CN104749102A - System for measuring concentration of trace substance - Google Patents

System for measuring concentration of trace substance Download PDF

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Publication number
CN104749102A
CN104749102A CN 201310731440 CN201310731440A CN104749102A CN 104749102 A CN104749102 A CN 104749102A CN 201310731440 CN201310731440 CN 201310731440 CN 201310731440 A CN201310731440 A CN 201310731440A CN 104749102 A CN104749102 A CN 104749102A
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trace
fiber
coreless
light
measurement system
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CN 201310731440
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Chinese (zh)
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吴砺
张新汉
林志强
李俊梅
刘鸿飞
林磊
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福州高意光学有限公司
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Abstract

The invention discloses a system for measuring a concentration of a trace substance. The system comprises a light source, a light splitting unit, a coupling unit, coreless optical fibers and a second detector arranged along an optical path, and also comprises a first detector arranged at one side of the light splitting unit. The coreless optical fibers are not overlaid and are wound on an optical fiber support side by side. The light splitting unit splits lights emitted by the light source into reference light and signal light, and the reference light directly enters into the first detector. The signal light is coupled to the coreless optical fibers by the coupling unit and enters into the second detector by the coreless optical fibers. Through skin effects of laser propagated in the coreless optical fiber with the diameter close to a fundamental wave diameter, the signal light propagated in the coreless optical fiber can be absorbed by a substance to be detected and is used for trace substance detection so that detection of signal light in an absorption cell is greatly improved and spectral detection sensitivity is effectively improved. The system has a small volume, can be carried conveniently, is suitable for continuous, real time and fast remote sensing monitoring of gaseous and liquid trace substances, and has a low making cost.

Description

一种痕量物质浓度测量系统 One trace substance concentration measurement system

技术领域 FIELD

[0001] 本发明涉及光学检测领域,尤其涉及一种痕量物质浓度测量系统。 [0001] The present invention relates to the field of optical detection, particularly to a trace substance concentration measurement system.

背景技术 Background technique

[0002] 随着光学技术的发展,越来越多的光学探测手段被运用于大气痕量气体和液体浓度的测量领域。 [0002] With the development of optical technology, more and more optical detection means is applied to the field of measuring the concentration of trace gas and liquid air. 与传统的取样和接触式化学测量方法相比,光谱测量方法抽取方便简单,能够测量痕量气体的绝对浓度而不改变他们的化学性质,并可实现对大范围大气污染的连续、实时、快速的遥感监测。 Compared with a conventional sampling and chemical contact measurement, spectral measurement convenient and simple extraction method, capable of measuring the absolute concentration of the trace gas without changing their chemical properties, and to achieve a wide range of atmospheric pollution continuous, real-time, fast remote sensing monitoring.

[0003]大气痕量气体如 CO2、CH4、CO、NO、N3O4、NH3、SO2、C2H2、C2H4、C2H6 等,他们在大气中的浓度主要在ppt-ppm量级范围,光谱技术的探测灵敏度高,一般可达到ppbv-pptv等级。 [0003] atmospheric trace gases such as CO2, CH4, CO, NO, N3O4, NH3, SO2, C2H2, C2H4, C2H6, etc., their concentration in the atmosphere, mainly in the detection sensitivity on the order of ppt-ppm range, high Spectroscopy , and can be reached ppbv-pptv level.

[0004] 可调谐二极管激光吸收光谱(TDLAS)技术是利用二极管激光器的波长调谐特性,获得被选定的待测气体特征吸收光谱,从而对污染气体进行定性或定量分析。 [0004] The tunable diode laser absorption spectroscopy (the TDLAS) is a technique using a wavelength tunable laser diode characteristics, obtaining a selected gas to be measured characteristic absorption spectrum, thereby contaminating gases qualitative or quantitative analysis. 在大气痕量气体和气体泄漏中,为了提高探测灵敏度,在选用某一种激光调制技术如波长调制,振幅调制,频率或相位调制等的条件下,还需要和长光程吸收池相结合使用,才能发挥出光谱技术高灵敏度的优势。 And trace gases in the atmosphere gas leakage, in order to improve the detection sensitivity, in the selection of a certain kind of modulation techniques such as laser wavelength modulation, amplitude modulation, frequency modulation or phase conditions, and required long path absorption cell used in combination in order to play the advantages of high sensitivity spectroscopy.

[0005] 传统吸收池的光程一般为光学反射腔,通过腔镜的调节实现测试光在腔内来回反射。 [0005] Traditional optical path of absorption cell is generally reflective optical cavity, to achieve the test light reflected back and forth within the cavity by adjusting the mirrors. 此类腔可实现光程有限,一般在几米或几十米范围内。 Such cavities may be implemented finite optical path, typically in the range of a few meters or tens of meters. 如果要提高吸收池的光程,则需要增加吸收池的体积。 To increase the optical path of absorption cell, it is necessary to increase the volume of the absorption cell. 而这会降低设备的便携性。 This reduces the portability of the device.

发明内容 SUMMARY

[0006] 本发明的目的在于提供一种便携的痕量物质浓度测量系统,可大大提高检测信号光在吸收池里的光程,从而提高检测灵敏度,适用于气体痕量物质和液体痕量物质的测量。 [0006] The object of the present invention is to provide a portable trace substance concentration measurement system, the detection signal can greatly improve the light absorption of the optical path of the pool, thereby improving the detection sensitivity for trace gaseous substance and a liquid trace species Measurement.

[0007] 为达到上述目的,本发明提供的技术方案为:一种痕量物质浓度测量系统,包括依光路设置的光源、分光单元、耦合单元、无芯光纤、第二探测器,以及设于分光单元一侧的第一探测器;所述无芯光纤无叠加并排缠绕在一光纤支架上;所述分光单元将光源发出的光分为参考光和信号光,所述参考光直接入射到第一探测器,所述信号光经耦合单元耦合到无芯光纤内,经无芯光纤入射到第二探测器;所述无芯光纤直径接近信号光基波直径,所述信号光在无芯光纤内传输过程中,信号光趋于光纤表面,可被待测痕量物质吸收。 [0007] To achieve the above object, the present invention provides the technical solution as follows: one trace substance concentration measurement system, comprising a light source, a spectroscopic unit, a coupling unit, coreless fiber by an optical path setting, a second detector, and provided a first detector of the spectroscopic unit side; the non-overlapping parallel coreless fiber wound on a fiber holder; the spectroscopic unit light source emits reference light and signal light into the reference light is directly incident on the a detector, the optical signal coupling unit is coupled to the coreless fiber, the coreless fiber incident on the second detector; the coreless fiber diameter close to the diameter of a fundamental wave of the signal light, the signal light coreless fiber the transmission process, the signal light tends surface of the fiber, it can be absorbed by the test trace substances.

[0008] 进一步的,所述光纤支架为单层支架,或为多个支架嵌套设置。 [0008] Further, the optical fiber holder is a single stent or multiple stents to be nested set.

[0009] 进一步的,缠绕于所述嵌套的各个支架上的无芯光纤首尾相互熔接在一起。 Coreless fiber end to end on each of the brackets [0009] Further, wound around each of the nested welded together.

[0010] 进一步的,所述光纤支架表面涂覆有低折射率膜层,所述低折射率膜层的折射率小于所述无芯光纤的折射率。 [0010] Further, the surface of the optical fiber holder is coated with a low refractive index layer, the low refractive index film layer is smaller than the refractive index of the coreless fiber.

[0011] 进一步的,所述光纤支架横截面为“一”字型、三角形、方形、菱形、多边形、圆形或椭圆形。 [0011] Further, the optical fiber holder in cross-section "a" shaped, triangular, square, diamond, polygonal, circular or elliptical.

[0012] 进一步的,所述缠绕于光纤支架上的无芯光纤总长度在千米数量级。 [0012] Further, the optical fiber wound around the stent overall length of the coreless fiber in km of magnitude.

[0013] 进一步的,所述无芯光纤总长度在0.1-100千米。 [0013] Further, the total length of the coreless fiber of 0.1 to 100 km.

[0014] 进一步的,所述光源为半导体激光器;所述分光单元为一分光镜;所述耦合单元包括一耦合透镜;所述第一探测器和第二探测器均为光电探测器。 [0014] Further, the light source is a semiconductor laser; the spectroscopic means is a spectroscope; said coupling means comprises a coupling lens; the first and second detectors are photodetectors.

[0015] 进一步的,所述无芯光纤靠近耦合单元的输入端和靠近第二探测器的输出端均设有光纤连接头。 [0015] Further, the coreless fiber input end and an output end adjacent the second coupling proximity detector unit has an optical fiber connector.

[0016] 本发明的有益效果为:利用激光在直径接近基波直径的无芯光纤内传输时的趋肤效应,使在无芯光纤内传播的信号光可被待测物质吸收,进行痕量物质测量;采用光纤传输可大大提高检测信号光在吸收池里的光程,同时避免了分辨率受分光元件和狭缝宽带的影响,从而可有效提高光谱探测的灵敏度,而且体积小,携带方便,适用于气体痕量物质和液体痕量物质的连续、实时、快速的遥感监测,制作成本低。 [0016] Advantageous effects of the present invention are: the use of the skin effect of the laser fundamental wave transmitted within the diameter close to the diameter of the coreless fiber, a signal propagating within the optical fiber core without test substance may be absorbed, for trace substance measured; using optical fiber transmission can be greatly improved the detection signal light absorbing pool optical path, while avoiding the spectral resolution element and the slit affected broadband, thereby effectively increase the sensitivity of detection of the spectrum, and small size, easy to carry for gaseous and liquid substances trace trace species continuous, real-time remote monitoring of rapid, low production cost.

附图说明 BRIEF DESCRIPTION

[0017] 图1为本发明测量系统实施例一结构示意图; [0017] Fig 1 a schematic view of a configuration example of the measurement system of the present embodiment of the invention;

图2为图1所示实施例一仰视示意图; FIG 2 is a schematic diagram of a bottom view of the embodiment shown in Figure 1;

图3为本发明测量系统实施例二结构示意图。 FIG 3 is a schematic structural diagram of embodiment of the invention two measurement systems.

[0018] 附图标不:10、半导体激光器;20、分光镜;30、稱合透镜;40、光纤连接头;50、无芯光纤;60、光纤支架;61、第一层支架;62、第二层支架;71、第一探测器;72、第二探测器。 [0018] The reference numeral not: 10, a semiconductor laser; 20, a beam splitter; 30, bonding said lens; 40, an optical fiber connector; 50, coreless fiber; 60, the optical fiber holder; 61, a first layer support; 62, Layer holder; 71, a first detector; 72, a second detector.

具体实施方式 detailed description

[0019] 下面结合附图和具体实施方式,对本发明做进一步说明。 [0019] accompanying drawings and the following detailed description, the present invention will be further described.

[0020] 本发明的痕量物质浓度测量系统采用接近基波直径的无芯光纤传导检测用信号光,利用长度达千米量级的无芯光纤表面激光的趋肤效应,使在无芯光纤内传播的信号光可被待测物质吸收,进行气体或液体中痕量物质的浓度检测。 [0020] trace substance concentration measurement system according to the present invention employs a conductive near the coreless fiber diameter of the fundamental wave light detection signal using the skin effect of the laser surface of the coreless fiber length of the order of kilometers, so that in the coreless fiber propagating light signal in the test substance can be absorbed, the gas or the liquid concentration detection of trace substances. 具体的,该痕量物质浓度测量系统,包括依光路设置的光源、分光单元、耦合单元、无芯光纤、第二探测器,以及设于分光单元一侧的第一探测器。 Specifically, the trace substance concentration measurement system, comprising a light source disposed in an optical path by spectroscopic means, coupling means, coreless fiber, a second detector, and a detector disposed on a first side of the spectroscopic unit. 其中,无芯光纤无叠加并排缠绕在一光纤支架上;分光单元将光源发出的光分为参考光和信号光,参考光直接入射到第一探测器,信号光经耦合单元耦合到无芯光纤内,经无芯光纤入射到第二探测器。 Wherein the non-overlapping parallel coreless fiber wound on a fiber holder; spectroscopic unit into the reference light source emits light and the signal light, the reference light is incident directly to the first detector, signal light is coupled to the coupling unit via the coreless fiber within, the coreless fiber is incident on the second detector. 无芯光纤直径接近信号光基波直径,信号光在无芯光纤内传输过程中,信号光趋于光纤表面,可被待测痕量物质吸收。 Coreless fiber diameter close to the diameter of the fundamental wave of the signal light, the signal light in the coreless fiber transmission, the signal light tends surface of the fiber, trace amounts of the test substance may be absorbed. 即无芯光纤直径略小于、等于或略大于信号光基波直径,与基波直径相当,使得信号光在无芯光纤内传播时可产生趋肤效应。 I.e. coreless fiber diameter slightly less than, equal to or slightly larger than the diameter of the signal light of the fundamental wave, the fundamental wave corresponding to diameter, so that the signal light can be generated when the skin effect in the coreless fiber propagation.

[0021] 优选的,缠绕于光纤支架上的无芯光纤总长度在千米数量级,如I千米或10千米,或是0.1-100千米之间。 [0021] Preferably, the optical fiber is wound on the stent overall length of the coreless fiber in km of magnitude, such as I kilometers or 10 kilometers, or between 0.1 and 100 km. 采用光纤传输可大大提高检测信号光在吸收池里的光程,同时避免了分辨率受分光元件和狭缝宽带的影响,从而可有效提高光谱探测的灵敏度,而且体积小,携带方便,适用于气体痕量物质和液体痕量物质的连续、实时、快速的遥感监测,制作成本低。 Using optical fiber transmission can be greatly improved the detection of the signal light optical path in the absorbing pool while avoiding influence by the spectral resolution element and the slit broadband, thereby effectively increase the sensitivity of detection of the spectrum, and small size, easy to carry, suitable for trace trace gas substance and a liquid substance continuously, real-time remote monitoring of rapid, low production cost.

[0022] 如图1和2所示的实施例一,光纤支架60为单层支架,千米量级长度的无芯光纤50无叠加并排缠绕于该光纤支架60上,测量时将该缠绕有无芯光纤50的光纤支架60置于吸收池内。 Illustrated embodiment [0022] Figures 1 and 2 a, the fiber holder 60 is a single bracket, the coreless fiber length of the order of kilometers of 50 non-overlapping side by side is wound on the fiber holder 60, the wound measured coreless fiber optical fiber holder 60 50 placed absorption pool. 半导体激光器10发出的激光经分光镜20分为参考光和信号光,参考光直接入射到第一探测器71,信号光由耦合透镜30耦合到无芯光纤50内,信号光在无芯光纤50内传输时趋于光纤表面,可被吸收池内的痕量物质吸收,最后由无芯光纤50输出具有吸收光谱信息的信号光,并由第二探测器72接收。 Laser light emitted from the semiconductor laser 10 via the beam splitter 20 is divided into reference light and signal light, the reference light is incident directly to the first detector 71, the signal light is coupled by the coupling lens 30 to the coreless fiber 50, the signal light in the optical fiber 50 a coreless when the surface of the fiber tends to transfer, it can be absorbed by the absorbent material pool traces, and finally the optical absorption spectrum of the signal by the output information having the coreless fiber 50, 72 received by the second detector. 通过对第一探测器71和第二探测器72的信号进行处理和数据分析,可得出被测气体或液体中痕量物质的含量。 By the first signal detector 71 and second detector 72 for processing and analysis of data, the content can be drawn in the measured gas or liquid trace species.

[0023] 如图3所示的实施例二,与实施例一不同的是,光纤支架60包括两个嵌套设置的支架:第一层支架61和第二层支架62,同样千米量级长度的无芯光纤50无叠加并排缠绕于第一层支架61和第二层支架62上,可减少光纤支架60的体积,从而进一步缩小该测量系统的体积。 [0023] Example 3 of Figure 2, with a different embodiment, the fiber holder 60 comprises two nested stent disposed: a first layer and a second layer bracket 61 bracket 62, the same order of kilometers the length of the coreless fiber 50 is wound side by side without superimposing on the first layer and the second layer bracket 61 bracket 62 can reduce the volume of the fiber holder 60, thereby further reducing the volume of the measurement system. 其中,缠绕于嵌套的第一层支架61上的无芯光纤50和第二层支架62上的无芯光纤50首尾相互熔接在一起,即第一层支架61上的无芯光纤50输出端与第二层支架62上的无芯光纤50输入端相互熔接。 Wherein the coreless fiber is wound on the first layer in the nested bracket 61 and the second layer 50 on the coreless fiber holder 62 to each other are welded together end to end 50, 50 on the output end of the coreless fiber holder 61, i.e., a first layer 50 and the input terminal of the coreless fiber layer on the second bracket 62 welded to each other.

[0024] 如上,还可以设置第三层支架、第四层支架等,多层支架嵌套。 [0024] As above, the stent may be provided a third layer, the fourth layer such as a stent, stent nested multilayer.

[0025] 上述各实施例中,无芯光纤50的总长度可根据灵敏度要求和光纤损耗等因素,设置为几百米、I千米或几十千米等不同的长度。 [0025] each of the above embodiments, the total length of the coreless fiber 50 according to the requirements of sensitivity and fiber loss and other factors, is set to a few hundred meters, the I kilometers or tens of kilometers, such as different lengths. 光纤支架60、第一层支架61和第二层支架62表面均涂覆有低折射率膜层,低折射率膜层的折射率小于所述无芯光纤的折射率,以防止信号光在无芯光纤50传输过程中无芯光纤50与光纤支架60接触处发生漏光。 Fiber holder 60, a first bracket 61 and the second layer surface of the support layer 62 is coated with a low refractive index layer, the low refractive index film layer is smaller than the refractive index of the coreless fiber to prevent signal light without optical fiber 50 during transport coreless fiber 50 and the optical fiber holder 60 contacts the light leakage. 无芯光纤折射率一般在1.5左右,所以该膜层折射率要求小于1.5,越小越好,接近空气折射率为优选。 The refractive index of the coreless fiber is generally about 1.5, so the requirement is less than 1.5 refractive index film layer, the smaller the better, preferably close to the refractive index of air. 光纤支架60横截面可以为“一”字型、三角形、方形、菱形、多边形、圆形或椭圆形等形状。 Fiber holder 60 cross-section may be "a" shaped, triangular, square, diamond, polygonal, circular or oval shape. 第一探测器71和第二探测器72均为光电探测器。 A first detector 71 and second detector 72 are photodetectors. 无芯光纤50靠近耦合透镜30的输入端和靠近第二探测器72的输出端均设有光纤连接头40。 50 near the input end of the coupling lens 30 and the coreless fiber output end adjacent the second detector 72 are provided an optical fiber connector 40.

[0026] 尽管结合优选实施方案具体展示和介绍了本发明,但所属领域的技术人员应该明白,在不脱离所附权利要求书所限定的本发明的精神和范围内,在形式上和细节上对本发明做出的各种变化,均为本发明的保护范围。 [0026] While the preferred embodiment in conjunction with the specific embodiment shown and described the present invention, those skilled in the art will appreciate that within the spirit and scope of the invention without departing from the appended claims as defined by the form and details , the scope of the present invention, various modifications are made in the present invention.

Claims (10)

  1. 1.一种痕量物质浓度测量系统,其特征在于:包括依光路设置的光源、分光单元、耦合单元、无芯光纤、第二探测器,以及设于分光单元一侧的第一探测器;所述无芯光纤无叠加并排缠绕在一光纤支架上;所述分光单元将光源发出的光分为参考光和信号光,所述参考光直接入射到第一探测器,所述信号光经耦合单元耦合到无芯光纤内,经无芯光纤入射到第二探测器;所述无芯光纤直径接近信号光基波直径,所述信号光在无芯光纤内传输过程中,信号光趋于光纤表面,可被待测痕量物质吸收。 A trace substance concentration measurement system, comprising: a light source comprising an optical path provided by the spectroscopic unit, a coupling unit, coreless fiber, a second detector, and a detector disposed on a first side of the spectroscopic unit; the non-overlapping parallel coreless fiber wound on a fiber holder; the spectroscopic unit light source emits reference light and signal light into the reference light is incident directly to the first detector, the optical signal is coupled unit is coupled to the coreless fiber, the coreless fiber incident on the second detector; the coreless fiber diameter close to the diameter of a fundamental wave of the signal light, the signal light in the coreless fiber transmission, the signal light tends fiber surface, can be absorbed by the test trace substances.
  2. 2.如权利要求1所述痕量物质浓度测量系统,其特征在于:所述光纤支架为单层支架。 1 2. The trace substance concentration measurement system as claimed in claim, wherein: said optical fiber holder is a single bracket.
  3. 3.如权利要求1所述痕量物质浓度测量系统,其特征在于:所述光纤支架为多个支架嵌套设置。 1 3. The trace substance concentration measurement system as claimed in claim, wherein: the plurality of nested stent is disposed the optical fiber holder.
  4. 4.如权利要求3所述痕量物质浓度测量系统,其特征在于:缠绕于所述嵌套的各个支架上的无芯光纤首尾相互熔接在一起。 4. The trace substance concentration measurement system 3 as claimed in claim wherein: the coreless fiber wound end to end on each of the brackets welded to the nested together.
  5. 5.如权利要求1-4任一项所述痕量物质浓度测量系统,其特征在于:所述光纤支架表面涂覆有低折射率膜层,所述低折射率膜层的折射率小于所述无芯光纤的折射率。 5. The trace a substance concentration measurement system according to any of claims 1-4, characterized in that: said fiber holder is coated with a surface layer of low refractive index, the refractive index of the low refractive index layer is smaller than the said coreless fiber refractive index.
  6. 6.如权利要求1-4任一项所述痕量物质浓度测量系统,其特征在于:所述光纤支架横截面为“一”字型、三角形、方形、菱形、多边形、圆形或椭圆形。 6. The trace a substance concentration measurement system according to any of claims 1-4, characterized in that: said optical fiber holder in cross-section "a" shaped, triangular, square, diamond, polygonal, circular or elliptical .
  7. 7.如权利要求1-4任一项所述痕量物质浓度测量系统,其特征在于:所述缠绕于光纤支架上的无芯光纤总长度在千米数量级。 7. The trace a substance concentration measurement system according to any of claims 1-4, characterized in that: said optical fiber holder is wound on the total length of the coreless fiber in km of magnitude.
  8. 8.如权利要求6所述痕量物质浓度测量系统,其特征在于:所述无芯光纤总长度在0.1-100 千米。 6 8. The trace substance concentration measurement system as claimed in claim, characterized in that: the total length of the coreless fiber of 0.1 to 100 km.
  9. 9.如权利要求1-4任一项所述痕量物质浓度测量系统,其特征在于:所述光源为半导体激光器;所述分光单元为一分光镜;所述耦合单元包括一耦合透镜;所述第一探测器和第二探测器均为光电探测器。 9. The trace a substance concentration measurement system according to any of claims 1-4, characterized in that: said light source is a semiconductor laser; the spectroscopic means is a spectroscope; said coupling means comprises a coupling lens; the said first and second detectors are photodetectors.
  10. 10.如权利要求1-4任一项所述痕量物质浓度测量系统,其特征在于:所述无芯光纤靠近耦合单元的输入端和靠近第二探测器的输出端均设有光纤连接头。 10. The one trace substance concentration measurement system according to any of claims 1-4, characterized in that: said coupling means near the coreless fiber input terminal and the output terminal adjacent to the second detector has an optical fiber connector .
CN 201310731440 2013-12-26 2013-12-26 System for measuring concentration of trace substance CN104749102A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1195582A1 (en) * 2000-10-09 2002-04-10 Eidgenössische Technische Hochschule Zürich Fiber optic sensor with an optical resonator
CN1628241A (en) * 2002-05-29 2005-06-15 普林斯顿大学理事会 Method and apparatus for enhanced evanescent field exposure in an optical fiber resonator for spectroscopic measurement of trace species
CN201163269Y (en) * 2007-11-21 2008-12-10 重庆川仪总厂有限公司;重庆大学 Laser absorptive spectrum trace amount gas analyzer
CN101504366A (en) * 2009-03-10 2009-08-12 哈尔滨工业大学 Oxygen concentration detecting instrument
CN102967566A (en) * 2012-11-14 2013-03-13 广东汉唐量子光电科技有限公司 High-precision and high-speed trace analysis device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1195582A1 (en) * 2000-10-09 2002-04-10 Eidgenössische Technische Hochschule Zürich Fiber optic sensor with an optical resonator
CN1628241A (en) * 2002-05-29 2005-06-15 普林斯顿大学理事会 Method and apparatus for enhanced evanescent field exposure in an optical fiber resonator for spectroscopic measurement of trace species
CN201163269Y (en) * 2007-11-21 2008-12-10 重庆川仪总厂有限公司;重庆大学 Laser absorptive spectrum trace amount gas analyzer
CN101504366A (en) * 2009-03-10 2009-08-12 哈尔滨工业大学 Oxygen concentration detecting instrument
CN102967566A (en) * 2012-11-14 2013-03-13 广东汉唐量子光电科技有限公司 High-precision and high-speed trace analysis device

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