设计大小合适的纸质散热器17,对于一般的智能功率模块,一枚的大小可选取64mm×30mm,厚度为1.5mm,对两面进行如涂敷防水胶的防蚀、防水处理。First, referring to Fig. 3(A) and the sectional view 3(B) along the XX' line of Fig. 3(A), design a paper heat sink 17 of appropriate size according to the required circuit layout, for general intelligent power modules , the size of one piece can be selected as 64mm×30mm, and the thickness is 1.5mm, and the two sides are treated with anti-corrosion and waterproof treatment such as coating waterproof glue.

参考图3(C),使用具有角形或球形掺杂的绝缘材料和铜材,通过同时热压的方式,使绝缘材料形成于所述纸质散热器17的表面并作为所述绝缘层21、铜材形成于所述绝缘层21表面作为铜箔层18B。在此,为了提高耐压特性,所述绝缘层21的厚度可以设计为110μm,为了提高散热特性,所述绝缘层21的厚度可以设计为70μm。在此,为了提高通流能力,所述铜箔层18B的厚度可以设计成0.07mm,为了降低成本,所述铜箔层18B的厚度可以设计成0.035mm或0.0175mm。With reference to Fig. 3 (C), use the insulating material and copper material with angular or spherical doping, through the mode of hot pressing at the same time, make insulating material be formed on the surface of described paper radiator 17 and serve as described insulating layer 21, Copper material is formed on the surface of the insulating layer 21 as the copper foil layer 18B. Here, in order to improve the withstand voltage characteristic, the thickness of the insulating layer 21 may be designed to be 110 μm, and in order to improve the heat dissipation characteristic, the thickness of the insulating layer 21 may be designed to be 70 μm. Here, in order to improve the flow capacity, the thickness of the copper foil layer 18B can be designed to be 0.07mm, and in order to reduce the cost, the thickness of the copper foil layer 18B can be designed to be 0.035mm or 0.0175mm.

参考图3(D)和延图3(D)的X-X’线的截面图3(E),将铜箔层18B的特定位置腐蚀掉,剩余部分为电路布线18及焊垫18A。With reference to Fig. 3 (D) and the cross-sectional view 3 (E) of the X-X' line of Fig. 3 (D), the specific position of the copper foil layer 18B is etched away, and the remainder is circuit wiring 18 and welding pad 18A.

参考图3(F),使用厚度为0.5mm的湿式碳素复合材料形成不规则形状,作为所述散热皱褶17A。对两面进行如涂敷防水胶的防蚀、防水处理。Referring to FIG. 3(F), a wet-type carbon composite material having a thickness of 0.5 mm is used to form irregular shapes as the heat dissipation corrugations 17A. Carry out anti-corrosion and waterproof treatment such as coating waterproof glue on both sides.

每个引脚11都是用铜基材,通过冲压或者蚀刻的方式,制成如图3(G)所示,单独的引脚单元为长度C为25mm,宽度K为1.5mm,厚度H为1mm的长条状;在本实施例中,为便于装配,也在引脚单元其中一端压制出90°的弧度,如图3(H)所示;Each pin 11 is made of a copper substrate by stamping or etching, as shown in Figure 3 (G). The individual pin unit has a length C of 25 mm, a width K of 1.5 mm, and a thickness H of 1mm strip; in the present embodiment, for the convenience of assembly, a 90° arc is also pressed at one end of the pin unit, as shown in Figure 3(H);

然后通过化学镀的方法形成镍层,具体包括:The nickel layer is then formed by electroless plating, specifically including:

通过镍盐和次亚磷酸钠混合溶液,并添加了适当的络合剂,在已形成特定形状的铜材表面形成镍层,金属镍具有很强的钝化能力,能迅速生成一层极薄的钝化膜,能抵抗大气、碱和某些酸的腐蚀。镀镍结晶极细小,镍层厚度一般为0.1μm。Through the mixed solution of nickel salt and sodium hypophosphite, and adding an appropriate complexing agent, a nickel layer is formed on the surface of the copper material that has formed a specific shape. Metal nickel has a strong passivation ability and can quickly form an extremely thin layer. The passivation film can resist the corrosion of atmosphere, alkali and some acids. The crystals of nickel plating are extremely small, and the thickness of the nickel layer is generally 0.1 μm.

接着通过酸性硫酸盐工艺,在室温下将已形成形状和镍层的铜材浸在带有正锡离子的镀液中通电,在镍层表面形成形成镍锡合金层,合金层一般控制在5μm,合金层的形成极大提高了引脚的保护性和可焊性。Then, through the acid sulfate process, the copper material with the formed shape and nickel layer is immersed in the plating solution with positive tin ions at room temperature and energized to form a nickel-tin alloy layer on the surface of the nickel layer. The alloy layer is generally controlled at 5 μm , The formation of the alloy layer greatly improves the protection and solderability of the pins.

第二工序:参照图4(A)和图4(B)。The second process: refer to Fig. 4(A) and Fig. 4(B).

图4(A)是本发明实施例第二工序中,装配功率元件、非功率元件及引脚的智能功率模块的侧视图,图4(B)是图4(A)的俯视图。Fig. 4(A) is a side view of an intelligent power module assembled with power components, non-power components and pins in the second process of the embodiment of the present invention, and Fig. 4(B) is a top view of Fig. 4(A).

本发明实施例的第二工序是在所述电路布线18表面装配功率元件19、非功率元件14和在所述焊垫18A表面装配引脚11的工序。The second process of the embodiment of the present invention is a process of assembling the power element 19 and the non-power element 14 on the surface of the circuit wiring 18 and assembling the pin 11 on the surface of the solder pad 18A.

首先,通过锡膏印刷机,使用钢网,对所述绝缘层21上的所述电路布线18的特定位置和所述焊垫18A进行锡膏涂装;在此,为了提高爬锡高度,可使用0.15mm厚度的钢网,为了降低功率器件19和非功率元件14移位的风险,可使用0.12mm厚度的钢网。本实施例中,使用的功率元件19的高度为0.07mm,为比较轻的元器件,所以钢网厚度可以选择0.12mm厚度的钢网,在其他实施例中还可以采用其他合适尺寸,在此不作限定。First, use a stencil to apply solder paste to the specific position of the circuit wiring 18 on the insulating layer 21 and the solder pad 18A by using a solder paste printing machine; A steel mesh with a thickness of 0.15 mm is used, and in order to reduce the risk of displacement of the power device 19 and the non-power element 14, a steel mesh with a thickness of 0.12 mm can be used. In this embodiment, the height of the power element 19 used is 0.07mm, which is a relatively light component, so the thickness of the steel mesh can be selected as a steel mesh with a thickness of 0.12mm. In other embodiments, other suitable sizes can also be used. Here Not limited.

然后,参照侧视图图4(A)和俯视图图4(B),将所述纸质散热器17放置在载具20上,进行所述功率元件19、非功率元件14和引脚11的安装,所述功率元件19和所述非功率元件14可直接放置在所述电路布线18的特定位置,而引脚11则一端要安放在所述焊盘18A上,另一端需要所述载具20上的固定装置20A进行固定,所述载具20和所述固定装置20A通过合成石等材料制成。在此,所述载具20需要进行底部镂空处理,使所述散热皱褶17A露出,所述纸质散热器17背面边缘至少1mm的未被所述散热皱褶17A覆盖的位置与所述载具20接触起支撑作用。Then, with reference to side view Fig. 4 (A) and plan view Fig. 4 (B), described paper radiator 17 is placed on carrier 20, carries out the installation of described power element 19, non-power element 14 and pin 11 , the power element 19 and the non-power element 14 can be placed directly on the specific position of the circuit wiring 18, and one end of the pin 11 should be placed on the pad 18A, and the other end needs the carrier 20 The carrier 20 and the fixing device 20A are made of materials such as synthetic stone. Here, the carrier 20 needs to be hollowed out at the bottom, so that the heat dissipation folds 17A are exposed, and the position of the back edge of the paper heat sink 17 that is at least 1 mm not covered by the heat dissipation folds 17A is in contact with the carrier. Tool 20 contacts and plays a supporting role.

然后,放于所述载具20上的所述纸质散热器17通过回流焊,锡膏固化,所述功率元件19、非功率元件14和所述引脚11被固定。Then, the paper radiator 17 placed on the carrier 20 is reflowed, the solder paste is solidified, and the power components 19 , non-power components 14 and the pins 11 are fixed.

上述过程中,作为一种优选方式,可选用溶解温度为280℃的锡膏。In the above process, as a preferred method, solder paste with a melting temperature of 280° C. can be selected.

需要说明的是,在其他实施方式中,还可以选择银胶或银浆代替上述锡膏。It should be noted that, in other implementation manners, silver glue or silver paste can also be selected to replace the above-mentioned solder paste.

第三工序:The third process:

本发明实施例的第三工序是清洗纸质散热器17的工序。The third process of the embodiment of the present invention is the process of cleaning the paper radiator 17 .

首先将所述纸质散热器17放入清洗机中进行清洗,将回流焊时残留的松香等助焊剂及冲压时残留的铝线等异物洗净,根据所述非功率元件14在所述电路布线18的排布密度,清洗可通过喷淋或超声或两者结合的形式进行。First, put the paper heat sink 17 into a cleaning machine for cleaning, and clean the residual flux such as rosin during reflow soldering and the residual aluminum wire and other foreign matters during stamping. The arrangement density of the wiring 18 and the cleaning can be performed by spraying or ultrasonic or a combination of both.

清洗时,通过机械臂夹持所述引脚11,将所述纸质散热器17置于清洗槽中,并要注意不要让机械臂触碰所述纸质散热器17,因为所述纸质散热器17具有脆性并容易形变,如果机械臂夹持所述纸质散热器17,在清洗时产生的震动,容易造成所述纸质散热器17发生崩裂。When cleaning, clamp the pin 11 by the mechanical arm, place the paper heat sink 17 in the cleaning tank, and be careful not to let the mechanical arm touch the paper heat sink 17, because the paper heat sink 17 The radiator 17 is brittle and easily deformed. If the mechanical arm clamps the paper radiator 17, the vibration generated during cleaning may easily cause the paper radiator 17 to crack.

第四工序:参照图5(A)和图5(B),图5(A)是本发明实施例第五工序中,通过金属线使功率元件、非功率元件、散热器和电路布线间形成连接的侧视图,图5(B)是图5(A)的俯视图。The fourth process: Referring to Figure 5(A) and Figure 5(B), Figure 5(A) is the fifth process of the embodiment of the present invention, through metal wires to form between power elements, non-power elements, heat sinks and circuit wiring The side view of the connection, Fig. 5(B) is the top view of Fig. 5(A).

本发明实施例的第四工序是通过金属线(也可以称为绑定线),使所述功率元件19、非功率元件14、散热器17和所述电路布线18间形成连接的工序。The fourth step in the embodiment of the present invention is a step of connecting the power element 19 , the non-power element 14 , the heat sink 17 and the circuit wiring 18 through metal wires (also called binding wires).

根据通流能力需要,选择适当直径的铝线作为金属线,对于用于信号控制的集成电路,也可考虑使用金线作为金属线。在本实施例中,全部选择铝线,一般来说,对所述功率元件19的邦定使用350μm~400μm的铝线,对所述非功率元件14的邦定使用38μm~200μm的铝线,对所述散热器17的邦定使用350μm~400μm的铝线。According to the needs of flow capacity, choose aluminum wires with appropriate diameters as metal wires. For integrated circuits used for signal control, you can also consider using gold wires as metal wires. In this embodiment, all aluminum wires are selected. Generally speaking, aluminum wires of 350 μm to 400 μm are used for the bonding of the power elements 19, and aluminum wires of 38 μm to 200 μm are used for the bonding of the non-power elements 14. Aluminum wires of 350 μm to 400 μm are used for bonding the heat sink 17 .

此工序完成后的制品可以参照侧视图图5(A)和俯视图图5(B)。The finished product after this process can refer to the side view Fig. 5(A) and the top view Fig. 5(B).

其中通过金属线使功率元件19、非功率元件14、散热器13和电路布线18间连接,形成相应的电路。Among them, the power element 19, the non-power element 14, the heat sink 13 and the circuit wiring 18 are connected by metal wires to form a corresponding circuit.

如图5(B)所示,所述电路单元1001实现所述桥堆功能、所述电路单元1002实现所述压缩机逆变功能、所述电路单元1003实现所述功率因素校正功能、所述电路单元1004实现所述风机逆变功能。As shown in FIG. 5(B), the circuit unit 1001 realizes the bridge stack function, the circuit unit 1002 realizes the compressor inverter function, the circuit unit 1003 realizes the power factor correction function, and the The circuit unit 1004 implements the fan inverter function.

第五工序:参照图6(A)、图6(B)和图6(C)。The fifth step: refer to FIG. 6(A), FIG. 6(B) and FIG. 6(C).

图6(A)是本发明实施例第五工序中,绝缘层上装配预先制成的热硬性树脂框的侧视图,图6(B)是图6(A)的俯视图,图6(C)是本发明实施例第五工序中,在热硬性树脂框中灌封热塑性树脂的侧视图。Fig. 6 (A) is the side view of prefabricated thermosetting resin frame assembled on the insulating layer in the fifth process of the embodiment of the present invention, Fig. 6 (B) is the top view of Fig. 6 (A), Fig. 6 (C) It is a side view of the thermoplastic resin potting in the thermosetting resin frame in the fifth process of the embodiment of the present invention.

本发明实施例的第五工序是在所述绝缘层21上装配热硬性树脂框13并灌封热塑性树脂12的工序。The fifth process of the embodiment of the present invention is the process of assembling the thermosetting resin frame 13 on the insulating layer 21 and potting the thermoplastic resin 12 .

首先,通过绝缘红胶等非导电性热固性胶水在所述绝缘层21上贴附矩形短边上带有通孔的所述热硬性树脂框13,并在无氧环境中对贴附所述热硬性树脂框13的所述纸质散热器17进行烘烤,烘烤时间不应小于2小时,烘烤温度和选择175℃,使所述热硬性树脂框13被固定在所述绝缘层21上,参见侧视图图6(A)和俯视图图6(B)。在此,所述热硬性树脂框13的高度必须高于所述金属线15的高度。First, stick the thermosetting resin frame 13 with a through hole on the short side of the rectangle on the insulating layer 21 through non-conductive thermosetting glue such as insulating red glue, and attach the thermosetting resin frame 13 in an oxygen-free environment. The paper radiator 17 of the hard resin frame 13 is baked, the baking time should not be less than 2 hours, and the baking temperature is 175°C, so that the thermosetting resin frame 13 is fixed on the insulating layer 21 , see side view Figure 6(A) and top view Figure 6(B). Here, the height of the thermosetting resin frame 13 must be higher than that of the metal wire 15 .

然后,向所述热硬性树脂框13内注入热塑性树脂12,直到所述热硬性数值框13被填满。所述热塑性树脂12的注入温度为150℃,冷却后,所述热塑性树脂12将所述纸质散热器17上的所有元素密封,只有所述引脚11部分露出。Then, inject thermoplastic resin 12 into the thermosetting resin frame 13 until the thermosetting value frame 13 is filled. The injection temperature of the thermoplastic resin 12 is 150° C. After cooling, the thermoplastic resin 12 seals all elements on the paper radiator 17 , and only the pins 11 are partially exposed.

第六工序:参照图7(A)、图7(B)和图7(C)。The sixth process: refer to Fig. 7(A), Fig. 7(B) and Fig. 7(C).

图7(A)是本发明实施例第六工序中,在热硬性树脂框上形成用于安装智能功率模块的通孔的俯视图,图7(B)是本发明实施例第六工序中,在散热器的背面形成隔断部并在功率元件对应位置粘贴散热皱褶的仰视图,图7(C)是图7(B)的X-X’线的截面图。Fig. 7(A) is a top view of the through hole for installing the intelligent power module formed on the thermosetting resin frame in the sixth process of the embodiment of the present invention, and Fig. 7(B) is the sixth process of the embodiment of the present invention, in The back of the heat sink forms a partition and sticks heat dissipation corrugations on the corresponding positions of the power components. Fig. 7(C) is a cross-sectional view along line XX' of Fig. 7(B).

本发明实施例的第六工序是形成通孔16、隔断部22,并固定所述散热皱褶17A的工序。智能功率模块经由此工序作为制品完成。The sixth process of the embodiment of the present invention is the process of forming the through hole 16 and the partition portion 22 and fixing the heat dissipation folds 17A. The intelligent power module is completed as a finished product through this process.

参考图7(A),通过打孔器等方式,在所述热硬性树脂13的通孔处将所述绝缘层21和所述纸质散热器17打穿,形成通孔16。所述通孔16用于所述智能功率模块10的装配。Referring to FIG. 7(A), the insulating layer 21 and the paper radiator 17 are punched through the through hole of the thermosetting resin 13 by means of a puncher or the like to form a through hole 16 . The through hole 16 is used for assembling the smart power module 10 .

参考图7(B),通过切割、撕裂、腐蚀等方式,在所述纸质散热器17背面的特定位置进行处理,使特定位置的纸质散热材料被去除,形成所述隔断部22,所述隔断部22两侧为不同功能电路的发热功率元件群。纸质散热材料可以部分去除,也可以全部去除露出所述绝缘层21,本实施例为了取得更好的热隔离效果,采用全部去除方式,采用纸质散热材料全部在所述隔断部22中去除的方式时,注意不要在所述绝缘层21上形成划伤。Referring to FIG. 7(B), by cutting, tearing, corroding, etc., a specific position on the back of the paper heat sink 17 is processed, so that the paper heat dissipation material at the specific position is removed to form the partition portion 22, The two sides of the partition 22 are heating power element groups with different functional circuits. The paper heat dissipation material can be partially removed, or all of it can be removed to expose the insulating layer 21. In order to obtain a better thermal isolation effect in this embodiment, the entire removal method is adopted, and the paper heat dissipation material is completely removed in the partition part 22. In this manner, care should be taken not to form scratches on the insulating layer 21 .

参考图7(C),使用耐受温度在150℃以上的耐高温胶水,将所述散热皱褶17A粘附在所述纸质散热器17的背面,在此,所述散热皱褶17A位于所述功率元件19的背面被所述隔断部22包围,并在所述纸质散热器17的背面的短边边缘的距离至少2mm,确保不对所述通孔16形成遮挡。Referring to FIG. 7(C), the heat-dissipating folds 17A are adhered to the back of the paper heat sink 17 by using high-temperature-resistant glue with a temperature resistance above 150°C. Here, the heat-dissipating folds 17A are located The back of the power element 19 is surrounded by the partition 22 , and the distance from the short edge of the back of the paper heat sink 17 is at least 2 mm to ensure that the through hole 16 is not blocked.

然后将智能功率模块10放入测试设备中,进行常规的电参数测试,一般包括绝缘耐压、静态功耗、迟延时间等测试项目,测试合格者为成品。Then put the intelligent power module 10 into the test equipment, and conduct conventional electrical parameter tests, generally including test items such as insulation withstand voltage, static power consumption, and delay time, and those that pass the test are finished products.

利用上述工序,即完成图2(A)、图2(B)、图2(C)及图2(D)所示的智能功率模块10。Using the above process, the smart power module 10 shown in FIG. 2(A), FIG. 2(B), FIG. 2(C) and FIG. 2(D) is completed.

本发明提出的一种智能功率模块及其制造方法,在智能功率模块中引入作为载体的纸质散热器,并在纸质散热器的背面设置隔断部,散热器背面对应于功率元件的位置设置散热皱褶,散热面积极大增加,绝缘层无需使用高导热材料即可满足功率元件散热要求;而且功率元件的大部分热量被迅速散出而不传导到非功率元件,使非功率元件始终工作在低温环境中,非功率元件的温飘极大减小,并且不同功能的所述功率元件群因隔断部的存在极大地减小了热串扰,各发热部分的发热虽互不相同但极少相互间传导而通过所述皱褶散失,提高了智能功率模块的电性能和热稳定性;本发明采用重量更轻的纸质散热器,对加工时所用载具要求低,定位容易,降低了制造成本,提高了过程合格率;省去将功率元件贴装到内部散热器的工序,降低了设备投资费用。The invention proposes an intelligent power module and its manufacturing method. A paper heat sink as a carrier is introduced into the intelligent power module, and a partition part is set on the back of the paper heat sink. The back of the heat sink is set corresponding to the position of the power element. Heat dissipation folds, the heat dissipation area is greatly increased, and the insulation layer can meet the heat dissipation requirements of power components without using high thermal conductivity materials; moreover, most of the heat of power components is quickly dissipated without being conducted to non-power components, so that non-power components always work In a low-temperature environment, the temperature drift of non-power components is greatly reduced, and the existence of the partition part of the power component group with different functions greatly reduces thermal crosstalk. Although the heat generation of each heat-generating part is different, it is very little Conduction between each other and dissipate through the wrinkles improves the electrical performance and thermal stability of the intelligent power module; the invention adopts a lighter paper heat sink, which has low requirements for the carrier used in processing, easy positioning, and reduces the The manufacturing cost is improved, and the pass rate of the process is improved; the process of mounting power components to the internal heat sink is omitted, which reduces equipment investment costs.

上述仅为本发明的优选实施例,并非因此限制本发明的专利范围,凡是利用本发明说明书及附图内容所作的等效结构或流程变换,或直接或间接运用在其它相关的技术领域,均同理包括在本发明的专利保护范围内。The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or process transformation made by using the description of the present invention and the contents of the accompanying drawings, or directly or indirectly used in other related technical fields, shall be The same reasoning is included in the patent protection scope of the present invention.

Claims (17)

1.一种智能功率模块,包括电路布线、设置在所述电路布线预定位置的功率元件和非功率元件,其特征在于,还包括作为载体的纸质散热器,所述散热器的一面作为正面覆盖有绝缘层,所述电路布线设置在所述绝缘层上远离所述散热器的一面;所述散热器的另一面作为背面,在对应所述功率元件的位置设置有用于散热的皱褶,所述散热器的背面设置有隔断部。1. An intelligent power module, comprising circuit wiring, power components and non-power components arranged at predetermined positions of the circuit wiring, characterized in that it also includes a paper heat sink as a carrier, and one side of the heat sink is used as the front Covered with an insulating layer, the circuit wiring is arranged on the side of the insulating layer away from the heat sink; the other side of the heat sink is used as the back side, and corrugations for heat dissipation are provided at positions corresponding to the power components, A partition is provided on the back of the radiator. 2.根据权利要求1所述的智能功率模块,其特征在于,所述功率元件与所述非功率元件之间具有设定间隔区,所述隔断部设置在散热器的背面上对应所述间隔区的位置,所述隔断部的宽度为1mm~5mm。2. The intelligent power module according to claim 1, characterized in that there is a set interval between the power element and the non-power element, and the partition is arranged on the back of the radiator corresponding to the interval The position of the zone, the width of the partition part is 1 mm to 5 mm. 3.根据权利要求1或2所述的智能功率模块,其特征在于,还包括用于连接所述电路布线、所述功率元件和所述非功率元件以构成相应电路的金属线。3. The intelligent power module according to claim 1 or 2, further comprising a metal wire for connecting the circuit wiring, the power element and the non-power element to form a corresponding circuit. 4.根据权利要求3所述的智能功率模块,其特征在于,还包括配置在所述功率模块边缘、与所述电路布线连接并向与所述皱褶相反的方向延伸作为输入输出的引脚。4. The intelligent power module according to claim 3, further comprising pins disposed on the edge of the power module, connected to the circuit wiring, and extending in a direction opposite to the wrinkle as input and output pins . 5.根据权利要求4所述的智能功率模块,其特征在于,沿所述绝缘层边缘设有热硬性树脂框,所述电路布线、所述功率元件和非功率元件、金属线,以及所述引脚与电路布线的连接部分由热塑性树脂封装,所述热塑性树脂填充所述热硬性树脂框。5. The intelligent power module according to claim 4, characterized in that a thermosetting resin frame is provided along the edge of the insulating layer, the circuit wiring, the power components and non-power components, metal wires, and the A connection portion of the pin and the circuit wiring is encapsulated by a thermoplastic resin filling the thermosetting resin frame. 6.根据权利要求5所述的智能功率模块,其特征在于,所述热硬性树脂框上设置有用于安装所述智能功率模块的通孔,所述通孔贯穿所述热硬性树脂框、所述绝缘层和所述纸质散热器。6. The intelligent power module according to claim 5, wherein the thermosetting resin frame is provided with a through hole for installing the intelligent power module, and the through hole penetrates the thermosetting resin frame, the The insulating layer and the paper radiator. 7.根据权利要求5所述的智能功率模块,其特征在于,所述电路布线在所述绝缘层的至少一边缘形成一个或多个焊垫;所述多个焊垫沿所述绝缘层的边缘对准排列;所述引脚通过所述焊垫固定,并与所述电路布线连接。7. The intelligent power module according to claim 5, wherein the circuit wiring forms one or more welding pads on at least one edge of the insulating layer; the plurality of welding pads are formed along the edge of the insulating layer arranged in edge alignment; the pins are fixed through the pads and connected to the circuit wiring. 8.根据权利要求1所述的智能功率模块,其特征在于,所述散热器和所述皱褶均为湿式碳素复合材料功能纸;所述散热器与所述皱褶粘接或者一体制成;所述散热器的厚度为1.5mm~2.5mm,所述散热器的厚度大于所述皱褶的厚度。8. The intelligent power module according to claim 1, characterized in that, the heat sink and the pleats are both wet carbon composite material functional paper; the heat sink and the pleats are bonded or integrated into; the thickness of the heat sink is 1.5 mm to 2.5 mm, and the thickness of the heat sink is greater than the thickness of the folds. 9.根据权利要求3所述的智能功率模块,其特征在于,所述功率元件、所述非功率元件、所述电路布线、所述金属线组成的电路,具有桥堆、压缩机逆变以及功率因素校正功能,或者具有桥堆、压缩机逆变、功率因素校正以及风机逆变功能。9. The intelligent power module according to claim 3, characterized in that, the circuit composed of the power element, the non-power element, the circuit wiring, and the metal wire has a bridge stack, a compressor inverter, and Power factor correction function, or bridge stack, compressor inverter, power factor correction and fan inverter function. 10.一种智能功率模块制造方法,其特征在于,包括以下步骤:10. A method for manufacturing an intelligent power module, comprising the following steps: 形成纸质散热器,在所述散热器的正面覆盖绝缘层,在绝缘层表面形成电路布线和焊垫;Forming a paper heat sink, covering the front of the heat sink with an insulating layer, and forming circuit wiring and welding pads on the surface of the insulating layer; 在所述电路布线的表面装配功率元件、非功率元件,以及在所述焊垫的表面装配预先制成的引脚;assembling power components and non-power components on the surface of the circuit wiring, and assembling prefabricated pins on the surface of the pad; 通过金属线将所述功率元件、非功率元件以及所述电路布线间连接形成相应的电路;Connecting the power elements, non-power elements and the circuit wiring through metal wires to form corresponding circuits; 在所述绝缘层上装配预先制成的热硬性树脂框并灌封热塑性树脂;Assembling a prefabricated thermosetting resin frame on the insulating layer and potting thermoplastic resin; 在所述散热器的背面形成隔断部,将预先制成的散热皱褶固定在所述散热器的背面对应于所述功率元件的位置。A partition is formed on the back of the heat sink, and the prefabricated heat dissipation folds are fixed on the back of the heat sink corresponding to the position of the power element. 11.根据权利要求10所述的智能功率模块的制造方法,其特征在于,所述通过金属线将所述功率元件、非功率元件以及所述电路布线间连接形成相应的电路的步骤之前还包括:11. The manufacturing method of an intelligent power module according to claim 10, characterized in that, before the step of connecting the power element, the non-power element and the circuit wiring through metal wires to form a corresponding circuit, it further comprises : 将装配有各元素的散热器置于清洗机中进行清洗。Place the radiator with the elements assembled in the washing machine for cleaning. 12.根据权利要求10所述的智能功率模块的制造方法,其特征在于,所述在电路布线的表面装配功率元件、非功率元件,以及在所述焊垫的表面装配预先制成的引脚的步骤之前还包括:12. The manufacturing method of an intelligent power module according to claim 10, characterized in that assembling power components and non-power components on the surface of the circuit wiring, and assembling prefabricated pins on the surface of the solder pads Before the steps also include: 制成独立的带镀层的引脚;具体包括:Manufactured as a separate plated lead; specifically includes: 选取铜基材,对铜基材通过冲压或蚀刻的方式,制成独立的引脚;Select the copper substrate, and make independent pins on the copper substrate by stamping or etching; 在所述引脚表面依次形成镍层和镍锡合金层,得到带镀层的引脚。A nickel layer and a nickel-tin alloy layer are sequentially formed on the surface of the pin to obtain a plated pin. 13.根据权利要求12所述的智能功率模块的制造方法,其特征在于,所述制成独立的带镀层的引脚的步骤之后还包括:13. The method for manufacturing an intelligent power module according to claim 12, characterized in that, after the step of making independent pins with plating, it further comprises: 制成独立的热硬性树脂框;Made into an independent thermosetting resin frame; 具体为:通过传递模的方式模制独立的热硬性树脂框。Specifically, an independent thermosetting resin frame is molded by means of a transfer mold. 14.根据权利要求13所述的智能功率模块的制造方法,其特征在于,所述在所述绝缘层上装配预先制成的热硬性树脂框并灌封热塑性树脂的步骤包括:14. The manufacturing method of an intelligent power module according to claim 13, wherein the step of assembling a prefabricated thermosetting resin frame on the insulating layer and potting thermoplastic resin comprises: 在热硬性树脂框上形成用于安装所智能功率模块的通孔;forming a through hole for installing the intelligent power module on the thermosetting resin frame; 将所述带有通孔的热硬性树脂框装配在所述绝缘层上;assembling the thermosetting resin frame with through holes on the insulating layer; 在所述热硬性树脂的通孔处将所述绝缘层和所述纸质散热器打穿,使所述通孔贯穿所述绝缘层和所述纸质散热器。The insulating layer and the paper heat sink are pierced at the through holes of the thermosetting resin, so that the through holes penetrate the insulating layer and the paper heat sink. 15.根据权利要求14所述的智能功率模块的制造方法,其特征在于,所述在所述散热器的背面形成隔断部,将预先制成的散热皱褶固定在所述散热器的背面对应于所述功率元件的位置的步骤之后还包括:15. The manufacturing method of an intelligent power module according to claim 14, characterized in that, the partition part is formed on the back of the heat sink, and the prefabricated heat dissipation folds are fixed on the back of the heat sink to correspond to After the step of positioning the power element, it also includes: 进行模块功能测试。Carry out module function test. 16.根据权利要求10-15中任一项所述的智能功率模块的制造方法,其特征在于,所述形成纸质散热器,在所述散热器的正面覆盖绝缘层,在绝缘层表面形成电路布线和焊垫的步骤包括:16. The manufacturing method of an intelligent power module according to any one of claims 10-15, characterized in that, in the formation of a paper heat sink, an insulating layer is covered on the front of the heat sink, and an insulating layer is formed on the surface of the insulating layer The steps for circuit routing and pads include: 根据设定的电路布局选取预定尺寸的湿式碳素复合材料形成纸质散热器;According to the set circuit layout, a wet carbon composite material with a predetermined size is selected to form a paper radiator; 在散热器的正面,使用绝缘材料和铜材,通过热压的方式,使绝缘材料形成于所述散热器的表面并作为所述绝缘层,使铜材形成于所述绝缘层的表面作为铜箔层;On the front side of the radiator, insulating material and copper are used, and the insulating material is formed on the surface of the radiator as the insulating layer by hot pressing, and the copper is formed on the surface of the insulating layer as the copper foil layer; 将所述铜箔层的特定位置腐蚀掉,剩余部分形成电路布线及焊垫;Corroding a specific position of the copper foil layer, and forming circuit wiring and welding pads in the remaining part; 所述在所述散热器的背面形成隔断部,将预先制成的散热皱褶固定在所述散热器的背面对应于所述功率元件的位置的步骤包括:The step of forming a partition on the back of the heat sink and fixing the prefabricated heat dissipation folds on the back of the heat sink at a position corresponding to the power element includes: 通过切割、撕裂、腐蚀等方式,将所述纸质散热器的背面的特定位置的材料去除,形成隔断部。By cutting, tearing, corroding, etc., the material at a specific position on the back of the paper heat sink is removed to form a partition. 使用湿式碳素复合材料形成皱褶,通过耐高温胶水粘接于所述散热器的背面对应于功率元件的位置。Wet carbon composite material is used to form folds, which are bonded to the back of the heat sink corresponding to the position of the power element by high temperature resistant glue. 17.根据权利要求16所述的智能功率模块的制造方法,其特征在于,所述在电路布线的表面装配功率元件、非功率元件,以及在所述焊垫的表面装配预先制成的引脚的步骤中包括:17. The manufacturing method of an intelligent power module according to claim 16, characterized in that assembling power components and non-power components on the surface of the circuit wiring, and assembling prefabricated pins on the surface of the solder pads The steps include: 通过锡膏或银胶将所述功率元件、非功率元件及引脚固定。The power components, non-power components and pins are fixed by solder paste or silver glue.
CN201510129237.4A 2015-03-23 2015-03-23 SPM and its manufacture method Expired - Fee Related CN104835794B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201510129237.4A CN104835794B (en) 2015-03-23 2015-03-23 SPM and its manufacture method
US15/559,834 US10615155B2 (en) 2015-03-23 2016-03-23 Intelligent power module and manufacturing method thereof
JP2018500841A JP6500162B2 (en) 2015-03-23 2016-03-23 Intelligent power module and manufacturing method thereof
PCT/CN2016/077143 WO2016150391A1 (en) 2015-03-23 2016-03-23 Smart power module and manufacturing method therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510129237.4A CN104835794B (en) 2015-03-23 2015-03-23 SPM and its manufacture method

Publications (2)

Publication Number Publication Date
CN104835794A true CN104835794A (en) 2015-08-12
CN104835794B CN104835794B (en) 2018-02-02

Family

ID=53813580

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510129237.4A Expired - Fee Related CN104835794B (en) 2015-03-23 2015-03-23 SPM and its manufacture method

Country Status (1)

Country Link
CN (1) CN104835794B (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016150391A1 (en) * 2015-03-23 2016-09-29 广东美的制冷设备有限公司 Smart power module and manufacturing method therefor
CN109194243A (en) * 2018-10-31 2019-01-11 广东美的制冷设备有限公司 Electric appliance and intelligent power module
CN109510562A (en) * 2019-01-02 2019-03-22 广东美的暖通设备有限公司 Power modules, air conditioners
CN109510561A (en) * 2018-12-29 2019-03-22 广东美的制冷设备有限公司 Highly integrated power module and air conditioner
CN110289230A (en) * 2019-06-17 2019-09-27 广东美的制冷设备有限公司 Manufacturing tooling and method of intelligent power module
CN113035605A (en) * 2021-02-26 2021-06-25 联合汽车电子有限公司 Fixing structure of switch device and mounting method thereof
US12068680B2 (en) 2018-12-29 2024-08-20 Gd Midea Air-Conditioning Equipment Co., Ltd. Highly integrated power module and electrical appliance

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002099878A1 (en) * 2001-05-30 2002-12-12 International Rectifier Corporation Power semiconductor module
CN102484103A (en) * 2009-08-31 2012-05-30 阿波制纸株式会社 Paper sheet radiator
CN102687270A (en) * 2010-01-15 2012-09-19 三菱电机株式会社 Power semiconductor module
CN104112719A (en) * 2013-08-22 2014-10-22 广东美的制冷设备有限公司 Hybrid integrated circuit module and manufacturing method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002099878A1 (en) * 2001-05-30 2002-12-12 International Rectifier Corporation Power semiconductor module
CN102484103A (en) * 2009-08-31 2012-05-30 阿波制纸株式会社 Paper sheet radiator
CN102687270A (en) * 2010-01-15 2012-09-19 三菱电机株式会社 Power semiconductor module
CN104112719A (en) * 2013-08-22 2014-10-22 广东美的制冷设备有限公司 Hybrid integrated circuit module and manufacturing method thereof

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016150391A1 (en) * 2015-03-23 2016-09-29 广东美的制冷设备有限公司 Smart power module and manufacturing method therefor
US10615155B2 (en) 2015-03-23 2020-04-07 Gd Midea Airconditioning Equipment Co., Ltd. Intelligent power module and manufacturing method thereof
CN109194243A (en) * 2018-10-31 2019-01-11 广东美的制冷设备有限公司 Electric appliance and intelligent power module
CN109510561A (en) * 2018-12-29 2019-03-22 广东美的制冷设备有限公司 Highly integrated power module and air conditioner
CN109510561B (en) * 2018-12-29 2024-05-24 广东美的制冷设备有限公司 Highly integrated power modules and air conditioners
US12068680B2 (en) 2018-12-29 2024-08-20 Gd Midea Air-Conditioning Equipment Co., Ltd. Highly integrated power module and electrical appliance
CN109510562A (en) * 2019-01-02 2019-03-22 广东美的暖通设备有限公司 Power modules, air conditioners
CN110289230A (en) * 2019-06-17 2019-09-27 广东美的制冷设备有限公司 Manufacturing tooling and method of intelligent power module
CN110289230B (en) * 2019-06-17 2021-05-28 广东美的制冷设备有限公司 Manufacturing tooling and method of intelligent power module
CN113035605A (en) * 2021-02-26 2021-06-25 联合汽车电子有限公司 Fixing structure of switch device and mounting method thereof
CN113035605B (en) * 2021-02-26 2024-04-16 联合汽车电子有限公司 Fixing structure of switching device and mounting method thereof

Also Published As

Publication number Publication date
CN104835794B (en) 2018-02-02

Similar Documents

Publication Publication Date Title
JP6500162B2 (en) Intelligent power module and manufacturing method thereof
CN104835794B (en) SPM and its manufacture method
CN104767417B (en) Control circuit, intelligent power module and its manufacturing method of intelligent power module
CN204481692U (en) Intelligent power module
TWI448226B (en) Power conversion module
US20250070055A1 (en) Power module, power supply system, vehicle, and photovoltaic system
CN104795374B (en) SPM and its manufacture method
JP6945418B2 (en) Semiconductor devices and manufacturing methods for semiconductor devices
JPWO2016136457A1 (en) Power module
CN113782504A (en) Simplified packaging structure of power module of integrated radiator and manufacturing method
JP2013254973A (en) Method for manufacturing power module package
CN104303299B (en) Method for manufacturing semiconductor device and semiconductor device
CN104766842B (en) SPM and its manufacture method
JPH11204724A (en) Power module
CN113314515A (en) Semiconductor circuit and method for manufacturing semiconductor circuit
CN104795378B (en) Intelligent power module and its manufacture method
CN207381382U (en) Electric power electronic module and power electric component package substrate
CN104767396B (en) SPM and its manufacture method
CN104795974A (en) Intelligent power module, control circuit of intelligent power module and manufacturing method of intelligent power module
CN105047623B (en) SPM and its manufacture method
CN106158801A (en) A kind of SPM and manufacture method thereof
CN216413057U (en) Semiconductor circuit having a plurality of transistors
CN204558448U (en) Intelligent power module
CN204559407U (en) Intelligent power module
CN104795388A (en) Intelligent power module and manufacturing method thereof

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
EXSB Decision made by sipo to initiate substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180202